CN107151779B - Nitriding controllable zero pollution ion nitriding device - Google Patents

Nitriding controllable zero pollution ion nitriding device Download PDF

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Publication number
CN107151779B
CN107151779B CN201710387990.2A CN201710387990A CN107151779B CN 107151779 B CN107151779 B CN 107151779B CN 201710387990 A CN201710387990 A CN 201710387990A CN 107151779 B CN107151779 B CN 107151779B
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nitriding
handle
cathode
anode
coldplate
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CN107151779A (en
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王剑
黄帅
周榆力
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Xihua University
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Xihua University
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

The invention relates to an ion nitriding device, in particular to a nitriding-controllable zero-pollution ion nitriding device, which comprises a furnace body, a furnace chassis, a transmission system, an adjustable cathode system, a quick cooling system, an adjustable anode system and a zero-pollution gas circulation system, wherein the furnace chassis is arranged on the furnace body; the furnace body is arranged right above the furnace chassis to form a nitriding chamber; the transmission system is fixed in the middle of the furnace chassis; the adjustable cathode system, the rapid cooling system and the adjustable anode system are arranged in the middle of the nitriding chamber; the zero-pollution gas circulating system is arranged at the outer lower part of the furnace chassis. The invention solves the technical problems of slow temperature rise and temperature reduction, non-adjustable cathode and anode spacing, uncontrollable nitriding and ammonia pollution of the traditional ion nitriding device. The device is also suitable for physical vapor deposition and chemical vapor deposition of the surface of the material.

