CN106546770A - A kind of PSTM based on inertia piezoelectric motor - Google Patents
A kind of PSTM based on inertia piezoelectric motor Download PDFInfo
- Publication number
- CN106546770A CN106546770A CN201610865249.8A CN201610865249A CN106546770A CN 106546770 A CN106546770 A CN 106546770A CN 201610865249 A CN201610865249 A CN 201610865249A CN 106546770 A CN106546770 A CN 106546770A
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- piezoelectric
- slide bar
- scanning pipe
- guide rail
- pstm
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The present invention relates to a kind of PSTM based on inertia piezoelectric motor, including a piezoelectric scanning pipe, T-shaped insulating guide rail, four silicon nitride balls, metal clips, slide bar, mirror body and probe.Wherein, four silicon nitride balls and metal clips are bonded on insulating guide rail, the slide bar fixed in which by fashion of extrusion.Insulating guide rail is bonded and fixed to piezoelectric scanning pipe one end, and the other end of piezoelectric scanning pipe is bonded and fixed in microscope mirror body.Based on the inertia of slide bar, apply the nanoscale stepping that pulse voltage signal all the way is capable of achieving slide bar to four external electrodes of piezoelectric scanning pipe.After the completion of stepping, apply the XY scanning directions that the different push pull voltage signal of two-way frequency is capable of achieving sample surfaces to four external electrodes of piezoelectric scanning pipe, the interior electrode of piezoelectric scanning pipe is used to scan feedback control.Present configuration is very simple, is capable of achieving nanoscale stepping and atomic accuracy scanning only with a piezoelectric scanning pipe, and be highly suitable for extremely low gentle ultrastrong magnetic field etc. has use under the extreme condition of larger restriction to microscope mirror body.
Description
Technical field
The present invention relates to a kind of micro actuator, more particularly to a kind of nanometer stepping for scanning probe microscope system
Device, belongs to piezoelectric positioner technical field.
Background technology
Nano-motor to be referred to and convert electrical energy into machine using piezoelectric ceramics, the acoustic vibration of electrostriction material and micro-strain
Tool part moves the new microdrive of form.Due to nano grade positioning precision, grade stroke, simple structure firmly,
The advantages of driving force is big, is widely used in nanometer technology, micromechanics and micro-system, communication sensing technology, semiconductor technology, light
The fields such as electronic technology, electronic scanning technique, microbial technique and Aero-Space, particularly extremely low gentle ultrastrong magnetic field etc. are extreme
Under the conditions of nano science research in desired position device.
Three kinds of nanometer stepper motors and the problem of presence at present used in business scanning probe microscope system are as follows：
(1) Pan types piezoelectricity stepper motor：The slide bar of fixed center, Ran Houtong are extruded mutually using 6 groups of shearing piezoelectric stacks
The 6 road high-voltage pulse signals for crossing controller and high-voltage amplifier output drive shearing piezoelectric stack alternating slip to realize stepping, walk
After the completion of entering, it is scanned by the piezoelectric scanning pipe being placed at the top of slide bar.Its motor makes complex and job insecurity,
And the purchasing price of multichannel dual pressure controller is expensive.
(2) Beetle types motor:The top of the same model being fixed on by three on pedestal is bonded with smooth ball respectively
Piezoelectric scanning pipe supports a sample round platform, and wherein round platform is the annulus that three inclined-planes are arranged at a bottom, by voltage control
The flexible and sidesway of three piezoelectric scanning pipes realizes slightly approaching for probe-sample, after the completion of stepping, using the 4th of the center that is placed in the
Root piezoelectric scanning pipe is scanned.Its motor operations needs four piezoelectric scanning pipes, makes and uses all more complicated, Er Qieti
Product is larger, is not suitable for using under extreme condition.
(3) Koala piezo-electric motors：Connected using two piezoelectric scanning pipes, using being fixed at the top of piezoelectric scanning pipe, middle part
Three groups of spring extruding fixations with bottom are placed in the slide bar at center, then control two piezoelectric scanning pipes by pulse voltage signal
It is in order flexible, realize approaching for probe-sample, after the completion of stepping, be scanned using the 3rd piezoelectric scanning pipe.Its motor
Three piezoelectric scanning pipes of need of work, and the processing to three groups of springs and assembly precision requirement are very high, and structural stability is not
It is high.
The content of the invention
Goal of the invention：In the presence of solving the problems, such as existing system of Scanning Tunneling Microscope.
