CN108396308A - A kind of cvd diamond coating apparatus with multiple hot-wire devices - Google Patents
A kind of cvd diamond coating apparatus with multiple hot-wire devices Download PDFInfo
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- CN108396308A CN108396308A CN201810412850.0A CN201810412850A CN108396308A CN 108396308 A CN108396308 A CN 108396308A CN 201810412850 A CN201810412850 A CN 201810412850A CN 108396308 A CN108396308 A CN 108396308A
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- cylinder
- wire devices
- cvd diamond
- coating apparatus
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
- C23C16/463—Cooling of the substrate
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention belongs to the technical fields of vacuum coating, more particularly to a kind of cvd diamond coating apparatus with multiple hot-wire devices, including cavity device (1), multiple hot-wire devices (2), body frame device (3), cooling device (4) and driving device (5), the body frame device (3) is set in the cavity device (1), the body frame device (3) includes rack (31) and is distributed in multiple objective tables (32) of the rack (31), the rack (31) connect with the output end of the driving device (5), multiple objective tables (32) correspond respectively to multiple hot-wire devices (2), and multiple objective tables (32) are connected to the cooling device (4).The present invention uses the design of multiple hot-wire devices, can improve coating procedure safety coefficient, meet different types of requirement of same batch coating product, keeps coating procedure more efficient, safe, flexible.
Description
Technical field
The invention belongs to the technical fields of vacuum coating, and in particular to a kind of cvd diamond with multiple hot-wire devices
Coating apparatus.
Background technology
Chemical vapor deposition (CVD) is the technology for depositing multiple materials being most widely used in semi-conductor industry,
Including large-scale insulating materials, most metals material and metal alloy compositions.In theory, it is very simple：
Two or more gaseous starting materials are imported into a reative cell, and then they chemically react between each other, shape
At a kind of new material, deposit in wafer surface.The coating result of the CVD diamond coatings equipment of the prior art is undesirable
It is short with the product service life of coating.
In addition, CVD diamond coatings equipment (204661823 U of publication number CN) is disclosed in Chinese patent document,
It includes, including vacuum pump, plated film babinet and substrate frame, and the vacuum pump is connected to the plated film babinet, the plated film babinet
With plating membrane cavity, the substrate frame is set to the plated film intracavitary, electrode molybdenum frame is respectively arranged in the both sides of the substrate frame,
It is connected with tantalum wire between two electrode molybdenum framves.Being placed in substrate frame needs the sample of plated film, then will be plated by vacuum pump
Membrane cavity is pumped to vacuum state, is then passed through reaction gas methane and nitrogen, and heating generation high temperature will after recycling tantalum wire carbonization
Hydrogen cracking is ionized into hydrogen atom and plasma, and hydrogen atom plasma removes the protium in methane to be formed again largely to be had
The carbon of activity chemistry key, carbon carbon are connected to form diamond, finally so that coated with CVD (chemical vapor deposition) diamond is on sample.The above method centainly solves
The problem that coating result is undesirable and the product service life of coating is short, but this scheme is at least there is also following defect,
The problem of coating procedure safety coefficient is not high enough, the type underaction of same batch coating product.
Invention content
It is an object of the invention to：In view of the deficiencies of the prior art, a kind of CVD Buddha's warrior attendants with multiple hot-wire devices are provided
Stone coating apparatus can improve coating procedure safety coefficient, meet the variety classes requirement of same batch coating product.
To achieve the goals above, the present invention adopts the following technical scheme that：
A kind of cvd diamond coating apparatus with multiple hot-wire devices, including cavity device, multiple hot-wire devices, body frame dress
Set, cooling device and driving device, the body frame device are set in the cavity device, the body frame device include rack and
Multiple objective tables of the rack are distributed in, the rack is connect with the output end of the driving device, multiple objective tables
Multiple hot-wire devices are corresponded respectively to, and multiple objective tables are connected to the cooling device.Multiple heated filaments are filled
It sets in a cavity device, the useful load of workpiece can be greatly improved, improve production efficiency.
