CN206480587U - A kind of full-automatic SEM - Google Patents
A kind of full-automatic SEM Download PDFInfo
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- CN206480587U CN206480587U CN201720192828.0U CN201720192828U CN206480587U CN 206480587 U CN206480587 U CN 206480587U CN 201720192828 U CN201720192828 U CN 201720192828U CN 206480587 U CN206480587 U CN 206480587U
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- 230000003287 optical effect Effects 0.000 claims abstract description 65
- 238000001514 detection method Methods 0.000 claims abstract description 30
- 238000013519 translation Methods 0.000 claims abstract description 13
- 238000012546 transfer Methods 0.000 claims description 22
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000005286 illumination Methods 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000004904 shortening Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 17
- 238000010894 electron beam technology Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
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Abstract
There is provided herein a kind of full-automatic SEM, the SEM includes：The optical navigation system being made up of the first light microscope and translation stage, and the SEM device being made up of electron source and electronic optical lens barrel, the optical navigation system also include：First chamber being connected below first light microscope and with the translation stage, accommodating testing sample progress optical detection；The SEM device also includes：Below the electronic optical lens barrel, receiving testing sample is scanned the second chamber of electron microscope detection；Connect or completely cut off by vacuum valve level between the first chamber and second chamber；Being provided with the first chamber can be moved to testing sample from first chamber the automatic conveyor of second chamber by the vacuum valve.The application is simple to operate, can reach shortening sample detection time, improves the purpose of detection efficient and accuracy.
Description
Technical Field
The utility model relates to a scanning electron microscope technical field especially relates to a full automatization scanning electron microscope.
Background
The traditional optical system has the characteristics of simple and convenient operation when used for observing an object, and the sample is simple to prepare, does not need strict observation conditions such as high vacuum and the like, and is commonly used for carrying out rapid microscopic observation on the object. Conventional optical systems have a low resolution, which limits the high-resolution detection of objects. In the field of observing microscopic objects, Scanning Electron Microscopes (SEM) are widely used due to their high resolution and large depth of field.
Because the traditional scanning electron microscope needs very high magnification when observing the fine information of an object, the field of view is small, and the position to be measured is difficult to locate. Generally, the position of the sample to be measured needs to be located by means of an image obtained under a large field of view. When the scanning electron microscope is used for detecting a large field of view, the distortion generated at the edge position of the field of view is large, and the surface appearance of a sample cannot be really reflected, so that when the position to be detected of the sample is positioned through a scanning electron microscope image obtained under the large field of view, the positioning is often inaccurate. The resolution of the optical system is 200nm at most, and the distortion of the optical system is much smaller than that of a scanning electron microscope during large-field observation, so that the optical system and the scanning electron microscope are combined for use to detect an object: the method is an effective method for solving the problem by firstly using an optical system to search a target position and then using a scanning electron microscope to perform higher-resolution observation.
Scanning electron microscope systems incorporating optical systems are large, complex instrumentation. In the using process, the sample chamber of the scanning electron microscope needs to be pumped to a certain vacuum value, and the process takes a long time; moreover, for the user, even the professional operator can hardly ensure the accurate movement and positioning of the sample when the sample is manually transferred from the detection area of the optical system to the detection area of the scanning electron microscope. Conventional manual operations are far from satisfactory in order to guarantee high working efficiency and accuracy, which greatly limits the systematic use of scanning electron microscopes in combination with optical systems.
Therefore, there is a need for a system that can automatically detect the sem from the optical system, thereby making up for the inconvenience of manual operation, reducing the detection time, simplifying the operation, and improving the detection efficiency and accuracy.
SUMMERY OF THE UTILITY MODEL
In view of this, the embodiments of the present invention are expected to provide a fully automated scanning electron microscope, which is simple to operate, and can achieve the purpose of shortening the sample detection time and improving the detection efficiency and accuracy.
