CN102347318B - All-piezoelectric abreast pushing three-friction-force stepper and scanning probe microscope body - Google Patents
All-piezoelectric abreast pushing three-friction-force stepper and scanning probe microscope body Download PDFInfo
- Publication number
- CN102347318B CN102347318B CN 201110255691 CN201110255691A CN102347318B CN 102347318 B CN102347318 B CN 102347318B CN 201110255691 CN201110255691 CN 201110255691 CN 201110255691 A CN201110255691 A CN 201110255691A CN 102347318 B CN102347318 B CN 102347318B
- Authority
- CN
- China
- Prior art keywords
- piezoelectrics
- tubular
- pedestal
- steppers
- free end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses an all-piezoelectric abreast pushing three-friction-force stepper. A first piezoelectric body and a second piezoelectric body are arranged in parallel according to the flexible direction and are fixedly erected on a first substrate abreast to form a first driving structure. The all-piezoelectric abreast pushing three-friction-force stepper is characterized in that a third piezoelectric body and a fourth piezoelectric body are arranged in parallel according to the flexible direction and are fixedly erected on a second substrate abreast to form a second driving structure; the piezoelectric flexible directions of the first driving structure and the second driving structure are same; in the direction, the first driving structure and the second driving structure are mutually cooperated to slide; in the direction vertical to the sliding direction, positive pressure for pressing the first substrate and the second substrate, the positive pressure for pressing the free end of the first piezoelectric body and the free end of the third piezoelectric body and the positive pressure for pressing the free end of the second piezoelectric body and the free end of the fourth piezoelectric body are arranged; and in the maximum static fiction generated by the three positive pressures, any one maximum static friction force is smaller than the sum of other two maximum static friction. The all-piezoelectric abreast pushing three-friction-force stepper has the advantages that thrust is greatly enhanced, and drift is greatly reduced.
Description
Technical field
The present invention relates to a kind of piezoelectricity stepper, particularly the three frictional force steppers that promote side by side of a kind of slide bar as mover total head electricity that also can carry out the piezoelectricity boosting and with the scanning probe microscopy mirror body that it is made belong to the piezoelectric positioner technical field.
Background technology
Piezo-electric motor is widely used in the camera optical path adjusting because having simultaneously the large stroke of the above macroscopic view of millimeter and nanometer even Ethylmercurichlorendimide level superhigh precision, the focusing of microscope camera lens nano-precision, the scanning probe microscopy of atom definition, and contemporary optics, microelectronics is made, Aero-Space, the ultraprecise machine-building, Micro-Robot, seismic survey, biological, medical science, genetic engineering (is built virtue referring to Jilin University's Piezoelectric Driving and control technology research center Liu, Yang Zhigang, Cheng Guangming and Hua Shunming were published in the paper that is entitled as " the accurate linear stepping motor research of Piezoelectric Driving " of the 102nd page of " Proceedings of the CSEE " the 004th phase of the 24th volume in 2004), be very important nanosecond science and technology and national strategy major fields instrument.
The kind of piezo-electric motor is a lot, but all is to rely on piezoelectrics that mover is produced the piezoelectric movement that repeats to add up to promote mover with respect to the stator stepping on the principle.Desirable piezo-electric motor requires to have simultaneously atom level positioning accuracy, the large stroke of grade, from ultralow temperature to the large operation temperature area, high thrust, small size, the Low Drift Temperature that are higher than room temperature, simple in structure firmly and control simple and reliable.But this is very difficult, does not still have this piezo-electric motor of dreaming of in the prior art.This mainly is because these much are conflicting in requiring, and is difficult to be in harmonious proportion, for example: high thrust and small size, high thrust and high accuracy, small size and sound construction, large stroke and Low Drift Temperature etc.
In order to solve these contradiction, the patent application of two nearly desirable piezo-electric motor had been proposed before us: the three frictional force steppers that (1) double piezoelectrics promotes side by side and scanning probe microscopy (invention patent mandate number: ZL200910116492.X), (application for a patent for invention number: 201010254442.0) of the three frictional force piezoelectricity steppers of (2) nested pair of piezo tube promotion and step-scan device.In the present invention, we further propose will slide bar (that is: mover) wherein also to be designed to piezoelectricity on the basis of these two inventions, and can cooperate boosting for stepping.This not only can make thrust double (because this moment, slide bar also had the promotion ability), temperature is floated greatly and is reduced (because slide bar is all made by piezoelectric with the actuator that promotes slide bar, expand with heat and contract with cold and offset), but do not increase the unfavorable factors such as size and sophistication.
