CN206132672U - X -ray fluorescence spectrograph - Google Patents
X -ray fluorescence spectrograph Download PDFInfo
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- CN206132672U CN206132672U CN201621073180.7U CN201621073180U CN206132672U CN 206132672 U CN206132672 U CN 206132672U CN 201621073180 U CN201621073180 U CN 201621073180U CN 206132672 U CN206132672 U CN 206132672U
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- 238000004876 x-ray fluorescence Methods 0.000 title claims abstract description 36
- 230000033001 locomotion Effects 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 13
- 230000003750 conditioning effect Effects 0.000 abstract 1
- 239000004615 ingredient Substances 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 76
- 238000004458 analytical method Methods 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The utility model provides a X -ray fluorescence spectrograph, it includes: the X -ray tube for send the X ray, the sample platform for place and treat sample detecting, convergent lens sets up between X -ray tube and sample platform, and the X ray that the X -ray tube sent is through convergent lens outgoing to sample platform, the X ray that comes from the sample of sample bench is surveyed to the detector, the parallel beam lens set up between sample platform and detector, and the X ray that comes from the sample reachs the detector through the parallel beam lens, the camera for acquire the sample maps like, sample platform position control device for the position of conditioning sample platform on at least three -dimensional direction, the sample platform is fixed in on the sample platform position control device, detector position control device for adjust the position of detector on at least three -dimensional direction, the detector is fixed in on the detector position control device. The utility model discloses can realize sample element ingredient and element spatial distribution's measurement, mechanical structure is simple, and the operation is convenient, and measurement accuracy is high.
Description
Technical Field
The utility model relates to an X ray application technology field, in particular to X ray fluorescence spectrum appearance.
Background
At present, technologies for analyzing the surface element components of a sample mainly include an X-ray fluorescence analysis technology and an electronic energy spectrum technology, and the technologies can detect the distribution state of the surface elements of the sample but cannot deeply reach the inside of the sample for element analysis. Meanwhile, the traditional X-ray fluorescence analysis technology and the electronic energy spectrum technology cannot accurately position to one point for measurement, so that single-point element component analysis cannot be accurately realized.
Therefore, a technique capable of efficiently performing elemental analysis deep inside a sample is required.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, an object of the utility model is to provide an X-ray fluorescence spectrum appearance based on two pipe regulation and control devices, it can the accurate positioning carry out the full automatic measure in sample element component and element space in the region that awaits measuring.
The technical scheme of the utility model as follows:
an X-ray fluorescence spectrometer based on a dual-conduit modulating device, the spectrometer comprising:
an X-ray tube for emitting X-rays;
the sample table is used for placing a sample to be detected;
the converging lens is arranged between the X-ray tube and the sample stage, and X-rays emitted by the X-ray tube are emitted to the sample stage through the converging lens;
a detector that detects X-rays from a sample on the sample stage;
a parallel beam lens disposed between the sample stage and the detector, through which X-rays from a sample reach the detector;
a camera for acquiring an image of a sample;
the sample stage position adjusting device is used for adjusting the position of a sample stage in at least three-dimensional directions, wherein the sample stage is fixed on the sample stage position adjusting device; and
and the detector position adjusting device is used for adjusting the position of the detector in at least three dimensions, wherein the detector is fixed on the detector position adjusting device.
Preferably, the converging lens is connected with the X-ray tube through a converging lens clamp; the parallel beam lens is connected with the detector through a parallel beam lens clamp.
Preferably, the spectrometer further comprises: a base plate and a support for supporting the X-ray tube; wherein the bracket is fixed on the bottom plate; the sample stage position adjusting device and the detector position adjusting device are fixed on the bottom plate; the camera is connected with the camera clamp, and the camera clamp is fixed on the bottom plate.
Preferably, the stent includes a first stent, a second stent and a third stent.
Preferably, the converging lens comprises tens of thousands of capillary tubes for converging the X-rays emitted by the X-ray tube.
Preferably, the parallel beam lens comprises tens of thousands of capillary tubes for converging diverging X-rays into a quasi-parallel beam.