As a kind of a kind of improvement of the cvd diamond coating apparatus with multiple hot-wire devices of the present invention, institute
It includes elevating lever and mounting platform to state rack, and the mounting platform is set to the top of the elevating lever, multiple objective tables
It is evenly distributed on the edge of the mounting platform, the elevating lever includes cylinder and connect the tooth being connected as one with the cylinder
Bar, the cylinder are coaxially connected with gear.Be integrally designed using cylinder and ratch, can be realized on leading to an elevating lever rotation and
Lifting.
As a kind of a kind of improvement of the cvd diamond coating apparatus with multiple hot-wire devices of the present invention, institute
State inside elevating lever is hollow-core construction；The objective table is " V " shape structure.Elevating lever uses hollow design, increases space and places
Pipeline makes pipeline without following elevating lever to move, efficiently uses the space in elevating lever.
As a kind of a kind of improvement of the cvd diamond coating apparatus with multiple hot-wire devices of the present invention, institute
It includes cavity, snorkel and exhaust tube to state cavity device, and one end of the snorkel and the exhaust tube is communicated in the chamber
The other end of body, the snorkel is communicated in reaction gas device, and the other end of the exhaust tube is communicated in vacuum extractor；Institute
It states snorkel and the exhaust tube is respectively connected with valve.Increase valve, cavity is made to keep vacuum state, while preventing anti-in cavity
Gas leak is answered, is separately designed using snorkel and exhaust tube, prevents from inconvenient leading to gas leakage.
As a kind of a kind of improvement of the cvd diamond coating apparatus with multiple hot-wire devices of the present invention, institute
It includes power supply, electrode and guide frame to state hot-wire device, and the electrode is connected by cable and the power electric connection, the guide frame both ends
The electrode is connect, the power supply is provided with anode and cathode, and the electrode is provided with positive electrode and negative electrode, and the positive electrode connects
The anode is connect, the negative electrode connects the cathode, and the guide frame is provided with metal ball and heated filament, and the metal ball stretches institute
State heated filament.Increase metal ball, prevents heated filament plated film in the case where not stretching, influence the effect of plated film.
As a kind of a kind of improvement of the cvd diamond coating apparatus with multiple hot-wire devices of the present invention, institute
It includes cooling apparatus, channel, cylinder body and multiple tube bodies being connected to the cylinder body to state cooling device, and the channel is inserted in described
In elevating lever, the one end in the channel is provided with cooling apparatus, and the other end in the channel is connected to the cylinder body, the cylinder body
It is fixed on the center of the mounting platform, multiple tube bodies are connected to the cylinder body, and multiple tube bodies correspond respectively to
Multiple objective tables.Increase cylinder body, makes channel without directly connection tube body, reduce due to the risk that channel rotates and reveals.
As a kind of a kind of improvement of the cvd diamond coating apparatus with multiple hot-wire devices of the present invention, institute
It is water supply installation to state cooling apparatus.Increase water supply installation and plays cooling effect.
As a kind of a kind of improvement of the cvd diamond coating apparatus with multiple hot-wire devices of the present invention, institute
It is air-conditioning device to state cooling apparatus.Increase air-conditioning device and plays cooling effect.
As a kind of a kind of improvement of the cvd diamond coating apparatus with multiple hot-wire devices of the present invention, institute
It includes cylinder, first motor, the second motor and holder to state driving device, and the first motor and second motor are arranged in institute
Cylinder is stated, the holder, which is arranged at the top of the bottom of the cylinder, the cylinder, is provided with connecting hole, and the first motor is defeated
Outlet connects the gear.Increase first motor band moving gear to increase holder to drive elevating lever to rotate, prevent elevating lever
Dislocation, while playing the role of fixed whole device.Increase first motor output end band moving gear to rotate, to drive elevating lever
Rotation.
