CN220335280U

CN220335280U - Cathode fin type ion nitriding furnace

Info

Publication number: CN220335280U
Application number: CN202321779305.8U
Authority: CN
Inventors: 吴学婷; 魏晓伟; 黄红键
Original assignee: Chengdu Sifei Kete Technology Co ltd
Current assignee: Chengdu Sifei Kete Technology Co ltd
Priority date: 2023-07-07
Filing date: 2023-07-07
Publication date: 2024-01-12
Anticipated expiration: 2033-07-07

Abstract

The application provides a cathode fin type ion nitriding furnace which is used for solving the problem of uneven heating and low heat efficiency of the ion nitriding furnace in the prior art. The furnace comprises a supporting frame, a lower furnace body and an upper furnace body, wherein the lower furnace body is installed on the supporting frame, the upper furnace body is installed on the lower furnace body, a closed cavity is formed between the lower furnace body and the upper furnace body, a cathode assembly used for radiation and conduction heating is installed on the lower furnace body, and a heating rod is loaded on the cathode assembly. The electric heating cathode is used as a heating main body, and plays a role of being both a cathode and a heating body, and is not heated by glow heating or other auxiliary heating modes. The temperature controllability is good, and the thermal efficiency is high.

Description

Cathode fin type ion nitriding furnace

Technical Field

The utility model belongs to the field of nitriding furnaces, and particularly relates to a cathode fin type ion nitriding furnace.

Background

The ion nitriding furnace is a device which is filled with ammonia gas in a vacuum container, and the direct current electric field is introduced into a cathode and an anode to ionize the filled ammonia gas, so that ionized nitrogen ions move to the cathode, the nitrogen ions bombard the surface of a metal part to form a nitriding layer so as to harden the surface,

the workpiece is required to be heated in the nitriding process, the existing ion nitriding furnace is heated by generally adopting glow heating or other auxiliary heating modes, the heating efficiency is low, the thermal uniformity is poor, and the traditional glow heating mode has the arcing phenomenon in the heating process and the nitriding efficiency is low.

Disclosure of Invention

In view of the above-mentioned drawbacks of the prior art, an object of the present utility model is to provide a cathode fin type ion nitriding furnace for solving the problem of uneven heating and low heat efficiency of the ion nitriding furnace in the prior art.

In order to achieve the above and other related objects, the utility model provides a cathode fin type ion nitriding furnace, which comprises a support frame, a lower furnace body arranged on the support frame, and an upper furnace body arranged on the lower furnace body, wherein a closed cavity is arranged between the lower furnace body and the upper furnace body, a cathode assembly for radiation and conduction heating is arranged on the lower furnace body, and a heating rod is loaded on the cathode assembly.

As an alternative scheme, the cathode assembly comprises a cathode sheet seat arranged at the bottom of the lower furnace body, two ends of the cathode sheet seat penetrate through the bottom of the lower furnace body, the cathode sheet seat is in sealing connection with the lower furnace body through a sealing sleeve, a mounting hole along the vertical direction is formed in the bottom end surface of the cathode sheet seat, and the heating rod is arranged in the mounting hole;

the outer part of the cathode sheet seat is provided with a plurality of cathode wafers at equal intervals along the vertical direction, the cross section of the cathode sheet seat in the vertical direction is circular, the cathode wafers are connected with the cathode sheet seat through trapezoidal threads, and a workpiece to be nitrided is placed on the cathode wafers.

As an alternative scheme, the top of the upper furnace body is provided with a workpiece placing opening for placing a workpiece on a cathode wafer, a detachable furnace cover is arranged at the workpiece placing opening, fused cast mica is arranged on the bottom end surface of the furnace cover and the upper end surface of the lower furnace body, and the cathode wafer seat penetrates through the fused cast mica on the lower furnace body;

and a heat insulation cylinder for heat insulation and temperature insulation is also arranged between the cathode assembly and the inner wall of the upper furnace body.

As an alternative scheme, the cooling water circulating and refrigerating module and the water return tank are arranged on the lower table surface of the support frame, cooling water tanks are respectively arranged in the bottom plate of the lower furnace body and the side wall of the upper furnace body, an upper furnace body water return pipe joint is arranged at the top of the upper furnace body, an upper furnace body water inlet pipe joint is arranged at the bottom of the upper furnace body, and the upper furnace body water return pipe joint and the upper furnace body water inlet pipe joint are communicated with the cooling water tanks of the upper furnace body;

the cooling water circulation and refrigeration module is connected with the cooling water tank of the lower furnace body through a water inlet pipe, the cooling water tank of the lower furnace body is connected with the water inlet pipe joint of the upper furnace body through a furnace body connecting water pipe, and the water return pipe joint of the upper furnace body is communicated with the water return tank through a water return pipe.

As an alternative scheme, the device also comprises an ammonia gas production module, a gas storage tank and a gas flow control module which are arranged on the lower table surface of the support frame, wherein the ammonia gas production module, the gas storage tank and the gas flow control module are sequentially communicated through pipelines;

an air inlet connector is arranged on the outer wall of the lower furnace body, one end of the air inlet connector is communicated with the closed cavity, and the other end of the air inlet connector is communicated with an air outlet of the air flow control module through an air inlet pipe.

As an alternative scheme, the vacuum furnace further comprises a vacuum air extraction module arranged on the lower table surface of the support frame, a vacuum joint is arranged at the bottom end of the lower furnace body, one end of the vacuum joint is communicated with the closed cavity, and the other end of the vacuum joint is communicated with the vacuum air extraction module through a vacuum tube;

and a pressure sensor for monitoring air pressure is also arranged on the vacuum tube.

As an alternative scheme, an inflation inlet connector is arranged on the lower furnace body, one end of the inflation inlet connector is communicated with the closed cavity, and the other end of the inflation inlet connector extends out of the bottom end face of the lower furnace body;

the cathode wafer is also provided with a temperature sensor for monitoring temperature, the outer walls of the upper furnace body and the heat insulation cylinder are provided with observation windows corresponding to the positions, and the top end of the heat insulation cylinder is provided with a part placing through hole corresponding to the part placing opening.

As an alternative scheme, the bottom of the lower furnace body is provided with an anode access port, and the bottom of the cathode sheet seat is provided with a cathode access port.

As described above, the cathode fin type ion nitriding furnace provided by the utility model has at least the following beneficial effects:

1. the electric heating cathode is used as a heating main body, and plays a role of being both a cathode and a heating body, and is not heated by glow heating or other auxiliary heating modes. The temperature controllability is good, and the thermal efficiency is high.

2. The utility model provides a through controllable electrical heating, temperature controllability is good, can heat the work piece fast to the high temperature, makes the filth on surface volatilize, can reduce the flow of active gas again during the nitridation, can not produce the arcing phenomenon like glow heating in-process, and nitriding efficiency is high.

3. The application has the advantages that the heating temperature is high and controllable, meanwhile, the cathode does not strike an arc, the application is not only applicable to nitriding of common steel materials, but also applicable to metal materials such as titanium alloy and the like which are required to have higher nitriding temperature, and the application range is wide.

4. The cathode plate seat and the cathode plate seat are connected into a whole through the trapezoidal threads, heat of the heating body is directly transferred to the workpiece, meanwhile, the adjacent cathode plate seat and the adjacent cathode plate seat play roles in radiation and conduction heating, the distance between the cathode plate seat and the workpiece can be adjusted through the threads, so that the optimum distance between the cathode plate seat and the workpiece is adapted, an arc phenomenon is not easy to occur, and meanwhile, the temperature uniformity is good (less than +/-5 ℃), and the action efficiency of glow can be fully exerted.

5. This application adopts solid urea to be active gas's gas generating material, emits ammonia when heating, need not liquid ammonia, has less gas cost, has increased the security to be convenient for manage.

Drawings

FIG. 1 is a schematic view showing the structure of a cathode fin type ion nitriding furnace according to the present utility model.

Fig. 2 shows a top view of a cathode fin type ion nitriding furnace according to the present utility model.

