CN108396308B

CN108396308B - CVD diamond coating equipment with a plurality of hot wire devices

Info

Publication number: CN108396308B
Application number: CN201810412850.0A
Authority: CN
Inventors: 夏海全; 陈汉泉; 孙交锴; 张平; 王少良
Original assignee: Guangdong Dingtai Hi Tech Precision Technology Co ltd
Current assignee: Guangdong Dingtai Hi Tech Precision Technology Co ltd
Priority date: 2018-05-03
Filing date: 2018-05-03
Publication date: 2023-06-09
Anticipated expiration: 2038-05-03
Also published as: CN108396308A

Abstract

The invention belongs to the technical field of vacuum coating, and particularly relates to CVD diamond coating equipment with a plurality of hot wire devices, which comprises a cavity device (1), a plurality of hot wire devices (2), a main frame device (3), a cooling device (4) and a driving device (5), wherein the main frame device (3) is arranged in the cavity device (1), the main frame device (3) comprises a rack (31) and a plurality of objective tables (32) uniformly distributed on the rack (31), the rack (31) is connected with the output end of the driving device (5), the objective tables (32) respectively correspond to the hot wire devices (2), and the objective tables (32) are communicated with the cooling device (4). The invention adopts the design of a plurality of hot wire devices, can improve the safety coefficient of the coating process, meets the requirements of different types of coating products in the same batch, and ensures that the coating process is more efficient, safe and flexible.

Description

CVD diamond coating equipment with a plurality of hot wire devices

Technical Field

The invention belongs to the technical field of vacuum coating, and particularly relates to CVD diamond coating equipment with a plurality of hot wire devices.

Background

Chemical Vapor Deposition (CVD) is the most widely used technique in the semiconductor industry for depositing a wide variety of materials, including a wide range of insulating materials, most metallic materials and metallic alloy materials. In theory, it is very simple: two or more gaseous starting materials are introduced into a reaction chamber and then they chemically react with each other to form a new material which is deposited on the wafer surface. The CVD diamond coating apparatus of the prior art has an unsatisfactory coating effect and a short life of the coated product.

In addition, a CVD diamond coating apparatus (publication No. CN 204661823U) is disclosed in chinese patent document, which includes, including, a vacuum pump, a coating tank and a substrate holder, the vacuum pump communicates with the coating tank, the coating tank has a coating cavity, the substrate holder is disposed in the coating cavity, two sides of the substrate holder are respectively provided with an electrode molybdenum holder, and a tantalum wire is connected between the two electrode molybdenum holders. Placing a sample to be coated on a substrate frame, pumping the coating cavity to a vacuum state through a vacuum pump, then introducing reaction gas methane and nitrogen, heating to generate high temperature after carbonizing tantalum wires, cracking and ionizing hydrogen into hydrogen atoms and plasmas, stripping hydrogen elements in the methane by the hydrogen atom plasmas to form a large amount of carbon with active chemical bonds, connecting carbon and carbon to form diamond, and finally enabling the diamond to be coated on the sample. The method solves the problems of unsatisfactory coating effect and short service life of the coated product, but the scheme has at least the following defects that the safety coefficient of the coating process is not high enough and the types of the coated products in the same batch are not flexible enough.

Disclosure of Invention

The invention aims at: aiming at the defects of the prior art, the CVD diamond coating equipment with a plurality of hot wire devices is provided, the safety coefficient of the coating process can be improved, and the different types of requirements of the same batch of coating products can be met.

In order to achieve the above purpose, the present invention adopts the following technical scheme:

the utility model provides a CVD diamond coating equipment with a plurality of hot wire devices, includes cavity device, a plurality of hot wire devices, body frame device, cooling device and drive arrangement, body frame device set up in the cavity device, body frame device include the frame and equipartition in a plurality of objective tables of frame, the frame with drive arrangement's output is connected, a plurality of the objective tables correspond a plurality of respectively the hot wire device, and a plurality of the objective tables all with cooling device intercommunication. The plurality of hot wire devices are arranged in the cavity device, so that the loading capacity of workpieces can be greatly improved, and the production efficiency is improved.

