CN104393786A - Piezoelectric motor for utilizing sliding rod inertia to generate stepping - Google Patents
Piezoelectric motor for utilizing sliding rod inertia to generate stepping Download PDFInfo
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- CN104393786A CN104393786A CN201410746847.4A CN201410746847A CN104393786A CN 104393786 A CN104393786 A CN 104393786A CN 201410746847 A CN201410746847 A CN 201410746847A CN 104393786 A CN104393786 A CN 104393786A
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Abstract
The invention relates to a single-end clamping piezoelectric motor for utilizing sliding rod inertia to generate stepping. The motor comprises a piezoelectric scanning tube, a base, a sliding rod and force transfer blocks (two rigid force transfer blocks and an adjustable flexible force transfer block). The piezoelectric scanning tube is fixedly arranged on the base, the force transfer blocks are arranged at the free end of the piezoelectric scanning tube, the positive pressure between the sliding rod and the free end of the piezoelectric scanning tube is set through the force transfer blocks, and the positive pressure meets the friction generated by the sliding rod. The maximum friction generated by the positive pressure, and the maximum friction generated by the force transfer blocks at the free end of the piezoelectric scanning tube on the positive pressure of the sliding rod is slightly larger than the gravity of the sliding rod. The piezoelectric motor is simple, compact and firm in structure, high in driving force and very suitable to be used under the severe conditions such as ultralow temperature and strong magnetic fields with higher requirements for the piezoelectric structure and the materials.
Description
Technical field
The present invention relates to a kind of micro actuator, particularly a kind of micro piezoelectric motor based on piezoelectric effect, belongs to piezoelectric positioner technical field.
Background technology
Piezo-electric motor is a kind of piezoelectric positioner that the little displacement bimorph of microcosmic that each step produces can be summed into a macroscopical Large travel range, mainly utilizes the acoustic vibration of piezoelectric ceramic, electrostriction material and micro-strain to convert electrical energy into mechanical part and moves.Owing to having nano grade positioning precision, grade stroke, structure are simply firm, the advantages such as actuating force is large, be widely used in the desired position device in the nano science research under the fields, the particularly extreme condition such as pole low temperature and ultrastrong magnetic field such as nanometer technology, micromechanics and micro-system, communication sensing technology, semiconductor technology, photoelectron technology, electronic scanning technique, microbial technique and Aero-Space.
Current use comparatively widely piezo-electric motor is invented by the S.H.Pan of California, USA university, litter that the deformation successively of piezoelectric stack of shearing piezoelectric effect promotes to be fixed on center moves up and down specifically to utilize six to have, exist defect be needs six independently high voltage signal could drive, higher to the requirement of driving arrangement, and the processing and fabricating of this kind of piezo-electric motor is comparatively complicated.The inertia piezoelectric motor of people's inventions such as B.L.Blackford and F.Mugele, slide block is fixed in orbit by the magnetic field utilizing magnet to produce, then the inertial drive piezo-electric motor stepping of pulse voltage signal and slide block, the defect of this inertia piezoelectric motor is the introduction of magnetic field and fixes slide block, is not suitable for having in the environment of requirement motor configuration material at magnetic force microscopy and high-intensity magnetic field etc. using.
Summary of the invention
In order to solve the problem existing for existing piezo-electric motor, the invention provides a kind of piezo-electric motor utilizing slide bar inertia to produce stepping, utilizing a road lower voltage signal can produce larger driving force, greatly reduce complexity and the manufacturing cost of piezo-electric motor.
For realizing above technical purpose, the present invention will take following technical scheme:
A kind of single-ended clamping piezo-electric motor utilizing slide bar inertia to produce stepping, comprise piezoelectric scanning pipe, pedestal, slide bar and force-transmitting block, described piezoelectric scanning pipe fixed station stands on pedestal, arrange force-transmitting block at piezoelectric scanning pipe upper free end, arrange the normal pressure between slide bar and piezoelectric scanning pipe free end by force-transmitting block, the frictional force of normal pressure to the generation of slide bar meets: the maximum static friction force that the normal pressure of piezoelectric scanning pipe free end force-transmitting block to slide bar produces is just slightly larger than the gravity of slide bar.
As a further improvement on the present invention, described force-transmitting block is divided into rigidity force-transmitting block and flexible force transmission block, described slide bar, by the free end rigid phase pressure of the rigidity force-transmitting block set up and piezoelectric scanning tubular construction, is pressed with the free end flexibility of piezoelectric scanning tubular construction mutually by the adjustable flexibility force-transmitting block set up.
As a further improvement on the present invention, described rigidity force-transmitting block is quartz pushrod, and described flexible force transmission block is beryllium copper spring sheet.
