CN206132672U - X -ray fluorescence spectrograph - Google Patents
X -ray fluorescence spectrograph Download PDFInfo
- Publication number
- CN206132672U CN206132672U CN201621073180.7U CN201621073180U CN206132672U CN 206132672 U CN206132672 U CN 206132672U CN 201621073180 U CN201621073180 U CN 201621073180U CN 206132672 U CN206132672 U CN 206132672U
- Authority
- CN
- China
- Prior art keywords
- detector
- sample
- sample stage
- ray fluorescence
- position adjusting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004876 x-ray fluorescence Methods 0.000 title claims abstract description 35
- 238000001514 detection method Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract description 19
- 238000004458 analytical method Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 2
- 238000001941 electron spectroscopy Methods 0.000 description 2
- 238000000921 elemental analysis Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
本实用新型提供了一种X射线荧光光谱仪，其包括：X射线管，用于发出X射线；样品台，用于放置待检测样品；会聚透镜，设置在X射线管和样品台之间，X射线管发出的X射线经会聚透镜出射到样品台；探测器，探测来自样品台上的样品的X射线；平行束透镜，设置在样品台和探测器之间，来自样品的X射线经平行束透镜到达探测器；摄像头，用于获取样品图像；样品台位置调节装置，用于在至少三维方向上调节样品台的位置，样品台固定于样品台位置调节装置上；探测器位置调节装置，用于在至少三维方向上调节探测器的位置，探测器固定于探测器位置调节装置上。本实用新型可实现样品元素组份及元素空间分布的测量，机械结构简单，操作便利，测量精度高。
The utility model provides an X-ray fluorescence spectrometer, which comprises: an X-ray tube for emitting X-rays; a sample stage for placing samples to be tested; a converging lens arranged between the X-ray tube and the sample stage, and X-ray The X-rays emitted by the ray tube are emitted to the sample stage through the converging lens; the detector detects the X-rays from the sample on the sample stage; the parallel beam lens is arranged between the sample stage and the detector, and the X-rays from the sample pass through the parallel beam The lens reaches the detector; the camera is used to obtain the image of the sample; the sample stage position adjustment device is used to adjust the position of the sample stage in at least three dimensions, and the sample stage is fixed on the sample stage position adjustment device; the detector position adjustment device is used In order to adjust the position of the detector in at least three-dimensional directions, the detector is fixed on the detector position adjusting device. The utility model can realize the measurement of sample element components and element space distribution, has simple mechanical structure, convenient operation and high measurement precision.
Description
技术领域technical field
本实用新型涉及X射线应用技术领域，特别涉及一种X射线荧光光谱仪。The utility model relates to the technical field of X-ray applications, in particular to an X-ray fluorescence spectrometer.
背景技术Background technique
目前针对样品表面元素组分分析的技术主要为X射线荧光分析技术和电子能谱技术，该技术可以对样品表面元素的分布状态进行检测，但无法深入到样品内部进行元素分析。同时传统的X射线荧光分析技术和电子能谱技术由于无法精确定位至一个点进行测量，所以无法精确的实现单点元素组分分析。At present, the techniques for analyzing element components on the surface of samples are mainly X-ray fluorescence analysis technology and electron spectroscopy technology. This technology can detect the distribution state of elements on the surface of the sample, but it cannot go deep into the sample for elemental analysis. At the same time, traditional X-ray fluorescence analysis technology and electron spectroscopy technology cannot precisely locate a point for measurement, so they cannot accurately realize single-point elemental component analysis.
因此，需要一种能有效地能够深入到样品内部进行元素分析的技术。Therefore, there is a need for a technology that can effectively penetrate deep into the sample for elemental analysis.
实用新型内容Utility model content
为了解决上述问题，本实用新型的目的在于提供一种基于双导管调控器件的X射线荧光光谱仪，其能够精确定位于待测区域进行样品元素组分及元素空间的全自动测量。In order to solve the above problems, the purpose of this utility model is to provide an X-ray fluorescence spectrometer based on a dual-catheter control device, which can be precisely located in the area to be measured for fully automatic measurement of sample element components and element space.