In order to realize the technical purpose of the above, the present invention will take following technical scheme：
A kind of PSTM based on inertia piezoelectric motor, including a piezoelectric scanning pipe, T-shaped insulating guide rail,
Four silicon nitride balls, metal clips, slide bar, mirror body and probe.Wherein, four silicon nitride balls and metal clips are adhesively fixed
On insulating guide rail, the slide bar fixed in which by fashion of extrusion.Insulating guide rail is bonded and fixed to piezoelectric scanning pipe one end, piezoelectricity
The other end of flying-spot tube is bonded and fixed in microscope mirror body.
As a further improvement on the present invention, described T-shaped insulating guide rail can be preferably moulded by insulation and heat conductivility
Material or sapphire material are processed.
As a further improvement on the present invention, described silicon nitride ball can be smooth for arbitrary surfaces and rigidity is stronger
Ball.
As a further improvement on the present invention, described slide bar can be the smooth cylinder of material surface.
Compared with prior art, beneficial effects of the present invention are embodied in：
1) nanoscale stepping and the atom of sample surfaces of probe and sample are capable of achieving only with a piezoelectric scanning pipe
Precision is scanned.
2) slide bar extruding is fixed on T-shaped insulating guide rail using silicon nitride ball and metal clips, then integral adhesive
The free end of piezoelectric scanning pipe is fixed on, manufacture craft is simpler, and cost of manufacture is cheaper.
3) inertia piezoelectric motor only needs action of low-voltage pulse drive signal all the way, reduces to nanometer stepper motor drive control device
Requirement, and with bigger driving force, greatly reduce the complexity and manufacturing cost of PSTM.
Description of the drawings
Fig. 1 is that insulating guide rail is shown with slide bar installation in a kind of PSTM based on inertia piezoelectric motor of the present invention
It is intended to.
Fig. 2 is a kind of structural representation of the PSTM based on inertia piezoelectric motor of the present invention.
Label in figure：1 piezoelectric scanning pipe, 2T type insulating guide rails, 3 silicon nitride balls, 4 metal clips, 5 slide bars, 6 mirror bodies, 7
Probe, 8 samples.
Specific embodiment：
Below by way of specific embodiment, the invention will be further described：
As shown in fig. 1, a kind of PSTM based on inertia piezoelectric motor of the present invention, an including piezoelectricity is swept
Retouch pipe 1, T-shaped insulating guide rail 2, four silicon nitride balls 3, metal clips 4, slide bar 5, mirror body 6 and probe 7.Wherein, four nitridations
Silicon ball 3 and metal clips 4 are adhesively fixed on insulating guide rail 2, the slide bar 5 fixed in which by fashion of extrusion.Insulating guide rail 2
One end of piezoelectric scanning pipe 1 is bonded and fixed to, the other end of piezoelectric scanning pipe 1 is bonded and fixed in microscope mirror body 6.
Its operation principle is：
When four external electrodes of piezoelectric scanning pipe 1 are grounded, apply a pulse voltage to the interior electrode of piezoelectric scanning pipe 1
Signal, by sudden contraction, due to the effect of inertia of slide bar 5, slide bar 5 is generated piezoelectric scanning pipe 1 relative to T-shaped insulating guide rail 2
Relative to slide, after pulse voltage signal is removed, slide bar 5 goes a step further before driving the probe 7 of its front end.In next circulation
Before carrying out, the voltage signal of a reverse slow increase is applied by the interior electrode to piezoelectric scanning pipe 1, piezoelectric scanning pipe is made
1 drive probe 7 slowly extends to sample 8 and approaches, real-time detection tunneling current signal in approximate procedure, if it is big to detect setting value
Little tunnelling current signal, i.e., into tunnelling area to be scanned, conversely, continuing to circulate through into area to be scanned.In the same manner, if to upper
The pulse voltage drive signal that process applies reversed polarity is stated, then can control slide bar and probe 7 is driven away from sample 8.
Probe 7 is entered behind tunnel region with sample 8, and controller exports the different push pull voltage signal control piezoelectricity of two class frequencys
Four external electrodes of flying-spot tube 1 carry out X/Y scanning directions, and the interior electrode of piezoelectric scanning pipe 1 is used for the feedback control of tunnel knot size
System.
Claims (5)
1. a kind of PSTM based on inertia piezoelectric motor, an including piezoelectric scanning pipe (1), T-shaped insulating guide rail
(2), four silicon nitride balls (3), metal clips (4), slide bar (5), mirror body (6) and probe (7)；Wherein, four silicon nitride circles
Pearl (3) and metal clips (4) are fixedly bonded on insulating guide rail (2), the slide bar (5) fixed in which by fashion of extrusion；Insulation
Guide rail (2) is fixed in piezoelectric scanning pipe (1) one end, and the other end of piezoelectric scanning pipe (1) is bonded and fixed to microscope mirror body
On, slide bar (5) one end is provided with probe (7), and mirror body (6) is fixed on piezoelectric scanning pipe (1) periphery.