In the figure: 1-a supporting frame; 2-lower furnace body; 3-feeding the furnace body; 4-sealing the cavity; 5-heating rod; 6-cathode sheet holder; 7-sealing sleeve; 8-mounting holes; 9-cathode wafer; 10-a workpiece; 11-a piece placing port; 12-furnace cover; 13-melt cast mica; 14-a heat insulation cylinder; 15-a cooling water circulation and refrigeration module; 16-a water return tank; 17-a cooling water tank; 18-a return water pipe joint of the upper furnace body; 19-an upper furnace body water inlet pipe joint; 20-a water inlet pipe; 21-connecting the furnace body with a water pipe; 22-a return pipe; a 23-ammonia production module; 24-gas storage tank; 25-an airflow control module; 26-an air inlet joint; 27-an air inlet pipe; 28-a vacuum pumping module; 29-vacuum joint; 30-vacuum tube; 31-a pressure sensor; 32-an inflation inlet connector; 33-a temperature sensor; 34-a viewing window; 35-anode access port; 36-cathode inlet.

Detailed Description

Further advantages and effects of the present utility model will become apparent to those skilled in the art from the disclosure of the present utility model, which is described by the following specific examples.

Please refer to fig. 1-2. It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the utility model to the extent that it can be practiced, since modifications, changes in the proportions, or adjustments of the sizes, which are otherwise, used in the practice of the utility model, are included in the spirit and scope of the utility model which is otherwise, without departing from the spirit or scope thereof. Also, the terms such as "upper," "lower," "left," "right," "middle," and "a" and the like recited in the present specification are merely for descriptive purposes and are not intended to limit the scope of the utility model, but are intended to provide relative positional changes or modifications without materially altering the technical context in which the utility model may be practiced.

The following examples are given by way of illustration only. Various embodiments may be combined and are not limited to only what is presented in the following single embodiment.

In this embodiment, referring to fig. 1 and 2, the utility model provides a cathode fin type ion nitriding furnace, which comprises a support frame 1, a lower furnace body 2 installed on the support frame 1, and an upper furnace body 3 installed on the lower furnace body 2, wherein a closed cavity 4 is arranged between the lower furnace body 2 and the upper furnace body 3, a cathode assembly for radiation and conduction heating is installed on the lower furnace body 2, and a heating rod 5 is loaded on the cathode assembly.

In this embodiment, the nitriding furnace further includes a nitriding furnace control power supply, and a man-machine interface is further disposed on the nitriding furnace control power supply, so that specific parameter settings can be performed according to nitriding requirements of different workpieces 10.

In this embodiment, the heating rod 5 is connected to the output end of the nitriding furnace control power supply, and the application uses the electric heating cathode as the heating main body, which plays the roles of being both the cathode and the heating body, and does not perform glow heating or other auxiliary heating modes for heating. The temperature controllability is good, the thermal efficiency is high, and the highest temperature of the self-heating cathode is as follows: 850-900 ℃.

Referring to fig. 1 and 2, the cathode assembly includes a cathode sheet seat 6 mounted at the bottom of the lower furnace body 2, two ends of the cathode sheet seat 6 penetrate through the bottom of the lower furnace body 2, the cathode sheet seat 6 is connected with the lower furnace body 2 in a sealing manner by a sealing sleeve 7, a mounting hole 8 along a vertical direction is formed at the bottom end surface of the cathode sheet seat 6, and the heating rod 5 is mounted in the mounting hole 8;

a plurality of cathode wafers 9 are arranged on the outer portion of the cathode wafer seat 6 at equal intervals along the vertical direction, the cross section of the cathode wafer seat 6 in the vertical direction is circular, the cathode wafers 9 are connected with the cathode wafer seat 6 through trapezoidal threads, and a workpiece 10 to be nitrided is placed on the cathode wafers 9.

In this embodiment, the cathode sheet seat 6 is a cylinder with steps, the cathode sheet seat 6 and the cathode sheet seat 9 are connected into a whole through trapezoidal threads, heat of a heating body is directly transferred to the workpiece 10, meanwhile, the adjacent cathode sheet seat 9 and the cathode sheet seat 6 play roles of radiation and conduction heating, the distance between the cathode sheet seat 9 and the workpiece 10 can be adjusted through threads, so that the optimum distance between the cathode sheet seat 9 and the workpiece 10 is adapted, an arc phenomenon is not easy to generate, meanwhile, the temperature uniformity is good (less than +/-5 ℃), and the action efficiency of glow can be fully exerted.

Referring to fig. 1 and 2, a workpiece placing opening 11 for placing a workpiece 10 on a cathode wafer 9 is formed in the top of the upper furnace body 3, a detachable furnace cover 12 is installed at the workpiece placing opening 11, fused cast mica 13 is installed on the bottom end surface of the furnace cover 12 and the upper end surface of the lower furnace body 2, and the cathode wafer seat 6 penetrates through the fused cast mica 13 on the lower furnace body 2;

a heat insulation cylinder 14 for heat insulation and temperature insulation is also arranged between the cathode assembly and the inner wall of the upper furnace body 3.

In this embodiment, the heat insulating cylinder 14 may be connected to the inner wall of the top end of the upper furnace body 3 through a connecting member.

Referring to fig. 1 and 2, the cooling water circulating and refrigerating module 15 and the water return tank 16 are arranged on the lower table surface of the support frame 1, cooling water tanks 17 are respectively arranged in the bottom plate of the lower furnace body 2 and the side wall of the upper furnace body 3, an upper furnace body water return pipe joint 18 is arranged at the top of the upper furnace body 3, an upper furnace body water inlet pipe joint 19 is arranged at the bottom of the upper furnace body 3, and the upper furnace body water return pipe joint 18 and the upper furnace body water inlet pipe joint 19 are communicated with the cooling water tanks 17 of the upper furnace body 3;

the cooling water circulation and refrigeration module 15 is connected with a cooling water tank 17 of the lower furnace body 2 through a water inlet pipe 20, the cooling water tank 17 of the lower furnace body 2 is connected with an upper furnace body water inlet pipe joint 19 through a furnace body connecting water pipe 21, and the upper furnace body water return pipe joint 18 is communicated with the water return tank 16 through a water return pipe 22.

In this embodiment, the cooling water circulation and refrigeration module 15 includes a water storage tank, a refrigeration device and a water pump, wherein the refrigeration device and the water pump are arranged in the water tank, and the water returning tank flows into the water storage tank and is pumped into the water inlet pipe 20 for circulation through the water pump after being cooled by the refrigeration device.

Referring to fig. 1 and 2, the device further comprises an ammonia gas production module 23, a gas storage tank 24 and a gas flow control module 25 which are arranged on the lower table surface of the supporting frame 1, wherein the ammonia gas production module 23, the gas storage tank 24 and the gas flow control module 25 are sequentially communicated through pipelines;

an air inlet joint 26 is arranged on the outer wall of the lower furnace body 2, one end of the air inlet joint 26 is communicated with the closed cavity 4, and the other end of the air inlet joint 26 is communicated with an air outlet of the air flow control module 25 through an air inlet pipe 27.

In this embodiment, the ammonia production module 23 includes a urea production tank and a urea heater, and the urea in the urea production tank is heated by the urea heater to produce ammonia, and the ammonia enters the gas tank 24 for storage. This application adopts solid urea to be active gas's gas generating material, emits ammonia when heating, need not liquid ammonia, has less gas cost, has increased the security to be convenient for manage.

Referring to fig. 1 and 2, the vacuum furnace further comprises a vacuum air extraction module 28 disposed on the lower table top of the support frame 1, a vacuum connector 29 is mounted at the bottom end of the lower furnace body, one end of the vacuum connector 29 is communicated with the closed cavity 4, and the other end of the vacuum connector 29 is communicated with the vacuum air extraction module 28 through a vacuum tube 30;

the vacuum tube 30 is also provided with a pressure sensor 31 for monitoring the air pressure.

Referring to fig. 1 and 2, an air charging connector 32 is mounted on the lower furnace body 2, one end of the air charging connector 32 is communicated with the closed cavity 4, and the other end of the air charging connector 32 extends out of the bottom end surface of the lower furnace body 2;

the cathode wafer 9 is also provided with a temperature sensor 33 for monitoring temperature, the outer walls of the upper furnace body 3 and the heat insulation cylinder 14 are provided with observation windows 34 corresponding to the positions, and the top end of the heat insulation cylinder 14 is provided with a part placing through hole corresponding to the part placing opening 11.

In the embodiment, the inflation inlet connector 32 is provided with an on-off valve, and after the nitriding of the workpiece 10 is completed, the valve of the inflation inlet connector 32 is opened to enable air to enter the closed cavity 4; the data collected by the temperature sensor 33 is displayed through the man-machine interface of the nitriding furnace control power supply.

Referring to fig. 1 and 2, an anode inlet 35 is provided at the bottom end of the lower furnace 2, and a cathode inlet 36 is provided at the bottom end of the cathode sheet holder 6.

In this embodiment, the nitriding furnace control power supply further includes a cathode/anode output interface, and the anode inlet 35 and the cathode inlet 36 are connected to the cathode/anode output interface of the nitriding furnace control power supply, respectively.

The stethoscope workflow with the recording function comprises the following steps:

s1, opening the furnace cover 12 to load the workpiece 10, and covering the furnace cover 12 back to the workpiece placing opening 11.

S2, turning on a nitriding furnace control power supply, starting a vacuum pumping system, and pumping the vacuum pressure in the furnace to below 20 Pa.

S3, starting a urea heater to heat the urea gas producing tank, and enabling the produced ammonia gas to flow into the gas storage tank 24; and meanwhile, the cooling water circulation and refrigeration module 15 is started, the nitriding furnace control power supply output end is turned on, power is supplied to the heating rod 5, the workpiece 10 is heated to reach the temperature set by nitriding, and the temperature is automatically controlled.

S4, starting an air flow control module 25, and introducing ammonia gas with a certain flow rate into the furnace to keep the pressure in the furnace at 80-700Pa.

And S5, switching on a control power supply output end of the nitriding furnace, and outputting pulse or direct current voltage of 500-1000V to the anode inlet 35 and the cathode inlet 36 to enable glow discharge to be generated on the surface of the workpiece, and performing nitriding treatment until the nitriding treatment time is set.

S6, closing the output end of the nitriding furnace control power supply, and stopping supplying power to the heating rod 5; at the same time, the flow control module 25 is turned off, the ammonia gas supply into the furnace is stopped, and the urea heater is turned off.

And S6, closing the output end of the nitriding furnace control power supply, and stopping outputting anode and cathode pulses or direct current voltages to the anode inlet 35 and the cathode inlet 36.

And S7, observing an in-furnace temperature display table on a nitriding furnace control power supply, and closing the cooling water circulation and refrigeration module 15 when the temperature is reduced to below 100 ℃.

And S8, opening the air charging port connector 32, and charging the atmosphere into the furnace until the atmosphere is the same as the external air pressure.

And S9, opening the furnace cover 12, and taking out the workpiece 10.

The above embodiments are merely illustrative of the principles of the present utility model and its effectiveness, and are not intended to limit the utility model. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the utility model. Accordingly, it is intended that all equivalent modifications and variations of the utility model be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.

Claims

1. The utility model provides a cathode fin type ion nitriding furnace, includes support frame (1), and installs lower furnace body (2) on support frame (1), and install upper furnace body (3) on lower furnace body (2), be airtight cavity (4) in the middle of lower furnace body (2) and upper furnace body (3), its characterized in that, install the cathode assembly that is used for radiation and conduction heating on lower furnace body (2), the last loading of cathode assembly has heating rod (5).

2. The cathode fin type ion nitriding furnace as set forth in claim 1, wherein the cathode assembly comprises a cathode sheet seat (6) installed at the bottom of the lower furnace body (2), two ends of the cathode sheet seat (6) penetrate through the bottom of the lower furnace body (2), the cathode sheet seat (6) and the lower furnace body (2) are connected in a sealing manner through a sealing sleeve (7), a mounting hole (8) along the vertical direction is formed in the bottom end surface of the cathode sheet seat (6), and the heating rod (5) is installed in the mounting hole (8);

the outer part of the cathode sheet seat (6) is provided with a plurality of cathode circular sheets (9) at equal intervals along the vertical direction, the cross section of the cathode sheet seat (6) in the vertical direction is circular, the cathode circular sheets (9) are connected with the cathode sheet seat (6) through trapezoidal threads, and a workpiece (10) to be nitrided is placed on the cathode circular sheets (9).

