CN106910665A - A kind of full-automatic SEM and its detection method - Google Patents
A kind of full-automatic SEM and its detection method Download PDFInfo
- Publication number
- CN106910665A CN106910665A CN201710118052.2A CN201710118052A CN106910665A CN 106910665 A CN106910665 A CN 106910665A CN 201710118052 A CN201710118052 A CN 201710118052A CN 106910665 A CN106910665 A CN 106910665A
- Authority
- CN
- China
- Prior art keywords
- chamber
- testing sample
- sample
- sem
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
Abstract
There is provided herein a kind of full-automatic SEM and its detection method, the SEM includes：The optical navigation system being made up of the first light microscope and translation stage, and the SEM device being made up of electron source and electronic optical lens barrel, the optical navigation system also include：Be connected positioned at first light microscope lower section and with the translation stage, receiving testing sample carries out the first chamber of optical detection；The SEM device also includes：Below the electronic optical lens barrel, receiving testing sample is scanned the second chamber of electron microscope detection；Connect or completely cut off by vacuum valve level between the first chamber and second chamber；Being provided with the first chamber, testing sample can be moved to the automatic conveyor of second chamber from first chamber by the vacuum valve.The application is simple to operate, can reach shortening sample detection time, improves the purpose of detection efficient and accuracy.
Description
Technical field
The present invention relates to Scanning electron microscopy field, more particularly to a kind of full-automatic SEM
And its detection method.
Background technology
Traditional optical system object is observed with it is simple, convenient the characteristics of, and the preparation of sample is simple,
The strict observation conditions such as high vacuum are not needed, therefore is usually used in carrying out quick microscopic observation to object.Due to traditional optics
Systemic resolution is low, is restricted when high-resolution detection is carried out to object.In terms of micro-object is observed, scanning electron
Microscope (Scanning Electron Microscope, SEM) is answered extensively with its high resolution, the features such as the depth of field is big
With.
, it is necessary to multiplication factor very high during due to traditional scanning electronic microscope observation object minute information, therefore, depending on
Field scope is smaller, treats location and puts location difficulty.It is often necessary to carry out localizing sample by the image obtained under large viewing field condition treat
Location is put.And SEM is in big field detection, the distortion that field of view edge position produces is very big, it is impossible to true reflection
The surface topography of sample, therefore, during position to be measured come localizing sample by the scanning electron microscope image obtained under big visual field,
Often position inaccurate.The resolution ratio of optical system is up to 200nm, and the distortion of optical system is much smaller than and sweeps during big view field observation
The distortion of electron microscope generation is retouched, therefore, it is used in combination to enter object using optical system and SEM
Row detection：Target location first is found using optical system, reusing SEM carries out the observation of higher resolution, should
Method is to solve the effective method of this problem.
The scanning electron microscope system for having combined optical system is large-scale, complicated apparatus.Needed during use
The sample chamber of SEM is evacuated to certain vacuum values, this process needs to expend for a long time；And it is right
For user, when sample manually is sent into SEM search coverage from optical system search coverage, i.e.,
It is that professional technique operating personnel also are difficult to ensure precisely move sample, position.For ensure operating efficiency higher and
Accuracy, traditional manual operations far can not meet demand, show this strongly limits the scanning electron for having combined optical system
Use to micromirror systems.
Accordingly, it would be desirable to it is a kind of can with it is full-automatic realize be from what optical system detected SEM detection
System, so as to make up the manually operated inconvenience for bringing, shortens detection time, simplifies operation, improves detection efficient and accuracy.
The content of the invention
In view of this, the embodiment of the present invention is expected to provide a kind of full-automatic SEM and its detection side
Method, its is simple to operate, can reach shortening sample detection time, improves the purpose of detection efficient and accuracy.
To reach above-mentioned purpose, what the technical scheme of the embodiment of the present invention was realized in：
The invention provides a kind of full-automatic SEM, including by the first light microscope and translation stage
The optical navigation system of composition, and the SEM device being made up of electron source and electronic optical lens barrel,
The optical navigation system also includes：It is connected positioned at first light microscope lower section and with the translation stage
, accommodate testing sample and carry out the first chamber of optical detection；
The SEM device also includes：Below the electronic optical lens barrel, receiving testing sample
It is scanned the second chamber of electron microscope detection；
Connect or completely cut off by vacuum valve level between the first chamber and second chamber；Set in the first chamber
It is equipped with the automatic conveyor that testing sample can be moved to the second chamber from first chamber by the vacuum valve.