2. a kind of PSTM based on inertia piezoelectric motor according to claim 1, it is characterised in that described
Piezoelectric scanning pipe (1) alternately nanoscale stepping and atom level scanning imagery.
3. a kind of PSTM based on inertia piezoelectric motor according to claim 1, it is characterised in that the T
Type insulating guide rail (2) material is insulation and the preferable plastics of heat conductivility or sapphire.
4. a kind of PSTM based on inertia piezoelectric motor according to claim 1, it is characterised in that described
Silicon nitride ball be that surface is smooth and the stronger ball of rigidity.
5. a kind of PSTM based on inertia piezoelectric motor according to claim 1, it is characterised in that described
Slide bar is the smooth cylinder in surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610865249.8A CN106546770B (en) | 2016-09-29 | 2016-09-29 | A kind of scanning tunneling microscope based on inertia piezoelectric motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610865249.8A CN106546770B (en) | 2016-09-29 | 2016-09-29 | A kind of scanning tunneling microscope based on inertia piezoelectric motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106546770A true CN106546770A (en) | 2017-03-29 |
| CN106546770B CN106546770B (en) | 2019-05-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610865249.8A Active CN106546770B (en) | 2016-09-29 | 2016-09-29 | A kind of scanning tunneling microscope based on inertia piezoelectric motor |
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| Country | Link |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112540194A (en) * | 2020-12-04 | 2021-03-23 | 南京信息工程大学 | Modular quick-release combined scanning probe microscope |
| CN113406360A (en) * | 2021-06-30 | 2021-09-17 | 南京信息工程大学 | Nested scanning probe microscope |
| CN114545030A (en) * | 2022-01-24 | 2022-05-27 | 南京信息工程大学 | Extremely-simple single-scanning-tube scanning probe microscope structure and microscope |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201210411Y (en) * | 2007-12-10 | 2009-03-18 | 中国科学技术大学 | Non-friction inertial step scanner, same point scanning dual probe microscope |
| CN103151955A (en) * | 2011-12-06 | 2013-06-12 | 精工爱普生株式会社 | Piezoelectric motor, driving device, electronic component conveying device, electronic component inspection device, printing device, robot hand, and robot |
| CN104393786A (en) * | 2014-12-09 | 2015-03-04 | 南京邮电大学 | Piezoelectric motor for utilizing sliding rod inertia to generate stepping |
| CN104767421A (en) * | 2015-04-15 | 2015-07-08 | 中国科学院合肥物质科学研究院 | Opposite friction resistance-reducing inertial piezoelectric motor, control method and scanning probe microscope |
| CN105092896A (en) * | 2015-08-03 | 2015-11-25 | 中国科学院合肥物质科学研究院 | Single-scanning-tube-driven multidimensional piezoelectric motor and searchable scanning probe microscope |
-
2016
- 2016-09-29 CN CN201610865249.8A patent/CN106546770B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201210411Y (en) * | 2007-12-10 | 2009-03-18 | 中国科学技术大学 | Non-friction inertial step scanner, same point scanning dual probe microscope |
| CN103151955A (en) * | 2011-12-06 | 2013-06-12 | 精工爱普生株式会社 | Piezoelectric motor, driving device, electronic component conveying device, electronic component inspection device, printing device, robot hand, and robot |
| CN104393786A (en) * | 2014-12-09 | 2015-03-04 | 南京邮电大学 | Piezoelectric motor for utilizing sliding rod inertia to generate stepping |
| CN104767421A (en) * | 2015-04-15 | 2015-07-08 | 中国科学院合肥物质科学研究院 | Opposite friction resistance-reducing inertial piezoelectric motor, control method and scanning probe microscope |
| CN105092896A (en) * | 2015-08-03 | 2015-11-25 | 中国科学院合肥物质科学研究院 | Single-scanning-tube-driven multidimensional piezoelectric motor and searchable scanning probe microscope |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112540194A (en) * | 2020-12-04 | 2021-03-23 | 南京信息工程大学 | Modular quick-release combined scanning probe microscope |
| CN113406360A (en) * | 2021-06-30 | 2021-09-17 | 南京信息工程大学 | Nested scanning probe microscope |
| CN113406360B (en) * | 2021-06-30 | 2022-03-08 | 南京信息工程大学 | Nested scanning probe microscope |
| CN114545030A (en) * | 2022-01-24 | 2022-05-27 | 南京信息工程大学 | Extremely-simple single-scanning-tube scanning probe microscope structure and microscope |
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| Publication number | Publication date |
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| CN106546770B (en) | 2019-05-21 |
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