CN1996737A - Dual voltage electrical body nano positioning and voltage electrical driver, its control method and controller - Google Patents
Dual voltage electrical body nano positioning and voltage electrical driver, its control method and controller Download PDFInfo
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- CN1996737A CN1996737A CNA2006101614773A CN200610161477A CN1996737A CN 1996737 A CN1996737 A CN 1996737A CN A2006101614773 A CNA2006101614773 A CN A2006101614773A CN 200610161477 A CN200610161477 A CN 200610161477A CN 1996737 A CN1996737 A CN 1996737A
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Abstract
This invention relates to one double voltage line nanometer piezoelectricity driver, its control method and controller, which is characterized by the following parts: left and right piezoelectricity drivers are connected by mechanic series to form two connectors independently and controllable with middle, left and right areas; the base sliding along shape direction matching with two connector is set vertical to the connectors and the three areas separately form friction force.
Description
Technical field
The present invention relates to piezoelectric motors, a kind of control electrode that is provided with by piezoelectrics with on piezoelectrics of more specifically saying so constitutes piezo-activator, provides control signal to make piezo-activator realize the piezoelectric motors of nanometer positioning by controller.
Background technology
Existing piezoelectric motors (piezoelectric motor) kind is a lot, but do not have most significant advantage that a kind of form can have piezoelectric simultaneously to be provided, comprising: low price, sound construction, little, easy of integration, the big stroke of volume, two-way controlled propelling, nano-precision, strong thrust, big operation temperature area, can work in the extreme physical environment such as ultralow temperature, ultra high vacuum and ultrastrong magnetic field.Causing a key reason that lacks the Almightiness type piezoelectric motors is that these require a lot of local mutual conflicts, for example: big stroke needs a plurality of piezo-activators (piezoelectric actuator) to involve cooperation mutually by the periodically stepping of certain step, and this just is not easy to satisfy simultaneously microminiaturized, integrated and low-cost requirement.For another example: strong thrust requires an end of piezo-activator to be firmly fixed, and this is just difficult compatible with big operation temperature area and big stroke, because big operation temperature area and big stroke walk all to require piezo-activator not firmly fixed.This makes from first piezoelectric motors in 1975: looper motor (inchworm motor) has been difficult to find out a kind of scheme always since U.S.'s invention makes the piezo electric actuator function have above-mentioned significant advantage simultaneously.Set forth the principle and the defective of piezoelectric motors with two examples the most representative below.
According to U.S. Patent number 3,902,084 and 3,902,085 introduces, the principle of propeller of looper motor is: a left side, in, right three piezo-activator one words connect and an axostylus axostyle (shaft) are arranged from they middle passing, under voltage signal effect separately, left side piezo-activator is held axostylus axostyle earlier with a firm grip and right piezo-activator is not held axostylus axostyle, then middle piezo-activator elongation also promotes left piezo-activator together with the right piezo-activator of its axostylus axostyle of holding away from fixed-site, right then piezo-activator is held axostylus axostyle with a firm grip and left piezo-activator is not held, and then middle piezo-activator shrinks and left piezo-activator is withdrawn into initial position, this has caused axostylus axostyle to be pushed away left going a step further, and ceaselessly promotes axostylus axostyle and so forth left and can accurately control actuating length; Similarly, can oppositely promote axostylus axostyle by changing the actuator signal order.
Therefrom as can be seen, the propelling of looper motor will rely on the controlled expansion performance of piezoelectrics to go to hold with a firm grip in turn and not hold axostylus axostyle, this makes the looper motor not work in very big warm area, because the flexible scope of different in kind that axostylus axostyle and piezoelectrics expand with heat and contract with cold and piezoelectrics has only micron dimension, cause piezoelectrics when the temperature difference is very big, can not guarantee all to hold with a firm grip and do not hold axostylus axostyle, can occur that piezo-activator skids because of grip is too small or excessive and cracked with suitable grip and correct step.Except that this significant deficiency, the looper motor whenever makes a move and need hold with a firm grip, extends, do not hold, shrinks four actions, and this needs three piezoelectrics at least, three control signals, so looper motor volume is bigger, structure and signal controlling be more complicated all, be unfavorable for integratedly, price is also very high.
The shearing piezoelectric motors (shear piezoelectric motor) of invention in 1993 can solve the narrow defective of looper motor operation temperature area.Introduce according to international patent WO 93/19494, the operation principle of shearing piezoelectric motors is: a series of shearing piezo-activators (shear piezoelectric actuator) are pressed against the surface for the treatment of mobile object by elastic force, they are clamped with frictional force and treat mobile object, if wherein a certain shearing piezo-activator is passed to voltage signal, the tangential deformation that it produces makes it in the tangentially slippage for the treatment of on the mobile object of contact point, but can not move the whole force of sliding friction for the treatment of that mobile object produces because of single shearing piezo-activator slippage and be not enough to overcome total stiction that remaining a plurality of shearing piezo-activator produces, so can successively make all shearing piezo-activators slip away former contact point and do not make and treat that mobile object moves apart the origin-location one by one towards same direction, but shearing signal on piezo-activators when all cancels simultaneously and causes all to shear piezo-activator deformation when restoring simultaneously, treat mobile object will towards shear direction that piezo-activator restores move move a step because this moment all shear piezo-activators and will treat the frictional force that mobile object produces equidirectional towards the direction of restoring simultaneously, can promote to treat mobile object step by step and so forth.