As an improvement of the CVD diamond coating equipment with the hot wire devices, the rack comprises a lifting rod and a mounting platform, the mounting platform is arranged at the top of the lifting rod, the object stages are uniformly distributed at the edge of the mounting platform, the lifting rod comprises a cylinder and a toothed bar connected with the cylinder into a whole, and the cylinder is coaxially connected with a gear. The cylinder and the toothed bar are integrally designed, and rotation and lifting can be realized on the lifting rod.

As an improvement of the CVD diamond coating equipment with a plurality of hot wire devices, the lifting rod is internally of a hollow structure; the objective table is of a V-shaped structure. The lifter adopts hollow design, increases the space and places the pipeline, makes the pipeline need not to follow the lifter motion, effectively utilizes the space in the lifter.

As an improvement of the CVD diamond coating equipment with a plurality of hot wire devices, the cavity device comprises a cavity, a vent pipe and an exhaust pipe, wherein one ends of the vent pipe and the exhaust pipe are communicated with the cavity, the other end of the vent pipe is communicated with a reaction gas device, and the other end of the exhaust pipe is communicated with a vacuumizing device; the vent pipe and the exhaust pipe are both connected with valves. The valve is added, so that the cavity is kept in a vacuum state, and meanwhile, the reaction gas in the cavity is prevented from leaking, and the ventilation pipe and the exhaust pipe are separately designed, so that the gas leakage caused by inconvenient operation is prevented.

As an improvement of the CVD diamond coating apparatus with a plurality of filament devices according to the present invention, the filament devices include a power source, an electrode and a filament frame, the electrode is electrically connected with the power source through a cable, both ends of the filament frame are connected with the electrode, the power source is provided with a positive electrode and a negative electrode, the electrode is provided with a positive electrode and a negative electrode, the positive electrode is connected with the positive electrode, the negative electrode is connected with the negative electrode, the filament frame is provided with a metal ball and a filament, and the metal ball straightens the filament. The metal ball is added, so that the hot wire is prevented from being coated under the condition of no straightening, and the coating effect is prevented from being influenced.

As an improvement of the CVD diamond coating equipment with a plurality of hot wire devices, the cooling device comprises a cooling device, a channel, a cylinder body and a plurality of pipe bodies communicated with the cylinder body, wherein the channel is inserted into the lifting rod, one end of the channel is provided with the cooling device, the other end of the channel is communicated with the cylinder body, the cylinder body is fixed in the center of the mounting platform, the pipe bodies are communicated with the cylinder body, and the pipe bodies respectively correspond to the object stages. The cylinder body is added, so that the channel does not need to be directly communicated with the cylinder body, and the leakage risk caused by the rotation of the channel is reduced.

As an improvement of the CVD diamond coating apparatus with a plurality of hot wire devices, the cooling device is a water supply device. The water supply device is added to play a role in cooling.

As an improvement of the CVD diamond coating apparatus with a plurality of hot wire devices, the cooling device is an air conditioner. The air conditioner is added to play a role in cooling.

As an improvement of the CVD diamond coating equipment with a plurality of hot wire devices, the driving device comprises a column body, a first motor, a second motor and a bracket, wherein the first motor and the second motor are arranged on the column body, the bracket is arranged at the bottom of the column body, a connecting hole is formed in the top of the column body, and the output end of the first motor is connected with the gear. The first motor is added to drive the gear, so that the lifting rod is driven to rotate, the support is added, dislocation of the lifting rod is prevented, and the whole device is fixed. The output end of the first motor is added to drive the gear to rotate, so that the lifting rod is driven to rotate.

As an improvement of the CVD diamond coating apparatus with a plurality of hot wire devices, the lifting rod is connected with the column body through the connecting hole, and the second motor output end is connected with the toothed bar. The output end of the second motor is added to drive the toothed bar to lift, so that the lifting bar is driven to lift.