As a further improvement on the present invention, rigidity force-transmitting block is quartz pushrod.
As a further improvement on the present invention, described piezoelectric scanning pipe is integrated setting.
As a further improvement on the present invention, the rigidity force-transmitting block and adjustable flexibility force-transmitting block that are fixed on this piezoelectrics free end is set up between piezoelectric scanning pipe free end and slide bar, its normal pressure size to slide bar can be adjusted by adjustable flexibility force-transmitting block, rigidity force-transmitting block must the opposite side symmetry relative to adjustable flexibility force-transmitting block position on piezoelectric scanning tubular construction be placed, and rigidity force-transmitting block and flexible force transmission block produce described normal pressure to slide bar.
The control method utilizing slide bar inertia to produce the single-ended clamping piezo-electric motor of stepping is characterized in that: control described piezoelectric scanning pipe respectively with following sequential, complete a stepping:
A, on piezoelectric scanning pipe, apply pulse voltage signal, piezoelectric scanning rostrum is is so elongated or shortened, due to the effect of inertia of litter, the free end not with piezoelectric scanning pipe is produced displacement by slide bar.
After b, pulse voltage signal have applied, slowly recall the voltage signal be applied on piezoelectric scanning pipe, make piezoelectric scanning pipe recover former length, piezoelectric scanning tubular construction free end, in the process recovering former length, will drive above-mentioned slide bar to produce displacement by stiction.
Beneficial effect:
1, the present invention utilizes two quartzy stubs and beryllium copper spring sheet jointly to grip the litter at center, structure is very simple, compact and firm, is applicable to very much implanting pole low temperature and high-intensity magnetic field etc. and uses in piezoelectric motor configuration and the stricter extreme condition of material requirements.
2, piezo-electric motor Jin Xu mono-road of the present invention low voltage pulse signal drives, and decreases drive voltage signal passage, reduces the cost of manufacture of piezo-electric motor.
3, the present invention utilizes the inertia of slide bar to carry out work, has larger driving force.
Accompanying drawing explanation
Fig. 1 (a) a kind of A-A ' face cutaway view utilizing slide bar inertia to produce the piezo-electric motor of stepping of the present invention;
Fig. 1 (b) a kind of vertical view utilizing slide bar inertia to produce the piezo-electric motor of stepping of the present invention;
Fig. 1 (c) a kind of B-B ' face cutaway view utilizing slide bar inertia to produce the piezo-electric motor of stepping of the present invention;
Fig. 2 a kind of fundamental diagram utilizing slide bar inertia to produce the piezo-electric motor of stepping of the present invention;
Fig. 3 a kind of downward stepping schematic diagram of piezo-electric motor utilizing slide bar inertia to produce stepping of the present invention.
In figure: piezoelectric scanning pipe 1; Pedestal 2; Slide bar 3; Rigidity force-transmitting block 4; Flexible force transmission block 5.
Embodiment
As shown in Fig. 1 (a), 1 (b), a kind of piezo-electric motor utilizing slide bar inertia to produce stepping of the present invention comprises piezoelectric scanning pipe, pedestal, slide bar and force-transmitting block, wherein:
Described piezoelectric scanning pipe fixed station stands on pedestal, at piezoelectric scanning pipe upper free end, force-transmitting block is set, arrange the normal pressure between slide bar and piezoelectric scanning pipe free end by force-transmitting block, the frictional force of normal pressure to the generation of slide bar meets: the maximum static friction force that the normal pressure of piezoelectric scanning pipe free end force-transmitting block to slide bar produces is just slightly larger than the gravity of slide bar.
Described force-transmitting block is divided into rigidity force-transmitting block and flexible force transmission block, and described slide bar, by the free end rigid phase pressure of the rigidity force-transmitting block set up and piezoelectric scanning tubular construction, is pressed with the free end flexibility of piezoelectric scanning tubular construction mutually by the adjustable flexibility force-transmitting block set up.
Described rigidity force-transmitting block is quartz pushrod, and described flexible force transmission block is beryllium copper spring sheet.
Described adjustable flexibility force-transmitting block can adjust its normal pressure size to slide bar, and rigidity force-transmitting block must the opposite side symmetry relative to adjustable flexibility force-transmitting block position on piezoelectric scanning pipe be placed.
As shown in Figures 2 and 3, a kind of operation principle utilizing slide bar inertia to produce the piezo-electric motor of stepping of the present invention is:
T
0moment, the non-making alive of piezoelectric scanning pipe, quartz stub and beryllium copper spring sheet grip center slide bar jointly, and because slide bar and the maximum static friction force between quartz pushrod and beryllium copper spring sheet are greater than slide bar self gravitation, slide bar will keep inactive state relative to piezoelectric scanning pipe.
