CN205490230U - Grand little compound platform with accurate motion function - Google Patents
Grand little compound platform with accurate motion function Download PDFInfo
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- CN205490230U CN205490230U CN201620063430.2U CN201620063430U CN205490230U CN 205490230 U CN205490230 U CN 205490230U CN 201620063430 U CN201620063430 U CN 201620063430U CN 205490230 U CN205490230 U CN 205490230U
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Abstract
The utility model relates to a grand little compound platform with accurate motion function, including grand platform, micro -displacement, electric putter and the piezoceramics of moving, the outer frame of micro -displacement inlay the dress grand move the platform on, when out of work, the grand geometric centre who moves the platform and micro -displacement's geometric centre is on same the central axis, its characterized in that grandly is equipped with electric putter on moving the platform base, by the grand accurate output of moving the platform and can realizing great displacement of electric putter driven, the outer frame facial make -up of micro -displacement has piezoceramics, can be realized the accurate output of less displacement by piezoceramics driven micro -displacement, move the output requirement that platform and resultant motion by piezoceramics driven micro -displacement had both realized great displacement by the electric putter driven is grand, also guaranteed output precision and output efficiency simultaneously.
Description
Technical field
This utility model relates to a kind of grand micro-compound platform with precise motion function, belongs to the essence in advanced manufacture
Close technical field.
Background technology
Along with the development of science and technology, in the correlational study of present stage precision positioning technology, commonly use by compliant mechanism
Micromotion platform as executor.Though but micromotion platform has the highest positioning precision, but stroke is shorter.Normal conditions
Under, in order to reach enough strokes and higher precision simultaneously, people utilize lever principle design lever amplifying mechanism to improve
The stroke of platform, but such amplification is limited.Therefore, by design is a kind of, there is the grand micro-compound of precise motion function
Platform, macro-moving stage is used for realizing larger displacement output, and micromotion platform is for realizing the accurate output of micrometric displacement, and both are by synthesis
Motion, had both achieved the output requirement of larger displacement, also ensure that output accuracy and delivery efficiency simultaneously.
Summary of the invention:
The purpose of this utility model is to provide a kind of output that can realize larger displacement, also can guarantee that simultaneously output accuracy and
Grand micro-compound platform with precise motion function of delivery efficiency.Its technical scheme is:
A kind of grand micro-compound platform with precise motion function, including macro-moving stage (2), micromotion platform (1) and electricity
Dynamic push rod (11), it is characterised in that: three electric pushrods (11) are arranged on pedestal (10), connect pedestal (10) and macro-moving stage
(2) three side chains are 120 degree and are uniformly distributed, and in every side chain, connecting rod (12) passes through Performance of Right-Angle Flexure Hinge (13) and pedestal
(10) being connected, one end of connecting rod (15) is connected by right circular flexure hinge (14) with connecting rod (12), the other end of connecting rod (15)
Being connected by right circular flexure hinge (16) with macro-moving stage (2), micromotion platform outside framework (3) is inlaid on macro-moving stage (2), grand
The centre of motion of the centre of motion of moving platform (2) and micromotion platform (1) is on same central axis.
In some embodiments, macro-moving stage (2) realizes the defeated of big displacement by the driving effect of electric pushrod (11)
Going out, micromotion platform (1) realizes the accurate of micrometric displacement by the driving effect of piezoelectric ceramics (4) and exports, both simultaneously synthesizing motions,
Both achieve the output requirement of larger displacement, also ensure that output accuracy and delivery efficiency simultaneously.
Its operation principle is: three the electric pushrod driving means being arranged on pedestal are passed through under control of the control system
Apply different active forces and realize the grand dynamic of macro-moving stage, i.e. larger displacement output, be arranged on and the outside framework of micromotion platform one
On three piezoelectric ceramics realize the accurate output of micrometric displacement under control of the control system by applying different active forces, two
The simultaneously synthesizing motion of person, had both achieved the output requirement of larger displacement, also ensure that output accuracy and delivery efficiency simultaneously.
This utility model compared with prior art, has an advantage in that:
The macro-moving stage using the elastomeric material with moderate finite deformation performance to make realizes grand under the driving of electric pushrod
The grand of moving platform moves;The micromotion platform using the metal material with small deformation performance to make realizes under the driving of piezoelectric ceramics
The fine motion of micromotion platform;Macro-moving stage and the simultaneously synthesizing motion of micromotion platform, both achieved the output requirement of larger displacement, simultaneously
Also ensure that output accuracy and delivery efficiency.
Accompanying drawing explanation
Fig. 1 is the micromotion platform front view sketch of this utility model embodiment;
Fig. 2 is partial enlargement sketch at the micromotion platform A of this utility model embodiment;
Fig. 3 is the macro-moving stage front view sketch of this utility model embodiment;
Fig. 4 is partial enlargement sketch at the macro-moving stage B of this utility model embodiment.
In figure: 1, micromotion platform 2, macro-moving stage 3, outside framework 4, piezoelectric ceramics 5, connecting rod 6, right angle flexibility
Hinge 7, right circular flexure hinge 8, connecting rod 9, right circular flexure hinge 10, pedestal 11, electric pushrod 12, connecting rod
13, Performance of Right-Angle Flexure Hinge 14, right circular flexure hinge 15, connecting rod 16, right circular flexure hinge
Detailed description of the invention:
Below in conjunction with drawings and Examples, this utility model is described further.
A kind of grand micro-compound platform with precise motion function, including be made up of the elastomeric material of large deformation performance
With pedestal (10) one macro-moving stage (2) and the metal material by small deformation performance make with outside framework (3) one micro-
Moving platform (1), the described micromotion platform outside framework (3) being made up of metal material is inlaid on macro-moving stage (2), when not working,
The geometric center of the geometric center of macro-moving stage (2) and micromotion platform (1) is on same central axis, it is characterised in that by rubber
The macro-moving stage (2) that glue material is made and pedestal (10) integrated platform, three electric pushrods (11) are arranged on pedestal (10)
On, connect pedestal (10) and be 120 degree with three side chains of macro-moving stage (2) and be uniformly distributed, in every side chain, connecting rod (12) is logical
Crossing Performance of Right-Angle Flexure Hinge (13) to be connected with pedestal (10), one end of connecting rod (15) and connecting rod (12) pass through right circular flexure hinge
(14) connecting, the other end of connecting rod (15) is connected by right circular flexure hinge (16) with macro-moving stage (5), is made up of metal material
Micromotion platform outside framework (3) on three piezoelectric ceramics (4) are installed, connect three of outside framework (3) and micromotion platform (1)
Chain is 120 degree and is uniformly distributed, and in every side chain, connecting rod (5) is connected with outside framework (3) by Performance of Right-Angle Flexure Hinge (6), even
One end of bar (8) is connected by right circular flexure hinge (7) with connecting rod (5), and the other end of connecting rod (8) passes through with micromotion platform (1)
Right circular flexure hinge (9) connects.
Macro-moving stage (2) is all retrained by three mutually isostructural side chains with micromotion platform (1), and macro-moving stage is capable of
Translation on x in plane, y two is orthogonal, micromotion platform be capable of x, y two in plane orthogonal on translation and
Around the rotation of z-axis, owing to using identical kinematic chain, two platforms are respectively provided with good isotropism.
Three electric pushrod (11) driving means being contained on pedestal are different by applying under control of the control system
Active force realizes macro-moving stage (2) larger displacement output, is arranged on and three pressures on the outside framework (3) of micromotion platform (1) one
Electroceramics (4) realizes the accurate output of micrometric displacement under control of the control system by applying different active forces, and both are simultaneously
Resultant motion, had both achieved the output requirement of larger displacement, also ensure that output accuracy and delivery efficiency simultaneously.
Claims (2)
1. there is a grand micro-compound platform for precise motion function, including macro-moving stage (2), micromotion platform (1) and electronic
Push rod (11), it is characterised in that three electric pushrods (11) are arranged on pedestal (10), connects pedestal (10) and macro-moving stage
(2) three side chains are 120 degree and are uniformly distributed, and in every side chain, connecting rod (12) passes through Performance of Right-Angle Flexure Hinge (13) and pedestal
(10) being connected, one end of connecting rod (15) is connected by right circular flexure hinge (14) with connecting rod (12), the other end of connecting rod (15)
Being connected by right circular flexure hinge (16) with macro-moving stage (2), micromotion platform outside framework (3) is inlaid on macro-moving stage (2).
A kind of grand micro-compound platform with precise motion function the most according to claim 1, it is characterised in that grand dynamic
The centre of motion of the centre of motion of platform (2) and micromotion platform (1) is on same central axis.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201620063430.2U CN205490230U (en) | 2016-01-23 | 2016-01-23 | Grand little compound platform with accurate motion function |
Applications Claiming Priority (1)
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CN201620063430.2U CN205490230U (en) | 2016-01-23 | 2016-01-23 | Grand little compound platform with accurate motion function |
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CN205490230U true CN205490230U (en) | 2016-08-17 |
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CN201620063430.2U Expired - Fee Related CN205490230U (en) | 2016-01-23 | 2016-01-23 | Grand little compound platform with accurate motion function |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107171591A (en) * | 2017-06-06 | 2017-09-15 | 西安交通大学 | A kind of planar three freedom inching gear based on herringbone structure |
CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
CN109347364A (en) * | 2018-12-21 | 2019-02-15 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | A kind of across scale precisely locating platform of macro and micro servo |
CN109491078A (en) * | 2019-01-07 | 2019-03-19 | 南京理工大学 | A kind of high-precision micro scanning device |
CN110370229A (en) * | 2019-07-12 | 2019-10-25 | 佛山科学技术学院 | Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism |
CN112865592A (en) * | 2020-12-31 | 2021-05-28 | 天津理工大学 | Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof |
-
2016
- 2016-01-23 CN CN201620063430.2U patent/CN205490230U/en not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107171591A (en) * | 2017-06-06 | 2017-09-15 | 西安交通大学 | A kind of planar three freedom inching gear based on herringbone structure |
CN107171591B (en) * | 2017-06-06 | 2018-11-09 | 西安交通大学 | A kind of fine motion method of the planar three freedom inching gear based on herringbone structure |
CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
CN109347364A (en) * | 2018-12-21 | 2019-02-15 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | A kind of across scale precisely locating platform of macro and micro servo |
CN109491078A (en) * | 2019-01-07 | 2019-03-19 | 南京理工大学 | A kind of high-precision micro scanning device |
CN110370229A (en) * | 2019-07-12 | 2019-10-25 | 佛山科学技术学院 | Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism |
CN112865592A (en) * | 2020-12-31 | 2021-05-28 | 天津理工大学 | Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof |
CN112865592B (en) * | 2020-12-31 | 2022-06-24 | 天津理工大学 | Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160817 Termination date: 20170123 |
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CF01 | Termination of patent right due to non-payment of annual fee |