The invention has the beneficial effects that the hot wire cooling device comprises a cavity device, a plurality of hot wire devices, a main frame device, a cooling device and a driving device, wherein the main frame device is arranged in the cavity device and comprises a rack and a plurality of objective tables uniformly distributed on the rack, the rack is connected with the output end of the driving device, the objective tables respectively correspond to the hot wire devices, and the objective tables are communicated with the cooling device. The hot wire devices are arranged in the cavity device, so that the loading capacity of a workpiece can be greatly improved, the production efficiency is improved, and meanwhile, when accidental wire breakage occurs, the coating is not required to be stopped, and the position of the objective table is only required to be converted by controlling the driving device. Due to the fact that the plurality of object stages, each wire frame and the corresponding object stage can independently control one process, production of different products can be completed in the same batch, and flexibility is achieved. Aiming at the defects that one set of objective table corresponds to one set of hot wire device, a plurality of objective tables correspond to a plurality of hot wire devices, the main frame device can not only ascend and descend in the vertical direction, but also rotate on the same plane, the corresponding hot wire devices can be automatically converted, the coating is not required to be stopped, the problems that the safety coefficient of the coating process is not high enough and the types of the same batch of coating products are not flexible are effectively solved, and therefore the production efficiency of the coating products is greatly improved.

Drawings

FIG. 1 is a schematic diagram of the structure of the present invention;

FIG. 2 is a schematic cross-sectional view of the present invention;

FIG. 3 is a schematic view of the present invention in a lowered state;

FIG. 4 is a diagram showing the rising state of the present invention;

wherein: 1-a cavity device; 2-hot wire device; 3-a main frame device; 4-a cooling device; 5-a driving device; 11-a cavity; 12-a breather pipe; 13-an exhaust pipe; 21-a power supply; 22-electrode; 23-wire frame; 211-positive electrode; 212-negative electrode; 221-positive electrode; 222-a negative electrode; 231-metal balls; 232-hot wire; 31-a frame; 32-stage; 311-lifting rod; 312-mounting a platform; 3111-cylinders; 3112-toothed bars; 41-channel; 42-cylinder; 43-tube body; 44-a cooling device; 51-column; 52-a first motor; 53-a second motor; 54-bracket; 511-connecting holes; 100-cables; 300-gear.

Detailed Description

Certain terms are used throughout the description and claims to refer to particular components. Those of skill in the art will appreciate that a hardware manufacturer may refer to the same component by different names. The description and claims do not take the form of an element differentiated by name, but rather by functionality. As used throughout the specification and claims, the word "comprise" is an open-ended term, and thus should be interpreted to mean "include, but not limited to. By "substantially" is meant that within an acceptable error range, a person skilled in the art can solve the technical problem within a certain error range, substantially achieving the technical effect.

In the description of the present invention, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "left", "right", "horizontal", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

The present invention will be described in further detail below with reference to the drawings, but is not limited thereto.

As shown in fig. 1-4, a CVD diamond coating apparatus with multiple hot wire devices includes a cavity device 1, multiple hot wire devices 2, a main frame device 3, a cooling device 4 and a driving device 5, wherein the main frame device 3 is arranged in the cavity device 1, the main frame device 3 includes a frame 31 and multiple object tables 32 uniformly distributed on the frame 31, the frame 31 is connected with an output end of the driving device 5, the multiple object tables 32 respectively correspond to the multiple hot wire devices 2, the multiple object tables 32 are all communicated with the cooling device 4, the cavity device 1 includes a cavity 11, a vent pipe 12 and an exhaust pipe 13, one ends of the vent pipe 12 and the exhaust pipe 13 are all communicated with the cavity 11, the other ends of the vent pipe 12 are communicated with a reaction gas device, and the other ends of the exhaust pipe 13 are communicated with a vacuumizing device; the breather pipe 12 and the exhaust pipe 13 are both connected with valves, the hot wire device 2 comprises a power supply 21, an electrode 22 and a wire frame 23, the electrode 22 is electrically connected with the power supply 21 through a cable 100, the two ends of the wire frame 23 are connected with the electrode 22, the power supply 21 is provided with an anode 211 and a cathode 212, the electrode 22 is provided with an anode 221 and a cathode 222, the anode 221 is connected with the anode 211, the cathode 222 is connected with the cathode 212, the wire frame 23 is provided with a metal ball 231 and a hot wire 232, and the metal ball 231 straightens the hot wire 232. Because the coating process needs to be performed in a vacuum environment, and then the cavity 11 is filled with the reaction gas, the corresponding vent pipe 12 and the corresponding exhaust pipe 13 need to be arranged in the cavity device 1, and the metal ball 231 straightens the hot wire 232 due to the action of gravity, so that the hot wire 232 is prevented from being coated under the condition of no straightening, and the coating effect is affected.