本实用新型的技术方案如下：The technical scheme of the utility model is as follows:
一种基于双导管调控器件的X射线荧光光谱仪，该光谱仪包括：An X-ray fluorescence spectrometer based on a dual-catheter control device, the spectrometer includes:
X射线管，用于发出X射线；X-ray tubes for emitting X-rays;
样品台，用于放置待检测样品；Sample stage, for placing the sample to be tested;
会聚透镜，其设置在所述X射线管和所述样品台之间，所述X射线管发出的X射线经所述会聚透镜出射到所述样品台；A converging lens, which is arranged between the X-ray tube and the sample stage, and the X-rays emitted by the X-ray tube exit to the sample stage through the converging lens;
探测器，其探测来自所述样品台上的样品的X射线；a detector that detects x-rays from a sample on the sample stage;
平行束透镜，其设置在所述样品台和所述探测器之间，来自样品的X射线经所述平行束透镜到达所述探测器；a parallel beam lens, which is arranged between the sample stage and the detector, and the X-rays from the sample reach the detector through the parallel beam lens;
摄像头，其用于获取样品图像；a camera for acquiring images of the sample;
样品台位置调节装置，用于在至少三维方向上调节样品台的位置，其中所述样品台固定于所述样品台位置调节装置上；以及A sample stage position adjustment device, for adjusting the position of the sample stage in at least three dimensions, wherein the sample stage is fixed on the sample stage position adjustment device; and
探测器位置调节装置，用于在至少三维方向上调节探测器的位置，其中所述探测器固定于所述探测器位置调节装置上。The detector position adjusting device is used for adjusting the position of the detector in at least three dimensions, wherein the detector is fixed on the detector position adjusting device.
优选的，所述会聚透镜通过会聚透镜夹具与所述X射线管相连接；所述平行束透镜通过平行束透镜夹具与所述探测器相连接。Preferably, the converging lens is connected to the X-ray tube through a converging lens fixture; the parallel beam lens is connected to the detector through a parallel beam lens fixture.
优选的，该光谱仪还包括：底板和用于支撑所述X射线管的支架；其中，所述支架固定于底板上；所述样品台位置调节装置和所述探测器位置调节装置固定于所述底板上；所述摄像头与摄像头夹具相连接，所述摄像头夹具固定于所述底板上。Preferably, the spectrometer also includes: a base plate and a bracket for supporting the X-ray tube; wherein, the bracket is fixed on the base plate; the sample stage position adjustment device and the detector position adjustment device are fixed on the On the bottom plate; the camera is connected to the camera fixture, and the camera fixture is fixed on the bottom plate.
优选的，所述支架包括第一支架、第二支架和第三支架。Preferably, the bracket includes a first bracket, a second bracket and a third bracket.
优选的，所述会聚透镜包括数万根毛细子管，用于会聚X射线管发出的X射线。Preferably, the converging lens includes tens of thousands of capillary tubes for converging the X-rays emitted by the X-ray tube.
优选的，所述平行束透镜包括数万根毛细子管，用于将发散的X射线会聚成准平行束。Preferably, the parallel beam lens includes tens of thousands of capillary tubes for converging divergent X-rays into quasi-parallel beams.
优选的，所述样品台位置调节装置包括三个直线运动滑轨，实现在预定的X、Y、Z轴三个方向上的移动。Preferably, the position adjustment device of the sample stage includes three linear motion sliding rails to realize movement in three predetermined directions of X, Y, and Z axes.
优选的，所述探测器位置调节装置为多自由度位置调整平台，能够控制探测器在预定的X、Y、Z轴三个方向上移动。Preferably, the detector position adjustment device is a multi-degree-of-freedom position adjustment platform, capable of controlling the detector to move in three predetermined directions of X, Y, and Z axes.
优选的，所述探测器位置调节装置还能够控制探测器绕Y轴和Z轴转动。Preferably, the detector position adjustment device can also control the detector to rotate around the Y axis and the Z axis.
优选的，所述X射线荧光光谱仪还包括控制器，该控制器用于控制所述样品台位置调节装置和所述探测器位置调节装置的移动以及所述探测器的探测。Preferably, the X-ray fluorescence spectrometer further includes a controller, which is used to control the movement of the sample stage position adjustment device and the detector position adjustment device and the detection of the detector.
本实用新型的有益效果包括：(1)本实用新型设计的基于双导管调控器件的X射线荧光谱仪不仅可以进行样品表面元素组分及含量分析，还可以无损的深入样品内部进行元素组分及微区元素空间分布分析。(2)本实用新型设计的X射线荧光谱仪，操作自动化程度高，配合相应的控制软件可以实现按设定路径扫描及表面自适应扫描等自动化操作。相比于传统的手动或半自动化设备，本实用新型具有更好的操作便利性和测量精度。(3) 本实用新型机械结构简单、操作方便、可靠性高。The beneficial effects of the utility model include: (1) The X-ray fluorescence spectrometer based on the dual-catheter control device designed by the utility model can not only analyze the element components and content on the surface of the sample, but also conduct the element component and content analysis in the sample without damage. Analysis of the spatial distribution of elements in the micro-area. (2) The X-ray fluorescence spectrometer designed by the utility model has a high degree of automation in operation, and can realize automatic operations such as scanning according to a set path and surface self-adaptive scanning with corresponding control software. Compared with traditional manual or semi-automatic equipment, the utility model has better operation convenience and measurement accuracy. (3) The utility model has the advantages of simple mechanical structure, convenient operation and high reliability.
应当理解，前述大体的描述和后续详尽的描述均为示例性说明和解释，并不应当用作对本实用新型所要求保护内容的限制。It should be understood that the foregoing general description and the subsequent detailed description are all exemplary illustrations and explanations, and should not be used as limitations on the claimed content of the present utility model.
附图说明Description of drawings
参考附图，本实用新型更多的目的、功能和优点将通过本实用新型实施方式的如下描述得以阐明，在附图中：With reference to the accompanying drawings, more purposes, functions and advantages of the present utility model will be clarified through the following description of the embodiments of the present utility model, in the accompanying drawings:
图1是基于双导管调控器件的全自动X射线荧光光谱仪前视图。Figure 1 is a front view of a fully automatic X-ray fluorescence spectrometer based on a dual-catheter control device.
图2基于双导管调控器件的全自动X射线荧光光谱仪后视图。Fig. 2 Rear view of the fully automatic X-ray fluorescence spectrometer based on the dual-catheter control device.
图3利用全自动X射线荧光光谱仪检测样品操作示意图。Figure 3 is a schematic diagram of the operation of detecting samples by using a fully automatic X-ray fluorescence spectrometer.
图4利用全自动X射线荧光光谱仪检测样品内部某微区元素组分与空间含量分布操作示意图。Figure 4 is a schematic diagram of the operation of detecting element components and spatial content distribution in a micro-area inside a sample by using a fully automatic X-ray fluorescence spectrometer.
具体实施方式detailed description
下面，对本实用新型的优选实施方式进行详细说明。这些优选实施方式的示例在附图中进行了例示。附图中所示和根据附图描述的本实用新型的实施方式仅仅是示例性的，并且本实用新型的技术精神及其主要操作不限于这些实施方式。Next, preferred embodiments of the present invention will be described in detail. Examples of these preferred embodiments are illustrated in the accompanying drawings. The embodiments of the present invention shown in the drawings and described according to the drawings are merely exemplary, and the technical spirit of the present invention and its main operations are not limited to these embodiments.
在此，还需要说明的是，为了避免因不必要的细节而模糊了本实用新型，在附图中仅仅示出了与根据本实用新型的方案密切相关的结构，而省略了与本实用新型关系不大的其他细节。Here, it should also be noted that, in order to avoid obscuring the utility model due to unnecessary details, only the structures closely related to the solution according to the utility model are shown in the drawings, and the structures related to the utility model are omitted. Other details that don't really matter.
针对现有的样品表面元素组分分析技术只能对样品表面的分布状态进行检测，而无法达到样品实现元素组份及元素空间分布的全自动测量的问题，在本实用新型中提供一种基于双导管调控器件的全自动X射线荧光光谱仪，能够实现样品元素组份及元素空间分布的全自动测量，机械结构简单，操作便利，测量精度高。Aiming at the problem that the existing sample surface element component analysis technology can only detect the distribution state of the sample surface, but cannot realize the automatic measurement of the element component and element spatial distribution of the sample, the utility model provides a method based on The fully automatic X-ray fluorescence spectrometer with dual-catheter control devices can realize fully automatic measurement of sample element components and element spatial distribution, with simple mechanical structure, convenient operation and high measurement accuracy.
图1和图2分别为基于双导管调控器件的全自动X射线荧光光谱仪的前视图和后视图。如图1所图2所示，该X射线荧光光谱仪包括底板13、X射线光源3(或称X射线管)、用于支撑X射线管的支架(如第一支架1、第二支架2和第三支架4)、会聚透镜夹具5、会聚透镜6、样品安装台(或称样品台)7、样品台位置调节装置8、平行束透镜9、平行束透镜夹具10、探测器11、探测器位置调节装置12、CCD摄像头14和CCD摄像头夹具。底板13为整个光谱仪的基座，第一支架1、第二支架2、第三支架4、样品台位置调节装置8、探测器位置调节装置12、CCD摄像头夹具15分别联接固定在底板13上。X射线光源3通过第一支架1、第二支架2、第三支架4经由卡箍进行固定。会聚透镜6设置在X射线管和样品台之间，通过会聚透镜夹具5与X射线光源相联接，共同构成X射线出射端，即X射线管发出的X射线经会聚透镜6出射到样品台。平行束透镜9设置在样品台7和探测器11之间，通过平行束透镜夹具10与探测器11相联接，共同组成X射线接收端，即来自样品的X射线经平行束透镜9到达探测器11。样品安装台7固定于样品台位置调节装置8上，样品台位置调节装置8通过控制器的设定可以实现对样品安装台7在三维方向(如X轴、Y轴、Z轴三个方向)的精确移动，实现对样品安装台7位置的调节，从而保证X射线出射端光斑与X射线接收端光斑重合形成的三维共聚焦微元精确定位于待测区域，此时探测器探测到的计数最大。探测器11通过螺栓联接固定于探测器位置调节装置12上，通过探测器位置调节装置12可以对探测器11的空间位置在至少三维方向(如X轴、Y轴、Z轴三个方向)进行精确调节。CCD摄像头14通过螺栓与CCD摄像头夹具15相联接，使得CCD摄像头14正好固定于样品安装台7的正下方，用于获取样品图像。Figure 1 and Figure 2 are the front view and rear view respectively of the fully automatic X-ray fluorescence spectrometer based on the dual-catheter control device. As shown in Fig. 2 shown in Fig. 1, this X-ray fluorescence spectrometer comprises base plate 13, X-ray light source 3 (or claims X-ray tube), is used for supporting the support of X-ray tube (as first support 1, second support 2 and The third bracket 4), the converging lens fixture 5, the converging lens 6, the sample mounting platform (or called the sample stage) 7, the sample stage position adjustment device 8, the parallel beam lens 9, the parallel beam lens fixture 10, the detector 11, the detector Position adjustment device 12, CCD camera 14 and CCD camera fixture. The bottom plate 13 is the base of the entire spectrometer, and the first support 1, the second support 2, the third support 4, the sample stage position adjustment device 8, the detector position adjustment device 12, and the CCD camera fixture 15 are respectively connected and fixed on the bottom plate 13. The X-ray light source 3 is fixed by the first bracket 1 , the second bracket 2 and the third bracket 4 via clamps. The converging lens 6 is arranged between the X-ray tube and the sample stage, and is connected with the X-ray light source through the converging lens fixture 5 to jointly form the X-ray exit end, that is, the X-rays emitted by the X-ray tube are emitted to the sample stage through the converging lens 6 . The parallel beam lens 9 is arranged between the sample stage 7 and the detector 11, and is connected with the detector 11 through the parallel beam lens fixture 10 to form an X-ray receiving end together, that is, the X-ray from the sample reaches the detector through the parallel beam lens 9 11. The sample mounting table 7 is fixed on the sample table position adjustment device 8, and the sample table position adjustment device 8 can adjust the sample mounting table 7 in three-dimensional directions (such as the X axis, Y axis, and Z axis) through the setting of the controller. The precise movement of the sample mounting table 7 realizes the adjustment of the position of the sample mounting table 7, so as to ensure that the three-dimensional confocal microelement formed by the coincidence of the X-ray emitting end spot and the X-ray receiving end spot is accurately located in the area to be measured. At this time, the count detected by the detector maximum. The detector 11 is fixed on the detector position adjustment device 12 through bolt connection, and the spatial position of the detector 11 can be adjusted in at least three dimensions (such as the three directions of X axis, Y axis and Z axis) through the detector position adjustment device 12. Fine adjustment. The CCD camera 14 is connected to the CCD camera fixture 15 through bolts, so that the CCD camera 14 is fixed just below the sample mounting table 7 for acquiring sample images.
本实用新型实施例中，会聚透镜6可为包含数万根(如30-40万根)毛细子管的毛细管X光透镜，具有X射线汇聚功能。平行束透镜9可包含数万根(如30-40万根)毛细子管的毛细管X光透镜，可将发散的X射线汇聚成准平行束。In the embodiment of the present invention, the converging lens 6 can be a capillary X-ray lens including tens of thousands (such as 300,000-400,000) capillaries, and has the function of converging X-rays. The parallel beam lens 9 may include a capillary X-ray lens with tens of thousands (such as 300,000-400,000) capillaries, which can converge divergent X-rays into quasi-parallel beams.
作为示例，样品台位置调节装置由3个高精度直线运动滑轨组成，可以实现X轴、Y轴、Z轴三个方向的精确移动。As an example, the sample stage position adjustment device is composed of three high-precision linear motion slide rails, which can realize precise movement in the three directions of X-axis, Y-axis, and Z-axis.
探测器位置调节装置12可以是一个多自由度(如5自由度)精密调整平台，不仅能够在X轴、Y轴、Z轴三个方向上对探测器11位置进行精确调节，还可以控制探测器11绕Y轴和Z轴转动。此外，在本实用新型实施方式中，X射线荧光光谱仪可经由控制器来控制样品台位置调节装置8和探测器位置调节装置12的移动以及探测器11的探测，从而实现X射线荧光光谱仪对样品的全自动测量。The detector position adjustment device 12 can be a multi-degree-of-freedom (such as 5 degrees of freedom) precision adjustment platform, which can not only precisely adjust the position of the detector 11 in the three directions of X-axis, Y-axis, and Z-axis, but also control the detection The device 11 rotates around the Y axis and the Z axis. In addition, in the embodiment of the present utility model, the X-ray fluorescence spectrometer can control the movement of the sample stage position adjustment device 8 and the detector position adjustment device 12 and the detection of the detector 11 through the controller, so that the X-ray fluorescence spectrometer can detect the sample fully automatic measurement.
本实用新型的工作原理为，激发端(即出射端)X射线透镜焦点与探测端(即接收端)X射线透镜焦点重合可形成三维共聚焦结构(共聚焦微元)，当共聚焦结构调节完毕后，两个毛细管X光透镜保持不动，使样品在X-Y-Z轴三个方向进行移动，可获取样品元素的空间分布信息。通过样品在Z轴方向上的移动，可实现深度剖析，获取样品在深度方向上的元素分布、结构信息。通过样品在X-Y或者Y-Z、X-Z平面上移动，可分析样品在水平或者深度剖面的元素分布情况，获取水平或者剖面上的元素相关结构信息。通过样品在X-Y-Z三个维度上的移动，可分析样品的三维空间分布，重构样品中元素的三维空间分布。通过移动X射线出射端光斑与X射线接收端光斑重合形成的三维共聚焦微元从基本无计数的样品外区域到恰好计数开始增大到一定程度的样品表面的扫描方式，寻找样品表面位置，可以实现表面形貌分析。The working principle of the utility model is that the focus of the X-ray lens at the excitation end (ie, the output end) coincides with the focus of the X-ray lens at the detection end (ie, the receiving end) to form a three-dimensional confocal structure (confocal microelement). When the confocal structure is adjusted After the completion, the two capillary X-ray lenses remain still, so that the sample moves in the three directions of the X-Y-Z axis, and the spatial distribution information of the sample elements can be obtained. Through the movement of the sample in the Z-axis direction, depth analysis can be realized, and the element distribution and structure information of the sample in the depth direction can be obtained. By moving the sample on the X-Y or Y-Z, X-Z plane, the element distribution of the sample in the horizontal or depth profile can be analyzed, and the element-related structural information on the horizontal or profile can be obtained. Through the movement of the sample in the three dimensions of X-Y-Z, the three-dimensional spatial distribution of the sample can be analyzed and the three-dimensional spatial distribution of the elements in the sample can be reconstructed. By moving the spot at the X-ray exit end to overlap with the spot at the X-ray receiving end, the three-dimensional confocal micro-elements are scanned from the area outside the sample without counting to a certain extent when the counting starts to increase to a certain extent, to find the position of the sample surface, Surface topography analysis can be realized.
实施例1Example 1
图3所示为本实用新型实施例1中利用全自动X射线荧光光谱仪对样品表面元素组分及含量进行检测的操作示意图。将待测样品16固定于样品安装台7上，样品台位置调节装置8和探测器位置调节装置12使得共聚焦微元的光斑位于待测样品16的表面位置某处。然后通过样品台位置调节装置8上下微调样品16的空间位置，使探测器11的计数率达到最大，以该点作为扫描起始点。如图3所示选取表面待测区域范围a*b，其中a和b分别为X轴和Y轴方向上的测量范围，根据测量要求，设定扫描终点，扫描步长及其它相关参数，完成扫描路径和扫描参数的设定。待完成所有参数设定，即可开始测量过程。此时全自动X射线荧光谱仪可对X轴方向长a，Y轴方向长b的平面区域按规划的路径自动进行逐点扫描测量。图3中示出了在测量过程中通过移动样品台使得光斑从位置17移动到位置18的情形。通过数据采集与处理软件的计算即可获得该平面区域的元素组分及分布情况。Fig. 3 is a schematic diagram of the operation of detecting the element components and contents on the surface of the sample by using a fully automatic X-ray fluorescence spectrometer in Example 1 of the present utility model. The sample 16 to be tested is fixed on the sample mounting platform 7 , the sample stage position adjustment device 8 and the detector position adjustment device 12 make the light spot of the confocal micro-element be located at a certain position on the surface of the sample 16 to be tested. Then, the spatial position of the sample 16 is finely adjusted up and down by the sample stage position adjustment device 8, so that the counting rate of the detector 11 reaches the maximum, and this point is used as the starting point of scanning. As shown in Figure 3, select the range a*b of the area to be measured on the surface, where a and b are the measurement ranges in the X-axis and Y-axis directions respectively. According to the measurement requirements, set the scanning end point, scanning step length and other related parameters to complete Scan path and scan parameter settings. After all parameter settings are completed, the measurement process can begin. At this time, the fully automatic X-ray fluorescence spectrometer can automatically perform point-by-point scanning measurement on the plane area with a length in the X-axis direction and a length in the Y-axis direction according to the planned path. FIG. 3 shows the situation that the light spot moves from position 17 to position 18 by moving the sample stage during the measurement process. The element composition and distribution of the plane area can be obtained through the calculation of the data acquisition and processing software.
实施例2Example 2
图4所示为本实用新型实施例2中利用全自动X射线荧光光谱仪对样品内部某微区空间元素组分及分布进行检测的操作示意图。将待测样品16 固定于样品安装台7上，调节样品台位置调节装置8和探测器位置调节装置12使共聚焦微元的光斑位于待测样品16的表面以内某处，以该点作为扫描起始点。在样品表面以内选取一个尺寸为l*m*n的长方体空间区域，其中l,m和n分别为X轴,Y轴和Z轴方向上的测量范围。根据测量要求，设定扫描终点，扫描步长及其它相关参数，即可完成扫描路径和扫描参数的设定。待完成所有参数设定，即可开始测量过程。此时全自动X射线荧光谱仪可对X轴方向长l，Y轴方向长m，Z轴方向长n的长方体微区按规划的路径自动进行逐点扫描测量。通过数据采集与处理软件的计算即可获得该长方体微区的元素组分及分布情况。Fig. 4 is a schematic diagram of the operation of detecting the composition and distribution of space elements in a certain micro-region inside the sample by using a fully automatic X-ray fluorescence spectrometer in Example 2 of the present utility model. Fix the sample 16 to be measured on the sample mounting platform 7, adjust the sample stage position adjustment device 8 and the detector position adjustment device 12 so that the light spot of the confocal micro-element is located somewhere inside the surface of the sample 16 to be measured, and use this point as the scanning starting point. Select a cuboid space area with a size of l*m*n within the sample surface, where l, m and n are the measurement ranges in the X-axis, Y-axis and Z-axis directions, respectively. According to the measurement requirements, set the scanning end point, scanning step length and other related parameters to complete the setting of the scanning path and scanning parameters. After all parameter settings are completed, the measurement process can begin. At this time, the fully automatic X-ray fluorescence spectrometer can automatically perform point-by-point scanning measurement on the cuboid micro-region with a length of l in the X-axis direction, a length of m in the Y-axis direction, and a length of n in the Z-axis direction according to the planned path. The element composition and distribution of the cuboid micro-region can be obtained through the calculation of the data acquisition and processing software.
本实用新型如上设计的基于双导管调控器件的全自动X射线荧光谱仪不仅可以进行样品表面元素组分及含量分析，还可以无损的深入样品内部进行元素组分及微区元素空间分布分析，而传统的X射线荧光谱仪只能进行样品表面元素组分及含量分析。此外，本实用新型设计的全自动X射线荧光谱仪，操作自动化程度高，配合相应的控制软件可以实现按设定路径扫描及表面自适应扫描等自动化操作。相比于传统的手动或半自动化设备，本实用新型具有更好的操作便利性和测量精度。进一步地，本实用新型机械结构简单、操作方便、可靠性高。The fully automatic X-ray fluorescence spectrometer based on the dual-catheter control device designed above in the utility model can not only analyze the element components and content on the surface of the sample, but also can go deep into the sample without damage to analyze the element components and the spatial distribution of micro-region elements. The traditional X-ray fluorescence spectrometer can only analyze the elemental components and content of the sample surface. In addition, the automatic X-ray fluorescence spectrometer designed by the utility model has a high degree of automation in operation, and can realize automatic operations such as scanning according to the set path and self-adaptive scanning on the surface with the corresponding control software. Compared with traditional manual or semi-automatic equipment, the utility model has better operation convenience and measurement accuracy. Furthermore, the utility model has the advantages of simple mechanical structure, convenient operation and high reliability.
如上针对一个实施例描述和/或示出的特征可以以相同或类似的方式在一个或更多个其它实施例中使用，和/或与其它实施例中的特征相结合或替代其它实施例中的特征使用。Features described and/or illustrated above for one embodiment can be used in the same or similar manner in one or more other embodiments, and/or can be combined with or substituted for features in other embodiments features used.
结合这里披露的本实用新型的说明和实践，本实用新型的其他实施例对于本领域技术人员都是易于想到和理解的。说明和实施例仅被认为是示例性的，本实用新型的真正范围和主旨均由权利要求所限定。Combined with the description and practice of the utility model disclosed here, other embodiments of the utility model will be easily conceived and understood by those skilled in the art. The description and examples are considered exemplary only, with the true scope and spirit of the invention defined by the claims.
Claims (9)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621073180.7U CN206132672U (en) | 2016-09-22 | 2016-09-22 | X -ray fluorescence spectrograph |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621073180.7U CN206132672U (en) | 2016-09-22 | 2016-09-22 | X -ray fluorescence spectrograph |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206132672U true CN206132672U (en) | 2017-04-26 |
Family
ID=58570403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621073180.7U Expired - Fee Related CN206132672U (en) | 2016-09-22 | 2016-09-22 | X -ray fluorescence spectrograph |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206132672U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107389713A (en) * | 2017-06-28 | 2017-11-24 | 苏州浪声科学仪器有限公司 | A kind of x-ray detection system of switching light filter |
| CN108709898A (en) * | 2018-04-23 | 2018-10-26 | 浙江工业大学 | MICRO-BEAM XRF ANALYSIS system based on combination X-ray capillary |
| CN109507220A (en) * | 2018-10-31 | 2019-03-22 | 东华理工大学 | A kind of multiaxis abnormity sample X-ray fluorescence spectra analytical equipment |
| CN109827976A (en) * | 2019-03-14 | 2019-05-31 | 中国科学院上海应用物理研究所 | A kind of optical system of online observation and adjusting X-ray beam and sample |
-
2016
- 2016-09-22 CN CN201621073180.7U patent/CN206132672U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107389713A (en) * | 2017-06-28 | 2017-11-24 | 苏州浪声科学仪器有限公司 | A kind of x-ray detection system of switching light filter |
| CN108709898A (en) * | 2018-04-23 | 2018-10-26 | 浙江工业大学 | MICRO-BEAM XRF ANALYSIS system based on combination X-ray capillary |
| CN109507220A (en) * | 2018-10-31 | 2019-03-22 | 东华理工大学 | A kind of multiaxis abnormity sample X-ray fluorescence spectra analytical equipment |
| CN109507220B (en) * | 2018-10-31 | 2021-07-23 | 东华理工大学 | A device for X-ray fluorescence spectroscopic analysis of multi-axis shaped samples |
| CN109827976A (en) * | 2019-03-14 | 2019-05-31 | 中国科学院上海应用物理研究所 | A kind of optical system of online observation and adjusting X-ray beam and sample |
| CN109827976B (en) * | 2019-03-14 | 2024-01-05 | 中国科学院上海应用物理研究所 | Optical system for on-line observation and adjustment of X-ray beam and sample |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206132672U (en) | X -ray fluorescence spectrograph | |
| CN107339955B (en) | High-precision lens center deviation detection instrument and measurement method thereof | |
| CN104614558B (en) | A kind of, line CCD combine atomic force probe scanning measurement system and measuring method | |
| CN105067568A (en) | Automatic focusing laser-induced breakdown spectroscopy detection system and detection method thereof | |
| KR101808388B1 (en) | Probe apparatus and probe method | |
| CN103454070B (en) | A kind of X-ray combination refractor focusing performance method of testing based on CCD detection | |
| CN110836641B (en) | Method and equipment for detecting three-dimensional size of special-shaped surface microstructure of part | |
| CN109655236A (en) | Sensor is as plane and lens interface faces parallel detection method and device | |
| CN104199082B (en) | X-ray and laser coaxial system | |
| CN103439089B (en) | Automatic calibration device and calibration method for focal plane position of collimator | |
| CN109470698A (en) | Across scale field trash quick analytic instrument device and method based on microphotograph matrix | |
| CN209086170U (en) | A high-reflecting mirror surface defect parameter characterization device | |
| CN112557375A (en) | Inverted laser-induced breakdown spectroscopy device | |
| CN110196245A (en) | A kind of laser induced breakdown spectroscopy detection system | |
| CN101308103B (en) | A micro-beam micro-area X-ray probe analyzer | |
| CN206480587U (en) | A kind of full-automatic SEM | |
| CN211262128U (en) | Detection equipment for three-dimensional size of part special-shaped surface microstructure | |
| CN107870173A (en) | An ellipsoidal glass bulb surface quality detection device and detection method | |
| CN101738164B (en) | Method for demarcating four-quadrant detector in real time | |
| CN111623709A (en) | Image measuring instrument capable of automatically adjusting position of sample to be measured and measuring method | |
| CN110220981A (en) | One kind being used for the microscopical position indicator of ultrasonic scanning | |
| RU120252U1 (en) | X-RAY FLUORESCENT MICROSCOPE | |
| CN110726919B (en) | Array APD photoelectric parameter testing system | |
| CN107917916B (en) | Detection method for detecting ellipsoidal glass shell by using two-degree-of-freedom guide rail | |
| JPH10339710A (en) | X-ray fluorescence analyzer detectable of center of sample |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170426 Termination date: 20170922 |