CN206193030U - Carry on one's shoulder or back electric guiding piece and be used for electron microscope's test platform - Google Patents
Carry on one's shoulder or back electric guiding piece and be used for electron microscope's test platform Download PDFInfo
- Publication number
- CN206193030U CN206193030U CN201621112970.1U CN201621112970U CN206193030U CN 206193030 U CN206193030 U CN 206193030U CN 201621112970 U CN201621112970 U CN 201621112970U CN 206193030 U CN206193030 U CN 206193030U
- Authority
- CN
- China
- Prior art keywords
- sample
- fixture
- spun gold
- guiding piece
- gold portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The utility model discloses a carry on one's shoulder or back electric guiding piece and be used for electron microscope's test platform carries on one's shoulder or back electric guiding piece including being used for the gold wire portion of the electric charge on the surface of removing sample, gold wire portion includes many intervals or the crisscross gold wire that sets up, many be provided with between the gold wire and be used for observing the observation clearance of sample, during the test, will gold wire portion place in the surface of sample, can be directly the electric charge on surface through the removing of gold wire portion sample, convenient operation. It can reuse to carry on one's shoulder or back electric guiding piece, and the commonality is strong, and is with low costs, and to the not influence of surface of sample, observes and can not shelter from the sample through observing the clearance, and the test is convenient.
Description
Technical field
The utility model is related to the technical field of measurement and test of electron microscope, more particularly to a kind of charged guiding piece and for electricity
The microscopical test platform of son.
Background technology
SEM (SEM, abbreviation ESEM) is a set electron optical technology, vacuum technique, fine machine
, in the complication system of one, its major function is micro- to the pattern of solid matter for tool structure and modern computer control technology
Analysis and the micro-zone analysis passed through to conventional ingredient.ESEM is with high resolution, the depth of field is good and simple operation and other advantages are being changed
The fields such as work, material and criminal investigation are widely used.In the surface test to sample, the electron beam of ESEM is not passed through sample,
Only tried one's best with electron beam and focus on a small area of ground side of sample, then scanned samples line by line.Incident electronics causes sample
This surface is inspired secondary electron.Scanning electron microscopic observation is these each point scattering electronics out, is placed on by sample
Scintillation crystal receives these secondary electrons, the electron beam intensity by modulating kinescope after amplification, so as to change kinescope fluorescence
Brightness on screen.When the yield of secondary electron is inconsistent with the emissivity of incident electron, sample surfaces can produce electric charge.For leading
The sample of the relatively good material of electrical property, electric charge can be transferred；The sample such as ceramics, glass, modeling bad for electric conductivity
Expect the sample of material, the electric charge of sample surfaces cannot be shifted, so as to produce electric charging effect.Electric charging effect can cause test pictures to be sent out
The serious distortion of life, it is impossible to draw accurate test result.
In the prior art, in order to eliminate electric charging effect, following several ways can typically be taken：1. in sample surfaces metal spraying,
Allow the electric charge of sample surfaces is derived by gold, and because gold is metal costly, the cost of metal spraying is higher and right
When the nano material or film layer at some nonconductive matrix bottoms are tested, sample sections survey that target is very small, and metal spraying is to sample
Size influence can not be ignored, and sample surfaces details can be blanked.2. the voltage of electron beam is reduced, can be reduced for sample segment
Its electric charging effect, but for some samples, such as sample of solar energy backboard, can be too small due to brightness, definition not enough nothing
Method completes test.3. conductive tape is pasted on sample, by conductive tape transfer charge, but conductive tape need it is artificial along
Sample surfaces are pasted, cumbersome, and conductive tape is often covered and needs the region of test, the test knot that cannot be wanted
Really.
Utility model content
First purpose of the present utility model is to propose a kind of charged guiding piece, can well shift the electricity of sample surfaces
Lotus, highly versatile, convenient test.
It is that, up to this purpose, the utility model uses following technical scheme：
A kind of charged guiding piece, including for carrying-off sample surface electric charge spun gold portion, the spun gold portion include it is many
The spun gold that root is spaced or is staggered, is provided with the observation gap for observing the sample between many spun golds；Test
When, the spun gold portion is positioned over the surface of the sample, with the electric charge on the surface of carrying-off sample.
Wherein, also including fixture, the spun gold portion is arranged on the fixture, and during test, the spun gold portion is by institute
State the surface that fixture is connected to the sample.
Wherein, the spun gold portion is electrically connected with conductor wire, or the fixture is provided with what is electrically connected with the spun gold portion
Conductive part, or the fixture is conductive fixture.
Wherein, the area coverage of the spun gold is the 45%-70% of the area in the spun gold portion.
Wherein, observation panel is offered on the fixture, the spun gold portion is correspondingly arranged in the observation panel.
Wherein, the area of the observation panel is the 20%-80% of the area of the fixture.
Wherein, the fixture is the copper fixture of platy structure, and the fixture is around the position of the observation panel
Conductive region is provided with, the spun gold portion fixes and is electrically connected to the conductive region.
Wherein, the fixture offers fixing hole, and the fixture is fixed on into test platform.
Wherein, the fixture includes fixed mount, and the fixed mount is included for the spun gold portion to be connected into the sample
The fixed net on the surface of product.
Second purpose of the present utility model is to propose a kind of test platform for electron microscope, can be very good to turn
Move the electric charge of sample surfaces, highly versatile, convenient test.
It is that, up to this purpose, the utility model uses following technical scheme：
A kind of test platform for electron microscope, including above-mentioned charged guiding piece and the platform for placing sample
Face.
Beneficial effect：The utility model provides a kind of charged guiding piece and the test platform for electron microscope, lotus
Electric guiding piece includes the spun gold portion of the electric charge on the surface for carrying-off sample, and the spun gold portion includes many intervals or is staggered
Spun gold, the observation gap for observing the sample is provided between many spun golds；During test, the spun gold portion is put
The surface of the sample is placed in, can directly pass through the electric charge on the surface of spun gold portion carrying-off sample, it is easy to operate.Charged guiding piece
Can reuse, highly versatile, low cost, and the surface of sample is not influenceed, observe and will not block by observing gap
Sample, convenient test.
Brief description of the drawings
Fig. 1 is the top view of the charged guiding piece that embodiment of the present utility model 1 is provided.
Fig. 2 is the top view of the table top of the test platform that embodiment of the present utility model 1 is provided.
Fig. 3 is the top view of the charged guiding piece that embodiment of the present utility model 2 is provided.
Wherein：
1- spun golds portion, 11- spun golds, 12- observations gap, 2- fixtures, 211- observation panels, 212- conductive regions, 213- is solid
Determine hole, 22- fixed mounts, 221- fixes net, 3- table tops, 31- screws, 32- contraposition marks.
Specific embodiment
It is that the technical problem for solving the utility model, the technical scheme for using and the technique effect for reaching are clearer,
Further illustrate the technical solution of the utility model below in conjunction with the accompanying drawings and by specific embodiment.
Embodiment 1
A kind of charged guiding piece is present embodiments provided, as shown in figure 1, the electric charge including the surface for carrying-off sample
Spun gold portion 1, spun gold portion 1 includes many intervals or the spun gold 11 being staggered, and is provided with for observing sample between many spun golds 11
The observation gap 12 of product；During test, spun gold portion 1 is positioned over the surface of sample, the electric conductivity of gold is relatively good, can be by sample
The electric charge transfer on surface, so as to eliminate the electric charging effect of sample, it is only necessary to which spun gold portion 11 is placed on into sample surfaces, it is not necessary to
Carefully pasted along sample edge etc., it is easy to operate.The surface of spun gold 11 is less susceptible to be oxidized, and spun gold portion 1 can repeat profit
With, and for the highly versatile of different samples, testing cost reduction, it is not required that to sample surfaces metal spraying, to the surface of sample
Without influence, sample, convenient test will not be also blocked by observing gap observation.The area coverage of spun gold 11 is spun gold portion 1
The 45%-70% of area is proper, the good electric charge of comparing can be reached derived from effect, it is too many to avoid blocking sample again,
Reduce observing effect.
In order to ensure the spun gold 11 in spun gold portion 1 is fully contacted with the surface of sample, charged guiding piece also includes fixture 2,
In test, spun gold portion 1 is arranged on fixture 2, and spun gold portion 1 is connected into sample surfaces by fixture 2.Spun gold portion 1 can
To be directly anchored on fixture 2, it is also possible in non-test, spun gold portion 1 and fixture 2 are in notconnect state, simply exist
During test, the fixture 2 of spun gold portion 1 is pressed in the surface of sample, you can eliminate electric charging effect better.
The fixture 2 of the present embodiment is platy structure, and observation panel 211, the observation panel of fixture 2 are offered on fixture 2
211 are used to observe sample, and spun gold portion 1 is correspondingly arranged in observation panel 211, can be directly fixed on observation panel 211, spun gold portion
1 and fixture 2 fix, it is easy to use compared with separating, it is not necessary to reposition when in use.In actual test, can be with profit
With the own wt of fixture 2, spun gold portion 1 is connected to the surface of sample, fixture 2 can structure be at least partly tabular knot
Structure, platy structure is relatively put down, beneficial to the contact on spun gold portion 1 and the surface of sample.
In order to ensure relatively good observing effect, the area of observation panel 211 should be more than the 20% of the area of fixture 2,
Can be proper scope in 40%-70% below 80%, observing effect can be taken into account.Fixture 2 is electrically conductive material
The fixture 2 that material makes, such as copper fixed plate, the electric charge in spun gold portion 1 is transferred to from sample surfaces, can further pass through copper
Fixed plate is transferred out, and further eliminates electric charging effect.Fixture 2 is provided with conductive region in the position around observation panel 211
212, spun gold portion 1 fixes and is electrically connected to conductive region 212, and preferably with fixture 2 can be connected in spun gold portion 1 by conductive region
Get up, conductive region 212 can be by the mode such as silver-plated so that conductive region 212 is silver layer, strengthens the transfer of electric charge.It is fixed
Part 2 can also be made of the more excellent material of other electric conductivities, and conductive region 212 can also be by other electric conductivity
Material film plating that can be more excellent.Conductive region 212 can account for the 10%-70% of the area of fixture 2, relatively good to obtain
Electric charge transfer effect, this scope of 10%-20% is preferred parameter area.
In addition to spun gold portion 1 being caused using own wt and is preferably connected to sample surfaces, fixture 2 can also be fixed
In test platform, fixing hole 213 can be opened up on fixture 2, accordingly, as shown in Fig. 2 can be in the table top of test platform
On open up corresponding screw 31, screw passes through fixing hole 213, and fixture 2 is fixed on the table top 3 of test platform.By
The corresponding cushion block of the underlay of fixture 2, or the mode such as adjusting nut is set in the upper-lower position of fixture 2, screw can be adjusted
The height of whole fixture 2, to adapt to the sample of different height, it is ensured that the surface contact of spun gold portion 1 and sample is good.Test platform
Table top 2 on be additionally provided with contraposition mark 32, by sample be placed on contraposition mark 32 on after, it is ensured that the position in spun gold portion 1 with
Sample is corresponding.Further, it is also possible to directly the bottom of side plate is pasted onto on table top 3, or open up corresponding on side plate
Fixing hole, fixture 2 is fixed on table top 3.
Fixture 2 can also be made of the poor material of electric conductivity, in order to shift the electric charge in spun gold portion 1, spun gold portion 1
Conductor wire can be electrically connected with, by conductor wire transfer charge, conductor wire can be arranged along fixture 2；Or fixture 2 is set
There is the conductive part electrically connected with spun gold portion 1, now fixture 2 can be partly electrically conductive material, such as spelled by different parts
Connect and form, wherein with the part that spun gold portion 1 contacts by electrically conductive material is made；Or the generally conductive fixture of fixture 2
2, copper fixed plate described above etc..
Embodiment 2
As shown in Fig. 2 as different from Example 1, the fixture 2 of the charged guiding piece that the present embodiment is provided includes fixing
Frame 22, fixed mount 22 includes the fixed net 221 for spun gold portion 1 to be connected to sample surfaces, i.e. the present embodiment is directly by solid
Determine the fixed net 221 on frame 22, spun gold portion 1 is connected to the surface of sample, the electric charge transfer of sample surfaces is walked, eliminate charged
Effect.The mesh of fixed net itself is that can be used to observe sample, it is not necessary to open up peep hole again, easy to use, can also be
Place sample in each position, it is not necessary to which contraposition mark is set on the table top of test platform.
Spun gold portion 1 directly can fix with fixed net 221, it is also possible to simply in test, sample is pressed in by fixed net 221
Surface, in non-test, spun gold portion 1 can also be separated with fixed net 221, it is only necessary to spun gold portion 1 is crushed in test
The surface of sample can have the effect of relatively good elimination electric charging effect.
Fixed mount 22 is additionally provided with the supporting part of supporting and mounting bracket 22, and supporting part is fixed on test platform.Supporting part can be with
It is the lug set along the outside of fixed mount 22, through hole is offered on lug, is fixed through the table top afterwards with testboard for screw,
Supporting part can drive fixed mount 22 to move up and down by screw, the elasticity on the surface of adjustment spun gold portion 1 and sample.Supporting part
Can also be the structures such as support column, directly fixed mount 22 is supported on table top.
Embodiment 3
Present embodiments provide a kind of test platform for electron microscope, including the charged guiding in above-described embodiment
Part and the table top 3 for placing sample.During test, spun gold portion 1 is positioned over the surface of sample, the electric conductivity of gold is relatively good,
Can be by the electric charge transfer of sample surfaces, so as to eliminate the electric charging effect of sample, it is only necessary to which spun gold portion 11 is placed on into sample surfaces
, it is not necessary to carefully pasted along sample edge etc., it is easy to operate.The surface of spun gold 11 is less susceptible to be oxidized, spun gold portion 1
Can reuse, and for the highly versatile of different samples, testing cost reduction, it is not required that right to sample surfaces metal spraying
The surface of sample is not influenceed, and sample, convenient test will not be also blocked by observing gap observation.
Screw can also be set on table top 3, used cooperatively with fixture 2, adjust the height of fixture 2, preferably fix
Spun gold portion 1.
Above content is only preferred embodiment of the present utility model, for one of ordinary skill in the art, according to this reality
With new thought, will change in specific embodiments and applications, this specification content should not be construed as
To limitation of the present utility model.
Claims (10)
1. a kind of charged guiding piece, it is characterised in that the spun gold portion (1) of the electric charge including the surface for carrying-off sample, it is described
Spun gold portion (1) includes many intervals or the spun gold (11) being staggered, and is provided with for observing between many spun golds (11)
The observation gap (12) of the sample；During test, the spun gold portion (1) is positioned over the surface of the sample, with carrying-off sample
Surface electric charge.
2. charged guiding piece as claimed in claim 1, it is characterised in that also including fixture (2), the spun gold portion (1) sets
It is placed on the fixture (2), during test, the spun gold portion (1) is connected to the surface of the sample by the fixture.
3. charged guiding piece as claimed in claim 2, it is characterised in that
The spun gold portion (1) is electrically connected with conductor wire, or
The fixture (2) is provided with the conductive part electrically connected with the spun gold portion (1), or
The fixture (2) is conductive fixture (2).
4. charged guiding piece as claimed in claim 2, it is characterised in that the area coverage of the spun gold (11) is the spun gold
The 45%-70% of the area in portion (1).
5. the charged guiding piece as described in claim any one of 2-4, it is characterised in that offer sight on the fixture (2)
Cha Kou (211), the spun gold portion (1) is correspondingly arranged in the observation panel (211).
6. charged guiding piece as claimed in claim 5, it is characterised in that the area of the observation panel (211) is the fixation
The 20%-80% of the area of part (2).
7. charged guiding piece as claimed in claim 5, it is characterised in that the fixture (2) is fixed for the copper of platy structure
Part, the fixture (2) is provided with conductive region (212), the spun gold portion (1) in the position around the observation panel (211)
Fix and be electrically connected to the conductive region (212).
8. charged guiding piece as claimed in claim 5, it is characterised in that the fixture (2) offers fixing hole (213),
Test platform is fixed on by the fixture (2).
9. the charged guiding piece as described in claim any one of 2-4, it is characterised in that the fixture (2) is including fixed mount
(22), fixed net (221) of the fixed mount (22) including the surface for the spun gold portion (1) to be connected to the sample.
