CN202495417U

CN202495417U - Sample holder for scanning electron microscope

Info

Publication number: CN202495417U
Application number: CN2012201382620U
Authority: CN
Inventors: 唐涌耀
Original assignee: Shanghai Huali Microelectronics Corp
Current assignee: Shanghai Huali Microelectronics Corp
Priority date: 2012-03-31
Filing date: 2012-03-31
Publication date: 2012-10-17
Anticipated expiration: 2022-03-31

Abstract

The utility model relates to a sample holder for a scanning electron microscope, and the sample holder belongs to the field of failure analysis in a semiconductor chip manufacturing industry. The sample holder comprises a pedestal, a metal stage arranged at the top part of the pedestal and an elastic clamp arranged on a working surface of the metal stage, wherein a chip sample is placed on the working surface of the metal stage directly, and the elastic clamp is used for pressing the chip sample and fixing the chip sample on the working surface of the metal stage. According to the sample holder for the scanning electron microscope, the application of dual surface conductive adhesive in the prior art is avoided, the electric conductivity is increased, the SEM image quality is improved, the damage in sampling is avoided, and the pollution and the cost are reduced.

Description

Be applied to the specimen holder of scanning electron microscopy

Technical field

The utility model belongs to the failure analysis field of semiconductor chip manufacturing, especially a kind of specimen holder that is applied to scanning electron microscopy.

Background technology

Scanning electron microscopy (Scanning E1ectron Microscope is hereinafter to be referred as SEM) is that a kind of material that is mainly used in the imaging of material surface morphology observation characterizes technical equipment.The operation principle of SEM is with a branch of superfine electron beam scanning sample, inspires secondary electron at sample surfaces, and what of secondary electron are relevant with electron beam incident angle, that is to say relevant with the surface texture of sample.Secondary electron is collected by detector, and is changed into light signal by scintillator there, changes the intensity that the signal of telecommunication is controlled electron beam on the phosphor screen into through photomultiplier and amplifier again, demonstrates the scan image synchronous with electron beam.

The chip sample surface topography is observed and the SEM specimen holder of analysis in commonly used being used in the semicon industry, and material is a metal, and its structure is roughly the same, is made up of metal platform 2 and base 1 two parts, referring to shown in Figure 1.Base 1 is used for being connected with equipment sample platform (Stage) fixing, and the metal platform 2 at base 1 top is used to place chip sample 4.Metal platform 2 shown in Figure 1 is circular platforms, is used to place chip sample, and the circular platform side is fluted, for the ease of arc tweezers gripping specimen holder; Circular platform bottom is a cylinder base, just in time matees and is fixed on the sample stage of SEM.The chip sample of being observed 4 is to be stained with in the specimen holder surface through two-sided conducting resinl 3 (like carbon paste, copper glue, aluminium glue), and is as shown in the figure, thereby makes chip sample 4 and specimen holder and sample stage conducting.

The aforesaid operations mode has following deficiency:

1. two-sided conducting resinl is not a simple metal, is made up of the organic gel of certain ingredients, if paste not tight; The sample conduction is bad; Find the phenomenon that the SEM dynamic image drifts about through regular meeting, figure tilts when causing image taking, influences normal measurement and morphology observation, analysis;

2. in a lot of failure analysis processes, all need carry out surface topography and observe chip.Particularly have under a lot of situation, all must observe the back at SEM sample is handled, and then carry out SEM and observe, so sometimes operation will repeat many times.Because sample is to be bonded on the conducting resinl, conducting resinl has certain viscosity, in the tweezers sampling process, is easy to cause the chip sample of the damage, particularly thinning back side of sample, is easy to fragmentation;

3.SEM be the high vacuum analytical equipment, vacuum level is closely related with analysis ability, conducting resinl contains a large amount of organic principles, in vacuum chamber, volatilizees, and pollutes, and influences vacuum level, finally causes the minimizing of equipment life;

4. the conducting resinl expensive belongs to running stores, and use amount is bigger, can consume a large number of expense;

5. conducting resinl adheres to dust easily, can bring pollution to the vacuum chamber of SEM.

The utility model content

The utility model is not enough to above-mentioned each item, and a kind of improved specimen holder is provided.

The technical scheme that the utility model adopted is: a kind of specimen holder that is applied to scanning electron microscopy; The spring chuck that comprises base, is arranged at the metal platform of base top and is positioned at the working face of metal platform; Chip sample directly is placed on the working face of metal platform, and said spring chuck is pushed down chip sample and chip sample is fixed in the working face of metal platform.

The utlity model has following advantage:

1. in the prior art, owing to chip sample and two-sided conducting resinl are pasted closely and the electric conductivity of conducting resinl self is not that the best causes the SEM image drift; The utility model is because silicon substrate and metal platform surface directly contact, and contact area is big, and conductivity is good, avoided drifting about owing to the scanning electron microscope image that sample and conducting resinl do not have tight stickup to cause, and picture quality is obviously improved.

2. in the prior art, use two-sided conducting resinl when sampling, to cause sample damage and fragmentation easily; The utility model does not use conducting resinl, does not exist this situation to take place.

3.SEM be the high vacuum analytical equipment, vacuum level is closely related with analysis ability, the conducting resinl that prior art is used contains a large amount of organic principles, in vacuum chamber, volatilizees, and pollutes, and influences vacuum level, finally causes the minimizing of equipment life.The utility model does not use conducting resinl, does not exist this situation to take place.

4. in the prior art, on specimen holder, peeling off conducting resinl, to stay glue easily residual, if do not remove, pastes conducting resinl again electric conductivity is descended; The utility model does not use conducting resinl, does not exist this situation to take place, and has practiced thrift cost simultaneously yet.

5. in the prior art, conducting resinl adheres to dust easily, and the vacuum chamber of SEM is brought pollution.The utility model does not use conducting resinl, does not exist this situation to take place.

Description of drawings

The more specifically explanation of the preferred embodiment through the utility model shown in the accompanying drawing, above-mentioned and other purpose, characteristic and the advantage of the utility model will be more clear.Reference numeral identical in whole accompanying drawings is indicated identical part.Painstakingly do not draw accompanying drawing, focus on illustrating the purport of the utility model by actual size equal proportion convergent-divergent.

Fig. 1 is a kind of sketch map that is applied to the specimen holder of scanning electron microscopy in the prior art;

Fig. 2 is the sketch map of the specimen holder that is applied to scanning electron microscopy of the utility model proposition;

Fig. 3 is the front view of the specimen holder of Fig. 2.

Embodiment

Embodiment to the utility model elaborates below in conjunction with accompanying drawing.

Referring to Fig. 2, shown in Figure 3; The specimen holder that is applied to scanning electron microscopy that the utility model proposes comprises: base 1, the spring chuck 5 that is arranged at the metal platform 2 at base 1 top and is positioned at metal platform 2 working faces; Chip sample 4 directly is placed on the working face of metal platform 2, and said spring chuck 5 is pushed down chip sample 4 and chip sample 4 is fixed in the working face of metal platform 2.

The whole sample seat comprises that the material of said base 1, metal platform 2 and spring chuck 5 is metal, plays the favorable conductive effect.Base 1 is the elongated cylinder shape, just in time matees and is fixed on the sample stage of SEM.Metal platform 2 is a circular platform, and the side has groove, for the ease of arc tweezers gripping specimen holder.Consider that spring chuck 5 is higher than the surface of chip sample 4, the routine work distance of SEM is 3-5mm, knocks spring chuck 5 for fear of the electron beam object lens, so this spring chuck 5 height h are no more than 2mm.

The quantity of said spring chuck 5 is 2 or greater than 2; Said spring chuck 5 comprises the joint pin 51 that is arranged on metal platform 2 working faces and is arranged on the shell fragment 52 on the joint pin 51; Said shell fragment 52 is designed to be able to wind the 360 ° of rotations of axial line (like arrow signal rotation direction among Fig. 2) perpendicular to metal platform 2 working faces; Be convenient to multiple spot and multi-faceted fixed sample; Improve degree of fixation, and can fix a plurality of chip samples simultaneously, increase work efficiency.In addition, because the middle part that is all concentrated on sample by the observation figure of most of chip, so clamps point in sample edge, can not destroy and influence by the observation of analyzed area.

Though the utility model with preferred embodiment openly as above; But it is not to be used for limiting claim; Any those skilled in the art are in spirit that does not break away from the utility model and scope; Can make possible change and modification, so the protection range of the utility model should be as the criterion with the scope that claim was defined.

Claims

1. specimen holder that is applied to scanning electron microscopy; Comprise base, be arranged at the metal platform of base top; It is characterized in that; The spring chuck that also comprises the working face that is positioned at metal platform, chip sample directly are placed on the working face of metal platform, and said spring chuck is pushed down chip sample and chip sample is fixed in the working face of metal platform.

2. specimen holder as claimed in claim 1 is characterized in that: the material of whole said specimen holder is metal.

3. specimen holder as claimed in claim 1 is characterized in that: said metal platform is a circular platform, and the side has groove.

4. specimen holder as claimed in claim 1 is characterized in that: the height of said spring chuck is no more than 2mm.

5. specimen holder as claimed in claim 1 is characterized in that: the quantity of said spring chuck is 2 or greater than 2.

6. specimen holder as claimed in claim 1; It is characterized in that: said spring chuck comprises the joint pin that is arranged on the metal platform working face and is arranged on the shell fragment on the joint pin that said shell fragment can wind the 360 ° of rotations of axial line perpendicular to the metal platform working face.