CN111812099A - Detection device and detection method - Google Patents
Detection device and detection method Download PDFInfo
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- CN111812099A CN111812099A CN202010617714.2A CN202010617714A CN111812099A CN 111812099 A CN111812099 A CN 111812099A CN 202010617714 A CN202010617714 A CN 202010617714A CN 111812099 A CN111812099 A CN 111812099A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0162—Arrangements or apparatus for facilitating the optical investigation using microprocessors for control of a sequence of operations, e.g. test, powering, switching, processing
- G01N2021/0175—Arrangements or apparatus for facilitating the optical investigation using microprocessors for control of a sequence of operations, e.g. test, powering, switching, processing for selecting operating means
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Abstract
The invention relates to a detection device and a detection method. The detection equipment of the invention is used for detecting and processing the object to be detected, and comprises: the first detection module is used for carrying out first detection processing on the object to be detected to obtain height information of a point to be detected on the surface of the object to be detected along a preset direction, and the preset direction is the optical axis direction of the first detection module; and the second detection module is used for carrying out second detection processing on the object to be detected to acquire detection information of the area to be detected on the surface of the object to be detected, and is configured to carry out focusing processing according to the height information in the detection processing process. The detection equipment can quickly position and focus the point to be detected, and has high detection speed.
Description
Technical Field
The invention relates to a defect detection technology of a display panel, in particular to detection equipment and a detection method.
Background
At present, Automatic Optical Inspection (AOI) is usually used to detect common defects encountered in the welding production of Display panels such as Organic Light Emitting Diode (OLED) panels and Liquid Crystal Displays (LCD). However, the area of the display panel is usually large, so that it is difficult to ensure the flatness of the panel, and when the unevenness of the panel causes the detection module to scan the panel to obtain an image, the focusing distance of each position on the display panel is different, and the obtained detection image is not clear enough, which affects the accuracy of defect detection. In addition, in the defect shooting process, the rechecking detection module moves rapidly, and if the focusing position is inaccurate and the focusing speed is too slow, the shot image has a smear or blur phenomenon.
Disclosure of Invention
In view of the above, it is necessary to provide a detection device, which can acquire the height information of the point to be detected in advance, so that the focusing can be performed quickly and the detection speed of the detection device can be increased.
The invention provides a detection device for detecting and processing an object to be detected, which comprises:
the first detection module is used for carrying out first detection processing on the object to be detected to obtain height information of a point to be detected on the surface of the object to be detected along a preset direction, and the preset direction is the optical axis direction of the first detection module;
and the second detection module is used for carrying out second detection processing on the object to be detected to acquire detection information of the area to be detected on the surface of the object to be detected, and is configured to carry out focusing processing according to the height information in the detection processing process.
Further, the first detection module is configured to reciprocate relative to the object to be detected along a scanning direction, and the second detection module is configured to reciprocate relative to the object to be detected along the scanning direction; the first detection module is provided with a first view field area positioned on the surface of the object to be detected, and the second detection module is provided with a second view field area positioned on the surface of the object to be detected;
a projection of the first field of view region on a plane perpendicular to the scanning direction covers a projection of the second field of view region along a first line direction, the first line intersecting the scanning direction.
Furthermore, the number of the first detection modules is multiple, and the multiple first detection modules are provided with a first detection unit and a second detection unit which are respectively positioned at two sides of the second detection module.
Further, the first detection module comprises a plurality of three-dimensional feature detection devices, the extending direction of the first view field area intersects with the scanning direction, and the field areas of the plurality of three-dimensional feature detection devices form the first view field area;
at least partial overlap between the field of view regions of a plurality of the three-dimensional topography detection apparatuses; or, the second detection module includes a plurality of full-detection probes, projections of the fields of view of the three-dimensional topography detection devices on a plane perpendicular to the scanning direction respectively cover the projections of the fields of view of the full-detection probes along a first linear direction, and the fields of view of the three-dimensional topography detection devices are greater than or equal to 2 times of the fields of view of the full-detection probes along the first linear direction.
Further, the second detection module comprises a full detection probe, the full detection probe is used for detecting the region to be detected of the object to be detected, and acquiring first detection information, and the first detection information comprises position information of a target object on the surface of the object to be detected.
Further, the detection device further comprises an auto-focus module; the automatic focusing module is used for carrying out first focusing processing on the second detection module.
Further, the second detection module comprises at least one reinspection probe, and the reinspection probe is used for performing detection processing according to the position information of the target object to be reinspected of the object to be detected and acquiring second detection information of the target object;
and the rechecking probe is configured to perform second focusing treatment according to the height value information of the point to be measured of the object to be measured along the preset direction.
Furthermore, the full detection probe is provided with a detection area positioned in the area to be detected, and the detection area is a linear array;
and the full-detection probe acquires an average height value of the detection area according to the height information of each point in the detection area along the preset direction, and the full-detection probe is configured to perform third focusing processing according to the average height value.
Furthermore, the detection equipment also comprises a bearing table used for bearing the object to be detected; and the translation table is used for driving the bearing table to translate along the scanning direction.
The invention provides a detection method for detecting defects of an object to be detected, wherein detection equipment of the detection method comprises the detection equipment, and the method comprises the following steps:
performing first detection processing on a region to be detected through a first detection module to obtain height information of a point to be detected in the region to be detected;
the step of the first detection process includes: performing height detection processing on the point to be detected in the area to be detected through the first detection module to obtain height information of the point to be detected of the object to be detected along a preset direction, wherein the preset direction is the optical axis direction of the first detection module;
performing second detection processing on the point to be detected of the detected area through a second detection module to obtain detection information of the point to be detected of the detected area;
the step of the second detection process includes: enabling the second detection module to carry out focusing processing on the point to be measured according to the height information of the point to be measured;
after the focusing processing, the second detection module performs information detection processing on the point to be detected to obtain detection information of the point to be detected.
Further, the first detection module is configured to reciprocate relative to the object along a scanning direction, and the second detection module is configured to reciprocate relative to the object along the scanning direction; the second detection module comprises a full detection probe, and the area to be detected comprises a plurality of points to be detected;
the step of the first detection process includes: the first detection module and the object to be detected move relatively along the scanning direction, so that the first detection module performs first scanning on the area to be detected;
at different moments of the first scanning, performing the height detection processing on the point to be measured in the field of view of the first detection module to obtain height information of the point to be measured;
the step of the second detection process includes: the full-detection probe and the object to be detected move relatively along the scanning direction, so that the full-detection probe performs second scanning on the area to be detected;
and at different moments of the second scanning, performing the focusing processing and the information detection processing on the point to be detected in the field of view of the full detection head.
Further, the first detection module comprises a plurality of three-dimensional feature detection devices, the fields of view of the plurality of three-dimensional feature detection devices at least partially overlap, and a first field of view of the first detection module covers the region to be detected along a first direction, which is perpendicular to the scanning direction;
the number of times of the first detection processing is one; the second detection module and the first detection module are arranged along the direction of the first scanning process; the direction of the first scanning processing is the same as the scanning direction of the first second scanning processing;
the first scanning process and the second scanning process are parallel.
Further, a projection of the first field of view onto a plane perpendicular to the scanning direction covers a projection of the second field of view along a first line, the first line intersecting the scanning direction; the number of the first detection modules is multiple, and the multiple first detection modules are provided with a first detection unit and a second detection unit which are respectively positioned at two sides of the second detection module;
the first detection process includes: sequentially performing at least one first reciprocating scanning operation, wherein the first reciprocating scanning operation comprises two times of first scanning processing, the two times of first scanning processing are respectively first positive scanning processing and first negative scanning processing, and the relative movement directions of the first positive scanning processing and the first negative scanning processing are opposite;
the second detection module and the first detection unit are arranged along the scanning direction of the first positive scanning, and the second detection module and the second detection unit are arranged along the scanning direction of the first negative scanning;
the first detection unit and the object to be detected move relatively along the scanning direction, so that the first detection unit carries out first positive scanning on the area to be detected;
the second detection unit and the object to be detected move relatively along the scanning direction, so that the second detection unit carries out first negative scanning on the area to be detected;
the second detection process includes: at least one second round-trip scanning operation is sequentially carried out, wherein the second round-trip scanning operation comprises two times of second scanning processing which are sequentially carried out, and the two times of second scanning processing are respectively second positive scanning processing and second negative scanning processing;
the second positive scan processing is in parallel with the first positive scan processing, and the second negative scan processing is in parallel with the first negative scan processing.
Further, the first detection module is provided with a first view field area positioned on the surface of the object to be detected, and the second detection module is provided with a second view field area positioned on the surface of the object to be detected; a projection of the first field of view onto a plane perpendicular to the scanning direction covers a projection of the second field of view along a first line, the first line intersecting the scanning direction; the first detection module comprises a plurality of three-dimensional shape detection devices, the field of view of the plurality of three-dimensional shape detection devices is separated, and the field of view of the three-dimensional shape detection devices is more than or equal to 2 times the field of view of the second detection device;
the second detection module and the first detection module are arranged along the direction of the first detection processing;
the second detection process includes: sequentially performing at least one second round-trip scanning process, wherein the second round-trip scanning process comprises two second scanning processes which are sequentially performed, and the two second scanning processes are respectively a second positive scanning process and a second negative scanning process;
the second positive scan process is parallel to the first scan process.
Furthermore, the second detection module further comprises at least one reinspection probe, which is used for performing detection processing according to the position information of the target object to be reinspected of the object to be detected and acquiring second detection information, the reinspection probe and the object to be detected are arranged in a relatively moving manner along an reinspection direction, and an included angle greater than zero is formed between the reinspection direction and the scanning direction;
the detection method further comprises the following steps: rechecking the object to be detected according to the position information of the target object;
the rechecking processing step includes: planning a rechecking path of a rechecking probe according to the position information of the target object to be rechecked; enabling the rechecking probe and the object to be detected to move relatively according to the rechecking path, and positioning the target object to be rechecked; after the positioning, the target object to be subjected to the rechecking is subjected to rechecking processing through the rechecking probe;
in the process of relatively moving the reinspection probe and the object to be detected according to the reinspection path, the detection method further comprises: and carrying out second focusing adjustment on the rechecking probe according to the height information of the next target object to be rechecked.
Further, when the second detection module further comprises a full detection probe;
after the first scanning process, before planning a rechecking path of a rechecking probe according to the position information of the target object to be rechecked, the rechecking process comprises the following steps: screening the target object obtained by the first scanning treatment to obtain a target object to be rechecked;
the number of times of the second scanning is multiple times, and the rechecking processing is parallel to the second scanning at the second time and after the second time.
Further, the second detection unit further comprises an auto-focusing module;
after the focusing processing and before the information detection processing is performed on the point to be measured by the second detection module, the method further includes: and enabling the second detection module to carry out first focusing processing through the automatic focusing module.
Further, the detection method further comprises: rechecking the object to be detected according to the position information of the target object; the rechecking processing step includes: planning a rechecking path of a rechecking probe according to the position information of the target object to be rechecked; enabling the rechecking probe to move relative to the object to be tested according to the rechecking path, and positioning the target object to be rechecked; after the positioning, the target object to be subjected to the rechecking is subjected to rechecking processing through the rechecking probe; in the process of relatively moving the reinspection probe and the object to be detected according to the reinspection path, the detection method further comprises: according to the height information of the next target object to be rechecked, carrying out coarse focusing adjustment on the rechecking probe;
and after the second focus adjustment, enabling the second detection module to carry out first focusing processing through the automatic focusing module.
Furthermore, the full detection probe is provided with a view field positioned on the surface of the object to be detected, and the view field is a linear array; the step of enabling the second detection module to focus the point to be measured according to the height information of the point to be measured comprises the following steps: and acquiring the average height value of the detection area according to the height information of all points to be detected in the field of view of the full-detection probe along the preset direction, and performing third focusing processing on the full-detection probe according to the average height value.
The detection device of the invention realizes the acquisition of the height information of the point to be detected on the object to be detected through the first detection module, the second detection module carries out focusing according to the height information of the point to be detected to acquire the detection information of the surface of the object to be detected, and the second detection module can carry out focusing rapidly and improve the detection speed of the detection device because the height information of the point to be detected is acquired in advance before scanning.
Drawings
To more clearly illustrate the structural features and effects of the present invention, a detailed description is given below with reference to the accompanying drawings and specific embodiments.
FIG. 1 is a schematic structural diagram of a detection apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a region distribution structure of an DUT according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a detection apparatus according to yet another embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a second detecting module according to an embodiment of the present invention;
fig. 5 is a flowchart illustrating a detection method according to an embodiment of the invention.
DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, shall fall within the scope of protection of the present invention.
The device under test in the embodiment of the present application may be an OLED (Organic Light-emitting diode) panel, an LCD (Liquid Crystal Display) panel, and the like.
The defects of the object to be measured can comprise one or more of dust, pollutants, pits or bulges on the surface of the screen.
Referring to fig. 1, an embodiment of the invention provides a detection apparatus 100 for detecting an object 101 to be detected, such as a display panel in fig. 1, including: the first detection module 110 is configured to perform first detection processing on the object 101 to be detected, so as to obtain height information of a point to be detected on the surface of the object 101 to be detected along a preset direction, where the preset direction is an optical axis direction of the first detection module 110; the second detection module 130 is configured to perform a second detection process on the object 101 to be detected, and acquire detection information of a region to be detected on the surface of the object 101 to be detected, where the second detection module 130 is configured to perform a focusing process according to the height information during the detection process.
Specifically, the detection information may be, but is not limited to, a defect and position information of the defect or a defect image.
The detection device 100 of the invention realizes the acquisition of the height information of the point to be detected on the object 101 to be detected through the first detection module 110, the second detection module 130 carries out focusing processing according to the height information of the point to be detected and acquires the detection information of the surface of the object 101 to be detected, and before the second detection module 130 scans, the height information of the point to be detected is acquired in advance, so that focusing can be carried out according to the height information, and the detection precision of the detection device 100 is improved.
Optionally, in some embodiments, the first detection module 110 is configured to reciprocate relative to the object 101 along a scanning direction (as shown by an arrow a in fig. 1), and the second detection module 130 is configured to reciprocate relative to the object 101 along the scanning direction. Referring to fig. 2, the first detecting module 110 has a first view field region 112 located on the surface of the object 101, and the second detecting module 130 has a second view field region 132 located on the surface of the object 101; the projection of the first field of view region 112 on a plane perpendicular to the scan direction covers the projection of the second field of view region 132 along a first line direction 102, the first line 102 intersecting the scan direction.
Optionally, in some embodiments, the first detection module 110 includes a plurality of three-dimensional topography detection devices, an extension direction of the first field of view region 112 intersects the scanning direction, and field of view regions of the plurality of three-dimensional topography detection devices form the first field of view region 112; the fields of view of a plurality of the three-dimensional topography detection apparatus at least partially overlap, and the fields of view of a plurality of the three-dimensional topography detection apparatus overlap to form a first field of view region 112. Referring to fig. 3, optionally, in some embodiments, the first detecting module 110 includes a first detecting unit 111 and a second detecting unit 113 respectively located at two sides of a portion of the second detecting module 130. The first detection unit 111 and the second detection unit 113 may each include a plurality of three-dimensional topography detection devices. The second detection module 130 includes a plurality of full-inspection probes 150, the projection of the field of view of each three-dimensional topography detection apparatus on the plane perpendicular to the scanning direction covers the projection of the field of view of each full-inspection probe 150 along the first straight line 102, and the field of view of the three-dimensional topography detection apparatus is greater than or equal to 2 times the field of view of the full-inspection probe 150 along the first straight line direction. That is, the field of view of the first detection unit 111 and the field of view of the second detection unit 113 together form a first field of view, and the field of view of each three-dimensional topography detection apparatus is greater than or equal to 2 times the field of view of the full inspection head 150; when the object 101 to be detected moves along the first scanning direction relative to the first detection module 110 and the second detection module 130, the first detection unit 111 performs detection to obtain height information of a point to be detected on the surface of the object to be detected; when the object 101 moves along the second scanning direction relative to the first detection module 110 and the second detection module 130, the second detection unit 113 performs detection to obtain height information of a point to be measured on the surface of the object.
Optionally, in some embodiments, the full-detection probe 150 is configured to perform detection processing on the region to be detected on the surface of the object to be detected, and obtain a target object on the surface of the object to be detected and position information of the target object. The full inspection probe 150 is used for detecting, so that the defects on the surface of the object to be detected and the position information of the defects can be quickly and accurately acquired.
Optionally, in some embodiments, the second detection module 130 further includes at least one review probe 131, where the review probe 131 is configured to perform detection processing according to the target object of the object 101 and position information of the target object, and acquire second detection information, where the second detection information includes a type of the target object; the plurality of rechecking probes 131 are configured to perform second focusing processing according to height value information of the point to be measured of the object 101 along a preset direction.
Referring to fig. 4, optionally, in some embodiments, the second detection module 130 further includes an auto-focus module 133; the auto-focusing module 133 is configured to enable the second detection module 130 to perform a first focusing process. In the present embodiment, the review probe 131 first performs the second focusing process according to the height information, and thereafter performs the first focusing process according to the auto-focusing module 133; the precision of the second focusing process is lower than that of the first focusing process, and the execution speed of the second focusing process is higher than that of the first focusing process, so that on one hand, the focusing speed of the rechecking probe 131 can be increased, the efficiency is improved, and on the other hand, the focusing precision can be ensured through two times of focusing processes.
Optionally, in some embodiments, the full-detection probe 150 has a detection region located in the region to be detected, and the detection region is a linear array; the full-detection probe 150 obtains an average height value of the detection area according to the height information of all points to be detected in the detection area along the predetermined direction, and the full-detection probe 150 is configured to perform a third focusing process according to the average height value.
With continued reference to fig. 1, optionally, in some embodiments, the detection apparatus 100 further includes a carrying table 170 for carrying the object 101 to be measured; and the translation stage 190 is configured to drive the bearing stage 170 to translate along the scanning direction.
Referring to fig. 5, an embodiment of the present invention further provides a detection method for detecting a defect of an object 101 to be detected, where a detection apparatus of the detection method includes the detection apparatus 100 of the embodiment of the present invention, and the method includes:
s101, performing first detection processing on the area to be detected through a first detection module 110 to obtain height information of the point to be detected in the area to be detected; specifically, the step of the first detection processing includes: performing height detection processing on the point to be detected in the area to be detected through the first detection module 110, and acquiring height information of the point to be detected of the object 101 to be detected along a preset direction, where the preset direction is an optical axis direction of the first detection module 110;
s102, performing second detection processing on a point to be detected of the area to be detected through a second detection module 130, and acquiring detection information of feature points of the area to be detected; specifically, the step of the second detection processing includes: enabling the second detection module 130 to perform focusing processing on the point to be measured according to the height information of the point to be measured; after the focusing processing, a second detection module 130 performs information detection processing on the point to be detected on the object 101 to be detected, so as to obtain detection information of the area to be detected of the object 101 to be detected.
According to the detection method, the height information of the point to be detected on the object 101 to be detected is acquired through the first detection module 110, the second detection module 130 focuses according to the height information of the point to be detected to acquire the detection information of the surface of the object 101 to be detected, and before scanning, the second detection module 130 acquires the height information of the point to be detected in advance, so that focusing can be performed quickly, and the defect detection speed is increased.
Specifically, in some embodiments, the first detection module 110 is configured to reciprocate relative to the object 101 along a scanning direction, and the second detection module 130 is configured to reciprocate relative to the object 101 along the scanning direction; the second detecting module 130 includes a full detecting probe 150, and the region to be detected includes a plurality of points to be detected.
In this embodiment, the step of the first detection processing includes: the first detection module 110 and the to-be-detected region 101 move relatively along the scanning direction, so that the first detection module 110 performs a first scanning on the to-be-detected region; that is, by moving the object 101 along the scanning direction, the first detection module 110 is kept stationary, and the first detection module 110 performs a first scan on the area to be detected; or by keeping the object 101 to be detected still, the first detection module 110 moves along the scanning direction, so that the first detection module 110 performs first detection on the area to be detected; or the object to be detected 101 and the first detection module 110 move oppositely along the scanning direction, so that the first detection module 110 performs the first detection on the area to be detected. In this embodiment, at different times of the first scanning, the height detection processing is performed on the point to be measured in the field of view of the first detection module 110, so as to obtain height information of the point to be measured.