Wherein, being provided with the top of the first chamber allows the illuminating bundle and imaging of first light microscope
The first observation window that beam passes through；The side wall of the first chamber be provided with allow testing sample pass in and out vary door.
Wherein, it is provided with the second chamber and carries and control the sample stage that testing sample is moved in level, vertical direction；
The sample stage is provided with the automatic fixer of the fixation testing sample.
In the embodiment of the present invention, also include in the second chamber：Above the sample stage, measurement in real time is arranged to treat
The tracking auto focus system of test sample product apparent height.
In the embodiment of the present invention, the automatic conveyor is arranged at the varying on door of the first chamber.
Wherein, the automatic conveyor includes：It is fixed on the first scalable transferring arm varied on door, Yi Jilian
It is connected on the first sample carrier of the carrying testing sample of the described first scalable transferring arm other end.
In the embodiment of the present invention, the automatic conveyor is arranged at the first chamber by the rotating shaft of a vertical direction
It is interior.
Wherein, the automatic conveyor includes：One end is fixed on the rotating shaft and is rotated in the horizontal direction around rotating shaft
The second scalable transferring arm, and be connected to the described second scalable transferring arm other end carrying testing sample the second sample
Product support.
In such scheme, the second chamber top is additionally provided with the second light microscope, the second chamber top and institute
State the second light microscope and be provided with the second observation window of permission beam Propagation in the relative position of vertical direction.
The embodiment of the present invention additionally provides a kind of detection method of the SEM of full-automation, methods described bag
Include：
Optical detection is carried out to testing sample using optical navigation system, the overall navigation figure on testing sample surface is obtained；
Testing sample in first chamber is sent to by second chamber by vacuum valve by automatic conveyor；
Based on the overall navigation figure on the testing sample surface, the specified location of testing sample is positioned at, and using scanning
Electron microscopic lens device is scanned electron microscope detection to the specified location of the testing sample, obtains described in testing sample
The information of specified location.
Wherein, described while carry out optical detection to testing sample, the method also includes：
The first chamber and second chamber are evacuated to vacuum state.
Wherein, it is described optical detection is carried out to testing sample before, the method also includes：
It is positioned in the first chamber by the testing sample described in goalkeeper that varies of the first chamber, it is described to carry out
Optical detection.
Wherein, it is described that the testing sample in first chamber is moved to second by vacuum valve by automatic conveyor
Chamber, including：
Vacuum valve of the automatic conveyor by translation or by translating and testing sample is passed through to open by rotation
Move to second chamber；Sample stage in the second chamber moves to the sample carrier lower section of the automatic conveyor, jack-up
The testing sample, and the testing sample is fixed by the automatic fixer on sample stage.
In the embodiment of the present invention, when the specified location to the testing sample is scanned electron microscope detection,
The method also includes：
Testing sample apparent height is measured in real time by tracking auto focus system, based on measurement result regulation described the
Sample stage in two chambers highly, makes electron beam focus on testing sample surface in real time.
In such scheme, it is described testing sample is moved into second chamber after, and visited electron microscope is being scanned
Before survey, the method also includes：
Using the second light microscope above second chamber, check to be measured by the second observation window at the top of second chamber
Whether the placement location on sample stage of sample is accurate.
Full-automatic SEM provided in an embodiment of the present invention and its detection method, by the first optical microphotograph
The optical navigation system that mirror and translation stage are constituted carries out optical detection to sample, obtains sample surfaces navigation picture；By first chamber
In automatic conveyor and sample stage on automatic fixer it is quick, accurately complete sample presentation process；Based on described to be measured
The overall navigation figure of sample surfaces specifies position precise positioning to be measured to sample, and sample surfaces are measured by tracking auto focus system
Highly, by adjusting sample stage height to ensure real-time focusing of the SEM electron beam to sample, so that, to described
The specified location of testing sample is scanned electron microscope detection, obtains the information of specified location described in testing sample.It is whole
Individual moving process is not required to manually operated, improves detection efficient and accuracy.
In addition, connected by vacuum valve between first chamber and second chamber, by appropriate control vacuum valve
Open and close, to ensure the vacuum state of the second chamber as far as possible, shortening is taken out very to first chamber and second chamber
The empty used time, so as to shorten the time used by whole detection process.
Brief description of the drawings
Fig. 1 is the structural representation one of SEM full-automatic described in the embodiment of the present invention；
Fig. 2 is the structural representation two of SEM full-automatic described in the embodiment of the present invention；
Fig. 3 is the structural representation one of automatic conveyor described in the embodiment of the present invention；
Fig. 4 is the structural representation two of automatic conveyor described in the embodiment of the present invention；
Fig. 5 is the detection method flow chart of SEM full-automatic described in the embodiment of the present invention.
Specific embodiment
Present invention is described with reference to the accompanying drawings and examples.
Part unrelated to the invention repeats no more, and identical reference marker indicates identical unit throughout the specification
Part.
A kind of SEM of full-automation is the embodiment of the invention provides, as shown in figure 1, including：By first
The optical navigation system 120 that light microscope 108 and translation stage 113 are constituted, and by electron source 101 and electronic optical lens barrel
The 103 SEM devices 100 for constituting, wherein,
The optical navigation system 120 also includes：Positioned at the lower section of first light microscope 108 and with the translation stage
113 be connected, accommodate testing sample 116 and carry out the first chamber 109 of optical detection；The SEM device 100
Also include：Below the electronic optical lens barrel 103, receiving testing sample 116 is scanned electron microscope detection
Second chamber 106；Connect or completely cut off by the level of vacuum valve 107 between the first chamber 109 and second chamber 106；Institute
State and be provided with first chamber 109 and testing sample can be sent to described the from first chamber 109 by the vacuum valve 107
The automatic conveyor 115 of two chambers 106.
As shown in figure 1, the top of the first chamber 109 is provided with the illumination for allowing first light microscope 108
The first observation window 114 that light beam and imaging beam pass through；The side wall of the first chamber 109 is provided with permission testing sample 116 and enters
What is gone out varies door 110.
Wherein, first light microscope 108 is by the use of first observation window 114 as beam propagation passage, to institute
The a certain position of testing sample 116 is stated to be imaged；The translation stage 113, can adjust first optical microphotograph along Z-direction
Mirror 108, so that first light microscope 108 focuses on the surface of the testing sample 116；Described first can also be controlled
The two-dimensional movement in the plane that X-axis and Y-axis are constituted of light microscope 108, so as to obtain each position on the testing sample 116
Image.
The SEM device 100, for detecting the surface specified location information of testing sample 116.The electricity
Component 101, for producing electron beam 102, the electron beam 102 to expose to and be placed on sample stage 111 in the second chamber 106
On testing sample 116, realize detection to the testing sample 116；
The electronic optical lens barrel 103 mainly includes：Arrangement for deflecting 104, for entering horizontal deflection to the electron beam 102；
Focusing arrangement 105, for being focused to the electron beam 102, its function can generally be realized by electromagnetic lens；
The second chamber 106 mainly includes：The sample stage for carrying and controlling testing sample to be moved in level, vertical direction
111, i.e.,：The sample stage 111 can be lifted along Z-direction, it is also possible to the two-dimensional movement in the plane that X-axis and Y-axis are constituted；It is described
Sample stage 111 is provided with the automatic fixer 112 of the fixation testing sample, for the automatic conveyor 115 to be passed
The testing sample 116 brought is fixed on sample stage 111 automatically, and it can select electrostatic chuck；
As shown in figure 1, also including in the second chamber 106：Be arranged at the automatic focusing of the top of the sample stage 111 with
Track system 118, for the measurement apparent height of testing sample 116 in real time, can be based on the height that the measurement result adjusts sample stage 111
Degree, makes the electron beam focus on testing sample surface in real time, and Electron Beam Focusing point is position shown in 117 in Fig. 1；Such as institute above
State, vacuum valve 107, be used as passage during transmission sample, it is also possible to for completely cutting off first chamber 109 and second chamber 106, make
It keeps respective vacuum state.
A kind of structure of automatic conveyor is the embodiment of the invention provides, as shown in figure 3, the automatic conveyor
115 varying on door positioned at the first chamber 109, for the testing sample 116 to be automatically sent into the second chamber
In 106.Mainly include：First scalable transferring arm 318 and the first sample carrier 319；Wherein,
One end of the first scalable transferring arm 318 is varied on door 110 described in being fixed on, by the action reality stretched, contract
Now to the translation of the testing sample 116；
First sample carrier 319, is the chuck for being connected to the other end of the described first scalable transferring arm 318, for holding
Carry the testing sample 116.
The embodiment of the present invention additionally provides another automatic conveyor, as shown in figure 4, the automatic conveyor 115
By rotating shaft (the vertical knot described in Fig. 4 in the second scalable transferring arm 418 perpendicular to first chamber bottom of a vertical direction
Structure) it is arranged in the first chamber 109, for the testing sample 116 to be automatically sent in the second chamber 106,
Mainly include：Second scalable transferring arm 418 and the second sample carrier 419；Wherein,
The second scalable transferring arm 418, in first chamber, is capable of achieving rotation and expanding-contracting action, by stretching, contracting
The translation to the testing sample 116 is realized, by the rotation in the horizontal direction of the rotating shaft around vertical direction, test sample is treated by described
Product 116 are sent to the second chamber 106 by the first chamber 109；
Second sample carrier 419, is the chuck for being connected to the other end of the described second scalable transferring arm 418, for holding
Carry the testing sample 116.
On the basis of above example, the embodiment of the present invention additionally provides the scanning electron microscopy of another full-automation
Mirror, as shown in Fig. 2 on the basis of structure shown in Fig. 1, increased another light microscope, i.e.,：Second light microscope 200
With the second observation window 201.
Second light microscope 200, positioned at the top of the second chamber 106, for checking the testing sample 116
Whether the placement location on the sample stage 111 is accurate；
Second observation window 201, positioned at the top of the second chamber 106 with the second light microscope 200 in side vertically
To relative position, as beam Propagation passage.
The detection method to above-mentioned full-automatic SEM is simply introduced below, as shown in figure 5, institute
The method of stating includes：
Step 501：Optical detection is carried out to testing sample using optical navigation system 120, testing sample surface is obtained
Overall navigation figure；
Specifically, optical navigation system 120 is used as beam propagation by first observation window 114 at the top of first chamber 109
Passage, is imaged by the first light microscope 108 to a certain position of testing sample 116；Translation stage 113 carries described first
The two-dimensional movement in the X-axis of the top of first observation window 114 and the plane of Y-axis composition of light microscope 108, so as to obtain institute
State the image of testing sample surface each position；Then, by image processing techniques by image making achieved above into sample
The overall navigation figure on surface.
Step 502：By vacuum valve 107 be sent to testing sample in first chamber 109 by automatic conveyor 115
Second chamber 106；Including：
Vacuum of the automatic conveyor 115 by translation or by translating and testing sample is passed through to open by rotation
Valve 107 is sent to second chamber 106；Sample stage 111 in the second chamber 106 moves to the automatic conveyor
115 sample carrier lower section, testing sample described in jack-up, and described waiting is fixed by the automatic fixer 112 on sample stage 111
Test sample product.
Specifically, the step mainly needs following four to operate：First, can be stretched by first in automatic conveyor 115
The scalable transferring arm 418 of contracting transferring arm 318 or the second will carry first sample carrier 319 or the second sample carrier of the testing sample
419 are sent to second chamber 106；Then, sample stage 111 is moved horizontally to the sample carrier 419 of first sample carrier 319 or second
Lower section, raises the sample stage 111, by the testing sample top on the sample carrier 419 of first sample carrier 319 or second
Rise；Secondly, the testing sample is fixed to by the sample stage 111 by the automatic fixer 112 on the sample stage 111
On；Finally, the sample carrier 419 of first sample carrier 319 or second to the first chamber 109 is recalled, vacuum valve is closed
107。
Step 503：Based on the overall navigation figure on the testing sample surface, the specified location of testing sample is positioned at, and
Electron microscope is scanned with the specified location of 100 pairs of testing samples of SEM device to detect, treated
The information of specified location described in test sample product.
Here, the SEM detection includes following operation：Described in being obtained using optical navigation system 120
Overall navigation figure specifies position to be measured to be identified, position the testing sample；Also include：By tracking auto focus system
118 measure testing sample apparent height in real time, based on the height of sample stage 111 in measurement result regulation second chamber, make institute
State electron beam and focus on testing sample surface in real time；Afterwards, testing sample is detected using through the electron beam 102 after deflection, focusing,
Obtain the high magnification image of testing sample surface specified location.
In order to shorten full-automation SEM detection used by the time, it is described that optics is carried out to testing sample
While detection, the method also includes：
The first chamber and second chamber are evacuated to vacuum state.
Wherein, it is described optical detection is carried out to testing sample before, the method also includes：
The testing sample is positioned in the first chamber by the door 110 that varies of the first chamber, to carry out
The optical detection.It should be noted that when door 110 are varied described in opening, the vacuum valve 107 is in closes shape
State, to ensure the vacuum state of the second chamber as far as possible.
In such scheme, it is described testing sample is moved into second chamber after, and visited electron microscope is being scanned
Before survey, the method also includes：
Using the second light microscope 200 above second chamber, examined by the second observation window 201 at the top of second chamber
Whether the placement location on sample stage for looking into testing sample is accurate.
The embodiment of the present invention by automatic conveyor and automatic fixer it is quick, accurately complete sample presentation process,
To complete optical detection testing sample move to SEM device in carry out follow-up SEM
Detection, whole moving process is not required to manually operated, improves detection efficient and accuracy.
The above, only presently preferred embodiments of the present invention is not intended to limit the scope of the present invention.
Claims (15)
1. a kind of full-automatic SEM, including the optical guidance being made up of the first light microscope and translation stage
System, and the SEM device being made up of electron source and electronic optical lens barrel, it is characterised in that
The optical navigation system also includes：Be connected positioned at first light microscope lower section and with the translation stage, appearance
Testing sample of receiving carries out the first chamber of optical detection；
The SEM device also includes：Below the electronic optical lens barrel, receiving testing sample is carried out
The second chamber of SEM detection；
Connect or completely cut off by vacuum valve level between the first chamber and second chamber；It is provided with the first chamber
Testing sample can be moved to the automatic conveyor of the second chamber from first chamber by the vacuum valve.
2. SEM according to claim 1, it is characterised in that be provided with the top of the first chamber fair
The first observation window that the illuminating bundle and imaging beam of perhaps described first light microscope pass through；The side wall of the first chamber sets
There is allow testing sample to pass in and out to vary door.
3. SEM according to claim 1, it is characterised in that be provided with the second chamber and carry and control
The sample stage that testing sample processed is moved in level, vertical direction；The sample stage is provided with the automatic of the fixation testing sample
Fixing device.
4. SEM according to claim 3, it is characterised in that also include in the second chamber：Set
Above the sample stage, measurement testing sample apparent height in real time tracking auto focus system.
5. SEM according to claim 2, it is characterised in that the automatic conveyor is arranged at described
First chamber is varied on door.
6. SEM according to claim 5, it is characterised in that the automatic conveyor includes：It is fixed
In the first scalable transferring arm varied on door, and it is connected to the carrying of the described first scalable transferring arm other end and treats
First sample carrier of test sample product.
7. SEM according to claim 1, it is characterised in that the automatic conveyor is vertical by
The rotating shaft in direction is arranged in the first chamber.
8. SEM according to claim 7, it is characterised in that the automatic conveyor includes：One end
Be fixed on the rotating shaft and the second scalable transferring arm rotated in the horizontal direction around rotating shaft, and be connected to described second can
Second sample carrier of the carrying testing sample of the flexible transferring arm other end.
9. the SEM according to any one of claim 1-8, it is characterised in that the second chamber top
It is additionally provided with the second light microscope, the second chamber top and second light microscope are in the relative position of vertical direction
It is provided with the second observation window for allowing beam Propagation.
10. a kind of detection method of full-automatic SEM, it is characterised in that methods described includes：
Optical detection is carried out to testing sample using optical navigation system, the overall navigation figure on testing sample surface is obtained；
Testing sample in first chamber is sent to by second chamber by vacuum valve by automatic conveyor；
Based on the overall navigation figure on the testing sample surface, the specified location of testing sample is positioned at, and use scanning electron
Microscopie unit is scanned electron microscope detection to the specified location of the testing sample, obtains and specified described in testing sample
Information at position.
