CN104849851B - A kind of micro two-dimensional mobile work platform based on shearing Piezoelectric Driving - Google Patents
A kind of micro two-dimensional mobile work platform based on shearing Piezoelectric Driving Download PDFInfo
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- CN104849851B CN104849851B CN201510267631.4A CN201510267631A CN104849851B CN 104849851 B CN104849851 B CN 104849851B CN 201510267631 A CN201510267631 A CN 201510267631A CN 104849851 B CN104849851 B CN 104849851B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
Abstract
A kind of micro two-dimensional mobile work platform based on shearing Piezoelectric Driving, it is related to a kind of micro two-dimensional mobile work platform, and in particular to a kind of micro two-dimensional mobile work platform based on shearing Piezoelectric Driving.The present invention in order to solve the big cost height of existing two-dimensional movement workbench volume be difficult miniaturization the problem of.The present invention includes piezoelectric ceramics group, the first wire, the second wire, privates, privates, flat thin magnet, mobile working sewing platform base, the first signal control assembly and secondary signal control assembly, piezoelectric ceramics group is arranged on mobile working sewing platform base, flat thin magnet is arranged on the upper surface of piezoelectric ceramics group, piezoelectric ceramics group is connected by the first wire and the second wire with the first signal control assembly, and piezoelectric ceramics group is connected by privates and privates with the secondary signal control assembly.The invention belongs to electro-mechanical arts.
Description
Technical field
The present invention relates to a kind of micro two-dimensional mobile work platform, and in particular to a kind of based on the miniature of shearing Piezoelectric Driving
Two-dimensional movement workbench, belongs to electro-mechanical arts.
Background technology
Two-dimensional movement workbench is widely used in microscope, and field is observed in optical detection, generally under high-power microscope, than
The mobile work platform that such as metallographic microscope can be used in the case of relatively fine object displacement.In two dimension shifting
It is widely used to have high-precision spherical guide spacing to mobile work platform progress in the structure of dynamic workbench, and using machinery
Worm drive structure is driven to mobile work platform.The processing of this traditional two-dimensional movement workbench requirement and assembly precision
It is very high, cost height is caused, and because its volume is difficult miniaturization.And the micro two-dimensional movement work based on shearing Piezoelectric Driving
Inverse piezoelectric effect is utilized as platform, the sound wave or ultrasonic activation produced by piezoelectric drives mobile work platform in stick-slip model
On the basis of moved along a straight line.This new mini mobile platform can carry out the speed of pinpoint accuracy, position control, and gather around
Have the advantages that small volume, lightweight, planform are flexible and changeable.
The content of the invention
The present invention proposes one to solve the problem of existing big cost height of two-dimensional movement workbench volume is difficult miniaturization
Plant the micro two-dimensional mobile work platform based on shearing Piezoelectric Driving.
The present invention adopts the technical scheme that to solve the above problems：The present invention includes piezoelectric ceramics group, the first wire, the
Two wires, privates, privates, flat thin magnet, mobile working sewing platform base, the first signal control assembly and secondary signal control
Component, piezoelectric ceramics group is arranged on mobile working sewing platform base, and flat thin magnet is arranged on the upper surface of piezoelectric ceramics group, piezoelectricity pottery
Porcelain group is connected by the first wire and the second wire with the first signal control assembly, piezoelectric ceramics group by privates and
Privates are connected with the secondary signal control assembly.
The beneficial effects of the invention are as follows：The present invention is in disresonance frequence due to shearing piezoelectric ceramics, can more hold
Easy founding mathematical models, this new mini mobile platform can carry out the speed of pinpoint accuracy, position control, and possess
Small volume, the advantages of lightweight, planform is flexible and changeable, it is possible to according to requirement of engineering, specific arrangement arranges its size.
Brief description of the drawings
Fig. 1 is the overall structure diagram of the present invention, and Fig. 2 is the top view of wear-resistant ceramic A pieces, the piezoelectric ceramics of Fig. 3 first
The top view of piece, Fig. 4 is the top view of wear-resistant ceramic B pieces, and Fig. 5 is the top view of the second piezoelectric ceramic piece, and Fig. 6 is wear-resistant ceramics
The top view of C pieces, Fig. 7 is the dimensional structure diagram of the present invention.
Embodiment
Embodiment one：Illustrate present embodiment with reference to Fig. 1, one kind described in present embodiment is based on shearing piezoelectricity
The micro two-dimensional mobile work platform of driving includes piezoelectric ceramics group 1, the first wire 2, the second wire 3, privates the 4, the 4th and led
Line 5, flat thin magnet 6, mobile working sewing platform base 7, the first signal control assembly and secondary signal control assembly, piezoelectric ceramics group 1 are set
Put on mobile working sewing platform base 7, flat thin magnet 6 is arranged on the upper surface of piezoelectric ceramics group 1, and piezoelectric ceramics group 1 passes through first
The wire 3 of wire 2 and second is connected with the first signal control assembly, and piezoelectric ceramics group 1 passes through privates 4 and privates
5 are connected with the secondary signal control assembly.
Piezoelectric ceramics group bonds together with flat thin magnet in present embodiment, between flat thin magnet and mobile working sewing platform base
Magnetic force provides its normal pressure on pedestal, driving voltage driving piezoelectric ceramics group motion, so that piezoelectricity for piezoelectric ceramics
Frictional force between ceramic group and mobile working sewing platform base changes, and is prolonged laterally or longitudinally by frictional force drives mobile work platform
Linear motion, the compound of the linear motion is exactly a curvilinear motion.
The first signal control assembly is by signal generator, waveform amplifier, output circuit, filter circuit in present embodiment
With oscillograph composition, the signal generator is connected with the waveform amplifier, and the output circuit and the filter circuit are simultaneously
Connection is filtered, and the cathode output end of output circuit is connected with the other end of the first wire 2, the negative pole output of the output circuit
End is connected with the other end of the second wire 3.
Secondary signal control assembly is by signal generator, waveform amplifier, output circuit, filter circuit in present embodiment
With oscillograph composition, the signal generator is connected with the waveform amplifier, and the output circuit and the filter circuit are simultaneously
Connection is filtered, and the cathode output end of output circuit is connected with the other end of privates 4, the negative pole output of the output circuit
End is connected with the other end of privates 5.
Embodiment two：Illustrate present embodiment with reference to Fig. 1 to Fig. 6, one kind is based on shearing described in present embodiment
The piezoelectric ceramics group 1 of the micro two-dimensional mobile work platform of formula Piezoelectric Driving is by wear-resistant ceramic A pieces 1-1, the first piezoelectric ceramic piece 1-
2nd, wear-resistant ceramic B pieces 1-3, the second piezoelectric ceramic piece 1-4, wear-resistant ceramic C pieces 1-5 are from top to bottom sequentially overlapped composition, wear-resistant pottery
Between porcelain A pieces 1-1 and the first piezoelectric ceramic piece 1-2, between the first piezoelectric ceramic piece 1-2 and wear-resistant ceramic B pieces 1-3, wear-resistant pottery
By leading between porcelain B pieces 1-3 and the second piezoelectric ceramic piece 1-4, between the second piezoelectric ceramic piece 1-4 and wear-resistant ceramic C pieces 1-5
Electric glue bonding, one end of the first wire 2 is inserted between wear-resistant ceramic A pieces 1-1 and the first piezoelectric ceramic piece 1-2, and first leads
The other end of line 2 is connected with the first signal control assembly, one end of the second wire 3 be inserted into the first piezoelectric ceramic piece 1-2 with
Between wear-resistant ceramic B pieces 1-3, the other end of the second wire 3 is connected with the first signal control assembly, and the one of privates 4
End is inserted between wear-resistant ceramic B pieces 1-3 and the second piezoelectric ceramic piece 1-4, the other end of privates 4 and the secondary signal
Control assembly is connected, and one end of privates 5 is inserted between the second piezoelectric ceramic piece 1-4 and wear-resistant ceramic C pieces 1-5, and the 4th
The other end of wire 5 is connected with the secondary signal control assembly.Other compositions and annexation and the phase of embodiment one
Together.
Operation principle
The present invention by piezoelectric ceramics group and flat thin magnet after assembling is pasted, by one end of flat thin magnet as topmost, then
They are placed on mobile working sewing platform base, the voltage signal exported by control signal control device reaches two piezoelectricity of control
Two piezoelectric ceramics groups of ceramics and then driving, when the voltage signal that control signal control device is exported is sawtooth waveforms, two pressures
The displacement curve of electroceramics is sawtooth waveforms, under the theory of stick-slip model, mobile working platform (piezoelectric ceramics group and the flat thin magnet
Entirety) can on mobile working sewing platform base two-dimensional movement.
Claims (1)
1. a kind of micro two-dimensional mobile work platform based on shearing Piezoelectric Driving, it includes piezoelectric ceramics group (1), the first wire
(2), the second wire (3), privates (4), privates (5), flat thin magnet (6), mobile working sewing platform base (7), the first signal
Control assembly and secondary signal control assembly, piezoelectric ceramics group (1) are arranged on mobile working sewing platform base (7), flat thin magnet (6) peace
On the upper surface of piezoelectric ceramics group (1), piezoelectric ceramics group (1) passes through the first wire (2) and the second wire (3) and described the
One signal control assembly is connected, and piezoelectric ceramics group (1) passes through privates (4) and privates (5) and the secondary signal control
Component connection processed, piezoelectric ceramics group bonds together with flat thin magnet, and the magnetic force between flat thin magnet and mobile working sewing platform base is pressure
Electroceramics provides its normal pressure on pedestal, driving voltage driving piezoelectric ceramics group motion so that piezoelectric ceramics group with
Frictional force between mobile working sewing platform base changes, and straight line is transported in horizontal or vertical direction by frictional force drives mobile work platform
Dynamic, the compound of the linear motion is exactly a curvilinear motion；First signal control assembly is by the first signal generator, first waveform
Amplifier, the first output circuit, the first filter circuit and the first oscillograph composition, first signal generator and described first
Waveform amplifier is connected, and first output circuit is in parallel with first filter circuit to be filtered, the first output circuit
Cathode output end is connected with the other end of the first wire (2), the cathode output end and the second wire (3) of first output circuit
The other end connection；Secondary signal control assembly is by secondary signal generator, the second waveform amplifier, the second output circuit,
Two filter circuits and the second oscillograph composition, the secondary signal generator is connected with second waveform amplifier, and described the
Two output circuits are in parallel with second filter circuit to be filtered, the cathode output end and privates of the second output circuit
(4) other end connection, the cathode output end of second output circuit is connected with the other end of privates (5)；Its feature
It is：Piezoelectric ceramics group (1) is by wear-resistant ceramic A pieces (1-1), the first piezoelectric ceramic piece (1-2), wear-resistant ceramic B pieces (1-3),
Two piezoelectric ceramic pieces (1-4), wear-resistant ceramic C pieces (1-5) are from top to bottom sequentially overlapped composition, wear-resistant ceramic A pieces (1-1) and first
Between piezoelectric ceramic piece (1-2), between the first piezoelectric ceramic piece (1-2) and wear-resistant ceramic B pieces (1-3), wear-resistant ceramic B pieces (1-
3) by leading between the second piezoelectric ceramic piece (1-4), between the second piezoelectric ceramic piece (1-4) and wear-resistant ceramic C pieces (1-5)
Electric glue bonding, one end of the first wire (2) is inserted between wear-resistant ceramic A pieces (1-1) and the first piezoelectric ceramic piece (1-2),
First wire (2) other end is connected with the first signal control assembly, and one end of the second wire (3) is inserted into the first piezoelectricity pottery
Between ceramics (1-2) and wear-resistant ceramic B pieces (1-3), the other end of the second wire (3) connects with the first signal control assembly
Connect, one end of privates (4) is inserted between wear-resistant ceramic B pieces (1-3) and the second piezoelectric ceramic piece (1-4), privates
(4) the other end is connected with the secondary signal control assembly, and one end of privates (5) is inserted into the second piezoelectric ceramic piece
Between (1-4) and wear-resistant ceramic C pieces (1-5), the other end of privates (5) is connected with the secondary signal control assembly.
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| CN201510267631.4A CN104849851B (en) | 2015-05-22 | 2015-05-22 | A kind of micro two-dimensional mobile work platform based on shearing Piezoelectric Driving |
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| CN201510267631.4A CN104849851B (en) | 2015-05-22 | 2015-05-22 | A kind of micro two-dimensional mobile work platform based on shearing Piezoelectric Driving |
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| CN104849851B true CN104849851B (en) | 2017-11-03 |
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| CN106505906B (en) * | 2016-11-18 | 2019-10-18 | 清华大学 | Two-dimensional micromotion device |
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| CN201254397Y (en) * | 2008-08-05 | 2009-06-10 | 南京航空航天大学 | Magnetic force induced pressure friction drive apparatus |
| CN201498531U (en) * | 2009-04-07 | 2010-06-02 | 中国科学技术大学 | Three-friction force stepper driven by two piezoelectrics side by side and scanning probe microscope |
| CN102347318A (en) * | 2011-09-01 | 2012-02-08 | 中国科学技术大学 | All-piezoelectric abreast pushing three-friction-force stepper and scanning probe microscope body |
| CN104506080A (en) * | 2015-01-26 | 2015-04-08 | 哈尔滨工业大学 | Shear type piezoelectric ceramic motor |
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| US6327120B1 (en) * | 1997-04-17 | 2001-12-04 | Fujitsu Limited | Actuator using piezoelectric element and head-positioning mechanism using the actuator |
| JP5110796B2 (en) * | 2006-01-23 | 2012-12-26 | 曙ブレーキ工業株式会社 | Health monitoring system with calibration function |
| CN102355157B (en) * | 2011-10-10 | 2014-02-12 | 哈尔滨工业大学 | Piezoelectric plate-sandwiched rotary linear ultrasonic motor stator |
| CN104153482B (en) * | 2014-09-05 | 2016-07-06 | 大连理工大学 | The shearing piezoelectricity friction damping unit of frame structure |
| CN104440344B (en) * | 2014-11-26 | 2017-05-10 | 广东工业大学 | Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor |
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| CN201254397Y (en) * | 2008-08-05 | 2009-06-10 | 南京航空航天大学 | Magnetic force induced pressure friction drive apparatus |
| CN201498531U (en) * | 2009-04-07 | 2010-06-02 | 中国科学技术大学 | Three-friction force stepper driven by two piezoelectrics side by side and scanning probe microscope |
| CN102347318A (en) * | 2011-09-01 | 2012-02-08 | 中国科学技术大学 | All-piezoelectric abreast pushing three-friction-force stepper and scanning probe microscope body |
| CN104506080A (en) * | 2015-01-26 | 2015-04-08 | 哈尔滨工业大学 | Shear type piezoelectric ceramic motor |
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