As a kind of a kind of improvement of the cvd diamond coating apparatus with multiple hot-wire devices of the present invention, institute
It states elevating lever to connect with the cylinder across the connecting hole, second motor output end connects the ratch.Increase by second
Motor output end is by driving ratch lifting, to drive lifter rod lifting to move.
The beneficial effects of the present invention are the present invention includes cavity device, multiple hot-wire devices, body frame device, cooling dress
It sets and driving device, the body frame device is set in the cavity device, the body frame device includes rack and is distributed in institute
Multiple objective tables of rack are stated, the rack is connect with the output end of the driving device, and multiple objective tables correspond to respectively
In multiple hot-wire devices, and multiple objective tables are connected to the cooling device.Multiple hot-wire devices are mounted on
In one cavity device, the useful load of workpiece can be greatly improved, improves production efficiency, meanwhile, when unexpected fracture of wire occurs, it is not necessarily to
Stop plated film, as long as the position by controlling the driving device conversion objective table.Have benefited from multiple objective tables, each guide frame and right
The objective table answered can individually control a kind of technique, so the production of different product can be completed in same batch, have flexibly
Property.Invention is directed to a set of objective table disadvantage corresponding with a set of hot-wire device, using multiple objective tables and multiple hot-wire devices
Corresponding, body frame device not only rises and declines in the vertical direction, but also can be rotated in the same plane, can be automatic complete
It at corresponding hot-wire device is converted, realizes without stopping plated film, effectively solution coating procedure safety coefficient is not high enough, same batch
The problem of type underaction of coating product, to greatly improve the production efficiency of coated product.
Description of the drawings
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the schematic cross-sectional view of the present invention；
Fig. 3 is the schematic diagram of decline state of the present invention；
Fig. 4 is the schematic diagram of propradation of the present invention;
Wherein：1- cavity devices；2- hot-wire devices；3- body frame devices；4- cooling devices；5- driving devices；11- cavitys；12- is logical
Tracheae；13- exhaust tubes；21- power supplys；22- electrodes；23- guide frames；211- anodes；212- cathode；221- positive electrodes；222- negative electricity
Pole；231- metal balls；232- heated filaments；31- racks；32- objective tables；311- elevating levers；312- mounting platforms；3111- cylinders；
3112- ratch；The channels 41-；42- cylinder bodies；43- tube bodies；44- cooling apparatus；51- cylinders；52- first motors；The second electricity of 53-
Machine；54- holders；511- connecting holes；100- cables；300- gears.
Specific implementation mode
Some vocabulary has such as been used to censure specific components in specification and claim.Those skilled in the art answer
It is understood that hardware manufacturer may call the same component with different nouns.This specification and claims are not with name
The difference of title is used as the mode for distinguishing component, but is used as the criterion of differentiation with the difference of component functionally.Such as logical
The "comprising" of piece specification and claim mentioned in is an open language, therefore should be construed to " include but do not limit
In "." substantially " refer in acceptable error range, those skilled in the art can solve technology within a certain error range
Problem basically reaches technique effect.
In the description of the present invention, it is to be understood that, term "upper", "lower", "front", "rear", "left", "right", level "
The orientation or positional relationship of equal instructions is to be based on the orientation or positional relationship shown in the drawings, be merely for convenience of the description present invention and
Simplify description, does not indicate or imply the indicated device or element must have a particular orientation, with specific azimuth configuration
And operation, therefore be not considered as limiting the invention.
In invention unless specifically defined or limited otherwise, the arts such as term " installation ", " connected ", " connection ", " fixation "
Language shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be machine
Tool connects, and can also be electrical connection；It can be directly connected, can also can be indirectly connected through an intermediary two members
Connection inside part.For the ordinary skill in the art, above-mentioned term can be understood in this hair as the case may be
Concrete meaning in bright.
