CN205692794U - A kind of transmission electron microscope sample table for observing three-dimensional atom probe sample - Google Patents
A kind of transmission electron microscope sample table for observing three-dimensional atom probe sample Download PDFInfo
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- CN205692794U CN205692794U CN201620409217.2U CN201620409217U CN205692794U CN 205692794 U CN205692794 U CN 205692794U CN 201620409217 U CN201620409217 U CN 201620409217U CN 205692794 U CN205692794 U CN 205692794U
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- electron microscope
- transmission electron
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- sample table
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Abstract
This utility model is a kind of transmission electron microscope sample table for observing three-dimensional atom probe sample, and transmission electron microscope sample table includes specimen holder main body, pressing section, automatic reset device and guide rail；Guide rail connects one end of specimen holder main body, has notch at this end of specimen holder main body, is provided with circular arc kerve, is set to rectangular step, and is provided with stairstepping through hole in the end of kerve at the notch of kerve in notch at axle center；Pressing section includes briquetting and for compressing the eccentric of briquetting；On briquetting, symmetrical sample bar main body kerve has the circular arc cell body that shape is identical, and a boss of leading for this briquetting is arranged in stairstepping through hole；Automatic reset device is spring and is led a boss and pass.This utility model provides simple in construction, it is easy to processing and safeguards, wide-angle can verting, three-dimensional atom probe sample can be loaded directly into, and use as transmission electron microscope three-dimensionalreconstruction specimen holder, it is thus achieved that transmission electron microscope picture can directly correct the reconstruction result of three-dimensional atom probe data.
Description
Technical field
This utility model relates to a kind of observing three-dimensional atom probe sample three-dimensional appearance and the transmission electron microscope sample table of structure,
Belong to nano material micro-raman spectra, composition, the three dimensions characterizing method of atomic structure three unification.
Background technology
Transmission electron microscope is widely used in the field such as material science and life sciences as important characterization method, with
" see with one's own eyes " and " Real Time Observation " and famous.Transmission electron microscope is commonly used to observe the two-dimensional appearance of nano material, knot
Structure projection and analysis micro-area composition, it reaches sub-angstrom level not in the resolution of two-dimensional space, it can clearly be observed that material knot
Structure atom post projection under specific orientation.Along with the development of super energy depressive spectroscopy, the most state-of-the-art electronic display
The Microanalysis of micro mirror can also reach atomic level, the atom post composition can being accurately detected in rock-steady structure.But
All these information Dou Shi two-dimensional projection, namely the two-dimensional space resolution of transmission electron microscope can reach atom level
Other, but relatively low along the microscopical resolution ratio of electronics on the direction of electron beam incidence.Therefore, transmission electron microscope is three
The resolution of dimension space is the most restricted, can only be obtained the three-dimensional appearance figure of material at present by electronics chromatographic technique, optimal
Resolution is at about 1nm.Although in recent years, some electron microscopics scholar is devoted to improve transmission electricity by the research of method always
The microscopical three dimensions resolution of son, but these methods are the most immature, limited by various concrete conditions, must be such as
Known structure, it is known that composition etc..Three-dimensional atom probe technology be latest developments get up there is on three dimensions single atom
Resolution, and the advanced technology of single atomic component information can also be detected.Three-dimensional atom probe by time of-flight mass spectrometer and
Controlling filed ion excitation system two parts form, single atom ionizing under high voltage electric field effect of nanometer pinpoint specimen surface
Field excitation leaves sample surfaces, arrives at the position sensitive detector beyond fixed range with certain flight speed and time, enters
And realize ion mass spectrum identification one by one, such that it is able to obtain the composition distributed in three dimensions information of material, and can arrive the most former
The ultrahigh resolution of sub-yardstick.But, this resolution is not that experiment can obtain every time, and only at particular case
The lower crystallography information that could obtain material, these data all depending on experiment condition and researcher individual process experience.
In sum, if transmission electron microscope and these two advanced technology of three-dimensional atom probe technology effectively can have been combined
Come, many material science problems can be solved at Three-dimensional atom yardstick.
If sample can be carried out transmission electron microscope observation, in three-dimensional doing before three-dimensional atom probe characterizes experiment
Atom probe data processing procedure makes reference with the typical characteristic in transmission electron microscope photo, can obtain reliably three
Dimension space has the composition information of atom definition.(Ultramicroscopy 108 (2008) 1579-such as Ilke Arslan
1585) attempt have studied electronics chromatographic technique first and three-dimensional atom probe technology be combined with each other the feasibility having complementary advantages, send out
It is good that the Ag-Al granule that existing two kinds of technology obtain mates in three dimensions.(the Physics Review such as M.Herbig
Letters 112 (2014) 126103-1-5) utilize the sample for use in transmitted electron microscope bar of Japanese JEOL company after repacking
(Microscopy Research and Technique (2012) 75 484-491) is loaded with the nanoneedle of three-dimensional atom probe
Point sample carries out transmission electron microscope observing, then by the result of three-dimensional atom probe and transmission electron microscope results matching, it is thus achieved that different
Element segregation situation on type crystal boundary.
Said method is only adapted in Japan's JEOL ultramicroscope, and the scope of application is little, and there is following defect: (1)
Inconvenient operation, sample installation process needs many handss to work simultaneously, and nanometer pinpoint is because of the work of briquetting power in operation
With being easily broken, success rate is the lowest；(2) specimen holder can not carry out wide-angle and verts, and can only obtain the two dimension of nanometer pinpoint
Pattern, it is impossible to obtain the result of the three-dimensional high definition X rays topographs of nanometer pinpoint, transmission electron microscope and three-dimensional atom probe also
It it not real three dimensions matching.
Utility model content
The problem existed for prior art, the purpose of this utility model is to provide one can load three-dimensional atom probe
The example of transmission electron microscope bar of nanometer pinpoint sample or pinpoint array sample.And sample can be realized at transmission electron microscopy
In mirror, wide-angle is verted (± 75 °), can obtain the three-dimensional high definition shape appearance figure of needle point sample eventually through reconstruction software.
To achieve these goals, this utility model is achieved by the following technical solution:
A kind of transmission electron microscope sample table for observing three-dimensional atom probe sample, including:
One specimen holder main body, its one end has notch, and the bottom of notch is provided with at the bottom of circular arc at specimen holder main body axle center
Groove, is set to rectangular step, and is provided with stairstepping through hole in the end of circular arc kerve at the notch of this circular arc kerve；
One makes the guide rail that transmission electron microscope sample table ± 75 ° rotate, described guide rail connect the fluting end of specimen holder main body；
And for clamping the pressing section of sample, described pressing section includes briquetting and for compressing the bias of briquetting
Wheel, on briquetting, symmetrical sample bar main body kerve has the circular arc cell body that shape is identical, and a boss of leading for this briquetting is arranged on
In stairstepping through hole；
Additionally, also include that one is led a boss through automatic reset device, automatic reset device is spring.
Specimen holder main body one end otch be long by 12～14mm, wide 2～3mm, the degree of depth be the notch of 12～14mm；Specimen holder
The circular arc kerve of main body and and the briquetting of its symmetry on circular arc cell body be: radius between 0.7～0.8mm, flute length
Between 8～10mm, the height of rectangular step is between 0.1～0.5mm, and step width is between 1.5～2.0mm.In order to just
Up and down unobstructed in briquetting, notch rear end additional one with width of rebate, the semi-cylindrical afterbody of matched.
Further, briquetting length is between 12～14mm, and wide between 2～3mm, thickness is between 0.8～1.2mm.Pressure
A boss of leading on block is made up of upper and lower two-layer boss, two-layer boss diameter respectively 1.8～2.2mm and 1.3～1.7mm it
Between.
Further, eccentric is fixed on specimen holder main body by bearing pin, and eccentric employing should be little to the power that briquetting applies
In the eccentric of 5N, radius is between 0.5～2mm.
Preferably, eccentric width between 2～3mm, overall length between 5～6mm, front end handle thickness 1～1.5mm it
Between, the distance of handle front end to pin hole center is between 4.5～6mm.
Preferably, eccentric passes through pulling needle activity, and eccentric front end handle is provided with a diameter of 0.5mm, and the degree of depth is 2～4mm
Cylindrical holes be pulling needle on position.
Further, the external diameter of spring is arranged between 2～3mm, and central diameter is between 2～2.5, and its length is 2～5mm
Between.
Rotating to realize transmission electron microscope sample table wide-angle (± 75 °), the guide rail in transmission electron microscope sample table is set to
Two, the outer distance between two guide rails is between 3.5～5.0mm, and the width of guide rail is between 0.8～1.2mm, and height exists
Between 0.8～1.2mm.
Guide rail is that interference fit is arranged in specimen holder main body, and is carved with nanometer pinpoint sample location mark in guide rail front end
Note.
This utility model is compared compared with prior art has following remarkable advantage:
Transmission electron microscope sample table the most of the present utility model, it is achieved that can directly observe three-dimensional in transmission electron microscope
The sample of atom-probe, provides a kind of visual criterion for three-dimensional atom probe data reconstruction；
2. the sample stage more convenient operation in this utility model, can realize singlehanded behaviour as common uniclinal specimen holder
Make, X-direction wide-angle can be realized simultaneously and vert, the three-dimensional of nanometer pinpoint can be obtained by electronics chromatography Three Dimensional Reconfiguration
Image；
3. three-dimensional atom probe technology and transmission electronic microscope technology are combined by this utility model effectively,
Achieve the composition information of visual single atom and the block structure information of correspondence on atomic scale, fully combine two kinds
The respective advantage of advanced characterization technology.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of specimen holder main body in this utility model；
Fig. 2 is the schematic diagram of eccentric in this utility model；
Fig. 3 is with leading a schematic diagram for boss briquetting in this utility model；
Fig. 4 is sample stage integral installation figure in this utility model；
Wherein, 1, specimen holder main body；2, eccentric；3, briquetting；4, automatic reset device；5, guide rail.
Detailed description of the invention
Below in conjunction with the accompanying drawings and this utility model is further described by embodiment:
A kind of transmission electron microscope sample table for observing three-dimensional atom probe sample, sample for use in transmitted electron microscope
Platform includes:
One specimen holder main body 1, its one end fluting, bottom land is provided with circular arc kerve at specimen holder main body 1 axle center, this circular arc
It is set to rectangular step at the notch of shape kerve, and is provided with stairstepping through hole in the end of circular arc kerve；
One makes the guide rail 5 that transmission electron microscope sample table ± 75 ° rotate, described guide rail 5 connect the fluting of specimen holder main body 1
End；
And for clamping the pressing section of sample, described pressing section includes briquetting 3 and for compressing the inclined of briquetting 3
Heart wheel 2, the fixing power that eccentric 2 applies is smaller, and be power be gradually transition, do not have the power of increase suddenly and produce and shake
Move thus destroy sample needle point.On briquetting 3, symmetrical sample bar main body 1 kerve has the circular arc cell body that shape is identical, and this pressure
A boss of leading for block 3 is arranged in stairstepping through hole；
Additionally, also include that one is led a boss through automatic reset device 4, automatic reset device 4 is spring.
Slot as the groove that long by 12～14mm, wide 2～3mm, the degree of depth are 12～14mm in specimen holder main body 1 one end；Specimen holder master
The circular arc kerve of body 1 and and the briquetting 3 of its symmetry on circular arc cell body be: radius between 0.7～0.8mm, flute length
Between 8～10mm, the height of rectangular step between 0.1～0.5mm, step width between 1.5～2.0mm, this practicality
The novel rectangular step that arranges is the folder platform for clamping outside copper removal pipe.
Briquetting 3 is long between 12～14mm, and wide between 2～3mm, thickness is between 0.8～1.2mm.
A boss of leading on briquetting 3 is made up of upper and lower two-layer boss, and two-layer boss diameter is respectively 1.8～2.2mm and 1.3
～between 1.7mm.Being set to the design of two-layer boss is to guide to resetting means spring, making spring vertical telescopic, be unlikely to
Deflect.
The mode compressing sample that this utility model provides is to use eccentric mechanism to compress,
Eccentric 2 is fixed on specimen holder main body 1 by bearing pin, and eccentric 2 uses the power applying briquetting 3 to should be less than 5N's
Eccentric, radius is between 0.5～2mm.
Eccentric 2 width between 2～3mm, overall length between 5～6mm, front end handle thickness between 1～1.5mm, handle
Front end to the distance at pin hole center between 4.5～6mm.