In this embodiment, the step of the second detection process includes: by the relative movement of the second detection module 130 and the object 101 to be detected along the scanning direction, the second detection module 130 performs a second scanning on the area to be detected, and performs the focusing processing and the information detection processing on the point to be detected which is eaten by the second detection module 130 at different moments of the second scanning.
Specifically, in some embodiments, the first detection module 110 includes a plurality of three-dimensional topography detection devices, the field of view areas of the plurality of three-dimensional topography detection devices at least partially overlap, the first detection module 110 has a first field of view area 112 located on the surface of the object 101, the first field of view area 110 covers the area to be detected along a first direction, the first direction being perpendicular to the scanning direction; the number of times of the first detection processing is one, that is, the first detection module 110 can obtain the height information of the point to be detected of the area to be detected only by one detection; at this time, the second detection module 130 and the first detection module 110 are arranged along the direction of the first scanning process, which is the same as the scanning direction of the first second scanning process; that is, the first scanning process and the second scanning process are parallel; that is to say, the first detection module 110 performs the first scanning process, and at the same time, the second detection module 130 performs the second scanning process for the first time, since the first detection module 110 and the second detection module 130 are arranged along the scanning direction, in the detection process, the height information of all points to be detected in the area to be detected is firstly obtained through the first scanning process, and then, the detection information of the points to be detected is obtained through the second scanning process. On one hand, no extra detection time is needed to be added and the detection time is saved because the first scanning process and the second scanning process are parallel; on the other hand, before the second scanning process, the focusing process can be carried out according to the height information of the point to be detected, so that the detection precision is improved.
Specifically, in some embodiments, the projection of the first view region 112 onto a plane perpendicular to the scan direction covers the second view region 132 along a first straight line 102; the first straight line 102 intersects the scanning direction, preferably the first straight line 102 is perpendicular to the scanning direction; in this embodiment, the number of the first detecting modules 110 is multiple, and the multiple first detecting modules 110 have a first detecting unit 111 and a second detecting unit 113 respectively located at two sides of the second detecting module 130; the first detection process includes: sequentially performing at least one first reciprocating scanning operation, wherein the first reciprocating scanning operation comprises two times of first scanning processing, the two times of first scanning processing are respectively first positive scanning processing and first negative scanning processing, and the relative movement directions of the first positive scanning processing and the first negative scanning processing are opposite; the second detecting module 130 and the first detecting unit are arranged along the scanning direction of the first positive scan, and the second detecting module 130 and the second detecting unit are arranged along the scanning direction of the first negative scan.
More specifically, the first detection unit and the object to be detected move relatively along the scanning direction, so that the first detection unit performs a first positive scanning on the area to be detected; the second detection unit and the object to be detected move relatively along the scanning direction, so that the second detection unit carries out first negative scanning on the area to be detected; and the relative motion directions of the first positive scanning process and the first negative scanning process are opposite.
In this embodiment, the second detection process includes: and the second round-trip scanning operation comprises two times of second scanning processing which are sequentially performed, the two times of second scanning processing are respectively second positive scanning processing and second negative scanning processing, the second positive scanning processing is parallel to the first positive scanning processing, and the second negative scanning processing is parallel to the second positive scanning processing. In this embodiment, the second detecting module 130 and the first detecting unit are arranged along the scanning direction of the first forward scanning, and when the first forward scanning process and the second forward scanning process are parallel, firstly, the height information of the point to be measured in the area to be measured is obtained through the first forward scanning process, and then the detection information of the point to be measured is obtained through the second forward scanning process; the second detecting module 130 and the second detecting unit are arranged along the scanning direction of the first negative scanning, and when the first negative scanning process and the second negative scanning process are parallel, firstly, the height information of the point to be measured in the area to be measured is obtained through the first negative scanning process, and then, the detection information of the point to be measured is obtained through the second negative scanning process. In this embodiment, the first detection process may further include a plurality of first round-trip scanning operations performed in sequence, and the second detection process may further include a plurality of second round-trip scanning operations performed in sequence.
Specifically, in some embodiments, the first detection module 110 has a first view field region on the surface of the object, and the second detection module 130 has a second view field region on the surface of the object; a projection of the first field of view onto a plane perpendicular to the scanning direction covers a projection of the second field of view along a first line, which intersects the scanning direction, preferably the first line is perpendicular to the scanning direction; in this embodiment, the field of view areas of the plurality of three-dimensional topography detection devices are separated, that is, the field of view areas of the plurality of three-dimensional topography detection devices are arranged at intervals along a first linear direction, and the field of view of the three-dimensional topography detection devices is greater than or equal to 2 times the field of view of the second detection device. In this embodiment, the second detection module 130 and the first detection module 110 are arranged in the direction of the first detection process; the second detection process includes: sequentially performing at least one second round-trip scanning treatment in sequence, wherein the second round-trip scanning treatment comprises two times of second scanning treatments which are sequentially performed, and the two times of second scanning treatments are respectively a second positive scanning treatment and a second negative scanning treatment; and in the present embodiment, the second positive scanning process is parallel to the first scanning process. When the second positive scanning process is parallel to the first scanning process, firstly, the height information of the point to be measured in the area to be measured is obtained through the first scanning process, then, the detection information of the point to be measured is obtained through the second positive scanning process, and the detection information of the point to be measured is obtained through the second negative scanning process, that is, the first detection module 110 only performs the first scanning process in one reciprocating scanning operation, and the second detection module 130 needs to perform the second positive scanning process and the second negative scanning process in one reciprocating scanning operation.