Because above-mentioned shearing piezo-activator all is to clamp by the spring force of long sphere of action to treat mobile object rather than directly clamp object with stress, so also can not shear the excessive or too small folder power of generation between piezo-activator and caught object when the temperature difference is very big, it is cracked more can not cause shearing piezo-activator.But this shearing piezoelectric motors still have significant deficiency, comprising: at least four of needs are sheared piezo-activator just can clamp and promote step by step object, and this makes whole system comprise that control circuit is also complicated and expensive more; Each piezo-activator separates, and is unfavorable for the microminiaturization of piezoelectric motors, the integrated and application in little space; The tangential thrust of shearing piezoelectric is generally less, is difficult to produce bigger thrust thus.
Summary of the invention
The present invention is for avoiding above-mentioned existing in prior technology weak point, a kind of dual voltage electrical body nano positioning and voltage electrical driver, its control method and controller are provided, by only adopting two piezo-activators and rationally utilizing frictional force, overcome existing piezoelectric motors and can not have big operation temperature area, two-way walking on a large scale, strong thrust, nanometer positioning precision, small size, easy of integration, shortcoming that cost hangs down these important performances simultaneously.
The technical scheme that technical solution problem of the present invention is adopted is:
Dual voltage electrical body nano positioning and voltage electrical driver of the present invention, its design feature is:
About two piezo-activators along the deformation direction with the independent separately two controlled disjunctors of the fixedly connected formation of mode of machinery series connection;
Described two disjunctors are that the boundary is divided into three districts along its deformation direction with the middle section of each piezo-activator, comprise the Zhong Qu between two middle sections and divide Zuo Qu and the You Qu that is in its both sides, be provided with and described two disjunctors matrix for being slidingly matched on its deformation direction, the normal pressure that two disjunctors or the stressed pad that is fixed thereon and matrix are pressed mutually is set on perpendicular to two disjunctor deformation directions, form frictional force respectively during two disjunctor deformation in matrix and three districts of two disjunctors, wherein the maximum static friction force in any district is not more than other two district's maximum static friction force sums;
Frictional force between described matrix and three districts of two disjunctors is formed between matrix and two disjunctors and/or between matrix and the stressed pad.
The design feature of dual voltage electrical body nano positioning and voltage electrical driver of the present invention also in:
The piezoelectrics of two piezo-activators are the split setting about in described two disjunctors.
The piezoelectrics of two piezo-activators are whole the setting about in described two disjunctors.
Sleeve structure is set, and described sleeve structure has following two kinds of forms at least:
A, described matrix are outer tube, and described two disjunctors are parallel shaft-like two disjunctors that are placed in it;
B, described two disjunctors are outer tube, and described matrix is the parallel shaft-like matrix that is placed in it.
With described matrix is supporter, and two disjunctors or stressed pad are placed on the described matrix, and described normal pressure comes from the gravity of two disjunctors or stressed pad; Or come from electromagnetic force between two disjunctors or stressed pad and matrix; Or come from resilient clamp power between two disjunctors or stressed pad and matrix.
On described two disjunctors or stressed pad force body is set, described force body is with himself gravity, or electromagnetic force, or resilient clamp power is forming normal pressure between two disjunctors and the matrix or between stressed pad and matrix.
The maximum static friction force in described Zuo Qu, You Qu He Zhong district equates.
The characteristics of dual voltage electrical body nano positioning and voltage electrical driver control method of the present invention be control respectively with following sequential about two piezo-activators, finish a driver stepping to the right:
Control signal is shunk in a, the input of left piezo-activator, and right piezo-activator input control signal remains unchanged simultaneously;
B, left piezo-activator input control signal remain unchanged, simultaneously right piezo-activator input elongation control signal;
C, left piezo-activator input elongation control signal, control signal is shunk in simultaneously right piezo-activator input.
The design feature of the controller of dual voltage electrical body nano positioning and voltage electrical driver of the present invention is that waveform generator is set, and the output signal one tunnel of waveform generator is successively through buffer and half-wave rectifier output control voltage V1; Connect with half-wave rectifier after the phase shift rectifier that constitutes through buffer with by phase-shifter successively in another road, output control voltage V2, the phase shift that phase-shifter is set is 90 degree, with described control voltage V1 and V2 respectively as the electrode input signal of left and right sides piezo-activator in two disjunctors.
The design feature of the controller of dual voltage electrical body nano positioning and voltage electrical driver of the present invention also is to be provided with waveform generator, the output signal of waveform generator is divided into two-way, two paths of signals at first passes through buffer, export control voltage V1 and control voltage V2 respectively through the phase shift rectifier again, it is 90 degree that phase difference between the two-way phase shift rectifier is set, with described control voltage V1 and V2 respectively as two piezo-activator electrode input signals about in two disjunctors.