Preferably, the frame 31 includes lifter 311 and mounting platform 312, mounting platform 312 sets up in the top of lifter 311, a plurality of objective tables 32 evenly distributed is at the edge of mounting platform 312, lifter 311 includes cylinder 3111 and be connected as an organic whole with cylinder 3111's rack 3112, cylinder 3111 coaxial coupling has gear 300, the inside hollow structure that is of lifter 311, objective table 32 is "V" shape structure, drive arrangement 5 includes cylinder 51, first motor 52, second motor 53 and support 54, first motor 52 and second motor 53 set up in cylinder 51, the support 54 sets up in the bottom of cylinder 51, the top of cylinder 51 is provided with connecting hole 511, first motor 52 output connection gear 300, lifter 311 passes connecting hole 511 and is connected with cylinder 51, one side of rack 3112 is connected to the second motor 53 output. The mounting platform 312 passes through a plurality of objective tables 32 of screwed connection, and the mounting platform 312 is provided with the bar hole, through the cooperation in screw and bar hole, adjusts the distance of objective table 32 and heater 232, and a plurality of objective tables 32 correspond a plurality of heater devices 2 respectively, when the broken silk appears, guarantee that other several groups accomplish behind the normal coating, drive arrangement 5 drive lifter 311 descend to rotatory objective table 32 makes it correspond the heater device 2 of normal operation, then drive arrangement 5 drive lifter 311 rise, continue the coating film.

The cooling device 4 comprises a cooling device 44, a channel 41, a cylinder 42 and a plurality of pipes 43 communicated with the cylinder 42, wherein the channel 41 is inserted into the lifting rod 311, the cooling device 44 is arranged at one end of the channel 41, the other end of the channel 41 is communicated with the cylinder 42, the cylinder 42 is fixed in the center of the mounting platform 312, the pipes 43 are communicated with the cylinder 42, and the pipes 43 respectively correspond to the stages 32. Because the channel 41 is inserted into the lifting rod 311, the channel 41 does not need to ascend or descend along with the lifting rod 311, the space in the lifting rod 311 is effectively utilized, the cylinder body 42 is increased, the channel 41 does not need to directly communicate with the cylinder body 43, and the leakage risk caused by the rotation of the channel 41 is reduced.

Preferably, the cooling device 44 is a water supply device. The hot wire 232 is heated during the coating process, and the stage 32 needs to be cooled, because water has good thermophysical properties, is inexpensive and convenient to use, and requires small pumping power, the water supply device can be used as the cooling device 44.

Preferably, the cooling device 44 is an air conditioning device. The hot wire 232 is heated during the coating process, the stage 32 needs to be cooled, and the air conditioner can also achieve the effect of cooling by direct heat transfer through air flow, so that the air conditioner can be used as the cooling device 44.

The working principle of the invention is as follows:

coating diamond: firstly, a plurality of coated workpieces are arranged on a plurality of object stages 32, the distance between the object stages 32 and the hot wire 232 is adjusted, then the installation platform 312 is lowered to the bottom, the cavity 11 is closed, the gas in the cavity 11 is pumped out through a vacuumizing device until the cavity 11 reaches a vacuum state, the valve is closed, then the cavity 11 is filled with reaction gas through a reaction gas device, the valve is closed after the reaction gas is filled, the power supply 21 is turned on to start carbonizing the hot wire 232, after carbonization of the hot wire 232 is completed, the installation platform 312 is raised to the upper part, and diamond coating is started.

And (3) rotating the mounting platform: when unexpected wire breakage occurs, after ensuring that other groups finish normal coating, the mounting platform 312 can be lowered to the bottom, the mounting platform 312 is rotated again to enable the object stage 32 corresponding to the unexpected hot wire device 2 to correspond to the normal hot wire device 2 again, and then the mounting platform 312 is raised to finish coating continuously.

Variations and modifications of the above embodiments will occur to those skilled in the art to which the invention pertains from the foregoing disclosure and teachings. Therefore, the present invention is not limited to the above-described embodiments, but is intended to be capable of modification, substitution or variation in light thereof, which will be apparent to those skilled in the art in light of the present teachings. In addition, although specific terms are used in the present specification, these terms are for convenience of description only and do not limit the present invention in any way.

