CN102299662A - Low voltage control method for inertia piezoelectric motor - Google Patents
Low voltage control method for inertia piezoelectric motor Download PDFInfo
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- CN102299662A CN102299662A CN2011102556704A CN201110255670A CN102299662A CN 102299662 A CN102299662 A CN 102299662A CN 2011102556704 A CN2011102556704 A CN 2011102556704A CN 201110255670 A CN201110255670 A CN 201110255670A CN 102299662 A CN102299662 A CN 102299662A
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Abstract
The invention relates to a low voltage control method for an inertia piezoelectric motor, which is characterized in that: three stages of time domain control signals drive a piezoelectric body of the inertia piezoelectric motor in turn to finish one-time stepping; the average gradient of a first-stage control signal is K1 which is more than 0; the average gradient of a second-stage control signal is K2 which is more than 0 and less than K1, and the duration of the stage is 1 to 400 microseconds; the average gradient of a third-stage control signal is K3 which is a negative value, and the absolute value of K3 is greater than a starting value capable of making the inertia piezoelectric motor generate inertia slide; and after a quick turn is made, waiting time of more than 200 microseconds can be added, and next-time stepping is started after the action of inertia force is completely over. The method has the advantages that: the starting voltage of the inertia piezoelectric motor is obviously reduced, and the stepping rate and step length of the inertia piezoelectric motor is obviously increased, so that the inertia piezoelectric motor works more reliably.
Description
Technical field
The present invention relates to a kind of control method of piezoelectricity stepper, particularly a kind of low-voltage control method of inertial piezoelectric stepper belongs to the piezoelectric positioner technical field.
Background technology
The kind of piezo-electric motor is a lot, but all is to rely on piezoelectrics that mover is produced the piezoelectricity that repeats to add up to move and promote mover with respect to the stator stepping on the principle.Piezo-electric motor is widely used in the adjusting of camera light path because of having big stroke of the above macroscopic view of millimeter and nanometer even Ethylmercurichlorendimide level superhigh precision simultaneously, the focusing of microscope camera lens nano-precision, the scanning probe microscopy of atom definition, and contemporary optics, microelectronics is made, Aero-Space, the ultraprecise machine-building, Micro-Robot, seismic survey, biological, medical science, genetic engineering (is built virtue referring to Jilin University's Piezoelectric Driving and Research on Control center Liu, Yang Zhigang, Cheng Guangming and Hua Shunming were published in the paper that is entitled as " the accurate linear stepping motor research of Piezoelectric Driving " of the 102nd page of " Proceedings of the CSEE " the 24th the 004th phase of volume in 2004), be very important nanosecond science and technology and national strategy major fields instrument.
Inertial piezoelectric motor (abbreviation inertial motor) be a class important, widely used, obtain the piezo-electric motor of huge business success.Its operation principle is: mover (mass) is arranged on the piezoelectrics by frictional force, piezoelectrics utilize piezoelectricity deformation to promote mover along a direction earlier and produce displacement, tune fast again, huge acceleration when utilizing tune fast produces the huge inertia force that acts on mover, and this inertia force overcome friction makes mover stepping (slip).Piezo-electric motor control signal waveform commonly used comprises two big classes, referring to accompanying drawing 1:(1) sawtooth waveforms (being published in the paper of the 54th page of Rev.Sci.Instrum. the 58th volume referring to D.W.Pohl in 1987), (2) positive and negative hyperbolic waveform (equal nineteen ninety referring to Ch.Renner and be published in the 965th page of Rev.Sci.Instrum. the 61st volume).So far, people still very do not understand the careful principle of this two classes waveform work, not only which is better and which is worse all exists great dispute (to equal nineteen ninety referring to Ch.Renner and be published in the 965th page of Rev.Sci.Instrum. the 61st volume to the two, W.R.Silviera equals to be published in 2003 the 267th page of last the 74th volume of Rev.Sci.Instrum.), even on the inertial motor of analog structure, draw antipodal conclusion and (equal nineteen ninety referring to Ch.Renner and be published in the 965th page of Rev.Sci.Instrum. the 61st volume, W.R.Silviera equals to be published in 2003 the 267th page of last the 74th volume of Rev.Sci.Instrum.), just more need not talk and how to have improved.And in fact, we not only need thoroughly to understand the principle details of inertial motor, more to find out the most effective control waveform, thus can with common low-voltage operational amplifier (the industrial standard supply power voltage for ± 18V) its walking does not need so-called high voltage operational amplifier with regard to may command.This can not only reduce cost greatly, and low voltage operational amplifier all is better than high voltage operational amplifier on noise, control precision, temperature such as float at each important parameter, the control precision of inertial motor is improved greatly, satisfy the requirement of atom even subatomic resolution.And present situation is: mostly existing inertial motor is high voltage control.
In the present invention, we according to a large amount of experiments have relatively obtained an astonishing result: " tune fast " is not to help inertia walking most! To a certain degree delay can improve the speed of travel greatly and reduce starting resistor before the tune, referring to accompanying drawing 2.In addition, also be unfavorable for inertia walking if begin next step walking process immediately after the tune, intermediate retardation a period of time can be improved the speed of travel greatly and be reduced starting resistor, referring to accompanying drawing 2.We can use creep (creeping) characteristics explain of piezoelectric effect these strange phenomenons, and have provided improved inertial motor control waveform.
Summary of the invention
Purpose of the present invention:, provide a kind of low-voltage control method of inertial piezoelectric motor in order to solve the adverse effect that existing inertial piezoelectric motor need are controlled and brought thus with high voltage.
The present invention realizes that the technical scheme of above-mentioned purpose is:
The characteristics of the low-voltage control method of inertial piezoelectric motor of the present invention are the piezoelectrics of three stages time domain control signal driving inertial piezoelectric motor in the following order, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are greater than 0;
The G-bar of second stage control signal be K2 and K2 greater than 0 and K2 less than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal is that K3 and K3 are negative value, its absolute value | K3| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|.
The described first and second stage control signals are combined into one section factory's font waveform.
The described first and second stage control signals are combined into one section sinusoidal waveform.
The characteristics of the low-voltage control method of inertial piezoelectric motor of the present invention can also be the piezoelectrics of three stages time domain control signal driving inertial piezoelectric motor in the following order, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are less than 0;
The G-bar of second stage control signal be K2 and K2 less than 0 and K2 greater than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal be K3 and K3 on the occasion of, its value K3 is greater than making the inertial piezoelectric motor produce the startup value of inertia slip | Kmin|.
The described first and second stage control signals are combined into the one section font of falling factory waveform.
The characteristics of the low-voltage control method of inertial piezoelectric motor of the present invention can also be the piezoelectrics of three stages time domain control signal driving inertial piezoelectric motor in the following order, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are greater than 0;
The G-bar of second stage control signal is that K2 and K2 are negative value, its absolute value | K2| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|;
The G-bar of phase III control signal is K3, K3 more than or equal to 0 and less than K1 and duration that should the stage greater than 200 microseconds.
The characteristics of the low-voltage control method of inertial piezoelectric motor of the present invention can also be the piezoelectrics of three stages time domain control signal driving inertial piezoelectric motor in the following order, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are less than 0;
The G-bar of second stage control signal is K2 and K2 on the occasion of, its absolute value | K2| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|;
The G-bar of phase III control signal is K3, K3 smaller or equal to 0 and greater than K1 and duration that should the stage greater than 200 microseconds.
The characteristics of the low-voltage control method of inertial piezoelectric motor of the present invention can also be the piezoelectrics of quadravalence section time domain control signal driving inertial piezoelectric motor in the following order, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are greater than 0;
The G-bar of second stage control signal be K2 and K2 greater than 0 and K2 less than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal is that K3 and K3 are negative value, its absolute value | K3| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|.
The G-bar of quadravalence section control signal is K3, K3 more than or equal to 0 and less than K1 and duration that should the stage greater than 200 microseconds.
The described first and second stage control signals can be combined into one section sinusoidal signal.
Perhaps, the first and second stage control signals in the quadravalence section control signal of last one-period and this cycle are combined into one section sinusoidal signal.
The characteristics of the low-voltage control method of inertial piezoelectric motor of the present invention can also be the piezoelectrics of quadravalence section time domain control signal driving inertial piezoelectric motor in the following order, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are less than 0;
The G-bar of second stage control signal be K2 and K2 less than 0 and K2 greater than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal be K3 and K3 on the occasion of, its value K3 is greater than making the inertial piezoelectric motor produce the startup value of inertia slip | Kmin|.
The G-bar of quadravalence section control signal is K3, K3 smaller or equal to 0 and greater than K1 and duration that should the stage greater than 200 microseconds.
Operation principle of the present invention is:
The phase I of control signal extends at the control lower edge step direction of this climbing signal gradually for climbing signal, piezoelectrics.Owing to the enough slow maximum static friction force that is not enough to overcome mover of this section climbing signal, so mover can not slide with respect to piezoelectrics (stepping), but together mobile and have certain speed with piezoelectrics.Though the second stage of control signal is one section tempolabile signal, referring to accompanying drawing 2, the creep properties of piezoelectrics makes that moving of piezoelectrics is not to slow down immediately thereupon, but still continues to obtain higher speed and bigger displacement.The phase III of control signal is rapid tune signal, because kinetoplast obtained higher speed and obtained bigger displacement this moment, the swift and violent tune of this moment can produce bigger inertia force and longer inertia force duration.This just can make the starting resistor of kinetoplast reduce (because inertia force is big) and stepping rate improves (because not only inertia force is big, and the duration is longer), thereby has realized purpose of the present invention.If according to traditional inertial motor control waveform, omit the tempolabile signal of second stage and enter the quick tune signal (referring to accompanying drawing 1) of phase III immediately by the phase I, then the displacement of mover is less on the one hand, and the time that continues of the inertia force that tune produces is shorter, and stepping is slack-off; The less gesture that also causes back removing of the displacement of mover diminishes on the other hand, returns to remove unablely, needing to cause higher voltage just can make the inertia force overcome friction and starts; In addition, mover is not because there is long displacement to quicken, and its initial velocity when tune is lower, also causes inertia force lower (starting resistor is higher).According to our actual measurement data, added after the tempolabile signal signal of second stage, starting resistor reduces about 20%, and stepping rate then improves 30-40%.Certainly, if the stand-by period of second stage is oversize, can make the mobile deceleration of kinetoplast, inertia force reduces because initial velocity is lower in the time of will reversing end for end fast in the phase III.According to our experimental data, the stand-by period is proper between 1 to 400 microsecond.
Similarly, after quick tune, also need the wait (referring to accompanying drawing 5) of a period of time, wait the effect of inertia force to begin stepping next time again after being all over, otherwise the stepping effect is relatively poor.According to our experimental data, this section stand-by period is advisable more than 200 microseconds.
According to above-mentioned principle as can be seen, compared with the prior art, beneficial effect of the present invention is embodied in:
(1) significantly reduces the starting resistor of inertial piezoelectric motor.
(2) significantly increase the inertial piezoelectric motor stepping rate and step-length.
(3) make the inertial piezoelectric motor operations more reliable.
Description of drawings
Fig. 1 is two waveform schematic diagrames commonly used that tradition does not have the inertial piezoelectric motor control method of waiting for.
Fig. 2 is the waveform schematic diagram of the low-voltage control method of the left inertial piezoelectric motor of waiting for of the present invention.
Fig. 3 is the waveform schematic diagram of the low-voltage control method of the left inertial piezoelectric motor of waiting for of factory of the present invention character waveform.
Fig. 4 is the waveform schematic diagram of the low-voltage control method of the left inertial piezoelectric motor of waiting for of the present invention's character waveform of falling the factory.
Fig. 5 is the waveform schematic diagram of the low-voltage control method of the right inertial piezoelectric motor of waiting for of the present invention.
Fig. 6 is the waveform schematic diagram of the low-voltage control method of the inertial piezoelectric motor waited for about the present invention.
Number in the figure: 1 phase I control signal, 2 second stage control signals, 3 phase III control signals, 4 quadravalence section control signals.
Below the invention will be further described by embodiment and structure accompanying drawing.
Embodiment
Embodiment 1: the low-voltage control method of the inertial piezoelectric motor that wait on a left side
Referring to accompanying drawing 2, the feature of the low-voltage control method of the inertial piezoelectric motor that the present invention waits on a left side is the piezoelectrics of three stages time domain control signal driving inertial piezoelectric motor in the following order, finishes a stepping:
The G-bar of phase I control signal 1 is that K1 and K1 are greater than 0;
The G-bar of second stage control signal 2 be K2 and K2 greater than 0 and K2 less than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal 3 is that K3 and K3 are negative value, its absolute value | K3| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|.
Its operation principle is: the phase I 1 of control signal extends at the control lower edge step direction of this climbing signal gradually for climbing signal, piezoelectrics.Owing to the enough slow maximum static friction force that is not enough to overcome mover of this section climbing signal, so mover can not slide with respect to piezoelectrics (stepping), but together mobile and have certain speed with piezoelectrics.Though the second stage 2 of control signal is one section tempolabile signal, the creep properties of piezoelectrics makes that moving of piezoelectrics is not to slow down immediately thereupon, but still continues to obtain higher speed and bigger displacement.The phase III 3 of control signal is rapid tune signal, because kinetoplast obtained higher speed and obtained bigger displacement this moment, the swift and violent tune of this moment can produce bigger inertia force and longer inertia force duration.This just can make the starting resistor of kinetoplast reduce (because inertia force is big) and stepping rate improves (because not only inertia force is big, and the duration is longer), thereby has realized purpose of the present invention.If according to traditional inertial motor control waveform, omit the tempolabile signal of second stage 2 and enter the quick tune signal of phase III 3 immediately by the phase I, then the displacement of mover is less on the one hand, and the time that continues of the inertia force that tune produces is shorter, and stepping is slack-off; The less gesture that also causes back removing of the displacement of mover diminishes on the other hand, returns to remove unablely, needing to cause higher voltage just can make the inertia force overcome friction and starts; In addition, mover is not because there is long displacement to quicken, and its initial velocity when tune is lower, also causes inertia force lower (starting resistor is higher).According to our actual measurement data, added after the tempolabile signal signal of second stage 2, starting resistor reduces about 20%, and stepping rate then improves 30-40%.Certainly, if the stand-by period of second stage 2 is oversize, can make the mobile deceleration of kinetoplast, inertia force reduces because initial velocity is lower in the time of will reversing end for end fast in the phase III 3.According to our experimental data, the stand-by period is proper between 1 to 400 microsecond.
Phase I control signal in the present embodiment can be the straight line rising waveform, sees accompanying drawing 2, also can be gradually steep rising waveform and is combined into one section factory's font waveform with the second stage control signal of level, sees accompanying drawing 3.
Embodiment 2: the low-voltage control method of the reverse inertial piezoelectric motor that wait on a left side
If the control method of definition the foregoing description 1 is the forward stepping of control inertial piezoelectric motor of the present invention, then present embodiment is its reverse stepping of control, it is characterized in that the piezoelectrics of three stages time domain control signal driving inertial piezoelectric motor in the following order, finish a stepping:
The G-bar of phase I control signal 1 is that K1 and K1 are less than 0;
The G-bar of second stage control signal 2 be K2 and K2 less than 0 and K2 greater than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal 3 be K3 and K3 on the occasion of, its value K3 is greater than making the inertial piezoelectric motor produce the startup value of inertia slip | Kmin|.
The operation principle of present embodiment is with embodiment 1, and just step direction is opposite.
Phase I control signal in the present embodiment can be the straight line falling waveform, also can be gradually steep falling waveform and is combined into one section factory's font waveform with the second stage control signal of level, sees accompanying drawing 4.
Embodiment 3: the low-voltage control method of the right inertial piezoelectric motor of waiting for
Be similar to the foregoing description 1 and 2, after quick tune, also need the wait of a period of time, wait the effect of inertia force to begin stepping next time again after being all over, otherwise the stepping effect is relatively poor.According to our experimental data, this section stand-by period is advisable more than 200 microseconds.So referring to accompanying drawing 5, the feature of the low-voltage control method of the right inertial piezoelectric motor of waiting for of present embodiment is the piezoelectrics of three stages time domain control signal driving inertial piezoelectric motor in the following order, finishes a stepping:
The G-bar of phase I control signal 1 is that K1 and K1 are greater than 0;
The G-bar of second stage control signal 2 is that K2 and K2 are negative value, its absolute value | K2| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|;
The G-bar of phase III control signal 3 is K3, K3 more than or equal to 0 and less than K1 and duration that should the stage greater than 200 microseconds.
Embodiment 4: the low-voltage control method of the right reverse inertial piezoelectric motor of waiting for
If the control method of definition the foregoing description 3 is the forward stepping of control inertial piezoelectric motor of the present invention, then present embodiment is its reverse stepping of control, it is characterized in that the piezoelectrics of three stages time domain control signal driving inertial piezoelectric motor in the following order, finish a stepping:
The G-bar of phase I control signal 1 is that K1 and K1 are less than 0;
The G-bar of second stage control signal 2 is K2 and K2 on the occasion of, its absolute value | K2| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|;
The G-bar of phase III control signal 3 is K3, K3 smaller or equal to 0 and greater than K1 and duration that should the stage greater than 200 microseconds.
Embodiment 5: about the low-voltage control method of the inertial piezoelectric motor waited for
Present embodiment is the situation that wait is all arranged in the front and back of inertial motor tune, referring to accompanying drawing 6, it is characterized in that the piezoelectrics of quadravalence section time domain control signal driving inertial piezoelectric motor in the following order, finishes a stepping:
The G-bar of phase I control signal 1 is that K1 and K1 are greater than 0;
The G-bar of second stage control signal 2 be K2 and K2 greater than 0 and K2 less than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal 3 is that K3 and K3 are negative value, its absolute value | K3| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|.
The G-bar of quadravalence section control signal 4 is K3, K3 more than or equal to 0 and less than K1 and duration that should the stage greater than 200 microseconds.
Embodiment 6: about the low-voltage control method of the reverse inertial piezoelectric motor waited for
If the control method of definition the foregoing description 5 is the forward stepping of control inertial piezoelectric motor of the present invention, then present embodiment is its reverse stepping of control, it is characterized in that the piezoelectrics of quadravalence section time domain control signal driving inertial piezoelectric motor in the following order, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are less than 0;
The G-bar of second stage control signal be K2 and K2 less than 0 and K2 greater than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal be K3 and K3 on the occasion of, its value K3 is greater than making the inertial piezoelectric motor produce the startup value of inertia slip | Kmin|.
The G-bar of quadravalence section control signal is K3, K3 smaller or equal to 0 and greater than K1 and duration that should the stage greater than 200 microseconds.
Embodiment 7: the low-voltage control method of waiting for the inertial piezoelectric motor about sine-shaped
The first and second stage control signals described in the foregoing description 5 or 6 can be combined into one section sinusoidal signal, perhaps go up the quadravalence section control signal of one-period and the first and second stage control signals in this cycle and are combined into one section sinusoidal signal.
Claims (10)
1. the low-voltage control method of an inertial piezoelectric motor is characterized in that in the following order three stages time domain control signal drive the piezoelectrics of inertial piezoelectric motor, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are greater than 0;
The G-bar of second stage control signal be K2 and K2 greater than 0 and K2 less than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal is that K3 and K3 are negative value, its absolute value | K3| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|.
2. the low-voltage control method of inertial piezoelectric motor as claimed in claim 1 is characterized in that the described first and second stage control signals are combined into one section factory's font waveform.
3. the low-voltage control method of inertial piezoelectric motor as claimed in claim 1 is characterized in that the described first and second stage control signals are combined into one section sinusoidal waveform.
4. the low-voltage control method of an inertial piezoelectric motor is characterized in that in the following order three stages time domain control signal drive the piezoelectrics of inertial piezoelectric motor, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are less than 0;
The G-bar of second stage control signal be K2 and K2 less than 0 and K2 greater than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal be K3 and K3 on the occasion of, its value K3 is greater than making the inertial piezoelectric motor produce the startup value of inertia slip | Kmin|.
5. the low-voltage control method of inertial piezoelectric motor as claimed in claim 4 is characterized in that the described first and second stage control signals are combined into the one section font of falling factory waveform.
6. the low-voltage control method of an inertial piezoelectric motor is characterized in that in the following order three stages time domain control signal drive the piezoelectrics of inertial piezoelectric motor, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are greater than 0;
The G-bar of second stage control signal is that K2 and K2 are negative value, its absolute value | K2| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|;
The G-bar of phase III control signal is K3, K3 more than or equal to 0 and less than K1 and duration that should the stage greater than 200 microseconds.
7. the low-voltage control method of an inertial piezoelectric motor is characterized in that in the following order three stages time domain control signal drive the piezoelectrics of inertial piezoelectric motor, finish a stepping:
The G-bar of phase I control signal is that K1 and K1 are less than 0;
The G-bar of second stage control signal is K2 and K2 on the occasion of, its absolute value | K2| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|;
The G-bar of phase III control signal is K3, K3 smaller or equal to 0 and greater than K1 and duration that should the stage greater than 200 microseconds.
8. the low-voltage control method of an inertial piezoelectric motor is characterized in that in the following order quadravalence section time domain control signal drives the piezoelectrics of inertial piezoelectric motor, finishes a stepping:
The G-bar of phase I control signal is that K1 and K1 are greater than 0;
The G-bar of second stage control signal be K2 and K2 greater than 0 and K2 less than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal is that K3 and K3 are negative value, its absolute value | K3| is greater than making the inertial piezoelectric motor produce the startup value that inertia slides | and Kmin|.
The G-bar of quadravalence section control signal is K3, K3 more than or equal to 0 and less than K1 and duration that should the stage greater than 200 microseconds.
9. the low-voltage control method of inertial piezoelectric motor as claimed in claim 8, it is characterized in that or the described first and second stage control signals are combined into one section sinusoidal signal, perhaps go up the quadravalence section control signal of one-period and the first and second stage control signals in this cycle and be combined into one section sinusoidal signal.
10. the low-voltage control method of an inertial piezoelectric motor is characterized in that in the following order quadravalence section time domain control signal drives the piezoelectrics of inertial piezoelectric motor, finishes a stepping:
The G-bar of phase I control signal is that K1 and K1 are less than 0;
The G-bar of second stage control signal be K2 and K2 less than 0 and K2 greater than K1 and duration that should the stage between 1 microsecond to 400 microsecond;
The G-bar of phase III control signal be K3 and K3 on the occasion of, its value K3 is greater than making the inertial piezoelectric motor produce the startup value of inertia slip | Kmin|.
The G-bar of quadravalence section control signal is K3, K3 smaller or equal to 0 and greater than K1 and duration that should the stage greater than 200 microseconds.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104601037A (en) * | 2014-12-05 | 2015-05-06 | 南京航空航天大学 | Inertial-type linear piezoelectric motor with double U-shaped structures and control method for inertial-type linear piezoelectric motor |
| CN106899228A (en) * | 2017-04-01 | 2017-06-27 | 西安交通大学 | Include the rotary inertia piezoelectric actuator and start method of photoelectric encoder |
| CN108111053A (en) * | 2017-12-25 | 2018-06-01 | 合肥中科微力科技有限公司 | A kind of control method of opposite friction drag reduction power inertia piezoelectric motor |
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| CN101719740A (en) * | 2009-12-25 | 2010-06-02 | 中国科学院电工研究所 | Two-degree of freedom inertial driving mechanism utilizing photovoltaic power supply |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104601037A (en) * | 2014-12-05 | 2015-05-06 | 南京航空航天大学 | Inertial-type linear piezoelectric motor with double U-shaped structures and control method for inertial-type linear piezoelectric motor |
| CN106899228A (en) * | 2017-04-01 | 2017-06-27 | 西安交通大学 | Include the rotary inertia piezoelectric actuator and start method of photoelectric encoder |
| CN106899228B (en) * | 2017-04-01 | 2019-01-08 | 西安交通大学 | Include the rotary inertia piezoelectric actuator and actuation method of photoelectric encoder |
| CN108111053A (en) * | 2017-12-25 | 2018-06-01 | 合肥中科微力科技有限公司 | A kind of control method of opposite friction drag reduction power inertia piezoelectric motor |
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Application publication date: 20111228 |