10. a kind of test platform for electron microscope, it is characterised in that including the lotus described in claim any one of 1-9
Electric guiding piece and the table top (3) for placing sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621112970.1U CN206193030U (en) | 2016-10-11 | 2016-10-11 | Carry on one's shoulder or back electric guiding piece and be used for electron microscope's test platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621112970.1U CN206193030U (en) | 2016-10-11 | 2016-10-11 | Carry on one's shoulder or back electric guiding piece and be used for electron microscope's test platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206193030U true CN206193030U (en) | 2017-05-24 |
Family
ID=58729758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621112970.1U Expired - Fee Related CN206193030U (en) | 2016-10-11 | 2016-10-11 | Carry on one's shoulder or back electric guiding piece and be used for electron microscope's test platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206193030U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109580684A (en) * | 2018-12-13 | 2019-04-05 | 广州能源检测研究院 | A kind of battery diaphragm method for making sample for scanning electron microscope detection |
| CN110718534A (en) * | 2019-10-21 | 2020-01-21 | 长江存储科技有限责任公司 | Method for manufacturing positioning mark |
| CN111261479A (en) * | 2018-11-30 | 2020-06-09 | 浙江大学 | Multi-freedom-degree sample rod with static electricity leading-out function |
| CN113945599A (en) * | 2021-10-19 | 2022-01-18 | 北京工业大学 | Method for removing non-conductive sample charge effect in scanning electron microscope |
-
2016
- 2016-10-11 CN CN201621112970.1U patent/CN206193030U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111261479A (en) * | 2018-11-30 | 2020-06-09 | 浙江大学 | Multi-freedom-degree sample rod with static electricity leading-out function |
| CN111261479B (en) * | 2018-11-30 | 2021-10-26 | 浙江大学 | Multi-freedom-degree sample rod with static electricity leading-out function |
| CN109580684A (en) * | 2018-12-13 | 2019-04-05 | 广州能源检测研究院 | A kind of battery diaphragm method for making sample for scanning electron microscope detection |
| CN110718534A (en) * | 2019-10-21 | 2020-01-21 | 长江存储科技有限责任公司 | Method for manufacturing positioning mark |
| CN110718534B (en) * | 2019-10-21 | 2022-10-04 | 长江存储科技有限责任公司 | Method for manufacturing positioning mark |
| CN113945599A (en) * | 2021-10-19 | 2022-01-18 | 北京工业大学 | Method for removing non-conductive sample charge effect in scanning electron microscope |
| CN113945599B (en) * | 2021-10-19 | 2024-03-29 | 北京工业大学 | Method for removing charge effect of non-conductive sample in scanning electron microscope |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206193030U (en) | Carry on one's shoulder or back electric guiding piece and be used for electron microscope's test platform | |
| CN102324365B (en) | Ion source, system and method | |
| Thydén et al. | Microstructural characterization of SOFC Ni–YSZ anode composites by low-voltage scanning electron microscopy | |
| DE112013004703B4 (en) | Sample receiving container, charged particle beam device and image acquisition method | |
| CN105738940B (en) | A kind of detector for beam profile uniformity on-line measurement | |
| CN103649764B (en) | Non-mechanical activation signal measurement apparatus and its signal measurement method | |
| CN102867722B (en) | Device for detecting ion beam profile density distribution and ion beam uniformity distribution in real time | |
| KR101682521B1 (en) | Apparatus for observing specimen, Cover assembly And Method for observing specimen | |
| US4292519A (en) | Device for contact-free potential measurements | |
| CN107481914A (en) | A kind of transmission-type low energy electrons microscopic system | |
| CN109839767A (en) | A kind of array substrate, display panel and display device | |
| CN110361644B (en) | Device and method for detecting electrical property of LED chip | |
| CN104568862B (en) | Cathode-luminescence and electron beam-induced induced current original-position collecting device and method | |
| US10068746B2 (en) | Scanning electron microscope | |
| US4621232A (en) | Inspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structure | |
| CN217521061U (en) | Test structure | |
| CN214254340U (en) | Scanning electron microscope sample stage device | |
| JP2014528154A (en) | Scanning electron microscope and primary electron current measurement method using the same | |
| CN115855930A (en) | Novel method for solar cell photocurrent imaging | |
| Li et al. | A beam profile monitor for picoampere low-energy ion beams | |
| CN104796087B (en) | Photovoltaic cell concentration test device | |
| CN103884690A (en) | One-dimensional nano structure type three-dimensional direction microcell photovoltaic and lighting representing system and method | |
| CN114235869B (en) | High-resolution in-situ X-ray diffraction system based on multi-field coupling and testing method thereof | |
| EP0066087B1 (en) | Inspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structure | |
| TWI790955B (en) | Apparatus for obtaining optical measurements in a charged particle apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170524 Termination date: 20211011 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |