CN115584479A - Diamond film plating device - Google Patents

Abstract

The utility model belongs to the technical field of diamond coating and specifically relates to a device of diamond-plated membrane is related to, and it includes the coating film cavity and installs coating film cavity one side is right the vacuum pump that the coating film cavity carries out the evacuation, the coating film cavity with be connected with the vacuum tube between the vacuum pump, keeping away from of coating film cavity one side of vacuum pump is connected with the subassembly that admits air, middle part in the coating film cavity is provided with the filament, the filament is placed perpendicularly, the both ends of filament are connected with the power, the both sides of filament are provided with two substrate platforms that are used for placing the sample, two the substrate platform is about the filament symmetry sets up. This application can guarantee when promoting coating film efficiency that the sample coating film in different positions is even.

Description

Diamond film plating device

Technical Field

The application relates to the field of diamond coating, in particular to a diamond coating device.

Background

Diamond is a mineral composed of carbon elements. Diamond is used in a wide variety of applications, often as a cutting tool in the art, industry. The diamond film has higher hardness, good thermal conductivity and extremely low friction coefficient, and the diamond film is plated on the surface of a sample, so that the sample has the performance similar to diamond.

The methods for vapor deposition of diamond include Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD). The physical vapor deposition of diamond film is the main method for depositing diamond film because of high technological requirement, long coating time and low utilization rate.

At present, the chemical vapor deposition diamond coating equipment places a sample to be coated on a platform, a filament is arranged above the sample, reaction gas enters a cavity through a pipeline and is heated and decomposed by the filament, a diamond film grows on the sample, but the structure wastes heat upwards sent by the filament, and the coating efficiency is low. If a substrate platform is added on the filament to improve the coating efficiency, the horizontal filament is influenced by gravity in the coating process, and the middle section of the filament slightly falls, so that the distance between the filament and samples on two sides is different, and the coating of the two samples is not uniform.

Disclosure of Invention

In order to guarantee that the sample coating film in different positions is even when promoting coating film efficiency, this application provides a device of diamond-plated membrane.

The application provides a device of diamond membrane plates adopts following technical scheme:

the utility model provides a device of diamond-plated membrane, includes the coating film cavity and installs the vacuum pump that carries out the evacuation to the coating film cavity in coating film cavity one side, is connected with the vacuum tube between coating film cavity and the vacuum pump, and one side of keeping away from the vacuum pump of coating film cavity is connected with the subassembly that admits air, and the middle part in the coating film cavity is provided with the filament, and the filament is vertical to be placed, and the both ends of filament are connected with the power, and the both sides of filament are provided with two substrate platforms that are used for placing the sample, and two substrate platforms set up about the filament symmetry.

Through adopting above-mentioned technical scheme, place the sample earlier on the substrate platform of filament both sides, through the air suction in with the coating film cavity of vacuum pump for keep vacuum state in the coating film cavity, the rethread subassembly that admits air leads to reaction gas to the coating film cavity in, opens the power again, and the power is the filament circular telegram, and the filament generates heat and decomposes reaction gas, finally plates the diamond film on the sample of filament both sides. Can carry out the coating film to the sample of filament both sides simultaneously, promote coating film efficiency to the filament is vertical to be set up, has avoided the filament under the action of gravity, produces small tenesmus, has guaranteed that the sample in different positions is the same with the distance between the filament, makes the coating film even.

Optionally, the air inlet assembly comprises an air inlet pump arranged on one side of the coating cavity far away from the vacuum pump, an air inlet pipe is connected between the air inlet pump and the coating cavity, a reaction air tank is arranged on one side of the air inlet pump far away from the air inlet pipe, and an air delivery pipe is arranged between the air inlet pump and the reaction air tank.

By adopting the technical scheme, when the sample needs to be plated with the diamond film, the air inlet pump is started, the reaction gas in the reaction gas tank enters the coating chamber through the gas conveying pipe and the gas inlet pipe, and then is decomposed through the hot filament, so that the diamond film is formed on the surface of the sample.

Optionally, the substrate table is provided with a plurality of first sliding grooves and a plurality of second sliding grooves, the first sliding grooves and the second sliding grooves are perpendicular to each other, and a space for inserting bolts is formed between the first sliding grooves and the second sliding grooves.