In order to achieve the above object, the embodiment of the present invention provides a technical solution that:
the embodiment of the utility model provides a full-automatic scanning electron microscope, which comprises an optical navigation system composed of a first optical microscope and a translation stage, and a scanning electron microscope device composed of an electron source and an electron optical lens cone, and is characterized in that,
the optical navigation system further includes: the first chamber is positioned below the first optical microscope, is connected with the translation stage and is used for accommodating a sample to be detected to perform optical detection;
the scanning electron microscope device further includes: the second chamber is positioned below the electron optical lens barrel and used for accommodating a sample to be detected to carry out scanning electron microscope detection;
the first chamber and the second chamber are horizontally communicated or isolated through a vacuum valve; an automatic conveying device capable of moving a sample to be tested from the first chamber to the second chamber through the vacuum valve is arranged in the first chamber.
Wherein a first observation window allowing the illumination light beam and the imaging light beam of the first optical microscope to pass therethrough is provided at the top of the first chamber; the side wall of the first chamber is provided with a sample changing door allowing a sample to be detected to enter and exit.
The second chamber is internally provided with a sample table which bears and controls a sample to be detected to move in the horizontal and vertical directions; and the sample table is provided with an automatic fixing device for fixing the sample to be detected.
Wherein, still include in the second chamber: and the automatic focusing tracking system is arranged above the sample table and used for measuring the surface height of the sample to be measured in real time.
Wherein, the automatic conveying device is arranged on a sample changing door of the first chamber.
Wherein the automatic transfer device comprises: the sample changing door comprises a first telescopic conveying arm fixed on the sample changing door and a first sample support connected to the other end of the first telescopic conveying arm and used for bearing a sample to be detected.
The automatic conveying device is arranged in the first cavity through a rotating shaft in the vertical direction.
Wherein the automatic transfer device comprises: one end is fixed in the pivot just centers on the second scalable transfer arm of pivot rotation in the horizontal direction to and connect and be in the second sample that bears the weight of the sample that awaits measuring of the scalable transfer arm other end holds in the palm.
In the above scheme, a second optical microscope is further arranged above the second chamber, and a second observation window allowing light beam transmission is arranged at a position, opposite to the second optical microscope, of the top of the second chamber in the vertical direction.
The embodiment of the utility model provides a full automatization scanning electron microscope, the optical navigation who comprises first optical microscope and translation platform carries out optical detection to the sample, obtains sample surface navigation map; the sample feeding process is completed quickly and accurately by an automatic conveying device in the first chamber and an automatic fixing device on the sample table; the method comprises the steps of accurately positioning a specified position to be detected of a sample based on an integral navigation map of the surface of the sample to be detected, measuring the height of the surface of the sample by an automatic focusing tracking system, and adjusting the height of a sample table to ensure the real-time focusing of an electron beam of a scanning electron microscope on the sample, so that the specified position of the sample to be detected is detected by the scanning electron microscope, and the information of the specified position of the sample to be detected is obtained. The whole moving process does not need manual operation, and the detection efficiency and the detection accuracy are improved.
In addition, the first chamber and the second chamber are connected through a vacuum valve, and the opening and the closing of the vacuum valve are properly controlled, so that the vacuum state of the second chamber is ensured as much as possible, and the time for vacuumizing the first chamber and the second chamber is shortened, thereby shortening the time for the whole detection process.
Drawings
Fig. 1 is a schematic structural diagram of a fully automated scanning electron microscope according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a fully automated scanning electron microscope according to an embodiment of the present invention;
fig. 3 is a first schematic structural diagram of an automatic conveying device according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of an automatic conveying device according to an embodiment of the present invention;
fig. 5 is a flowchart of a detection method of a fully automated scanning electron microscope according to an embodiment of the present invention.
Detailed Description
The present invention will be described with reference to the accompanying drawings and examples.
Parts that are not relevant to the present invention will not be described again, and the same reference numerals designate the same elements throughout the specification.
The embodiment of the utility model provides a full automatic scanning electron microscope, as shown in figure 1, include: an optical navigation system 120 constituted by the first optical microscope 108 and the translation stage 113, and a scanning electron microscope apparatus 100 constituted by the electron source 101 and the electron optical column 103, wherein,
the optical navigation system 120 further includes: a first chamber 109 located below the first optical microscope 108 and connected to the translation stage 113, and accommodating a sample 116 to be tested for optical detection; the scanning electron microscope apparatus 100 further includes: a second chamber 106 located below the electron optical column 103 and used for accommodating a sample 116 to be detected for scanning electron microscope detection; the first chamber 109 is horizontally communicated with or isolated from the second chamber 106 through a vacuum valve 107; an automatic transfer device 115 capable of transferring the sample to be tested from the first chamber 109 to the second chamber 106 through the vacuum valve 107 is disposed in the first chamber 109.
