CN101122004A - Vacuum surface strengthening technique and device - Google Patents
Vacuum surface strengthening technique and device Download PDFInfo
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- CN101122004A CN101122004A CNA2007100129309A CN200710012930A CN101122004A CN 101122004 A CN101122004 A CN 101122004A CN A2007100129309 A CNA2007100129309 A CN A2007100129309A CN 200710012930 A CN200710012930 A CN 200710012930A CN 101122004 A CN101122004 A CN 101122004A
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Abstract
The invention discloses a novel vacuum surface strengthening technology and an equipment which belong to the technical field of plasma surface modification. The equipment includes a vacuum furnace, an air inlet system, a vacuum pumping system, a power supply system, a temperature testing system, a cooling system, a carrying platform and an insulator, and is characterized by a double-layer cylinder in the vacuum furnace; the double-layered cylinder is electrically insulated from the furnace by the insulator; the carrying platform is in the double-layered cylinder and electrically insulated from the furnace; the athode of the power supply system is electrically connected with the double-layered cylinder. When the double-layered cylinder is being strengthened, a work piece is put on the carrying platform; after the DC high-voltage power is connected, the surface of the work piece receives nitriding treatment through hollow cathode effect of the double-layered cylinder with the furnace as the anode of the power supply and the double-layered cylinder as cathode of the power supply. The invention has beneficial effects of fast nitriding speed into the surface of the work piece, simple technology, preserving original surface finish of the work piece, thickness of chemical coating and high density of the surface of the work piece, simple equipments and low cost.
Description
Technical field
The present invention relates to the technical field of plasma surface modification, relate in particular to a kind of technology and equipment that under vacuum condition, workpiece surface is carried out the ionitriding processing.
Background technology
Ionitriding is the vacuum vessel that workpiece is placed glow discharge device, with the workpiece is negative electrode, wall of container or establish metal sheet in addition as anode, fill a thin nitrogenous gas, under the effect of dc high voltage electric field, make gas atom be ionized into ion, ion is to clash into cathode-workpiece than higher speed, nitrogen ion degradedness on the workpiece surface is absorbed by workpiece, and diffuses to form the process of nitrided case to inside.
But ionitriding can not only realize controlled nitrogenize local hardening, uses pure hydrogen, nitrogen is advantages such as source of the gas non-environmental-pollution, and ionitriding does not generate the fragility phase, the infiltration layer densification, comparing with gas nitriding has higher wear resistance, solidity to corrosion and anti-fatigue performance.But, also there is following shortcoming in ionitriding: 1) temperature non: existing ionitriding heating is difficult to guarantee the homogeneity of temperature, when plasma heating, the temperature of workpiece not only depends on the energy of plasma body, and is also relevant with volume with surface-area, under the certain condition of parameters such as voltage, gaseous constituent, surface-area and volume ratio are big more, and the energy of ion bombardment input is big more, and temperature raises very fast, difform workpiece is heated inhomogeneous, causes the workpiece degradation; 2) arc is beaten on the surface: when totally there is not organic substance in the local location of workpiece surface because of cleaning, then can causes and beat arc, produce high temperature, make the metallic substance fusing at this position or sputter out the injury workpiece surface; 3) fringing effect: because the ununiformity of heating causes edge and central zone temperature to differ, surface color is inhomogeneous, and the nitride layer variable thickness causes.
Summary of the invention
The purpose of this invention is to provide a kind of novel vacuum surface strengthening technology and equipment, have that nitriding speed is fast, technology is simple, keep the original smooth finish of workpiece surface, workpiece surface compound bed thickness, density height, equipment is simple, cost is low advantage.