Below in conjunction with attached drawing, invention is further described in detail, but not as a limitation of the invention.
As shown in Fig. 1 ~ 4, a kind of cvd diamond coating apparatus with multiple hot-wire devices, including it is cavity device 1, more
A hot-wire device 2, body frame device 3, cooling device 4 and driving device 5, body frame device 3 are set in cavity device 1, body frame dress
It sets 3 to include rack 31 and be distributed in multiple objective tables 32 of rack 31, rack 31 is connect with the output end of driving device 5, multiple
Objective table 32 corresponds respectively to multiple hot-wire devices 2, and multiple objective tables 32 are connected to cooling device 4, and cavity device 1 includes
One end of cavity 11, snorkel 12 and exhaust tube 13, snorkel 12 and exhaust tube 13 is communicated in cavity 11, snorkel 12 it is another
One end is communicated in reaction gas device, and the other end of exhaust tube 13 is communicated in vacuum extractor；Snorkel 12 and exhaust tube 13 are equal
It is connected with valve, hot-wire device 2 includes power supply 21, electrode 22 and guide frame 23, and electrode 22 is electrically connected by cable 100 and power supply 21
It connects, 23 both ends connection electrode 22 of guide frame, power supply 21 is provided with anode 211 and cathode 212, electrode 22 are provided with 221 He of positive electrode
Negative electrode 222, positive electrode 221 connect anode 211, and negative electrode 222 connects cathode 212, and guide frame 23 is provided with metal ball 231 and heat
Silk 232, metal ball 231 stretches heated filament 232.Because coating process needs to carry out under vacuum conditions, then make to fill in cavity 11
Full reaction gas, so cavity device 1 needs that corresponding snorkel 12 and exhaust tube 13 is arranged, metal ball 231 is due to gravity
Effect stretches heated filament 232, prevents the plated film in the case where not stretching of heated filament 232, influences the effect of plated film.
Preferably, rack 31 includes elevating lever 311 and mounting platform 312, and mounting platform 312 is set to elevating lever 311
Top, multiple objective tables 32 are evenly distributed on the edge of mounting platform 312, and elevating lever 311 includes cylinder 3111 and and cylinder
3111 ratch 3112 being connected as one, cylinder 3111 are coaxially connected with gear 300, and 311 inside of elevating lever is hollow knot
Structure, objective table 32 be " V " shape structure, driving device 5 include cylinder 51, first motor 52, the second motor 53 and holder 54, first
Motor 52 and the second motor 53 are arranged in cylinder 51, and holder 54 is arranged in the bottom of cylinder 51, and the top of cylinder 51 is provided with company
Hole 511,52 output end connection gear 300 of first motor are connect, elevating lever 311 is connect across connecting hole 511 with cylinder 51, the second electricity
53 output end of machine connects the side of ratch 3112.Mounting platform 312 passes through the multiple objective tables 32 of screw connection, mounting platform 312
It is provided with strip-shaped hole, by the cooperation of screw and strip-shaped hole, adjusts objective table 32 at a distance from heated filament 232, multiple objective tables 32
Multiple hot-wire devices 2 are corresponded to respectively, and when there is fracture of wire, after ensureing other several groups of normal coatings of completion, driving device 5, which drives, to be risen
It drops bar 311 to decline, and rotatable stage 32, is allowed to the hot-wire device 2 of corresponding normal operation, then driving device 5 drives lifting
Bar 311 rises, and continues plated film.
Cooling device 4 includes cooling apparatus 44, channel 41, cylinder body 42 and multiple tube bodies 43 being connected to cylinder body 42, channel
41 are inserted in elevating lever 311, and the one end in channel 41 is provided with cooling apparatus 44, and the other end in channel 41 is connected to cylinder body 42,
Cylinder body 42 is fixed on the center of mounting platform 312, and multiple tube bodies 43 are connected to cylinder body 42, and multiple tube bodies 43 correspond respectively to more
A objective table 32.Since channel 41 is inserted in elevating lever 311, channel 41 is without following elevating lever 311 to rise or fall, effectively
Using the space in elevating lever 311, increase cylinder body 42, makes channel 41 without directly connection tube body 43, reduce since channel 41 is revolved
Then the risk of leakage.
Preferably, cooling apparatus 44 is water supply installation.Heated filament 232 will produce high temperature in coating process, need cooling loading
Platform 32, it is inexpensive, easy to use because water has good thermophysical property, and required pump power is small, so water supply installation
It may be used as cooling apparatus 44.
Preferably, cooling apparatus 44 is air-conditioning device.Heated filament 232 will produce high temperature in coating process, need cooling loading
Platform 32, air-conditioning device by air flowing direct heat transfer can also have the function that it is cooling, so air-conditioning device may be used as supplying
Device for cooling 44.
The present invention operation principle be：
Coating diamond：First, it is mounted on multiple on multiple objective tables 32 by painting workpiece, adjusts objective table 32 and heated filament 232
Distance, then mounting platform 312 is dropped into bottom, closes cavity 11, by vacuum extractor by evacuating air in cavity 11,
Until cavity 11 reaches vacuum state and closes valve, then makes to be full of reaction gas in cavity 11 by reaction gas device, fill
Valve is closed after full, and opening power supply 21 starts the heated filament 232 that is carbonized and mounting platform 312 risen to after the completion of heated filament 232 is carbonized
Portion starts coating diamond.
Rotate mounting platform：When there is unexpected fracture of wire, after ensureing other several groups of normal coatings of completion, decline can be passed through
Mounting platform 312 arrive bottom, then rotate mounting platform 312 make the unexpected 2 corresponding objective table 32 of hot-wire device of generation again with
Normal hot-wire device 2 corresponds to, then rises mounting platform 312 and continue to complete coating.
According to the disclosure and teachings of the above specification, those skilled in the art in the invention can also be to above-mentioned embodiment party
Formula is changed and is changed.Therefore, the invention is not limited in above-mentioned specific implementation mode, every those skilled in the art exist
Made any conspicuously improved, replacement or modification all belongs to the scope of protection of the present invention on the basis of the present invention.This
Outside, although having used some specific terms in this specification, these terms are merely for convenience of description, not to the present invention
Constitute any restrictions.
Claims (10)
1. a kind of cvd diamond coating apparatus with multiple hot-wire devices, it is characterised in that：Including cavity device (1), multiple
Hot-wire device (2), body frame device (3), cooling device (4) and driving device (5), the body frame device (3) are set to the chamber
In body device (1), the body frame device (3) includes rack (31) and is distributed in multiple objective tables (32) of the rack (31),
The rack (31) connect with the output end of the driving device (5), and multiple objective tables (32) correspond respectively to multiple institutes
Hot-wire device (2) is stated, and multiple objective tables (32) are connected to the cooling device (4).
2. a kind of cvd diamond coating apparatus with multiple hot-wire devices as described in claim 1, it is characterised in that：Institute
It includes elevating lever (311) and mounting platform (312) to state rack (31), and the mounting platform (312) is set to the elevating lever
(311) top, multiple objective tables (32) are evenly distributed on the edge of the mounting platform (312), the elevating lever
(311) include cylinder (3111) and connect the ratch (3112) being connected as one, the cylinder with the cylinder (3111)
(3111) it is coaxially connected with gear (300).
3. a kind of cvd diamond coating apparatus with multiple hot-wire devices as claimed in claim 2, it is characterised in that：Institute
State inside elevating lever (311) is hollow-core construction；The objective table (32) is " V " shape structure.