Summary of the invention
Purpose of the present invention: for thrust and the temperature resistance that improves piezo-electric motor under the condition that does not increase size and sophistication floats ability, it also is three frictional force stepper and the scanning probe microscopies thereof that piezoelectrics and the total head electricity that can carry out the piezoelectricity boosting promote side by side that a kind of slide bar is provided.
The present invention realizes that the technical scheme of above-mentioned purpose is:
The three frictional force steppers that total head electricity of the present invention promotes side by side, comprise the first and second piezoelectrics, the first pedestal, described the first and second piezoelectrics be arranged in parallel abreast by flexible direction, and fixed station stands on the first pedestal, consist of the first Drive Structure, it is characterized in that also comprising the third and fourth piezoelectrics, the second pedestal, described the third and fourth piezoelectrics be arranged in parallel abreast by flexible direction, and fixed station stands on the second pedestal, consist of the second Drive Structure, the flexible direction of the piezoelectricity of the first and second Drive Structure is set to unanimously, be glide direction, in this side up the first and second Drive Structure cooperatively interact slip, in the normal pressure that normal pressure that the first pedestal and the second pedestal are pressed mutually is set perpendicular to this glide direction and the first piezoelectrics free end and the 3rd piezoelectrics free end are pressed mutually and normal pressure that the second piezoelectrics free end and four piezoelectrics free end are pressed mutually, in the maximum static friction force that these three normal pressures produce, any maximum static friction force is less than other two maximum static friction force sums.
The design feature of the three frictional force steppers that double piezoelectrics of the present invention promotes side by side also is:
Described the first pedestal is by the first pedestal elasticity and/or the second pedestal elasticity and/or set up elastomer and press mutually with the second pedestal elasticity, described the first piezoelectrics free end is by the first piezoelectrics free end elasticity and/or the 3rd piezoelectrics free end elasticity and/or set up elastomer and press mutually with the 3rd piezoelectrics free end elasticity, and described the second piezoelectrics free end is by the second piezoelectrics free end elasticity and/or four piezoelectrics free end elasticity and/or set up elastomer and press mutually with four piezoelectrics free end elasticity.
Described the first and second piezoelectrics are whole installation, perhaps described the first and second piezoelectrics and the first pedestal three are whole installation, perhaps described the third and fourth piezoelectrics are whole installation, and perhaps described the third and fourth piezoelectrics and the second pedestal three are whole installation.
Described the first and second piezoelectrics are half tube shape of cutting open along the tubular bodies axis, they enclose fixed station and stand on annular the first pedestal, consist of tubular the first Drive Structure, described the third and fourth piezoelectrics are half tube shape of cutting open along the tubular bodies axis, they enclose fixed station and stand on annular the second pedestal, consist of tubular the second Drive Structure, described tubular the second Drive Structure is placed within tubular the first Drive Structure, and inner two and half tubular face outside two and half tubular.
Described the first and second piezoelectrics be respectively cut open along tubular bodies axis symmetry four 1/4th in tubular relative two 1/4th tubular right, they enclose fixed station and stand on annular the first pedestal, consist of tubular the first Drive Structure, described the third and fourth piezoelectrics be respectively cut open along tubular bodies axis symmetry four 1/4th in tubular relative two 1/4th tubular right, they enclose fixed station and stand on annular the second pedestal, consist of tubular the second Drive Structure, described tubular the second Drive Structure is placed within tubular the first Drive Structure, and inner four 1/4th tubular face outside four 1/4th tubular.
Described first, second third and fourth piezoelectrics or stand into square formation perhaps stand into formation.
Described first, second third and fourth piezoelectrics are that piezoelectric patches stacks.
The three frictional force steppers that the present invention is promoted side by side by described double piezoelectrics are made the technical scheme that scanning probe microscopy mirror body adopts: comprise the three frictional force steppers that piezoelectric scanning pipe and described total head electricity promote side by side, one end of this piezoelectric scanning pipe is fixed in the free end of the 3rd piezoelectrics of the three frictional force steppers that described total head electricity promotes side by side, this piezoelectric scanning pipe axially and the glide direction of the three frictional force steppers that promote side by side of this total head electricity consistent.
The present invention also is by the design feature of the scanning probe microscopy mirror body that the three frictional force steppers that described double piezoelectrics promotes are side by side made: comprise the three frictional force steppers that piezoelectric scanning pipe and described total head electricity promote side by side, one end of this piezoelectric scanning pipe is fixed on the second pedestal of the three frictional force steppers that described total head electricity promotes side by side, this piezoelectric scanning pipe axially and the glide direction of the three frictional force steppers that promote side by side of this total head electricity consistent.
The operation principle of the three frictional force steppers that total head electricity of the present invention promotes side by side is:
Be arranged abreast referring to accompanying drawing 1, the first and second piezoelectrics by flexible direction that fixed station stands on the first pedestal in parallel, consist of the first Drive Structure; The third and fourth piezoelectrics be arranged in parallel abreast by flexible direction, and fixed station stands on the second pedestal, consist of the second Drive Structure, the flexible direction of the piezoelectricity of the first and second Drive Structure is set to unanimously, be glide direction, in this side up the first and second Drive Structure cooperatively interact slip, in the normal pressure that normal pressure that the first pedestal and the second pedestal are pressed mutually is set perpendicular to this glide direction and the first piezoelectrics free end and the 3rd piezoelectrics free end are pressed mutually and normal pressure that the second piezoelectrics free end and four piezoelectrics free end are pressed mutually, in the maximum static friction force that these three normal pressures produce, any maximum static friction force is less than other two maximum static friction force sums.During work, first initial state is set to the first and second piezoelectrics and is all contraction state, and the third and fourth piezoelectrics are all elongation state.Then, these four piezoelectrics are simultaneously toward opposite flexible attitude deformation: the first and second piezoelectrics extend synchronously, simultaneously, and the third and fourth piezoelectrics synchronous.Because the maximum static friction force f1 between the first and the 3rd piezoelectrics free end and second and the four piezoelectrics free end between maximum static friction force f2 be in the same way, their sums (f1+f2) are greater than the maximum static friction force f3 between the first and second pedestals of with it antagonism, so just hauled the generation relative displacement between the first and second pedestals, that is: the step goes a step further.Then, the first and the 3rd piezoelectrics simultaneously toward separately initial state deformation and second and the four piezoelectrics state remain unchanged, at this moment, to produce relative displacement between the first and the 3rd piezoelectrics free end, thereby the first and the 3rd piezoelectrics can both be got back to their initial states separately, because the maximum static friction force f1 between their free ends is less than (antagonism) two maximum static friction force f2 and f3 sums in the same way in addition.Then, second and four piezoelectrics simultaneously toward separately initial state deformation and the first and the 3rd piezoelectrics state remains unchanged, at this moment, second and the four piezoelectrics free end between will produce relative displacement, thereby second and four piezoelectrics can both get back to their initial states separately because the maximum static friction force f2 between their free ends is less than (antagonism) two maximum static friction force f1 and f3 sums in the same way in addition.Since first, second, third and four piezoelectrics all can get back to their initial states separately, and between the first and second pedestals relative displacement has occured, this process just can repeat, and realizes stepping.In like manner, stepping also can be toward carrying out in the other direction.
In above-mentioned stepping process, the second Drive Structure can be regarded mover (that is: slide bar) as, its stretching motion always with the stretching motion of the second Drive Structure in opposite directions, this can produce larger relative displacement bimorph with respect to the common slide bar that does not have the piezoelectricity Telescopic, also can produce larger thrust.In addition, because the first and second Drive Structure all are that piezoelectric is made and structural similarity, temperature between them is floated and can be cancelled out each other well, cause at temperature fluctuation larger, even when on purpose carrying out alternating temperature, fluctuation (uncontrollable) can not occur between them relatively move.This has just realized purpose of the present invention.
The above-mentioned normal pressure that the first and second Drive Structure free ends are pressed mutually and the normal pressure that the first and second pedestals are pressed mutually can be passed through elastomer, magnetic and/or electrified body realize.These elastomers, magnetic and/or electrified body can press the side among the both sides to fix with above-mentioned mutually, and be perhaps unfixing with both sides, perhaps simply is exactly a part of a side.
Above-mentioned the first and second piezoelectrics can be the different piece of complete piezoelectrics, and the first and second piezoelectrics can be the different piece of complete piezoelectrics with the first pedestal three also, as long as the flexible independence of the first and second piezoelectrics is controlled.Above-mentioned the third and fourth piezoelectrics can be the different piece of complete piezoelectrics, and the third and fourth piezoelectrics can be the different piece of complete piezoelectrics with the second pedestal three also, as long as the flexible independence of the third and fourth piezoelectrics is controlled.
The first and second piezoelectrics in above-mentioned the first Drive Structure can be for two and half tubular, and they enclose on the first pedestal that fixed station stands in annular and consist of tubular the first Drive Structure; And the second Drive Structure also is such tubular-shaped structures, and is placed within tubular the first Drive Structure, and inner two and half tubular face outside two and half tubular.This mutually nested tubular-shaped structures is highly symmetrical, can further eliminate temperature drift radially.
The first and second piezoelectrics in above-mentioned the first Drive Structure also can be respectively cut open along tubular bodies axis symmetry four 1/4th in tubular relative two 1/4th tubular right, they enclose fixed station and stand on annular the first pedestal, consist of tubular the first Drive Structure, and the second Drive Structure also is such tubular-shaped structures, and be placed within tubular the first Drive Structure, and inner four 1/4th tubular face outside four 1/4th tubular.This mutually nested tubular-shaped structures also is highly symmetrical, also can eliminate temperature drift radially.
Above-mentioned first, second third and fourth piezoelectrics also can stand into square formation or formation, and first, second third and fourth piezoelectrics can be piezoelectric patches and stack (piezoelectric stack) to increase the thrust of each piezoelectric patches.
The three frictional force steppers that above-mentioned total head electricity promotes side by side can be made into scanning probe microscopy mirror body: set up the piezoelectric scanning pipe, the one end or be fixed in described stepper the 3rd piezoelectrics free end or be fixed on the second pedestal of described stepper this piezoelectric scanning pipe axially consistent with this glide direction of advancing device.
Can find out according to above-mentioned principle, compared with the prior art, beneficial effect of the present invention is embodied in:
(1) under the condition that does not increase size and sophistication, because mover also has the promotion ability, so gross thrust doubles.Certainly, also corresponding improvement of other some relevant performances: step-length, stepping rate, starting resistor.
(2) under the condition that does not increase size and sophistication, because mover all is to be made by piezoelectric with the piezo-activator that drives it, expanding with heat and contract with cold between them offsets, and greatly reduces so temperature is floated, and this application to atom definition is very important.Certainly, also corresponding improvement of other some relevant performances: positioning accuracy, position stability.
Because above-mentioned advantage, the present invention is just more near desirable stepper.
Description of drawings
Fig. 1 is the structural representation of the three frictional force steppers that promote side by side of basic model total head electricity of the present invention.
Fig. 2 is the structural representation of the three frictional force steppers that promote side by side of the present invention's 1/4th cast total head electricity.
Fig. 3 is the structural representation of the three frictional force steppers that promote side by side of square formation type total head electricity of the present invention.
Fig. 4 is the perpendicular structural representation that stacks the three frictional force steppers that type total head electricity promotes side by side of the present invention.
Fig. 5 is the horizontal structural representation that stacks the three frictional force steppers that type total head electricity promotes side by side of the present invention.
Number in the figure: 1 first piezoelectrics, 2 second piezoelectrics, 3 the 3rd piezoelectrics, 4 four piezoelectrics, 5 first pedestals, 6 second pedestals, 7 elastomers, 8 glide directions.
Below the invention will be further described by embodiment and structure accompanying drawing.
Embodiment
Embodiment 1: the three frictional force steppers that basic model total head electricity promotes side by side
Referring to accompanying drawing 1, the three frictional force steppers that basic model total head electricity promotes side by side comprise the first piezoelectrics 1 and the second piezoelectrics 2, the first pedestal 5, described the first piezoelectrics 1 and the second piezoelectrics 2 stand on the first pedestal 5 by the flexible direction fixed station that be arranged in parallel abreast, consist of the first Drive Structure, it is characterized in that also comprising the 3rd piezoelectrics 3 and four piezoelectrics 4, the second pedestal 6, described the 3rd piezoelectrics 3 and four piezoelectrics 4 stand on the second pedestal 6 by the flexible direction fixed station that be arranged in parallel abreast, consist of the second Drive Structure, the flexible direction of the piezoelectricity of the first and second Drive Structure is set to unanimously, be glide direction 8, in this side up the first and second Drive Structure cooperatively interact slip, in the normal pressure that normal pressure that the first pedestal 5 and the second pedestal 6 are pressed mutually is set perpendicular to this glide direction and the first piezoelectrics 1 free end and the 3rd piezoelectrics 3 free ends are pressed mutually and normal pressure that the second piezoelectrics 2 free ends and four piezoelectrics 4 free ends are pressed mutually, in the maximum static friction force that these three normal pressures produce, any maximum static friction force is less than other two maximum static friction force sums.
During work, first initial state is set to the first and second piezoelectrics 1,2 and is all contraction state, and the third and fourth piezoelectrics 3,4 are all elongation state.Then, these four piezoelectrics are simultaneously toward opposite flexible attitude deformation: the first and second piezoelectrics 1,2 extend synchronously, simultaneously, and the third and fourth piezoelectrics 3,4 synchronous.Because the first and the 3rd piezoelectrics 1, maximum static friction force f1 between 3 free ends and second and four piezoelectrics 2, maximum static friction force f2 between 4 free ends is in the same way, their sums (f1+f2) are greater than the first and second pedestals 5 that resist with it, 6 maximum static friction force f3, so just hauled the generation relative displacement between the first and second pedestals 5,6, that is: the step goes a step further.Then, the first and the 3rd piezoelectrics 1,3 simultaneously toward separately initial state deformation and second and four piezoelectrics 2,4 states remain unchanged, at this moment, and the first and the 3rd piezoelectrics 1, to produce relative displacement between 3 free ends, thereby the first and the 3rd piezoelectrics 1,3 can both be got back to their initial states separately, because the maximum static friction force f1 between their free ends is less than (antagonism) two maximum static friction force f2 and f3 sums in the same way in addition.Then, second and four piezoelectrics 2,4 simultaneously toward separately initial state deformation and the first and the 3rd piezoelectrics 1,3 states remain unchanged, at this moment, and second and four piezoelectrics 2, to produce relative displacement between 4 free ends, thereby second and four piezoelectrics 2,4 can both get back to their initial states separately because the maximum static friction force f2 between their free ends is less than (antagonism) two maximum static friction force f1 and f3 sums in the same way in addition.Since first, second, third and four piezoelectrics 1,2,3,4 all can get back to their initial states separately, and relative displacement occured in the first and second pedestals 5,6, this process just can repeat, and realizes stepping.In like manner, stepping also can be toward carrying out in the other direction.
In above-mentioned stepping process, the second Drive Structure can be regarded mover (that is: slide bar) as, its stretching motion always with the stretching motion of the second Drive Structure in opposite directions, this can produce larger relative displacement bimorph with respect to the common slide bar that does not have the piezoelectricity Telescopic, also can produce larger thrust.In addition, because the first and second Drive Structure all are that piezoelectric is made and structural similarity, temperature between them is floated and can be cancelled out each other well, cause at temperature fluctuation larger, even when on purpose carrying out alternating temperature, fluctuation (uncontrollable) can not occur between them relatively move.This has just realized purpose of the present invention.
The normal pressure that can select to allow the first pedestal 5 and the second pedestal 6 press mutually equals normal pressure that the first piezoelectrics 1 free end and the 3rd piezoelectrics 3 free ends press mutually and equals the normal pressure that the second piezoelectrics 2 free ends and four piezoelectrics 4 free ends are pressed mutually, thereby when coefficient of friction equates, the maximum static friction force that these three normal pressures produce is equal, and this is to satisfy any maximum static friction force less than an example of other two maximum static friction force sums.
The above-mentioned normal pressure that the first and second Drive Structure free ends are pressed mutually and the normal pressure that the first and second pedestals 5,6 are pressed mutually can be passed through elastomer, magnetic and/or electrified body realize.These elastomers, magnetic and/or electrified body can press the side among the both sides to fix with above-mentioned mutually, and be perhaps unfixing with both sides, perhaps simply is exactly a part of a side.
Above-mentioned the first and second piezoelectrics 1,2 can be the different piece of complete piezoelectrics, referring to accompanying drawing 2, the first and second piezoelectrics 1,2 can be the different piece of complete piezoelectrics with the first pedestal 5 threes also, referring to accompanying drawing 2, as long as controlled the getting final product of flexible independence of the first and second piezoelectrics 1,2.Above-mentioned the third and fourth piezoelectrics 3,4 can be the different piece of complete piezoelectrics, referring to accompanying drawing 2, the third and fourth piezoelectrics 3,4 can be the different piece of complete piezoelectrics with the second pedestal 6 threes also, referring to accompanying drawing 2, as long as controlled the getting final product of flexible independence of the third and fourth piezoelectrics 3,4.Embodiment 2: the three frictional force steppers that elastic-type total head electricity promotes side by side
In the above among the embodiment 1, described the first pedestal 5 is by the first pedestal 5 elasticity and/or the second pedestal 6 elasticity and/or set up elastomer 7 and press mutually with the second pedestal 6 elasticity, described the first piezoelectrics 1 free end is by the first piezoelectrics 1 free end elasticity and/or the 3rd piezoelectrics 3 free end elasticity and/or set up elastomer 7 and press mutually with the 3rd piezoelectrics 3 free end elasticity, and described the second piezoelectrics 2 free ends are by the second piezoelectrics 2 free end elasticity and/or four piezoelectrics 4 free end elasticity and/or set up elastomer 7 and press mutually with four piezoelectrics 4 free end elasticity.
The three frictional force steppers that 3: half cast total heads of embodiment electricity promotes side by side
In above-described embodiment 1 and 2, the first and second piezoelectrics in the first Drive Structure can be for two and half tubular, and they enclose on the first pedestal 5 that fixed station stands in annular and consist of tubular the first Drive Structure; And the second Drive Structure also is such tubular-shaped structures, and is placed within tubular the first Drive Structure, and inner two and half tubular face outside two and half tubular.This mutually nested tubular-shaped structures is highly symmetrical, can further eliminate temperature drift radially.The three frictional force steppers that embodiment 4: four/one cast total head electricity promotes side by side
In above-described embodiment 1 and 2, the first and second piezoelectrics 1 in the first Drive Structure, 2 also can be respectively cut open along tubular bodies axis symmetry four 1/4th in tubular relative two 1/4th tubular right, referring to accompanying drawing 2, they enclose fixed station and stand on annular the first pedestal 5, consist of tubular the first Drive Structure, and the second Drive Structure also is such tubular-shaped structures, and be placed within tubular the first Drive Structure, and inner four 1/4th tubular face outside four 1/4th tubular.This mutually nested tubular-shaped structures also is highly symmetrical, also can eliminate temperature drift radially.
Embodiment 4: the three frictional force steppers that square formation or formation type total head electricity promote side by side
In above-described embodiment, first, second third and fourth piezoelectrics 1,2,3,4 can stand into square formation (referring to accompanying drawing 3) or formation (referring to accompanying drawing 1), first, second third and fourth piezoelectrics 1,2,3,4 can be piezoelectric patches stacks (piezoelectric stack), referring to accompanying drawing 4 and accompanying drawing 5, to increase the thrust of each piezoelectric patches.
Embodiment 5: the scanning probe microscopy mirror body that the three frictional force steppers that the total head electricity promotes are side by side made
The three frictional force steppers that above-mentioned total head electricity promotes side by side can be made into scanning probe microscopy mirror body: set up the piezoelectric scanning pipe, the one end or be fixed in described stepper the 3rd piezoelectrics 3 free end or be fixed on the second pedestal 6 of described stepper this piezoelectric scanning pipe axially consistent with this glide direction 8 of advancing device.
Claims (9)
1. three frictional force steppers that the total head electricity promotes side by side, comprise the first and second piezoelectrics, the first pedestal, described the first and second piezoelectrics be arranged in parallel abreast by flexible direction, and fixed station stands on the first pedestal, consist of the first Drive Structure, it is characterized in that also comprising the third and fourth piezoelectrics, the second pedestal, described the third and fourth piezoelectrics be arranged in parallel abreast by flexible direction, and fixed station stands on the second pedestal, consist of the second Drive Structure, the flexible direction of the piezoelectricity of the first and second Drive Structure is set to unanimously, be glide direction, in this side up the first and second Drive Structure cooperatively interact slip, in the normal pressure that normal pressure that the first pedestal and the second pedestal are pressed mutually is set perpendicular to this glide direction and the first piezoelectrics free end and the 3rd piezoelectrics free end are pressed mutually and normal pressure that the second piezoelectrics free end and four piezoelectrics free end are pressed mutually, in the maximum static friction force that these three normal pressures produce, any maximum static friction force is less than other two maximum static friction force sums.
2. the three frictional force steppers that promote side by side of described total head electricity according to claim 1, it is characterized in that described the first pedestal by the first pedestal elasticity and/or the second pedestal elasticity and/or set up elastomer and press mutually with the second pedestal elasticity, described the first piezoelectrics free end is by the first piezoelectrics free end elasticity and/or the 3rd piezoelectrics free end elasticity and/or set up elastomer and press mutually with the 3rd piezoelectrics free end elasticity, and described the second piezoelectrics free end is by the second piezoelectrics free end elasticity and/or four piezoelectrics free end elasticity and/or set up elastomer and press mutually with four piezoelectrics free end elasticity.
3. the three frictional force steppers that promote side by side of described total head electricity according to claim 1 and 2, it is characterized in that described the first and second piezoelectrics are formed in one, perhaps described the first and second piezoelectrics and the first pedestal three are formed in one, perhaps described the third and fourth piezoelectrics are formed in one, and perhaps described the third and fourth piezoelectrics and the second pedestal three are formed in one.
4. the three frictional force steppers that promote side by side of described total head electricity according to claim 1 and 2, it is characterized in that described the first and second piezoelectrics are half tube shape of cutting open along the tubular bodies axis, they enclose fixed station and stand on annular the first pedestal, consist of tubular the first Drive Structure, described the third and fourth piezoelectrics are half tube shape of cutting open along the tubular bodies axis, they enclose fixed station and stand on annular the second pedestal, consist of tubular the second Drive Structure, described tubular the second Drive Structure is placed within tubular the first Drive Structure, and inner two and half tubular face outside two and half tubular.
5. the three frictional force steppers that promote side by side of described total head electricity according to claim 1 and 2, it is characterized in that described the first and second piezoelectrics be respectively cut open along tubular bodies axis symmetry four 1/4th in tubular relative two 1/4th tubular right, they enclose fixed station and stand on annular the first pedestal, consist of tubular the first Drive Structure, described the third and fourth piezoelectrics be respectively cut open along tubular bodies axis symmetry four 1/4th in tubular relative two 1/4th tubular right, they enclose fixed station and stand on annular the second pedestal, consist of tubular the second Drive Structure, described tubular the second Drive Structure is placed within tubular the first Drive Structure, and inner four 1/4th tubular face outside four 1/4th tubular.
6. the three frictional force steppers that promote side by side of described total head electricity according to claim 1 and 2 is characterized in that first, second third and fourth piezoelectrics or stand into square formation, perhaps stand into formation.
7. the three frictional force steppers that promote side by side of described total head electricity according to claim 6 is characterized in that first, second third and fourth piezoelectrics are that piezoelectric patches stacks.
8. the scanning probe microscopy mirror body made of the three frictional force steppers that promote side by side of the described total head electricity of claim 1, it is characterized in that the three frictional force steppers that comprise that piezoelectric scanning pipe and described total head electricity promote side by side, one end of this piezoelectric scanning pipe is fixed in the free end of the 3rd piezoelectrics of the three frictional force steppers that described total head electricity promotes side by side, this piezoelectric scanning pipe axially and the glide direction of the three frictional force steppers that promote side by side of this total head electricity consistent.
9. the scanning probe microscopy mirror body made of the three frictional force steppers that promote side by side of the described total head electricity of claim 1, it is characterized in that the three frictional force steppers that comprise that piezoelectric scanning pipe and described total head electricity promote side by side, one end of this piezoelectric scanning pipe is fixed on the second pedestal of the three frictional force steppers that described total head electricity promotes side by side, this piezoelectric scanning pipe axially and the glide direction of the three frictional force steppers that promote side by side of this total head electricity consistent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110255691 CN102347318B (en) | 2011-09-01 | 2011-09-01 | All-piezoelectric abreast pushing three-friction-force stepper and scanning probe microscope body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110255691 CN102347318B (en) | 2011-09-01 | 2011-09-01 | All-piezoelectric abreast pushing three-friction-force stepper and scanning probe microscope body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102347318A CN102347318A (en) | 2012-02-08 |
| CN102347318B true CN102347318B (en) | 2013-03-06 |
Family
ID=45545826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110255691 Expired - Fee Related CN102347318B (en) | 2011-09-01 | 2011-09-01 | All-piezoelectric abreast pushing three-friction-force stepper and scanning probe microscope body |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102347318B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103684037B (en) * | 2012-09-13 | 2016-01-20 | 中国科学技术大学 | A kind of both-end utilizing rubbing in opposite directions to reduce frictional force clamps piezo-electric motor and control method |
| CN104849851B (en) * | 2015-05-22 | 2017-11-03 | 哈尔滨工业大学 | A kind of micro two-dimensional mobile work platform based on shearing Piezoelectric Driving |
| CN108089030A (en) * | 2017-11-14 | 2018-05-29 | 合肥中科微力科技有限公司 | Double piezo tube nesting mechanical parallel high stable scanners and scanning probe microscopy |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7466063B2 (en) * | 2006-06-27 | 2008-12-16 | Korea Institute Of Science And Technology | Micro manipulator for movement of electrode, driving method thereof, and measuring device of brain signal using the same |
| CN101521197B (en) * | 2009-04-07 | 2010-12-08 | 中国科学技术大学 | Stepper for juxtaposedly pushing three or four piezoelectrics and scanning probe microscope body thereof |
| CN101521195B (en) * | 2009-04-07 | 2010-12-01 | 中国科学技术大学 | Three-friction stepper for juxtaposedly pushing double piezoelectrics and scanning probe microscope thereof |
-
2011
- 2011-09-01 CN CN 201110255691 patent/CN102347318B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN102347318A (en) | 2012-02-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Wang et al. | A review of recent studies on non-resonant piezoelectric actuators | |
| Li et al. | Stepping piezoelectric actuators with large working stroke for nano-positioning systems: A review | |
| Zhang et al. | Piezoelectric friction–inertia actuator—A critical review and future perspective | |
| Liu et al. | Review on multi-degree-of-freedom piezoelectric motion stage | |
| Liu et al. | Design and control of a long-traveling nano-positioning stage | |
| CN102682857B (en) | Device for changing route range of jogged positioning platform | |
| CN101521195B (en) | Three-friction stepper for juxtaposedly pushing double piezoelectrics and scanning probe microscope thereof | |
| CN102647107B (en) | Big stroke micro nanoscale linear actuator based on parasitic motion principle | |
| CN103225728A (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
| CN102347318B (en) | All-piezoelectric abreast pushing three-friction-force stepper and scanning probe microscope body | |
| CN102291039B (en) | Multi-degree-of-freedom bionic piezoelectric driver | |
| CN103557412A (en) | Bipolar two-dimensional fully flexible high-precision servo platform | |
| CN203339985U (en) | Novel looper type bionic crawling piezoelectric precise driving platform | |
| CN202662295U (en) | Device for changing route range of micro-positioning stage | |
| CN103684037B (en) | A kind of both-end utilizing rubbing in opposite directions to reduce frictional force clamps piezo-electric motor and control method | |
| CN101521197B (en) | Stepper for juxtaposedly pushing three or four piezoelectrics and scanning probe microscope body thereof | |
| CN102376696B (en) | Three-friction-force piezoelectric stepper pushed by two embedded piezoelectric tubes, and stepping scanner | |
| CN1996737A (en) | Dual voltage electrical body nano positioning and voltage electrical driver, its control method and controller | |
| CN104836475A (en) | Opposite-friction three-fold piezoelectric motor, control method thereof, and scanning probe microscope | |
| CN204316374U (en) | A kind of clamp formula piezoelectric motor | |
| CN103187900A (en) | Friction-matching high-symmetry four-friction piezoelectric motor and control method thereof | |
| CN104377987B (en) | Clamping type piezoelectric motor | |
| Xu et al. | Motion planning of a stepping-wriggle type piezoelectric actuator operating in bending modes | |
| CN102856305B (en) | Solid three-friction stepper driven by two piezoelectrics side by side | |
| CN102522916B (en) | Nano-motor based on frictional force variation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130306 Termination date: 20180901 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |