CN107632171A - Pstm - Google Patents
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- CN107632171A CN107632171A CN201710861990.1A CN201710861990A CN107632171A CN 107632171 A CN107632171 A CN 107632171A CN 201710861990 A CN201710861990 A CN 201710861990A CN 107632171 A CN107632171 A CN 107632171A
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- pstm
- hollow
- ball
- slide bar
- probe
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Abstract
The invention belongs to scanning probe microscopy technical field.Present invention solves the technical problem that it is：Existing PSTM is more using electric scanning pipe, makes and use is all more complicated, and volume is big, is not suitable for using under extreme conditions.The technical scheme is that：A kind of PSTM, the PSTM include mirror body, piezoelectric scanning pipe and piezoelectricity stepper motor, and mirror body build-in cavities, piezoelectric scanning pipe and piezoelectricity stepper motor are installed in the cavity.The invention has the advantages that it is simple for production, it can be completed to realize that the thick of probe sample is approached and scanned with 1 piezoelectric scanning pipe, can be used in extremely low temperature and high-intensity magnetic field etc. have the extreme environment of larger limitation to PSTM size.
Description
Technical field
The invention belongs to scanning probe microscopy technical field, and in particular to a kind of PSTM.
Background technology
PSTM plays very important work in fields such as Surface Science, material science and life sciences
With.Piezoelectricity stepper motor is the critical component of PSTM.Existing piezoelectricity stepper motor：Use 6 groups of shearing pressures
Electricity stacks the slide bar of mutually extruding fixed center, the 6 road high-voltage pulse signals then exported by controller and high-voltage amplifier
Driving shearing piezoelectric stack is alternately slided to realize stepping, this to design and produce complex, job insecurity, in addition, multichannel
The purchasing price of the dual pressure controller of drive signal is expensive；Glued respectively by the top of 3 same models being fixed on pedestal
The piezoelectric scanning pipe for being connected to smooth ball supports a sample round platform, and wherein round platform is the annulus that 3 inclined-planes are arranged at a bottom,
The flexible and sidesway of 3 piezoelectric scanning pipes is controlled to realize that the thick of probe-sample approaches by voltage, after the completion of stepping, using putting
The 4th piezoelectric scanning pipe in center is scanned, and its motor operations at least needs 4 piezoelectric scanning pipes to be scanned, and is made
It is all more complicated with use, and volume is big, is not suitable for using under extreme conditions.
The content of the invention
Present invention offer is a kind of to build simple and practical PSTM, the PSTM mirror body overall diameter
Only 15mm, length 25mm, there can be larger limitation to PSTM size in extremely low temperature and high-intensity magnetic field etc.
Used in extreme environment.
In order to solve the above technical problems, the present invention adopts the following technical scheme that：
A kind of PSTM of the present invention, the PSTM include mirror body, piezoelectric scanning pipe and pressure
Electric stepper motor, mirror body build-in cavities, piezoelectric scanning pipe and piezoelectricity stepper motor are installed in the cavity, piezoelectricity stepping horse
Up to including insulating guide rail, slide bar, spring leaf and ball, insulating guide rail includes hollow end and hollow positioning end, and the one of hollow end
End and one end of hollow positioning end are integrally formed, and ball is symmetrically bonded in the inside both sides of hollow end, and slide bar is led installed in insulation
The center of rail and and sphere contacts, the other end of the other end from hollow end and hollow positioning end is stretched respectively at the both ends of slide bar
Go out, one end of spring leaf and the interior side bonds of hollow positioning end, the other end of spring leaf contact with slide bar, outside hollow positioning end
Side is connected with one end of piezoelectric scanning pipe, and the other end of piezoelectric scanning pipe is connected with the upper end in cavity, and the lower end of cavity is provided with
Sample holder, slide bar are provided with probe socket receptacle close to this end of sample holder, probe are installed in probe socket receptacle.
The invention difference from existing technology is：The invention provides a kind of PSTM, the scanning tunnel
Road microscope can only be completed to realize that the thick of probe-sample is approached and scanned with 1 piezoelectric scanning pipe, have simple in construction, body
The characteristics of product is small, therefore, it is possible to be used in the extreme environment for having larger limitation to PSTM size.
As the improvement of the present invention, ball passes through epoxide-resin glue and the side bonds of inside two of the hollow end.
This design has advantage simple for production.
It is placed on as the improvement of the present invention, in addition to sample, sample on sample holder.
As the improvement of the present invention, probe uses the tungsten filament needle point obtained by electrochemical corrosion.
This design is easy to probe to be used in extreme environment.
As the improvement of the present invention, the spring leaf is beryllium copper spring piece.
As the improvement of the present invention, the ball is silicon nitride ball.
As the improvement of the present invention, the quantity of silicon nitride ball is 4.
The fixed slide bar positioned at insulating guide rail center of ball extruding is easy in this design.
In summary, the beneficial effects of the invention are as follows：It is simple for production, with 1 piezoelectric scanning pipe can complete to realize probe-
The thick of sample is approached and scanned, and can have the pole of larger limitation to PSTM size in extremely low temperature and high-intensity magnetic field etc.
End ring uses in border.
Brief description of the drawings
Fig. 1 is PSTM structural representation of the present invention.
Fig. 2 is piezoelectricity step-by-step motor structure schematic diagram of the present invention.
Fig. 3 is control circuit structural representation of the present invention.
Embodiment
Embodiment, as depicted in figs. 1 and 2, ball 7 and material first with epoxide-resin glue by 4 materials for silicon nitride
Matter is adhered on insulating guide rail 4 for the spring leaf 6 of beryllium copper to extrude fixed slide bar 5 at its center, again by it after solidification
Integral adhesive is fixed on wherein one end of piezoelectric scanning pipe 2, (the model EBL#3 of piezoelectric scanning pipe, external diameter O.D=6.3mm,
Wall thickness 0.5mm, length L=15mm), then the other end of piezoelectric scanning pipe 2 is bonded and fixed in microscope mirror body cavity 1-1
Upper end on.
As shown in figure 1, probe 10 is fixed on one end face scanning sample 11 of slide bar 5 using probe socket receptacle 9.Whole scanning
The mirror body overall diameter of tunnel microscope only has 15mm, length 25mm.Extremely low gentle high-intensity magnetic field etc. is highly suitable for scanning tunnel
Road microscope size, which has in the extreme environment of larger limitation, to be used.
Probe-sample approaches mechanism：When 4 external electrodes of piezoelectric scanning pipe connect electricity, pass through the interior electricity to piezoelectric scanning pipe
Pole applies the i.e. controllable slide bar of a peaking voltage drive signal and drives probe to sample direction approximation, in motor stepping
Cheng Zhong, the tunnelling current signal of real-time acquisition probe-sample room, such as detects tunnelling current signal, then stops the stepping of motor,
Now, piezo-electric motor, which enters, scans state to be measured；On the contrary then continuation stepping is until enter scanning tunnel region.Similarly, if to above-mentioned
Process applies the pulse voltage drive signal of reversed polarity, then can control slide bar to drive probe away from sample.
As shown in figure 3, applying pulse voltage signal to electrode in piezoelectric scanning pipe, image scanning is carried out after the completion of approaching
When, controller exports the voltage signal of two-way independence by X and Y passages, and two class frequencys are different pushes away through differential amplification output
Draw voltage signal control piezoelectric scanning pipe and carry out X/Y scanning directions.
What the present invention did not made to illustrate uses prior art.
Embodiment described above is only that the preferred embodiment of the present invention is described, not to the model of the present invention
Enclose and be defined, on the premise of design spirit of the present invention is not departed from, technical side of the those of ordinary skill in the art to the present invention
The various modifications and improvement that case is made, it all should fall into the protection domain of claims of the present invention determination.
Claims (7)
1. PSTM, it is characterised in that the PSTM include mirror body (1), piezoelectric scanning pipe (2),
And piezoelectricity stepper motor (3), mirror body (1) build-in cavities (1-1), piezoelectric scanning pipe (2) and piezoelectricity stepper motor (3) are respectively mounted
In the cavity (1-1), piezoelectricity stepper motor (3) includes insulating guide rail (4), slide bar (5), spring leaf (6) and ball
(7), insulating guide rail (4) includes hollow end (4-1) and hollow positioning end (4-2), one end of hollow end (4-1) and hollow positioning end
The one end of (4-2) is integrally formed, and ball (7) is symmetrically bonded in the inside both sides of hollow end (4-1), and slide bar (5) is arranged on insulation
The center of guide rail (4) and contacted with ball (7), the both ends of slide bar (5) are respectively from the other end of hollow end (4-1) and hollow
The other end of positioning end (4-2) stretches out, one end of spring leaf (6) and the interior side bonds of hollow positioning end (4-2), spring leaf (6)
The other end contacted with slide bar (5), the outside of hollow positioning end (4-2) is connected with one end of piezoelectric scanning pipe (2), piezoelectric scanning
The other end of pipe (2) is connected with the upper end in cavity (1-1), and the lower end of cavity (1-1) is provided with sample holder (8), and slide bar (5) leans on
This end of nearly sample holder (8) is provided with probe socket receptacle (9), and probe (10) is installed in probe socket receptacle (9).
2. PSTM as claimed in claim 1；Characterized in that, ball (7) by epoxide-resin glue with it is described
The side bonds of inside two of hollow end (4-1).
3. PSTM as claimed in claim 1；Characterized in that, also including sample (11), sample (11) is placed
On sample holder (8).
4. PSTM as claimed in claim 1；Obtained characterized in that, probe (10) uses by electrochemical corrosion
The tungsten filament needle point obtained.
5. PSTM as claimed in claim 1；Characterized in that, the spring leaf (6) is beryllium copper spring piece.
6. such as the PSTM any one of claim 1-5；Characterized in that, the ball (7) is nitridation
Silicon ball.
7. PSTM as claimed in claim 6；Characterized in that, the quantity of silicon nitride ball is 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710861990.1A CN107632171A (en) | 2017-09-21 | 2017-09-21 | Pstm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710861990.1A CN107632171A (en) | 2017-09-21 | 2017-09-21 | Pstm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107632171A true CN107632171A (en) | 2018-01-26 |
Family
ID=61101568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710861990.1A Withdrawn CN107632171A (en) | 2017-09-21 | 2017-09-21 | Pstm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107632171A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109406830A (en) * | 2018-12-07 | 2019-03-01 | 南京邮电大学 | A kind of detachable scanning probe microscopy mirror body |
| CN113406360A (en) * | 2021-06-30 | 2021-09-17 | 南京信息工程大学 | Nested scanning probe microscope |
-
2017
- 2017-09-21 CN CN201710861990.1A patent/CN107632171A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109406830A (en) * | 2018-12-07 | 2019-03-01 | 南京邮电大学 | A kind of detachable scanning probe microscopy mirror body |
| CN109406830B (en) * | 2018-12-07 | 2023-12-22 | 南京邮电大学 | Separable scanning probe microscope body |
| CN113406360A (en) * | 2021-06-30 | 2021-09-17 | 南京信息工程大学 | Nested scanning probe microscope |
| CN113406360B (en) * | 2021-06-30 | 2022-03-08 | 南京信息工程大学 | Nested scanning probe microscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180126 |
|
| WW01 | Invention patent application withdrawn after publication |