Eccentric 2 is by pulling needle activity, and eccentric front end handle is provided with a diameter of 0.5mm, and the degree of depth is the cylinder of 2～4mm
Shape aperture is pulling needle on position.
When on the circular arc kerve that load sample copper pipe or specialty folder platform are placed on sample stage or rectangular step, dial by pulling needle
Movable eccentric wheel, circular arc kerve on briquetting or rectangular step contact with load sample copper pipe or specialty folder platform, and eccentric passes through briquetting
The power on load sample copper pipe or specialty folder platform that is applied to, less than 5 Ns, is used for fixing sample, copper pipe will not be made again to deform simultaneously.
Additionally, in this utility model, by utilizing eccentric and briquetting device can will have receiving of different length size
Rice needle point or array sample are fixed in specimen holder main body, and after sample is observed in transmission electron microscope, taking off can be direct
It is put in three-dimensional atom probe instrument and is further observed.
Spring outer diameter is between 2～3mm, and central diameter is between 2～2.5, and its length is between 2～5mm.
When taking sample when, lifting eccentric by pulling needle, briquetting upwards resets under the support force effect of spring, both may be used
To be easy to take out sample from sample stage with tweezers, then it is made without any process and directly puts three-dimensional atom probe into
Instrument carries out subsequent characterizations.
This utility model verts (± 75 °) to realize making sample stage carry out wide-angle, in order to the three-dimensional shaped of reconstruct sample
Looks, therefore it is provided with guide rail structure；Wherein, spacing, width between the quantity of guide rail 5, guide rail 5 and highly determine sample stage
Inclination angle.
Guide rail 5 in transmission electron microscope sample table is set to two, and the outer distance between two guide rails 5 is 3.5～5.0mm
Between, the width of guide rail 5 is between 0.8～1.2mm, and height is between 0.8～1.2mm.
Guide rail 5 is to be arranged in specimen holder main body 1 by interference fit, and is carved with nanometer pinpoint sample in guide rail 5 front end
Telltale mark.
Embodiment
The present embodiment improves in the specimen holder main body 1 of existing sample for use in transmitted electron microscope bar, uses above-mentioned structure,
It is separately machined that two position guiding rods are set, then uses the mode of interference fit to embed in the draw-in groove of specimen holder main body.Two guide rails
Between maximum outer distance be 4.3mm, guide rail width is 1mm, height be 1mm.The long 13mm of notch of briquetting and eccentric, wide
2.5mm, highly from the top of specimen holder main body up to center.Up and down unobstructed for the ease of briquetting, notch rear end is additional
One with width of rebate, the semi-cylindrical afterbody of matched.In the bottom of notch, according to load sample copper pipe and the shape of specialty folder platform
Shape size design circular arc kerve and rectangular step, in order to copper pipe and folder platform location.The radius of circular arc kerve is
0.745mm, rectangular step is positioned on circular arc kerve, and shoulder height is 0.31mm, and step width is 1.6mm.Kerve and platform
Rank are 9.5mm along metallic rod axial depth.The rear end of pocket bottom devises stairstepping through hole, be used for disposing briquetting boss and
Spring.The a diameter of 2.5mm of top half in hole, high 1.6mm, a diameter of 1.5mm in the latter half, and penetrate specimen holder.Such as Fig. 2 institute
The eccentric shown, eccentric radius variable is between 0.5～2mm, it is ensured that its power about 2N applying briquetting (or sample).Partially
Heart wheel width is 2.5mm, and overall length is 5.8mm, and the thickness of front end handle is 1mm, and the distance of pommel to pin shaft hole center is 5mm.Before
Being set to a footpath on end handle is 0.5mm, and the deep cylindrical holes for 3mm is pulling needle on position, in order to eccentric 2 can lead to
Cross pulling needle up and down.Eccentric 2 is fixed on bearing pin, a diameter of 0.6mm of bearing pin, long 4mm.Briquetting 3 is arranged on eccentric 2
Under, as it is shown on figure 3, briquetting thickness is 1mm.Circular arc kerve that 3 front ends of briquetting are provided with and rectangular step with on sample stage
Kerve and step one_to_one corresponding, it is ensured that be contacting of face between briquetting 3 with copper pipe and folder platform.With a two-stage bottom briquetting 3
Cylindrical boss, a diameter of 2mm of first order boss, outer surface cover back-moving spring.A diameter of 1.5mm of second level boss,
For leading position, it is ensured that briquetting about 3 moves vertically.
Observation three-dimensional atom probe sample of the present utility model (nanometer pinpoint or array sample) three-dimensional appearance and structure
The lift-launch of nanometer pinpoint is implemented by transmission electron microscope sample table as follows:
1. obtain, according to three-dimensional atom probe preparation method of sample, single nanometer pinpoint sample or the specialty that copper pipe supports
The single-row spininess sample that folder platform loads；
2. by pulling needle, eccentric 2 being pushed the position that front end handle is vertical with sample stage 1, briquetting 3 rises under the action of the spring
To peak；
3. the load sample copper pipe of fixing needle-like sample rear end inserted the circular arc kerve of specimen holder main body 1 or will be loaded with
The specialty folder platform of single-row spininess sample is placed on rectangular step；
4. by pulling needle, eccentric 2 front end handle is allocated to horizontal level or tweezers rear end and eccentric 2 front end handle is pushed into water
Mean place, briquetting 3 eccentric 2 act under under be about to load sample copper pipe or specialty folder platform fix；
5. sample stage is inserted in transmission electron microscope, observed by X rays topographs and whether check in nanometer pinpoint containing thoughts
The region of interest, and shoot 2-dimentional photo；
6. shoot a series of sample photo by the specimen holder that verts, then according to electron tomography imaging three-dimensional reconfiguration technique
Obtain three-dimensional appearance and the structure picture of nanometer pinpoint；
7. after transmission electron microscope observation is complete, sample stage is taken out from ultramicroscope, repeats the action described in 2,
Take out the load sample copper pipe being fixedly arranged at the front end with nanometer pinpoint sample or the specialty folder platform being mounted with single-row spininess sample, be fed directly to three
Dimension atom-probe carries out next step observation；
8. obtain three-dimensional atom probe data；
9. utilize existing transmission electron microscope data analysis three-dimensional atom probe data, reconstruct data, finally obtain
The three-dimensional atom probe reconfiguration information mated with electron microscope data；
10., by three-dimensional atom probe data and electron microscope data matching, obtain nanometer pinpoint sample and there is atom divide
The three-dimensional composition information of resolution and three dimensional structure information.
Claims (10)
1. the transmission electron microscope sample table being used for observing three-dimensional atom probe sample, it is characterised in that transmission electron microscope sample table
Including:
One specimen holder main body (1), its one end has notch, and the bottom of notch is provided with circular arc at specimen holder main body (1) axle center
Kerve, is set to rectangular step, and is provided with stairstepping through hole in the end of circular arc kerve at the notch of this circular arc kerve；
One makes the guide rail (5) that transmission electron microscope sample table ± 75 ° rotate, described guide rail (5) connect the fluting of specimen holder main body (1)
End；
And for clamping the pressing section of sample, described pressing section includes briquetting (3) and is used for compressing the inclined of briquetting (3)
Heart wheel (2), upper symmetrical sample bar main body (1) kerve of briquetting (3) has a circular arc cell body that shape is identical, and this briquetting (3)
Lead a boss to be arranged in stairstepping through hole；
Additionally, also include that one is led a boss through automatic reset device (4), automatic reset device (4) is spring.
Transmission electron microscope sample table the most according to claim 1, it is characterised in that the notch that specimen holder main body (1) one end is opened
For the notch that long by 12～14mm, wide 2～3mm, the degree of depth are 12～14mm；The circular arc kerve of specimen holder main body (1) and right with it
Claim briquetting (3) on circular arc cell body be: radius between 0.7～0.8mm, flute length between 8～10mm, rectangular step
Height between 0.1～0.5mm, step width is between 1.5～2.0mm.
Transmission electron microscope sample table the most according to claim 1, it is characterised in that described briquetting (3) is long 12～14mm
Between, wide between 2～3mm, thickness is between 0.8～1.2mm.
Transmission electron microscope sample table the most according to claim 3, it is characterised in that lead a boss on described briquetting (3)
Being made up of upper and lower two-layer boss, two-layer boss diameter is respectively between 1.8～2.2mm and 1.3～1.7mm.
Transmission electron microscope sample table the most according to claim 1, it is characterised in that described eccentric (2) is solid by bearing pin
Being scheduled on specimen holder main body (1), eccentric (2) uses the power applying briquetting (3) to should be less than the eccentric of 5N, radius 0.5～
Between 2mm.
Transmission electron microscope sample table the most according to claim 5, it is characterised in that described eccentric (2) width 2～
Between 3mm, overall length is between 5～6mm, and front end handle thickness is between 1～1.5mm, and handle front end exists to the distance at pin shaft hole center
Between 4.5～6mm.
Transmission electron microscope sample table the most according to claim 5, it is characterised in that described eccentric (2) is lived by pulling needle
Dynamic, eccentric front end handle is provided with a diameter of 0.5mm, the degree of depth be the cylindrical holes of 2～4mm be pulling needle on position.
Transmission electron microscope sample table the most according to claim 1, it is characterised in that described spring outer diameter 2～3mm it
Between, central diameter is between 2～2.5, and its length is between 2～5mm.
9. according to the transmission electron microscope sample table according to any one of claim 1-8, it is characterised in that in transmission electron microscope sample table
Guide rail (5) be set to two, the outer distance between two guide rails (5) is between 3.5～5.0mm, and the width of guide rail (5) exists
Between 0.8～1.2mm, height is between 0.8～1.2mm.
Transmission electron microscope sample table the most according to claim 9, it is characterised in that described guide rail (5) is interference fit peace
It is contained in specimen holder main body (1), and is carved with nanometer pinpoint sample telltale mark in guide rail (5) front end.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620409217.2U CN205692794U (en) | 2016-05-07 | 2016-05-07 | A kind of transmission electron microscope sample table for observing three-dimensional atom probe sample |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620409217.2U CN205692794U (en) | 2016-05-07 | 2016-05-07 | A kind of transmission electron microscope sample table for observing three-dimensional atom probe sample |
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Family
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105810543A (en) * | 2016-05-07 | 2016-07-27 | 南京理工大学 | Transmission electron microscope sample table for observing three-dimensional atom probe test sample |
| CN107315020A (en) * | 2017-07-31 | 2017-11-03 | 中国科学院宁波材料技术与工程研究所 | A kind of chip fixing structure in situ of example of transmission electron microscope bar |
| CN113063967A (en) * | 2021-02-18 | 2021-07-02 | 上海大学 | Rotary sample table device capable of realizing three-dimensional atom probe microtip array sample rotation |
| CN114002240A (en) * | 2021-09-27 | 2022-02-01 | 中国科学院广州地球化学研究所 | Electron microscopic three-dimensional reconstruction characterization method for geological sample microstructure |
| CN114203504A (en) * | 2021-11-23 | 2022-03-18 | 百实创(北京)科技有限公司 | Tilting structure of transmission electron microscope sample stage |
-
2016
- 2016-05-07 CN CN201620409217.2U patent/CN205692794U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105810543A (en) * | 2016-05-07 | 2016-07-27 | 南京理工大学 | Transmission electron microscope sample table for observing three-dimensional atom probe test sample |
| CN105810543B (en) * | 2016-05-07 | 2017-11-14 | 南京理工大学 | A kind of transmission electron microscope sample table for being used to observe three-dimensional atom probe sample |
| CN107315020A (en) * | 2017-07-31 | 2017-11-03 | 中国科学院宁波材料技术与工程研究所 | A kind of chip fixing structure in situ of example of transmission electron microscope bar |
| CN107315020B (en) * | 2017-07-31 | 2023-08-04 | 中国科学院宁波材料技术与工程研究所 | In-situ chip fixing structure of transmission electron microscope sample rod |
| CN113063967A (en) * | 2021-02-18 | 2021-07-02 | 上海大学 | Rotary sample table device capable of realizing three-dimensional atom probe microtip array sample rotation |
| CN114002240A (en) * | 2021-09-27 | 2022-02-01 | 中国科学院广州地球化学研究所 | Electron microscopic three-dimensional reconstruction characterization method for geological sample microstructure |
| CN114203504A (en) * | 2021-11-23 | 2022-03-18 | 百实创(北京)科技有限公司 | Tilting structure of transmission electron microscope sample stage |
| CN114203504B (en) * | 2021-11-23 | 2023-10-24 | 百实创(北京)科技有限公司 | Tilting structure of transmission electron microscope sample stage |
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