Description

The controllable no pollution Ion Nitriding Equipment of nitriding
Technical field
The present invention relates to a kind of Ion Nitriding Equipment more particularly to a kind of no pollution Ion Nitriding Equipment that nitriding is controllable, Belong to chemical heat treatment technology field.
Background technique
Ionic nitriding is a kind of chemical heat treatment method of strengthening surface and a kind of utilizes nitrogenous gas glow discharge shape Viability Nitrogen ion penetrates into the process for modifying surface of workpiece surface under electric field action.Its generate nitriding layer have high rigidity, High-wearing feature and good corrosion resistance, therefore it is strong to be suitable for the metallic surfaces such as stainless steel, carbon steel, steel alloy and titanium alloy Change.However, there are unreasonable structures for conventional ion nitridation device, heat up slow and uncontrollable with cooling rate;Anode and cathode spacing is not It is adjustable, cause alloying layer thickness and performance uneven;Exhaust-gas treatment problem;These problems all seriously hamper the hair of ionic nitriding technology Exhibition.
In nitriding process, when nitriding temperature is lower, alloying layer thickness is relatively thin, and nitrided layer hardness is lower;When nitriding temperature mistake When low, gas cannot be ionized, and nitriding not can be carried out;Meanwhile when nitriding temperature is higher, diffusion layer organization changes, and infiltration layer is hard Degree reduces;When nitriding temperature is excessively high, workpiece corrosion even melt, so need to control nitriding temperature control nitrided layer hardness and Tissue.When glow discharge nitriding, nitriding temperature is generated by aura and ion bombardment improves, and needs longer period of time, is difficult quickly Required nitriding temperature is risen to, and heating rate is uncontrollable.After nitriding, since nitriding room temperature is higher, being down to room temperature is also needed It takes a very long time, and uncontrollable;This problem greatly reduces the speed of glow discharge nitriding, extends the production cycle.
When anode and cathode spacing is larger, cathode fall is lower, and ion institute band energy is lower, and current density is smaller, and ion bangs Hit intensity is lower, therefore workpiece surface temperature is lower;When anode and cathode spacing is smaller, cathode fall is higher, ion institute band energy compared with Height, current density is larger, and ion bombardment flux is higher, and workpiece surface temperature is higher at this time, therefore anode and cathode spacing is to glow discharge nitriding It also have a large impact on, but traditional Ion Nitriding Equipment unreasonable structure, anode and cathode spacing is non-adjustable, so as to cause infiltration layer Thickness and performance it is inhomogenous.
Gas nitriding and salt bath nitriding can generate harmful substance, pollute air.In contrast, though glow discharge nitriding can subtract Light pollution, but there are still pollution problems.Ammonia used in glow discharge nitriding can interfere brain cell energetic supersession and change neurotransmitter, There is inhibiting effect to cell, if will cause acute poisoning containing certain density ammonia in air or lead to malignant disease, such as The edema of the larynx, cataract, conjunctivitis, is even blinded at pulmonary edema.Therefore, the ammonia pollution problem of glow discharge nitriding needs thoroughly to solve.
Summary of the invention
The purpose of the present invention is to provide a kind of no pollution Ion Nitriding Equipment that nitriding is controllable, this nitriding it is controllable zero Contaminated ion nitridation dress, which is not only able to realize, to be rapidly heated and cools down, and is able to achieve that anode and cathode spacing is adjustable, nitriding is controllable, also It is able to achieve the glow discharge nitriding of no pollution, slow with cooling slowly with the heating for solving conventional ion nitridation device, anode and cathode spacing can not The technical issues of tune, nitriding is uncontrollable and ammonia pollutes.
The present invention solves above-mentioned technical problem by the following technical programs.
A kind of no pollution Ion Nitriding Equipment that nitriding is controllable, including furnace body, furnace hearth plate, transmission system, adjustable cathode system System is quickly cooled down system, adjustable anode system, no pollution gas-circulating system;Furnace body, which is placed in right above furnace hearth plate, forms nitriding Air inlet and gas outlet is arranged in room, nitriding room bottom;Transmission system is fixed in the middle part of furnace hearth plate;Adjustable cathode system, fast quickly cooling But system and adjustable anode system are placed in the middle part of nitriding room;No pollution gas-circulating system is placed in the outer lower part of furnace hearth plate.
The transmission system includes inverse time motor, cathode pillar, workpiece, and inverse time motor is connected by key with cathode pillar, Workpiece is fixed on cathode pillar, and inverse time electrode drives workpiece to rotate counterclockwise by cathode pillar.
The adjustable cathode system includes auxiliary cathode, insulating ceramics lining, cathode handle, and auxiliary cathode is that fan is cyclic annular, auxiliary Cathode is helped to be placed in right above insulating ceramics lining, cathode handle is cylinder, and cathode handle one end is fixedly connected with auxiliary cathode side wall Middle part, the cathode handle other end are placed in outside furnace body, for being moved forward and backward auxiliary cathode, in cathode the middle of the handle and sidewall of the furnace body Portion's connection.