Dual voltage electrical body nano positioning and voltage electrical driver of the present invention is added in respectively on the deformation control electrode of left and right two piezo-activators by two control signal collaborative works, shrinks control signal with high voltage representative elongation control signal with the low-voltage representative; Or then be to shrink control signal with low-voltage representative elongation control signal and with the high voltage representative for opposite polarity piezo-activator.This two path control signal can be from two passages of signal generator, waveform generator or a function generator, or from signal generator, waveform generator or the function generator of two constant phase difference, also can use controller of the present invention, the two path control signal of controller is added in respectively on the left and right sides piezo-activator deformation control electrode.
Operation principle of the present invention is: the left piezo-activator in two disjunctors is passed to the contraction control signal to begin to shrink, and this moment, right piezo-activator state was constant.Left side district in two disjunctors is pulled to middle district by stress at this moment, because of active force and reaction force principle, middle district also is pulled to left side district simultaneously, but middle district is connecting the right side district of internal stress free temporarily, because the internal stress of left piezo-activator is greater than Zuo Qu, the maximum static friction force of Zhong Qu He You district on matrix, always there is a district to be pulled so at last, because have only the internal stress that deformation just can slow down left piezo-activator has taken place, who is pulled and will sees the left, center, right district size and Orientation of maximum static friction force separately on earth; If being pressed on, two disjunctors cause a left side, the neutralization right side to distinguish the maximum static friction force sum of the maximum static friction force of the effect of all being under pressure and left side district and matrix on the matrix less than Zhong Qu He You district and matrix, so left district will be joined together to spur to the right by Zhong Qu He You district, and the barycenter of two disjunctors moves to right.
Then, right piezo-activator is carried out the elongation control signal and begins elongation, and left piezo-activator state is constant, because of the maximum static friction force of setting right district and matrix less than Zhong Qu He Zuo district and matrix maximum static friction force sum, so right district will be joined together to promote to the right by Zhong Qu He Zuo district, and the barycenter of two disjunctors further moves to right.
Follow again, about control signal on two piezo-activators restore simultaneously, be that left piezo-activator elongation, simultaneously right piezo-activator shrink, the maximum static friction force of district and matrix is less than Zuo Qu He You district and matrix maximum static friction force sum in the setting, and so middle district is joined together to push to the right-hand barycenter of two disjunctors that causes by Zuo Qu He You district and further moves to right; So far, about two piezo-activators restore to the original state, but the barycenter of whole two disjunctors moves to right.Repeating above process can ceaselessly promote two disjunctors and move right.
The size of the maximum static friction force between above-mentioned Zuo Qu, Zhong Qu He You district and matrix can satisfy above-mentioned maximum static friction force relation by the active area of regulating confficient of static friction, pressure and this pressure moves to right the barycenter of two disjunctors.
Similarly, can make the deformation of two disjunctors be in proper order in proper order by the control signal on two piezo-activators about changing: left piezo-activator elongation and right piezo-activator be constant-the constant and right piezo-activator of left piezo-activator shrinks-about two piezo-activators restore simultaneously, thereby be moved to the left and can back and forth produce stepping.
Can fix stressed pad in the Zuo Qu of two disjunctors, middle district and/or the right district, interact with pressure with stressed pad and matrix, this stressed pad on itself and matrix frictional force direction, must sufficiently make firmly its deformation under this frictional force effect less than this two disjunctor in the deformation of each piezo-activator, just make it can rely on deformation small step on matrix of each piezo-activator walk apart from the ground slippage.The effect of stressed pad comprises:
1, it is little to protect two disjunctors and matrix that it is damaged under rubbing action;
2, the active area of each district of definition two disjunctors and matrix pressure;
3,, the confficient of static friction between each district of two disjunctors and matrix is set by the selection of material;
4, the pressure of stressed pad and matrix can be from the pressure of each district of original two disjunctors with matrix, also can be from the active force of stressed advance capital for body to the matrix generation, comprise stressed pad gravity, electromagnetic force, resilient clamp power, also can stressed pad be pressed to the pressure of matrix from external force body, or from the resilient clamp power of matrix to stressed pad, this has enriched the means of the maximum static friction force relation that realizes above-mentioned generation stepping.
The method that satisfies the maximum static friction force relation of above-mentioned generation stepping has a variety of, comprise: according to the maximum static friction force formula: maximum static friction force=pressure * confficient of static friction, selection can satisfy the pressure and the confficient of static friction of above-mentioned maximum static friction force relation and make force body, matrix and/or stressed pad; Above-mentioned maximum static friction force formula is an approximate formula, and actual maximum static friction force is also relevant with the pressure active area.So, can be by regulating pressure, confficient of static friction and/or pressure active area satisfy above-mentioned maximum static friction force relation.