According to the detection method provided by the invention, the height information of the point to be detected on the object to be detected is obtained by adding the first detection process, so that the second detection module 130 can conveniently carry out focusing process according to the height information of the point to be detected, and the detection precision is improved; and the first detection processing of the first detection module 110 is parallel to the second detection processing of the second detection module 130, so that the detection time of the first detection module 110 does not need to be additionally increased, and the detection efficiency is improved.
Specifically, in some embodiments, the second detection module 130 includes a plurality of full detection heads 150. The step of enabling the second detection module 130 to perform focusing processing on the point to be measured according to the height information of the point to be measured includes: and respectively enabling the multiple full-detection probes 150 to perform third focusing processing on the point to be detected according to the height information of the point to be detected.
Specifically, in some embodiments, the full detection probe 150 has a field of view on the surface of the object 101, and the field of view is a linear array; the focusing process of the full detection head 150 according to the height information of the point to be detected includes: and acquiring an average height value of the detection area according to the height information of all points to be detected in the detection area along the preset direction, and performing third focusing processing on the full detection probe 150 according to the average height value.
Specifically, in some embodiments, the second detection module 130 further includes at least one review probe 131, configured to perform detection processing according to position information of a target object to be reviewed of the object to be examined and acquire second detection information, where the review probe 131 and the object to be examined are relatively movably disposed along a review direction, and an included angle greater than zero is formed between the review direction and the scanning direction;
the detection method further comprises the following steps: rechecking the object to be detected according to the position information of the target object;
the rechecking processing step includes: planning a rechecking path of the rechecking probe 131 according to the position information of the target object to be rechecked; enabling the rechecking probe 131 and the object to be detected to move relatively according to the rechecking path, and positioning the target object to be rechecked; after the positioning, the target object to be retested is retested through the retest probe 131; in the process of relatively moving the reinspection probe 131 and the object to be tested according to the reinspection path, the detection method further includes: and performing second focusing adjustment on the rechecking probe 131 according to the height information of the next target object to be rechecked.
In one embodiment, the second detection module 130 includes the full-scope probe 150 and the review probe 131, and after the first scanning process is performed by the first detection module 110 and before the review path of the review probe 131 is planned according to the position information of the target object to be reviewed, the review process includes: screening the target object obtained by the first scanning treatment to obtain a target object to be rechecked; the number of times of the second scanning is multiple times, and the rechecking processing is parallel to the second scanning at the second time and after the second time.
In one embodiment, the second detection module 130 further includes an auto-focusing module, and after the focusing process and before the information detection process is performed on the point to be measured by the second detection module 130, the method further includes: the second detection module 130 is caused to perform a first focusing process by the auto-focusing module. Specifically, the detection method further comprises: rechecking the object to be detected according to the position information of the target object; the rechecking processing step includes: planning a rechecking path of the rechecking probe 131 according to the position information of the target object to be rechecked; enabling the rechecking probe 131 to move relative to the object to be tested according to the rechecking path, and positioning the target object to be rechecked; after the positioning, the target object to be retested is retested through the retest probe 131; in the process of relatively moving the reinspection probe 131 and the object to be tested according to the reinspection path, the detection method further includes: according to the height information of the next target object to be rechecked, performing coarse focusing adjustment on the rechecking probe 131; after the second focus adjustment, the second detection module 130 is caused to perform a first focusing process by the auto-focusing module.
Specifically, in some embodiments, the detection method comprises: performing first detection processing on a region to be detected of the object to be detected through the first detection module 110 to obtain height information of a point to be detected in the region to be detected, specifically, performing height detection processing on the point to be detected of the region to be detected through a three-dimensional shape detection device to obtain height information of the point to be detected of the object to be detected along an optical axis direction of the three-dimensional shape detection device;
performing second detection processing on the point to be detected in the region to be detected by using a second detection module 130, to obtain detection information of the point to be detected in the region to be detected, specifically, the second detection processing specifically includes: enabling the multiple full-detection probes 150 to respectively perform third focusing processing on the points to be detected according to the height information of the points to be detected, and performing full-detection processing on the object to be detected through the multiple full-detection probes 150 to obtain first detection information, wherein the first detection information comprises a target object of the object to be detected and position information of the target object; enabling the at least one rechecking probe 131 to perform second focusing according to the height information of the point to be measured where the target object is located, and enabling the rechecking probe 131 to be quickly adjusted to the focal plane; and performing first focusing processing on the rechecking probe 131 through the automatic focusing module, wherein the precision of the first focusing processing is higher than that of the second focusing processing, and performing rechecking processing on the target object through the rechecking probe 131 to acquire second detection information of the target object.
Through the arrangement, the height information of the point to be measured on the surface of the object to be measured is detected, so that the detection precision of the full detection probe 150 can be improved, the adjustment time of the rechecking probe 131 can be shortened, the adjustment efficiency is improved, and the detection efficiency is improved.
While the invention has been described with reference to specific embodiments, the invention is not limited thereto, and various equivalent modifications and substitutions can be easily made by those skilled in the art within the technical scope of the invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (19)
1. A detection device for detecting an object to be detected, comprising:
the first detection module is used for carrying out first detection processing on the object to be detected to obtain height information of a point to be detected on the surface of the object to be detected along a preset direction, and the preset direction is the optical axis direction of the first detection module;
and the second detection module is used for carrying out second detection processing on the object to be detected to acquire detection information of the area to be detected on the surface of the object to be detected, and is configured to carry out focusing processing according to the height information in the detection processing process.
2. The inspection apparatus of claim 1, wherein the first inspection module is configured to reciprocate relative to the object along a scanning direction, and the second inspection module is configured to reciprocate relative to the object along the scanning direction; the first detection module is provided with a first view field area positioned on the surface of the object to be detected, and the second detection module is provided with a second view field area positioned on the surface of the object to be detected;
a projection of the first field of view region on a plane perpendicular to the scanning direction covers a projection of the second field of view region along a first line direction, the first line intersecting the scanning direction.
3. The detecting device according to claim 2, wherein the number of the first detecting modules is plural, and the plural first detecting modules include a first detecting unit and a second detecting unit respectively located at both sides of the second detecting module.
4. The inspection apparatus of claim 2, wherein the first inspection module comprises a plurality of three-dimensional topography inspection devices, the first field of view region extending in a direction intersecting the scan direction, the plurality of three-dimensional topography inspection devices having field of view regions forming the first field of view region;
at least partial overlap between the field of view regions of a plurality of the three-dimensional topography detection apparatuses; or, the second detection module includes a plurality of full-detection probes, projections of the fields of view of the three-dimensional topography detection devices on a plane perpendicular to the scanning direction respectively cover the projections of the fields of view of the full-detection probes along a first linear direction, and the fields of view of the three-dimensional topography detection devices are greater than or equal to 2 times of the fields of view of the full-detection probes along the first linear direction.
5. The detection apparatus according to claim 1, wherein the second detection module includes a full detection probe, and the full detection probe is configured to perform detection processing on the region to be detected of the object to be detected to obtain first detection information, where the first detection information includes position information of a target object on the surface of the object to be detected.
6. The detection apparatus according to claim 1 or 5, wherein the detection apparatus further comprises an auto-focus module; the automatic focusing module is used for carrying out first focusing processing on the second detection module.
7. The detection device according to claim 6, wherein the second detection module comprises at least one review probe, and the review probe is configured to perform detection processing according to position information of a target object to be reviewed of the object to be examined and acquire second detection information of the target object;
and the rechecking probe is configured to perform second focusing treatment according to the height value information of the point to be measured of the object to be measured along the preset direction.
8. The inspection apparatus of claim 4, wherein the full inspection probe has a probe area located in the area to be inspected, the probe area being a linear array;
and the full-detection probe acquires an average height value of the detection area according to the height information of each point in the detection area along the preset direction, and the full-detection probe is configured to perform third focusing processing according to the average height value.
9. The detection apparatus according to claim 1, further comprising a carrying stage for carrying the object to be detected; and the translation table is used for driving the bearing table to translate along the scanning direction.
10. A method for detecting defects of an object to be detected, the detection apparatus of the method comprising the detection apparatus of any one of claims 1 to 9, the method comprising:
performing first detection processing on a region to be detected through a first detection module to obtain height information of a point to be detected in the region to be detected;
the step of the first detection process includes: performing height detection processing on the point to be detected in the area to be detected through the first detection module to obtain height information of the point to be detected of the object to be detected along a preset direction, wherein the preset direction is the optical axis direction of the first detection module;
performing second detection processing on the point to be detected of the detected area through a second detection module to obtain detection information of the point to be detected of the detected area;
the step of the second detection process includes: enabling the second detection module to carry out focusing processing on the point to be measured according to the height information of the point to be measured;
after the focusing processing, the second detection module performs information detection processing on the point to be detected to obtain detection information of the point to be detected.
11. The inspection method of claim 10, wherein the first inspection module is configured to reciprocate relative to the object along a scanning direction, and the second inspection module is configured to reciprocate relative to the object along the scanning direction; the second detection module comprises a full detection probe, and the area to be detected comprises a plurality of points to be detected;
the step of the first detection process includes: the first detection module and the object to be detected move relatively along the scanning direction, so that the first detection module performs first scanning on the area to be detected;
at different moments of the first scanning, performing the height detection processing on the point to be measured in the field of view of the first detection module to obtain height information of the point to be measured;
the step of the second detection process includes: the full-detection probe and the object to be detected move relatively along the scanning direction, so that the full-detection probe performs second scanning on the area to be detected;
and at different moments of the second scanning, performing the focusing processing and the information detection processing on the point to be detected in the field of view of the full detection head.
12. The inspection method of claim 11, wherein the first inspection module comprises a plurality of three-dimensional topography inspection devices, the fields of view of the plurality of three-dimensional topography inspection devices at least partially overlap, and a first field of view of the first inspection module covers the area under inspection in a first direction, the first direction being perpendicular to the scan direction;
the number of times of the first detection processing is one; the second detection module and the first detection module are arranged along the direction of the first scanning process; the direction of the first scanning processing is the same as the scanning direction of the first second scanning processing;
the first scanning process and the second scanning process are parallel.
13. The detection method according to claim 11, characterized in that the projection of the first field of view on a plane perpendicular to the scanning direction covers the projection of the second field of view along a first line, which intersects the scanning direction; the number of the first detection modules is multiple, and the multiple first detection modules are provided with a first detection unit and a second detection unit which are respectively positioned at two sides of the second detection module;
the first detection process includes: sequentially performing at least one first reciprocating scanning operation, wherein the first reciprocating scanning operation comprises two times of first scanning processing, the two times of first scanning processing are respectively first positive scanning processing and first negative scanning processing, and the relative movement directions of the first positive scanning processing and the first negative scanning processing are opposite;
the second detection module and the first detection unit are arranged along the scanning direction of the first positive scanning, and the second detection module and the second detection unit are arranged along the scanning direction of the first negative scanning;
the first detection unit and the object to be detected move relatively along the scanning direction, so that the first detection unit carries out first positive scanning on the area to be detected;
the second detection unit and the object to be detected move relatively along the scanning direction, so that the second detection unit carries out first negative scanning on the area to be detected;
the second detection process includes: at least one second round-trip scanning operation is sequentially carried out, wherein the second round-trip scanning operation comprises two times of second scanning processing which are sequentially carried out, and the two times of second scanning processing are respectively second positive scanning processing and second negative scanning processing;
the second positive scan processing is in parallel with the first positive scan processing, and the second negative scan processing is in parallel with the first negative scan processing.
14. The inspection method of claim 11, wherein the first inspection module has a first field of view on the surface of the object, and the second inspection module has a second field of view on the surface of the object; a projection of the first field of view onto a plane perpendicular to the scanning direction covers a projection of the second field of view along a first line, the first line intersecting the scanning direction; the first detection module comprises a plurality of three-dimensional shape detection devices, the field of view of the plurality of three-dimensional shape detection devices is separated, and the field of view of the three-dimensional shape detection devices is more than or equal to 2 times the field of view of the second detection device;
the second detection module and the first detection module are arranged along the direction of the first detection processing;
the second detection process includes: sequentially performing at least one second round-trip scanning process, wherein the second round-trip scanning process comprises two second scanning processes which are sequentially performed, and the two second scanning processes are respectively a second positive scanning process and a second negative scanning process;
the second positive scan process is parallel to the first scan process.
15. The detection method according to claim 10 or 11, wherein the second detection module further includes at least one review probe for performing detection processing according to position information of a target object to be reviewed of the object to be detected and acquiring second detection information, the review probe and the object to be detected are relatively moved along a review direction, and an included angle greater than zero is formed between the review direction and the scanning direction;
the detection method further comprises the following steps: rechecking the object to be detected according to the position information of the target object;
the rechecking processing step includes: planning a rechecking path of a rechecking probe according to the position information of the target object to be rechecked; enabling the rechecking probe and the object to be detected to move relatively according to the rechecking path, and positioning the target object to be rechecked; after the positioning, the target object to be subjected to the rechecking is subjected to rechecking processing through the rechecking probe;
in the process of relatively moving the reinspection probe and the object to be detected according to the reinspection path, the detection method further comprises: and carrying out second focusing adjustment on the rechecking probe according to the height information of the next target object to be rechecked.
16. The inspection method of claim 15, wherein when the second inspection module further comprises a full inspection head;
after the first scanning process, before planning a rechecking path of a rechecking probe according to the position information of the target object to be rechecked, the rechecking process comprises the following steps: screening the target object obtained by the first scanning treatment to obtain a target object to be rechecked;
the number of times of the second scanning is multiple times, and the rechecking processing is parallel to the second scanning at the second time and after the second time.
17. The detection method according to claim 10 or 15, wherein the second detection unit further comprises an auto-focus module;
after the focusing processing and before the information detection processing is performed on the point to be measured by the second detection module, the method further includes: and enabling the second detection module to carry out first focusing processing through the automatic focusing module.
18. The detection method according to claim 17, further comprising: rechecking the object to be detected according to the position information of the target object; the rechecking processing step includes: planning a rechecking path of a rechecking probe according to the position information of the target object to be rechecked; enabling the rechecking probe to move relative to the object to be tested according to the rechecking path, and positioning the target object to be rechecked; after the positioning, the target object to be subjected to the rechecking is subjected to rechecking processing through the rechecking probe; in the process of relatively moving the reinspection probe and the object to be detected according to the reinspection path, the detection method further comprises: according to the height information of the next target object to be rechecked, carrying out coarse focusing adjustment on the rechecking probe;
and after the second focus adjustment, enabling the second detection module to carry out first focusing processing through the automatic focusing module.
19. The detection method according to claim 10, wherein the full detection probe has a field of view on the surface of the object to be detected, and the field of view is a linear array; the step of enabling the second detection module to focus the point to be measured according to the height information of the point to be measured comprises the following steps: and acquiring the average height value of the detection area according to the height information of all points to be detected in the field of view of the full-detection probe along the preset direction, and performing third focusing processing on the full-detection probe according to the average height value.
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