As shown in fig. 1, the top of the first chamber 109 is provided with a first observation window 114 that allows the illumination light beam and the imaging light beam of the first optical microscope 108 to pass therethrough; the sidewall of the first chamber 109 is provided with a sample changing gate 110 for allowing the sample 116 to be tested to enter and exit.
The first optical microscope 108 uses the first observation window 114 as a light beam propagation channel to image a certain position of the sample 116 to be measured; the translation stage 113 can adjust the first optical microscope 108 along the Z-axis direction, so that the first optical microscope 108 is focused on the surface of the sample 116 to be measured; the first optical microscope 108 can also be controlled to move in two dimensions in the plane formed by the X-axis and the Y-axis, so as to obtain an image of each position on the sample 116 to be measured.
The scanning electron microscope device 100 is configured to detect information of a designated position on a surface of a sample 116 to be detected. The electron source 101 is configured to generate an electron beam 102, and the electron beam 102 irradiates the sample 116 to be detected on the sample stage 111 in the second chamber 106, so as to detect the sample 116 to be detected;
the electron optical barrel 103 mainly includes: a deflection device 104 for deflecting the electron beam 102; a focusing device 105 for focusing the electron beam 102, the function of which can be generally realized by an electromagnetic lens;
the second chamber 106 mainly comprises: the sample stage 111 for bearing and controlling the sample to be measured to move in the horizontal and vertical directions is that: the sample table 111 can be lifted along the Z-axis direction and can also move in two dimensions in a plane formed by the X-axis and the Y-axis; the sample table 111 is provided with an automatic fixing device 112 for fixing the sample to be detected, and the automatic fixing device is used for automatically fixing the sample to be detected 116 transmitted by the automatic transmission device 115 onto the sample table 111, and can be an electrostatic chuck;
as shown in fig. 1, the second chamber 106 further includes therein: an automatic focusing and tracking system 118 disposed above the sample stage 111 for measuring the height of the surface of the sample 116 to be measured in real time, and adjusting the height of the sample stage 111 based on the measurement result to focus the electron beam on the surface of the sample to be measured in real time, wherein the electron beam focusing point is the position 117 shown in fig. 1; as described above, the vacuum valve 107, which is used as a passage for transferring the sample, may also be used to isolate the first chamber 109 and the second chamber 106 to maintain their respective vacuum states.
An embodiment of the present invention provides an automatic conveying device, as shown in fig. 3, the automatic conveying device 115 is located on the sample changing door of the first chamber 109, and is used for automatically conveying the sample 116 to be measured into the second chamber 106. The method mainly comprises the following steps: a first retractable transfer arm 318 and a first sample holder 319; wherein,
one end of the first retractable transmission arm 318 is fixed on the sample changing door 110, and the sample 116 to be tested is translated through the extending and retracting actions;
the first sample holder 319 is a chuck connected to the other end of the first retractable transfer arm 318, and is used for carrying the sample 116 to be measured.
The embodiment of the present invention further provides another automatic conveying device, as shown in fig. 4, the automatic conveying device 115 is disposed in the first chamber 109 through a rotating shaft in a vertical direction (in fig. 4, a vertical structure perpendicular to the bottom of the first chamber in the second retractable conveying arm 418), and is configured to automatically convey the sample 116 to be tested into the second chamber 106, and mainly includes: a second retractable transfer arm 418 and a second sample holder 419; wherein,
the second retractable transfer arm 418, located in the first chamber, can perform rotation and retraction, and can translate the sample 116 to be tested by extending and retracting, and can transfer the sample 116 to be tested from the first chamber 109 to the second chamber 106 by rotating around the vertical rotation axis in the horizontal direction;
the second sample holder 419 is a chuck connected to the other end of the second retractable transfer arm 418, and is configured to hold the sample 116 to be tested.
On the basis of the above embodiments, the embodiment of the present invention further provides another fully automated scanning electron microscope, as shown in fig. 2, on the basis of the structure shown in fig. 1, another optical microscope is added, that is: a second optical microscope 200 and a second observation window 201.
