CN202712117U

CN202712117U - Specimen holder used for SEM/FIB failure analysis

Info

Publication number: CN202712117U
Application number: CN 201220369559
Authority: CN
Inventors: 史燕萍
Original assignee: Shanghai Huali Microelectronics Corp
Current assignee: Shanghai Huali Microelectronics Corp
Priority date: 2012-07-27
Filing date: 2012-07-27
Publication date: 2013-01-30
Anticipated expiration: 2022-07-27

Abstract

The utility model discloses a specimen holder used for SEM/FIB failure analysis. The specimen holder used for the SEM/FIB failure analysis comprises positioning cylinders, a specimen storage platform and fixing screws. The positioning cylinders are arranged in a bottom portion of the specimen storage platform. An upper surface of the specimen storage platform is provided with at least four specimen grooves. Each specimen groove corresponds to one fixing screw. The fixing screws are respectively inserted into the specimen grooves from a side portion of the sampling storage platform. With the specimen holder used for the SEM/FIB failure analysis, a plurality of specimens can be observed at the same time, and the efficiency of physical property failure analysis is improved; a plurality of copper craftwork specimens can be put into a vacuum chamber as soon as possible to avoid oxidation stain; replacing the specimens for a plurality of times can be avoided, and the vacuity degree is maintained to improve the distinguishability; and the specimen fixing screws are improved to be beautiful and are easy to control the force degrees, and the breaking of the specimens is avoided.

Description

A kind of specimen holder for SEM/ FIB failure analysis

Technical field

The utility model belongs to the failure analysis field of semiconductor chip manufacturing, relates generally to the material property characterization technique of electron microscope, particularly a kind of specimen holder for the SEM/FIB failure analysis.

Background technology

Scanning electron microscopy (Scanning Electron Microscope is hereinafter to be referred as SEM) is that a kind of material that is mainly used in the imaging of material surface morphology observation characterizes technical equipment.Focused ion beam (Focused Ion Beam is hereinafter to be referred as FIB) system utilizes electric lens that ion beam focusing is become very undersized micro-dissections instrument.The operation principle of SEM is with a branch of superfine electron beam scanning sample, inspire secondary electron at sample surfaces, what of secondary electron are relevant with electron beam incident angle, that is to say relevant with the surface texture of sample, secondary electron is collected by detector, and changed into light signal by scintillator there, and change the intensity that the signal of telecommunication is controlled electron beam on the phosphor screen into through photomultiplier and amplifier again, demonstrate the scan image synchronous with electron beam.Specimen holder is mainly used in placing the sample in silicon chip cross section, is convenient to SEM observation.Present existing specimen holder is comprised of metal platform and base two parts.Base is used for being connected and fixed with the equipment sample platform, and the metal platform above the base is used for placing sample.The material that FEI Co. is provided for the former factory specimen holder of cross-sectional sample observation is metal, and structure is divided into two parts, and the above is that a groove is used for the chip placement sample, by a metal screw fixed sample.The bottom is that two cylinders are arranged, and just in time mates and is fixed on the sample stage of SEM, and the cross section chip sample that is observed only has one usually.

Mainly there is following problem in such mode of operation:

The cross-sectional sample that 1, can be observed only has one, and particularly Physical Property Analysis is in great demand in semiconductor failure analysis, does not obviously like this reach desired efficient;

2, along with the improvement of semiconductor technology, process for copper has become leading force, require also just very strict for physical property failure analysis sample preparation, putting into fast SEM for fear of the oxidized needs of sample observes, if can only place a sample at every turn, all the other samples are easy to also just can't analyze again and observe with regard to oxidized, pollution so;

3, the requirement of vacuum values is extremely important for the observation of scanning electron microscopy, and the vacuum state that analysis ability need to rely on is often replaced the vacuum state that sample can affect SEM, the resolution that does not reach;

4, the fixed sample screw diameter on the specimen holder is thick, and the bottom is smooth not, when fixed sample, be easy to sample is caught broken, if so not monocyte sample impaired can not observe put into the SEM chip can contaminated samples groove.

Summary of the invention

Technical problem to be solved in the utility model provides a kind of can observe a plurality of samples, the physical property failure analysis efficient specimen holder that is used for the SEM/FIB failure analysis high and easy to use simultaneously, to overcome the prior art above shortcomings.

The technical scheme of the utility model technical solution problem is as follows:

A kind of specimen holder for the SEM/FIB failure analysis, comprise positioning cylinder, sample lodging bench and fixed screw, shown in positioning cylinder be arranged on sample lodging bench bottom, it is characterized in that, described sample lodging bench upper surface offers at least four sample cells, to fixed screw should be arranged, described fixed screw extend into respectively in each sample cell from sample lodging bench sidepiece each sample cell respectively.

By above disclosed technical scheme as can be known, the utility model is by arranging at least four sample cells, and each sample cell is fixed by different fixed screws, and its beneficial effect is as follows:

1, can observe simultaneously a plurality of samples, improve the efficient of physical property failure analysis;

2, can put into as early as possible vacuum chamber to a plurality of process for copper samples and avoid oxidized pollution;

3, avoid repeatedly replacing sample, keep vacuum values to improve resolution;

4, improve the sample fixed screw attractive in appearance and easily control dynamics, avoid sample to be caught broken.

Description of drawings

Fig. 1 is the utility model facade structures diagram;

Fig. 2 is the utility model front view;

Fig. 3 is the utility model end view;

Fig. 4 is the utility model vertical view;

Fig. 5 is afterwards perspective view of the utility model installing sample

Reference numeral is as follows:

1, positioning cylinder 2, sample lodging bench 3, fixed screw

4, sample cell 5, fixing hole 6, sample

Embodiment

The utility model is described in more detail below in conjunction with accompanying drawing and specific embodiment.

Shown in Fig. 1 ~ 2, the utility model is used for the specimen holder of SEM/FIB failure analysis, comprise positioning cylinder 1, sample lodging bench 2 and fixed screw 3, shown in positioning cylinder 1 be arranged on sample lodging bench 2 bottoms, described sample lodging bench 2 upper surfaces offer at least four sample cells 4, to fixed screw 3 should be arranged, described fixed screw extend into respectively in each sample cell 4 from sample lodging bench 2 sidepieces each sample cell respectively.

Be parallel to each other between the described sample cell 4; Described sample cell 4 is inclined groove, and its angle of inclination is 23 degree-45 degree.Observation requires more because the physical property failure analysis is for pattern, by designing the slightly groove of angle 23 degree-45 degree, the cross section that can see sample can also see simultaneously surface characteristics even can observe and be with angled sidewall pattern, and observation has noresidue to be highly profitable for etch process for this.

As shown in Figure 3, specimen holder whole height H is no more than 16mm, and the vertical depth of sample cell 4 is no more than 7mm.Spacing between the adjacent sample cell is 5mm ~ 6mm.The width of sample cell is 1mm ~ 2mm.

As shown in Figure 5, adopt the utility model to place sample, original sample observation needs 15 minutes, and placing the sample process once needs 10 minutes, and 8 sample observations need 2 hours, and placing back and forth sample needs 80 minutes.But but saved 70 minutes although use the utility model specimen holder to compare the same placement sample time of observing samples time with the original sample seat, well improved operating efficiency.

The above is better embodiment of the present utility model only, is not to limit protection range of the present utility model, and every equal conversion of doing according to the utility model claim is all within protection range of the present utility model.

Claims

1. specimen holder that is used for the SEM/FIB failure analysis, comprise positioning cylinder (1), sample lodging bench (2) and fixed screw (3), shown in positioning cylinder (1) be arranged on sample lodging bench bottom, it is characterized in that, described sample lodging bench (2) upper surface offers at least four sample cells (4), to fixed screw (3) should be arranged, described fixed screw (3) extend into respectively in each sample cell (4) from sample lodging bench (2) sidepiece each sample cell (4) respectively.

2. the specimen holder for the SEM/FIB failure analysis according to claim 1, it is characterized in that: described sample cell is parallel to each other between (4).

3. the specimen holder for the SEM/FIB failure analysis according to claim 1, it is characterized in that: described sample cell (4) is inclined groove, its angle of inclination is 23 degree-45 degree.

4. the specimen holder for the SEM/FIB failure analysis according to claim 1, it is characterized in that: described specimen holder whole height is no more than 16mm, and the vertical depth of sample cell (4) is no more than 7mm.

5. the specimen holder for the SEM/FIB failure analysis according to claim 1, it is characterized in that: described sample lodging bench (2) sidepiece is provided with fixing hole (5), and described fixed screw (3) is embedded into the interior sample (6) to placement in the sample cell (4) of fixing hole (5) and is fixed.

6. the specimen holder for the SEM/FIB failure analysis according to claim 1, it is characterized in that: the spacing between the adjacent sample cell is 5mm ~ 6mm.

7. the specimen holder for the SEM/FIB failure analysis according to claim 1, it is characterized in that: the width of sample cell is 1mm ~ 2mm.