CN109406830B - Separable scanning probe microscope body - Google Patents
Separable scanning probe microscope body Download PDFInfo
- Publication number
- CN109406830B CN109406830B CN201811491521.6A CN201811491521A CN109406830B CN 109406830 B CN109406830 B CN 109406830B CN 201811491521 A CN201811491521 A CN 201811491521A CN 109406830 B CN109406830 B CN 109406830B
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- sample
- support frame
- piezoelectric motor
- circuit box
- fixed
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- 239000000523 sample Substances 0.000 title claims abstract description 106
- 239000000853 adhesive Substances 0.000 claims abstract description 3
- 230000001070 adhesive effect Effects 0.000 claims abstract description 3
- 238000012360 testing method Methods 0.000 claims description 12
- 238000009413 insulation Methods 0.000 claims description 8
- 230000003321 amplification Effects 0.000 claims description 7
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 7
- 230000005641 tunneling Effects 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 abstract description 6
- 238000013461 design Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000306 component Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses a separable scanning probe microscope body, which comprises a piezoelectric motor, a support frame, an insulating cover, a sample table, a shielding cover and a pre-amplifying circuit box, wherein a first positioning clamping groove matched with the piezoelectric motor in shape and size is formed in the insulating cover, and the piezoelectric motor is fixed in the first positioning clamping groove in an adhesive mode; the inside of the support frame is provided with a cavity for installing the piezoelectric motor, the upper end of the support frame is fixedly connected with the insulating cover, the lower end of the support frame is fixed in a second positioning clamping groove which is arranged on the sample table by taking the center as an origin and is matched with the shape and the size of the support frame, the sample table is fixed on the front amplifying circuit box, and the shielding cover is fixed on the surface of the front amplifying circuit box and is used for covering the piezoelectric motor, the support frame, the insulating cover and the sample table; the invention has simple integral structure and strong rigidity, adopts the design of a separated mirror body structure, and is convenient for the assembly and debugging and the later maintenance of a scanning probe microscope system.
Description
Technical Field
The invention belongs to the field of scanning probe microscopes, and particularly relates to a separable scanning probe microscope body.
Background
The first scanning tunneling microscope in human history was invented by Binnig et al in 1982, and has been actively used in the forefront of scientific research due to its unique and excellent atomic resolution and wide measurement applications. The serial scanning probe microscopes derived from the method comprise a scanning tunnel microscope, an atomic force microscope, a magnetic force microscope and the like, and have great significance and wide application prospect in the research of the fields of surface science, material science, life science and the like.
One of the core components of a scanning probe microscope is a scanner capable of scanning the sample surface in XYZ three-dimensional directions, the stability of which directly determines the quality of scanning imaging. The earliest scanner is a tripod structure, namely three piezoelectric bodies respectively responsible for X, Y, Z direction scanning are mutually perpendicular and orthogonally fixed together to form a tripod structure with a common vertex, a probe is fixed at the vertex position, and three-dimensional direction scanning is realized through the piezoelectric effect of the three piezoelectric bodies. However, the scanner has loose structure, poor mechanical stability, sensitivity to external vibration, large volume and difficult integration. Later G.Binnig invented a single tube scanner, namely, a single four-quadrant piezoelectric tube is used as the scanner, the outer electrode of the piezoelectric tube is axially quartered and is responsible for XY direction scanning; the internal electrode remains intact and is responsible for the Z-scan. Because of the simple and compact structure and high scanning precision and positioning precision, the single-tube scanner is used by people all the time.
However, piezoelectric tubes are fragile and must be protected. The general scanning probe microscope body is integrally designed and integrally processed, so that the piezoelectric tube can be protected to the greatest extent. The whole processing structure has the problems of high processing difficulty, difficult opening and closing, adverse equipment debugging and the like although the rigidity is very strong.
Disclosure of Invention
The invention aims at solving the problems of high processing difficulty, difficult opening and closing and difficult debugging in the traditional scanning probe microscope, and provides a detachable scanning probe microscope body, which adopts a detachable microscope body structure to design the microscope body, thereby facilitating the assembly debugging and the later maintenance of the scanning probe microscope, and the specific technical scheme is as follows:
the detachable scanning probe microscope body comprises a piezoelectric motor, a support frame, an insulating cover, a sample table, a shielding cover and a pre-amplifying circuit box, wherein a first positioning clamping groove matched with the piezoelectric motor in shape and size is formed in the insulating cover, and the piezoelectric motor is fixed in the first positioning clamping groove in an adhesive mode; the inside cavity that is used for installing the piezoelectric motor that has offered of support frame, just the support frame upper end with insulating cover fixed connection, the support frame lower extreme is fixed offer on the sample platform with in the second location draw-in groove of support frame shape and size homofit, the sample platform is fixed on the pre-amplification circuit box, the shield cover is fixed in pre-amplification circuit box surface is used for covering piezoelectric motor, support frame, insulating cover, sample platform, plays electromagnetic interference shielding effect.
Further, a preset number of support frame threaded holes are formed in the upper end of the support frame, the connection positions of the insulation cover and the support frame correspond to the support frame threaded holes, the same number of insulation cover threaded holes are formed in the support frame threaded holes, and the support frame and the insulation cover penetrate through the support frame threaded holes and the insulation cover threaded holes in a fixed connection mode through screws.
Further, the insulating cover is also provided with a sliding rod through hole for the bearing of the piezoelectric motor to pass through and a signal wire through hole for introducing a tunneling current wire between the sample and the probe to the pre-amplifying circuit box.
Further, an observation window for replacing the test probe and the test sample is formed in the lower end of the support frame.
Further, sample grooves and sample platform through holes which are uniformly formed in the sample platform according to the preset quantity are formed in the sample platform, and the sample grooves are formed right below the observation window; and the sample platform is also provided with a sample platform threaded through hole for fixing.
Further, a third positioning clamping groove which is matched with the sample table in shape and size is formed in the pre-amplifying circuit box and used for fixing the sample table; and an amplifying circuit box threaded through hole is formed corresponding to the sample stage threaded through hole, and the sample stage is fixed in the third positioning clamping groove by penetrating through the sample stage threaded through hole and the amplifying circuit box threaded through hole in a screw fixing mode.
Compared with the prior art, the detachable scanning probe microscope body has the beneficial effects that:
(1) Simple structure and rigidity are strong: all the components are assembled and formed through positioning clamping grooves and assembled and fixed through bolts, so that the overall rigidity is high;
(2) Easy disassembly and maintenance: the split type microscope body structural design is adopted, so that the test operation and the later maintenance of a scanning probe microscope system are convenient;
(3) The electromagnetic shielding effect is good: the shielding cover with the signal shielding effect is arranged, so that the lens body can be protected, and external electromagnetic interference can be well shielded.
Drawings
FIG. 1 is a schematic cross-sectional view of a detachable scanning probe microscope body according to an embodiment of the present invention;
FIG. 2 is an exploded view of a detachable scanning probe microscope body according to an embodiment of the present invention;
FIG. 3 is a schematic block diagram of a support frame according to an embodiment of the present invention;
FIG. 4 is a schematic block diagram of the insulating cover in an embodiment of the present invention;
fig. 5 is a schematic block diagram of the sample stage according to an embodiment of the present invention.
Identification description: 1-piezoelectric motor, 2-support frame, 3-insulating cover, 4-sample stage, 5-shielding case and 6-pre-amplifying circuit box;
2 a-supporting frame threaded holes, 2 b-observation windows, 3 a-insulating cover threaded holes, 3 b-first signal line through holes, 3 c-sliding rod through holes, 3 d-first positioning clamping grooves, 4 a-sample stage threaded holes, 4 b-second positioning clamping grooves, 4 c-second signal line through holes, 4 d-sample grooves and 6 a-third positioning clamping grooves.
Detailed Description
In order to enable those skilled in the art to better understand the present invention, the following description will make clear and complete descriptions of the technical solutions according to the embodiments of the present invention with reference to the accompanying drawings.
Referring to fig. 1 to 5, in the embodiment of the present invention, a detachable scanning probe microscope body is provided, which includes a piezoelectric motor 1, a support frame 2, an insulating cover 3, a sample stage 4, a shielding case 5, and a pre-amplifying circuit box 6, wherein a first positioning slot 3d adapted to the shape and size of the piezoelectric motor 2 is formed on the insulating cover 3, and the piezoelectric motor 1 is fixed in the first positioning slot 3d by an adhesion manner; the inside of the support frame 2 is provided with a cavity for installing the piezoelectric motor 1, and the upper end of the support frame 2 is fixedly connected with the insulating cover 3; specifically, the upper end of the support frame 2 is provided with a preset number of support frame threaded holes 2a, the joint of the insulating cover 3 and the support frame 2 is provided with the same number of insulating cover threaded holes 3a corresponding to the support frame threaded holes 2a, the support frame 2 and the insulating cover 3 are fixedly connected together by penetrating through the support frame threaded holes 2a and the insulating cover threaded holes 3a in a screw fixing mode, and as can be seen from fig. 2, the support frame 2 and the insulating cover 3 are provided with four threaded holes with adaptive sizes, and then are fixed by screws; of course, the present embodiment is only a preferred embodiment, and the present invention is not limited and fixed with respect to the number of the threaded holes.
Referring to fig. 2 again, the lower end of the supporting frame 2 of the invention is fixed in a second positioning slot 4b which is formed on the sample table 4 and is matched with the shape and the size of the supporting frame 2, the sample table 4 is fixed on the pre-amplifying circuit box 6, the shielding cover 5 is fixed on the surface of the pre-amplifying circuit box 6 and is used for covering the piezoelectric motor 1, the supporting frame 2, the insulating cover 3 and the sample table 4, and specifically, the shielding cover 5 is made of stainless steel with electromagnetic shielding effect, for example, so that on one hand, the function of protecting the internal structure of the whole lens body is achieved, and on the other hand, the electromagnetic interference shielding function is achieved, and the experimental result is not influenced by electromagnetic interference in the experimental process of using the lens body of the invention.
Referring to fig. 3, in the embodiment of the present invention, in order to ensure the smoothness and operability of the test process, an observation window 2b for replacing the test probe and the test sample is further provided at the lower end of the supporting frame 2; in a specific experimental process, an experimenter can replace a probe or an experimental sample according to actual conditions through the observation window 2b, so that the experiment can be performed according to a set program.
Referring to fig. 4 in combination with fig. 2, in the embodiment of the present invention, the insulating cover 3 is further provided with a slide bar port 3c for passing through the bearing of the piezoelectric motor 1 and a signal line port 3b for introducing a tunneling current wire between the sample and the probe to the pre-amplification circuit box 6.
Referring to fig. 5 in combination with fig. 2, in the embodiment of the present invention, a sample slot 4d is formed on the sample stage 4, and sample stage through holes 4c are uniformly formed on the sample stage 4 according to a preset number, and a wire led in from the signal wire through hole 3b can be connected to the pre-amplification circuit box 6 through the sample stage through holes 4 c; the sample groove 4d is arranged right below the observation window 2b; and the sample stage 4 is further provided with a sample stage threaded through hole 4a for fixing, specifically, a third positioning clamping groove 6a which is matched with the sample stage 4 in shape and size is formed in a position corresponding to the position, corresponding to the pre-amplifying circuit box 6, of the sample stage 4, and the sample stage 4 is fixed in the third positioning clamping groove 6a by forming an amplifying circuit box threaded through hole which is matched with the sample stage through hole 4 c.
In the process of using the mirror body of the invention for testing, a test sample is placed in the sample groove 4d, and then a probe is controlled by the piezoelectric motor 1 to perform sample operation; meanwhile, in order to ensure the structural simplicity of the whole mirror body, the invention combines the outside with the lead of the pre-amplification circuit box 6 by arranging a signal line through hole 3b on the insulating cover 3 and arranging a sample platform through hole 4c on the sample platform 4; and an observation window 2b which is convenient for the replacement of the probe and the test sample is arranged at the position right above the supporting frame 2 and the sample groove 4 d.
Compared with the prior art, the detachable scanning probe microscope body has the beneficial effects that: simple structure and rigidity are strong: all the components are assembled and formed through positioning clamping grooves and assembled and fixed through bolts, so that the overall rigidity is high; easy disassembly and maintenance: the split type microscope body structural design is adopted, so that the test operation and the later maintenance of a scanning probe microscope system are convenient; the electromagnetic shielding effect is good: the shielding cover with the signal shielding effect is arranged, so that the lens body can be protected, and external electromagnetic interference can be well shielded.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that the foregoing embodiments may be modified or equivalents substituted for some of the features thereof. All equivalent structures made by the content of the specification and the drawings of the invention are directly or indirectly applied to other related technical fields, and are also within the scope of the invention.
Claims (5)
1. The detachable scanning probe microscope body is characterized by comprising a piezoelectric motor, a support frame, an insulating cover, a sample table, a shielding cover and a pre-amplifying circuit box, wherein a first positioning clamping groove matched with the piezoelectric motor in shape and size is formed in the insulating cover, and the piezoelectric motor is fixed in the first positioning clamping groove in an adhesive mode; the inside of the supporting frame is provided with a cavity for installing the piezoelectric motor, the upper end of the supporting frame is fixedly connected with the insulating cover, the lower end of the supporting frame is fixed in a second positioning clamping groove which is arranged on the sample platform and is matched with the shape and the size of the supporting frame, and the sample platform is fixed on the pre-amplifying circuit box; the shielding cover is made of stainless steel, is fixed on the surface of the pre-amplifying circuit box and is used for covering and protecting the piezoelectric motor, the supporting frame, the insulating cover and the sample table and plays a role in electromagnetic interference shielding; the lower end of the supporting frame is provided with an observation window for replacing the test probe and the test sample; the sample table is provided with a sample groove, and the sample groove is arranged right below the observation window.
2. The detachable scanning probe microscope body of claim 1, wherein a preset number of support frame threaded holes are formed in the upper end of the support frame, the same number of insulation cover threaded holes are formed in the joint of the insulation cover and the support frame corresponding to the support frame threaded holes, and the support frame and the insulation cover are fixedly connected together through the support frame threaded holes and the insulation cover threaded holes in a screw fixing mode.
3. The detachable scanning probe microscope body of claim 2, wherein the insulating cover is further provided with a slide bar port for the passage of the bearing of the piezoelectric motor and a signal line port for the introduction of a tunneling current wire between the sample and the probe to the pre-amplification circuit box.
4. The detachable scanning probe microscope body of claim 1, wherein the sample stage is provided with sample stage through holes uniformly provided on the sample stage in a preset number, and sample stage threaded through holes for fixing.
5. The detachable scanning probe microscope body of claim 4, wherein a third positioning slot adapted to the shape and size of the sample stage is formed in the pre-amplification circuit box for fixing the sample stage; and an amplifying circuit box threaded through hole is formed corresponding to the sample stage threaded through hole, and the sample stage is fixed in the third positioning clamping groove by penetrating through the sample stage threaded through hole and the amplifying circuit box threaded through hole in a screw fixing mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811491521.6A CN109406830B (en) | 2018-12-07 | 2018-12-07 | Separable scanning probe microscope body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811491521.6A CN109406830B (en) | 2018-12-07 | 2018-12-07 | Separable scanning probe microscope body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109406830A CN109406830A (en) | 2019-03-01 |
| CN109406830B true CN109406830B (en) | 2023-12-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811491521.6A Active CN109406830B (en) | 2018-12-07 | 2018-12-07 | Separable scanning probe microscope body |
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| CN (1) | CN109406830B (en) |
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| CN109406830A (en) | 2019-03-01 |
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