CN108893705A - A kind of vacuum nitriding processing technology - Google Patents

A kind of vacuum nitriding processing technology Download PDF

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Publication number
CN108893705A
CN108893705A CN201810782881.5A CN201810782881A CN108893705A CN 108893705 A CN108893705 A CN 108893705A CN 201810782881 A CN201810782881 A CN 201810782881A CN 108893705 A CN108893705 A CN 108893705A
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heating
nitrogen
room
vacuum
passed
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CN108893705B (en
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黄岳枝
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Jiaxing Hebang Machinery Technology Co.,Ltd.
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Machinery Science And Technology Ltd Of Nation Is Closed In Jiaxing
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24Nitriding
    • C23C8/26Nitriding of ferrous surfaces
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/56General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering characterised by the quenching agents
    • C21D1/613Gases; Liquefied or solidified normally gaseous material
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/62Quenching devices
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F17/00Multi-step processes for surface treatment of metallic material involving at least one process provided for in class C23 and at least one process covered by subclass C21D or C22F or class C25

Abstract

The present invention provides a kind of vacuum nitriding processing technologys, belong to technical field of heat treatment, it solves the problems, such as that existing vacuum nitriding process processing effect is poor.This vacuum nitriding processing technology includes:Material frame is sent into preparation room;Heating room and preparation room are vacuumized, vacuum degree P1, material frame is sent into heating room;Heating interior is warming up to technological temperature T1, keeps heating house vacuum degree P1, single order heat preservation;It is passed through nitrogen, adjusts air pressure P2=200-600Pa, second order heat preservation;Continue to be passed through nitrogen until P2=0.06MPa-0.15MPa;It is passed through nitrogen circulation, air pressure in heating room with rate V to keep, the heat preservation of three ranks;Technological temperature T1 is kept, heating room and cooling chamber are vacuumized until vacuum degree maintains an equal level;Nitrogen is sent into cooling chamber and is passed through to material frame, keeps air pressure P3=0.6-1.2MPa, workpiece is cooling until temperature is down to 60 DEG C hereinafter, stopping cooling;It opens vent valve to maintain an equal level to air pressure P3 and atmospheric pressure, material frame is come out of the stove.The present invention has the characteristics that processing effect is good.

Description

A kind of vacuum nitriding processing technology
Technical field
The invention belongs to technical field of heat treatment, are related to a kind of vacuum nitriding processing technology, especially a kind of to be used for high-chromium alloy The vacuum nitriding processing technology of steel production.
Background technique
Nitrogen is penetrated into toward metal parts surface, the metal parts after can making nitriding obtain high surface hardness, resistance to Mill property, fatigue strength, seizure resistance and anti-atmosphere and superheated steam corrosive power, anti-temper softening ability;Nitriding is current One of highly important chemical heat treatment process in high-end manufacturing industry.Nitriding there are many method, the most commonly used is gas nitriding, Glow discharge nitriding and tufftride.
Gas nitriding is metal parts to be put into closed container, is passed through the nitrogen hydrogen after ammonia decomposes and heats To 450 DEG C -700 DEG C, 40-80 hours are kept the temperature, can get the surface hardness of HV850~1200;Workpiece appearance after nitriding is in greyish black Color.
Glow discharge nitriding is also known as aura nitriding, is carried out using glow discharge principle.It is using metal parts as cathode It is put into closed container, is passed through the nitrogen hydrogen after ammonia decomposes, under ion plasma forceful electric power field action, the cation of nitrogen and hydrogen It is bombarded with high speed to workpiece surface.The kinetic energy of ion is changed into thermal energy, heating workpiece surface to required temperature.It is adsorbing simultaneously Under diffusion, nitrogen penetrates into workpiece surface then, to obtain the surface hardness of HV850~1200;It is up to when glow discharge nitriding technique 80 hours, the workpiece appearance after nitriding was in light gray.
Tufftride is also referred to as nitrocarburizing.It is to be placed in metal parts in the medium of active nitrogen and carbon atom, 500 ~700 DEG C of progress nitrocarburizings, but based on nitriding, technique duration is shorter, can take effect within 2-8 hours, tufftride hardness is earlier above It states technique and wants low, the workpiece appearance after nitriding is in black.Tufftride one it is significant the disadvantage is that, due to the infiltration of micro carbon Enter, effect is dragged down to the corrosion resistance of stainless steel material.
It is decomposed since the nitrogen in above-mentioned technique both is from ammonia, and ammonia has intense irritation, is unfavorable for operating The health of personnel, while certain influence can also be generated on air environment.
In conclusion being the deficiency solved on existing nitridation process, it is reasonable, directly sharp that the present invention devises a kind of design With the nitrogen in air do medium and it is easy to operate, the process time is short, processing effect is good, presentation quality is high, complete environment-friendly type is true Empty nitrizing quenching processing technology.
Summary of the invention
The present invention in order to solve the problems existing in the prior art, is provided a kind of design and rationally, is directly done using the nitrogen in air Medium and it is easy to operate, the process time is short, processing effect is good, presentation quality is high, complete environment-friendly type vacuum nitriding quenching processing work Skill.
The purpose of the present invention can be achieved through the following technical solutions:A kind of vacuum nitriding quenching processing technology, including with Lower step:
Step 1:The material frame for filling workpiece is sent into the preparation room of vacuum nitriding furnace;
Step 2:The heating room of vacuum nitriding furnace and preparation room are vacuumized, vacuum degree P1, while material frame being sent into and is heated Room;
Step 3:Heating is indoor to be warming up to technological temperature T1 with rate of heat addition v1, keeps heating house vacuum degree P1, carries out single order Heat preservation, soaking time t1=10-30min;
Step 4:It is passed through nitrogen toward heating interior, heating room pressure P2=200-600Pa is adjusted, keeps technological temperature T1, into The heat preservation of row second order, soaking time t2=10-45min;
Step 5:Continue in the environment of keeping technological temperature T1 toward heating interior be passed through nitrogen until heating room pressure P2= 0.06MPa-0.15MPa;
Step 6:Technological temperature T1 is kept, continues to be passed through nitrogen toward heating interior with rate V, and controls nitrogen in heating room Circulation, opens pneumatic control system, and control heating room pressure remains at P2=0.06MPa-0.15MPa, carries out three Rank heat preservation, soaking time t3=30-90min;
Step 7:Close pneumatic control system, heating room temperature keeps technological temperature T1, to the heating room of vacuum nitriding furnace and Cooling chamber is vacuumized respectively, until the vacuum degree of two Room maintains an equal level, it is P1;
Step 8:Material frame is sent into cooling chamber, and is passed through nitrogen in cooling chamber and workpiece is cooled down, is kept in cooling chamber Air pressure P3=0.6-1.2MPa, workpiece temperature are cooling until temperature is down to 60 DEG C hereinafter, stopping cooling with rate v2;
Step 9:Vent valve is opened, nitrogen in cooling chamber is discharged and maintains an equal level to air pressure P3 and atmospheric pressure, open vacuum nitriding furnace, work Part is come out of the stove with material frame.
As the further improvement of this case, the value range of above-mentioned vacuum degree P1 is P1≤10Pa.
Another step as this case is improved, in step 3, T1=1020-1100 DEG C of technological temperature.
As the further improvement of this case, in step 6, nitrogen is passed through rate V=250-2500ml/s.
Another step as this case is improved, in step 8, workpiece cooling rate v2=99 DEG C/s.
As the further improvement of this case, in step 3, when thickness of workpiece is greater than 10mm, heating interior is first to add Hot rate v3 is warming up to 550 DEG C, and soaking time t4=10-30min is then warming up to 850 DEG C with rate of heat addition v4, soaking time T5=10-45min is finally warming up to technological temperature T1 with rate of heat addition v5, carries out single order heat preservation, soaking time t1=10- 30min, heating interior remain vacuum degree P1.
Another step as this case is improved, and in step 8, cooling water, coolant water temperature T2≤35 are passed through in cooling chamber DEG C, cooling water pressure P4=0.2-0.5MPa.
Compared with prior art, the present invention by quenching technical and nitridation process be incorporated into same equipment, in same technique it is complete At greatling save time and expense, improve production efficiency;Workpiece structure after vacuum heat treatment is stablized, and has enough cores Hardness and higher surface hardness, long service life and workpiece surface possess the stainless steel silvery white of bright cleaning, aesthetics It is good;Windrow shove charge may be implemented, shove charge requirement is low, batch is big;Using high pure nitrogen as nitriding and cooling raw material, in Re Chu Free from extraneous odour, smokeless, reduce environmental pollution during reason, and production effect is good.
Detailed description of the invention
Fig. 1 is heat treatment process figure of the invention.
Fig. 2 is another heat treatment process figure of the invention.
Fig. 3 is the structural schematic diagram of vacuum nitriding furnace in the present invention.
In figure, 10, vacuum nitriding furnace;11, preparation room;12, room is heated;13, cooling chamber;14, insulated door;15, heating electricity Pole;16, nitrogen gas tank;17, circulating cooling pond;20, material frame.
Specific embodiment
Below with reference to examples and drawings, technical solution of the present invention is further elaborated.
As shown in Figure 1 to Figure 3, this vacuum nitriding processing technology includes the following steps:
The first step:The material frame 20 for filling workpiece is sent into the preparation room 11 of vacuum nitriding furnace 10;
The good workpiece of preparatory processing is loaded in material frame 20, is sent into vacuum nitriding furnace 10 and carries out vacuum hardening and vacuum infiltration Nitrogen technique, specifically, workpiece is introduced into preparation room 11.
Second step:The heating room 12 of vacuum nitriding furnace 10 and preparation room 11 are vacuumized, vacuum degree P1, while by material frame 20 are sent into heating room 12;
After workpiece enters preparation room 11, then preparation room 11 and heating room 12 are carried out vacuumizing work, herein, this implementation respectively The vacuum degree of preferably two Room is consistent in example, and wherein the value range of vacuum degree is P1≤10Pa, and material frame 20 is sent into heating room at this time In 12.Ensure that the numerical value of biggish level of vacuum namely vacuum degree P1 are as small as possible in practical operation as far as possible.
Third step:Technological temperature T1 is warming up to rate of heat addition v1 in heating room 12, keeps vacuum degree P1 in heating room 12, Carry out single order heat preservation, soaking time t1=10-30min;
The setting heating electrode 15 preferably in heating room 12 herein, carries out constant-speed heating to heating room 12 with rate v1, until rising Temperature is to technological temperature(That is hardening heat)T1, T1 range are between 1020-1100 DEG C, and when actual processing, T1 be can choose 1020 DEG C or 1060 DEG C or 1100 DEG C etc..
