CN111812134B - Detection table for acquiring three-dimensional tissue information of cladding metal and operation method thereof - Google Patents
Detection table for acquiring three-dimensional tissue information of cladding metal and operation method thereof Download PDFInfo
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- CN111812134B CN111812134B CN202010702406.XA CN202010702406A CN111812134B CN 111812134 B CN111812134 B CN 111812134B CN 202010702406 A CN202010702406 A CN 202010702406A CN 111812134 B CN111812134 B CN 111812134B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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Abstract
The invention relates to the field of detection of cladding metal, in particular to a detection table for acquiring three-dimensional tissue information of cladding metal and an operation method thereof. Be provided with a plurality of mounting grooves on the base, be provided with sample platform subassembly on the mounting groove, sample platform subassembly includes the saddle, and the saddle rotates to be connected in the mounting groove, is provided with first pivot on the saddle, installs the sample platform in the first pivot, is provided with the sample groove that is used for placing the sample on the sample platform. Above-mentioned acquire detection platform of cladding metal three-dimensional tissue information, the sample platform is installed on the saddle through first pivot rotation, and when detecting specific sample, the staff makes sample platform and sample rotate as the axle through rotatory sample platform, and then makes the different faces of sample face EBSD probe, is convenient for survey the topography of the different faces of same sample, obtains the topography data of the different positions of same sample, and then improves the degree of accuracy of follow-up cladding metal performance analysis.
Description
Technical Field
The invention relates to the field of EBSD detection of material detection, in particular to sample mounting equipment in an EBSD detector.
Background
EBSD detector, i.e. electron back scattering diffractometer, english name Electron Backscattered Diffraction. When the EBSD detection is carried out, a certain included angle is formed between the plane to be detected and an EBSD probe of the EBSD detector, and the included angle is 20 degrees.
In the prior art, in order to fix the sample, set up sample installation component in the EBSD detector, this sample installation component includes the sample platform, be provided with on the sample platform with the horizontal plane slope 70 inclined planes, set up the mounting groove on the inclined planes, the sample is laid in the mounting groove, when specifically using, wait to survey the plane on the sample, owing to the existence of inclined planes, be 20 inclination with the EBSD probe of perpendicular setting.
The cladding metal is metal with a cladding layer obtained through a laser cladding technology, the cladding layer is weld metal formed by melting filling metal, each position of the cladding metal is complex in structure and different in position structure, the existing sample mounting assembly can only detect the morphology of one plane in a sample, but can not detect the morphology of other planes, namely, only a scanning image of one plane can be obtained, and larger errors are easy to occur when the performance of the cladding metal is analyzed through only one morphology of the sample.
Disclosure of Invention
The invention aims to provide a detection table for acquiring three-dimensional tissue information of cladding metal and an operation method thereof, which aim to solve the problems that: when the cladding metal is detected by the EBSD detector, only a scanning image of one plane can be obtained, and larger errors are easy to occur in the performance analysis of the cladding metal.
The invention provides a detection table for acquiring three-dimensional tissue information of a cladding metal, which comprises a rotating frame and a base, wherein the base is arranged on the rotating frame and is driven to rotate by the rotating frame.
In the invention, a plurality of mounting grooves are formed in the base, a sample table assembly is arranged on the mounting grooves, the sample table assembly comprises a supporting table, the supporting table is arranged in the mounting grooves, a first rotating shaft is arranged on the supporting table, a sample table is arranged on the first rotating shaft, and a sample groove for placing a sample is formed in the sample table.
Preferably, a second rotating shaft is transversely arranged in the mounting groove, and the supporting table is rotationally connected to the second rotating shaft.
Still preferably, a sample groove is arranged at the edge of the upper end of the sample table, and the sample groove is used for storing samples; the sample is in a cuboid shape. After the sample is placed in the sample groove, the top surface and the outer side surface of the sample are exposed, wherein the outer side surface is a surface far away from the first rotating shaft.
Still preferably, the distance from the axis of the second rotating shaft to the plane of the top surface is equal to the distance from the axis of the first rotating shaft to the plane of the outer side surface.
Still preferably, a sample groove is formed in the middle of the sample table, and the sample groove is used for storing samples; the sample is square column-shaped, and the upper end of the sample extends out of the sample groove;
after the sample is placed in the sample groove, the axis of the first rotating shaft passes through the center of the sample, and the top surface of the sample and the upper parts of the side surfaces of the sample are exposed.
Still preferably, the distance from the axis of the second rotating shaft to the plane of the top surface is equal to the distance from the first rotating shaft to the plane of each side surface.