4. a kind of cvd diamond coating apparatus with multiple hot-wire devices as described in claim 1, it is characterised in that：Institute
It includes cavity (11), snorkel (12) and exhaust tube (13) to state cavity device (1), the snorkel (12) and the exhaust tube
(13) one end is communicated in the cavity (11), and the other end of the snorkel (12) is communicated in reaction gas device, described
The other end of exhaust tube (13) is communicated in vacuum extractor；The snorkel (12) and the exhaust tube (13) are respectively connected with valve
Door.
5. a kind of cvd diamond coating apparatus with multiple hot-wire devices as described in claim 1, it is characterised in that：Institute
It includes power supply (21), electrode (22) and guide frame (23) to state hot-wire device (2), the electrode (22) by cable (100) with it is described
Power supply (21) is electrically connected, and guide frame (23) both ends connect the electrode (22), the power supply (21) be provided with positive (211) and
Cathode (212), the electrode (22) are provided with positive electrode (221) and negative electrode (222), described in positive electrode (221) connection
Positive (211), the negative electrode (222) connect the cathode (212), and the guide frame (23) is provided with metal ball (231) and heat
Silk (232), the metal ball (231) stretch the heated filament (232).
6. a kind of cvd diamond coating apparatus with multiple hot-wire devices as claimed in claim 2, it is characterised in that：Institute
It includes cooling apparatus (44), channel (41), cylinder body (42) and multiple tube bodies being connected to the cylinder body (42) to state cooling device (4)
(43), the channel (41) is inserted in the elevating lever (311), and one end of the channel (41) is provided with cooling apparatus
(44), the other end of the channel (41) is connected to the cylinder body (42), and the cylinder body (42) is fixed on the mounting platform
(312) center, multiple tube bodies (43) are connected to the cylinder body (42), and multiple tube bodies (43) correspond respectively to more
A objective table (32).
7. a kind of cvd diamond coating apparatus with multiple hot-wire devices as claimed in claim 6, it is characterised in that：Institute
It is water supply installation to state cooling apparatus (44).
8. a kind of cvd diamond coating apparatus with multiple hot-wire devices as claimed in claim 6, it is characterised in that：Institute
It is air-conditioning device to state cooling apparatus (44).
9. a kind of cvd diamond coating apparatus with multiple hot-wire devices as claimed in claim 2, it is characterised in that：Institute
It includes cylinder (51), first motor (52), the second motor (53) and holder (54), the first motor to state driving device (5)
(52) and second motor (53) setting is at the cylinder (51), bottom of holder (54) setting in the cylinder (51)
Portion, connecting hole (511) is provided at the top of the cylinder (51), and first motor (52) output end connects the gear
(300)。
10. a kind of cvd diamond coating apparatus with multiple hot-wire devices as claimed in claim 9, it is characterised in that：Institute
It states elevating lever (311) to connect with the cylinder (51) across the connecting hole (511), the second motor (53) output end connection
The side of the ratch (3112).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810412850.0A CN108396308B (en) | 2018-05-03 | 2018-05-03 | CVD diamond coating equipment with a plurality of hot wire devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810412850.0A CN108396308B (en) | 2018-05-03 | 2018-05-03 | CVD diamond coating equipment with a plurality of hot wire devices |
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| Publication Number | Publication Date |
|---|---|
| CN108396308A true CN108396308A (en) | 2018-08-14 |
| CN108396308B CN108396308B (en) | 2023-06-09 |
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ID=63100954
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810412850.0A Active CN108396308B (en) | 2018-05-03 | 2018-05-03 | CVD diamond coating equipment with a plurality of hot wire devices |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113684466A (en) * | 2021-10-21 | 2021-11-23 | 天津本钻科技有限公司 | Method for reducing diamond film crack |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113684466A (en) * | 2021-10-21 | 2021-11-23 | 天津本钻科技有限公司 | Method for reducing diamond film crack |
| CN113684466B (en) * | 2021-10-21 | 2022-01-25 | 天津本钻科技有限公司 | Method for reducing diamond film crack |
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| CN108396308B (en) | 2023-06-09 |
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