CN202929057U

CN202929057U - Testing pedestal and testing device

Info

Publication number: CN202929057U
Application number: CN 201220646031
Authority: CN
Inventors: 金永斌; 占津晶
Original assignee: SUZHOU RIYUEXIN SEMICONDUCTOR CO Ltd
Current assignee: SUZHOU RIYUEXIN SEMICONDUCTOR CO Ltd
Priority date: 2012-11-29
Filing date: 2012-11-29
Publication date: 2013-05-08
Anticipated expiration: 2022-11-29

Abstract

The utility model provides a testing pedestal and a testing device. The testing pedestal comprises a pedestal body, a testing clamp, and a plurality of testing probes, wherein the testing clamp is detachably arranged upon the pedestal body to fix a to-be-tested object; the testing probes are arranged inside the pedestal body; and when the to-be-tested object is tested, the testing probes are electrically connected with the circuit contact of the to-be-tested object via pin holes of the testing clamp. The testing pedestal can be applied to the testing device. The testing clamp of the utility model can be detached and replaced, thereby being capable of prolonging the service lifetime of the testing pedestal and improving the durability thereof.

Description

Test bench and testing apparatus

Technical field

The utility model relates to a kind of Test bench and testing apparatus, particularly relates to a kind of Test bench and testing apparatus with detachable test fixture.

Background technology

In semiconductor production process, integrated antenna package (IC package) is one of important step of manufacture process, in order to protecting I C chip and to provide outside and be electrically connected, to prevent the destruction of in carrying and getting the process of putting external force or environmental factor.In addition, integrated circuit component also needs to be combined into a system with passive elements such as resistance, electric capacity, the function that competence exertion is set, and Electronic Packaging (Electronic Packaging) is namely be used to the protection of setting up integrated circuit component and organizational structure.Generally speaking, begin to carry out Electronic Packaging after the integrated circuit (IC) chip manufacture process, comprise that cohering of IC chip is fixing, circuit connection, sealing structure, with the engaging of circuit board, system in combination until product all techniques between completing.

Existing packaging and testing equipment all has a goods pressing head device (Pusher), described goods pressing head device is used for chip to be measured to pressing to test bench (Socket), make on chip to be measured circuit junction (Lead or Pad) can with test bench in test probe (Probe Pin) realize being electrically connected.

Yet existing test bench easily causes frictional wear in the test repeatedly of test chip, causes the useful life of test bench to shorten.Because the reusability of test bench is low, therefore its local damage will cause whole test bench to be scrapped, has relatively poor maintainability.

Therefore, be necessary to provide a kind of Test bench, to solve the existing problem of prior art.

The utility model content

A purpose of the present utility model is to provide a kind of Test bench, and described Test bench comprises a base body, a test fixture and a plurality of test probe.Described test fixture is to be removable installed on described base body, and to fix a determinand, wherein said test fixture is provided with a plurality of probe aperture.Described a plurality of test probe is arranged in described base body, and when carrying out the test of described determinand, described test probe is to be electrically connected with the circuit junction of described determinand by described probe aperture.

A purpose of the present utility model is to provide a kind of testing apparatus, and described testing apparatus comprises a goods pressing head device and a Test bench.Described Test bench comprises a base body, a test fixture and a plurality of test probe.Described test fixture is to be removable installed on described base body, and to fix a determinand, wherein said test fixture is provided with a plurality of probe aperture.Described a plurality of test probe is arranged in described base body, and when carrying out the test of described determinand, described test probe is to be electrically connected with the circuit junction of described determinand by described probe aperture.

Compared to the existing problem of existing Test bench, Test bench of the present utility model and testing apparatus can arrange a detachable test fixture, conveniently to safeguard replacing, and do not need whole Test bench is scrapped, thereby improve the maintainability of Test bench and testing apparatus, and can improve serviceable life and the durability of Test bench.Moreover the detachable test fixture of Test bench is provided with ceramic surface of contact, with the contact measured thing.Because ceramic surface of contact can have high-insulativity, high-cleanness, high and good thermal conductivity, thereby measuring stability can be improved, and insulation characterisitic and the heat conductance of Test bench can be improved.

For foregoing of the present utility model can be become apparent, preferred embodiment cited below particularly, and coordinate appended graphicly, be described in detail below:

Description of drawings

Fig. 1 shows the generalized schematic according to the testing apparatus of an embodiment of the present utility model;

Fig. 2 shows the detail exploded view according to the Test bench of an embodiment of the present utility model;

Fig. 3 shows the top view according to the Test bench of an embodiment of the present utility model; And

Fig. 4 shows the lower view according to the Test bench of an embodiment of the present utility model.

Embodiment

Below the explanation of each embodiment be with reference to additional graphic, can be in order to the specific embodiment of implementing in order to illustration the utility model.The direction term that the utility model is mentioned, such as " on ", D score, 'fornt', 'back', " left side ", " right side ", " interior ", " outward ", " side " etc., be only the direction with reference to annexed drawings.Therefore, the direction term of use is in order to explanation and understands the utility model, but not in order to limit the utility model.

In the drawings, the unit of structural similarity is to represent with same numeral.

Please refer to Fig. 1, it shows the generalized schematic according to the testing apparatus of an embodiment of the present utility model.Test bench 100 of the present utility model can be arranged in testing apparatus, is used for fixedly determinand (for example chip or potted element), and wherein testing apparatus can comprise goods pressing head device 101, is used for pressing down the determinand 102 on Test bench 100, to test.Goods pressing head device 101 can comprise goods pressing head 103 and vacuum slot 104, and goods pressing head 103 is be used to pressing down determinand 102 in Test bench 100, and vacuum slot 104 is for drawing determinand 102.Described determinand can be placed on one back and forth in reciprocator (not shown) originally, and described goods pressing head device 101 is movable to draw in described reciprocator back and forth to retract after determinand 102 again and is positioned on Test bench 100, then presses down test.

Please refer to Fig. 1 and Fig. 2, Fig. 2 shows the detail exploded view according to the Test bench of an embodiment of the present utility model.Test bench 100 can comprise base body 110, test fixture 120, a plurality of test probe 130, probe sheath 140, a plurality of retaining element 151,152,153,154 and a plurality of pilot pin 155.Test fixture 120 is to be removable installed on base body 110, is used for fixedly determinand 102.Test probe 130 is to be arranged in base body 110, and can pass test fixture 120.Probe sheath 140 is the bottoms that are arranged at base body 110, is used for taking in test probe 130.Retaining element 151 ~ 154 is for example bolting element, is used for combination base body 110, test fixture 120 and probe sheath 140.

As shown in Figure 2, the material of base body 110 can be rigid plastic, for example engineering plastics.Base body 110 has the recess of holding 111 and a plurality of probe through hole 112, holds recess 111 and is be used to test fixture 120 is set, and probe through hole 112 can be arranged at and hold in recess 111, is used for allowing test probe 130 to pass.Wherein, base body 110 can be fixed on the pedestal (not shown) of testing apparatus by retaining element 151 (as screw).

Please refer to Fig. 1 to Fig. 3, Fig. 3 shows the top view according to the Test bench of an embodiment of the present utility model.Four sidewalls of test fixture 120 can be incorporated into a plurality of threaded holes (indicating) on four inwalls that hold recess 111 of base body 110 by retaining element 152 (as screw), test fixture 120 removably is fixed in holds in recess 111.Test fixture 120 can be provided with ceramic surface of contact 121, a plurality of probe aperture 122 and a plurality of fixed part 123.It is surperficial that pottery surface of contact 121 can be a recess, be used for direct contact measured thing 102, in the present embodiment, test fixture 120 can be come by high rigidity and the stupalith that is electrically insulated one-body molded, thereby forms ceramic surface of contact 121 in the upper surface of test fixture 120.Probe aperture 122 is to be opened on ceramic surface of contact 121, and can corresponding penetrate the probe aperture 122 of test fixture 120 to being positioned at the probe through hole 112 of base body 110, making the test probe 130 that passes probe through hole 112.Fixed part 123 is arranged at around probe aperture 122, be used for fixedly determinand 102, in the present embodiment, test fixture 120 is interior separately has a spring shim (not illustrating) keeping test probe 130 to be positioned at probe aperture 122, and fixed part 123 is namely to be fixed element 153 to fix spring shim in the recess surface (ceramic surface of contact 121) of test fixture 120.

In another embodiment, also can only form a ceramic layer in the upper surface of test fixture 120, to form this ceramic surface of contact 121.

As shown in Figures 1 and 2, test probe 130 can be arranged in base body 110, when carrying out the test of determinand 102, the probe aperture 122 that test probe 130 can pass the probe through hole 112 of base body 110 and test fixture 120 is electrically connected with the circuit junction 102a (for example lead foot or weld pad) of determinand 102, to carry out the testing electrical property of determinand 102.

Please refer to Fig. 2 and Fig. 4, Fig. 4 shows the lower view according to the Test bench of an embodiment of the present utility model.Probe sheath 140 can fix in the bottom of base body 110 by retaining element 154 (as screw); At the same time, 155 of a plurality of pilot pins are in order to a plurality of registration holes (do not illustrate) of exactitude position on probe sheath 140 and base body 110 bottoms, so that probe sheath 140 is assembled in base body 110 bottoms accurately.Probe sheath 140 is provided with a plurality of reception holes 141, and reception hole 141 can be a plurality of blind holes, and it is used for taking in and supporting test probe 130 to being positioned at the probe through hole 112 of base body 110.

When the Test bench 100 that utilizes the present embodiment was tested determinand 102, test fixture 120 was to be combined in the holding in recess 111 of base body 110, and test probe 130 is to be accommodated in base body 110.At this moment, determinand 102 can be placed and be contacted with on the ceramic surface of contact 121 of test fixture 120, and the section 123 that is fixed is fixed.Then, the probe aperture 122 that test probe 130 can corresponding pass test fixture 120 is come the circuit junction 102a of contact measured thing 102, to carry out the testing electrical property of determinand 102.

When the test fixture 120 that contacts with determinand 102 has any damage, can remove the combination of test fixture 120 with the base body 110 of damage, with removing damaged test fixture 120.Then, replaceable one new test fixture 120 is combined on base body 110, thereby completes the maintenance of Test bench 100.

From the above, Test bench of the present utility model can utilize separation design that detachable test fixture is set, so that direct replacement test fixture when test clip has any damage or damage, and do not need whole Test bench is scrapped, thereby improve maintainability, and can improve serviceable life and the durability of Test bench.Moreover the detachable test fixture of Test bench is provided with ceramic surface of contact, with the contact measured thing.Because ceramic surface of contact can have high-insulativity, high-cleanness, high and good thermal conductivity, thereby measuring stability be can improve, and insulation characterisitic and the heat conductance of Test bench improved.In addition, except the test fixture of contact measured thing needs the higher stupalith of use cost, but the base body of contact measured thing lower engineering plastics of use cost not, thereby the also cost of manufacture of relative reduce integrated testability pedestal.

In sum; although the utility model discloses as above with preferred embodiment; but above preferred embodiment is not to limit the utility model; those of ordinary skill in the art; within not breaking away from spirit and scope of the present utility model; all can do various changes and retouching, therefore protection domain of the present utility model is as the criterion with the scope that claim defines.

Claims

1. Test bench, it is characterized in that: described Test bench comprises:

One base body;

One test fixture is removable installed on described base body, and to fix a determinand, wherein said test fixture is provided with a plurality of probe aperture;

A plurality of test probes are arranged in described base body, and described test probe is electrically connected by the circuit junction of described probe aperture and described determinand.

2. Test bench according to claim 1, it is characterized in that: described Test bench also comprises a probe sheath, described probe sheath is arranged at the bottom of described base body, to take in and to support described test probe.

3. Test bench according to claim 1, it is characterized in that: described base body has the recess of holding, so that described test fixture to be set.

4. Test bench according to claim 1, it is characterized in that: described base body has a plurality of probe through holes, and described probe through hole passes to allow described test probe being positioned at the described probe aperture of described test fixture.

5. Test bench according to claim 1, it is characterized in that: described test fixture is provided with a ceramic surface of contact, and described ceramic surface of contact directly contacts described determinand.

6. Test bench according to claim 1, it is characterized in that: described test fixture is provided with a plurality of fixed parts, described fixed part be arranged at described probe aperture around, with fixing described determinand.

7. Test bench according to claim 1, it is characterized in that: a ceramic layer is formed at the upper surface of described test fixture.

8. Test bench according to claim 1, it is characterized in that: described test fixture removably is fixed in described base body by a plurality of retaining elements.

9. testing apparatus, it is characterized in that: described testing apparatus comprises:

One goods pressing head device; And

One Test bench comprises:

One base body;

One test fixture is removable installed on described base body, and with fixing determinand, wherein said test fixture is provided with a plurality of probe aperture;

10. testing apparatus according to claim 9, it is characterized in that: described test fixture is provided with a ceramic surface of contact, and described ceramic surface of contact directly contacts described determinand.