In order to achieve the above object, technical scheme of the present invention is as follows:
A kind of novel evacuated surface-strengthening equipment, comprise vacuum oven, inlet system 12, pumped vacuum systems 13, power supply system 14, temp measuring system 15, cooling system, Stage microscope 6 and isolator 7, inlet system 12 inserts in the vacuum oven by inlet mouth 8, pumped vacuum systems 13 inserts in the furnace sandwich wind box of vacuum oven, the anode of power supply system 14 is electrically connected with the vacuum oven body of heater by anode interface 5, temp measuring system 15 is connected with pending workpiece 1, and cooling system is connected with the vacuum oven body of heater; This strengthening device also comprises a double-layered cylinder, this double-layered cylinder is positioned at vacuum oven, by isolator 7 and vacuum oven body of heater electrical isolation, this double-layered cylinder is made up of roundlet tube 2 and large cylinder 3, roundlet tube 2 is positioned at large cylinder 3, roundlet tube 2 is 10mm with the spacing of large cylinder 3, be evenly distributed the hole that diameter is 5mm～6mm on the little cylinder, the spacing of adjacent two holes is 30mm～40mm, Stage microscope 6 is positioned at roundlet tube 2, and by isolator 7 and vacuum oven body of heater electrical isolation, the negative electrode of power supply system 14 is electrically connected with large cylinder 3 by negative electrode interface 4.
Above-mentioned inlet system 12 mainly is made up of gas cylinder and pressure maintaining valve, and its effect is to guarantee that ammonia can balancedly be supplied to vacuum oven continuously.
Above-mentioned pumped vacuum systems 13 mainly is made up of rotary vane mechanical pump and resistance vacuum gauge, its effect is by rotary vane mechanical pump vacuum oven furnace sandwich wind box to be vacuumized, make it become vacuum heat-insulating layer, and with resistance vacuum gauge to carrying out barometric surveying in the vacuum oven.
Above-mentioned power supply system 14 mainly is made up of transformer and rectifier, and it is mainly used in regulates the voltage that imposes in the vacuum oven.
Above-mentioned temp measuring system 15 mainly is made up of armoured thermocouple, insulated part, masked segment, gap protection part and anti-electric field interference sections; it can directly contact difform working parts strap electrical measurement temperature; temperature measurement error is little; and measured altitude and position all can be regulated; contact is reliable; do not produce electric discharge phenomena, temp measuring system 15 is mainly used in the measuring workpieces temperature, the control nitriding process.
Above-mentioned vacuum oven mainly is made up of discharge cover, base plate and sealing-ring, and discharge cover and base plate are made up of two-layered steel plates, and is middle by cooling system water flowing cooling, loses sealing function to guarantee vacuum oven to be unlikely to heat up rotten.
Above-mentioned cooling system mainly is made up of water pump, water-in 9, cooling viewing window 10 and water outlet 11, and water-in 9, cooling viewing window 10 and water outlet 11 place between the two-layered steel plates of discharge cover and base plate.
A kind of novel vacuum surface strengthening technology comprises the steps:
Clean the surface of pending workpiece 1 with industrial cleaning agent, carry out shove charge then, workpiece 1 is placed on the Stage microscope 6;
Starting 13 pairs of vacuum oven furnace sandwich of pumped vacuum systems wind box vacuumizes, start cooling system simultaneously, when vacuum tightness in the vacuum oven reaches 13.3Pa～133Pa, in vacuum oven, charge into the ammonia that purified by inlet mouth 8, ammonia is evenly distributed in the whole vacuum oven through the hole of roundlet tube 2, makes workpiece 1 ammonia concentration equilibrium on every side;
Regulate the flow of ammonia, make the pressure in the vacuum oven remain on 133Pa～1333Pa, open the power supply of power supply system 14 then, ionization takes place in the ammonia in the vacuum oven under the effect of high-voltage electric field, produce the glow discharge effect;
Difference according to the nitriding process parameter, can feed an amount of ammonia continuously in vacuum oven makes the stove internal gas pressure reach the vacuum tightness of 50Pa～3000Pa, and by power supply system 14 progressively regulating voltage, electric current, the control nitriding temperature, regulate the stove internal gas pressure by under meter, make double-layered cylinder keep the hollow cathode discharge effect;
According to the nitriding process parameter request, make the nitriding temperature in the vacuum oven remain on 450 ℃～650 ℃, and keep 3 hours～6 hours time;
Starting pumped vacuum systems 13 will be pumped into rough vacuum in the vacuum oven, close the power supply of power supply system 14, when workpiece 1 cools off to 200 ℃ with vacuum oven, workpiece 1 is taken out in stove.
Beneficial effect of the present invention is as follows:
1) compare with gas nitriding: there is not nitrogen gesture control problem in the present invention, and nitriding speed improves 3～5 times, discharge amount of exhaust gas be about gas nitriding 1/10000, vacuum nitriding 1/100, energy consumption is 1/3 of gas nitriding;
2) compare with the conventional ion nitriding: nitriding matrix of the present invention and discharge process are irrelevant, workpiece surface no longer produces arc discharge, the workpiece shape also no longer becomes the uneven limiting factor of nitriding, temperature homogeneity is good, the surface does not have the ion bombardment sputter substantially, keep the original smooth finish of workpiece surface, workpiece surface compound bed thickness, density height, the big (10Pa～1000Pa) of the operating air pressure scope of application;
3) compare with comprehensive plasma body injection: the present invention does not need high-voltage power supply and high-vacuum apparatus, and equipment is simple, and cost is low.
Description of drawings
Fig. 1 is the structural representation of a kind of novel evacuated surface-strengthening equipment of the present invention.
Among the figure: 1, workpiece, 2, little cylinder, 3, large cylinder, 4, the negative electrode interface, 5, the anode interface, 6, Stage microscope, 7, isolator, 8, inlet mouth, 9, water-in, 10, the cooling viewing window, 11, water outlet, 12, inlet system, 13, pumped vacuum systems, 14, power supply system, 15, temp measuring system.
Embodiment
Below in conjunction with accompanying drawing the present invention is done description in further detail:
As shown in Figure 1, a kind of novel vacuum surface strengthening technology of the present invention is that the negative pole with power supply system 14 is connected in the vacuum oven on the netted double-layered cylinder made of iron, double-layered cylinder is made up of roundlet tube 2 and large cylinder 3, the diameter of double-layered cylinder is about 300mm～350mm, roundlet tube 2 is 10mm with large cylinder 3 spacings, be evenly distributed the hole that diameter is 5mm～6mm on the little cylinder, the hole spacing is 30mm～40mm, and these holes are the material transfer passages that carry out nitriding; Processed workpiece 1 places the centre of roundlet tube 2, and workpiece 1 is electric suspended state or joins with direct-current biasing, and after DC high-voltage power supply that power supply system 14 provides was switched on, the ammonia in the vacuum oven was ionized; Under the effect of DC electric field, by glow-discharge characteristic as can be known, when spacing L, the cathodic discharge length L of two negative electrodes
kWith cathode fall sector width d
kThe three satisfies d
k＜L/2, L＞L
kWhen＞L/2 concerns, cause the phenomenon that light intensity increases, i.e. hollow cathode effect because of two negative glow superpositions with occurring, thereby cause the electronic oscillation between the negative electrode, increase electronics and gas molecule collision probability, generation more excites and ionization, thereby strengthens interpolar electric current and ion density.The plasma discharge hollow cathode effect produces high density, the highly active expansion atom that oozes, the nitrogen-atoms very strong with activity combines, generate FeN by adsorption and be adsorbed on workpiece surface, the FeN of workpiece surface is unsettled, along with absorption and assimilating activity nitrogen-atoms are continued in the surface, the nitrogen-atoms in the initial infiltration layer diffuses to form Fe to the matrix metal depths
2N → Fe
3N → Fe
4N.A part diffuses to form γ ' phase compound layer, and also the reaction of the nitrogen of some particle and absorption generates ε compound layer mutually simultaneously.
In the ionitriding process, double-layered cylinder plays two effects: the one, and as negative electrode, the protection workpiece; The 2nd, by radiation workpiece is heated, in the arc discharge process, three kinds of electron emission forms are arranged, i.e. photoelectron emissions, thermal electron emission, field emission, these electron energies mostly are 20ev～70ev, workpiece can be heated to nitriding and handle required temperature; Because in the nitriding treating processes, gaseous ion is this double-layered cylinder of bombardment, rather than directly bombard the surface of workpiece, so the problem that exists in the direct-current ion nitridation technique is also separated with regard to answering sword, beat problems such as arc, fringing effect, electrical effect, temperature survey as workpiece, requirement to the ionitriding power supply simultaneously also reduces greatly, has cancelled the current-limiting resistance that in the past consumes a large amount of electric energy.
The operating process of a kind of novel vacuum surface strengthening technology of the present invention is specific as follows:
(1) workpiece cleaning and shove charge
With the surface of industrial cleaning agent cleaning workpiece 1, carry out shove charge then, workpiece 1 is placed on the Stage microscope 6, make it and isolated from power by isolator 7, this point is different from existing ionitriding is heat-treated workpiece as negative electrode mode.
(2) vacuumize, build-up of luminance
The mechanical pump that starts pumped vacuum systems 13 vacuumizes vacuum oven furnace sandwich wind box, starts cooling system simultaneously, by water-in 9 water inlets, by water outlet 11 drainings, during whether observe current according to the window of cooling viewing window 10 unobstructed; When vacuum tightness in the stove reached 13.3Pa～133Pa, inlet system 12 charged into the ammonia that purified by inlet mouth 8 in vacuum oven, and ammonia is evenly distributed in the whole vacuum oven through the hole of roundlet tube 2, made the ammonia concentration equilibrium around the workpiece 1; Regulate the flow of ammonia, make the pressure in the vacuum oven remain on 133Pa～1333Pa, open the power supply of power supply system 14, ionization takes place in the ammonia in the vacuum oven under the effect of high-voltage electric field, produce the glow discharge effect.
(3) temperature rise period
Difference according to the nitriding process parameter, can feed an amount of ammonia continuously in vacuum oven makes the stove internal gas pressure reach the vacuum tightness of 50Pa～3000Pa, and by power supply system 14 progressively regulating voltage, electric current, the control nitriding temperature, regulate the stove internal gas pressure by under meter, make double-layered cylinder keep the hollow cathode discharge effect.
(4) holding stage
According to the nitriding process parameter request, make the nitriding temperature in the vacuum oven remain on 450 ℃～650 ℃, and keep 3 hours～6 hours time.
(5) cooling stages
Starting pumped vacuum systems 13 will be pumped into rough vacuum in the vacuum oven, close the power supply of power supply system 14, when workpiece 1 cools off to 200 ℃ with vacuum oven, workpiece 1 is taken out in stove.
Claims (2)
1. novel evacuated surface-strengthening equipment, comprise vacuum oven, inlet system (12), pumped vacuum systems (13), power supply system (14), temp measuring system (15), cooling system, Stage microscope (6) and isolator (7), inlet system (12) inserts in the vacuum oven by inlet mouth (8), pumped vacuum systems (13) inserts in the furnace sandwich wind box of vacuum oven, the anode of power supply system (14) is electrically connected with the vacuum oven body of heater by anode interface (5), temp measuring system (15) is connected with pending workpiece (1), cooling system is connected with the vacuum oven body of heater, it is characterized in that, this strengthening device also comprises a double-layered cylinder, this double-layered cylinder is positioned at vacuum oven, by isolator (7) and vacuum oven body of heater electrical isolation, this double-layered cylinder is made up of little cylinder (2) and large cylinder (3), little cylinder (2) is positioned at large cylinder (3), little cylinder (2) is 10mm with the spacing of large cylinder (3), be evenly distributed the hole that diameter is 5mm～6mm on the little cylinder, the spacing of adjacent two holes is 30mm～40mm, Stage microscope (6) is positioned at little cylinder (2), and by isolator (7) and vacuum oven body of heater electrical isolation, the negative electrode of power supply system (1 4) is electrically connected with large cylinder (3) by negative electrode interface (4).
2. a novel vacuum surface strengthening technology is characterized in that, comprises the steps:
Clean the surface of pending workpiece (1) with industrial cleaning agent, carry out shove charge then, workpiece (1) is placed on the Stage microscope (6);
Starting pumped vacuum systems (13) vacuumizes vacuum oven furnace sandwich wind box, start cooling system simultaneously, when vacuum tightness in the vacuum oven reaches 13.3Pa～133Pa, in vacuum oven, charge into the ammonia that purified by inlet mouth (8), ammonia is evenly distributed in the whole vacuum oven through the hole of little cylinder (2), makes workpiece (1) ammonia concentration equilibrium on every side;
Regulate the flow of ammonia, make the pressure in the vacuum oven remain on 133Pa～1333Pa, open the power supply of power supply system (14) then, ionization takes place in the ammonia in the vacuum oven under the effect of high-voltage electric field, produce the glow discharge effect;
Difference according to the nitriding process parameter, can feed an amount of ammonia continuously in vacuum oven makes the stove internal gas pressure reach the vacuum tightness of 50Pa～3000Pa, and by power supply system (14) progressively regulating voltage, electric current, the control nitriding temperature, regulate the stove internal gas pressure by under meter, make double-layered cylinder keep the hollow cathode discharge effect;
According to the nitriding process parameter request, make the nitriding temperature in the vacuum oven remain on 450 ℃～650 ℃, and keep 3 hours～6 hours time;
Starting pumped vacuum systems (13) will be pumped into rough vacuum in the vacuum oven, close the power supply of power supply system (14), when workpiece (1) cools off to 200 ℃ with vacuum oven, workpiece (1) is taken out in stove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100129309A CN101122004A (en) | 2007-09-19 | 2007-09-19 | Vacuum surface strengthening technique and device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100129309A CN101122004A (en) | 2007-09-19 | 2007-09-19 | Vacuum surface strengthening technique and device |
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| CN101122004A true CN101122004A (en) | 2008-02-13 |
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| CNA2007100129309A Pending CN101122004A (en) | 2007-09-19 | 2007-09-19 | Vacuum surface strengthening technique and device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102497721A (en) * | 2011-11-29 | 2012-06-13 | 北京大学 | Plasma device with double-hollow cathode and double-hollow cathode and applications |
| CN103122444A (en) * | 2013-02-02 | 2013-05-29 | 大连经济技术开发区圣洁真空技术开发有限公司 | Novel ion nitriding furnace with hot air circulation function |
| CN103162538A (en) * | 2013-03-22 | 2013-06-19 | 浙江固驰电子有限公司 | Rectifier bridge module sintering device |
| CN103556107A (en) * | 2013-11-11 | 2014-02-05 | 苏州市天隆链条有限公司 | Carbonitriding tool for pit resistance furnaces |
| CN106987795A (en) * | 2017-03-03 | 2017-07-28 | 昆山正大新成精密锻造有限公司 | A kind of device and method by adding nitrogen to improve die life |
| CN112703268A (en) * | 2018-10-15 | 2021-04-23 | 株式会社神户制钢所 | Nitriding apparatus and nitriding method |
| CN114164395A (en) * | 2021-11-30 | 2022-03-11 | 清华大学 | Ionic nitrogen carbon sulfur multi-element co-cementation equipment, processing system and method |
| CN114892123A (en) * | 2022-05-23 | 2022-08-12 | 太原理工大学 | Ionic nitriding method for eliminating small hole arcing risk |
-
2007
- 2007-09-19 CN CNA2007100129309A patent/CN101122004A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102497721A (en) * | 2011-11-29 | 2012-06-13 | 北京大学 | Plasma device with double-hollow cathode and double-hollow cathode and applications |
| CN103122444A (en) * | 2013-02-02 | 2013-05-29 | 大连经济技术开发区圣洁真空技术开发有限公司 | Novel ion nitriding furnace with hot air circulation function |
| CN103162538A (en) * | 2013-03-22 | 2013-06-19 | 浙江固驰电子有限公司 | Rectifier bridge module sintering device |
| CN103162538B (en) * | 2013-03-22 | 2014-09-10 | 浙江固驰电子有限公司 | Rectifier bridge module sintering device |
| CN103556107A (en) * | 2013-11-11 | 2014-02-05 | 苏州市天隆链条有限公司 | Carbonitriding tool for pit resistance furnaces |
| CN106987795A (en) * | 2017-03-03 | 2017-07-28 | 昆山正大新成精密锻造有限公司 | A kind of device and method by adding nitrogen to improve die life |
| CN112703268A (en) * | 2018-10-15 | 2021-04-23 | 株式会社神户制钢所 | Nitriding apparatus and nitriding method |
| CN112703268B (en) * | 2018-10-15 | 2023-02-21 | 株式会社神户制钢所 | Nitriding apparatus and nitriding method |
| CN114164395A (en) * | 2021-11-30 | 2022-03-11 | 清华大学 | Ionic nitrogen carbon sulfur multi-element co-cementation equipment, processing system and method |
| CN114892123A (en) * | 2022-05-23 | 2022-08-12 | 太原理工大学 | Ionic nitriding method for eliminating small hole arcing risk |
| CN114892123B (en) * | 2022-05-23 | 2024-04-16 | 太原理工大学 | Ion nitriding method for eliminating risk of small hole arcing |
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