Preferably, an inclined plane is further arranged on the sample stage at the position opposite to the surface to be detected of the sample, the inclined plane forms an included angle of 20 degrees with the first rotating shaft, and when the sample stage rotates for 20 degrees with the second rotating shaft as an axis, the inclined plane is perpendicular to the base.
Compared with the prior art, the detection table for acquiring the three-dimensional tissue information of the cladding metal has the following beneficial effects:
1. according to the detection table for acquiring the three-dimensional tissue information of the cladding metal, on the basis of the prior art, the plurality of mounting grooves are formed in the base, the sample table assemblies for placing samples are respectively arranged on the mounting grooves, the plurality of samples can be placed on the detection table for acquiring the three-dimensional tissue information of the cladding metal, the samples to be detected can be replaced through the rotation of the rotating frame, and compared with the detection table for acquiring the three-dimensional tissue information of the cladding metal in the prior art, only one sample can be placed on the detection table for acquiring the three-dimensional tissue information of the cladding metal, the workload of workers is reduced, and the EBSD detection efficiency is improved.
2. Above-mentioned sample platform subassembly includes saddle and sample platform, and the sample platform passes through first pivot rotation to be installed on the saddle, and when detecting the sample, staff accessible rotatory sample platform makes the sample on sample platform and the sample platform use first pivot as the axle rotation, and then makes the different facing directions EBSD probe of sample, is convenient for survey and knows the topography of the different faces of same sample, obtains the scanning image of the different positions of same sample, and then improves the degree of accuracy of follow-up performance analysis.
The invention also provides an operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal, wherein the detection table for acquiring the three-dimensional tissue information of the cladding metal selects a detection table for acquiring the three-dimensional tissue information of the cladding metal, and a sample groove is arranged at the edge of the upper end of the detection table, and the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal comprises the following steps:
s101: rotating the base through a rotating frame to enable the sample platform to be close to the EBSD probe;
s102: rotating the first rotating shaft to enable the sample on the sample table to be close to the EBSD probe;
s103: rotating the second rotating shaft to enable the tray table and the sample table on the tray table to inwards rotate by 20 degrees;
s104: acquiring a scanning image of the outer side surface through the EBSD probe;
s105: rotating the second rotating shaft to enable the first rotating shaft to be perpendicular to the base;
s106: rotating the first rotating shaft to enable the sample table on the supporting table to rotate 180 degrees;
s107: and rotating the second rotating shaft to enable the tray table and the sample table on the tray table to outwards rotate by 70 degrees.
S108: acquiring a scanning image of the top surface through the EBSD probe;
preferably, after the sample is placed in the sample groove, part of the sample extends outwards out of the sample groove, and the left side surface and the right side surface of the sample are exposed outwards;
the left side surface or the right side surface is detected by the following steps:
the first step: rotating the sample stage through the first rotating shaft, and rotating the base through a rotating frame to enable the left side surface or the right side surface to face the EBSD probe;
and a second step of: rotating the second rotating shaft to enable the tray table and the sample table on the tray table to inwards rotate by 20 degrees;
and a third step of: and acquiring a left side or right side scanning image through the EBSD probe.
Compared with the prior art, the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal has the following beneficial effects:
according to the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal, which is operated by arranging the sample groove at the edge of the upper end of the sample table, is characterized in that for convenience of description, the outer side surface is an m1 surface, the left side surface or the right side surface is an m2 surface, and the top surface is an m3 surface, in the operation method, the sample table rotates on a first rotating shaft through rotation of a rotating frame, and the support table and the sample table rotate on a second rotating shaft to realize multidimensional movement of the sample, so that the m1 surface and the m3 surface of the sample face the EBSD probe respectively, morphology of different surfaces of the same sample is detected and known, morphology data of different positions of the same sample are obtained, and further accuracy of subsequent performance analysis is improved.
In addition, when the distance from the axis of the second rotating shaft to the plane of the top surface is equal to the distance from the axis of the first rotating shaft to the plane of the outer side surface, the distance and the angle between the m1 surface and the m3 surface and the EBSD probe are equal through the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal when the m1 surface and the m3 surface are detected, the EBSD probe is not required to be moved in the detection process, the operation steps are reduced, and the function requirement of the EBSD detector is also reduced.
Finally, in the operation method of the detection table for obtaining the three-dimensional tissue information of the cladding metal, in the operation of the steps, when the first rotating shaft is perpendicular to the base in the moving process of the sample table, the sample is installed in the installation position, and when the support table and the sample table on the support table rotate inwards by 20 degrees or outwards by 180 degrees, the sample is all lying on the sample table, namely the center of gravity of the sample is always positioned on the sample table, the sample is not suspended due to operation reasons, and the sample stability is strong and cannot fall from the detection table for obtaining the three-dimensional tissue information of the cladding metal by the operation method of the detection table for obtaining the three-dimensional tissue information of the cladding metal.
The invention also provides another operation method of a detection table for acquiring three-dimensional tissue information of the cladding metal, wherein the detection table for acquiring the three-dimensional tissue information of the cladding metal selects a detection table for acquiring the three-dimensional tissue information of the cladding metal, and a sample groove is arranged in the middle of the detection table, and the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal comprises the following steps:
s201: rotating the base through a rotating frame to enable the sample platform to be close to the EBSD probe;
s202: rotating the first rotating shaft to enable a first side surface of a sample on the sample platform to be close to the EBSD probe;
s203: rotating the second rotating shaft to enable the tray table and the sample table on the tray table to rotate inwards by 20 degrees;
s204: acquiring a scanning image of a first side of the sample through the EBSD probe;
s205: rotating the second rotating shaft to enable the first rotating shaft to be perpendicular to the base;
s206: rotating the first rotating shaft to enable the sample table on the supporting table to rotate by 90 degrees;
s207: rotating the second rotating shaft to enable the tray table and the sample table on the tray table to inwards rotate by 20 degrees;
s208: acquiring a scanning image of a second side of the sample through the EBSD probe;
s209: repeating the steps S205 to S208, and sequentially acquiring scanning images of the first side surface to the fourth side surface;
s210: and rotating the second rotating shaft to enable the tray table and the sample table on the tray table to outwards rotate by 70 degrees.
S211: and acquiring a scanning image of the top surface through the EBSD probe.
Compared with the prior art, the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal has the following beneficial effects:
according to the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal, the detection table for acquiring the three-dimensional tissue information of the cladding metal is arranged in the middle of the sample table, for convenience in description, the side face of the sample comprises an m1 face and an m2 face, the top face is an m3 face, in the operation method, through rotation of the rotating frame, the rotation of the sample table on the first rotating shaft and the rotation of the supporting table and the sample table on the second rotating shaft are matched, the multidimensional movement of the sample is realized, the m1 face, the m2 face and the m3 face of the sample face respectively face the EBSD probe, the morphologies of different faces of the same sample are detected and obtained, and the morphology data of different positions of the same sample are obtained, so that the accuracy of subsequent performance analysis is improved.
In addition, the sample is positioned in the middle of the sample table, the sample is square, and when the sides such as the m1 surface and the m2 surface are detected, the distance and the angle between the sides such as the m1 surface and the m2 surface and the EBSD probe are equal through the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal, and the detection process does not need to move the EBSD probe, so that the operation steps are reduced, and meanwhile, the function requirement of the EBSD detector is also reduced.
When the distance from the axis of the second rotating shaft to the plane of the top surface is equal to the distance from the axis of the first rotating shaft to the plane of the outer side surface, the operation steps are reduced, and the function requirement of the EBSD detector is reduced by the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal when the side surfaces such as the m1 surface, the m2 surface and the m3 surface are detected, wherein the distance and the angle between each side surface and the m3 surface are equal to those of the EBSD probe, and the EBSD probe is not required to be moved in the detection process.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.
It is evident that the drawings in the following description are only some specific embodiments of the invention and that other drawings may be obtained from the structures shown in these drawings without inventive effort for a person of ordinary skill in the art.
FIG. 1 is a schematic side view of a sample stage assembly according to example 1 or example 3 of the present invention, wherein a first shaft is subjected to perspective treatment.
Fig. 2 is a plan view of the base after the sample stage assembly is mounted in embodiment 1 or embodiment 3 of the present invention, wherein the sample well is a circular through hole provided in the base.
Fig. 3 is a schematic perspective view of a base in embodiment 1 or embodiment 3 of the present invention, wherein the sample groove is a circular through hole disposed on the base.
Fig. 4 is a schematic perspective view of a base according to another embodiment 1 or 3 of the present invention, wherein the sample groove is a semicircular groove provided on the outer periphery of the base.
Fig. 5 is a plan view of the base in embodiment 1 or embodiment 3 of the present invention, wherein the sample well is a semicircular well provided on the outer periphery of the base.
Fig. 6 is a plan view of the base after the sample stage assembly is mounted in example 1 or example 3 of the present invention, in which the sample groove is a semicircular groove provided on the outer periphery of the base.
Fig. 7 is a schematic diagram showing the appearance of the outer side surface of the detected sample in the embodiment 1 and the embodiment 2 of the present invention.
Fig. 8 is a schematic diagram showing the morphology of the left or right side of the sample to be tested in examples 1 and 2 of the present invention.
Fig. 9 is a schematic diagram showing the topography of the top surface of the sample tested in examples 1 and 2 of the present invention.
Fig. 10 is a schematic diagram illustrating movement of the sample stage in step S103 in embodiment 2 of the present invention.
FIG. 11 is a schematic diagram showing the movement of the sample stage in the second step of the embodiment 2.
Fig. 12 is a schematic diagram showing movement of the sample stage in step S107 in embodiment 2 of the present invention.
Wherein, in example 1 and example 3:
1: a sample; 2: a sample stage; 3 a first rotating shaft; 4: a supporting table.
In example 1:
m1: an outer side surface; m2: left side or right side; m3: and a top surface.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention.
All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present invention are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.
Furthermore, descriptions such as those referred to as "first," "second," and the like, are provided for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implying an order of magnitude of the indicated technical features in the present disclosure. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless specifically stated and limited otherwise, the terms "connected," "affixed," and the like are to be construed broadly, and for example, "affixed" may be a fixed connection, a removable connection, or an integral body; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In addition, the technical solutions of the embodiments of the present invention may be combined with each other, but it is necessary to be based on the fact that those skilled in the art can implement the technical solutions, and when the technical solutions are contradictory or cannot be implemented, the combination of the technical solutions should be considered as not existing, and not falling within the scope of protection claimed by the present invention.
Example 1
The embodiment provides a detection table for acquiring three-dimensional tissue information of a cladding metal, which comprises a rotating frame and a base, wherein the base is installed on the rotating frame and is driven to rotate by the rotating frame.
In this embodiment, the base is provided with a plurality of mounting grooves, and the base and the mounting grooves may be, as shown in fig. 2 and 3, a plurality of circular through holes are formed in a disc-shaped base, and the circular through holes are the mounting grooves; as shown in fig. 4 to 6, a plurality of semicircular grooves, which are mounting grooves, may be provided on the outer periphery of the disk-shaped base. Be provided with sample platform subassembly on the mounting groove, compare as the mounting groove with setting up the round through-hole on the base, set up semicircular recess in the periphery of base, the motion of sample platform subassembly on the base of being convenient for more avoids the lateral wall of mounting groove to hinder the multidimensional motion of sample platform subassembly. As shown in fig. 1, the sample stage assembly comprises a supporting stage 4, the supporting stage 4 is installed in the installation groove, a first rotating shaft 3 is arranged on the supporting stage 4, a sample stage 2 is installed on the first rotating shaft 3, and a sample 1 groove for placing a sample 1 is formed in the sample stage 2.
The second rotating shaft is transversely arranged in the mounting groove, and the supporting table 4 is rotationally connected to the second rotating shaft and can rotate by taking the second rotating shaft as a central shaft.
The upper end edge of the sample table 2 is provided with a sample 1 groove, and the sample 1 groove is used for storing a sample 1. The sample 1 has a rectangular parallelepiped shape. After the sample 1 is placed in the sample 1 groove, the top surface and the outer side surface of the sample 1 are exposed, wherein the outer side surface is a surface far from the first rotating shaft 3.
The detection table for acquiring the three-dimensional tissue information of the cladding metal is provided with the first rotating shaft 3, the second rotating shaft and the rotating frame, and the sample table 2 and the sample 1 on the sample table 2 are controlled to move in a multi-dimension manner through the first rotating shaft 3, the second rotating shaft and the rotating frame, so that the EBSD probe can conveniently acquire the scanning images of the upper top surface and the outer side surface of the sample 1.
Above-mentioned acquire detection platform of cladding metal three-dimensional tissue information, the upper end border department of sample platform 2 is provided with sample 1 groove, and sample 1 sets up in sample 1 inslot, and the staff can make specific sample platform subassembly motion to be close to EBSD probe department through the swivel mount, makes the face that sample 1 waits to detect be close to EBSD probe department through first pivot 3, makes sample 1 rotatory through the second pivot, and then makes the face that waits to detect and EBSD probe form the contained angle, and the EBSD detector of being convenient for detects.
The above detecting table for obtaining three-dimensional tissue information of cladding metal, the sample 1 groove is disposed at the upper edge of the sample table 2, after the sample 1 is placed in the sample 1 groove, the top surface and the outer side surface of the sample 1 are exposed, and the staff can make each exposed surface of the sample 1 face the EBSD probe through the above first rotating shaft 3, the second rotating shaft and the rotating frame, so as to obtain the morphology information of multiple surfaces in the sample 1, i.e. obtain the scanning images of multiple surfaces. Compared with the prior art that a detection table for acquiring three-dimensional tissue information of cladding metal can only be used for placing one sample 1, the method has the advantages that the morphology data of different positions of the same sample 1 are obtained, and further the accuracy of subsequent performance analysis is improved.
Specifically, in order to make the distance between each detected surface and the EBSD probe consistent when the sample 1 moves in three dimensions, the detection table for acquiring three-dimensional tissue information of the clad metal further includes the following design in this embodiment: the distance from the axis of the second rotating shaft to the plane of the top surface is equal to the distance from the axis of the first rotating shaft 3 to the plane of the outer side surface.
In the above arrangement, the sample 1 has a cuboid shape, the top surface of the sample 1 is perpendicular to the first rotation axis 3 and parallel to the second rotation axis after the sample 1 is placed in the sample 1 groove, and the outer side surface of the sample 1 is parallel to the first rotation axis 3 and perpendicular to the second rotation axis; in cooperation with the operation method in the following embodiment 2, the distance from the top surface to the EBSD probe is equal to that of the outer side surface EBSD probe during detection, and the EBSD probe does not need to be moved during the operation, so that the operation difficulty and complexity can be reduced.
Specifically, in this embodiment, in order to facilitate controlling the rotation angle, in this embodiment, as shown in fig. 10 to 12, an inclined plane is further provided on the sample stage 2, where the inclined plane is disposed on the opposite side of the groove of the sample 1, the inclined plane forms an included angle of 20 ° with the first rotating shaft 3, when the sample stage 2 rotates 20 ° with the second rotating shaft as the axis, the inclined plane is perpendicular to the base, at this time, the outer side surface of the sample 1 on the groove of the sample 1 forms an included angle of 20 ° with the axis of the second rotating shaft, so that the EBSD probe is convenient to obtain a scanned image of the outer side surface, and the setting of the inclined plane is used as a rotation reference, so that a worker is convenient to confirm the rotation angle. The staff can confirm the perpendicular of inclined plane and base through observing or arbitrary cube, and the lateral surface of sample 1 is 20 inclinations with the EBSD probe this moment, and the setting of above-mentioned inclined plane is convenient for the staff to control the rotation angle of saddle 4 and sample platform 2.
Example 2
The embodiment also provides an operation method of a detection platform for obtaining three-dimensional tissue information of the clad metal, wherein the detection platform for obtaining three-dimensional tissue information of the clad metal in embodiment 1 is selected as the detection platform for obtaining three-dimensional tissue information of the clad metal, and the operation method of the detection platform for obtaining three-dimensional tissue information of the clad metal comprises the following steps:
s101: rotating the base through a rotating frame to enable the sample platform 2 to be close to the EBSD probe;
s102: rotating the first rotating shaft 3 to enable the sample 1 on the sample platform 2 to approach the EBSD probe;
s103: as shown in fig. 10, the second rotating shaft is rotated to rotate the gantry 4 and the sample stage 2 on the gantry 4 inwards by 20 °;
s104: acquiring a scanning image of the outer side surface through the EBSD probe;
s105: rotating the second rotating shaft to enable the first rotating shaft 3 to be perpendicular to the base;
s106: rotating the first rotating shaft 3 to rotate the sample stage 2 on the supporting stage 4 by 180 degrees;
s107: as shown in fig. 12, the second rotation shaft is rotated to rotate the gantry 4 and the sample stage 2 on the gantry 4 outward by 70 °.
S108: and acquiring a scanning image of the top surface through the EBSD probe.
Specifically, after the sample 1 is placed in the sample 1 groove, part of the sample 1 extends outwards out of the sample 1 groove, and the left side surface and the right side surface of the sample 1 are exposed outwards;
the left side surface or the right side surface is detected by the following steps:
the first step: rotating the sample stage 2 through the first rotating shaft 3, and rotating the base through a rotating frame to enable the left side surface or the right side surface to face the EBSD probe;
and a second step of: as shown in fig. 11, the second rotation shaft is rotated to rotate the gantry 4 and the sample stage 2 on the gantry 4 inward by 20 °;
and a third step of: and acquiring a left side or right side scanning image through the EBSD probe.
In the above operation method for obtaining the three-dimensional tissue information of the clad metal, in the above embodiment 1, the operation is that the edge of the upper end of the sample stage 2 is provided with a sample 1 groove, for convenience of description, as shown in fig. 10 to 12, the outer side surface is an m1 surface, the left side surface or the right side surface is an m2 surface, and the top surface is an m3 surface, in the above operation method, by rotation of the rotating frame, rotation of the sample stage 2 on the first rotating shaft 3, rotation of the supporting stage 4 and the sample stage 2 on the second rotating shaft cooperate to realize multidimensional movement of the sample 1, so that the m1 surface and the m3 surface of the sample 1 face the EBSD probe respectively, and the shapes of different surfaces of the same sample 1 are detected and known, so as to obtain scan images of different positions of the same sample 1, and further improve accuracy of subsequent performance analysis.
In addition, when the distance from the axis of the second rotating shaft to the plane of the top surface is equal to the distance from the axis of the first rotating shaft 3 to the plane of the outer side surface, the distance and the angle between the m1 surface and the m3 surface and the EBSD probe are equal by the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal during the detection of the m1 surface and the m3 surface, and the detection process does not need to move the EBSD probe, so that the operation steps are reduced, and the function requirement of the EBSD detector is also reduced.
Finally, in the above-mentioned operation method for obtaining the three-dimensional tissue information of the clad metal, as shown in fig. 10 to 12, in the operation of each step, when the first rotating shaft 3 is perpendicular to the base, the sample 1 is installed in the installation position, and when the support 4 and the sample stage 2 on the support 4 rotate inwards by 20 ° or rotate outwards by 180 °, the sample 1 is all lying on the sample stage 2, i.e. the center of gravity of the sample 1 is always located on the sample stage 2, the sample 1 is not suspended due to operation reasons, and by the above-mentioned operation method for obtaining the three-dimensional tissue information of the clad metal, the sample 1 has strong stability and does not fall from the detection stage for obtaining the three-dimensional tissue information of the clad metal.
Example 3
The embodiment provides a detection table for acquiring three-dimensional tissue information of a cladding metal, which comprises a rotating frame and a base, wherein the base is installed on the rotating frame and is driven to rotate by the rotating frame.
In this embodiment, be provided with a plurality of mounting grooves on the base, be provided with the sample platform subassembly on the mounting groove, the sample platform subassembly includes saddle 4, saddle 4 installs in the mounting groove, be provided with first pivot 3 on the saddle 4, install sample platform 2 on the first pivot 3, be provided with the sample 1 groove that is used for placing sample 1 on the sample platform 2.
The mounting groove is internally and transversely provided with a second rotating shaft, and the supporting table 4 is rotationally connected to the second rotating shaft. A sample 1 groove is formed in the middle of the sample table 2, and the sample 1 groove is used for storing a sample 1; the sample 1 is square column-shaped, and the upper end of the sample 1 extends out of the sample 1 groove; after the sample 1 is placed in the sample 1 groove, the axis of the first rotating shaft 3 passes through the center of the sample 1, and the upper parts of the top surface and each side surface of the sample 1 are exposed.
The detection table for acquiring the three-dimensional tissue information of the cladding metal is provided with a first rotating shaft 3, a second rotating shaft and a rotating frame, and the sample table 2 and the sample 1 are controlled to move in multiple dimensions through the first rotating shaft 3, the second rotating shaft and the rotating frame. Wherein, the middle part of sample platform 2 is provided with sample 1 groove, and sample 1 sets up in sample 1 inslot, and the staff can make specific sample platform subassembly motion to be close to EBSD probe department through the swivel mount, makes the face that sample 1 waits to survey be close to EBSD probe department through first pivot 3, makes to wait to survey the face and forms the contained angle with EBSD probe through the second pivot, is convenient for EBSD detector to survey.
The above detection table for obtaining three-dimensional tissue information of cladding metal, the sample 1 groove is disposed in the middle of the sample table 2, after the sample 1 is placed in the sample 1 groove, the top surface and the upper parts of the sides of the sample 1 are exposed, and the staff can make each exposed surface of the sample 1 face the EBSD probe through the first rotating shaft 3, the second rotating shaft and the rotating frame, so as to obtain the morphology information of a plurality of surfaces of the sample 1. Compared with the prior art that a detection table for acquiring three-dimensional tissue information of cladding metal can only be used for placing one sample 1, the method has the advantages that the morphology data of different positions of the same sample 1 are obtained, and further the accuracy of subsequent performance analysis is improved.
It should be noted that, because the sample 1 is square column, after the sample stage 2 rotates 90 ° around the first rotation axis 3, the relative positions of each surface and the EBSD probe are consistent, that is, when the surface to be detected is replaced by the three-dimensional movement of the sample 1, the EBSD probe does not need to be moved to adjust the position, thereby reducing the complexity of the work.
Specifically, in order to make the distances between each detected surface and the EBSD probe consistent when the sample 1 moves in three dimensions, the above detection table for obtaining three-dimensional tissue information of the clad metal mainly makes the distances between the top surface and each side surface and the EBSD probe consistent, and in this embodiment, the detection table further includes the following designs: the distance from the axis of the second rotating shaft to the plane of the top surface is equal to the distance from the axis of the first rotating shaft 3 to the planes of the side surfaces.
With the above arrangement, in cooperation with the operation method in the following embodiment 4, the distance from the top surface to the EBSD probe is equal to that of the EBSD probes on each side surface during probing, and the EBSD probe does not need to be moved during the above operation, so that the operation difficulty can be reduced.
Specifically, in this embodiment, in order to facilitate control of the rotation angle, in this embodiment, an inclined plane is further disposed on the sample stage 2, where the inclined plane forms an included angle of 20 ° with the first rotation axis 3, and when the sample stage 2 rotates by 20 ° with the second rotation axis as the axis, the inclined plane is perpendicular to the base. It should be noted that in this embodiment, there may be a plurality of inclined planes, each of which is disposed on an opposite side of each side of the sample 1, and when the support 4 and the sample stage 2 are rotated by 20 ° through the second rotation shaft, the inclined planes are perpendicular to the base, and a worker can confirm that the inclined planes are perpendicular through observation or arbitrary cubes, and at this time, the corresponding side of the sample 1 is inclined by 20 ° with the EBSD probe, and the arrangement of the inclined planes facilitates the worker to control the rotation angles of the support 4 and the sample stage 2.
Example 4
The invention also provides an operation method of the detection platform for obtaining the three-dimensional tissue information of the cladding metal, wherein the detection platform for obtaining the three-dimensional tissue information of the cladding metal is selected from the detection platforms for obtaining the three-dimensional tissue information of the cladding metal in the embodiment 3, and the operation method of the detection platform for obtaining the three-dimensional tissue information of the cladding metal comprises the following steps:
s201: rotating the base through a rotating frame to enable the sample platform 2 to be close to the EBSD probe;
s202: rotating the first rotating shaft 3 to enable the first side surface of the sample 1 on the sample platform 2 to be close to the EBSD probe;
s203: rotating the second rotating shaft to enable the tray table 4 and the sample table 2 on the tray table 4 to rotate inwards by 20 degrees;
s204: acquiring a scanning image of the first side of the sample 1 through the EBSD probe;
s205: rotating the second rotating shaft to enable the first rotating shaft 3 to be perpendicular to the base;
s206: rotating the first rotating shaft 3 to rotate the sample stage 2 on the tray stage 4 by 90 degrees;
s207: rotating the second rotating shaft to enable the tray table 4 and the sample table 2 on the tray table 4 to rotate inwards by 20 degrees;
s208: acquiring a scanning image of the second side of the sample 1 through the EBSD probe;
s209: repeating the steps S205 to S208, and sequentially acquiring scanning images of the first side surface to the fourth side surface;
s210: the second rotation shaft is rotated to rotate the gantry 4 and the sample stage 2 on the gantry 4 outwards by 70 °.
S211: and acquiring a scanning image of the top surface through the EBSD probe.
The operation method of the detection table for obtaining the three-dimensional tissue information of the cladding metal is that the detection table for obtaining the three-dimensional tissue information of the cladding metal is operated by arranging the groove of the sample 1 in the middle part of the sample table 2 in the embodiment 3, and for convenience of description, the side surface of the sample 1 comprises an m1 surface and an m2 surface, and the top surface is an m3 surface.
In addition, the sample 1 is located in the middle of the sample stage 2, the sample 1 is square, and when detecting the side surfaces such as the m1 surface, the m2 surface and the like, the distance and the angle between the side surfaces such as the m1 surface, the m2 surface and the like and the EBSD probe are equal by the operation method of the detection stage for acquiring the three-dimensional tissue information of the cladding metal, and the detection process does not need to move the EBSD probe, so that the operation steps are reduced, and meanwhile, the functional requirements of the EBSD detector are also reduced.
When the distance from the axis of the second rotating shaft to the plane of the top surface is equal to the distance from the axis of the first rotating shaft 3 to the plane of the outer side surface, the operation steps are reduced, and the functional requirements of the EBSD detector are reduced by the operation method of the detection table for acquiring the three-dimensional tissue information of the cladding metal when the side surfaces such as the m1 surface, the m2 surface and the m3 surface are detected, and the distances and the angles between the side surfaces and the m3 surface and the EBSD probe are equal.
Fig. 7 to 9 are schematic diagrams of scanned images of the m1 plane, the m2 plane and the m3 plane respectively, as shown in fig. 7 to 9, the morphology of each side of the sample 1 is different due to the processing mode, and more accurate morphology characteristic information of the sample 1 can be obtained through the scanned images of the three planes of the sample 1.
Of course, the above-mentioned embodiments are only preferred embodiments of the present invention, and not limiting the scope of the invention, and all equivalent structural changes made by the description of the present invention and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the invention and should be protected by the present invention.
Claims (3)
1. A detection method for obtaining three-dimensional tissue information of cladding metal is characterized in that,
sampling is completed by the following detection platform: the detection platform comprises a rotating frame and a base, the base is arranged on the rotating frame and driven by the rotating frame to rotate, a plurality of mounting grooves are formed in the base, a sample platform assembly is arranged on the mounting grooves, the sample platform assembly comprises a supporting platform, the supporting platform is arranged in the mounting grooves, a first rotating shaft is arranged on the supporting platform and is perpendicular to the upper surface of the supporting platform and extends upwards, a sample platform is arranged on the first rotating shaft, and a sample groove for placing a sample is formed in the sample platform;
the middle part of the sample table is provided with a sample groove which is used for storing samples; the sample is square column-shaped, and the upper end of the sample extends out of the sample groove;
a second rotating shaft is transversely arranged in the mounting groove, the second rotating shaft is perpendicular to the first rotating shaft, and the supporting table is rotationally connected to the second rotating shaft;
after the sample is placed in the sample groove, the axis of the first rotating shaft passes through the center of the sample, and the top surface of the sample and the upper parts of the side surfaces of the sample are exposed;
the detection table and the sample are set as follows: the distance from the axis of the second rotating shaft to the plane of the top surface of the sample is equal to the distance from the first rotating shaft to the planes of the side surfaces of the sample;
the detection method comprises the following steps:
s201: rotating the base through a rotating frame to enable the sample platform to be close to the EBSD probe;
s202: rotating the first rotating shaft to enable a first side surface of a sample on the sample platform to be close to the EBSD probe;
s203: rotating the second rotating shaft to enable the tray table and the sample table on the tray table to inwards rotate by 20 degrees;
s204: acquiring a scanning image of a first side of the sample through the EBSD probe;
s205: rotating the second rotating shaft to enable the first rotating shaft to be perpendicular to the base;
s206: rotating the first rotating shaft to enable the sample table on the supporting table to rotate by 90 degrees;
s207: rotating the second rotating shaft to enable the tray table and the sample table on the tray table to inwards rotate by 20 degrees;
s208: acquiring a scanning image of a second side of the sample through the EBSD probe;
s209: repeating the steps S205 to S208, and sequentially acquiring scanning images of the first side surface to the fourth side surface;
s210: rotating the second rotating shaft to enable the tray table and the sample table on the tray table to outwards rotate by 70 degrees;
s211: and acquiring a scanning image of the top surface through the EBSD probe.
2. The detection method for acquiring the three-dimensional tissue information of the cladding metal is characterized by comprising the following steps of: the detection platform comprises a rotating frame and a base, the base is mounted on the rotating frame and driven by the rotating frame to rotate, a plurality of mounting grooves are formed in the base, a sample platform assembly is arranged on the mounting grooves, the sample platform assembly comprises a supporting platform, the supporting platform is mounted in the mounting grooves, a first rotating shaft is arranged on the supporting platform and is perpendicular to the upper surface of the supporting platform and extends upwards, a sample platform is mounted on the first rotating shaft, and a sample groove for placing a sample is formed in the sample platform;
a second rotating shaft is transversely arranged in the mounting groove, the second rotating shaft is perpendicular to the first rotating shaft, and the supporting table is rotationally connected to the second rotating shaft;
a sample groove is formed in the edge of the upper end of the sample table, and the sample groove is used for storing samples; the sample is in a cuboid shape;
the detection table and the sample are set as follows: after the sample is placed in the sample groove, the top surface and the outer side surface of the sample are exposed, wherein the outer side surface is a surface far away from the first rotating shaft; the distance from the axis of the second rotating shaft to the plane of the top surface of the sample is equal to the distance from the axis of the first rotating shaft to the plane of the outer side surface of the sample;
the detection method comprises the following steps:
s101: rotating the base through a rotating frame to enable the sample platform to be close to the EBSD probe;
s102: rotating the first rotating shaft to enable the sample on the sample table to be close to the EBSD probe;
s103: rotating the second rotating shaft to enable the supporting table and the sample table on the supporting table to rotate 20 degrees;
s104: acquiring a scanning image of the outer side surface through the EBSD probe;
s105: rotating the second rotating shaft to enable the first rotating shaft to be perpendicular to the base;
s106: rotating the first rotating shaft to enable the sample table on the supporting table to rotate 180 degrees;
s107: rotating the second rotating shaft to enable the tray table and the sample table on the tray table to outwards rotate by 70 degrees;
s108: and acquiring a scanning image of the top surface through the EBSD probe.
3. The method for acquiring three-dimensional structure information of a clad metal according to claim 2, wherein,
the sample bench is provided with an inclined plane at the position opposite to the surface to be detected of the sample, the inclined plane and the first rotating shaft form an included angle of 20 degrees, the sample bench rotates by 20 degrees by taking the second rotating shaft as an axis, and the inclined plane is perpendicular to the base.
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