CN205490230U - Grand little compound platform with accurate motion function - Google Patents

Grand little compound platform with accurate motion function Download PDF

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Publication number
CN205490230U
CN205490230U CN201620063430.2U CN201620063430U CN205490230U CN 205490230 U CN205490230 U CN 205490230U CN 201620063430 U CN201620063430 U CN 201620063430U CN 205490230 U CN205490230 U CN 205490230U
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China
Prior art keywords
platform
displacement
grand
micro
macro
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Expired - Fee Related
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CN201620063430.2U
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Chinese (zh)
Inventor
马少博
贺磊
刘天柱
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Shandong University of Technology
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Shandong University of Technology
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Priority to CN201620063430.2U priority Critical patent/CN205490230U/en
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Expired - Fee Related legal-status Critical Current
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Abstract

The utility model relates to a grand little compound platform with accurate motion function, including grand platform, micro -displacement, electric putter and the piezoceramics of moving, the outer frame of micro -displacement inlay the dress grand move the platform on, when out of work, the grand geometric centre who moves the platform and micro -displacement's geometric centre is on same the central axis, its characterized in that grandly is equipped with electric putter on moving the platform base, by the grand accurate output of moving the platform and can realizing great displacement of electric putter driven, the outer frame facial make -up of micro -displacement has piezoceramics, can be realized the accurate output of less displacement by piezoceramics driven micro -displacement, move the output requirement that platform and resultant motion by piezoceramics driven micro -displacement had both realized great displacement by the electric putter driven is grand, also guaranteed output precision and output efficiency simultaneously.

Description

A kind of grand micro-compound platform with precise motion function
Technical field
This utility model relates to a kind of grand micro-compound platform with precise motion function, belongs to the essence in advanced manufacture Close technical field.
Background technology
Along with the development of science and technology, in the correlational study of present stage precision positioning technology, commonly use by compliant mechanism Micromotion platform as executor.Though but micromotion platform has the highest positioning precision, but stroke is shorter.Normal conditions Under, in order to reach enough strokes and higher precision simultaneously, people utilize lever principle design lever amplifying mechanism to improve The stroke of platform, but such amplification is limited.Therefore, by design is a kind of, there is the grand micro-compound of precise motion function Platform, macro-moving stage is used for realizing larger displacement output, and micromotion platform is for realizing the accurate output of micrometric displacement, and both are by synthesis Motion, had both achieved the output requirement of larger displacement, also ensure that output accuracy and delivery efficiency simultaneously.
Summary of the invention:
The purpose of this utility model is to provide a kind of output that can realize larger displacement, also can guarantee that simultaneously output accuracy and Grand micro-compound platform with precise motion function of delivery efficiency.Its technical scheme is:
A kind of grand micro-compound platform with precise motion function, including macro-moving stage (2), micromotion platform (1) and electricity Dynamic push rod (11), it is characterised in that: three electric pushrods (11) are arranged on pedestal (10), connect pedestal (10) and macro-moving stage (2) three side chains are 120 degree and are uniformly distributed, and in every side chain, connecting rod (12) passes through Performance of Right-Angle Flexure Hinge (13) and pedestal (10) being connected, one end of connecting rod (15) is connected by right circular flexure hinge (14) with connecting rod (12), the other end of connecting rod (15) Being connected by right circular flexure hinge (16) with macro-moving stage (2), micromotion platform outside framework (3) is inlaid on macro-moving stage (2), grand The centre of motion of the centre of motion of moving platform (2) and micromotion platform (1) is on same central axis.
In some embodiments, macro-moving stage (2) realizes the defeated of big displacement by the driving effect of electric pushrod (11) Going out, micromotion platform (1) realizes the accurate of micrometric displacement by the driving effect of piezoelectric ceramics (4) and exports, both simultaneously synthesizing motions, Both achieve the output requirement of larger displacement, also ensure that output accuracy and delivery efficiency simultaneously.
Its operation principle is: three the electric pushrod driving means being arranged on pedestal are passed through under control of the control system Apply different active forces and realize the grand dynamic of macro-moving stage, i.e. larger displacement output, be arranged on and the outside framework of micromotion platform one On three piezoelectric ceramics realize the accurate output of micrometric displacement under control of the control system by applying different active forces, two The simultaneously synthesizing motion of person, had both achieved the output requirement of larger displacement, also ensure that output accuracy and delivery efficiency simultaneously.
This utility model compared with prior art, has an advantage in that:
The macro-moving stage using the elastomeric material with moderate finite deformation performance to make realizes grand under the driving of electric pushrod The grand of moving platform moves;The micromotion platform using the metal material with small deformation performance to make realizes under the driving of piezoelectric ceramics The fine motion of micromotion platform;Macro-moving stage and the simultaneously synthesizing motion of micromotion platform, both achieved the output requirement of larger displacement, simultaneously Also ensure that output accuracy and delivery efficiency.
Accompanying drawing explanation
Fig. 1 is the micromotion platform front view sketch of this utility model embodiment;
Fig. 2 is partial enlargement sketch at the micromotion platform A of this utility model embodiment;
Fig. 3 is the macro-moving stage front view sketch of this utility model embodiment;
Fig. 4 is partial enlargement sketch at the macro-moving stage B of this utility model embodiment.
In figure: 1, micromotion platform 2, macro-moving stage 3, outside framework 4, piezoelectric ceramics 5, connecting rod 6, right angle flexibility Hinge 7, right circular flexure hinge 8, connecting rod 9, right circular flexure hinge 10, pedestal 11, electric pushrod 12, connecting rod 13, Performance of Right-Angle Flexure Hinge 14, right circular flexure hinge 15, connecting rod 16, right circular flexure hinge
Detailed description of the invention:
Below in conjunction with drawings and Examples, this utility model is described further.
A kind of grand micro-compound platform with precise motion function, including be made up of the elastomeric material of large deformation performance With pedestal (10) one macro-moving stage (2) and the metal material by small deformation performance make with outside framework (3) one micro- Moving platform (1), the described micromotion platform outside framework (3) being made up of metal material is inlaid on macro-moving stage (2), when not working, The geometric center of the geometric center of macro-moving stage (2) and micromotion platform (1) is on same central axis, it is characterised in that by rubber The macro-moving stage (2) that glue material is made and pedestal (10) integrated platform, three electric pushrods (11) are arranged on pedestal (10) On, connect pedestal (10) and be 120 degree with three side chains of macro-moving stage (2) and be uniformly distributed, in every side chain, connecting rod (12) is logical Crossing Performance of Right-Angle Flexure Hinge (13) to be connected with pedestal (10), one end of connecting rod (15) and connecting rod (12) pass through right circular flexure hinge (14) connecting, the other end of connecting rod (15) is connected by right circular flexure hinge (16) with macro-moving stage (5), is made up of metal material Micromotion platform outside framework (3) on three piezoelectric ceramics (4) are installed, connect three of outside framework (3) and micromotion platform (1) Chain is 120 degree and is uniformly distributed, and in every side chain, connecting rod (5) is connected with outside framework (3) by Performance of Right-Angle Flexure Hinge (6), even One end of bar (8) is connected by right circular flexure hinge (7) with connecting rod (5), and the other end of connecting rod (8) passes through with micromotion platform (1) Right circular flexure hinge (9) connects.
Macro-moving stage (2) is all retrained by three mutually isostructural side chains with micromotion platform (1), and macro-moving stage is capable of Translation on x in plane, y two is orthogonal, micromotion platform be capable of x, y two in plane orthogonal on translation and Around the rotation of z-axis, owing to using identical kinematic chain, two platforms are respectively provided with good isotropism.
Three electric pushrod (11) driving means being contained on pedestal are different by applying under control of the control system Active force realizes macro-moving stage (2) larger displacement output, is arranged on and three pressures on the outside framework (3) of micromotion platform (1) one Electroceramics (4) realizes the accurate output of micrometric displacement under control of the control system by applying different active forces, and both are simultaneously Resultant motion, had both achieved the output requirement of larger displacement, also ensure that output accuracy and delivery efficiency simultaneously.