The second optical microscope 200 is located above the second chamber 106, and is used for checking whether the placement position of the sample 116 to be tested on the sample stage 111 is accurate;
the second observation window 201 is located at the top of the second chamber 106 and is opposite to the second optical microscope 200 in the vertical direction, and serves as a light beam transmission channel.
The detection method of the fully automated scanning electron microscope is briefly described below, and as shown in fig. 5, the method includes:
step 501: performing optical detection on the sample to be detected by using an optical navigation system 120 to obtain an overall navigation map of the surface of the sample to be detected;
specifically, the optical navigation system 120 is used as a light beam propagation channel through the first observation window 114 at the top of the first chamber 109, and the first optical microscope 108 images a certain position of the sample 116 to be measured; the translation stage 113 carries the first optical microscope 108 to move in two dimensions in a plane formed by an X axis and a Y axis above the first observation window 114, so as to acquire an image of each position of the surface of the sample to be measured; the images obtained above are then made into an overall navigation map of the sample surface by image processing techniques.
Step 502: the automatic transfer device 115 transfers the sample to be tested in the first chamber 109 to the second chamber 106 through the vacuum valve 107; the method comprises the following steps:
the automatic transfer device 115 transfers the sample to be tested to the second chamber 106 through the opened vacuum valve 107 by translation, or by translation and rotation; the sample stage 111 in the second chamber 106 moves to a position below the sample holder of the automatic conveying device 115, and the sample to be measured is jacked up and fixed by the automatic fixing device 112 on the sample stage 111.
Specifically, the following four operations are mainly required in the step: first, the first retractable transfer arm 318 or the second retractable transfer arm 418 of the automatic transfer device 115 transfers the first sample holder 319 or the second sample holder 419 carrying the sample to be tested to the second chamber 106; then, horizontally moving the sample stage 111 to a position below the first sample holder 319 or the second sample holder 419, raising the sample stage 111, and jacking up the sample to be tested on the first sample holder 319 or the second sample holder 419; secondly, fixing the sample to be detected on the sample table 111 through an automatic fixing device 112 on the sample table 111; finally, the first sample holder 319 or the second sample holder 419 is withdrawn to the first chamber 109, and the vacuum valve 107 is closed.
Step 503: and based on the integral navigation map of the surface of the sample to be detected, positioning the sample to be detected at the specified position, and carrying out scanning electron microscope detection on the specified position of the sample to be detected by using the scanning electron microscope device 100 to obtain the information of the specified position of the sample to be detected.
Here, the scanning electron microscope probing includes the operations of: identifying and positioning the appointed position to be detected of the sample to be detected by using the integral navigation chart obtained by the optical navigation system 120; further comprising: measuring the surface height of the sample to be measured in real time through an automatic focusing and tracking system 118, and adjusting the height of the sample table 111 in the second chamber based on the measurement result to focus the electron beam on the surface of the sample to be measured in real time; then, the deflected and focused electron beam 102 is used for detecting the sample to be detected, and a high-magnification image of the designated position on the surface of the sample to be detected is obtained.
In order to shorten the time for detecting the full-automatic scanning electron microscope, the method for optically detecting the sample to be detected also comprises the following steps:
and pumping the first chamber and the second chamber to a vacuum state.
Wherein, before the optical detection of the sample to be detected, the method further comprises:
the sample to be tested is placed in the first chamber through the sample change door 110 of the first chamber to perform the optical detection. It should be noted that, when the sample-changing gate 110 is opened, the vacuum valve 107 is in a closed state to ensure the vacuum state of the second chamber as much as possible.
In the above scheme, after the moving the sample to be tested to the second chamber and before the performing the scanning electron microscope detection, the method further includes:
the second optical microscope 200 above the second chamber is used to check whether the placement position of the sample to be measured on the sample stage is accurate through the second observation window 201 at the top of the second chamber.
The embodiment of the utility model provides a through automatic conveyer and automatic fixing device quick, accomplished the sample presentation process accurately, the sample that awaits measuring that will accomplish optical detection removes and carries out subsequent scanning electron microscope and survey in the scanning electron microscope device, and whole removal process does not need manually operation, has improved detection efficiency and accuracy.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention.
Claims (9)
1. A fully automated scanning electron microscope comprising an optical navigation system consisting of a first optical microscope and a translation stage, and a scanning electron microscope device consisting of an electron source and an electron optical column,
the optical navigation system further includes: the first chamber is positioned below the first optical microscope, is connected with the translation stage and is used for accommodating a sample to be detected to perform optical detection;
the scanning electron microscope device further includes: the second chamber is positioned below the electron optical lens barrel and used for accommodating a sample to be detected to carry out scanning electron microscope detection;
the first chamber and the second chamber are horizontally communicated or isolated through a vacuum valve; an automatic conveying device capable of moving a sample to be tested from the first chamber to the second chamber through the vacuum valve is arranged in the first chamber.
2. The scanning electron microscope of claim 1, wherein the top of the first chamber is provided with a first observation window allowing passage of the illumination beam and the imaging beam of the first optical microscope; the side wall of the first chamber is provided with a sample changing door allowing a sample to be detected to enter and exit.
3. The scanning electron microscope of claim 1, wherein a sample stage for carrying and controlling the movement of the sample to be measured in the horizontal and vertical directions is arranged in the second chamber; and the sample table is provided with an automatic fixing device for fixing the sample to be detected.
4. The scanning electron microscope of claim 3, further comprising within the second chamber: and the automatic focusing tracking system is arranged above the sample table and used for measuring the surface height of the sample to be measured in real time.
5. The scanning electron microscope of claim 2, wherein the automated transport device is disposed on a sample exchange door of the first chamber.
6. The scanning electron microscope of claim 5, wherein the automated transport device comprises: the sample changing door comprises a first telescopic conveying arm fixed on the sample changing door and a first sample support connected to the other end of the first telescopic conveying arm and used for bearing a sample to be detected.
7. The scanning electron microscope of claim 1, wherein the automatic transfer device is disposed in the first chamber by a vertical axis.
8. The scanning electron microscope of claim 7, wherein the automated transport device comprises: one end is fixed in the pivot just centers on the second scalable transfer arm of pivot rotation in the horizontal direction to and connect and be in the second sample that bears the weight of the sample that awaits measuring of the scalable transfer arm other end holds in the palm.
9. The scanning electron microscope of any one of claims 1 to 8, wherein a second optical microscope is further disposed above the second chamber, and a second observation window allowing transmission of the light beam is disposed at a position opposite to the second optical microscope at the top of the second chamber in the vertical direction.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720192828.0U CN206480587U (en) | 2017-03-01 | 2017-03-01 | A kind of full-automatic SEM |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106910665A (en) * | 2017-03-01 | 2017-06-30 | 聚束科技（北京）有限公司 | A kind of full-automatic SEM and its detection method |
| CN107741353A (en) * | 2017-12-09 | 2018-02-27 | 庄明忠 | The comprehensive hardness measurement instrument of one kind building detection |
| CN110988003A (en) * | 2019-11-27 | 2020-04-10 | 中科晶源微电子技术（北京）有限公司 | Electron beam inspection apparatus for semiconductor device, and electron beam inspection module |
-
2017
- 2017-03-01 CN CN201720192828.0U patent/CN206480587U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106910665A (en) * | 2017-03-01 | 2017-06-30 | 聚束科技（北京）有限公司 | A kind of full-automatic SEM and its detection method |
| CN106910665B (en) * | 2017-03-01 | 2019-07-12 | 聚束科技（北京）有限公司 | A kind of scanning electron microscope and its detection method of full-automation |
| CN107741353A (en) * | 2017-12-09 | 2018-02-27 | 庄明忠 | The comprehensive hardness measurement instrument of one kind building detection |
| CN107741353B (en) * | 2017-12-09 | 2020-05-29 | 广州继善建筑技术有限公司 | Comprehensive hardness measuring instrument for building detection |
| CN110988003A (en) * | 2019-11-27 | 2020-04-10 | 中科晶源微电子技术（北京）有限公司 | Electron beam inspection apparatus for semiconductor device, and electron beam inspection module |
| US11703467B2 (en) | 2019-11-27 | 2023-07-18 | Zhongke Jingyuan Electron Limited, Beijing | Electron beam detection apparatus for semiconductor device and electron beam detection assembly |
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