T
1moment, start to apply a direct impulse voltage signal to piezoelectric scanning pipe, due to the piezoelectric effect of piezoelectric, piezoelectric scanning pipe will extend suddenly vertically, and slide bar is due to effect of inertia, keep original inactive state by continuing, therefore, slide bar produces downward relative sliding by relative to the force-transmitting block being fixed on piezoelectric scanning inside pipe wall.
T
2in the moment, pulse voltage signal has applied, and piezoelectric scanning pipe has extended and remained static, and the slide bar slided due to inertia by continue relative to force-transmitting block glide a segment distance arrive a new location point after static.
T
2-T
3moment, slowly recall the voltage signal put on piezoelectric scanning pipe, piezoelectric scanning pipe will return to non-retracted position gradually, in the process, because the maximum static friction force between slide bar and force-transmitting block is greater than the gravity of slide bar own, free end with piezoelectric scanning pipe moves downward by slide bar, and then completes once stepping downwards.
According to T
1-T
3the step that moment is corresponding, reciprocating operation, can drive slide bar constantly stepping continuously downwards.
The operation principle of slide bar upwards stepping is identical with it, is the driving voltage carrier phase shift 180 ° of phase angle than upwards stepping of applied drive voltage signal.
Claims (7)
1. the single-ended clamping piezo-electric motor utilizing slide bar inertia to produce stepping, comprise piezoelectric scanning pipe (1), pedestal (2), slide bar (3), force-transmitting block, it is characterized in that: piezoelectric scanning pipe (1) fixed station stands on pedestal (2), at piezoelectric scanning pipe (1) upper free end, force-transmitting block is set, by force-transmitting block, the normal pressure between slide bar (3) and piezoelectric scanning pipe (1) free end is set, normal pressure meets the frictional force of the generation of slide bar (3): the maximum static friction force that the normal pressure of piezoelectric scanning pipe (1) free end force-transmitting block to slide bar (3) produces is just slightly larger than the gravity of slide bar (3).
2. utilize slide bar inertia to produce the single-ended clamping piezo-electric motor of stepping according to claim 1, it is characterized in that: described force-transmitting block is divided into rigidity force-transmitting block (4) and flexible force transmission block (5), described slide bar (3), by the free end rigid phase pressure of the rigidity force-transmitting block set up and piezoelectric scanning pipe (1) structure, is pressed with the free end flexibility of piezoelectric scanning pipe (1) structure mutually by the adjustable flexibility force-transmitting block set up.
3. utilize slide bar inertia to produce the single-ended clamping piezo-electric motor of stepping according to claim 2, it is characterized in that: flexible force transmission block (5) is beryllium copper sheet.
4. according to Claims 2 or 3, utilize slide bar inertia to produce the single-ended clamping piezo-electric motor of stepping, it is characterized in that: rigidity force-transmitting block (4) is quartz pushrod.
5. utilize slide bar inertia to produce the single-ended clamping piezo-electric motor of stepping according to claim 2, it is characterized in that: described piezoelectric scanning pipe (1) is integrated setting.
6. according to right 1 or 2 or 3 or 5, utilize slide bar inertia to produce the single-ended clamping piezo-electric motor of stepping, it is characterized in that: between piezoelectric scanning pipe (1) free end and slide bar (3), set up the rigidity force-transmitting block being fixed on this piezoelectrics free end and adjustable flexibility force-transmitting block, its normal pressure size to slide bar (3) can be adjusted by adjustable flexibility force-transmitting block, rigidity force-transmitting block must the opposite side symmetry relative to adjustable flexibility force-transmitting block position in piezoelectric scanning pipe (1) structure be placed, rigidity force-transmitting block and flexible force transmission block produce described normal pressure to slide bar (3).
7. according to claim 1 or 2 or 3 or 4, utilize slide bar inertia to produce a control method for the single-ended clamping piezo-electric motor of stepping, it is characterized in that: control described piezoelectric scanning pipe (1) respectively with following sequential, complete a stepping:
A, on piezoelectric scanning pipe (1), apply pulse voltage signal, piezoelectric scanning pipe (1) is elongated or shortened suddenly, due to the effect of inertia of litter (3), slide bar (3) will not produce displacement with the free end of piezoelectric scanning pipe (1).
After b, pulse voltage signal have applied, slowly recall the voltage signal be applied on piezoelectric scanning pipe (1), piezoelectric scanning pipe (1) is made to recover former length, piezoelectric scanning pipe (1) structure free end, in the process recovering former length, will drive above-mentioned slide bar (3) to produce displacement by stiction.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104836475A (en) * | 2015-05-06 | 2015-08-12 | 中国科学院合肥物质科学研究院 | Opposite-friction three-fold piezoelectric motor, control method thereof, and scanning probe microscope |
| CN105092896A (en) * | 2015-08-03 | 2015-11-25 | 中国科学院合肥物质科学研究院 | Single-scanning-tube-driven multidimensional piezoelectric motor and searchable scanning probe microscope |
| CN106546770A (en) * | 2016-09-29 | 2017-03-29 | 南京邮电大学 | A kind of PSTM based on inertia piezoelectric motor |
| CN106712569A (en) * | 2017-01-11 | 2017-05-24 | 南京邮电大学 | Inertial nanometer stepping motor based on piezoelectric stacks |
| CN107086812A (en) * | 2017-05-16 | 2017-08-22 | 南京邮电大学 | A kind of miniature nano-motor based on shearing piezoelectric stack |
| CN108111053A (en) * | 2017-12-25 | 2018-06-01 | 合肥中科微力科技有限公司 | A kind of control method of opposite friction drag reduction power inertia piezoelectric motor |
| CN111525833A (en) * | 2020-05-15 | 2020-08-11 | 合肥工业大学 | Sawtooth wave driven piezoelectric motor |
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| JPH10323060A (en) * | 1997-05-14 | 1998-12-04 | Honda Motor Co Ltd | Piezoelectric-type actuator |
| US20120025669A1 (en) * | 2010-07-30 | 2012-02-02 | Kabushiki Kaisha Toshiba | Drive apparatus |
| CN103023374A (en) * | 2012-12-28 | 2013-04-03 | 东南大学 | Inertia type piezoelectric linear motor |
| CN103986365A (en) * | 2014-05-16 | 2014-08-13 | 中国科学技术大学 | Multi-region drive inertia piezoelectric motor device, scanning probe microscope and control method |
| CN104079202A (en) * | 2014-06-23 | 2014-10-01 | 南京航空航天大学 | Inertia linear motor based on pull type piezoelectric actuator |
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2014
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10323060A (en) * | 1997-05-14 | 1998-12-04 | Honda Motor Co Ltd | Piezoelectric-type actuator |
| US20120025669A1 (en) * | 2010-07-30 | 2012-02-02 | Kabushiki Kaisha Toshiba | Drive apparatus |
| CN103023374A (en) * | 2012-12-28 | 2013-04-03 | 东南大学 | Inertia type piezoelectric linear motor |
| CN103986365A (en) * | 2014-05-16 | 2014-08-13 | 中国科学技术大学 | Multi-region drive inertia piezoelectric motor device, scanning probe microscope and control method |
| CN104079202A (en) * | 2014-06-23 | 2014-10-01 | 南京航空航天大学 | Inertia linear motor based on pull type piezoelectric actuator |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104836475A (en) * | 2015-05-06 | 2015-08-12 | 中国科学院合肥物质科学研究院 | Opposite-friction three-fold piezoelectric motor, control method thereof, and scanning probe microscope |
| CN105092896A (en) * | 2015-08-03 | 2015-11-25 | 中国科学院合肥物质科学研究院 | Single-scanning-tube-driven multidimensional piezoelectric motor and searchable scanning probe microscope |
| CN105092896B (en) * | 2015-08-03 | 2018-06-29 | 中国科学院合肥物质科学研究院 | The multidimensional piezo-electric motor and can search for scanning probe microscopy that single sweep pipe drives |
| CN106546770A (en) * | 2016-09-29 | 2017-03-29 | 南京邮电大学 | A kind of PSTM based on inertia piezoelectric motor |
| CN106546770B (en) * | 2016-09-29 | 2019-05-21 | 南京邮电大学 | A kind of scanning tunneling microscope based on inertia piezoelectric motor |
| CN106712569A (en) * | 2017-01-11 | 2017-05-24 | 南京邮电大学 | Inertial nanometer stepping motor based on piezoelectric stacks |
| CN107086812A (en) * | 2017-05-16 | 2017-08-22 | 南京邮电大学 | A kind of miniature nano-motor based on shearing piezoelectric stack |
| CN108111053A (en) * | 2017-12-25 | 2018-06-01 | 合肥中科微力科技有限公司 | A kind of control method of opposite friction drag reduction power inertia piezoelectric motor |
| CN111525833A (en) * | 2020-05-15 | 2020-08-11 | 合肥工业大学 | Sawtooth wave driven piezoelectric motor |
| CN111525833B (en) * | 2020-05-15 | 2021-03-12 | 合肥工业大学 | Sawtooth wave driven piezoelectric motor |
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