Claims

1. A CVD diamond coating apparatus having a plurality of hot wire devices, characterized in that: the hot wire cooling device comprises a cavity device (1), a plurality of hot wire devices (2), a main frame device (3), a cooling device (4) and a driving device (5), wherein the main frame device (3) is arranged in the cavity device (1), the main frame device (3) comprises a rack (31) and a plurality of objective tables (32) uniformly distributed on the rack (31), the rack (31) is connected with the output end of the driving device (5), the objective tables (32) respectively correspond to the hot wire devices (2), and the objective tables (32) are communicated with the cooling device (4);

wherein the stage (32) is used for independently controlling one process, and completing the production of different products in the same batch; the main frame device (3) is used for ascending and descending in the vertical direction and rotating on the same plane, and can automatically complete the conversion of the corresponding hot wire device (2).

2. A CVD diamond coating apparatus according to claim 1, having a plurality of hot wire devices, wherein: frame (31) include lifter (311) and mounting platform (312), mounting platform (312) set up in the top of lifter (311), a plurality of objective table (32) evenly distributed are in the edge of mounting platform (312), lifter (311) include cylinder (3111) and with cylinder (3111) are connected rack bar (3112) as an organic whole, cylinder (3111) coaxial coupling has gear (300).

3. A CVD diamond coating apparatus according to claim 2, having a plurality of hot wire devices, wherein: the lifting rod (311) is of a hollow structure; the stage (32) is of a "V" configuration.

4. A CVD diamond coating apparatus according to claim 1, having a plurality of hot wire devices, wherein: the cavity device (1) comprises a cavity (11), a vent pipe (12) and an exhaust pipe (13), wherein one ends of the vent pipe (12) and the exhaust pipe (13) are both communicated with the cavity (11), the other end of the vent pipe (12) is communicated with a reaction gas device, and the other end of the exhaust pipe (13) is communicated with a vacuumizing device; the breather pipe (12) and the exhaust pipe (13) are both connected with valves.

5. A CVD diamond coating apparatus according to claim 1, having a plurality of hot wire devices, wherein: the hot wire device (2) comprises a power supply (21), an electrode (22) and a wire frame (23), wherein the electrode (22) is electrically connected with the power supply (21) through a cable (100), the two ends of the wire frame (23) are connected with the electrode (22), the power supply (21) is provided with a positive electrode (211) and a negative electrode (212), the electrode (22) is provided with a positive electrode (221) and a negative electrode (222), the positive electrode (221) is connected with the positive electrode (211), the negative electrode (222) is connected with the negative electrode (212), the wire frame (23) is provided with a metal ball (231) and a hot wire (232), and the metal ball (231) straightens the hot wire (232).

6. A CVD diamond coating apparatus according to claim 2, having a plurality of hot wire devices, wherein: the cooling device (4) comprises a cooling device (44), a channel (41), a cylinder body (42) and a plurality of tube bodies (43) communicated with the cylinder body (42), wherein the channel (41) is inserted into the lifting rod (311), the cooling device (44) is arranged at one end of the channel (41), the other end of the channel (41) is communicated with the cylinder body (42), the cylinder body (42) is fixed in the center of the mounting platform (312), the tube bodies (43) are communicated with the cylinder body (42), and the tube bodies (43) respectively correspond to the object stages (32).

7. A CVD diamond coating apparatus according to claim 6, wherein the apparatus has a plurality of hot wire devices, wherein: the cooling device (44) is a water supply device.

8. A CVD diamond coating apparatus according to claim 6, wherein the apparatus has a plurality of hot wire devices, wherein: the cooling device (44) is an air conditioning device.

9. A CVD diamond coating apparatus according to claim 2, having a plurality of hot wire devices, wherein: the driving device (5) comprises a column body (51), a first motor (52), a second motor (53) and a support (54), wherein the first motor (52) and the second motor (53) are arranged on the column body (51), the support (54) is arranged at the bottom of the column body (51), a connecting hole (511) is formed in the top of the column body (51), and the output end of the first motor (52) is connected with the gear (300).

10. A CVD diamond coating apparatus according to claim 9, wherein the apparatus has a plurality of hot wire devices, wherein: the lifting rod (311) passes through the connecting hole (511) to be connected with the column body (51), and the output end of the second motor (53) is connected with one side of the toothed bar (3112).