CN214254340U

CN214254340U - Scanning electron microscope sample stage device

Info

Publication number: CN214254340U
Application number: CN202120508570.7U
Authority: CN
Inventors: 王金凤; 侯翊洁; 刘宇
Original assignee: Henan Normal University
Current assignee: Henan Normal University
Priority date: 2021-03-10
Filing date: 2021-03-10
Publication date: 2021-09-21
Anticipated expiration: 2031-03-10

Abstract

The utility model discloses a scanning electron microscope sample stage device, which comprises an internal load motor control device, a sample stage cantilever, a sample base, a screwing thread, a lifting sample base and a thread column, wherein the lifting sample base is of a ladder structure, the lower part at the left side of the lifting sample base is connected with the motor base in the internal load motor control device, the higher part at the right side of the lifting sample base is provided with a thread hole, the thread hole at the higher part at the right side of the lifting sample base is internally provided with a corresponding thread column which is fixedly connected with the screwing thread, the upper end of the screwing thread is provided with the sample base, the sample base is connected with the sample stage cantilever through an outer ear plate, the screwing-in and screwing-out of the thread column are adjusted through rotating the screwing thread, so as to change the height of the sample stage, and the internal load motor control device drives the sample stage cantilever to rotate, thereby the sample stage not only can change the observation focal length, but also can realize the positioning observation and research of the sample angle end face appearance, providing convenience for people.

Description

Scanning electron microscope sample stage device

Technical Field

The utility model relates to a scanning electron microscope test equipment technical field specifically is a scanning electron microscope sample platform device.

Background

Scanning Electron Microscopes (SEM), i.e., scanning electron microscopes, are widely used in the inspection and research of metallic materials (steel, metallurgy, nonferrous machining) and non-metallic materials (chemistry, chemical engineering, petroleum, geological mineralogy, rubber, textile, cement, glass fiber), etc.; electrons emitted by a scanning electron microscope cathode are accelerated by an anode, an electron beam is formed by focusing, the focused high-energy electron beam bombards the surface of a sample, and a scanning system enables the electron beam to perform raster scanning on the sample and generates signals such as secondary electrons, back-scattered electrons, Auger electrons, x-rays, light (visible light, infrared light or ultraviolet light) and induced potential, current and the like on the sample after the sample is bombarded by the electron beam; collecting the signals by corresponding detectors, amplifying, and scanning on a cathode ray tube in the same scanning way as an electron beam, thus obtaining images of various signals of sample crystals on a fluorescent screen of the cathode ray tube, and observing and analyzing the surface of a sample and the appearance of a fracture; the scanning electron microscope has the characteristics of large focal depth, wide field-of-view adjustment range, strong image stereoscopic impression, high resolution, capability of obtaining information of the structure and physical characteristics of a sample material by collecting the action of an electron beam and a sample and the like, and has more prominent effect on analyzing microelectronic materials and devices by matching with an X-ray energy spectrometer and simultaneously carrying out morphology observation and micro-area component analysis; the scanning electron microscope is an important characterization and analysis means in the field of lithium battery materials, can be used for researching the appearance and components of positive and negative electrode materials, observing the size of the particle size of the materials, the sphericity, the content and distribution of different lithiated compounds and the like, can be used for observing the change of the battery materials after analysis circulation, the change of the battery core materials, the abnormal point problem of the battery core materials and the like, and is widely applied in the field of lithium batteries; however, for some special powder materials, a scanning electron microscope sometimes needs to observe and study some characteristic sections of the material at a specific angle during working, and the conventional sample preparation method of the scanning electron microscope can only observe a single surface of a sample; aiming at the situation, a special scanning electron microscope sample carrying platform with a spiral arm is explored, and the sample can be conveniently positioned and observed in various angles and shapes.

Disclosure of Invention

The to-be-solved technical problem of the utility model is to overcome current defect, drive sample microscope carrier cantilever through interior year motor control device, can effectively solve the problem in the background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a scanning electron microscope sample platform device, including interior year motor control device, sample microscope carrier cantilever, the sample holder, the screw thread of screwing, lift sample holder and screw thread post, lift sample holder is stair structure, lower department in lift sample holder left side is connected with the motor cabinet among the interior year motor control device, the higher department in lift sample holder right side is equipped with the screw hole, and the threaded hole of the higher department in lift sample holder right side is equipped with corresponding screw thread post, screw thread post and the screw thread fixed connection of screwing, the screw thread upper end of screwing is equipped with the sample holder, the sample holder passes through outside otic placode and is connected with sample microscope carrier cantilever.

Further, the internal motor control device comprises a driving motor, the output end of the driving motor is connected with a motor driving wheel through a motor base, and the motor driving wheel is connected with the cantilever driving wheel through an elastic conveying belt.

Furthermore, the sample seat is of a cylindrical structure, and a circular mounting hole is formed in the middle of the sample seat.

Furthermore, the cantilever of the sample carrying platform is of a square column structure, one end of the cantilever of the sample carrying platform is connected with a cantilever driving wheel in the internal load motor control device through a connecting shaft, and the other end of the cantilever of the sample carrying platform is rotatably connected with an ear plate on the sample base through a pin shaft.

Furthermore, the diameter of the outer circle of the screwing thread is consistent with that of the outer circle of the sample seat, and anti-skidding threads are arranged on the outer edge of the screwing thread cylinder.

Furthermore, the lower end of the threaded column is provided with threads corresponding to threaded holes of the lifting sample seat, and the upper end of the threaded column is of a circular structure corresponding to the circular mounting holes in the sample seat.

Compared with the prior art, the beneficial effects of the utility model are that: this scanning electron microscope sample platform device, arrange sample powder material in on sample microscope carrier cantilever, then through the height of screw thread adjustment sample seat and sample microscope carrier cantilever, circular structural connection because of sample seat and screw thread post upper end, when making the screw thread pass through the screw thread adjustment height of lift sample seat with this, sample seat and sample microscope carrier cantilever can not take place the position change, change the focus with this, then drive the adjustment that sample microscope carrier cantilever carried arbitrary angle through the driving motor among the interior year motor controlling means, with this make this sample platform not only can study different focuses to sample powder, and can be to each angle section appearance location observation research of sample, for people provide convenience.

Drawings

FIG. 1 is a schematic structural view of the present invention;

fig. 2 is a schematic view of the top view structure of the present invention.

In the figure: the device comprises a 1 internal load motor control device, a 101 driving motor, a 102 motor base, a 103 motor driving wheel, a 104 elastic conveyor belt, a 105 cantilever driving wheel, a 2 sample stage cantilever, a 3 sample base, a 4 screwing thread, a 5 lifting sample base and a 6 thread column.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-2, the present invention provides a technical solution: a scanning electron microscope sample stage device comprises an internal load motor control device 1, a sample stage cantilever 2, a sample base 3, a screwing thread 4, a lifting sample base 5 and a thread column 6, wherein the lifting sample base 5 is of a ladder structure, the lower part of the left side of the lifting sample base 5 is connected with a motor base 102 in the internal load motor control device 1, the higher part of the right side of the lifting sample base 5 is provided with a thread hole, a corresponding thread column 6 is arranged in the thread hole at the higher part of the right side of the lifting sample base 5, the thread column 6 is fixedly connected with the screwing thread 4, the upper end of the screwing thread 4 is provided with the sample base 3, the sample base 3 is connected with the sample stage cantilever 2 through an outer side ear plate, the internal load motor control device 1 comprises a driving motor 101, the input end of the driving motor 101 is electrically connected with the output end of an external power supply, the output end of the driving motor 101 is connected with a motor driving wheel 103 through the motor base 102, the motor driving wheel 103 is connected with a cantilever driving wheel 105 through an elastic conveying belt 104, the driving motor 101 drives the cantilever driving wheel 105 to rotate through the elastic conveying belt 104, so as to drive the sample carrier cantilever 2 to rotate at any angle, and the positioning observation research on the cross-sectional shape of each angle of a sample can be realized, the sample base 3 is of a cylindrical structure, the middle position of the sample base 3 is provided with a circular mounting hole, the circular mounting hole enables the threaded column 6 not to rotate at all in the rotating process, the sample base 3 does not rotate, the sample carrier cantilever 2 is of a square cylindrical structure, one end of the sample carrier cantilever 2 is connected with the cantilever driving wheel 105 in the inner carrier motor control device 1 through a connecting shaft, the other end of the sample carrier cantilever 2 is rotatably connected with an ear plate on the sample base 3 through a pin shaft, meanwhile, the sample carrier cantilever 2 is provided with a bolt outside the ear plate of the sample base 3 through the pin shaft, the sample carrier cantilever can be periodically cleaned and replaced in the later period, so as to ensure the accuracy of the sample observation research, the diameter of the excircle of the screwing thread 4 is consistent with that of the sample holder 3, the outer edge of the cylinder of the screwing thread 4 is provided with anti-skid threads, the screwing thread 4 is rotated to enable the thread column 4 to screw in or screw out the lifting sample holder 5, so that the heights of the sample holder 3 and the sample carrier cantilever 2 are adjusted, the focal length of observation and study is changed, the sample holder is enabled not to influence the driving motor 101 to rotate the sample carrier cantilever 2 in the lifting state through the elastic conveying belt 104 in the internal load motor control device 1 while the height is adjusted, the lower end of the thread column 6 is provided with threads corresponding to the threaded hole of the lifting sample holder 5, the upper end of the thread column 6 is of a circular structure corresponding to the circular mounting hole on the sample holder 3, so that when the screwing thread 4 adjusts the heights of the sample holder 3 and the sample carrier cantilever 2, the azimuth relationship between the sample holder 3 and the sample on the sample carrier cantilever 2 is not changed, so that the observation and research are more accurate.

When in use: when using, place sample powder material on sample microscope carrier cantilever 2, then drive screw thread post 6 through rotatory screw thread 4 and screw in or screw out in lift sample seat 5, with the height of this adjustment whole sample platform, with this change the focus of observing the research, in the time of height-adjusting, elastic conveyor 104 through interior year motor control device 1, make this sample platform do not influence driving motor 101 and rotate sample microscope carrier cantilever 2 under the state of going up and down, and simultaneously, when the angle that needs the difference is studied and is observed sample powder material, driving motor 101 drives sample microscope carrier cantilever 2 through elastic conveyor 104 and rotates, with this can observe the research to other angles of sample section, for people provide convenience.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a scanning electron microscope sample platform device, includes interior year motor control device (1), sample microscope carrier cantilever (2), sample holder (3), screw thread (4), lift sample holder (5) and screw thread post (6), its characterized in that: lifting sample seat (5) are stair structure, lifting sample seat (5) left side lower department is connected with motor cabinet (102) in interior year motor control device (1), lifting sample seat (5) right side higher department is equipped with the screw hole, and lifting sample seat (5) right side higher department threaded hole in be equipped with corresponding screw thread post (6), screw thread post (6) and screw thread (4) fixed connection, screw thread (4) upper end is equipped with sample seat (3), sample seat (3) are connected with sample microscope carrier cantilever (2) through outside otic placode.

2. A scanning electron microscope sample stage apparatus according to claim 1, characterised in that: the internal motor control device (1) comprises a driving motor (101), the output end of the driving motor (101) is connected with a motor driving wheel (103) through a motor base (102), and the motor driving wheel (103) is connected with a cantilever driving wheel (105) through an elastic conveying belt (104).

3. A scanning electron microscope sample stage apparatus according to claim 1, characterised in that: the sample seat (3) is of a cylindrical structure, and a circular mounting hole is formed in the middle of the sample seat (3).

4. A scanning electron microscope sample stage apparatus according to claim 2, characterised in that: the sample carrying platform cantilever (2) is of a square column structure, one end of the sample carrying platform cantilever (2) is connected with a cantilever driving wheel (105) in the internal load motor control device (1) through a connecting shaft, and the other end of the sample carrying platform cantilever (2) is rotatably connected with an ear plate on the sample base (3) through a pin shaft.

5. A scanning electron microscope sample stage apparatus according to claim 1, characterised in that: the diameter of the outer circle of the screwing thread (4) is consistent with that of the outer circle of the sample seat (3), and anti-skidding threads are arranged on the outer edge of the cylinder of the screwing thread (4).

6. A scanning electron microscope sample stage apparatus according to claim 1, characterised in that: the lower end of the threaded column (6) is provided with threads corresponding to threaded holes of the lifting sample seat (5), and the upper end of the threaded column (6) is of a circular structure corresponding to the circular mounting holes in the sample seat (3).