CN109943801B - Gas arc discharge device, coupling system with vacuum cavity and ion nitriding process - Google Patents
Gas arc discharge device, coupling system with vacuum cavity and ion nitriding process Download PDFInfo
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- CN109943801B CN109943801B CN201910363012.3A CN201910363012A CN109943801B CN 109943801 B CN109943801 B CN 109943801B CN 201910363012 A CN201910363012 A CN 201910363012A CN 109943801 B CN109943801 B CN 109943801B
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- 238000010891 electric arc Methods 0.000 title claims abstract description 120
- 238000005121 nitriding Methods 0.000 title claims abstract description 86
- 238000000034 method Methods 0.000 title claims abstract description 38
- 230000008878 coupling Effects 0.000 title claims abstract description 32
- 238000010168 coupling process Methods 0.000 title claims abstract description 32
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 32
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- 229910000963 austenitic stainless steel Inorganic materials 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 104
- 229910052751 metal Inorganic materials 0.000 claims description 88
- 239000002184 metal Substances 0.000 claims description 88
- 239000012212 insulator Substances 0.000 claims description 34
- 230000005672 electromagnetic field Effects 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 15
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 11
- 229910052750 molybdenum Inorganic materials 0.000 claims description 11
- 239000011733 molybdenum Substances 0.000 claims description 11
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- 239000010935 stainless steel Substances 0.000 claims description 11
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 8
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 claims description 8
- 238000000605 extraction Methods 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 3
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Abstract
The utility model provides a gas arc discharge device, a coupling system with a vacuum cavity and an ion nitriding process, wherein a hot cathode electron emission principle is utilized to be matched with an auxiliary cathode to generate plasma, and a magnetic field module of the device is coupled with an axial magnetic field module of the cavity to carry out plasma nitriding. The gas arc discharge device is controlled to be coupled with parameters of an axial magnetic field of the cavity, optimal magnetic field parameters are selected, and plasma energy and density in the vacuum cavity are increased, so that an optimal nitriding effect is obtained. By using the device and the method, the 316L austenitic stainless steel is subjected to plasma nitriding treatment for 60min, and the hardness of the nitriding layer can reach 1100HV 0.05 The nitriding depth can reach above 50 mu m, no nitride is separated out from the nitriding layer, and the nitriding layer is single gamma N The phase ensures the high hardness and high wear resistance of the nitriding workpiece.
Description
Technical Field
The utility model belongs to the technical field of metal material surface treatment, and particularly relates to a gas arc discharge device, a coupling system of the gas arc discharge device and a vacuum cavity and an ion nitriding process.
Background
The use of the conventional ion nitriding process can generate N-containing gas or N which has certain harm to the environment or personal safety 2 And H is 2 Is a mixed gas of (a) and (b). In the traditional glow ion nitriding technology, pure nitrogen is used as working gas, but the traditional glow nitriding technology is generally low in nitriding efficiency, and the thickness of the obtained nitriding layer is relatively thin; and a layer of nitride precipitation layer is formed on the surface of the workpiece along with the increase of nitriding time, so that the mechanical property or corrosion resistance of the material is affected; in conventional glow ion nitriding, a workpiece exists as a discharge cathode, and if pinholes, gaps or gaps between parts exist on the workpiece, hollow cathode discharge phenomenon can occur at the above-mentioned parts, resulting in local burn of the workpiece. Although the active screen ion nitriding and hollow cathode ion nitriding technology overcomes the defect that the traditional glow nitriding is used as a discharge cathode, the nitriding efficiency is low, and the problem that a nitride precipitation layer appears on the surface of a workpiece along with the increase of the depth of a nitriding layer still exists。
The utility model patent (CN 102134706 a) discloses a plasma arc nitriding apparatus, which places plasma arc photonitriding on top of a vacuum chamber. In the disclosed utility model, the cathode tube and the filament are powered by two independent power sources, respectively. The structure of the device can cause the difference of the electric potential of the hot wire 2 and the hollow cathode tube 18 in the drawing, and the electric discharge phenomenon occurs between the hot wire and the hollow cathode tube 18 due to the difference of the electric potential between the two electrodes in severe arc discharge, which is very easy to cause the damage of the hot wire 2 and the hollow cathode tube 18 in the arc discharge and is avoided in the actual production process. And the arc discharge device is arranged on the vacuum chamber, because the closer to the arc nitriding device, the higher the plasma energy, the plasma density and the radiation heat of the arc light to the workpiece are, the different processing effects of the processed workpiece 8 at different positions on the workpiece turntable 9 are caused.
The utility model patent (CN 205088299U) discloses an arc discharge type ion source device, in which the positive electrode of the arc power supply 6 is connected with the positive electrode of the metal electrode, and the negative electrode is connected with the sealed cylinder 12; the sealed round tube is used as a cathode of the arc discharge type ion source device, and the hollow cylinder 13 is suspended in the sealed cylinder 12 under zero potential; the metal electrode 2 is placed inside the hollow cylinder. In the patent of the utility model, a voltage difference is generated between the sealing cylinder 12 connected with the cathode of the arc power supply and the hot wire, namely the metal electrode 2, and the sealing cylinder 12 or the metal electrode 2 is broken down in the long-time arc discharge operation, so that the whole vacuum system is exposed to the atmospheric pressure, and the damage to the vacuum equipment is very large; and since the sealed cylinder 12 exists as a cathode during operation, glow discharge phenomenon occurs, causing the sealed cylinder to be worn out during long-term use, and the metal electrode 2 also exists. The utility model has no auxiliary anode extraction system, and the focusing coil only has a certain effect on electrons, so that the focusing coil is difficult to extract ions in the arc ion source.
Aiming at the defects in the arc discharge device and the glow and arc ion stainless steel nitriding process, a method for improving the quality of the nitriding layer with high efficiency is needed.
Disclosure of Invention
The utility model aims to provide a gas arc discharge device and a nitriding method by arc discharge generated by the device. The rate of ionization of the working gas by the arc discharge is significantly higher than that by the glow discharge, and the arc discharge is more intense than that by the glow discharge. The nitriding layer prepared by the method has good uniformity, high nitriding efficiency and deep nitriding layer, and solves the problems of burnt workpiece, nitride precipitation, thin nitriding layer, low nitriding efficiency and the like caused by hollow cathode effect in the traditional glow nitriding.
The utility model provides a gas arc discharge device, which is used for arc plasma nitriding by a structure that is coupled with an axial magnetic field on a vacuum cavity and an auxiliary anode to improve the energy and density of plasma. The specific technical scheme is as follows:
a gas arc discharge device comprises a metal cylinder module, a first electromagnetic coil module, a hot wire electrode module, a vacuum wall and an insulator;
the metal cylinder module comprises an auxiliary anode, a metal cylinder and a metal cylinder module power supply, wherein the anode of the metal cylinder module power supply is connected to the auxiliary anode, and the cathode of the metal cylinder module power supply is connected to the bottom end of the side wall of the metal cylinder;
the first electromagnetic coil module comprises a first electromagnetic coil and a first electromagnetic coil control module, the first electromagnetic coil control module comprises a first electromagnetic coil control set and a first electromagnetic coil power supply, the first electromagnetic coil control set is connected with the first electromagnetic coil power supply, the first electromagnetic coil control set controls the current of the first electromagnetic coil power supply, and the first electromagnetic coil power supply is connected with the first electromagnetic coil.
The hot wire electrode module comprises a hot wire electrode, a hot wire electrode module power supply and two metal electrodes, one end of one of the two metal electrodes is connected to the anode of the hot wire electrode module power supply, one end of the other metal electrode is connected to the cathode of the hot wire electrode module power supply, and the hot wire electrode is connected to the other ends of the two metal electrodes;
after the hot wire electrode is electrified, an arc light generating area is arranged at the position near the hot wire electrode;
the vacuum wall comprises a vacuum wall side wall and a vacuum wall top cover, and the insulator comprises a first insulator, a second insulator and a third insulator; the top end and the bottom of the side wall of the vacuum wall are respectively provided with a second insulator and a third insulator, and the top cover of the vacuum wall is insulated with the side wall of the vacuum wall through the second insulator;
the two metal electrodes are suspended on the vacuum wall top cover through a first insulator; an air inlet is arranged in the center of the vacuum wall top cover;
the metal cylinder is fixed on the vacuum wall top cover in a suspending way;
the side wall of the vacuum wall surrounds the periphery of the metal cylinder; the first electromagnetic coil surrounds the periphery of the side wall of the vacuum wall;
the side wall of the vacuum wall and the top cover of the vacuum wall enclose a vacuum chamber, the lower part of the vacuum chamber is open to be in butt joint with the vacuum chamber, and the gas arc discharge device is arranged on a flange reserved on the vacuum chamber.
The first insulator and the second insulator are utilized to ensure that the vacuum wall top cover and the metal cylinder are in a suspension position.
The hot wire electrode is made of a material with high melting point, high temperature resistance and good stability, and the hot wire is powered by an independent power supply hot wire power supply. The material of the hot wire electrode is selected from metal molybdenum, metal tungsten and tungsten-molybdenum alloy. Preferably, the material of the hot wire electrode is tungsten wire.
The metal cylinder is used as the cathode of the bias power supply, and the cathode of the bias power supply of the metal cylinder is connected with the hot wire motor in parallel, so that the metal cylinder and the hot wire electrode are in the same potential.
The metal cylinder is made of molybdenum, but is not limited to molybdenum, and the material of the metal cylinder can be tungsten-molybdenum alloy, titanium alloy and other metal materials with good conductivity and high temperature resistance.
The hot wire electrode is selected from tungsten wires, but is not limited to tungsten wires, and can be a metal material with high temperature resistance, stability and good electric conductivity, including tungsten-molybdenum alloy, pure metal molybdenum and other metals.
The first electromagnetic coil is powered by an independent power supply, namely a first electromagnetic coil power supply. The first electromagnetic coil acts on the arc light generating area, the electromagnetic field module comprises the first electromagnetic coil and a first electromagnetic coil power supply, and the electromagnetic coil changes the intensity and the direction of an electromagnetic field according to different input signals of the control module.
The gas arc discharge device provided by the utility model is provided with the first electromagnetic coil module with the structure capable of changing the magnetic field intensity, the condition of arc discharge can be reduced by changing the input signal of the electromagnetic field generated by the first electromagnetic coil, the density and the energy of plasma generated by the gas arc discharge device are changed, and the effect of better controlling the energy and the density of the plasma is realized.
The utility model also provides a coupling system of the gas arc discharge device and a vacuum cavity, wherein the vacuum cavity is a closed vacuumizing container, the gas arc discharge device is arranged in the vacuum cavity, and a workpiece frame module, a second electromagnetic field module, a third electromagnetic field module, a thermocouple and an air pumping system are also arranged in the vacuum cavity;
the workpiece frame module comprises a workpiece frame and a bias power supply, wherein the negative electrode of the bias power supply is connected with the workpiece frame, the positive electrode of the bias power supply is connected with the cavity wall of a vacuum cavity, and the vacuum cavity is a container for placing a gas arc discharge device;
the workpiece frame, an auxiliary anode of the gas arc discharge device and the thermocouple are positioned in the vacuum cavity; the power supply and the electromagnetic coil are both positioned outside the vacuum cavity.
The second electromagnetic field module comprises a second electromagnetic coil and a second electromagnetic coil control module, the second electromagnetic coil control module comprises a second electromagnetic coil control set and a second electromagnetic coil power supply, the third electromagnetic field module comprises a third electromagnetic coil and a third electromagnetic coil control module, and the third electromagnetic coil control module comprises a third electromagnetic coil control set and a third electromagnetic coil power supply; the second electromagnetic coil control set and the third electromagnetic coil control set are respectively connected with a second electromagnetic coil power supply and a third electromagnetic coil power supply to control the current direction, the current size and the waveform of the electromagnetic coil power supply, the electromagnetic coil power supply is respectively connected with the electromagnetic coils, and the electromagnetic coils change the strength and the direction of a magnetic field according to the difference of input signals of the current direction, the current size and the waveform of the control module;
the thermocouples comprise two thermocouples which are positioned at the top end and the bottom end inside the vacuum cavity and are used for measuring the temperature in the vacuum cavity;
the vacuum cavity is provided with a flange opening, and the air extraction system is connected with the vacuum cavity through a flange structure.
The number of the gas arc discharge devices may be at least one, or may be plural, and may be increased as needed in consideration of uniformity of the workpiece to be modified. The workpiece rack is positioned at one side of the vacuum cavity and is mutually perpendicular to the workpiece rack;
the auxiliary anode is arranged at the opposite side of the gas arc discharge device;
the second electromagnetic coil and the third electromagnetic coil are positioned between the gas arc discharge device and the auxiliary anode;
the workpiece frame is positioned between the second electromagnetic coil and the third electromagnetic coil, and the whole workpiece frame is wrapped in a magnetic field generated by the second electromagnetic coil and the third electromagnetic coil;
by the arrangement, the second electromagnetic coil and the third electromagnetic coil in the vacuum cavity are coupled with the magnetic field generated by the first electromagnetic coil in the gas arc discharge device, and the plasma density and energy in the whole vacuum cavity are controlled by adjusting the parameters of the three groups of electromagnetic coils.
The utility model discloses a process method for nitriding by utilizing gas arc discharge plasma based on the gas arc discharge device and a vacuum cavity structure, and relates to a process method for nitriding materials or mechanical parts stainless steel by utilizing axial magnetic field coupling of a device for generating plasma by utilizing gas arc discharge and the vacuum cavity. The method mainly controls the energy and density of the plasma by transmitting control signals to all power supply modules of the gas arc discharge device and the vacuum cavity. And according to the type of the required working gas and the property of the material to be modified, a certain signal is transmitted to each power supply module so as to achieve the optimal surface modification effect. The control signals include current direction, magnitude and waveform of the control power supply.
The gas arc discharge device and the magnetic field structure and the auxiliary anode structure on the vacuum cavity have the advantages that breakdown phenomenon between electrodes does not occur in the discharge process, and the metal cylinder is used as an auxiliary cathode and connected with a hot wire electrode (hot cathode) in parallel, so that electrons can be continuously conveyed, stability of thermionic emission is ensured, and stability of arc discharge can be ensured. The discharge breakdown phenomenon can not occur between the electrodes of the gas arc discharge device, and the nitriding efficiency can be obviously improved.
And the vacuum cavity is heated by an armored heater.
In the gas arc discharge device provided by the utility model, under the coupling action of the auxiliary anode and all electromagnetic fields, arc light enters the vacuum cavity from the metal cylinder, so that the action occurs.
The utility model also provides an ion nitriding process, which comprises the following specific steps:
step one, placing a workpiece on a workpiece frame with negative bias in a vacuum cavity after the workpiece is subjected to oil removal, grinding, mirror polishing, ultrasonic cleaning and the like, and placing a workpiece at different heights of the workpiece frame at intervals of 10mm, wherein the distance between the workpiece and a plasma outlet is about 270mm;
step two, before nitriding the workpiece, firstly vacuumizing the background of the vacuum cavity to 0.5 multiplied by 10 -4 Pa, heating the temperature in the vacuum cavity to 380 ℃ in advance, then introducing argon, controlling the pressure in the cavity to be 0.8Pa, applying a pulse negative bias voltage of-600V, duty ratio of 60% and frequency of 42KHz to the workpiece, and cleaning the workpiece by plasma;
step three, after the gas arc discharge device is started, the temperature in the cavity is heated to 400 ℃ through bombardment; and (3) introducing working gas nitrogen into the vacuum cavity, stabilizing the air pressure in the vacuum cavity at 0.8Pa, adjusting the magnetic field strength of the cavity after coupling of two groups of magnetic fields after the air pressure is stabilized, and nitriding austenitic stainless steel for 60min under different magnetic field strengths, wherein the magnetic field strength range is 0-120 Gs.
Compared with the prior art, the utility model has the beneficial effects that:
1. the utility model provides a medium gas arc discharge device and an ion nitriding process of a combined coupling magnetic field, wherein a first electromagnetic coil module, a second electromagnetic coil module and a third electromagnetic coil module in the device are respectively provided with independent power supplies for supplying power; the intensity of the magnetic field generated by the three electromagnetic coils is regulated and controlled by accurately adjusting the input signals, so that the energy and the density of the plasma are accurately controlled;
2. compared with the glow discharge nitriding process, the arc discharge is more severe, the nitriding layer prepared by the ion nitriding process based on the arc discharge principle provided by the utility model has good uniformity, high nitriding efficiency and deep nitriding layer, and the problems of burnt workpiece, nitride precipitation, thin nitriding layer, low nitriding efficiency and the like caused by the hollow cathode effect in the traditional glow nitriding are overcome;
3. in the gas arc discharge device provided by the utility model, the metal cylinder and the hot wire electrode (hot cathode) are in the same potential, and the metal cylinder has the function of providing electrons, so that more electrons can escape bombarding working gas to generate more plasmas, the ionization rate of the arc discharge device to the gas is improved, and the arc discharge is maintained;
4. the vacuum wall is in a zero potential suspension state, and the metal cylinder is in a suspension position and has the function of avoiding generated plasmas from bombarding the vacuum wall; the metal cylinder is connected in parallel with the hot wire electrode (hot cathode) as an auxiliary cathode, and must be kept in an insulated state.
5. The hot wire electrode provided by the utility model can bear high temperature, and the whole hot cathode and other electrified modules of the arc plasma source are in the same potential, so that no discharge occurs between the two electrodes; after the voltage is applied to the metal cylinder electrode module, glow plasma cannot be generated on the metal cylinder wall; the vacuum wall module is at a levitation potential in the operating state.
6, the plasmas in the device can be led out through the electromagnetic coil module; the serial connection, parallel connection or serial-parallel connection cooperation of the axial electromagnetic coils is realized by changing the input signal of the electromagnetic coil power supply, so that the energy and density distribution of plasma generated by the arc plasma source is changed;
by utilizing a plurality of groups of electromagnetic coil modules and electromagnetic coil power supply modules, the device can control the energy and the density of the plasmas in the cavity by adjusting the signal parameters of the electromagnetic coil power supply modules,
the designed axial magnetic field is formed by combining multiple steps and multiple groups of electromagnetic coils, different electromagnetic coils are started according to different process requirements, and the multiple groups of electromagnetic coils are coupled.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model.
FIG. 1 is a schematic diagram of a gas arc discharge apparatus of the present utility model;
fig. 2 is a schematic view of the internal structure of the vacuum chamber of the present utility model.
FIG. 3 shows the discharge state of a gas arc discharge apparatus according to the present utility model in a pure nitrogen atmosphere;
FIG. 4 shows the discharge state of the gas arc discharge device under pure nitrogen atmosphere under the electromagnetic field coupling action on the vacuum chamber;
FIG. 5 is a graph of the emission spectrum of plasma light at magnetic field strengths of 0, 40, 80, 120, 160Gs after coupling of a gas arc discharge device with an electromagnetic field on a vacuum chamber.
FIG. 6 shows the relative intensity changes of various ion spectral lines in the plasma spectra before and after coupling of the gas arc discharge device to the electromagnetic field on the vacuum chamber.
FIGS. 7 (a) and (b) show the change in surface morphology of nitrided stainless steel before and after coupling of the gas arc discharge device to the electromagnetic field on the vacuum chamber, respectively.
FIG. 8 is an XRD spectrum of the stainless steel surface before and after coupling of the stainless steel substrate and the gas arc discharge device to the electromagnetic field on the vacuum chamber.
FIG. 9 shows the variation of nitriding layer depth at different magnetic field strengths before and after coupling of a gas arc discharge device with an electromagnetic field on a vacuum chamber.
Wherein (a) is 0Gs, (b) is 40Gs, (c) is 80Gs, (d) is 120Gs, (e) is 160Gs, and (f) is a nitriding layer depth variation graph.
FIG. 10 shows microhardness of nitriding layer at 0-160 Gs before and after coupling of gas arc discharge device and electromagnetic field on vacuum chamber.
FIG. 11 shows the wear resistance of the stainless steel surface at 0-160 Gs before and after coupling the gas arc discharge device with the electromagnetic field on the vacuum chamber.
Wherein 1, metal cylinder module, 2, first solenoid, 3, auxiliary anode of gas arc discharge device, 4, vacuum wall, 5, arc light generation area, 6, metal electrode, 7, hot cathode, 8, metal cylinder module power supply, 9, air intake, 10, first insulator, 11, hot cathode module power supply, 12, hot cathode module, 13, vacuum wall, 14, second insulator, 15, metal cylinder, 16, first solenoid module, 17, first solenoid power supply, 18, third insulator, 19, work frame module, 20, bias power supply, 21, gas arc discharge device, 22, vacuum cavity, 23, thermocouple, 24, second solenoid power supply, 25, second electromagnetic field module, 26, second solenoid, 27, metal cylinder module power supply anode, 28, magnetic induction wire, 29, vacuum cavity auxiliary anode, 30, pumping system, 31, work frame, 32, third solenoid, 33, third solenoid module, 34, third solenoid power supply.
Detailed Description
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the utility model. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present utility model. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
Example 1: gas arc discharge device
A gas arc discharge apparatus, as shown in fig. 1, comprises a metal cylinder module 1, a first electromagnetic coil module 16, a hot wire electrode module 12, a vacuum wall and an insulator;
the metal cylinder module 1 comprises an auxiliary anode 3, a metal cylinder 15 and a metal cylinder module power supply 8, wherein the anode of the metal cylinder module power supply 8 is connected to the auxiliary anode 3, and the cathode of the metal cylinder module power supply 8 is connected to the bottom end of the side wall of the metal cylinder 15;
the first electromagnetic coil module 16 includes a first electromagnetic coil 2 and a first electromagnetic coil control module, the first electromagnetic coil control module includes a first electromagnetic coil control set and a first electromagnetic coil power supply 17, the first electromagnetic coil control set is connected with the first electromagnetic coil power supply 17, the first electromagnetic coil control set controls the current of the first electromagnetic coil power supply 17, and the first electromagnetic coil power supply 17 is connected with the first electromagnetic coil 2.
In this embodiment, the first electromagnetic coil control module adopts a first electromagnetic coil power supply 17 and a first electromagnetic coil control integrated structure, adopts a ITECH Auto Range DC power supply, and is of the model IT6932A.
The hot wire electrode module 12 comprises a hot wire electrode 7, a hot wire electrode module power supply 11 and two metal electrodes 6, one end of one metal electrode of the two metal electrodes 6 is connected to the anode of the hot wire electrode module power supply 11, one end of the other metal electrode is connected to the cathode of the hot wire electrode module power supply 11, and the hot wire electrode 7 is connected to the other ends of the two metal electrodes 6;
after the hot wire electrode 7 is electrified, an arc light generating area 5 is arranged at the position near the hot wire electrode;
the vacuum wall comprises a vacuum wall side wall 4 and a vacuum wall top cover 13, and the insulators comprise a first insulator 10, a second insulator 14 and a third insulator 18; the top end and the bottom of the vacuum wall side wall 4 are respectively provided with a second insulator 14 and a third insulator 18, and the vacuum wall top cover 13 and the vacuum wall side wall 4 are insulated by the second insulator 14;
the two metal electrodes 6 are suspended on a vacuum wall top cover 13 by a first insulator 10; the center of the vacuum wall top cover 13 is provided with an air inlet hole 9;
the metal cylinder 15 is fixed on the vacuum wall top cover 13 in a suspending way;
the vacuum wall side wall 4 surrounds the periphery of the metal cylinder 15; the first electromagnetic coil 2 surrounds the periphery of the vacuum wall side wall 4;
the vacuum wall side wall 4 and the vacuum wall top cover 13 enclose a vacuum chamber, the lower part of the vacuum chamber is open to be in butt joint with the vacuum chamber, and the gas arc discharge device is arranged on a flange reserved on the vacuum chamber.
The hot wire electrode 7 is made of a material with high melting point, high temperature resistance and good stability, and the hot wire is powered by an independent power hot wire power supply 11. The material of the hot wire electrode is selected from metal molybdenum, metal tungsten and tungsten-molybdenum alloy. Preferably, the material of the hot wire electrode is tungsten wire.
The metal tube 15 is used as the cathode of the bias power supply 8, and the cathode of the bias power supply of the metal tube 15 is connected in parallel with the hot wire motor 7, so that the metal tube 15 and the hot wire electrode 7 are at the same potential.
The metal cylinder is made of molybdenum, but is not limited to molybdenum, and the material of the metal cylinder can be tungsten-molybdenum alloy, titanium alloy and other metal materials with good conductivity and high temperature resistance.
The hot wire electrode is selected from tungsten wires, but is not limited to tungsten wires, and can be a metal material with high temperature resistance, stability and good electric conductivity, including tungsten-molybdenum alloy, pure metal molybdenum and other metals.
In the implementation process of the utility model, the first insulator 10 and the second insulator 14 are utilized to ensure that the vacuum wall top cover 13 and the metal cylinder 15 are in a suspension position.
The first electromagnetic coil 2 is powered by a separate power source, the first electromagnetic coil power source 17. The first electromagnetic coil 2 acts on the arc generating area 5, and the electromagnetic field module 16 comprises the first electromagnetic coil 2 and a first electromagnetic coil power supply 17, and the electromagnetic coil changes the intensity and direction of the electromagnetic field according to the input signals of the control module.
The gas arc discharge device provided by the utility model is provided with the first electromagnetic coil module 16 with a structure capable of changing the magnetic field intensity, the condition of arc discharge can be reduced by changing the input signal of the electromagnetic field generated by the first electromagnetic coil 2, the density and the energy of plasma generated by the gas arc discharge device are changed, and the better effect of controlling the energy and the density of the plasma is realized.
Example 2: the coupling system of the gas arc discharge device and the vacuum cavity comprises:
the utility model also provides a coupling system of the gas arc discharge device and the vacuum cavity, as shown in fig. 2, the left side is a schematic diagram of the arrangement of the gas arc discharge device 21 in the vacuum cavity 22, the right side is a detailed cross-sectional view of the structure in the vacuum cavity 22, the vacuum cavity 22 is a closed vacuumizing container, the gas arc discharge device 21 is installed in the vacuum cavity 22, and a workpiece frame module, a second electromagnetic field module 25, a third electromagnetic field module 33, a thermocouple 23 and an air extraction system 30 are also arranged in the vacuum cavity 22;
in fig. 2, the auxiliary anode 3 and the metal cylinder module power anode 27 of the gas arc discharge device are marked with an auxiliary anode module 29;
the workpiece frame module comprises a workpiece frame 31 and a bias power supply 20, wherein the negative electrode of the bias power supply 20 is connected with the workpiece frame 31, the positive electrode of the bias power supply 20 is connected with the cavity wall of a vacuum cavity 22, and the vacuum cavity 22 is a container for placing a gas arc discharge device;
in this embodiment, the metal cylinder module power supply 8 and the bias power supply 20 use ADL series dc power supply.
The workpiece frame 31, the auxiliary anode 3 of the gas arc discharge device and the thermocouple 23 are positioned in the vacuum cavity; the power supply and the electromagnetic coil are both positioned outside the vacuum cavity 22;
the second electromagnetic field module 25 includes a second electromagnetic coil 26 and a second electromagnetic coil control module including a second set of electromagnetic coil controls and a second electromagnetic coil power supply 24, the third electromagnetic field module 33 includes a third electromagnetic coil 32 and a third electromagnetic coil control module including a third set of electromagnetic coil controls and a third electromagnetic coil power supply 34; the second electromagnetic coil control set and the third electromagnetic coil control set are respectively connected with the second electromagnetic coil power supply 24 and the third electromagnetic coil power supply 34 to control the current direction, the current magnitude and the waveform of the electromagnetic coil power supply, the electromagnetic coil power supply is respectively connected with the electromagnetic coil, and the electromagnetic coil changes the strength and the direction of the magnetic field according to the difference of input signals of the current direction, the magnitude and the waveform of the control module;
in this embodiment, the second electromagnetic coil control module and the third electromagnetic coil control module both adopt an integrated structure of electromagnetic coil power supply and electromagnetic coil control, and adopt ITECH Auto Range DC power supply, and the model is IT6932A.
The thermocouples 23 comprise two thermocouples which are positioned at the top end and the bottom end of the inner part of the vacuum cavity and are used for measuring the temperature in the vacuum cavity;
a flange port is provided on the vacuum chamber, and the air extraction system 30 is connected with the vacuum chamber through a flange structure.
The number of the gas arc discharge devices 21 may be at least one or more, and four are shown in the figure, and may be increased as needed in consideration of uniformity of the workpiece to be modified. Is positioned at one side of the vacuum cavity and is mutually perpendicular to the workpiece frame 31;
the auxiliary anode 3 is installed at the opposite side of the gas arc discharge device 21;
the second electromagnetic coil 26 and the third electromagnetic coil 32 are positioned between the gas arc discharge device 21 and the auxiliary anode 3;
the workpiece frame 31 is positioned between the second electromagnetic coil 26 and the third electromagnetic coil 32, and the whole workpiece frame 31 is wrapped in the magnetic field generated by the second electromagnetic coil 26 and the third electromagnetic coil 32;
by the arrangement, the second electromagnetic coil and the third electromagnetic coil in the vacuum cavity are coupled with the magnetic field generated by the first electromagnetic coil in the gas arc discharge device, and the plasma density and energy in the whole vacuum cavity are controlled by adjusting the parameters of the three groups of electromagnetic coils.
The utility model discloses a process method for nitriding by utilizing gas arc discharge plasma based on the gas arc discharge device and a vacuum cavity structure, and relates to a process method for nitriding materials or mechanical parts stainless steel by utilizing axial magnetic field coupling of a device for generating plasma by utilizing gas arc discharge and the vacuum cavity. The method mainly controls the energy and density of the plasma by transmitting control signals to all power supply modules of the gas arc discharge device and the vacuum cavity. And according to the type of the required working gas and the property of the material to be modified, a certain signal is transmitted to each power supply module so as to achieve the optimal surface modification effect. The control signals include current direction, magnitude and waveform of the control power supply.
According to the gas arc discharge device, the magnetic field structure and the auxiliary anode structure on the vacuum cavity, breakdown phenomenon between electrodes does not occur in the discharge process, and the metal cylinder 15 serving as an auxiliary cathode is connected with the hot wire electrode 7 (hot cathode) in parallel, so that electrons can be continuously conveyed, stability of thermionic emission is ensured, and stability of arc discharge can be ensured. The discharge breakdown phenomenon can not occur between the electrodes of the gas arc discharge device, and the nitriding efficiency can be obviously improved.
And the vacuum cavity is heated by an armored heater.
In the gas arc discharge device provided by the utility model, under the coupling action of the auxiliary anode and all electromagnetic fields, arc light enters the vacuum cavity from the metal cylinder 15, so that the action occurs.
Example 3: examples of the gas arc discharge apparatus of the present utility model in producing an arc discharge;
according to the requirements of the patent, the arc discharge plasma source device is installed and debugged, and the hot wire is tungsten wire. By observing the condition of the arc discharge, the stability of the arc discharge is checked to determine whether the arcing process is safe and reliable.
The experimental process comprises the following steps: the vacuum chamber is first evacuated to 0.5X10 -4 And (3) introducing argon into the vacuum chamber below Pa, and adjusting a mass flow controller and a gate valve to keep the pressure of the vacuum chamber at 0.8Pa.And (5) turning on a hot wire power supply, wherein other power supplies are in a standby state. When the current of the hot wire reaches 120A, the bias power supply is slowly started, and when arc light appears in the plasma source, the bias power supply is stopped being regulated, the discharge condition in the vacuum cavity is observed, and a small amount of plasma exists in the vacuum cavity. When the pressure of the vacuum chamber is 0.8Pa, the arc plasma source can stably discharge, the time for stable discharge is ensured to be more than 100 hours, and the plasma discharge is mainly concentrated in the plasma source (the position shown as 5 in fig. 1).
Example 4: examples of aspects of the gas arc discharge apparatus of the present utility model that use the first electromagnetic coil module 16 on the gas arc discharge apparatus:
the first electromagnetic coil 16 was drawn from the arc discharge ion source apparatus in accordance with example 1, and the effect of the electromagnetic coil on the plasma generated by the gas arc discharge apparatus was shown.
The experimental process comprises the following steps: according to example 1, the gas arc discharge device was turned on, after the discharge of the gas arc discharge device was stabilized, the plasma discharge condition in the chamber was observed, then the lead-out electromagnetic coil was turned on, and the discharge state diagram before the electromagnetic coil was turned on in the chamber (fig. 3) and after the electromagnetic coil was turned on (fig. 4) was observed. It can be seen that the plasma discharge in the cavity is significantly enhanced; the plasma is concentrated mainly at the outlet of the arc discharge device, there is a small amount of plasma in the chamber, while the plasma in example 1 is concentrated mainly in the hot wire arc zone 5.
Example 5: the utility model relates to an embodiment of a gas arc discharge device arranged on a vacuum cavity of a coupling part and an auxiliary anode in the cavity.
On the basis of example 2, two sets of axial electromagnetic coils, a second electromagnetic coil 26 and a third electromagnetic coil 32, are applied to the vacuum chamber, as shown in fig. 2, the two sets of electromagnetic coils being mounted between the gas arc discharge device and the auxiliary anode, close to the gas arc discharge device and the auxiliary anode, respectively. The two sets of electromagnetic coils show the effect of the axial electromagnetic coils on the plasma transport process in the vacuum chamber. And a water-cooled auxiliary anode is arranged in the cavity and is arranged at the other side of the gas arc discharge device as shown in 3 in figure 2. And the auxiliary anode is the same anode as 3 in fig. 1.
The experimental process comprises the following steps: after the ion source was turned on and the arc ion source discharge stabilized, the additional axial solenoids (second solenoid 26 and third solenoid 32) were turned on in the same manner as in examples 1 and 2. From the diagnosis results of fig. 5 and 6, it can be seen that the relative intensity of the plasma emission spectrum tends to increase as the intensity of the magnetic field increases.
Example 6: embodiments of the present utility model in terms of coupling a first electromagnetic coil module (17 in FIG. 1) to a gas arc discharge device and two sets of electromagnetic coil modules (26 and 32 in FIG. 2) on a vacuum chamber:
on the basis of embodiment 3, three sets of electromagnetic field modules are turned on, positive and negative poles of current signals output by a power supply (17 in fig. 1, 24 and 34 in fig. 2) of the electromagnetic coil modules are coupled, the positive and negative poles of the three sets of electromagnetic fields are coupled, the magnetic field direction after the magnetic field coupling is N pole at one side of the gas arc discharge device, and S pole at one side of the auxiliary anode. As shown by magnetic induction line 28 in fig. 2. The intensity of the coupled electromagnetic field is controlled by adjusting the current and waveform of the power supply, so that the intensity of the coupled electromagnetic field is adjustable between 0Gs and 160 Gs.
Example 7: examples of the utility model in terms of plasma nitriding:
the austenitic stainless steel is subjected to plasma nitriding surface strengthening treatment by utilizing the gas arc discharge device and the vacuum cavity.
The experimental process comprises the following steps: the workpiece is placed on a workpiece frame with negative bias in a cavity after being subjected to oil removal, grinding, mirror polishing, ultrasonic cleaning and the like, and is placed at different heights of the workpiece frame at intervals of 10mm, wherein the distance between the workpiece and a plasma outlet is about 270mm. Before nitriding the workpiece, the background vacuum of the vacuum cavity is pumped to 0.5 multiplied by 10 -4 Pa. In order to avoid the decline of corrosion resistance caused by nitride precipitation and ensure a certain nitriding rate, the nitriding temperature of the austenitic stainless steel is determined to be about 400 DEG CBefore the nitriding experiment starts, the temperature in the vacuum cavity is heated to 380 ℃ in advance, argon is introduced, the pressure in the cavity is controlled at 0.8Pa, a negative pulse bias voltage of 600V, duty ratio of 60% and frequency of 42KHz is applied to a sample, and plasma cleaning is carried out on a workpiece. After the gas arc discharge device was turned on, the temperature in the chamber was heated to 400 ℃ by bombardment. And (3) introducing working gas nitrogen into the vacuum cavity, stabilizing the air pressure in the vacuum cavity at 0.8Pa, adjusting the magnetic field strength after coupling of two groups of magnetic fields on the cavity after the air pressure is stabilized, and nitriding the austenitic stainless steel for 60min under different magnetic field strengths (0-120 Gs).
The technology couples the axial magnetic field with the magnetic field of the gas arc discharge device by adjusting the signal parameters of the axial magnetic field electromagnetic coil power supply module. And the density and energy of the plasma in the cavity are regulated by the coupling magnetic field so as to carry out high-efficiency nitriding. Different axial magnetic field intensities can be selected to couple with a gas arc discharge device source, so that plasma nitriding and surface strengthening treatment research and application are carried out.
After the experiment is finished, characterization detection and comparison analysis are carried out on the nitriding effect by adopting the method. Comparing a with b in fig. 7, no significant change in surface topography can be seen. XRD analysis (shown in figure 8) is carried out on the nitriding sample before and after the coupling axial magnetic field is applied, so that when the magnetic field intensity is less than 80Gs, the nitriding layer is in a single gamma N phase; during the increase of the magnetic field strength from 0Gs to 80Gs, the relative strength of the gamma N peak of the nitriding layer of the workpiece becomes large. Nitriding efficiency is an important index for evaluating nitriding process, and the nitriding depth detection is carried out on the nitrided workpiece (the result is shown as f in fig. 9), so that it can be seen that: after magnetic field coupling, when the magnetic field strength is 80Gs, the nitriding efficiency is improved to 6 times of the original nitriding efficiency, and in the utility model, the nitriding layer which is 50 mu m and has no nitride precipitation can be obtained by nitriding stainless steel for 60min. The nitriding layer which is not separated out of nitride and is 10 mu m can be obtained only by nitriding the stainless steel for 20 hours by using the traditional active screen plasma; the hollow cathode plasma nitriding for 1h can only obtain a nitriding layer with no nitride precipitation of 12 mu m. The mechanical property test results show that: by utilizing the coupling technology of the gas arc discharge device and the cavity axial magnetic field, the microhardness of the stainless steel after nitriding is 5 times that of a non-nitrided sample (shown in figure 10), and the wear resistance of the nitrided sample can be improved by 12 times compared with the non-nitrided sample (shown in figure 11).
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (6)
1. A coupling system of a gas arc discharge device and a vacuum cavity is characterized in that,
the gas arc discharge device comprises a metal cylinder module, a first electromagnetic coil module, a hot wire electrode module, a vacuum wall and an insulator;
the metal cylinder module comprises an auxiliary anode, a metal cylinder and a metal cylinder module power supply, wherein the anode of the metal cylinder module power supply is connected to the auxiliary anode, and the cathode of the metal cylinder module power supply is connected to the bottom end of the side wall of the metal cylinder;
the first electromagnetic coil module comprises a first electromagnetic coil and a first electromagnetic coil control module, the first electromagnetic coil control module comprises a first electromagnetic coil control set and a first electromagnetic coil power supply, the first electromagnetic coil control set is connected with the first electromagnetic coil power supply, the first electromagnetic coil control set controls the current of the first electromagnetic coil power supply, and the first electromagnetic coil power supply is connected with the first electromagnetic coil;
the hot wire electrode module comprises a hot wire electrode, a hot wire electrode module power supply and two metal electrodes, one end of one of the two metal electrodes is connected to the anode of the hot wire electrode module power supply, one end of the other metal electrode is connected to the cathode of the hot wire electrode module power supply, and the hot wire electrode is connected to the other ends of the two metal electrodes;
the vacuum wall comprises a vacuum wall side wall and a vacuum wall top cover, and the insulator comprises a first insulator, a second insulator and a third insulator; the top end and the bottom of the side wall of the vacuum wall are respectively provided with a second insulator and a third insulator, and the top cover of the vacuum wall is insulated with the side wall of the vacuum wall through the second insulator;
the two metal electrodes are suspended on the vacuum wall top cover through a first insulator; an air inlet is arranged in the center of the vacuum wall top cover;
the metal cylinder is fixed on the vacuum wall top cover in a suspending way;
the side wall of the vacuum wall surrounds the periphery of the metal cylinder; the first electromagnetic coil surrounds the periphery of the side wall of the vacuum wall;
the side wall of the vacuum wall and the top cover of the vacuum wall enclose a vacuum chamber, and the lower part of the vacuum chamber is open;
the metal cylinder material is selected from metal molybdenum, tungsten-molybdenum alloy and titanium alloy;
the hot wire electrode is selected from tungsten-molybdenum alloy, pure metal molybdenum and tungsten wire;
the vacuum cavity is a closed vacuumizing container, the gas arc discharge device is arranged in the vacuum cavity, the lower end of the side wall of the vacuum wall is in butt joint with the vacuum cavity, and the gas arc discharge device is arranged on a flange reserved on the vacuum cavity; the vacuum cavity is internally provided with a workpiece frame module, a second electromagnetic field module, a third electromagnetic field module, a thermocouple and an air exhaust system;
the workpiece frame module comprises a workpiece frame and a bias power supply, wherein the negative electrode of the bias power supply is connected with the workpiece frame, the positive electrode of the bias power supply is connected with the cavity wall of a vacuum cavity, and the vacuum cavity is a container for placing a gas arc discharge device;
the workpiece frame, an auxiliary anode of the gas arc discharge device and the thermocouple are positioned in the vacuum cavity; the power supply and the electromagnetic coil are both positioned outside the vacuum cavity;
the thermocouples comprise two thermocouples which are positioned at the top end and the bottom end inside the vacuum cavity and are used for measuring the temperature in the vacuum cavity;
a flange opening is arranged on the vacuum cavity, and the air extraction system is connected with the vacuum cavity through a flange structure;
the second electromagnetic field module comprises a second electromagnetic coil and a second electromagnetic coil control module, the second electromagnetic coil control module comprises a second electromagnetic coil control set and a second electromagnetic coil power supply, the third electromagnetic field module comprises a third electromagnetic coil and a third electromagnetic coil control module, and the third electromagnetic coil control module comprises a third electromagnetic coil control set and a third electromagnetic coil power supply; the second electromagnetic coil control set and the third electromagnetic coil control set are respectively connected with a second electromagnetic coil power supply and a third electromagnetic coil power supply, and are used for controlling the current direction, the current size and the waveform of the electromagnetic coil power supply, and the electromagnetic coil power supplies are respectively connected with the electromagnetic coils;
the auxiliary anode is arranged at the opposite side of the gas arc discharge device;
the second electromagnetic coil and the third electromagnetic coil are positioned between the gas arc discharge device and the auxiliary anode;
the workpiece frame is positioned between the second electromagnetic coil and the third electromagnetic coil, and the whole workpiece frame is wrapped in a magnetic field generated by the second electromagnetic coil and the third electromagnetic coil.
2. A gas arc discharge device and vacuum chamber coupling system as in claim 1 wherein the hot wire electrode is a tungsten wire.
3. A gas arc discharge device and vacuum chamber coupling system as in claim 1 wherein the metallic canister material is metallic molybdenum.
4. A gas arc discharge device and vacuum chamber coupling system as in claim 1 wherein said gas arc discharge device is at least one.
5. An ion nitriding process, characterized by using the coupling system of the gas arc discharge device and the vacuum cavity as claimed in any one of claims 1 to 4, comprising the following steps:
step one, placing a workpiece on a workpiece frame with negative bias in a vacuum cavity after the workpiece is subjected to oil removal, grinding, mirror polishing, ultrasonic cleaning and the like, and placing a workpiece at different heights of the workpiece frame at intervals of 10mm, wherein the distance between the workpiece and a plasma outlet is about 270mm;
step two, before nitriding the workpiece, firstly vacuumizing the background of the vacuum cavity to 0.5 multiplied by 10 -4 Pa, heating the temperature in the vacuum cavity to 380 ℃ in advance, then introducing argon, controlling the pressure in the cavity to be 0.8Pa, applying a pulse negative bias voltage of-600V, duty ratio of 60% and frequency of 42KHz to the workpiece, and cleaning the workpiece by plasma;
step three, after the gas arc discharge device is started, the temperature in the cavity is heated to 400 ℃ through bombardment; and (3) introducing working gas nitrogen into the vacuum cavity, stabilizing the air pressure in the vacuum cavity at 0.8Pa, adjusting the magnetic field strength of the cavity after coupling of two groups of magnetic fields after the air pressure is stabilized, and nitriding austenitic stainless steel for 60min under different magnetic field strengths, wherein the magnetic field strength range is 0-120 Gs.
6. An ion nitriding process according to claim 5, wherein the workpiece is selected from, but not limited to, stainless steel, high speed steel, and cemented carbide.
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| CN113278928B (en) * | 2021-05-21 | 2023-09-01 | 成都大学 | Method for preparing nano-structure transition metal nitride film by utilizing plasma |
| CN113584425B (en) * | 2021-07-30 | 2023-11-17 | 烟台大学 | Ion nitriding magnetic field auxiliary equipment, processing system and method |
| CN113604774B (en) * | 2021-07-30 | 2023-08-29 | 清华大学 | Ion nitrocarburizing magnetic field auxiliary equipment, treatment system and method |
| CN115305436B (en) * | 2022-08-05 | 2024-01-16 | 清华大学 | Ion diffusion equipment with double plasma excitation sources and design method thereof |
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