Claims (2)

1. there is a grand micro-compound platform for precise motion function, including macro-moving stage (2), micromotion platform (1) and electronic Push rod (11), it is characterised in that three electric pushrods (11) are arranged on pedestal (10), connects pedestal (10) and macro-moving stage (2) three side chains are 120 degree and are uniformly distributed, and in every side chain, connecting rod (12) passes through Performance of Right-Angle Flexure Hinge (13) and pedestal (10) being connected, one end of connecting rod (15) is connected by right circular flexure hinge (14) with connecting rod (12), the other end of connecting rod (15) Being connected by right circular flexure hinge (16) with macro-moving stage (2), micromotion platform outside framework (3) is inlaid on macro-moving stage (2).
A kind of grand micro-compound platform with precise motion function the most according to claim 1, it is characterised in that grand dynamic The centre of motion of the centre of motion of platform (2) and micromotion platform (1) is on same central axis.
CN201620063430.2U 2016-01-23 2016-01-23 Grand little compound platform with accurate motion function Expired - Fee Related CN205490230U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620063430.2U CN205490230U (en) 2016-01-23 2016-01-23 Grand little compound platform with accurate motion function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620063430.2U CN205490230U (en) 2016-01-23 2016-01-23 Grand little compound platform with accurate motion function

Publications (1)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107171591A (en) * 2017-06-06 2017-09-15 西安交通大学 A kind of planar three freedom inching gear based on herringbone structure
CN107786120A (en) * 2017-11-21 2018-03-09 吉林大学 Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic
CN109347364A (en) * 2018-12-21 2019-02-15 江苏集萃微纳自动化系统与装备技术研究所有限公司 A kind of across scale precisely locating platform of macro and micro servo
CN109491078A (en) * 2019-01-07 2019-03-19 南京理工大学 A kind of high-precision micro scanning device
CN110370229A (en) * 2019-07-12 2019-10-25 佛山科学技术学院 Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism
CN112865592A (en) * 2020-12-31 2021-05-28 天津理工大学 Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107171591A (en) * 2017-06-06 2017-09-15 西安交通大学 A kind of planar three freedom inching gear based on herringbone structure
CN107171591B (en) * 2017-06-06 2018-11-09 西安交通大学 A kind of fine motion method of the planar three freedom inching gear based on herringbone structure
CN107786120A (en) * 2017-11-21 2018-03-09 吉林大学 Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic
CN109347364A (en) * 2018-12-21 2019-02-15 江苏集萃微纳自动化系统与装备技术研究所有限公司 A kind of across scale precisely locating platform of macro and micro servo
CN109491078A (en) * 2019-01-07 2019-03-19 南京理工大学 A kind of high-precision micro scanning device
CN110370229A (en) * 2019-07-12 2019-10-25 佛山科学技术学院 Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism
CN112865592A (en) * 2020-12-31 2021-05-28 天津理工大学 Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof
CN112865592B (en) * 2020-12-31 2022-06-24 天津理工大学 Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160817

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CF01 Termination of patent right due to non-payment of annual fee