The operation principle of controller of the present invention is: waveform generator produces periodic zero passage square wave, sinusoidal wave, triangular wave or trapezoidal wave signal, but this signal can not influence each other through forming the signal of two-way independent process after two buffer buffers at the same time, wherein a road export to half-wave rectifier form half period signal and in addition the signal of half period for keeping low level signal, constitute first via control signal, another road buffer exports the phase shift rectifier that phase shift is made as 90 degree to, after 90 degree phase shifts and halfwave rectifier, form the second tunnel control signal, wherein the order of 90 degree phase shifts and halfwave rectifier can be exchanged, and obtains the second tunnel control signal;
Two path control signal is respectively applied for the deformation of two piezo-activators about control, the two waveform is identical, phase phasic difference 90 degree, this makes that it is first via rising the second tunnel decline simultaneously that 1/4 cycle was arranged between the two, this stage corresponding to about two piezo-activator concurrent deformations restore, two 1/4 cycles of these 1/4 cycle both sides are respectively the first via and remain unchanged simultaneously and to rise on the second the tunnel and the second the road remain unchanged simultaneously that the first via descends, and correspond respectively to simultaneously right piezo-activator elongation and the right piezo-activator left piezo-activator contraction of while of remaining stationary of remaining stationary of left piezo-activator.Realize driver functions with this.
Elongation on the piezo-activator of the left and right sides and contraction signal also can be exchanged, and realize oppositely moving.Be to realize the phase shift of the degree of 90 between first, second road control signal above with one 90 degree phase-shifter, also can after above-mentioned two buffers, respectively connect a phase shift rectifier and make that these two phase shift rectifier phase shifts each other are 90 degree, can make phase shift 90 degree between first, second road control signal equally.
Compared with the prior art, beneficial effect of the present invention is embodied in:
1, operation temperature area of the present invention is big: because the pressure between two piezo-activators and the matrix is gravity, elastic force, the isometric sphere of action power of electromagnetic force about in two disjunctors, too small or excessive pressure causes skidding to walk or crushing is ruined even also can not produce between each piezo-activator and matrix when variations in temperature is very big;
2, stroke of the present invention is big: in principle as long as back and forth do not stop into, stroke can infinite length, and practical application will be subject to matrix length;
3, the present invention is simple in structure: only rely on two piezo-activators can realize walking, control signal also only needs two and gets final product;
4, the present invention is easy to microminiaturized and integrated: because of about two piezo-activators do not separate, but fixedly connected being integral, and required control signal few (only two) are highly susceptible to doing little and integrated;
5, cost of the present invention is low: by simplified structure, less use piezo-activator that cost is minimized;
6, thrust of the present invention is big: in each district of two disjunctors only the frictional force f1 in a district be resistance, in addition frictional force f2, the f3 sum in two districts are to prop up two disjunctors not allow its resistance that falls back, and are not resistance.If the maximum thrust of left and right sides piezo-activator is F0, thrust F then of the present invention is that F0 overcomes net thrust F0-f1 behind the resistance and the little person between the clean resistance f2+f3-f1.Make the frictional force in each district equate and increase to improve F, reduce F but cross conference greatly because of resistance, when maximum thrust occurred in f1=f2=f3=F0/2, this moment, F=F0/2 can be up to thousands of newton;
7, the present invention's active that can work in two-way antagonism (bipolar antagonistic) is returned (active reset) pattern of putting eliminating the destructive internal vibration that causes because of speed change suddenly, and this also is that to have piezoelectric motors now not available;
8, the present invention is applicable to various extreme physical conditions: utmost point low temperature, ultra high vacuum, high-intensity magnetic field, super low noise, because extreme physical condition generally can only remain in the very little space, and the present invention just in time is suitable for low volume applications and it is compatible mutually with each extreme condition to make.
9, use the cost of controller of the present invention more much lower than using other commercial signal generator, waveform generator or function generator, because of the former only produces selected waveform, and its two path control signal is not independently, just two mutual 90 degree phase shifts signal.
10, the present invention is with a wide range of applications, development along with nanosecond science and technology, genetically manipulated, nano-device, little processing, microrobot have appearred more and more piezoelectric motors being applied to, scanning probe microscopy technology under the particularly extreme physical condition, this usually needs to use and can possess simultaneously that the working temperature district is big, thrust is big, volume is little, stroke is big, control is simple, the piezoelectric motors that positioning accuracy is high.Prior art can not provide these requirements simultaneously.The present invention can solve this difficult problem, and cost of manufacture is very low.
Description of drawings
Figure 1A is the present invention's two disjunctor basic structure schematic diagrames.
Figure 1B is sub-electrode two conjoined structure schematic diagrames of the present invention.
Fig. 1 C is that the present invention adopts the formula of stacking two conjoined structure schematic diagrames.
Fig. 2 is a basic model activation configuration schematic diagram of the present invention.
Fig. 3 is an application of force build activation configuration schematic diagram of the present invention.
Fig. 4 is the stressed pad type of a present invention activation configuration schematic diagram.
Fig. 5 is cast two conjoined structure schematic diagrames of the present invention.
Fig. 6 is a controller circuitry principle schematic of the present invention.