Through adopting above-mentioned technical scheme, in order to fix the position of sample on the substrate platform, the bolt inserts in first spout or second spout, and the sliding bolt for the bolt slides in first spout or second spout, slides the bolt to the position that is fit for the sample size, puts the sample in the space that a plurality of bolts formed, can fix the sample, and it can to twist the nut soon on the bolt with the position fixing of bolt again.

Optionally, a water circulation assembly is arranged on the outer side of the coating cavity and corresponds to the substrate table one to one, the water circulation assembly comprises a water tank and a water circulation pump which are arranged outside the coating cavity, a water pipe is arranged between the water circulation pump and the water tank, a circulation pipe is connected to one side of the water tank far away from the water pipe and penetrates through the substrate table, and one end of the circulation pipe far away from the water tank is connected with the water circulation pump.

Through adopting above-mentioned technical scheme, after the filament circular telegram generates heat, the substrate platform can absorb the heat that the filament sent, at this moment, opens the water circulating pump, and cold water will circulate between water pipe, water circulating pump, circulating pipe and water tank for substrate platform temperature reduces, takes away the unnecessary heat of sample, maintains the sample temperature, makes the buddha's warrior attendant membrane can plate on the sample better.

Optionally, one end of the filament close to the bottom surface inside the coating chamber is connected with a first pulley, and the first pulley is connected with a power supply through a wire.

By adopting the technical scheme, the first pulley is used for conducting electricity generated by the power supply to the filament, so that the filament is electrified, reaction gas is decomposed, and coating is finished; the setting of first pulley makes the filament be close to the one end of first pulley for the free end, avoids the filament both ends to be fixed, and under the circular telegram state, the extension by heating is crooked to the sample of one side, further guarantees that both sides sample coating film is even.

Optionally, one end of the filament close to the first pulley is connected with a heavy hammer.

By adopting the technical scheme, the arrangement of the heavy hammer enables the lamp filament to be always in a vertical state, so that the samples on two sides are further ensured to be uniformly coated, and the phenomenon that the distance between the samples on two sides and the lamp filament is different to cause uneven coating of diamond films plated on the samples on two sides due to expansion and bending of one side of the lamp filament caused by heat generated by electrifying the lamp filament is avoided.

Optionally, a second pulley is installed on one side of the first pulley, and the second pulley and the first pulley are installed on different vertical lines.

Through adopting above-mentioned technical scheme, the setting of second pulley has changed the direction of weight pulling filament for the contact between filament and the first pulley is inseparabler, makes the electrically conductive condition of first pulley filament better, avoids causing tectorial membrane inefficiency because first pulley and filament contact are bad, and the filament is interrupted the circular telegram and is leaded to the diamond membrane quality of production not good.

Optionally, one side of the coating chamber opposite to the side of the substrate table provided with the first sliding groove is open, and the coating chamber is hinged with a sliding door.

By adopting the technical scheme, after the coating is finished, the current of the filament is slowly reduced, the power supply is turned off, the reaction gas of the coating cavity is pumped out through the vacuum pump, so that the vacuum state is recovered in the coating cavity, the sliding door is opened again, and a sample coated on the substrate table is taken out.

In summary, the present application includes at least one of the following beneficial technical effects:

1. by arranging the coating cavity, the vacuum pump, the vacuum tube, the air inlet assembly, the lamp filament, the power supply and the substrate table, a sample is firstly placed on the substrate table in the coating cavity, air in the coating cavity is completely pumped out by the vacuum pump, the air inlet assembly inputs reaction gas into the coating cavity, the power supply is turned on to heat the lamp filament, the reaction gas is decomposed, coating can be simultaneously carried out on the surfaces of the samples on the two sides of the lamp filament, the coating efficiency is improved, meanwhile, the lamp filament is vertically arranged, the lamp filament cannot be different from the samples on the two sides due to the action of gravity, and the uniformity of coating is ensured;

2. by arranging the water circulating pump, the water pipe, the water tank and the circulating pipe, when the filament is electrified and heated, the substrate platform can absorb heat emitted by the filament, and if the heat is too high, the generation of a diamond film on a sample can be influenced; at the moment, a water circulating pump is opened, and cold water circulates among a water pipe, the water circulating pump, the circulating pipe and a water tank, so that the temperature of the substrate table is reduced, redundant heat of the sample is taken away, and the diamond film can be better plated on the sample;

3. through having set up first pulley, weight and second pulley, the one end that the setting of first pulley made the filament be close to first pulley is the free end, avoids all fixing the both ends of filament, and the filament is heated the extension back, probably to one side sample incline, leads to the coating film uneven, and the weight is flare-out the filament, and the coating film of further guaranteeing both sides sample is even, and the setting of second pulley has changed the pulling force direction of weight for make.

Drawings

Fig. 1 is a schematic view of the overall structure of the present application.

Fig. 2 is a schematic cross-sectional view showing the internal structure of the present application.

Description of the reference numerals: 1. a film coating chamber; 2. a vacuum pump; 3. a vacuum tube; 4. a filament; 5. a power source; 6. a substrate stage; 7. an air intake assembly; 71. an intake pump; 72. an air inlet pipe; 73. a reaction gas tank; 74. a gas delivery pipe; 8. a first chute; 9. a second chute; 10. mounting a plate; 11. a water circulation assembly; 111. a water tank; 112. a water circulation pump; 113. a water pipe; 114. a circulation pipe; 12. a support; 13. a first support frame; 14. a first pulley; 15. a second support frame; 16. a second pulley; 17. a weight; 18. sliding the door; 19. and (4) a handle.

Detailed Description

The present application is described in further detail below with reference to figures 1-2.

The embodiment of the application discloses a diamond film plating device.

Referring to fig. 1 and 2, a device of diamond-plated membrane includes coating film cavity 1 and installs at subaerial vacuum pump 2 that carries out the evacuation to coating film cavity 1, one side of coating film cavity 1 is connected with vacuum tube 3, the one end of keeping away from coating film cavity 1 of vacuum tube 3 is connected with vacuum pump 2, one side of keeping away from of coating film cavity 1 and connecting vacuum tube 3 is connected with air intake assembly 7, filament 4 is installed to the intermediate position in the coating film cavity 1, filament 4 is vertical setting, the both ends of filament 4 are connected with power 5, the 5 rigid couplings of power are on coating film cavity 1's outer wall, the both sides of filament 4 are provided with two substrate platforms 6 that are used for placing the sample, two substrate platforms 6 are vertical setting and set up about filament 4 symmetries.

When the diamond film is plated on a sample, the sample is placed in the coating cavity 1 firstly, the substrate platforms 6 on two sides of the filament 4 are arranged, the vacuum pump 2 is used for pumping out air in the coating cavity, then the reaction gas is led into the coating cavity 1 by the air inlet assembly 7, the power supply 5 is turned on, the filament 4 is powered on by the power supply 5, the filament 4 generates heat, the heat of the filament 4 starts to decompose the reaction gas, the diamond film is plated on the samples on two sides of the filament 4, the filament 4 can plate the samples on two sides of the filament 4 simultaneously, the coating efficiency is improved, and the filament 4 is vertically installed, the filament 4 is prevented from generating small falling under the action of gravity, the distance between the filament and the samples at different positions is the same, and the uniformity of coating is ensured.

Referring to fig. 2, the air intake assembly 7 includes an air intake pump 71 installed on the ground, an air intake pipe 72 connected to one end of the air intake pump 71, and an air delivery pipe 74 connected to one end of the air intake pump 71 away from the air intake pipe 72, the air intake pump 71 is connected to one side of the coating chamber 1 away from the vacuum pump 2 through the air intake pipe 72, and one end of the air delivery pipe 74 away from the air intake pump 71 is connected to a reaction air tank 73. When the diamond film needs to be plated on the sample, the air inlet pump 71 is turned on, the reaction gas in the reaction gas tank 73 is pumped out by the air inlet pump 71, and is filled in the film plating chamber 1 through the air inlet pipe 72 and the air inlet pipe 74, and then the reaction gas is decomposed through the hot filament 4, so that the diamond film is formed on the surface of the sample.

In order to fix the position of the sample on the substrate table 6, a plurality of first sliding grooves 8 and second sliding grooves 9 are formed in the substrate table 6, the first sliding grooves 8 and the second sliding grooves 9 are perpendicular to each other, each first sliding groove 8 is communicated with each second sliding groove 9, and bolts can be inserted into and slide in the first sliding grooves 8 and the second sliding grooves 9.

A plurality of bolts insert in first spout 8 or second spout 9, when needs fixed sample, slide the bolt in first spout 8 or second spout 9, slide the bolt to the position that is fit for the sample size, place the sample in advance in the space that a plurality of bolts formed, then finely tune the position of bolt again and make bolt and sample butt, twist the nut soon at last and fix the sample.

Referring to fig. 1 and 2, mounting plates 10 are fixedly connected to two sides of the exterior of the coating chamber 1, a water circulation assembly 11 is fixedly connected to each mounting plate 10, the water circulation assemblies 11 correspond to the substrate table 6 one by one, each water circulation assembly 11 comprises a water tank 111 and a water circulation pump 112 fixedly connected to the mounting plates 10, a water pipe 113 is connected between each water circulation pump 112 and the corresponding water tank 111, a circulation pipe 114 is connected between one side of the water tank 111 far away from the water circulation pump 112 and one side of the water circulation pump 112 far away from the water tank 111, and the circulation pipe 114 is arranged in the substrate table 6 in a penetrating manner and is fixedly connected with the substrate table 6.

When the filament 4 is electrified to generate heat, the substrate table 6 can absorb the heat emitted by the filament 4, and the quality of the coating film can be possibly influenced; therefore, after the filament 4 reaches a certain high temperature, the water circulation pump 112 is turned on, so that the cold water in the water tank 111 circulates among the water pipe 113, the water circulation pump 112, the circulation pipe 114 and the water tank 111, the cold water takes away the heat of the substrate table 6, the temperature of the substrate table 6 is reduced, the redundant heat of the sample is taken away, the temperature of the sample is maintained, the quality of the coating film is further improved, and the uniformity of the coating film is ensured.

Referring to fig. 2, a support 12 is fixedly connected to the inner upper surface of the coating chamber 1, one end of the filament 4 is fixedly connected to the support 12, the support 12 is connected to the power supply 5 through a lead, a first support frame 13 and a second support frame 15 are fixed to the inner lower surface of the coating chamber 1, the first support frame 13 is connected to the power supply 5 through a lead, the first support frame 13 is rotatably connected to a first pulley 14, and the filament 4 is arranged on the first pulley 14 in an overlapping manner. The second support frame 15 is rotatably connected with a second pulley 16, the second pulley 16 and the first pulley 14 are installed on the same horizontal line, and a heavy hammer 17 is fixedly connected to one end of the filament 4 close to the second pulley 16.

Conducting electricity generated by the power supply 5 to the filament 4 through the first support frame 13, the first pulley 14 and the support 12, so that the filament 4 is electrified to generate heat to decompose reaction gas, and coating is finished; filament 4 sets up on first pulley 14, and the setting of second pulley 16 has changed the direction of the pulling force of weight 17 pulling filament 4 for first pulley 14 is inseparabler with the contact of filament 4, avoids the contact failure of first pulley 14 and filament 4, and causes the tectorial membrane inefficiency, and filament 4 is interrupted the circular telegram and is leaded to the diamond film quality that produces not good.

The first pulley 14 and the second pulley 16 enable one end, close to the first pulley 14, of the filament 4 to be a free end, so that the phenomenon that the two ends of the filament 4 are fixed and the filament 4 extends to bend towards a sample on one side when being heated for a long time in a power-on state, and the coating of the samples on the two sides is uneven is avoided; the weight 17 keeps the filament 4 in a straightened state all the time, so that the samples on the two sides are further uniformly coated.

Referring to fig. 1, the side of the coating chamber 1 opposite to the side of the substrate table 6 provided with the first chute 8 is open, the coating chamber 1 is hinged with a sliding door 18, and a handle 19 is fixedly connected to the outer side of the sliding door 18. After the coating is finished, the current of the filament 4 is slowly reduced, the power supply 5 is turned off, the reaction gas in the coating chamber 1 is pumped out through the vacuum pump 2, so that the reaction gas in the coating chamber 1 is exhausted, the sliding door 18 is opened through the handle 19, and the sample coated on the substrate table 6 is taken out.

The implementation principle of the diamond film plating device in the embodiment of the application is as follows: when a diamond film needs to be plated on a sample, the pull door 18 is opened through the handle 19, the bolt slides in the first sliding chute 8 or the second sliding chute 9, the bolt slides to a position suitable for the size of the sample, the nut is screwed to fix the sample on the substrate table 6, the vacuum pump 2 is used for pumping out air in the film coating cavity, then the air inlet pump 71 is opened, and reaction gas in the reaction gas tank 73 is pumped out by the air inlet pump 71 and is input into the film coating chamber 1 through the gas pipe 74 and the gas inlet pipe 72; the power supply 5 is turned on, and the current is conducted to the filament 4 through the support 12 and the first pulley 14, so that the filament 4 generates heat, and the reaction gas is decomposed to realize film coating.

The weight 17 gives a downward pulling force to the filament 4, and the filament 4 can be kept in a straightened state through the first pulley 14 and the second pulley 16. When the filament 4 is powered on to heat to a certain temperature, the water circulating pump 112 is turned on, so that the cold water in the water tank 111 circulates among the water pipe 113, the water circulating pump 112, the circulating pipe 114 and the water tank 111, the cold water takes away the heat of the substrate stage 6, and the temperature of the sample is maintained. After the coating is finished, the current of the filament 4 is slowly reduced, the power supply 5 is turned off, the reaction gas in the coating chamber 1 is pumped out through the vacuum pump 2, so that the reaction gas in the coating chamber 1 is exhausted, the sliding door 18 is opened through the handle 19, and the sample coated on the substrate table 6 is taken out.

The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereto, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (8)

1. A diamond film plated device, comprising: including coating film cavity (1) and installing coating film cavity (1) one side is right coating film cavity (1) carries out the vacuum pump (2) of evacuation, coating film cavity (1) with be connected with vacuum tube (3) between vacuum pump (2), keeping away from of coating film cavity (1) one side of vacuum pump (2) is connected with air intake assembly (7), middle part in coating film cavity (1) is provided with filament (4), filament (4) are placed perpendicularly, the both ends of filament (4) are connected with power (5), the both sides of filament (4) are provided with two substrate platforms (6) that are used for placing the sample, two substrate platform (6) about filament (4) symmetry sets up.

2. The diamond film coated device of claim 1, wherein: the air inlet assembly (7) comprises an air inlet pump (71) installed on one side, away from the vacuum pump (2), of the coating chamber (1), an air inlet pipe (72) is connected between the air inlet pump (71) and the coating chamber (1), a reaction air tank (73) is arranged on one side, away from the air inlet pipe (72), of the air inlet pump (71), and an air conveying pipe (74) is arranged between the air inlet pump (71) and the reaction air tank (73).

3. The diamond film coated device of claim 1, wherein: the substrate platform (6) is provided with a plurality of first sliding grooves (8) and second sliding grooves (9), the first sliding grooves (8) and the second sliding grooves (9) are perpendicular to each other, and spaces for bolts to insert are formed between the first sliding grooves (8) and the second sliding grooves (9).

4. The diamond film coated device of claim 1, wherein: the coating film chamber (1) outside is provided with water circulation subassembly (11), water circulation subassembly (11) with substrate platform (6) one-to-one, water circulation subassembly (11) is including installing outer water tank (111) of coating film chamber (1) and water circulating pump (112), water circulating pump (112) with be provided with water pipe (113) between water tank (111), water tank (111) are kept away from one side of water pipe (113) is connected with circulating pipe (114), circulating pipe (114) are worn to establish in substrate platform (6), circulating pipe (114) are kept away from the one end of water tank (111) with water circulating pump (112) are connected.

5. The diamond film-plated device of claim 1, wherein: one end, close to the bottom surface inside the coating chamber (1), of the filament (4) is connected with a first pulley (14), and the first pulley (14) is connected with the power supply (5) through a lead.

6. The diamond film coated device of claim 5, wherein: one end of the filament (4) close to the first pulley (14) is connected with a heavy hammer (17).

7. The diamond film coated device of claim 5, wherein: and a second pulley (16) is installed on one side of the first pulley (14), and the second pulley (16) and the first pulley (14) are installed on different vertical lines.

8. A diamond film plated device according to claim 3, wherein: the coating chamber (1) and one side of the substrate table (6) opposite to the side provided with the first sliding groove (8) are in an open shape, and the coating chamber (1) is hinged with a sliding door (18).

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