CN108111053A - A kind of control method of opposite friction drag reduction power inertia piezoelectric motor - Google Patents
A kind of control method of opposite friction drag reduction power inertia piezoelectric motor Download PDFInfo
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- 230000009467 reduction Effects 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 46
- 230000000977 initiatory effect Effects 0.000 claims description 24
- 230000003247 decreasing effect Effects 0.000 claims description 16
- 230000035935 pregnancy Effects 0.000 claims description 13
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 5
- 230000003068 static effect Effects 0.000 abstract 1
- 230000009194 climbing Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 241000222712 Kinetoplastida Species 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- HTCXJNNIWILFQQ-UHFFFAOYSA-M emmi Chemical compound ClC1=C(Cl)C2(Cl)C3C(=O)N([Hg]CC)C(=O)C3C1(Cl)C2(Cl)Cl HTCXJNNIWILFQQ-UHFFFAOYSA-M 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000012421 spiking Methods 0.000 description 1
- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
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Abstract
The control method of opposite friction drag reduction power inertia piezoelectric motor of the invention, it is characterized in that a kind of control waveform is provided respectively to two individually controllable piezoelectrics in opposite friction drag reduction power inertia piezoelectric motor, signal drive motor stepping all the way, another way signal controls piezoelectrics deformation to reduce the friction between mover and piezoelectrics, coordinates drive motor stepping by two paths of signals.When motor is static, the curable grip that slide bar is subject to is larger stiction so that motor strong antijamming capability, stability are high；When motor is walked, secondary piezoelectrics deformation, the total friction resistance between secondary piezoelectrics both ends and slide bar reduces, and the inertia force that the quick deformation of piezoelectrics generates at this moment is driven just to have and greatly switchs to thrust output, motor stepping is strong.The present invention reaches the purpose of design of opposite friction drag reduction power inertia piezoelectric motor to provide a kind of efficient control method to friction drag reduction power inertia piezoelectric motor.
Description
Technical field
The present invention relates to a kind of control method of piezoelectricity stepper, it is more particularly to a kind of come using opposite friction it is effective and can
The control method of the anti-drag inertial piezoelectric stepper of control, belongs to piezoelectric positioner technical field.
Background technology
Piezo-electric motor be it is a kind of mover is generated using piezoelectrics repeat cumulative piezoelectric movement promote mover compared with
The piezoelectric positioner of stator stepping.It can be achieved at the same time the big stroke of macroscopic view and nanometer even Ethylmercurichlorendimide more than millimeter because of piezo-electric motor
Superhigh precision positions and is widely used in contemporary optics, ultraprecise machine-building, micro-electronic manufacturing, biology, medicine and boat
Many key areas such as its aviation.It is very important nanosecond science and technology and national strategy major fields instrument.
In recent years, the performance of piezo-electric motor is constantly being promoted, and towards small size, high rigidity, high-precision and high thrust
Direction is developed.And the inertia piezoelectric motor of early stage be it is a kind of because it is simple and compact for structure, applied widely the features such as and it is extensive
The piezo-electric motor of application.Its basic principle be using the unexpected deformation of the inertia and piezoelectrics of sliding block come manufacture relative displacement from
And make sliding block stepping.It is small there are still thrust output although inertia piezoelectric motor achieves immense success, startup voltage is big etc.
Fatal defects.In order to fill up these shortcomings, it is proposed that crossing " opposite friction drag reduction power inertia piezoelectric motor and control methods and scanning
Probe microscope " is (see Chinese Patent Application No.：201510189463.1) it is, that rigidity is strong, thrust is big, stroke the advantages of the invention
Greatly, symmetry is high possesses small size simultaneously, and suitable for large change warm area.
However the piezoelectricity stepper does not provide an effective control method motor to be made to realize continual and steady stepping yet,
So that such motor never obtains practical application.
In the present invention, we are then attempted by many experiments, have drawn the control method that can make the effective stepping of motor.
It was found that under the control method, by two paths of signals cooperation, we obtain bigger than the motor that signal drives all the way in the past
Step-length much and much smaller startup voltage.It is lacked this means inertia piezoelectric motor thrust is small, step-length is small, startup voltage is big
The application value that point will completely be filled up and bigger will be obtained in industry-by-industry.
The content of the invention
The purpose of the present invention：In order to solve the problems, such as that opposite friction drag reduction power inertia piezoelectric motor can not be driven normally,
A kind of efficient control method is provided, reaches the purpose of design of opposite friction drag reduction power inertia piezoelectric motor.
The present invention realizes that the technical solution of above-mentioned purpose is：
The control method of opposite friction drag reduction power inertia piezoelectric motor of the invention is characterized in following Jia Luheyi roads
Signal controls secondary piezoelectrics and driving piezoelectrics respectively, and the five stage time domain control signals per road are with described in following order driving
Opposite friction drag reduction power inertia piezoelectric motor, completes the stepping of a step：
The first road control signal first stage starts from one T1 of moment, ends at two T2 of moment, and pitch of signal note increases during this period
Add, the second road control signal first stage starts from one T1 of moment, ends at two T2 of moment, and signal remains unchanged during this period；
First road control signal second stage starts from two T2 of moment, ends at moment front three T3A, and signal is kept during this period
Constant, second road control signal second stage starts from two T2 of moment, ends at three second T3B of moment, and pitch of signal note increases during this period
Add, and moment front three T3A is located at before three second T3B of moment；
The first road control signal phase III starts from moment front three T3A, ends at moment tetramethyl T4A, during this period signal
Monotone decreasing, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block
The initiation value of the slip of opposite direction, second road control signal phase III start from three second T3B of moment, end at moment tetrem
T4B, during this period signal remain unchanged, and moment tetramethyl T4A be located at three second T3B of moment after, before moment tetrem T4B, first
The duration of second two paths of signals phase III is respectively less than 400 microseconds；
First road control signal fourth stage starts from moment tetramethyl T4A, ends at five T5 of moment, and signal is kept during this period
Constant, second road control signal fourth stage starts from moment tetrem T4B, ends at five T5 of moment, and pitch of signal note subtracts during this period
It is few, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate phase Tongfang on sliding block
To slip initiation value；
The 5th stage of first road control signal starts from five T5 of moment, ends at six T6 of moment, and pitch of signal note increases during this period
Add, the second road control signal first stage starts from five T5 of moment, ends at six T6 of moment, and signal remains unchanged during this period.
The slope that the second road signal second stage is monotonically changed is constant.
The slope that the second road signal second stage is monotonically changed increases at any time.
The signal amplitude of the second road signal fourth stage is identical with the signal amplitude of second road signal first stage, and protects
It holds constant.
The first road signal and the amplitude excursion of second road signal are negative minimum value to positive maximum.
The first road signal and second road signal increases following signal before five stage time domain control signals start：First road
Signal remains unchanged, monotone decreasing after second road control signal is first increased monotonically.
The present invention realizes that the technical solution of above-mentioned purpose can also be：
The control method of opposite friction drag reduction power inertia piezoelectric motor of the invention is characterized in following Jia Luheyi roads
Signal controls secondary piezoelectrics and driving piezoelectrics respectively, and the six stage time domain control signals per road are with described in following order driving
Opposite friction drag reduction power inertia piezoelectric motor, completes the stepping of a step：
The first road control signal first stage starts from one T1 of moment, ends at moment diformazan T2A, and signal is kept during this period
Constant, the second road control signal first stage starts from one T1 of moment, ends at moment diethyl T2B, and pitch of signal note increases during this period
Add, and moment diformazan is located at before moment diethyl；
First road control signal second stage starts from moment diformazan T2A, ends at moment front three T3A, during this period signal
Monotone decreasing, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block
The initiation value of the slip of opposite direction, second road control signal second stage start from moment diethyl T2B, end at three second of moment
T3B, during this period signal remain unchanged, and moment front three T3A be located at moment diethyl T2B after, before three second T3B of moment, first
The duration of second two paths of signals second stage is respectively less than 400 microseconds；
The first road control signal phase III starts from moment front three T3A, ends at four T4 of moment, and signal is kept during this period
Constant, second road control signal fourth stage starts from three second T3B of moment, ends at four T4 of moment, and pitch of signal note subtracts during this period
It is few, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate phase Tongfang on sliding block
To slip initiation value；
First road control signal fourth stage starts from four T4 of moment, ends at five first T5A of moment, and signal is kept during this period
Constant, second road control signal fourth stage starts from four T4 of moment, ends at five second T5B of moment, and pitch of signal note increases during this period
Add, and five first of moment is located at before five second of moment；
The 5th stage of first road control signal starts from five first T5A of moment, ends at moment pregnancy T6A, during this period signal
It is increased monotonically, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block
The initiation value of the slip of opposite direction, the 5th stage of second road control signal start from five second T5B of moment, end at six second of moment
T6B, during this period signal remain unchanged, and moment pregnancy T6A be located at five second T5B of moment after, before six second T6B of moment, first
The duration of second two paths of signals second stage is respectively less than 400 microseconds；
The 6th stage of first road control signal starts from moment pregnancy T6A, ends at seven T7 of moment, and signal is kept during this period
Constant, the 6th stage of second road control signal starts from six second T6B of moment, ends at seven T7 of moment, and pitch of signal note subtracts during this period
It is few, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate phase Tongfang on sliding block
To slip initiation value.
When the second road signal phase III and the signal amplitude in the 6th stage start with the second road signal first stage
Signal amplitude is identical, and remains unchanged.
The first road signal and the amplitude excursion of second road signal are negative minimum value to positive maximum.
The Jia Luheyi roads signal increases following letter before first and fourth stage time domain control signal start
Number：First road signal remains unchanged, monotone decreasing after second road signal is first increased monotonically.
The present invention operation principle be：
First stage：First road signal is climbing signal, and secondary piezoelectrics gradually extend under the control of this descending signal, for it
Action " saving up strength " afterwards；Second road signal is waiting signal, and driving piezoelectrics is allowed to enter loitering phase, do not generate interference to mover.
Since secondary piezo tube is extended compared with sliding block both ends simultaneously, so, mover will not be slided compared with secondary piezoelectrics center.
Second stage：First road signal is waiting signal, and secondary piezoelectrics is allowed to enter loitering phase, does not generate interference to mover.
Second road signal is quick climbing signal, make driving piezoelectrics quickly climb herein signal control under rapid elongation, it is therefore an objective to give
One larger pace of mover.
Phase III：First road signal is quick landslide signal, controls secondary piezoelectrics rapid desufflation and this contraction speed needs to compare
The sliding speed of the relatively secondary piezoelectrics of mover is fast, to ensure that secondary piezoelectrics both ends can make both ends compared with mover counter motion
Direction is opposite and cancels out each other, and achievees the effect that mover force of sliding friction greatly reduces, and mover is enable to rub
Continue to slide forward in the case of power very little；Second road signal is waiting signal, and driving piezoelectrics keep former extended length constant, move
Son will be moved forward due to self inertia.
Fourth stage：First road signal is waiting signal, and secondary piezoelectrics is allowed to enter loitering phase, does not generate interference to mover；
Second road signal is quick landslide signal, makes driving piezoelectrics rapid desufflation under the control of this dropping signal, it is therefore an objective to allow and still exist
The mover of forward slip is moved with secondary piezo tube snap back, realize long stride into.
5th stage：First road signal is climbing signal, and secondary piezoelectrics gradually extend under the control of this descending signal simultaneously " returns
Position ", since secondary piezo tube is extended compared with sliding block both ends simultaneously, so, mover will not be slided compared with secondary piezoelectrics center；Second
Road signal is waiting signal, and driving piezoelectrics is allowed to enter loitering phase, do not generate interference to mover.
It is short compared to the mover maximum speed duration caused by conventional inertia motor waveform, frictional force is big, our ripple
Shape is eliminated by secondary piezoelectrics and rubbed, and substantially increases the duration of maximum speed.This just can be so that the stepping rate of kinetoplast
(high speed slide) is improved with step-length and starts voltage reduction (sliding frictional force to greatly reduce), it is achieved thereby that the purpose of the present invention.
According to our the actual data measured, using the waveform motor step-length than the inertial motor of traditional waveform is used to improve 4-
10 times, while start voltage and reduce 50V.Certainly, the coasting time of phase III is too long can make mover speed be kept to zero, unfavorable
In withdrawing, measured according to we are actual, sliding time is proper within 400 microseconds.
The six stage step modes of the present invention realize stepping twice, each stepping principle and above-mentioned class in one cycle
Seemingly, but differ in that and eliminate " the saving up strength " of secondary piezoelectrics and " playback " stage.I.e. secondary piezoelectrics are in minimum shortening state
Or after maximum elongation state do not have to be returned to nature, but directly carry out step by step into.So eliminate " saving up strength " and
The time of " playback ", can allow stepping period is shorter, speed faster, convenient for by motor applications in needing high frequency or Fast Marching
Under environment.
The driving of the invention for not only solving opposite friction drag reduction power inertia piezoelectric motor can be seen that according to above-mentioned principle
Problem, compared with existing inertial motor actuation techniques, beneficial effects of the present invention are also embodied in：
(1) the startup voltage of inertia piezoelectric motor is significantly reduced.
(2) stepping rate and step-length of inertia piezoelectric motor are dramatically increased.
(3) make inertia piezoelectric motor work relatively reliable.
Description of the drawings
Fig. 1 is the common waveform diagram that inertia piezoelectric motor uses spiking control method.
Fig. 2 is the waveform diagram of the control method of opposite friction drag reduction power inertia piezoelectric motor of the invention.
Fig. 3 is the control method of opposite friction drag reduction power inertia piezoelectric motor of the invention, and the slope of second stage is constant
Second road signal waveform schematic diagram.
Fig. 4 is the control method of opposite friction drag reduction power inertia piezoelectric motor of the invention, and fourth stage average slope angle exists
Second road signal waveform schematic diagram between 80 degree to 90 degree.
Fig. 5 is the waveform diagram of the control method of the reversed inertia piezoelectric motor of opposite friction drag reduction power of the invention.
Fig. 6 is the waveform signal of the control method of opposite friction drag reduction power inertia piezoelectric motor of the present invention with spy process
Figure.
Fig. 7 is the waveform diagram for taking over control method of opposite friction drag reduction power inertia piezoelectric motor of the invention.
Figure label：1A first road signal first stage control signal, 2A first road signal second stage control signal, 3A first road
Signal phase III control signal, 4A first road signal fourth stage control signal, the 5th stage control signal of 5A first road signal, 6A
The 6th stage control signal of first road signal；1B second road signal first stage control signal, 2B second road signal second stage control letter
Number, 3B second road signal phase III control signal, 4B second road signal fourth stage control signal, the 5th stage of 5B second road signal control
Signal processed, the 6th stage control signal of 6B second road signal.The T1 moment one, the T2 moment two, T2A moment diformazan, T2B moment diethyl,
T3A moment front three, three second of T3B moment, T4 moment four, T4A moment tetramethyl, T4B moment tetrem, T5 moment five, T5A moment five
Five second of first, T5B moment, T6 moment six, the pregnancy of T6A moment, six second of T6B moment, T7 moment seven.
Below by way of specific embodiment and waveform attached drawing, the invention will be further described.
Specific embodiment
Embodiment 1：The control method of opposite friction drag reduction power inertia piezoelectric motor
Referring to attached drawing 2, the control method of the opposite friction drag reduction power inertia piezoelectric motor of the present invention is characterized in following
Jia Luheyi roads signal controls secondary piezoelectrics and driving piezoelectrics respectively, and the five stage time domain control signals per road are with following suitable
Sequence drives the opposite friction drag reduction power inertia piezoelectric motor, completes the stepping of a step：
The first road control signal first stage starts from one T1 of moment, ends at two T2 of moment, and pitch of signal note increases during this period
Add, the second road control signal first stage starts from one T1 of moment, ends at two T2 of moment, and signal remains unchanged during this period；
First road control signal second stage starts from two T2 of moment, ends at moment front three T3A, and signal is kept during this period
Constant, second road control signal second stage starts from two T2 of moment, ends at three second T3B of moment, and pitch of signal note increases during this period
Add, and moment front three T3A is located at before three second T3B of moment；
The first road control signal phase III starts from moment front three T3A, ends at moment tetramethyl T4A, during this period signal
Monotone decreasing, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block
The initiation value of the slip of opposite direction, second road control signal phase III start from three second T3B of moment, end at moment tetrem
T4B, during this period signal remain unchanged, and moment tetramethyl T4A be located at three second T3B of moment after, before moment tetrem T4B, first
The duration of second two paths of signals phase III is respectively less than 400 microseconds；
First road control signal fourth stage starts from moment tetramethyl T4A, ends at five T5 of moment, and signal is kept during this period
Constant, second road control signal fourth stage starts from moment tetrem T4B, ends at five T5 of moment, and pitch of signal note subtracts during this period
It is few, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate phase Tongfang on sliding block
To slip initiation value；
The 5th stage of first road control signal starts from five T5 of moment, ends at six T6 of moment, and pitch of signal note increases during this period
Add, the second road control signal first stage starts from five T5 of moment, ends at six T6 of moment, and signal remains unchanged during this period.
Its operation principle is：
First stage：First road signal is climbing signal, and secondary piezoelectrics gradually extend under the control of this descending signal, for it
Action " saving up strength " afterwards；Second road signal is waiting signal, and driving piezoelectrics is allowed to enter loitering phase, do not generate interference to mover.
Since secondary piezo tube is extended compared with sliding block both ends simultaneously, so, mover will not be slided compared with secondary piezoelectrics center.
Second stage：First road signal is waiting signal, and secondary piezoelectrics is allowed to enter loitering phase, does not generate interference to mover.
Second road signal is quick climbing signal, make driving piezoelectrics quickly climb herein signal control under rapid elongation, it is therefore an objective to give
One larger pace of mover.
Phase III：First road signal is quick landslide signal, controls secondary piezoelectrics rapid desufflation and this contraction speed needs to compare
The sliding speed of the relatively secondary piezoelectrics of mover is fast, to ensure that secondary piezoelectrics both ends can make both ends compared with mover counter motion
Direction is opposite and cancels out each other, and achievees the effect that mover force of sliding friction greatly reduces, and mover is enable to rub
Continue to slide forward in the case of power very little；Second road signal is waiting signal, and driving piezoelectrics keep former extended length constant, move
Son will be moved forward due to self inertia.
Fourth stage：First road signal is waiting signal, and secondary piezoelectrics is allowed to enter loitering phase, does not generate interference to mover；
Second road signal is quick landslide signal, makes driving piezoelectrics rapid desufflation under the control of this dropping signal, it is therefore an objective to allow and still exist
The mover of forward slip is moved with secondary piezo tube snap back, realize long stride into.
5th stage：First road signal is climbing signal, and secondary piezoelectrics gradually extend under the control of this descending signal simultaneously " returns
Position ", since secondary piezo tube is extended compared with sliding block both ends simultaneously, so, mover will not be slided compared with secondary piezoelectrics center；Second
Road signal is waiting signal, and driving piezoelectrics is allowed to enter loitering phase, do not generate interference to mover.
It is short compared to the mover maximum speed duration caused by conventional inertia motor waveform, frictional force is big, our ripple
Shape is eliminated by secondary piezoelectrics and rubbed, and substantially increases the duration of maximum speed.This just can be so that the stepping rate of kinetoplast
(high speed slide) is improved with step-length and starts voltage reduction (sliding frictional force to greatly reduce), it is achieved thereby that the purpose of the present invention.
According to our the actual data measured, using the waveform motor step-length than the inertial motor of traditional waveform is used to improve 4-
10 times, while start voltage and reduce 50V.Certainly, the coasting time of phase III is too long can make mover speed be kept to zero, unfavorable
In withdrawing, measured according to we are actual, sliding time is proper within 400 microseconds.
The present embodiment Zhong Jia roads and second road signal are increased and decreased as positive value.
Different according to piezoelectrics polarity, application positive signal, which can refer to piezoelectrics elongation, on piezoelectrics can also refer to piezoelectrics
It shrinks, is determined on a case-by-case basis.
Due to maximum voltage limit, control signal start from scratch variation in the case of piezoelectrics deformation it is inefficient.Therefore,
The amplitude excursion of first road signal and second road signal is set to negative maximum to positive maximum by us, can effectively be promoted
Piezoelectrics deformation efficiency.
The slope that the present embodiment Zhong Yi roads signal second stage is monotonically changed can increase at any time, see attached drawing 2, can also
For constant, attached drawing 3 is seen.
The signal amplitude of the present embodiment second road signal fourth stage is identical with the signal amplitude of second road signal first stage, and
It remains unchanged, sees attached drawing 4.In fact, second road signal will not be infinite by the slope of phase III to fourth stage signal intensity
Greatly, therefore the beginning of fourth stage can include the transition region of the quick reduction of a segment signal.
Embodiment 2：The control method of the reversed inertia piezoelectric motor of opposite friction drag reduction power
If define above-described embodiment 1 control method in order to control the present invention to friction drag reduction power inertia piezoelectric motor just
To stepping, then the present embodiment is to control its backstepping, its main feature is that with following first and second two-way：Jia Luheyi roads control pair respectively
Piezoelectrics and driving piezoelectrics, the five stage time domain control signals per road drive the opposite friction drag reduction power to be used in the following order
Property piezo-electric motor, complete a step stepping：
The first road control signal first stage starts from one T1 of moment, ends at two T2 of moment, and pitch of signal note increases during this period
Add, the second road control signal first stage starts from one T1 of moment, ends at two T2 of moment, and signal remains unchanged during this period；
First road control signal second stage starts from two T2 of moment, ends at moment front three T3A, and signal is kept during this period
Constant, second road control signal second stage starts from two T2 of moment, ends at three second T3B of moment, and pitch of signal note increases during this period
Add, and moment front three is located at before three second of moment；
The first road control signal phase III starts from moment front three T3A, ends at moment tetramethyl T4A, during this period signal
Monotone decreasing, and the maximum of its slope absolute value is more than two contact points that can make sliding block and secondary piezoelectrics while generates opposite
The initiation value of slip, second road control signal phase III start from three second T3B of moment, end at moment tetrem T4B, during this period
Signal remains unchanged, and moment tetramethyl T4A be located at three second T3B of moment after, before moment tetrem T4B, the first and second two paths of signals
The triphasic duration is respectively less than 400 microseconds；
First road control signal fourth stage starts from moment tetramethyl T4A, ends at five T5 of moment, and signal is kept during this period
Constant, second road control signal fourth stage starts from moment tetrem T4B, ends at five T5 of moment, and pitch of signal note subtracts during this period
It is few, and the maximum of its slope absolute value is more than can make what two contact points of sliding block and secondary piezoelectrics produced relative sliding simultaneously
Initiation value；
The 5th stage of first road control signal starts from five T5 of moment, ends at six T6 of moment, and pitch of signal note increases during this period
Add, the second road control signal first stage starts from five T5 of moment, ends at six T6 of moment, and signal remains unchanged during this period.
Increasing and decreasing as negative value for the present embodiment Zhong Jia roads and second road signal, is shown in attached drawing 5.
Embodiment 3：The control method of opposite friction drag reduction power inertia piezoelectric motor with the process of spy
Similar to above-described embodiment 1 and 2, the process that motor is made first to carry out a step spy is may require that in certain applications, is determined
Stepping is carried out again after step-length is suitable.Therefore, referring to attached drawing 6, we are in first road signal and second road signal in the time domain control of five stages
Signal processed increases following signal before starting：First road signal remains unchanged, monotone decreasing after second road signal is first increased monotonically.
Embodiment 4：Opposite friction drag reduction power inertia piezoelectric motor takes over control method
Control method is taken over referring to the opposite friction drag reduction power inertia piezoelectric motor of 7 the present embodiment of attached drawing in one cycle
Realize stepping twice, each stepping principle is similar with above-described embodiment 1, but differs in that " the saving up strength " for eliminating secondary piezoelectrics
" playback " stage.I.e. secondary piezoelectrics do not have to be returned to nature after being in minimum shortening state or maximum elongation state, and
Be directly carry out step by step into.So eliminate the time of " saving up strength " and " playback ", can allow stepping period is shorter, speed more
Soon, convenient for by motor applications in the environment of high frequency or Fast Marching is needed.It is characterized in that with following Jia Luheyi roads signal
Secondary piezoelectrics and driving piezoelectrics are controlled respectively, and the six stage time domain control signals per road are described opposite with following order driving
Friction drag reduction power inertia piezoelectric motor completes the stepping of a step：
The first road control signal first stage starts from one T1 of moment, ends at moment diformazan T2A, and signal is kept during this period
Constant, the second road control signal first stage starts from one T1 of moment, ends at moment diethyl T2B, and pitch of signal note increases during this period
Add, and moment diformazan is located at before moment diethyl；
First road control signal second stage starts from moment diformazan T2A, ends at moment front three T3A, during this period signal
Monotone decreasing, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block
The initiation value of the slip of opposite direction, second road control signal second stage start from moment diethyl T2B, end at three second of moment
T3B, during this period signal remain unchanged, and moment front three T3A be located at moment diethyl T2B after, before three second T3B of moment, first
The duration of second two paths of signals second stage is respectively less than 400 microseconds；
The first road control signal phase III starts from moment front three T3A, ends at four T4 of moment, and signal is kept during this period
Constant, second road control signal fourth stage starts from three second T3B of moment, ends at four T4 of moment, and pitch of signal note subtracts during this period
It is few, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate phase Tongfang on sliding block
To slip initiation value；
First road control signal fourth stage starts from four T4 of moment, ends at five first T5A of moment, and signal is kept during this period
Constant, second road control signal fourth stage starts from four T4 of moment, ends at five second T5B of moment, and pitch of signal note increases during this period
Add, and five first of moment is located at before five second of moment；
The 5th stage of first road control signal starts from five first T5A of moment, ends at moment pregnancy T6A, during this period signal
It is increased monotonically, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block
The initiation value of the slip of opposite direction, the 5th stage of second road control signal start from five second T5B of moment, end at six second of moment
T6B, during this period signal remain unchanged, and moment pregnancy T6A be located at five second T5B of moment after, before six second T6B of moment, first
The duration of second two paths of signals second stage is respectively less than 400 microseconds；
The 6th stage of first road control signal starts from moment pregnancy T6A, ends at seven T7 of moment, and signal is kept during this period
Constant, the 6th stage of second road control signal starts from six second T6B of moment, ends at seven T7 of moment, and pitch of signal note subtracts during this period
It is few, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate phase Tongfang on sliding block
To slip initiation value.
The present embodiment Zhong Jia roads and second road signal are increased and decreased as positive value.
Embodiment 5：The reversed inertia piezoelectric motor of opposite friction drag reduction power takes over control method
If define above-described embodiment 4 control method in order to control the present invention to friction drag reduction power inertia piezoelectric motor just
To stepping, then the present embodiment is to control its backstepping, it is characterized in that controlling secondary pressure respectively with following Jia Luheyi roads signal
Electric body and driving piezoelectrics, the six stage time domain control signals per road drive the opposite friction drag reduction power to be used to following order
Property piezo-electric motor, complete a step stepping：
The first road control signal first stage starts from one T1 of moment, ends at moment diformazan T2A, and signal is kept during this period
Constant, the second road control signal first stage starts from one T1 of moment, ends at moment diethyl T2B, and pitch of signal note increases during this period
Add, and moment diformazan is located at before moment diethyl；
First road control signal second stage starts from moment diformazan T2A, ends at moment front three T3A, during this period signal
Monotone decreasing, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block
The initiation value of the slip of opposite direction, second road control signal second stage start from moment diethyl T2B, end at three second of moment
T3B, during this period signal remain unchanged, and moment front three T3A be located at moment diethyl T2B after, before three second T3B of moment, first
The duration of second two paths of signals second stage is respectively less than 400 microseconds；
The first road control signal phase III starts from moment front three T3A, ends at four T4 of moment, and signal is kept during this period
Constant, second road control signal fourth stage starts from three second T3B of moment, ends at four T4 of moment, and pitch of signal note subtracts during this period
It is few, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate phase Tongfang on sliding block
To slip initiation value；
First road control signal fourth stage starts from four T4 of moment, ends at five first T5A of moment, and signal is kept during this period
Constant, second road control signal fourth stage starts from four T4 of moment, ends at five second T5B of moment, and pitch of signal note increases during this period
Add, and five first of moment is located at before five second of moment；
The 5th stage of first road control signal starts from five first T5A of moment, ends at moment pregnancy T6A, during this period signal
It is increased monotonically, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block
The initiation value of the slip of opposite direction, the 5th stage of second road control signal start from five second T5B of moment, end at six second of moment
T6B, during this period signal remain unchanged, and moment pregnancy T6A be located at five second T5B of moment after, before six second T6B of moment, first
The duration of second two paths of signals second stage is respectively less than 400 microseconds；
The 6th stage of first road control signal starts from moment pregnancy T6A, ends at seven T7 of moment, and signal is kept during this period
Constant, the 6th stage of second road control signal starts from six second T6B of moment, ends at seven T7 of moment, and pitch of signal note subtracts during this period
It is few, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate phase Tongfang on sliding block
To slip initiation value.
The present embodiment Zhong Jia roads and second road signal are increased and decreased as negative value.
Embodiment 6：The control method of opposite friction drag reduction power inertia piezoelectric motor with the process of spy
Similar to above-described embodiment 4 and 5, the process that motor is made first to carry out a step spy is may require that in certain applications, is determined
Stepping is carried out again after step-length is suitable.Therefore, Jia Luheyi roads signal starts in first and fourth stage time domain control signal
Increase following signal before：First road signal remains unchanged, monotone decreasing after second road signal is first increased monotonically.
Claims (10)
1. a kind of control method of opposite friction drag reduction power inertia piezoelectric motor, it is characterized in that with following Jia Luheyi roads signal
Secondary piezoelectrics and driving piezoelectrics are controlled respectively, and the five stage time domain control signals per road are described opposite with following order driving
Friction drag reduction power inertia piezoelectric motor completes the stepping of a step：
The first road control signal first stage starts from one T1 of moment, ends at two T2 of moment, and pitch of signal note increases during this period, second
The road control signal first stage starts from one T1 of moment, ends at two T2 of moment, and signal remains unchanged during this period；
First road control signal second stage starts from two T2 of moment, ends at moment front three T3A, and signal is kept not during this period
Becoming, second road control signal second stage starts from two T2 of moment, ends at three second T3B of moment, and pitch of signal note increases during this period,
And moment front three T3A is located at before three second T3B of moment；
The first road control signal phase III starts from moment front three T3A, ends at moment tetramethyl T4A, during this period pitch of signal note
It reduces, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block on the contrary
The initiation value of the slip in direction, second road control signal phase III start from three second T3B of moment, end at moment tetrem T4B,
Signal remains unchanged during this, and moment tetramethyl T4A be located at three second T3B of moment after, before moment tetrem T4B, the first and second two-way
The duration of signal phase III is respectively less than 400 microseconds；
First road control signal fourth stage starts from moment tetramethyl T4A, ends at five T5 of moment, and signal is kept not during this period
Becoming, second road control signal fourth stage starts from moment tetrem T4B, ends at five T5 of moment, and pitch of signal note is reduced during this period,
And the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate equidirectional on sliding block
Slip initiation value；
The 5th stage of first road control signal starts from five T5 of moment, ends at six T6 of moment, and pitch of signal note increases during this period, second
The road control signal first stage starts from five T5 of moment, ends at six T6 of moment, and signal remains unchanged during this period.
2. opposite friction drag reduction power inertia piezoelectric motor control method as described in claim 1, it is characterized in that the second road
The slope that signal second stage is monotonically changed is constant.
3. opposite friction drag reduction power inertia piezoelectric motor control method as described in claim 1, it is characterized in that the second road
The slope that signal second stage is monotonically changed increases at any time.
4. opposite friction drag reduction power inertia piezoelectric motor control method as described in claim 1, it is characterized in that the second road
The signal amplitude of signal fourth stage is identical with the signal amplitude of second road signal first stage, and remains unchanged.
5. opposite friction drag reduction power inertia piezoelectric motor control method as described in claim 1, it is characterized in that the first road
The amplitude excursion of signal and second road signal is negative minimum value to positive maximum.
6. the opposite friction drag reduction power inertia piezoelectric motor control method as described in claim 1 or 2 or 3 or 4 or 5, feature
It is that the first road signal and second road signal increase following signal before five stage time domain control signals start：First road signal is protected
Hold constant, monotone decreasing after second road control signal is first increased monotonically.
7. a kind of control method of opposite friction drag reduction power inertia piezoelectric motor, it is characterized in that with following Jia Luheyi roads signal
Secondary piezoelectrics and driving piezoelectrics are controlled respectively, and the six stage time domain control signals per road are described opposite with following order driving
Friction drag reduction power inertia piezoelectric motor completes the stepping of a step：
The first road control signal first stage starts from one T1 of moment, ends at moment diformazan T2A, and signal is kept not during this period
Becoming, the second road control signal first stage starts from one T1 of moment, ends at moment diethyl T2B, and pitch of signal note increases during this period,
And moment diformazan is located at before moment diethyl；
First road control signal second stage starts from moment diformazan T2A, ends at moment front three T3A, during this period pitch of signal note
It reduces, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block on the contrary
The initiation value of the slip in direction, second road control signal second stage start from moment diethyl T2B, end at three second T3B of moment,
Signal remains unchanged during this, and moment front three T3A be located at moment diethyl T2B after, before three second T3B of moment, the first and second two-way
The duration of signal second stage is respectively less than 400 microseconds；
The first road control signal phase III starts from moment front three T3A, ends at four T4 of moment, and signal is kept not during this period
Becoming, second road control signal fourth stage starts from three second T3B of moment, ends at four T4 of moment, and pitch of signal note is reduced during this period,
And the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate equidirectional on sliding block
Slip initiation value；
First road control signal fourth stage starts from four T4 of moment, ends at five first T5A of moment, and signal is kept not during this period
Becoming, second road control signal fourth stage starts from four T4 of moment, ends at five second T5B of moment, and pitch of signal note increases during this period,
And five first of moment is located at before five second of moment；
The 5th stage of first road control signal starts from five first T5A of moment, ends at moment pregnancy T6A, during this period pitch of signal note
Increase, and the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to be generated on sliding block on the contrary
The initiation value of the slip in direction, the 5th stage of second road control signal start from five second T5B of moment, end at six second T6B of moment,
Signal remains unchanged during this, and moment pregnancy T6A be located at five second T5B of moment after, before six second T6B of moment, the first and second two-way
The duration of signal second stage is respectively less than 400 microseconds；
The 6th stage of first road control signal starts from moment pregnancy T6A, ends at seven T7 of moment, and signal is kept not during this period
Becoming, the 6th stage of second road control signal starts from six second T6B of moment, ends at seven T7 of moment, and pitch of signal note is reduced during this period,
And the maximum of its slope absolute value is more than sliding block and two contact points of secondary piezoelectrics can be made to generate equidirectional on sliding block
Slip initiation value.
8. opposite friction drag reduction power inertia piezoelectric motor control method as claimed in claim 7, it is characterized in that the second road
The signal amplitude when signal amplitude in signal phase III and the 6th stage starts with the second road signal first stage is identical, and keeps
It is constant.
9. opposite friction drag reduction power inertia piezoelectric motor control method as claimed in claim 7, it is characterized in that the first road
The amplitude excursion of signal and second road signal is negative minimum value to positive maximum.
10. the opposite friction drag reduction power inertia piezoelectric motor control method as described in claim 7 or 8 or 9, it is characterized in that described
Jia Luheyi roads signal increase following signal before first and fourth stage time domain control signal start：First road signal is protected
Hold constant, monotone decreasing after second road signal is first increased monotonically.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110752769A (en) * | 2019-11-13 | 2020-02-04 | 西安交通大学 | Bidirectional inertia type piezoelectric actuator driven by symmetrical sawtooth waves and actuating method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3902084A (en) * | 1974-05-30 | 1975-08-26 | Burleigh Instr | Piezoelectric electromechanical translation apparatus |
| JPH08266072A (en) * | 1995-03-23 | 1996-10-11 | Nikon Corp | Impact type drive unit and its drive method |
| CN1841175A (en) * | 2005-03-31 | 2006-10-04 | 富士能株式会社 | Driving mechanism, imaging mechanism and cellular phone |
| CN101656487A (en) * | 2008-08-19 | 2010-02-24 | 富士能株式会社 | Driving device and optical apparatus |
| CN102299662A (en) * | 2011-09-01 | 2011-12-28 | 中国科学技术大学 | Low voltage control method for inertia piezoelectric motor |
| CN104393786A (en) * | 2014-12-09 | 2015-03-04 | 南京邮电大学 | Piezoelectric motor for utilizing sliding rod inertia to generate stepping |
| CN104767421A (en) * | 2015-04-15 | 2015-07-08 | 中国科学院合肥物质科学研究院 | Opposite friction resistance-reducing inertial piezoelectric motor, control method and scanning probe microscope |
-
2017
- 2017-12-25 CN CN201711500904.0A patent/CN108111053A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3902084A (en) * | 1974-05-30 | 1975-08-26 | Burleigh Instr | Piezoelectric electromechanical translation apparatus |
| JPH08266072A (en) * | 1995-03-23 | 1996-10-11 | Nikon Corp | Impact type drive unit and its drive method |
| CN1841175A (en) * | 2005-03-31 | 2006-10-04 | 富士能株式会社 | Driving mechanism, imaging mechanism and cellular phone |
| CN101656487A (en) * | 2008-08-19 | 2010-02-24 | 富士能株式会社 | Driving device and optical apparatus |
| CN102299662A (en) * | 2011-09-01 | 2011-12-28 | 中国科学技术大学 | Low voltage control method for inertia piezoelectric motor |
| CN104393786A (en) * | 2014-12-09 | 2015-03-04 | 南京邮电大学 | Piezoelectric motor for utilizing sliding rod inertia to generate stepping |
| CN104767421A (en) * | 2015-04-15 | 2015-07-08 | 中国科学院合肥物质科学研究院 | Opposite friction resistance-reducing inertial piezoelectric motor, control method and scanning probe microscope |
Non-Patent Citations (4)
| Title |
|---|
| CH. RENNER,ET AL: "A vertical piezoelectric inertial slider" * |
| QI WANG,ET AL: "A compact, rigid, and easy-to-build piezo motor: The intact-tube GeckoDrive" * |
| S. H. PAN,ET AL: "3 He refrigerator based very low temperature scanning tunneling microscope" * |
| XIAOLONG LIU,ET AL: "A piezo motor based on a new principle with high output force, rigidity and integrity: The Tuna Drive" * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110752769A (en) * | 2019-11-13 | 2020-02-04 | 西安交通大学 | Bidirectional inertia type piezoelectric actuator driven by symmetrical sawtooth waves and actuating method |
| US11075593B2 (en) | 2019-11-13 | 2021-07-27 | Xi'an Jiaotong University | Inertial piezoelectric actuator driven by symmetrical sawtooth wave and method for achieving bi-directional motion thereof |
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