Fig. 7 is a controller output waveform schematic diagram of the present invention.
Number in the figure: district, 6 matrixes, 7 force bodies, 8 stressed pads among 1 deformation direction, 2A left side piezo-activator, the right piezo-activator of 2B, 3 connectors, 4 two disjunctors, 5A left side district, the right district of 5B, the 5C.
Below by embodiment, the structure accompanying drawing is further described the present invention
Embodiment
Embodiment 1: the basic model dual voltage electrical body nano positioning and voltage electrical driver
Referring to Figure 1A, about two piezo-activators be fixedly connected on the connector 3 along the mode of deformation direction 1 with machinery series connection (mechanically in series), constitute independent separately two controlled disjunctors 4; Or as Figure 1B: with the electrode of a piezo-activator be divided into two form two be called left piezo-activator 2A and right piezo-activator 2B along change direction 1 deformation and be the piezo-activator of integrated member of original shape with connector 3, constitute two disjunctors 4.Described deformation is meant piezoelectricity deformation.
Shown in Figure 1A and 1B, left piezo-activator 2A and right piezo-activator 2B are the boundary with separately middle section respectively along its deformation direction, and two disjunctors are divided into three districts, comprise the middle district 5C between two middle sections and divide left side district 5A and the right district 5B that is in its both sides;
The position of each electrode and shape can be any in two disjunctors, but separately the deformation on same direction of two piezo-activators is independent controlled about guaranteeing, for example: two disjunctors 4 that Figure 1A and Figure 1B provide, two piezo-activators are block about it, the pair of electrodes E1 of each piezo-activator, E2 and E3, E4 lays respectively at two relative sides of each piezo-activator, and two disjunctors 4 that Fig. 1 C provides, its left piezo-activator 2A and right piezo-activator 2B are piezoelectric stack (piezo stack) actuator, their pair of electrodes E1 separately, E2 and E3, E4 is respectively two groups of parallel connection electrodes that intert mutually; The piezo-activator of other type comprises that sheet (piezo plate), tubulose, column, ring-type, shearing piezoelectricity (shear piezo) and combination thereof all can be used to construct two disjunctors in the present embodiment, if about it two piezo-activators deformation is independent controlled separately on same direction.About size, the shape of two piezo-activators do not limit, just too little its deformation of left and right piezo-activator is also little, the step pitch and the thrust of the piezoelectric motors of making are less.Can independently add control voltage separately on two piezo-activators about above-mentioned, be electrically connected to form the voltage common port between also can the electrode of an electrode and on another electrode of each piezo-activator, add CONTROLLED POTENTIAL with right piezo-activator with left piezo-activator.
Then, to interact with pressure between Zuo Qu, Zhong Qu He You district and the matrix of above-mentioned two disjunctors, be not more than other two district's maximum static friction force sums with the maximum static friction force that satisfies wherein arbitrary district and matrix by the size of regulating pressure between above-mentioned each district and the matrix, the size of confficient of static friction and/or the size of pressure active area.
Regulate the size of pressure between each district of two disjunctors and the matrix and can use following method or its combination:
1, as Fig. 2, the weight in Yi Zuo district, middle district and/or right district self is pressed on the matrix;
2, as Fig. 3, in Zuo Qu, middle district and/or right district, force body 7 is set, regulate the pressure of described district and matrix with its gravity;
3,, between Zuo Qu, middle district and/or right district and matrix, elastomer is installed and is pressed on the matrix as force body 7 Jiang Ge districts as Fig. 3;
4,, there are being the force body 7 Jiang Ge districts of electromagnetic force effect to be pressed on the matrix between installation and the matrix in Zuo Qu, middle district and/or the right district as Fig. 3;
5, be pressed on the matrix with a part of Jiang Zuo district of matrix, middle district and/or right district, promptly force body and matrix are one.
6, as Fig. 4, in Zuo Qu, middle district and/or right district, fix stressed pad 8, press mutually with matrix and satisfy above-mentioned maximum static friction force relation with stressed pad 8 by regulating this pressure, this pressure can be original from its location and the pressure of matrix, also can comprise stressed pad gravity, electromagnetic force, resilient clamp power to the active force that matrix produces from stressed advance capital for body, also can stressed pad be pressed on the pressure of matrix from outer force body, or from the resilient clamp power of matrix to stressed pad; This stressed pad on itself and matrix frictional force direction, enough make firmly its deformation under this frictional force effect less than this two disjunctor in the deformation of each piezo-activator.
Regulate the size of confficient of static friction between each district of two disjunctors and the matrix and can use following method or its combination:
1, selects material matrix, two disjunctors and/or the stressed pad that can satisfy above-mentioned maximum static friction force relation for use;
2, add the lubricant that can satisfy above-mentioned maximum static friction force relation in the contact position of Zuo Qu, Zhong Qu, right district and/or stressed pad and matrix;
3, use the roughness to satisfy above-mentioned maximum static friction force relation to make the contact-making surface that Zuo Qu, Zhong Qu, right district and/or stressed pad and matrix are pressed mutually.
The size of regulating pressure active area between each district of two disjunctors and the matrix can make with the following method:
With the contact area that satisfies above-mentioned maximum static friction force relation matrix is pressed mutually with Zuo Qu, Zhong Qu He You district two disjunctors and/or stressed pad.
Operation principle:
As Fig. 2, two disjunctors 4 are pressed onto on the matrix 6 with himself gravity or external pressure, and all the pressure effect are arranged with matrix 6 at the left side district of this two disjunctor 5A, middle district 5C He You district 5B; The size by selecting size, pressure active area SA and the SC and the SB of pressure between Zuo Qu, Zhong Qu He You district and the matrix 6 and/or the size of confficient of static friction make in Zuo Qu, the Zhong Qu He You district any one distinguish and the maximum static friction force of matrix all is not more than the maximum static friction force sum of other two districts and matrix.During work, left side piezo-activator 2A is carried out and shrinks control signal and right piezo-activator 2B state is constant, the frictional force of district 5C He You district 5B is joined together to pull to right-hand in the effect bottom left district 5A of shrinkage stress quilt, because the maximum static friction force of left side district 5A is less than the maximum static friction force sum of middle district 5C He You district 5B, left piezo-activator 2A barycenter moves to right; Follow right piezo-activator 2B and be carried out elongation signal and left piezo-activator 2A state is constant, the frictional force of district 5C He Zuo district 5A joins together to push to right-hand in the effect bottom right district 5B of right piezo-activator 2B elongation stress quilt, because the maximum static friction force of right district 5B is less than the maximum static friction force sum of middle district 5C He Zuo district 5A, right piezo-activator 2B barycenter moves to right; Follow that left piezo-activator 2A is carried out the elongation signal and simultaneously right piezo-activator 2B be carried out contraction signal, two disjunctors, 4 state restorations, at this moment, the middle district 5C of two disjunctors 4 because of its maximum static friction force less than left side district 5A He You district 5B maximum static friction force sum, will move right; So far, 4 deformation of two disjunctors have been restored but barycenter moves to right, and so repetition can promote two disjunctors 4 right lateral step by step.Similarly, if the deformation of left and right sides piezo-activator is in proper order: the elongation of left piezo-activator and right piezo-activator be constant-and the constant and right piezo-activator of left piezo-activator contraction-left and right sides piezo-activator restores simultaneously, two disjunctors, 4 barycenter are to moving to left, and so repetition can promote two disjunctors left lateral step by step.
Above-mentioned is that two disjunctors are respectively distinguished maximum static friction force all less than the situation of other two district's maximum static friction force sums.If two disjunctor Zhong Zuo districts, Zhong Qu He You (but not less than) two the district's maximum static friction force sums in addition that have the maximum static friction force in a district to equal in the district, then this district is united pulling by other two districts and the time can oppositely spur too in addition and uniting of two districts make two disjunctor barycenter move not quite under stress, but the maximum static friction force that should distinguish must be greater than the maximum static friction force in remaining that district with the maximum static friction force addition in any one district in other two districts,, this remaining that district can oppositely not spur the associating in all the other two districts so always being pulled, so left-handed form become right invariant-right reverse strain left side constant-about restore simultaneously that though to have a step that the barycenter of two disjunctors is moved contribution in this three step little, but still there was contribution in two steps in addition, this can make the total displacement in two each step of disjunctor non-vanishing equally, and two disjunctors are moved towards direction initialization.When the maximum static friction force in each district of two disjunctors equated, the walking step was big and strong, drives the efficient height.
In concrete the enforcement, pressure, confficient of static friction, pressure active area satisfy the frictional force relation between each district and matrix by regulating.
Embodiment 2: application of force build driver
If the gravity with two disjunctors itself produces frictional force and then produces motive force as its pressure on matrix, this motive force is often smaller, can not satisfy the needs of a lot of reality, particularly need be when vertical direction drives.Present embodiment is to press against on the matrix by adding force body, with force body the Zuo Qu of two disjunctors, middle district and/or the right side being distinguished, and this makes two disjunctors produce bigger pressure with the bigger frictional force of generation to matrix, and then produces bigger thrust.
As Fig. 3, two disjunctors 4 are placed on the matrix 6 and do in order to force body 7 in Zuo Qu, district and/or the right district of two disjunctors 4, this force body 7 is pressed onto two disjunctors 4 on the matrix 6 with elastic force, gravity and/or electromagnetic force and makes two disjunctors 4 all with matrix 6 the pressure effect be arranged at its left side district 5A, middle district 5C He You district 5B.Force body in each district can be one or the different objects that separates or is the part of matrix, and operation principle is with embodiment 1.
