CN207276694U - A kind of heating furnace being surface-treated by ion bombardment - Google Patents
A kind of heating furnace being surface-treated by ion bombardment Download PDFInfo
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- CN207276694U CN207276694U CN201721349160.2U CN201721349160U CN207276694U CN 207276694 U CN207276694 U CN 207276694U CN 201721349160 U CN201721349160 U CN 201721349160U CN 207276694 U CN207276694 U CN 207276694U
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- furnace body
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- ion bombardment
- auxiliary anode
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Abstract
A kind of heating furnace being surface-treated by ion bombardment of the utility model, belong to nitrogen treatment apparatus field, it is related specifically to a kind of heating furnace for carrying out reaching nitridation purpose by ion bombardment, including furnace body, bell, insulating layer, cooling layer, impressed current anode, air delivery device, flowmeter, workpiece, vacuum pump；The utility model has the advantages that：Shove charge is convenient when nitrogenizing ionic nitriding tubing and casing, and nitridation is uniformly quick, and impressed current anode is indeformable, does not beat arc, easy build-up of luminance effect, and suitable for horizontal chamber furnace (oven), batch nitrogenizes oil pipe production and processing.
Description
Technical field
The utility model belongs to nitrogen treatment apparatus field, is related specifically to one kind and carries out reaching nitridation by ion bombardment
The heating furnace of purpose.
Background technology
In the prior art, ionic nitriding tubing and casing generally uses the heating furnace of vertical pattern, in vacuum tank, at two
Pole (cathode and anode) adds high voltage, ionizes low density gas in container, forms plasma；Cation passes through cathode fall
Area, which is accelerated, to be bombarded and is realized to cathode.
The heating furnace of the vertical pattern of the prior art, is provided with attached supporing yang pole, but functionally exists with material from it
Deficiency, and it is yielding in nitridation process, the shortcomings of beating arc is closely directed at, influences the quality and speed of production of product, can not
Meet production needs.
Therefore there is an urgent need for a kind of new technical solution to solve the problems, such as this among the prior art.
Utility model content
Technical problem to be solved in the utility model is：There is provided that a kind of shove charge is convenient and nitridation is uniformly quick, stablizes
The shortcomings that heating furnace, impressed current anode is yielding when solving to nitrogenize in the prior art, nitridation easily beats arc, not build-up of luminance.
A kind of heating furnace being surface-treated by ion bombardment, it is characterized in that：Including furnace body, bell, insulating layer, cold
But layer, auxiliary anode device, air delivery device, flowmeter, workpiece and vacuum pump；
The shape of the furnace body is cylinder type, its both ends is both provided with bell, and wherein side bell is connected with vacuum pump；
Insulating layer and cooling layer are disposed with the cavity inner wall of the furnace body；
The furnace body is internally provided with auxiliary anode device, and auxiliary anode device both ends are connected by dielectric holder respectively
Two anode metal rods of furnace interior；
The auxiliary anode device is connected through a screw thread by multistage, and is provided with the steel pipe composition of mica supporting positive cover；
The air delivery device is connected by pipeline with the through hole on sidewall of the furnace body, and the pipe being connected in air delivery device with furnace body
Flowmeter is provided with road；
The workpiece is set on auxiliary anode device, and the internal electric source cathode of workpiece and furnace body connects.
The bell is provided with sealing ring with vacuum pump junction.
The air delivery device is provided with sealing ring by the through hole junction on pipeline and sidewall of the furnace body.
By above-mentioned design, the utility model has the advantages that：Facilitate shove charge during the nitridation of ionic nitriding tubing and casing,
Nitridation is uniformly quick, and impressed current anode is indeformable, does not beat arc, easy build-up of luminance effect, suitable for horizontal chamber furnace (oven), batch nitrogenize oil pipe production plus
Work.
Brief description of the drawings
Fig. 1 is the appearance diagram of the utility model.
1- furnace bodies, 2- bells, 3- insulating layers, 4- cooling layers, 5- impressed current anodes, 6- air delivery devices, 7- flowmeters, 8- in figure
Workpiece, 9- vacuum pumps.
Embodiment
The utility model is described in detail with reference to diagram：
A kind of heating furnace being surface-treated by ion bombardment, it is characterized in that：Including furnace body 1, bell 2, insulating layer
3rd, cooling layer 4, auxiliary anode device 5, air delivery device 6, flowmeter 7, workpiece 8 and vacuum pump 9；
The shape of the furnace body 1 is cylinder type, its both ends is both provided with bell 2, and wherein side bell 2 and vacuum pump 9
Connection；
Insulating layer 3 and cooling layer 4 are disposed with the cavity inner wall of the furnace body 1；
The furnace body 1 is internally provided with auxiliary anode device 5, and 5 both ends of auxiliary anode device pass through dielectric holder respectively
Connect two anode metal rods inside furnace body 1；
The auxiliary anode device 5 is connected through a screw thread by multistage, and is provided with the steel pipe composition of mica supporting positive cover；
The air delivery device 6 is connected by pipeline with the through hole on 1 side wall of furnace body, and is connected in air delivery device 6 with furnace body 1
Pipeline on be provided with flowmeter 7；
The workpiece 8 is set on auxiliary anode device 5, and workpiece 8 is connected with the internal electric source cathode of furnace body 1.
The bell 2 is provided with sealing ring with 9 junction of vacuum pump.
The air delivery device 6 is provided with sealing ring by the through hole junction on pipeline and 1 side wall of furnace body.
The operating procedure of the utility model is as follows：
Step 1: workpiece 8 is socketed on auxiliary anode device 5, auxiliary anode device 5 is passed through into dielectric holder and furnace body
Two anode metal rods connection inside 1, while workpiece 8 is connected with the cathode inside furnace body 1.
Step 2: manipulation vacuum pump 9 makes to form 30Pa-300Pa vacuum environments in furnace body 1, by air delivery device 6 be passed through N,
The mixed gas of H compounds and CO2, leads to 400V-1100V DC pulse high voltages electricity to the anode inside furnace body 1 and cathode.
Step 3: producing glow discharge after being powered around workpiece 8, N, the Hization being passed through in vacuum can be made in such cases
The mixed gas of compound and CO2 ionize, with ion under the action of the electrical potential difference between workpiece 8 and auxiliary anode device 5
Mode sputter.Ion is impacted to 8 inner surface of workpiece at this time, makes oil tube heating and be enriched with to be deposited on 8 inner surface of workpiece.Due to from
The bombardment of son, produces the dislocation of very high density in 8 endosexine 0.05mm of workpiece, accelerates diffusion velocity.Shape after nitrogen deposition
Into FeN, workpiece 8 can be directly penetrated into after decomposition, obtains higher hardness, while 8 inner surface of workpiece is formed ε phase layers, infiltration layer causes
Close, corrosion stability is good, has higher chemical stability in air, the gentle industrial gas-liquid of tide and water.
Step 4: closing vacuum pump 9, workpiece 8 and auxiliary anode device 5 are taken out.
It is (anti-that the anticorrosion antiwear layer that depth is 0.1-0.3mm can be formed after ion Plasma Nitriding Treatment in 8 inner surface of workpiece
The thickness of rotten wearing layer is needed according to specific oil field).
And trace meter can be dosed in N, H compound and the mixed gas of CO2 without plain Cr, Ti, Ni, in galvanization
The alloying element other media such as Cr, Ti, Ni is reacted, sputtered in a manner of ion.Deposition 8 inner surface of workpiece reaches resistance to
The purpose of heat, anticorrosion.
Claims (3)
1. a kind of heating furnace being surface-treated by ion bombardment, it is characterized in that：Including furnace body (1), bell (2), insulation
Layer (3), cooling layer (4), auxiliary anode device (5), air delivery device (6), flowmeter (7), workpiece (8) and vacuum pump (9)；
The shape of the furnace body (1) is cylinder type, its both ends is both provided with bell (2), and wherein side bell (2) and vacuum pump
(9) connect；
Insulating layer (3) and cooling layer (4) are disposed with the cavity inner wall of the furnace body (1)；
The furnace body (1) is internally provided with auxiliary anode device (5), and auxiliary anode device (5) both ends pass through insulating blanked clamper respectively
Two internal anode metal rods of tool connection furnace body (1)；
The auxiliary anode device (5) is connected through a screw thread by multistage, and is provided with the steel pipe composition of mica supporting positive cover；
The air delivery device (6) is connected by pipeline with the through hole on furnace body (1) side wall, and in air delivery device (6) and furnace body (1)
Flowmeter (7) is provided with the pipeline of connection；
The workpiece (8) is set on auxiliary anode device (5), and workpiece (8) is connected with the internal electric source cathode of furnace body (1).
2. a kind of heating furnace being surface-treated by ion bombardment according to claim 1, it is characterized in that：The stove
Lid (2) is provided with sealing ring with vacuum pump (9) junction.
3. a kind of heating furnace being surface-treated by ion bombardment according to claim 1, it is characterized in that：It is described defeated
Device of air (6) is provided with sealing ring by the through hole junction on pipeline and furnace body (1) side wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721349160.2U CN207276694U (en) | 2017-10-17 | 2017-10-17 | A kind of heating furnace being surface-treated by ion bombardment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721349160.2U CN207276694U (en) | 2017-10-17 | 2017-10-17 | A kind of heating furnace being surface-treated by ion bombardment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207276694U true CN207276694U (en) | 2018-04-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721349160.2U Active CN207276694U (en) | 2017-10-17 | 2017-10-17 | A kind of heating furnace being surface-treated by ion bombardment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107604300A (en) * | 2017-10-17 | 2018-01-19 | 大安市恒锐采油设备有限公司 | A kind of heating furnace being surface-treated by Ions Bombardment and its application method |
-
2017
- 2017-10-17 CN CN201721349160.2U patent/CN207276694U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107604300A (en) * | 2017-10-17 | 2018-01-19 | 大安市恒锐采油设备有限公司 | A kind of heating furnace being surface-treated by Ions Bombardment and its application method |
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