Preferably, the sample stage position adjusting device comprises three linear motion sliding rails, and the linear motion sliding rails realize the movement in three directions of the preset X, Y, Z axes.
Preferably, the detector position adjusting device is a multi-degree-of-freedom position adjusting platform capable of controlling the detector to move in three directions of a preset X, Y, Z axis.
Preferably, the detector position adjusting device can also control the detector to rotate around the Y axis and the Z axis.
Preferably, the X-ray fluorescence spectrometer further comprises a controller for controlling the movement of the sample stage position adjusting device and the detector position adjusting device and the detection of the detector.
The beneficial effects of the utility model include: (1) the utility model discloses an X ray fluorescence spectrometer based on two pipe regulation and control devices not only can carry out sample surface element component and content analysis, can also be harmless go deep into the inside element component and the analysis of micro-area element spatial distribution of carrying on of sample. (2) The utility model discloses an X ray fluorescence spectrometer, operation degree of automation is high, cooperates corresponding control software can realize according to setting for automation such as route scanning and surface self-adaptation scanning. Compare in traditional manual or semi-automatization equipment, the utility model discloses better operation convenience and measurement accuracy have. (3) The utility model has the advantages of being simple in mechanical structure, convenient operation, reliability height.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not restrictive of the invention, as claimed.
Drawings
Further objects, functions and advantages of the present invention will become apparent from the following description of embodiments of the invention, with reference to the accompanying drawings, in which:
FIG. 1 is a front view of a fully automatic X-ray fluorescence spectrometer based on a dual-catheter regulation device.
FIG. 2 is a rear view of a fully automatic X-ray fluorescence spectrometer based on a double-catheter regulation device.
FIG. 3 is a schematic diagram of the operation of detecting a sample by using a fully automatic X-ray fluorescence spectrometer.
FIG. 4 is an operation diagram of detecting the element composition and spatial content distribution in a micro-area of a sample by using a full-automatic X-ray fluorescence spectrometer.
Detailed Description
Hereinafter, preferred embodiments of the present invention will be described in detail. Examples of these preferred embodiments are illustrated in the accompanying drawings. The embodiments of the present invention shown in the drawings and described according to the drawings are merely exemplary, and the technical spirit of the present invention and its main operation are not limited to these embodiments.
It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the structures closely related to the solution according to the present invention are shown in the drawings, and other details not relevant to the present invention are omitted.
Can only detect the distribution state on sample surface to current sample surface element component analysis technique, and can't reach the full automatic measure's of sample realization element component and element spatial distribution problem the utility model provides a full-automatic X ray fluorescence spectrum appearance based on double-conduit regulation and control device can realize the full automatic measure of sample element component and element spatial distribution, and mechanical structure is simple, and the operation is convenient, and measurement accuracy is high.
Fig. 1 and fig. 2 are a front view and a back view of a fully automatic X-ray fluorescence spectrometer based on a double-catheter regulation device, respectively. As shown in fig. 2 of fig. 1, the X-ray fluorescence spectrometer includes a base plate 13, an X-ray light source 3 (or X-ray tube), a support (e.g., a first support 1, a second support 2, and a third support 4) for supporting the X-ray tube, a focusing lens holder 5, a focusing lens 6, a sample mounting table (or sample table) 7, a sample table position adjusting device 8, a parallel beam lens 9, a parallel beam lens holder 10, a detector 11, a detector position adjusting device 12, a CCD camera 14, and a CCD camera holder. The bottom plate 13 is a base of the whole spectrometer, and the first support 1, the second support 2, the third support 4, the sample stage position adjusting device 8, the detector position adjusting device 12 and the CCD camera clamp 15 are respectively connected and fixed on the bottom plate 13. The X-ray light source 3 is fixed by the first holder 1, the second holder 2, and the third holder 4 via a clip. The converging lens 6 is arranged between the X-ray tube and the sample stage, is connected with the X-ray light source through the converging lens clamp 5, and jointly forms an X-ray emitting end, namely X-rays emitted by the X-ray tube are emitted to the sample stage through the converging lens 6. The parallel beam lens 9 is arranged between the sample stage 7 and the detector 11, and is connected with the detector 11 through the parallel beam lens clamp 10 to jointly form an X-ray receiving end, namely, the X-ray from the sample reaches the detector 11 through the parallel beam lens 9. The sample mounting table 7 is fixed on the sample table position adjusting device 8, the sample table position adjusting device 8 can realize the accurate movement of the sample mounting table 7 in three-dimensional directions (such as X-axis, Y-axis and Z-axis directions) through the setting of the controller, and the adjustment of the position of the sample mounting table 7 is realized, so that the three-dimensional confocal infinitesimal formed by the superposition of X-ray emergent end light spots and X-ray receiving end light spots is accurately positioned in a region to be detected, and the counting detected by the detector is the largest at the moment. The detector 11 is fixed on the detector position adjusting device 12 through bolt connection, and the spatial position of the detector 11 can be accurately adjusted in at least three dimensions (such as three directions of an X axis, a Y axis and a Z axis) through the detector position adjusting device 12. The CCD camera 14 is coupled to the CCD camera holder 15 by a bolt, so that the CCD camera 14 is fixed right under the sample mounting table 7 to acquire a sample image.
In the embodiment of the present invention, the converging lens 6 may be a capillary X-ray lens including tens of thousands (e.g. 30-40 thousands) of capillary tubes, and has an X-ray converging function. The parallel beam lens 9 may comprise tens of thousands (e.g., 30-40 tens of thousands) of capillary X-ray lenses of capillary tubes, which can converge diverging X-rays into a quasi-parallel beam.
As an example, the sample stage position adjusting device consists of 3 high-precision linear motion sliding rails, and can realize precise movement in three directions of an X axis, a Y axis and a Z axis.
The detector position adjusting device 12 may be a multi-degree-of-freedom (e.g., 5-degree-of-freedom) precision adjusting platform, and not only can precisely adjust the position of the detector 11 in the three directions of the X-axis, the Y-axis, and the Z-axis, but also can control the detector 11 to rotate around the Y-axis and the Z-axis. Furthermore, the embodiment of the present invention provides an X-ray fluorescence spectrometer which can control the movement of the sample stage position adjusting device 8 and the detector position adjusting device 12 and the detection of the detector 11 via the controller, thereby realizing the full automatic measurement of the X-ray fluorescence spectrometer on the sample.
The working principle of the utility model is that, the coincidence of laser end (being the outgoing end) X ray lens focus and probe end (being the receiving end) X ray lens focus can form three-dimensional confocal structure (confocal infinitesimal), and when the confocal structure regulation back that finishes, two capillary X ray lens remain motionless, make the sample remove in the three direction of X-Y-Z axle, can acquire the spatial distribution information of sample element. By moving the sample in the Z-axis direction, depth analysis can be realized, and element distribution and structure information of the sample in the depth direction can be obtained. The element distribution of the sample in a horizontal or depth section can be analyzed by moving the sample on an X-Y or Y-Z, X-Z plane, and element-related structural information on the horizontal or the section can be acquired. By moving the sample in three dimensions of X-Y-Z, the three-dimensional spatial distribution of the sample can be analyzed, and the three-dimensional spatial distribution of elements in the sample can be reconstructed. The surface position of the sample is searched by moving a scanning mode of the three-dimensional confocal infinitesimal formed by overlapping the light spot of the X-ray emitting end and the light spot of the X-ray receiving end, wherein the scanning mode is from the region outside the sample without counting basically to the sample surface with counting just and increasing to a certain degree, and the surface topography analysis can be realized.