Embodiment 3: stressed pad type driver
As Fig. 4; present embodiment be on the left side district of two disjunctors 4 5A, middle district 5C and/or right district 5B, fix stressed pad 8 on the basis of the foregoing description and with stressed pad 8 and matrix 6 with the pressure effect; in order to protect two disjunctors 4 or matrix 6; change the pressure between each district and the matrix 6, the active area that changes this pressure, change confficient of static friction, in a word the maximum static friction force between scalable two disjunctors, 4 each district and the matrix 6.The pressure of and the matrix original of the pressure between this stressed pad 8 and the matrix 6 from its location, also can comprise its gravity, electromagnetic force, resilient clamp power to the active force that matrix produces from itself, also can it be pressed on the pressure of matrix from outer force body, or from the resilient clamp power of matrix to it.
The hardness of this stressed pad 8 and deformation direction must make this stressed pad 8 this frictional force direction of frictional force effect lower edge between itself and matrix 6 deformation less than about the deformation of two piezo-activators, otherwise this stressed pad 8 just can not rely on about deformation slippage walking on matrix 6 of two piezo-activators.
Embodiment 4: cartridge type matrix driver
Present embodiment is matrix to be made tubular and with two disjunctors cover within it on above-mentioned basis, sees Fig. 4, and matrix 6 and force body 7 are a tubular integral body, and two disjunctors 4 are placed in it.Also can fix the stressed pad 8 that the pressure effect is arranged with the inwall of tubular matrix 6 on left side district 5A, middle district 5C and/or the right district 5B.
Embodiment 5: the cast driver
As Fig. 5, with two coaxial and two disjunctors 4 fixedly connected formation hollow before and after flexible independent controlled tubular piezo-electric actuator 2A, the 2B of axis direction, matrix 6 is for passing the axostylus axostyle of this two disjunctor 4.Also can fix the stressed pad 8 that the pressure effect is arranged with matrix 6 in the Zuo Qu of two disjunctor actuators 4, middle district and/or the right district.
Embodiment 6: controller
Referring to Fig. 6, waveform generator WG produces periodic zero passage square wave, sine wave, triangular wave or trapezoidal wave, this waveform is defeated by the first buffer BUF1 and the second buffer BUF2 simultaneously, but being cushioned the back by them forms the signal of two-way independent process and can not influence each other, wherein to export the first half-wave rectifier RT1 to be low level signal with signal that keeps half period and the signal of keeping other half period to the first buffer BUF1, constitute first via control signal V1
The second buffer BUF2 exports the phase shift rectifier PR that is made of phase-shifter PS and second rectifier RT2 series connection to, wherein the position of the phase-shifter PS and the second rectifier RT2 can exchange, the phase shift of phase-shifter PS is made as 90 degree, and the second buffer BUF2 signal forms the second tunnel control signal V2 after 90 degree phase shifts and halfwave rectifier.
Be to realize the phase shift of the degree of 90 between first, second road control signal above with one 90 degree phase-shifter, also the above-mentioned first buffer BUF1 and the second buffer BUF2 can be exported to two phase shift rectifiers respectively and make that these two phase shift rectifiers phase difference each other is 90 degree, by first, second road control signal that these two phase shift rectifiers provide respectively, this can realize rectification and 90 degree phase shifts equally.
The deformation of two piezo-activators about two path control signal V1 and V2 are used for controlling respectively, the two waveform is identical, phase phasic difference 90 degree, 1/4 period T 2 that has that forms between the two as shown in Figure 7 is first via rising U2 the second tunnel decline D2 simultaneously, this stage corresponding to about two piezo-activator concurrent deformations restore, two 1/4 period T 1 of these 1/4 period T, 2 both sides, T3 is respectively the first via and remains unchanged simultaneously and to rise on the second the tunnel and the second the road remain unchanged simultaneously that the first via descends, and corresponds respectively to simultaneously right piezo-activator elongation and the right piezo-activator left piezo-activator contraction of while of remaining stationary of remaining stationary of left piezo-activator.Realized moving of two disjunctors.About elongation on two piezo-activators and contraction signal exchange and can realize oppositely moving.
Present embodiment is with rising signals representative elongation, shrinks with the dropping signal representative; Also can be for opposite polarity piezo-activator with rising signals as shrinking control signal, with dropping signal as the elongation control signal.
The waveform of present embodiment is example with the triangular wave, but also is applicable to periodic zero passage sine wave, square wave and trapezoidal wave.
Also comprise in concrete the enforcement:
Piezo-activator is the piezoelectrics that piezoelectric is made, and can be sheet (piezo plate), bulk, tubulose, column, ring-type, piezoelectric stack (piezo stack), shear piezoelectricity (shear piezo) actuator and combination thereof.
Elongation is two kinds of relative deformed state of piezo-activator deformation with shrinking, and can be the variation of length, also can be the variation of angle, just belongs to the latter such as shearing piezo-activator.
About the position and the shape of two each electrodes of piezo-activator can be any, as long as separately the deformation on same direction of two piezo-activators is independent controlled about guaranteeing.
Force body is for producing the object of pressure.
Force body and matrix can be that the different piece of same object also can be a different objects.
Claims (10)
1, dual voltage electrical body nano positioning and voltage electrical driver is characterized in that:
About two piezo-activators along the deformation direction with the independent separately two controlled disjunctors of the fixedly connected formation of mode of machinery series connection;
Described two disjunctors are that the boundary is divided into three districts along its deformation direction with the middle section of each piezo-activator, comprise the Zhong Qu between two middle sections and divide Zuo Qu and the You Qu that is in its both sides, be provided with and described two disjunctors matrix for being slidingly matched on its deformation direction, the normal pressure that two disjunctors or the stressed pad that is fixed thereon and matrix are pressed mutually is set on perpendicular to two disjunctor deformation directions, form frictional force respectively during two disjunctor deformation in matrix and three districts of two disjunctors, wherein the maximum static friction force in any district is not more than other two district's maximum static friction force sums;
Frictional force between described matrix and three districts of two disjunctors is formed between matrix and two disjunctors and/or between matrix and the stressed pad.
2, dual voltage electrical body nano positioning and voltage electrical driver according to claim 1, it is characterized in that in described two disjunctors about the piezoelectrics of two piezo-activators be the split setting.
3, dual voltage electrical body nano positioning and voltage electrical driver according to claim 1, it is characterized in that in described two disjunctors about the piezoelectrics of two piezo-activators be provided with for whole.
4, dual voltage electrical body nano positioning and voltage electrical driver according to claim 1 is characterized in that being provided with sleeve structure, and described sleeve structure has following two kinds of forms at least:
A, described matrix are outer tube, and described two disjunctors are parallel shaft-like two disjunctors that are placed in it;
B, described two disjunctors are outer tube, and described matrix is the parallel shaft-like matrix that is placed in it.
5, dual voltage electrical body nano positioning and voltage electrical driver according to claim 1 is characterized in that with described matrix be supporter, and two disjunctors or stressed pad are placed on the described matrix, and described normal pressure comes from the gravity of two disjunctors or stressed pad; Or come from electromagnetic force between two disjunctors or stressed pad and matrix; Or come from resilient clamp power between two disjunctors or stressed pad and matrix.
6, dual voltage electrical body nano positioning and voltage electrical driver according to claim 1, it is characterized in that on described two disjunctors or stressed pad, force body being set, described force body is with himself gravity, or electromagnetic force, or resilient clamp power is forming normal pressure between two disjunctors and the matrix or between stressed pad and matrix.
7, dual voltage electrical body nano positioning and voltage electrical driver according to claim 1 is characterized in that the maximum static friction force in described Zuo Qu, You Qu He Zhong district equates.
8, the control method of the described dual voltage electrical body nano positioning and voltage electrical driver of a kind of claim 1, two piezo-activators about it is characterized in that controlling respectively with following sequential, finish a driver stepping to the right:
Control signal is shunk in a, the input of left piezo-activator, and right piezo-activator input control signal remains unchanged simultaneously;
B, left piezo-activator input control signal remain unchanged, simultaneously right piezo-activator input elongation control signal;
C, left piezo-activator input elongation control signal, control signal is shunk in simultaneously right piezo-activator input.
9, the controller of the described dual voltage electrical body nano positioning and voltage electrical driver of a kind of claim 1 is characterized in that being provided with waveform generator, and the output signal one tunnel of waveform generator is successively through buffer and half-wave rectifier output control voltage V1; Connect with half-wave rectifier after the phase shift rectifier that constitutes through buffer with by phase-shifter successively in another road, output control voltage V2, the phase shift that phase-shifter is set is 90 degree, with described control voltage V1 and V2 respectively as the electrode input signal of two piezo-activators about in two disjunctors.
10, the controller of the described dual voltage electrical body nano positioning and voltage electrical driver of a kind of claim 1, it is characterized in that being provided with waveform generator, the output signal of waveform generator is divided into two-way, two paths of signals at first passes through buffer, export control voltage V1 and control voltage V2 respectively through the phase shift rectifier again, it is 90 degree that phase difference between the two-way phase shift rectifier is set, with described control voltage V1 and V2 respectively as two piezo-activator electrode input signals about in two disjunctors.
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| CN102245348A (en) * | 2008-10-09 | 2011-11-16 | 纽卡斯尔创新有限公司 | A positioning system and method |
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Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6175182B1 (en) * | 1998-03-18 | 2001-01-16 | Penn State Research Foundation | Pseudo-shear mode actuator |
| CN2535972Y (en) * | 2002-03-21 | 2003-02-12 | 浙江大学 | Surface elastic wave motor |
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| CN1758523A (en) * | 2004-10-09 | 2006-04-12 | 西北工业大学 | Magnetostriction linear motion driver |
-
2006
- 2006-12-15 CN CNB2006101614773A patent/CN100547899C/en not_active Expired - Fee Related
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| CN102245348A (en) * | 2008-10-09 | 2011-11-16 | 纽卡斯尔创新有限公司 | A positioning system and method |
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| US9018823B2 (en) | 2009-03-18 | 2015-04-28 | Forschungszentrum Juelich Gmbh | Apparatus and method for electromechanical positioning |
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| CN102299662A (en) * | 2011-09-01 | 2011-12-28 | 中国科学技术大学 | Low voltage control method for inertia piezoelectric motor |
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