3. A cathode fin type ion nitriding furnace as claimed in claim 2, wherein a workpiece placing opening (11) for placing a workpiece (10) on a cathode wafer (9) is formed in the top of the upper furnace body (3), a detachable furnace cover (12) is arranged at the workpiece placing opening (11), fused cast mica (13) is arranged on the bottom end surface of the furnace cover (12) and the upper end surface of the lower furnace body (2), and the cathode wafer seat (6) penetrates through the fused cast mica (13) on the lower furnace body (2);

a heat insulation cylinder (14) for temperature and heat insulation is also arranged between the cathode assembly and the inner wall of the upper furnace body (3).

4. The cathode fin type ion nitriding furnace as claimed in claim 1, further comprising a cooling water circulation and refrigeration module (15) and a water return tank (16) which are arranged on the lower table surface of the supporting frame (1), wherein cooling water tanks (17) are respectively arranged in the bottom plate of the lower furnace body (2) and the side wall of the upper furnace body (3), an upper furnace body water return pipe joint (18) is arranged at the top of the upper furnace body (3), an upper furnace body water inlet pipe joint (19) is arranged at the bottom of the upper furnace body (3), and the upper furnace body water return pipe joint (18) and the upper furnace body water inlet pipe joint (19) are communicated with the cooling water tanks (17) of the upper furnace body (3);

the cooling water circulation and refrigeration module (15) is connected with a cooling water tank (17) of the lower furnace body (2) through a water inlet pipe (20), the cooling water tank (17) of the lower furnace body (2) is connected with an upper furnace body water inlet pipe joint (19) through a furnace body connecting water pipe (21), and the upper furnace body water return pipe joint (18) is communicated with a water return tank (16) through a water return pipe (22).

5. A cathode fin type ion nitriding furnace as set forth in claim 1, further comprising an ammonia gas production module (23), a gas storage tank (24) and a gas flow control module (25) which are arranged on the lower table surface of said support frame (1), wherein said ammonia gas production module (23), gas storage tank (24) and gas flow control module (25) are sequentially communicated through a pipeline;

an air inlet connector (26) is arranged on the outer wall of the lower furnace body (2), one end of the air inlet connector (26) is communicated with the closed cavity (4), and the other end of the air inlet connector (26) is communicated with an air outlet of the air flow control module (25) through an air inlet pipe (27).

6. A cathode fin type ion nitriding furnace as claimed in claim 1, further comprising a vacuum pumping module (28) arranged on the lower table surface of said support frame (1), wherein a vacuum joint (29) is installed at the bottom end of said lower furnace body, one end of said vacuum joint (29) is communicated with said closed cavity (4), and the other end of said vacuum joint (29) is communicated with said vacuum pumping module (28) through a vacuum tube (30);

the vacuum tube (30) is also provided with a pressure sensor (31) for monitoring the air pressure.

7. A cathode fin type ion nitriding furnace as claimed in claim 3, wherein an air charging port joint (32) is arranged on the lower furnace body (2), one end of the air charging port joint (32) is communicated with the closed cavity (4), and the other end of the air charging port joint (32) extends out of the bottom end surface of the lower furnace body (2);

the cathode wafer (9) is further provided with a temperature sensor (33) for monitoring temperature, the outer walls of the upper furnace body (3) and the heat insulation cylinder (14) are provided with observation windows (34) corresponding to the positions, and the top end of the heat insulation cylinder (14) is provided with a part placing through hole corresponding to the part placing opening (11).

8. A cathode fin type ion nitriding furnace as set forth in claim 2, wherein an anode access port (35) is provided at a bottom end of said lower furnace body (2), and a cathode access port (36) is provided at a bottom end of said cathode sheet holder (6).