Example 1
Fig. 3 is a schematic diagram illustrating an operation of detecting the elemental components and the content on the surface of a sample by using a full-automatic X-ray fluorescence spectrometer in embodiment 1 of the present invention. The sample 16 to be measured is fixed on the sample mounting table 7, and the light spot of the confocal micro element is positioned at a certain position on the surface of the sample 16 to be measured by the sample table position adjusting device 8 and the detector position adjusting device 12. The spatial position of the sample 16 is then fine-tuned up and down by the stage position adjustment device 8 to maximize the counting rate of the detector 11, taking this point as the starting point for scanning. As shown in fig. 3, a range a × b of the region to be measured on the surface is selected, where a and b are the measurement ranges in the directions of the X axis and the Y axis, respectively, and the scanning end point, the scanning step length, and other related parameters are set according to the measurement requirements, thereby completing the setting of the scanning path and the scanning parameters. And starting the measurement process after all the parameter settings are finished. At the moment, the full-automatic X-ray fluorescence spectrometer can automatically scan and measure the plane areas with the length a in the X-axis direction and the length b in the Y-axis direction point by point according to the planned path. The situation where the spot is moved from position 17 to position 18 during the measurement by moving the sample stage is shown in fig. 3. The element components and the distribution condition of the plane area can be obtained through the calculation of data acquisition and processing software.
Example 2
Fig. 4 is a schematic diagram illustrating an operation of detecting the spatial element components and distribution in a micro-area of a sample by using a full-automatic X-ray fluorescence spectrometer in embodiment 2 of the present invention. Fixing a sample 16 to be measured on a sample mounting table 7, adjusting a sample table position adjusting device 8 and a detector position adjusting device 12 to enable a light spot of a confocal micro element to be positioned at a certain position within the surface of the sample 16 to be measured, and taking the point as a scanning starting point. A cuboid space area with the size of l m n is selected from the surface of the sample, wherein l, m and n are respectively the measuring ranges in the directions of an X axis, a Y axis and a Z axis. According to the measurement requirement, the scanning end point, the scanning step length and other related parameters are set, and then the scanning path and the scanning parameters can be set. And starting the measurement process after all the parameter settings are finished. At the moment, the full-automatic X-ray fluorescence spectrometer can automatically scan and measure the cuboid micro-area with the length of l in the X-axis direction, the length of m in the Y-axis direction and the length of n in the Z-axis direction point by point according to a planned path. The element components and the distribution condition of the cuboid micro-area can be obtained through the calculation of data acquisition and processing software.
The utility model discloses as above design's full-automatic X ray fluorescence spectrometer based on two pipe regulation and control devices not only can carry out sample surface element component and content analysis, can also be harmless go deep into the inside analysis that carries out element component and micro-area element spatial distribution of sample, and traditional X ray fluorescence spectrometer can only carry out sample surface element component and content analysis. Furthermore, the utility model relates to a full-automatic X ray fluorescence spectrometer, the degree of operation automation is high, and the corresponding control software of cooperation can realize according to automation mechanized operations such as setting for route scanning and surface self-adaptation scanning. Compare in traditional manual or semi-automatization equipment, the utility model discloses better operation convenience and measurement accuracy have. Further, the utility model discloses mechanical structure is simple, convenient operation, reliability are high.
Features that are described and/or illustrated above with respect to one embodiment may be used in the same way or in a similar way in one or more other embodiments and/or in combination with or instead of the features of the other embodiments.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
Claims (9)
1. An X-ray fluorescence spectrometer, comprising:
an X-ray tube for emitting X-rays;
the sample table is used for placing a sample to be detected;
the converging lens is arranged between the X-ray tube and the sample stage, and X-rays emitted by the X-ray tube are emitted to the sample stage through the converging lens;
a detector that detects X-rays from a sample on the sample stage;
a parallel beam lens disposed between the sample stage and the detector, through which X-rays from a sample reach the detector;
a camera for acquiring an image of a sample;
the sample stage position adjusting device is used for adjusting the position of the sample stage in at least three-dimensional directions, wherein the sample stage is fixed on the sample stage position adjusting device; and
and the detector position adjusting device is used for adjusting the position of the detector in at least three dimensions, wherein the detector is fixed on the detector position adjusting device.
2. The X-ray fluorescence spectrometer of claim 1,
the converging lens is connected with the X-ray tube through a converging lens clamp;
the parallel beam lens is connected with the detector through a parallel beam lens clamp.
3. The X-ray fluorescence spectrometer of claim 1, further comprising: a base plate and a support for supporting the X-ray tube;
wherein,
the bracket is fixed on the bottom plate;
the sample stage position adjusting device and the detector position adjusting device are fixed on the bottom plate;
the camera is connected with the camera clamp, and the camera clamp is fixed on the bottom plate.
4. The X-ray fluorescence spectrometer of claim 3, further comprising:
the bracket comprises a first bracket, a second bracket and a third bracket.
5. The X-ray fluorescence spectrometer of claim 1, wherein:
the converging lens comprises tens of thousands of capillary tubes and is used for converging X rays emitted by the X ray tube;
the parallel beam lens includes tens of thousands of capillary tubes for converging diverging X-rays into a quasi-parallel beam.
6. The X-ray fluorescence spectrometer of claim 1, wherein:
the sample stage position adjusting device comprises three linear motion sliding rails and realizes movement in three directions of a preset X, Y, Z axis.
7. The X-ray fluorescence spectrometer of claim 1, wherein:
the detector position adjusting device is a multi-degree-of-freedom position adjusting platform and can control the detector to move in three preset directions of an X, Y, Z shaft.
8. The X-ray fluorescence spectrometer of claim 7, wherein:
the detector position adjusting device can also control the detector to rotate around the Y axis and the Z axis.
9. The X-ray fluorescence spectrometer of claim 1, further comprising:
and the controller is used for controlling the movement of the sample stage position adjusting device and the detector position adjusting device and the detection of the detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621073180.7U CN206132672U (en) | 2016-09-22 | 2016-09-22 | X -ray fluorescence spectrograph |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621073180.7U CN206132672U (en) | 2016-09-22 | 2016-09-22 | X -ray fluorescence spectrograph |
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| CN206132672U true CN206132672U (en) | 2017-04-26 |
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| CN201621073180.7U Expired - Fee Related CN206132672U (en) | 2016-09-22 | 2016-09-22 | X -ray fluorescence spectrograph |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107389713A (en) * | 2017-06-28 | 2017-11-24 | 苏州浪声科学仪器有限公司 | A kind of x-ray detection system of switching light filter |
| CN108709898A (en) * | 2018-04-23 | 2018-10-26 | 浙江工业大学 | MICRO-BEAM XRF ANALYSIS system based on combination X-ray capillary |
| CN109507220A (en) * | 2018-10-31 | 2019-03-22 | 东华理工大学 | A kind of multiaxis abnormity sample X-ray fluorescence spectra analytical equipment |
| CN109827976A (en) * | 2019-03-14 | 2019-05-31 | 中国科学院上海应用物理研究所 | A kind of optical system of online observation and adjusting X-ray beam and sample |
-
2016
- 2016-09-22 CN CN201621073180.7U patent/CN206132672U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107389713A (en) * | 2017-06-28 | 2017-11-24 | 苏州浪声科学仪器有限公司 | A kind of x-ray detection system of switching light filter |
| CN108709898A (en) * | 2018-04-23 | 2018-10-26 | 浙江工业大学 | MICRO-BEAM XRF ANALYSIS system based on combination X-ray capillary |
| CN109507220A (en) * | 2018-10-31 | 2019-03-22 | 东华理工大学 | A kind of multiaxis abnormity sample X-ray fluorescence spectra analytical equipment |
| CN109507220B (en) * | 2018-10-31 | 2021-07-23 | 东华理工大学 | Multi-axis special-shaped sample X-ray fluorescence spectrum analysis device |
| CN109827976A (en) * | 2019-03-14 | 2019-05-31 | 中国科学院上海应用物理研究所 | A kind of optical system of online observation and adjusting X-ray beam and sample |
| CN109827976B (en) * | 2019-03-14 | 2024-01-05 | 中国科学院上海应用物理研究所 | Optical system for on-line observation and adjustment of X-ray beam and sample |
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