Heating room 12 is kept to be in vacuum state in the process, wherein vacuum degree P1 is maintained at 10Pa hereinafter, heat preservation 10- 30min, is conducive to the conversion of Workpiece structure tissue, while being also convenient for subsequent processing.
4th step:It is passed through nitrogen in heating room 12, air pressure P2=200-600Pa in heating room 12 is adjusted, keeps process warm T1 is spent, second order heat preservation, soaking time t2=10-45min are carried out;
After single order heat preservation, vacuum nitriding process is carried out, specifically, in the environment of technological temperature T1, from nitrogen gas tank 16 toward heating It is passed through nitrogen in room 12, and the air pressure P2 controlled in heating room 12 is maintained between 200-600Pa, continues to keep the temperature 10-45min, It can be penetrated into workpiece convenient for nitrogen-atoms, structure organization is promoted to convert.
5th step:Continue to be passed through nitrogen in heating room 12 in the environment of keeping technological temperature T1 until in heating room 12 Air pressure P2=0.06MPa-0.15MPa;
Preferably further continue to be passed through nitrogen in heating room 12 in the present embodiment, so that air pressure increases in heating room 12 In the range of 0.06MPa-0.15MPa, promote nitrogen-atoms preferably to penetrate into workpiece by the environment of high temperature and pressure, accelerates nitriding Efficiency.
6th step:Technological temperature T1 is kept, continues to be passed through nitrogen in heating room 12 with rate V, and control nitrogen and adding Circulation in hot cell 12 opens pneumatic control system, and air pressure remains at P2=0.06MPa- in control heating room 12 0.15MPa carries out three rank heat preservations, soaking time t3=30-90min;
Further, in the range of maintaining 0.06MPa-0.15MPa by air pressure in pneumatic control system control heating room 12, It is noted that being preferably passed through nitrogen in the present embodiment with the rate of V=250-2500ml/s, and make nitrogen in heating room 12 Inner recirculation flow is logical, sufficiently flows around workpiece, while keeping technological temperature T1, keeps the temperature 30-90min, further nitrogen is promoted to fill Divide and penetrate into each workpiece, it is ensured that the nitriding quality of each workpiece improves the yield rate of product.
The soaking time in above-mentioned each stage is subject to depending on specific Workpiece structure and reaches effective processing effect, Wherein after second order heat preservation, continue to be passed through nitrogen, nitrogen is the room of input heating on one side at this time, and room is heated in output on one side, wherein nitrogen Gas is intermittent output, and heating room pressure control is between 0.06MPa-0.15MPa.The rate that is passed through of nitrogen equally needs basis Depending on the specific structure of the actual condition of production and workpiece, can choose 250ml/s, 500ml/s, 1000ml/s or 2000ml/s etc..
When air pressure reaches 0.15MPa, control nitrogen output heating room, heating room pressure decreases, reaches When 0.06MPa, stops nitrogen extraction, supplying nitrogen and combined process temperature T1 are looped back and forth like this, so that the nitriding of workpiece is imitated Fruit is good, and product quality is high.
7th step:Pneumatic control system is closed, temperature in room 12 is heated and keeps technological temperature T1, to vacuum nitriding furnace 10 Heating room 12 and cooling chamber 13 are vacuumized respectively, until the vacuum degree of two Room maintains an equal level, it is P1;
Preferred nitriding furnace is practical by the preparation room 11 of successively connection setting, heating room 12 and 13 structure of cooling chamber in the present embodiment At being obstructed respectively by insulated door 14 between adjacent two Room.
After nitriding works, stops being passed through nitrogen in heating room 12, close pneumatic control system, heat temperature in room 12 Degree keeps technological temperature T1, vacuumize to heating room 12 and cooling chamber 13 at this time until the two vacuum degree maintains an equal level.
Vacuum degree P1 may be selected and vacuumize for the first time unanimously, equally in 10Pa hereinafter, cooling chamber 13 is also required to together certainly Preparation room 11, heating room 12 carried out together when vacuumizing for the first time, it is ensured that vacuum nitriding furnace inner environment be suitable for, convenient for quenching and The progress of nitridation process.
8th step:Material frame 20 is sent into cooling chamber 13, and is passed through nitrogen in cooling chamber 13 and workpiece is cooled down, is protected Air pressure P3=0.6-1.2MPa in cooling chamber 13 is held, workpiece temperature is cooling until temperature is down to 60 DEG C hereinafter, stopping cold with rate v2 But;
After vacuumizing, heating electrode 15 is closed, heats and is no longer heated in room 12, opens heating room 12 and cooling chamber at this time Material frame 20 is sent into cooling chamber 13 by the insulated door 14 between 13.
It is preferably equally cooled down herein by nitrogen gas tank 16 towards 13 supplying nitrogen of cooling chamber, wherein in cooling chamber 13 Air pressure P3 is between 0.6-1.2MPa, is conducive to the rapid cooling of workpiece, when practical operation may be selected air pressure P3=0.6MPa or 0.8MPa or 1.0MPa etc., preferably workpiece cooling rate v2=99 DEG C/s can stop cold when workpiece is cooled to 60 DEG C or less But.
Further, in step 8, cooling water, coolant water temperature T2≤35 DEG C, cooling water pressure are passed through in cooling chamber 13 P4=0.2-0.5MPa。
It is quenched to ensure that workpiece can be quickly cooled down, is passed through cooling water in cooling chamber 13, after nitrogen contact workpiece Temperature rises, and is cooled down at this time by cooling water to nitrogen, and then realizes the cooling to workpiece.
Cooling water is practical constantly to feed the water into cooling chamber 13, and constantly output cooling chamber 13 by circulating cooling pond 17, excellent Select cooler-water temperature at 35 DEG C hereinafter, cooling water pressure P4 is within the scope of 0.2-0.5MPa, workpiece good cooling results.
9th step:Vent valve is opened, nitrogen in cooling chamber 13 is discharged and maintains an equal level to air pressure P3 and atmospheric pressure, open vacuum nitriding Furnace 10, workpiece are come out of the stove with material frame 20.
After cooling, stops being passed through nitrogen and cooling water in cooling chamber 13, open vent valve at this time, by cooling chamber Nitrogen in 13 discharges, and nitrogen free from extraneous odour not can cause environmental pollution, and production effect is good.
When air pressure in cooling chamber 13 and external atmosphere pressure maintain an equal level, vacuum drying oven can be opened, by the related each work of material frame 20 Part takes out, and heat treatment process terminates.
Preferably, it in step 3, when thickness of workpiece is greater than 10mm, heats in room 12 first with rate of heat addition v3 heating To 550 DEG C, soaking time t4=10-30min, 850 DEG C, soaking time t5=10-45min then are warming up to rate of heat addition v4, Technological temperature T1 is finally warming up to rate of heat addition v5, carries out single order heat preservation, soaking time t1=10-30min is heated in room 12 Remain vacuum degree P1.
It is noted that some Workpiece structures are relatively complicated or thickness is relatively large, heating is initially entered When room 12 is heated up, it is unfavorable for overall structure while rises to technological temperature T1, need segmented to be heated at this time.
It is preferred that heating room 12 carries out the heat preservation of a period of time when being heated to temperature and being 550 DEG C and 850 DEG C respectively, it is ensured that Inside workpiece is consistent with external temperature, is conducive to the progress of subsequent nitridation process.
The homogeneous heating speed in each stage carries out, and the specific rate of heat addition is not construed as limiting herein, actually can be according to specific Workpiece structure is determined, wherein the vacuum degree of heating room 12 still remain in 10Pa hereinafter, when temperature rises to technological temperature T1, The same single order heat preservation for carrying out 10-30min, is conducive to following process.
Quenching technical and nitridation process are incorporated into same equipment, completed in same technique by this vacuum nitriding processing technology, Time and expense are greatlyd save, production efficiency is improved;Workpiece structure after vacuum heat treatment is stablized, and has enough core hardness And higher surface hardness, long service life and workpiece surface possess the stainless steel silvery white of bright cleaning, aesthetics is good;It can To realize windrow shove charge, shove charge requirement is low, batch is big;Using high pure nitrogen as nitriding and cooling raw material, heat treated Free from extraneous odour, smokeless, reduce environmental pollution in journey, and production effect is good.
Described herein is only the preferred embodiment of the present invention, but protection scope of the present invention is not limited to This.The similar side of the modify or supplement or adopt that those skilled in the art in the invention carry out described specific embodiment Formula replacement, should all be covered by within protection scope of the present invention.

Claims (7)

1. a kind of vacuum nitriding processing technology, which is characterized in that include the following steps:
Step 1:The material frame for filling workpiece is sent into the preparation room of vacuum nitriding furnace;
Step 2:The heating room of vacuum nitriding furnace and preparation room are vacuumized, vacuum degree P1, while material frame being sent into and is heated Room;
Step 3:Heating is indoor to be warming up to technological temperature T1 with rate of heat addition v1, keeps heating house vacuum degree P1, carries out single order Heat preservation, soaking time t1=10-30min;
Step 4:It is passed through nitrogen toward heating interior, heating room pressure P2=200-600Pa is adjusted, keeps technological temperature T1, into The heat preservation of row second order, soaking time t2=10-45min;
Step 5:Continue in the environment of keeping technological temperature T1 toward heating interior be passed through nitrogen until heating room pressure P2= 0.06MPa-0.15MPa;
Step 6:Technological temperature T1 is kept, continues to be passed through nitrogen toward heating interior with rate V, and controls nitrogen in heating room Circulation, opens pneumatic control system, and control heating room pressure remains at P2=0.06MPa-0.15MPa, carries out three Rank heat preservation, soaking time t3=30-90min;
Step 7:Close pneumatic control system, heating room temperature keeps technological temperature T1, to the heating room of vacuum nitriding furnace and Cooling chamber is vacuumized respectively, until the vacuum degree of two Room maintains an equal level, it is P1;
Step 8:Material frame is sent into cooling chamber, and is passed through nitrogen in cooling chamber and workpiece is cooled down, is kept in cooling chamber Air pressure P3=0.6-1.2MPa, workpiece temperature are cooling until temperature is down to 60 DEG C hereinafter, stopping cooling with rate v2;
Step 9:Vent valve is opened, nitrogen in cooling chamber is discharged and maintains an equal level to air pressure P3 and atmospheric pressure, open vacuum nitriding furnace, work Part is come out of the stove with material frame.
2. a kind of vacuum nitriding processing technology according to claim 1, which is characterized in that the value range of above-mentioned vacuum degree P1 For P1≤10Pa.
3. a kind of vacuum nitriding processing technology according to claim 1, which is characterized in that in step 3, technological temperature T1= 1020-1100℃。
4. a kind of vacuum nitriding processing technology according to claim 1, which is characterized in that in step 6, nitrogen is passed through speed Rate V=250-2500ml/s.
5. a kind of vacuum nitriding processing technology according to claim 1, which is characterized in that in step 8, the cooling speed of workpiece Rate v2=99 DEG C/s.
6. a kind of vacuum nitriding processing technology according to claim 1, which is characterized in that in step 3, when workpiece thickness When degree is greater than 10mm, heating interior is warming up to 550 DEG C, soaking time t4=10-30min first with rate of heat addition v3, then to add Hot rate v4 is warming up to 850 DEG C, soaking time t5=10-45min, is finally warming up to technological temperature T1 with rate of heat addition v5, carries out Single order heat preservation, soaking time t1=10-30min, heating interior remain vacuum degree P1.
7. a kind of vacuum nitriding processing technology according to claim 1, which is characterized in that in step 8, toward cooling chamber Inside it is passed through cooling water, coolant water temperature T2≤35 DEG C, cooling water pressure P4=0.2-0.5MPa.
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CN110016639A (en) * 2019-05-27 2019-07-16 鑫光热处理工业(昆山)有限公司 A kind of intermittent acetylene pulse is without crystal boundary vacuum nitriding process
CN114182196A (en) * 2021-12-02 2022-03-15 贵州师范大学 Titanium alloy vacuum gas step nitriding method

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Cited By (3)

* Cited by examiner, † Cited by third party
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CN110016639A (en) * 2019-05-27 2019-07-16 鑫光热处理工业(昆山)有限公司 A kind of intermittent acetylene pulse is without crystal boundary vacuum nitriding process
CN114182196A (en) * 2021-12-02 2022-03-15 贵州师范大学 Titanium alloy vacuum gas step nitriding method
CN114182196B (en) * 2021-12-02 2024-01-19 贵州师范大学 Titanium alloy vacuum gas step nitriding method

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