11. methods according to claim 10, it is characterised in that described while carry out optical detection to testing sample,
The method also includes：
The first chamber and second chamber are evacuated to vacuum state.
12. methods according to claim 10, it is characterised in that it is described optical detection is carried out to testing sample before, should
Method also includes：
It is positioned in the first chamber by the testing sample described in goalkeeper that varies of the first chamber, to carry out the optics
Detection.
13. methods according to claim 10, it is characterised in that it is described by automatic conveyor by first chamber
Testing sample moves to second chamber by vacuum valve, including：
The automatic conveyor is moved by translation or by the vacuum valve for translating and rotating by testing sample by opening
To second chamber；Sample stage in the second chamber is moved to below the sample carrier of the automatic conveyor, described in jack-up
Testing sample, and the testing sample is fixed by the automatic fixer on sample stage.
14. methods according to claim 10, it is characterised in that the specified location to the testing sample is swept
When retouching electron microscope detection, the method also includes：
Measure testing sample apparent height in real time by tracking auto focus system, second chamber is adjusted based on the measurement result
Indoor sample stage highly, makes electron beam focus on testing sample surface in real time.
15. method according to claim any one of 10-14, it is characterised in that described that testing sample is moved to second
After chamber, and before electron microscope detection is scanned, the method also includes：
Using the second light microscope above second chamber, testing sample is checked by the second observation window at the top of second chamber
The placement location on sample stage it is whether accurate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710118052.2A CN106910665B (en) | 2017-03-01 | 2017-03-01 | A kind of scanning electron microscope and its detection method of full-automation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710118052.2A CN106910665B (en) | 2017-03-01 | 2017-03-01 | A kind of scanning electron microscope and its detection method of full-automation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106910665A true CN106910665A (en) | 2017-06-30 |
| CN106910665B CN106910665B (en) | 2019-07-12 |
Family
ID=59186055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710118052.2A Active CN106910665B (en) | 2017-03-01 | 2017-03-01 | A kind of scanning electron microscope and its detection method of full-automation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106910665B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109995998A (en) * | 2019-01-03 | 2019-07-09 | 中国科学院生物物理研究所 | A kind of auto focusing method being imaged suitable for scanning/transmission electron microscope |
| CN111665246A (en) * | 2019-03-05 | 2020-09-15 | 汉民科技股份有限公司 | Image composite detection system |
| CN111812099A (en) * | 2020-06-30 | 2020-10-23 | 深圳中科飞测科技有限公司 | Detection device and detection method |
| CN111929339A (en) * | 2020-08-13 | 2020-11-13 | 复纳科学仪器(上海)有限公司 | Automatic scanning method and system of scanning electron microscope based on 3D point cloud |
| CN111948240A (en) * | 2020-08-17 | 2020-11-17 | 浙江祺跃科技有限公司 | In-situ high-temperature creep fatigue scanning electron microscope |
| CN113539769A (en) * | 2021-07-16 | 2021-10-22 | 苏州矽视科技有限公司 | Electron beam imaging equipment for realizing coaxiality and realization method |
| WO2022175061A3 (en) * | 2021-02-18 | 2022-10-27 | Carl Zeiss Smt Gmbh | System to inspect, modify or analyze a region of interest of a sample by charged particles, set of systems to inspect, modify or analyze a region of interest of a sample and method to inspect, modify or analyze a region of interest of a sample by charged particles |
| CN116576265A (en) * | 2023-07-12 | 2023-08-11 | 国仪量子(合肥)技术有限公司 | Sealing device and scanning electron microscope system |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0227646A (en) * | 1988-07-15 | 1990-01-30 | Jeol Ltd | Scanning electron microscope |
| JPH04308639A (en) * | 1991-04-08 | 1992-10-30 | Nec Yamaguchi Ltd | Scanning electron microscope |
| JPH10214583A (en) * | 1997-01-30 | 1998-08-11 | Hitachi Ltd | Scanning electron microscope |
| JPH10303199A (en) * | 1997-02-27 | 1998-11-13 | Hitachi Ltd | Method and apparatus for processing semiconductor device |
| JP2000188075A (en) * | 1998-12-22 | 2000-07-04 | Hitachi Ltd | Inspection method and inspection device for circuit pattern |
| US6407373B1 (en) * | 1999-06-15 | 2002-06-18 | Applied Materials, Inc. | Apparatus and method for reviewing defects on an object |
| JP4208658B2 (en) * | 2003-07-16 | 2009-01-14 | 日本電子株式会社 | Sample preparation equipment |
| JP4353962B2 (en) * | 2006-06-08 | 2009-10-28 | 株式会社日立製作所 | Sample analysis method and sample preparation method |
| US20130284924A1 (en) * | 2011-01-14 | 2013-10-31 | Hitachi High-Technologies Corporation | Charged particle beam apparatus |
| CN103824798A (en) * | 2012-11-15 | 2014-05-28 | Fei公司 | Automated sample oreintation |
| CN203631483U (en) * | 2013-12-09 | 2014-06-04 | 中芯国际集成电路制造(北京)有限公司 | Wafer bearing apparatus |
| CN104520964A (en) * | 2012-08-20 | 2015-04-15 | 株式会社日立高新技术 | Electron microscope and sample movement device |
| CN104798172A (en) * | 2012-11-26 | 2015-07-22 | 株式会社日立高新技术 | Sample stage, charged particle beam device and sample observation method |
| CN105529235A (en) * | 2014-10-16 | 2016-04-27 | Fei公司 | Charged Particle Microscope with special aperture plate |
| CN206480587U (en) * | 2017-03-01 | 2017-09-08 | 聚束科技（北京）有限公司 | A kind of full-automatic SEM |
-
2017
- 2017-03-01 CN CN201710118052.2A patent/CN106910665B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0227646A (en) * | 1988-07-15 | 1990-01-30 | Jeol Ltd | Scanning electron microscope |
| JPH04308639A (en) * | 1991-04-08 | 1992-10-30 | Nec Yamaguchi Ltd | Scanning electron microscope |
| JPH10214583A (en) * | 1997-01-30 | 1998-08-11 | Hitachi Ltd | Scanning electron microscope |
| JPH10303199A (en) * | 1997-02-27 | 1998-11-13 | Hitachi Ltd | Method and apparatus for processing semiconductor device |
| JP2000188075A (en) * | 1998-12-22 | 2000-07-04 | Hitachi Ltd | Inspection method and inspection device for circuit pattern |
| US6407373B1 (en) * | 1999-06-15 | 2002-06-18 | Applied Materials, Inc. | Apparatus and method for reviewing defects on an object |
| EP1061358A3 (en) * | 1999-06-15 | 2004-01-28 | Applied Materials, Inc. | Apparatus and method for reviewing defects on an object |
| JP4208658B2 (en) * | 2003-07-16 | 2009-01-14 | 日本電子株式会社 | Sample preparation equipment |
| JP4353962B2 (en) * | 2006-06-08 | 2009-10-28 | 株式会社日立製作所 | Sample analysis method and sample preparation method |
| US20130284924A1 (en) * | 2011-01-14 | 2013-10-31 | Hitachi High-Technologies Corporation | Charged particle beam apparatus |
| CN104520964A (en) * | 2012-08-20 | 2015-04-15 | 株式会社日立高新技术 | Electron microscope and sample movement device |
| CN103824798A (en) * | 2012-11-15 | 2014-05-28 | Fei公司 | Automated sample oreintation |
| CN104798172A (en) * | 2012-11-26 | 2015-07-22 | 株式会社日立高新技术 | Sample stage, charged particle beam device and sample observation method |
| CN203631483U (en) * | 2013-12-09 | 2014-06-04 | 中芯国际集成电路制造(北京)有限公司 | Wafer bearing apparatus |
| CN105529235A (en) * | 2014-10-16 | 2016-04-27 | Fei公司 | Charged Particle Microscope with special aperture plate |
| CN206480587U (en) * | 2017-03-01 | 2017-09-08 | 聚束科技（北京）有限公司 | A kind of full-automatic SEM |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109995998B (en) * | 2019-01-03 | 2020-06-12 | 中国科学院生物物理研究所 | Automatic focusing method suitable for scanning/transmission electron microscope imaging |
| CN109995998A (en) * | 2019-01-03 | 2019-07-09 | 中国科学院生物物理研究所 | A kind of auto focusing method being imaged suitable for scanning/transmission electron microscope |
| CN111665246A (en) * | 2019-03-05 | 2020-09-15 | 汉民科技股份有限公司 | Image composite detection system |
| CN111812099A (en) * | 2020-06-30 | 2020-10-23 | 深圳中科飞测科技有限公司 | Detection device and detection method |
| CN111929339A (en) * | 2020-08-13 | 2020-11-13 | 复纳科学仪器(上海)有限公司 | Automatic scanning method and system of scanning electron microscope based on 3D point cloud |
| CN111929339B (en) * | 2020-08-13 | 2024-03-26 | 复纳科学仪器(上海)有限公司 | Automatic scanning method and system for scanning electron microscope based on 3D point cloud |
| CN111948240B (en) * | 2020-08-17 | 2023-12-22 | 浙江祺跃科技有限公司 | In-situ high-temperature creep fatigue scanning electron microscope |
| CN111948240A (en) * | 2020-08-17 | 2020-11-17 | 浙江祺跃科技有限公司 | In-situ high-temperature creep fatigue scanning electron microscope |
| WO2022175061A3 (en) * | 2021-02-18 | 2022-10-27 | Carl Zeiss Smt Gmbh | System to inspect, modify or analyze a region of interest of a sample by charged particles, set of systems to inspect, modify or analyze a region of interest of a sample and method to inspect, modify or analyze a region of interest of a sample by charged particles |
| CN113539769A (en) * | 2021-07-16 | 2021-10-22 | 苏州矽视科技有限公司 | Electron beam imaging equipment for realizing coaxiality and realization method |
| CN113539769B (en) * | 2021-07-16 | 2023-01-17 | 苏州矽视科技有限公司 | Electron beam imaging equipment for realizing coaxiality and realization method |
| CN116576265B (en) * | 2023-07-12 | 2023-10-10 | 国仪量子(合肥)技术有限公司 | Sealing device and scanning electron microscope system |
| CN116576265A (en) * | 2023-07-12 | 2023-08-11 | 国仪量子(合肥)技术有限公司 | Sealing device and scanning electron microscope system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106910665B (en) | 2019-07-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106910665A (en) | A kind of full-automatic SEM and its detection method | |
| JP3951590B2 (en) | Charged particle beam equipment | |
| CN107526156B (en) | Light sheet microscope and method for operating a light sheet microscope | |
| JP4988662B2 (en) | Charged particle beam equipment | |
| JP4831972B2 (en) | Micro manipulation system | |
| US6852974B2 (en) | Electron beam device and method for stereoscopic measurements | |
| US8912491B2 (en) | Method of performing tomographic imaging of a sample in a charged-particle microscope | |
| JP4606969B2 (en) | Mapping projection type electron beam inspection apparatus and method | |
| NL2007475C2 (en) | Particle beam device having a sample holder. | |
| TWI592976B (en) | Charged particle beam device and inspection method using the device | |
| KR19980070850A (en) | Sample analyzer | |
| CN206480587U (en) | A kind of full-automatic SEM | |
| JP2003007243A (en) | Automatic focusing method for scanning electron microscope having laser defect detection function | |
| JP2006313680A (en) | Electron beam type observation device | |
| JP2007157575A (en) | Method and system of pattern defect inspection by using electron beam inspection device and mirror electron projection type or multiple beam type electron beam inspection device | |
| JP2008270056A (en) | Scanning transmission electron microscope | |
| CN108398775B (en) | The focusing method and device of fluorescence microscope system | |
| JP2019145511A (en) | Electron beam apparatus | |
| JP2023065369A (en) | System and method for focusing charged-particle beam | |
| JP2007292476A (en) | Combined device of optical microscope and x-ray analyzer | |
| CN107110749A (en) | Method and laser microdissection system for laser microprobe dating | |
| CN110146898B (en) | Probe track monitoring and controlling method based on image shooting and image analysis | |
| US9558911B2 (en) | Method for analyzing and/or processing an object as well as a particle beam device for carrying out the method | |
| RU120252U1 (en) | X-RAY FLUORESCENT MICROSCOPE | |
| JP2005216645A (en) | Transmission electron microscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |