CN107171591B - A kind of fine motion method of the planar three freedom inching gear based on herringbone structure - Google Patents
A kind of fine motion method of the planar three freedom inching gear based on herringbone structure Download PDFInfo
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- CN107171591B CN107171591B CN201710418531.6A CN201710418531A CN107171591B CN 107171591 B CN107171591 B CN 107171591B CN 201710418531 A CN201710418531 A CN 201710418531A CN 107171591 B CN107171591 B CN 107171591B
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- 238000000034 method Methods 0.000 title claims description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 93
- 230000007246 mechanism Effects 0.000 claims abstract description 29
- 238000006073 displacement reaction Methods 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 7
- 229910052751 metal Inorganic materials 0.000 claims abstract description 7
- 230000005611 electricity Effects 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 4
- 229910052573 porcelain Inorganic materials 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 2
- 230000005389 magnetism Effects 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 14
- 229910052742 iron Inorganic materials 0.000 claims 5
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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Abstract
A kind of planar three freedom inching gear based on herringbone structure, three mechanisms are separately constituted by flexible hinge, three identical piezoelectric ceramics, three identical electromagnet, wherein in each mechanism, piezoelectric ceramics one end and electromagnet are fastenedly connected, and the other end is fixed on flexible hinge；Three mechanisms are distributed in trisection angle of circumference, are an axially symmetric structures；When the device is positioned on metal bottom surface, electromagnet plays the role of locking, and piezoelectric ceramics provides input displacement, and flexible hinge generates deformation, by the control to electromagnet and piezoelectric ceramics both end voltage, the small translation and rotation of Three Degree Of Freedom of the device on metal flat can be realized；The configuration of the present invention is simple has latch functions, and start is accurate, can realize free translation planar and rotation.
Description
Technical field
The invention belongs to inching gears, and in particular to a kind of planar three freedom inching gear based on herringbone structure is put down
Face Three Degree Of Freedom fine motion method.
Background technology
The inverse electrical effect of piezoelectric ceramics refers to the electric field for adding the same direction in polarization direction when piezoelectric ceramics, piezoelectricity pottery
Porcelain can be extended along polarization direction, and it is accurate mobile that old friends replace traditional sliding rail gear etc. to realize with piezoelectric ceramics, using in this way
Type of drive not only increase mobile accuracy, also widely extend the working environment of precision fine motion device.But at present
Some plane inching gears are either translatable or rotate, can all be limited by structure, are difficult to realize the fine motion of Three Degree Of Freedom,
Otherwise, in order to realize the fine motion of Three Degree Of Freedom, structure and control all can be extremely complex.
Invention content
In order to solve the above-mentioned problems of the prior art, the purpose of the present invention is to provide a kind of based on herringbone structure
The planar three freedom fine motion method of planar three freedom inching gear, utilizes the mutual cooperation of three pairs of piezoelectric ceramics and electromagnet
Realize that the fine motion of Three Degree Of Freedom in plane, the configuration of the present invention is simple have latch functions, start is accurate, can realize in plane
Interior free translation and rotation.
In order to achieve the above object, the present invention adopts the following technical scheme that：
A kind of planar three freedom inching gear based on herringbone structure, including flexible hinge 3, the first piezoelectric ceramics 1-1,
Second piezoelectric ceramics 1-2, third piezoelectric ceramics 1-3, the first electromagnet 2-1, the second electromagnet 2-2 and third electromagnet 2-3,
In, first one end piezoelectric ceramics 1-1 and the first electromagnet 2-1 are fastenedly connected, and the other end, which is fixed on flexible hinge 3, forms
One mechanism, second one end piezoelectric ceramics 1-2 and the second electromagnet 2-2 are fastenedly connected, and the other end is fixed on flexible hinge 3
Second mechanism is formed, third one end piezoelectric ceramics 1-3 and third electromagnet 2-3 are fastenedly connected, and the other end is fixed in flexibility
Third mechanism is formed on hinge 3；In 120 ° of distributions of axis angle two-by-two, central point is in flexible hinge 3 for three mechanisms
Heart point.
The first piezoelectric ceramics 1-1, the second piezoelectric ceramics 1-2, third piezoelectric ceramics 1-3 provide input displacement, and right
3 applied force of flexible hinge；First electromagnet 2-1, the second electromagnet 2-2, third electromagnet 2-3 generate magnetism after powered up,
It is fixed on metal bottom surface under the action of magnetic force, plays the role of locking.
By controlling the break-make electricity condition of the first electromagnet 2-1, the second electromagnet 2-2 and third electromagnet 2-3, can control
Make the lockup state of each mechanism end；By controlling the first piezoelectric ceramics 1-1, the second piezoelectric ceramics 1-2 and third piezoelectricity pottery
The voltage at the both ends porcelain 1-3, can control the elongation displacement of each mechanism, and the power exported in any case can act on flexible hinge
Chain brings it about deformation；As a result, by the control to voltage, each mechanism and flexible hinge cooperate, and whole device can be
Desired translation micro-displacement and rotation micro-angular displacement are generated on metal bottom surface.
A kind of planar three freedom fine motion method of the planar three freedom inching gear based on herringbone structure, when
Using the center of flexible hinge 3 as the center of circle, and the reference point exported for fine motion is put with this, with the central shaft of the first piezoelectric ceramics 1-1
For y-axis, in this plane coordinate system, described device can complete the fine motion of three degree of freedom, can not only realize reference point
Translation in the direction x, y, additionally it is possible to realize reference point on some fixed position point i.e. axis on the axis of any one mechanism
The rotation of the interface point of electromagnet and piezoelectric ceramics；
The most basic start principle of the device is as follows：In initial position, if a mechanism of the locking present apparatus, to give first
For electromagnet 2-1 energization lockings, after locking, makes its elongation to the first piezoelectric ceramics 1-1 energizations, then give the second electromagnet 2-
2 and third electromagnet 2-3 is powered and makes its locking, then releases locking to the first electromagnet 2-1 power-off, gives the first piezoelectric ceramics 1-1
Power-off makes it restore former long, and entire mechanism is translated to negative direction of the y-axis at this time；
If the Liang Ge mechanisms of the locking present apparatus, for giving the second electromagnet 2-2 and third electromagnet 2-3 energization lockings,
After locking, it is set to extend a displacement, two displacements respectively to the second piezoelectric ceramics 1-2 and the 1-3 energizations of third piezoelectric ceramics
Measure identical or different, then the second piezoelectric ceramics 1-2 and third piezoelectric ceramics 1-3 gives flexible hinge 3 two power respectively, flexible
Hinge 3 deforms upon under the action of two power, and center reference point generates the translation to some angle；Hereafter, there are two types of controls
Mode：
First, to make reference point rest at this and keeping exporting, makes its locking to the first electromagnet 2-1 energizations, give
Second electromagnet 2-2 and the 2-3 power-off of third electromagnet make it release locking, and at this moment flexible hinge 3 restores reset condition, to second
Piezoelectric ceramics 1-2 and the 1-3 power-off of third piezoelectric ceramics, make whole device restore original-shape, reference point outputs above-mentioned at this time
Translation in some angle；When the second piezoelectric ceramics 1-2 is identical with the elongation of third piezoelectric ceramics 1-3, refer at this time
Point is translated to positive direction of the y-axis；
Second, to make reference point rotate clockwise an angle around the distal point of third piezoelectric ceramics 1-3, to the second electricity
Magnet 2-2 power-off releases locking, and third electromagnet 2-3 restores reset condition still in lockup state, at this moment flexible hinge 3, right
Second piezoelectric ceramics 1-2 and the 1-3 power-off of third piezoelectric ceramics, make whole device restore original-shape, reference point is around third at this time
The distal point of piezoelectric ceramics 1-3 has rotated clockwise an angle；
According to above-mentioned principle, adjust lockup state, start sequence and the elongation of three mechanisms, can realize reference point around
The rotation of the distal point of first piezoelectric ceramics 1-1, the second piezoelectric ceramics 1-2 or third piezoelectric ceramics 1-3, and planar not
With the translation of angle, if to realize the translation of positive direction of the x-axis, locking the first electromagnet 2-1 first and the second electromagnet 2-
2, then so that it is extended respectively the first piezoelectric ceramics 1-1 and the second piezoelectric ceramics 1-2 energizations, when the elongation of the two meets
When certain numerical value relationship, translation of the realization reference point in positive direction of the x-axis can be made；Similarly, change locking again and start is suitable
Sequence can realize translation of the reference point in negative direction of the x-axis.