The rapid cooling system includes coldplate, insulating ceramics lining, cooling handle, inlet tube, outlet tube, and coldplate is Fan is cyclic annular, is hollow structure inside coldplate, and inlet opening is arranged in coldplate lower part, and inlet opening is communicated with coldplate hollow structure, Fluid hole is arranged in coldplate top, and fluid hole is communicated with coldplate hollow structure, and coldplate is placed in right above insulating ceramics lining;It is cold But handle is cylinder, and setting " L-type " inlet opening and " L-type " fluid hole inside cooling handle, cooling handle one end are fixedly connected In the middle part of coldplate side wall, the cooling handle other end is placed in outside furnace body, for being moved forward and backward coldplate, cooling the middle of the handle and furnace Connection in the middle part of body sidewall;Inlet tube material is stainless steel, and inlet tube lower end is fixedly welded on the inlet opening of coldplate, on inlet tube End is fixedly welded on the inlet opening of cooling handle;Outlet tube material is stainless steel, and outlet tube upper end is fixedly welded on coldplate Fluid hole, outlet tube lower end are fixedly welded on the fluid hole of cooling handle.
The adjustable anode system includes impressed current anode, anode handle, and impressed current anode is that fan is cyclic annular, and impressed current anode is placed in furnace Above chassis, anode handle is cylinder, and anode handle one end is fixedly connected in the middle part of impressed current anode side wall, the anode handle other end It is placed in outside furnace body, for being moved forward and backward impressed current anode, is connect in the middle part of anode the middle of the handle and sidewall of the furnace body.
The no pollution gas-circulating system includes storage cylinder, mends nitrogen bottle, circulating pump, vacuum pump;Storage cylinder is used for infiltration Nitrogen room provides nitriding gas, and storage cylinder is connected with air inlet pipe by second pipe;Nitrogen bottle is mended to be used to supplement nitrogen to nitriding room; Nitrogen bottle is mended to be connected with air inlet pipe by first pipe;Circulating pump is arranged between air inlet pipe and escape pipe comprising air inlet And gas outlet, circulation pump steam inlet are connect with nitriding room gas outlet by escape pipe, escape pipe is by being fixedly welded on nitriding room Bottom venthole, circulating pump gas outlet are connect with nitriding room air inlet by air inlet pipe, and air inlet pipe is fixed on by being welded to connect Nitriding room bottom inflow hole;Vacuum pump is arranged on the 4th pipeline comprising air inlet and gas outlet, air-inlet of vacuum pump and infiltration Nitrogen room gas outlet is connected by escape pipe.
The no pollution gas-circulating system further include:
First two way cock, first two way cock are arranged in first pipe;
Second two way cock, second two way cock are arranged in air inlet pipe, and are in the first triple valve and the two or three Between port valve;
Third two way cock, the third two way cock are arranged on second pipe;
4th two way cock, the 4th two way cock are arranged on third pipeline;
5th two way cock, the 5th two way cock are arranged on the 4th pipeline, and are in vacuum pump and the 4th threeway Between valve;
First triple valve, first triple valve are arranged in first pipe and air inlet pipe intersection;
Second triple valve, second triple valve are arranged in second pipe and air inlet pipe intersection;
Third triple valve, the third triple valve are arranged in third pipeline and escape pipe intersection;
4th triple valve, the 4th triple valve are arranged in the 4th pipeline and escape pipe intersection.
The circulating pump is corrosion-resistant circulating pump.
The vacuum pump is corrosion-resistant vacuum pump.
The present invention has the beneficial effects that the present invention effectively improves the speed of heating and cooling, solves yin Anode spacing is non-adjustable and the pollution problem of ammonia, realizes the controllable no pollution ionic nitriding of nitriding.Setting heating adjustable cathode, Using aura synergistic effect, when it is close apart from workpiece, realization is rapidly heated, and effectively improves heating rate;When it is apart from work When part is remote, realizes slowly heating, nitriding temperature is reasonably controlled, to realize that nitriding is controllable;Rapid cooling system is set, is realized Fast cooling improves production efficiency, shortens the production cycle;Adjustable anode is set, realizes that anode and cathode spacing is adjustable, to realize infiltration Nitrogen is controllable;No pollution gas-circulating system is set, the pollution problem of ammonia is efficiently solved, realizes no pollution ionic nitriding.
Detailed description of the invention
Fig. 1 is the structure main view signal of the controllable no pollution Ion Nitriding Equipment of nitriding described in specific embodiment Figure.
Fig. 2 is that the structure of the controllable no pollution Ion Nitriding Equipment of nitriding described in specific embodiment overlooks signal Figure.
In figure, 1. furnace bodies;2. the fluid hole of coldplate;3. outlet tube;4. the fluid hole of cooling handle;5. cooling The inlet opening of handle;6. coldplate;7. inlet tube;8. the inlet opening of coldplate;9. insulating ceramics serves as a contrast;101. third pipe Road;102. the 4th pipeline;103. escape pipe;104. air inlet pipe;105. second pipe;106. first pipe;111. the Four two way cocks;112. the 5th two way cock;113. third two way cock;114. the second two way cock;115. first liang Port valve;121. third triple valve;122. the 4th triple valve;123. the second triple valve;124. the first triple valve;13. vacuum Pump;14. 15. storage cylinder of circulating pump;16. mending nitrogen bottle;17. inverse time motor;18. furnace hearth plate;19. auxiliary cathode;20. Cathode pillar;21. cathode handle;22. workpiece;23. impressed current anode;24. anode handle;25. cooling handle.
Specific embodiment
As depicted in figs. 1 and 2, a kind of no pollution Ion Nitriding Equipment that nitriding is controllable, including furnace body 1, furnace hearth plate 18, biography Dynamic system, is quickly cooled down system, adjustable anode system, no pollution gas-circulating system at adjustable cathode system.Furnace body 1 is placed in furnace Nitriding room is formed right above chassis 18, air inlet and gas outlet is arranged in nitriding room bottom;Transmission system is fixed in furnace hearth plate 18 Portion;Adjustable cathode system, rapid cooling system and adjustable anode system are placed in the middle part of nitriding room;No pollution gas-circulating system is set In the outer lower part of furnace hearth plate 18.
Transmission system includes inverse time motor 17, cathode pillar 20, workpiece 22, and inverse time motor 17 and cathode pillar 20 pass through key Connection, workpiece 22 are fixed on cathode pillar 20, and inverse time electrode 17 drives workpiece 22 to rotate counterclockwise by cathode pillar 20.
Adjustable cathode system includes auxiliary cathode 19, insulating ceramics lining 9, cathode handle 21, and auxiliary cathode 19 is fan ring Shape, auxiliary cathode 19 are placed in right above insulating ceramics lining 9, and cathode handle 21 is cylinder, and 21 one end of cathode handle is fixedly connected In the middle part of 19 side wall of auxiliary cathode, 21 other end of cathode handle is placed in outside furnace body 1, for being moved forward and backward auxiliary cathode 19, yin It is connect in the middle part of 21 middle part of pole handle and 1 side wall of furnace body.
Rapid cooling system includes coldplate 6, insulating ceramics lining 9, cooling handle 25, inlet tube 7, outlet tube 3, coldplate 6 is cyclic annular for fan, is hollow structure inside coldplate 6, and inlet opening 8, inlet opening 8 and the hollow knot of coldplate 6 is arranged in 6 lower part of coldplate Structure communicates, and fluid hole 2 is arranged in 6 top of coldplate, and fluid hole 2 is communicated with 6 hollow structure of coldplate, and coldplate 6 is placed in insulation pottery Right above ceramic liner 9;Cooling handle 25 is cylinder, setting " L-type " inlet opening 5 and " L-type " fluid hole 4 inside cooling handle 25, Cooling 25 one end of handle is fixedly connected in the middle part of 6 side wall of coldplate, and cooling 25 other end of handle is placed in outside furnace body 1, is used for front and back Mobile coldplate 6, cooling 25 middle part of handle and 1 side wall of furnace body middle part are connect;7 material of inlet tube is stainless steel, 7 lower end of inlet tube It is fixedly welded on the inlet opening 8 of coldplate 6,7 upper end of inlet tube is fixedly welded on the inlet opening 5 of cooling handle 25;3 material of outlet tube Matter is stainless steel, and 3 upper end of outlet tube is fixedly welded on the fluid hole 2 of coldplate 6, and 3 lower end of outlet tube is fixedly welded on cooling The fluid hole 4 of hand 25.
Adjustable anode system includes impressed current anode 23, anode handle 24, and impressed current anode 23 is that fan is cyclic annular, and impressed current anode 23 is set Above furnace hearth plate 18, anode handle 24 is cylinder, and 24 one end of anode handle is fixedly connected in the middle part of 23 side wall of impressed current anode, sun Handle 24 other end in pole is placed in outside furnace body 1, for being moved forward and backward impressed current anode 23,24 middle part of anode handle and 1 side wall of furnace body Middle part connection.
No pollution gas-circulating system include storage cylinder 15, mend nitrogen bottle 16, circulating pump 14,13, first liang of vacuum pump open up Close the 115, second two way cock 114, third two way cock 113, the 4th two way cock 112, the 5th two way cock the 111, the 1st Port valve 124, the second triple valve 123, third triple valve 121, the 4th triple valve 122, first pipe 106, second pipe 105, Three pipelines 101, the 4th pipeline 102, air inlet pipe 104, escape pipe 103.Storage cylinder 15 is used to provide nitriding gas, storage to nitriding room Gas cylinder 15 is connected with air inlet pipe 104 by second pipe 105;Nitrogen bottle 16 is mended to be used to supplement nitrogen to nitriding room;Mend nitrogen bottle 16 It is connected with air inlet pipe 104 by first pipe 106;Circulating pump 14 is arranged between air inlet pipe 104 and escape pipe 103, packet Air inlet and air outlet are included, 14 air inlet of circulating pump is connect with nitriding room gas outlet by escape pipe 103, and escape pipe 103 passes through It is fixedly welded on nitriding room bottom venthole, 14 gas outlet of circulating pump is connect with nitriding room air inlet by air inlet pipe 104, air inlet Pipe 104 is by being fixedly welded on nitriding room bottom inflow hole;Vacuum pump 13 is arranged on the 4th pipeline 102 comprising air inlet It is connect with nitriding room gas outlet by escape pipe 103 with the air inlet of gas outlet, vacuum pump 13.The setting of first two way cock 115 In first pipe 106, the second two way cock 114 is arranged in air inlet pipe 104, and is in the first triple valve 124 and the two or three Between port valve 123;Third two way cock 113 is arranged on second pipe 105;4th two way cock 112 is arranged in third pipeline On 101;5th two way cock 111 is arranged on the 4th pipeline 102, and between vacuum pump 13 and the 4th triple valve 122;The One triple valve 124 is arranged in first pipe 106 and 104 intersection of air inlet pipe;Second triple valve 123 is arranged in second pipe 105 With 104 intersection of air inlet pipe;Third triple valve 121 is arranged in third pipeline 101 and 103 intersection of escape pipe;4th triple valve 122 settings are in the 4th pipeline 102 and 103 intersection of escape pipe;Circulating pump 14 is corrosion-resistant circulating pump, and vacuum pump 13 is corrosion-resistant Vacuum pump.
The preferred embodiment of the present invention has been described in detail above.It should be appreciated that the ordinary skill of this field is without wound The property made labour, which according to the present invention can conceive, makes many modifications and variations.Therefore, all technician in the art Pass through the available technology of logical analysis, reasoning, or a limited experiment on the basis of existing technology under this invention's idea Scheme, all should be within the scope of protection determined by the claims.

Claims (9)

1. a kind of no pollution Ion Nitriding Equipment that nitriding is controllable, including furnace body, furnace hearth plate, transmission system, adjustable cathode system, Rapid cooling system, adjustable anode system, no pollution gas-circulating system;Furnace body, which is placed in right above furnace hearth plate, forms nitriding room, Air inlet and gas outlet is arranged in nitriding room bottom;Transmission system is fixed in the middle part of furnace hearth plate;Adjustable cathode system is quickly cooled down system System and adjustable anode system are placed in the middle part of nitriding room;No pollution gas-circulating system is placed in the outer lower part of furnace hearth plate.
2. the controllable no pollution Ion Nitriding Equipment of nitriding according to claim 1, which is characterized in that the transmission system Including inverse time motor, cathode pillar, workpiece, inverse time motor is connected by key with cathode pillar, and workpiece is fixed on cathode pillar, inverse When electrode by cathode pillar drive workpiece rotate counterclockwise.
3. the controllable no pollution Ion Nitriding Equipment of nitriding according to claim 1, which is characterized in that the adjustable cathode System includes auxiliary cathode, insulating ceramics lining, cathode handle, and auxiliary cathode is that fan is cyclic annular, and auxiliary cathode is placed in insulating ceramics lining Surface, cathode handle are cylinder, and cathode handle one end is fixedly connected in the middle part of auxiliary cathode side wall, and the cathode handle other end is set Outside furnace body, for being moved forward and backward auxiliary cathode, it is connect in the middle part of cathode the middle of the handle and sidewall of the furnace body.
4. the controllable no pollution Ion Nitriding Equipment of nitriding according to claim 1, which is characterized in that the rapid cooling System includes coldplate, insulating ceramics lining, cooling handle, inlet tube, outlet tube, and coldplate is that fan is cyclic annular, is inside coldplate Inlet opening is arranged in hollow structure, coldplate lower part, and inlet opening is communicated with coldplate hollow structure, and liquid is provided in coldplate top Hole, fluid hole are communicated with coldplate hollow structure, and coldplate is placed in right above insulating ceramics lining;Cooling handle is cylinder, cold But setting " L-type " inlet opening and " L-type " fluid hole inside handle, cooling handle one end is fixedly connected in the middle part of coldplate side wall, cold But the handle other end is placed in outside furnace body, for being moved forward and backward coldplate, is connect in the middle part of cooling the middle of the handle and sidewall of the furnace body;Into Liquid pipe material is stainless steel, and inlet tube lower end is fixedly welded on the inlet opening of coldplate, and inlet tube upper end is fixedly welded on cooling The inlet opening of handle;Outlet tube material is stainless steel, and outlet tube upper end is fixedly welded on the fluid hole of coldplate, outlet tube lower end It is fixedly welded on the fluid hole of cooling handle.
5. the controllable no pollution Ion Nitriding Equipment of nitriding according to claim 1, which is characterized in that the adjustable anode System includes impressed current anode, anode handle, and impressed current anode is that fan is cyclic annular, and impressed current anode is placed in above furnace hearth plate, and anode handle is Cylinder, anode handle one end are fixedly connected in the middle part of impressed current anode side wall, and the anode handle other end is placed in outside furnace body, before being used for Dynamic auxiliary anode is moved back, is connect in the middle part of anode the middle of the handle and sidewall of the furnace body.
6. the controllable no pollution Ion Nitriding Equipment of nitriding according to claim 1, which is characterized in that the no pollution gas Systemic circulatory system includes storage cylinder, mends nitrogen bottle, circulating pump, vacuum pump;Storage cylinder is used to provide nitriding gas, gas storage to nitriding room Bottle is connected with air inlet pipe by second pipe;It mends nitrogen bottle to be used to supplement nitrogen to nitriding room, mends nitrogen bottle and air inlet pipe by the One pipeline is connected;Circulating pump is arranged between air inlet pipe and escape pipe comprising air inlet and air outlet recycle pump steam inlet It is connect with nitriding room gas outlet by escape pipe, escape pipe is by being fixedly welded on nitriding room bottom venthole, circulating pump outlet Mouth is connect with nitriding room air inlet by air inlet pipe, and air inlet pipe is by being fixedly welded on nitriding room bottom air inlet;Vacuum pump is set It sets on the 4th pipeline comprising air inlet and gas outlet, air-inlet of vacuum pump are connect with nitriding room gas outlet by escape pipe.
7. the controllable no pollution Ion Nitriding Equipment of nitriding according to claim 6, which is characterized in that the no pollution gas Systemic circulatory system further include:
First two way cock, first two way cock are arranged in first pipe;
Second two way cock, second two way cock are arranged in air inlet pipe, and are in the first triple valve and the second triple valve Between;
Third two way cock, the third two way cock are arranged on second pipe;
4th two way cock, the 4th two way cock are arranged on third pipeline;
5th two way cock, the 5th two way cock are arranged on the 4th pipeline, and in vacuum pump and the 4th triple valve it Between;
First triple valve, first triple valve are arranged in first pipe and air inlet pipe intersection;
Second triple valve, second triple valve are arranged in second pipe and air inlet pipe intersection;
Third triple valve, the third triple valve are arranged in third pipeline and escape pipe intersection;
4th triple valve, the 4th triple valve are arranged in the 4th pipeline and escape pipe intersection.
8. the controllable no pollution Ion Nitriding Equipment of nitriding according to claim 6, which is characterized in that the circulating pump is Corrosion-resistant circulating pump.
9. the controllable no pollution Ion Nitriding Equipment of nitriding according to claim 6, which is characterized in that the vacuum pump is Corrosion-resistant vacuum pump.
CN201710387990.2A 2017-05-27 2017-05-27 Nitriding controllable zero pollution ion nitriding device Active CN107151779B (en)

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PL423550A1 (en) * 2017-11-23 2019-06-03 Instytut Mech Precyzyjnej Anode, preferably for the processes of the fluorescent processing of metal products
CN111850457B (en) * 2020-07-29 2022-04-22 扬州大学 Controllable surface nitriding device and using method thereof
CN114164395B (en) * 2021-11-30 2022-09-23 清华大学 Ionic nitrogen carbon sulfur multi-element co-cementation equipment, processing system and method

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KR20080111154A (en) * 2006-04-25 2008-12-22 메씨어-부가띠 Process furnace or the like
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CN203754794U (en) * 2014-01-08 2014-08-06 昆山尤特威热处理有限公司 Cathode rotating nitriding furnace
CN203754793U (en) * 2014-01-06 2014-08-06 昆山尤特威热处理有限公司 Ion nitriding revolving furnace
CN206173428U (en) * 2016-11-18 2017-05-17 惠州市鹏盛峰实业有限公司 Supplementary nitrogen gas cyclic utilization's liquid device for nitriding furnace

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US5127967A (en) * 1987-09-04 1992-07-07 Surface Combustion, Inc. Ion carburizing
US5225651A (en) * 1990-09-19 1993-07-06 Ugine S. A. Device for low-temperature plasma surface treatment of a plate or a sheet of a metallic material
KR20080111154A (en) * 2006-04-25 2008-12-22 메씨어-부가띠 Process furnace or the like
CN203360550U (en) * 2013-05-23 2013-12-25 广州市机电工业研究所 Ammonia-containing tail gas treatment device in nitridation heat treatment technology
CN203754793U (en) * 2014-01-06 2014-08-06 昆山尤特威热处理有限公司 Ion nitriding revolving furnace
CN203754794U (en) * 2014-01-08 2014-08-06 昆山尤特威热处理有限公司 Cathode rotating nitriding furnace
CN206173428U (en) * 2016-11-18 2017-05-17 惠州市鹏盛峰实业有限公司 Supplementary nitrogen gas cyclic utilization's liquid device for nitriding furnace

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