Compared to the prior art, the invention has the advantages that：
1) present invention can translation of the realization device in x, y-axis and the rotation around any one piezoelectric ceramics distal point,
Therefore the working method of the present apparatus can be set as the translation or rotation of step-by-step movement, big stroke.
2) present invention can realize translation of the reference point on the low-angle for deviateing some mechanism axis, be turned by coordinate system
It changes and to the elongation of each mechanism and the locking of lockup state, theoretically passes through multiple start, reference point can be realized flat
Moving freely in face.
3) present invention is using herringbone, the structure of 120 ° of distributions of axis angle two-by-two, and stability is high, and precision is high.
Description of the drawings
Fig. 1 is stereoscopic schematic diagram of the present invention.
Fig. 2 is right view of the present invention.
Fig. 3 is the schematic diagram that apparatus of the present invention are translated in negative direction of the y-axis.
Fig. 4 is the displacement state of the reference point of former center after the present invention two piezoelectric ceramics elongations wherein.
Fig. 5 is the schematic diagram that apparatus of the present invention are rotated around third piezoelectric ceramics distal point.
Specific implementation mode
Below in conjunction with the drawings and specific embodiments, invention is further described in detail.
As shown in figures 1 and 3, in initial position, the first electromagnet 2-1 energization lockings are given, it is logical to the first piezoelectric ceramics 1-1
Electricity makes its elongation, then gives the second electromagnet 2-2 and the 2-3 energizations of third electromagnet to make its locking, then disconnected to the first electromagnet 2-1
Electricity makes it restore former long to the first piezoelectric ceramics 1-1 power-off, and entire mechanism is translated to negative direction of the y-axis at this time.
As shown in Figure 1 and Figure 4, in initial position, the second electromagnet 2-2 and third electromagnet 2-3 energization lockings are given, to the
Two piezoelectric ceramics 1-2 and third piezoelectric ceramics 1-3, which are powered, makes its identical displacement of elongation, i.e. L1=L2, then the second piezoelectricity
Ceramic 1-2 and third piezoelectric ceramics 1-3 gives flexible hinge 3 two power respectively, the two power sizes are identical, and flexible hinge 3 exists
It deforming upon under the action of two power, reference point is translated to positive direction of the y-axis at this time, makes its locking to the first electromagnet 2-1 energizations,
Locking is released to the second electromagnet 2-2 and the 2-3 power-off of third electromagnet, gives the second piezoelectric ceramics 1-2 and third piezoelectric ceramics 1-3
Power-off makes it restore former long, at this point, whole device is translated to positive direction of the y-axis.
As shown in Figure 1 and Figure 4, in initial position, the first electromagnet 2-1 and the second electromagnet 2-2 energization lockings are given, to the
One piezoelectric ceramics 1-1 and the second piezoelectric ceramics 1-2 energizations make its elongation, such as Fig. 4, can list deflection angle β, the displacement of reference point
A and L (length of the center to piezoelectric ceramics distal point), the numerical relation of elongation L1 and L2, as mono- timings of L, β, a and L1, L2
There is determining numerical relation：
When the elongation of the two meets certain numerical value relationship, translation of the realization reference point in positive direction of the x-axis can be made；
It is similar, in initial position, give the first electromagnet 2-1 and third electromagnet 2-3 energization lockings, to the first piezoelectric ceramics 1-1 and
The 1-3 energizations of third piezoelectric ceramics make its elongation, when the elongation of the two meets certain numerical value relationship, can make realization reference point
Translation in negative direction of the x-axis；It realizes the translation in positive direction of the x-axis, only need to enable β=30 °, to realize the flat of negative direction of the x-axis
It moves, only need to enable β=- 30 °, it is known that target translational movement is a and original length L, substitutes into above-mentioned equation group, can solve two elongations
L1 and L2.
As shown in Figure 1 and Figure 5, in initial position, the second electromagnet 2-2 and third electromagnet 2-3 energization lockings are given, to the
Two piezoelectric ceramics 1-2 and third piezoelectric ceramics 1-3 energizations make it extend a displacement respectively, two displacement differences, then
Second piezoelectric ceramics 1-2 and third piezoelectric ceramics 1-3 gives flexible hinge 3 two power respectively, work of the flexible hinge 3 in two power
It is deformed upon under, center reference point generates the translation in some angle；Locking is released to the second electromagnet 2-2 power-off, the
Three electromagnet 2-3 restore reset condition still in lockup state, at this moment flexible hinge 3, to the second piezoelectric ceramics 1-2 and third pressure
Electroceramics 1-3 power-off, makes whole device restore original-shape, at this time distal point up time of the reference point around third piezoelectric ceramics 1-3
Needle has rotated an angle.
Claims (3)
1. a kind of fine motion method of the planar three freedom inching gear based on herringbone structure, the inching gear are positioned over metal
On bottom surface, including flexible hinge (3), the first piezoelectric ceramics (1-1), the second piezoelectric ceramics (1-2), third piezoelectric ceramics (1-3),
First electromagnet (2-1), the second electromagnet (2-2) and third electromagnet (2-3), wherein the first piezoelectric ceramics one end (1-1) and
First electromagnet (2-1) is fastenedly connected, and the other end is fixed in first mechanism of formation on flexible hinge (3), the second piezoelectricity pottery
Porcelain one end (1-2) and the second electromagnet (2-2) are fastenedly connected, and the other end is fixed in second machine of formation on flexible hinge (3)
Structure, third piezoelectric ceramics one end (1-3) and third electromagnet (2-3) are fastenedly connected, and the other end is fixed on flexible hinge (3)
Form third mechanism；In 120 ° of distributions of axis angle two-by-two, central point is the central point of flexible hinge (3) for three mechanisms；
It is characterized in that：The planar three freedom fine motion method is：When using the center of flexible hinge (3) as the center of circle, and with this
Point is the reference point of fine motion output, described in this plane coordinate system using the central shaft of the first piezoelectric ceramics (1-1) as y-axis
Device can complete the fine motion of three degree of freedom, can not only realize translation of the reference point in the direction x, y, additionally it is possible to realize reference
The rotation of point interface point of electromagnet and piezoelectric ceramics on some fixed position point, that is, axis on the axis of any one mechanism；
The most basic start principle of the device is as follows：In initial position, if a mechanism of the locking present apparatus, to give the first electromagnetism
For iron (2-1) energization locking, after locking, makes its elongation to the first piezoelectric ceramics (1-1) energization, then give the second electromagnet
The energization of (2-2) and third electromagnet (2-3) makes its locking, then releases locking to the first electromagnet (2-1) power-off, gives the first piezoelectricity
Ceramic (1-1) power-off makes it restore former long, and entire mechanism is translated to negative direction of the y-axis at this time；
If the Liang Ge mechanisms of the locking present apparatus, for giving the second electromagnet (2-2) and third electromagnet (2-3) energization locking,
After locking, being powered to the second piezoelectric ceramics (1-2) and third piezoelectric ceramics (1-3) makes it extend a displacement respectively, two
Displacement is identical or different, and then the second piezoelectric ceramics (1-2) and third piezoelectric ceramics (1-3) give flexible hinge (3) respectively
Two power, flexible hinge (3) deform upon under the action of two power, and center reference point generates the translation to some angle；This
Afterwards, there are two types of control modes：
First, to make reference point rotate clockwise an angle around the distal point of the first piezoelectric ceramics (1-1), the first electromagnetism is given
Iron (2-1) energization makes its locking, so that it is released locking to the second electromagnet (2-2) and third electromagnet (2-3) power-off, at this moment soft
Property hinge (3) restore reset condition, to the second piezoelectric ceramics (1-2) and third piezoelectric ceramics (1-3) power-off, keep whole device extensive
Original-shape is answered, reference point outputs the translation in some above-mentioned angle at this time；When the second piezoelectric ceramics (1-2) and third pressure
When the elongation of electroceramics (1-3) is identical, reference point is translated to positive direction of the y-axis at this time；
Second, to make reference point rotate clockwise an angle around the distal point of third piezoelectric ceramics (1-3), the second electromagnetism is given
Iron (2-2) power-off releases locking, and third electromagnet (2-3) restores original shape still in lockup state, at this moment flexible hinge (3)
State powers off the second piezoelectric ceramics (1-2) and third piezoelectric ceramics (1-3), so that whole device is restored original-shape, refers at this time
Point has rotated clockwise an angle around the distal point of third piezoelectric ceramics (1-3)；
According to above-mentioned principle, lockup state, start sequence and the elongation of three mechanisms are adjusted, reference point can be realized around first
The rotation of the distal point of piezoelectric ceramics (1-1), the second piezoelectric ceramics (1-2) or third piezoelectric ceramics (1-3), and planar
The translation of different angle, if to realize the translation of positive direction of the x-axis, the first electromagnet of locking (2-1) and the second electromagnetism first
Iron (2-2), then so that it is extended respectively the first piezoelectric ceramics (1-1) and the second piezoelectric ceramics (1-2) energization, when the two
When elongation meets certain numerical value relationship, translation of the realization reference point in positive direction of the x-axis can be made；Similarly, change lock again
Only with start sequence, translation of the reference point in negative direction of the x-axis can be realized.
2. fine motion method according to claim 1, it is characterised in that：First piezoelectric ceramics (1-1), the second piezoelectricity pottery
Porcelain (1-2), third piezoelectric ceramics (1-3) provide input displacement, and to flexible hinge (3) applied force；First electromagnet (2-1),
Second electromagnet (2-2), third electromagnet (2-3) generate magnetism after powered up, are fixed on metal bottom surface under the magnetic force,
Play the role of locking.
3. fine motion method according to claim 1, it is characterised in that：By controlling the first electromagnet (2-1), the second electromagnetism
The break-make electricity condition of iron (2-2) and third electromagnet (2-3), can control the lockup state of each mechanism end；Pass through control
The voltage of first piezoelectric ceramics (1-1), the second piezoelectric ceramics (1-2) and the both ends third piezoelectric ceramics (1-3), can control each
The elongation displacement of mechanism, the power exported in any case can act on flexible hinge, bring it about deformation；As a result, by right
The control of voltage, each mechanism and flexible hinge cooperate, and it is micro- that whole device can generate desired translation on metal bottom surface
Displacement and rotation micro-angular displacement.
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| CN109995267B (en) * | 2019-04-24 | 2020-02-11 | 西安交通大学 | Linear-shearing piezoelectric ceramic matched driving stepping rotary actuating device and method |
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| EP1988740A1 (en) * | 2007-05-03 | 2008-11-05 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Sound generator |
| JP2008271331A (en) * | 2007-04-23 | 2008-11-06 | Nippon Dempa Kogyo Co Ltd | Manufacturing method of piezoelectric vibrator, piezoelectric vibrating element, piezoelectric vibrator and oscillator |
| DE102007049023A1 (en) * | 2007-10-11 | 2009-04-16 | Technische Universität Darmstadt | Device and method for emulation of an actuator |
| CN205490230U (en) * | 2016-01-23 | 2016-08-17 | 山东理工大学 | Grand little compound platform with accurate motion function |
| CN106695750A (en) * | 2015-11-18 | 2017-05-24 | 哈尔滨工大天才智能科技有限公司 | Micro-miniature robot model driven through piezoelectric ceramics |
-
2017
- 2017-06-06 CN CN201710418531.6A patent/CN107171591B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008271331A (en) * | 2007-04-23 | 2008-11-06 | Nippon Dempa Kogyo Co Ltd | Manufacturing method of piezoelectric vibrator, piezoelectric vibrating element, piezoelectric vibrator and oscillator |
| EP1988740A1 (en) * | 2007-05-03 | 2008-11-05 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Sound generator |
| DE102007049023A1 (en) * | 2007-10-11 | 2009-04-16 | Technische Universität Darmstadt | Device and method for emulation of an actuator |
| CN106695750A (en) * | 2015-11-18 | 2017-05-24 | 哈尔滨工大天才智能科技有限公司 | Micro-miniature robot model driven through piezoelectric ceramics |
| CN205490230U (en) * | 2016-01-23 | 2016-08-17 | 山东理工大学 | Grand little compound platform with accurate motion function |
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