CN108593969A - A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body - Google Patents
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body Download PDFInfo
- Publication number
- CN108593969A CN108593969A CN201810526715.9A CN201810526715A CN108593969A CN 108593969 A CN108593969 A CN 108593969A CN 201810526715 A CN201810526715 A CN 201810526715A CN 108593969 A CN108593969 A CN 108593969A
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- tubular type
- electric motor
- piezo
- insulating frame
- sliding block
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- 238000004621 scanning probe microscopy Methods 0.000 title claims abstract description 45
- 238000009422 external insulation Methods 0.000 title claims abstract description 38
- 239000000523 sample Substances 0.000 claims abstract description 34
- 238000009413 insulation Methods 0.000 claims description 10
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000005641 tunneling Effects 0.000 description 3
- 230000001429 stepping effect Effects 0.000 description 2
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 230000005492 condensed matter physics Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229920006335 epoxy glue Polymers 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000002465 magnetic force microscopy Methods 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body of the present invention, including tubular type Insulating frame, tubular type piezo-electric motor, tubular type scanning element, probe and sample stage, tubular piezo-electric motor is coaxial to be fixed on one end inside tubular type Insulating frame, tubular piezo-electric motor free end step direction and tubular type Insulating frame are axially consistent, sample stage is arranged in the tubular type Insulating frame other end, tubular type scanning element includes sliding block, sliding block spring piece, tubular type four-quadrant XYZ piezoelectric scannings pipe and probe, slide bar is elastically pressed against on tubular type Insulating frame by the sliding block spring piece, the axial direction of sliding block and tubular type Insulating frame are axially consistent, it is directed toward the free end of tubular piezo-electric motor in one end of sliding block, the coaxial setting tubular type four-quadrant XYZ piezoelectric scanning pipes of the other end.The scanning probe microscopy mirror body realizes that narrow dimension and cross section are designed without galvanic circle, is suitable for the extreme physical conditions such as extremely low temperature, high-intensity magnetic field, is particularly suitable for fast varying magnetic field condition.
Description
Technical field
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body of the present invention, belongs to scanning probe microscopy technology
Field, and in particular to scanning tunneling microscope.
Background technology
Scanning probe microscopy includes mainly scanning tunneling microscope, atomic force microscope, magnetic force microscopy etc., Neng Gouti
For micro-scale material surface information, it is used widely in Surface Science research field.Specifically, scanning tunneling microscope
Material surface atom definition structure and energy information can be obtained in situ, be the vital research means of Condensed Matter Physics.Especially
It is to combine high-intensity magnetic field and pole cryogenic conditions, unusual and important physical characteristic can be directly observed, such as the electricity of high-temperature superconductor
Lotus sequence, Vortex and your outer semimetallic Fermi's arc etc..But in order to realize higher magnetic field intensity and low-temperature test
The space of condition, sample cavity can be compressed into extremely narrow space, be unfavorable for the installation and checkout of equipment.With Hefei stable state high-intensity magnetic field section
For the 27T water cooling magnets of center, centre chamber's temperature aperture is only 32 millimeters, then is equipped with cryostat, and remaining space will
It is narrower.In order to be adapted to narrow low temperature strong magnetic field circumstance, the scanning probe microscopy mirror body of narrow dimension is very necessary.
In addition, for the test condition of fast varying magnetic field, it is required that built-in test device does not have galvanic circle in cross section,
To avoid generating huge vortex, Protection device.It is needed for the scanning probe microscopy mirror body under the test condition
Cross section is realized without galvanic circle, there has been no similar device reports.
The present invention then proposes a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, realizes mirror body narrow rule
It is very little, it is suitable for extreme test condition, and designed without galvanic circle containing cross section, particularly suitable fast varying magnetic field test condition.
Invention content
The purpose of the present invention is being directed to the shortcomings that existing scanning probe microscopy mirror body size is big, fast variable field generates vortex,
It is proposed a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body.
The present invention realizes that the technical solution of above-mentioned purpose is：
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that including tubular type Insulating frame,
Tubular type piezo-electric motor, tubular type scanning element, probe and sample stage, the tubular type piezo-electric motor is coaxial to be set to pipe
Inside type Insulating frame, internal diameter and the tubular type piezo-electric motor outer diameter difference of tubular type Insulating frame are less than 3 millimeters, tubular type insulation
Frame one end is fixed with tubular type piezo-electric motor fixing end, tubular type piezo-electric motor free end step direction and tubular type insulation frame
Frame is axially consistent, and sample stage is arranged in the tubular type Insulating frame other end；
The tubular type scanning element includes sliding block, sliding block spring piece, tubular type four-quadrant XYZ piezoelectric scannings pipe and spy
Slide bar is elastically pressed against on tubular type Insulating frame by needle, the sliding block spring piece, axial direction and the tubular type Insulating frame of sliding block
Axial consistent, the free end of tubular type piezo-electric motor, the coaxial setting tubular type four-quadrant XYZ pressures of the other end are directed toward in one end of sliding block
Electric scanning pipe, tubular type four-quadrant XYZ piezoelectric scannings pipe are equipped with probe close to sample end, and the other end is fixed with sliding block.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that the tubular type piezoelectricity
Motor is piezo-electric motor of the cross section without galvanic circle, Ke Yishi《A kind of both-end clamping reducing frictional force using opposite rubbing
Piezo-electric motor and control method》In " piezo-electric motor is clamped in the both-end that the opposite rubbing of the utilization of both ends rubbing type reduces frictional force "
(Patent No. ZL2012103386480),《Strong three-friction stepper driven by two piezoelectrics side by side》In " seamless pipe
Shape firm double piezoelectrics and the three frictional force steppers pushed away " (Patent No. ZL2012102602976), tubular type four-quadrant
XYZ piezoelectric scanning pipes are piezoelectric scanning pipe of the cross section without galvanic circle.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that the tubular type insulate
It is provided with cabling channel outside frame.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that the tubular type insulate
Frame one end is fixed with tubular type piezo-electric motor fixing end, and fixed interval (FI) is less than 0.2 millimeter.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that the tubular type insulate
Frame can be made of sapphire or zirconia ceramics.
The narrow space cast symmetrical scanning probe microscope of a kind of frame insulation, it is characterized in that in the insulation tube frame
Frame adds perforation window close to cast piezo-electric motor fixing end.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that remove the sliding block,
Sliding block spring piece, in the coaxial setting tubular type four-quadrant XYZ piezoelectric scanning pipes in tubular type piezo-electric motor free end, the circle
Cast four-quadrant XYZ piezoelectric scannings pipe is equipped with probe, the other end and tubular type piezo-electric motor free end close to sample end
It is fixed, tubular type four-quadrant XYZ piezoelectric scannings pipe and tubular type piezo-electric motor integrated design.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that the tubular type piezoelectricity
Motor can be《The inertia piezoelectric motor device and scanning probe microscopy and control methods of multi-region driving》In " basic model multi-region
The inertia piezoelectric motor device of driving " (Patent No. ZL2014102097478).
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body of the present invention, realization principle are：Tubular type is exhausted
Edge frame due to conductance insulate, to realize tubular type piezo-electric motor can directly narrow slot be bonded in tubular type Insulating frame
Portion saves space, and tubular type Insulating frame uses isolation material, and cross section is without galvanic circle, and nothing is inducted in variation magnetic field
Electric current, to occur the case where will not causing unstable heating, mechanical structure, magnetic field mutual interference.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that the tubular type piezoelectricity
Motor is piezo-electric motor of the cross section without galvanic circle, can be that " the opposite rubbing of utilization of both ends rubbing type reduces frictional force
Both-end clamping piezo-electric motor ", " seamless tubular firm double piezoelectrics and the three frictional force steppers pushed away ", these motors are cross-section
Face electrode is separated, does not form galvanic circle, and the tubular type four-quadrant XYZ piezoelectric scanning pipes are that cross section is returned without conduction
The piezoelectric scanning pipe on road.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that the tubular type insulate
It is provided with cabling channel outside frame, cabling channel saving lead cloth is set on the basis of maintaining tubular type Insulating frame rigidity and is emptied
Between.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that the tubular type insulate
Frame one end is fixed with tubular type piezo-electric motor fixing end, and fixed interval (FI) is less than 0.2 millimeter.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that the tubular type insulate
Frame can be made of sapphire or zirconia ceramics.The material is in addition to ensureing Low dark curient, in addition its low thermal coefficient of expansion, Gao Yang
Family name's modulus, high rigidity can all promote a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body rigidity, be more applicable for
Extreme test condition (extremely low temperature, high-intensity magnetic field, strong vibration etc.).
The narrow space cast symmetrical scanning probe microscope of a kind of frame insulation, it is characterized in that in the insulation tube frame
Frame adds perforation window close to cast piezo-electric motor fixing end, for epoxy glue hydropexis to be arranged, increases structural rigidity.
A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that the tubular type piezoelectricity
Motor can be《The inertia piezoelectric motor device and scanning probe microscopy and control methods of multi-region driving》In motor apparatus, should
Narrow dimension scanning probe microscopy mirror body equally may be implemented in structure.
According to above-mentioned principle, the present invention has following excellent in performance (it is achieved that purpose of the present invention)：
(1) narrow dimension, compact, rigidity by force, are suitable for extreme test condition, such as extremely low temperature, high-intensity magnetic field, strong vibration.
(2) cross section is without galvanic circle, especially suitable for fast varying magnetic field test condition.
Description of the drawings
Fig. 1 is a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror structure schematic diagram of the present invention.
Fig. 2 is that one kind of the present invention adds the signal of window tubular type external insulation narrow dimension scanning probe microscopy mirror structure
Figure.
Fig. 3 is that a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror structure of integrated design of the present invention shows
It is intended to.
Figure label：1 tubular type Insulating frame, 2 tubular type piezo-electric motors, 3 tubular type scanning elements, 4 sliding blocks, 5 sliding blocks
Spring leaf, 6 tubular type four-quadrant XYZ piezoelectric scanning pipes, 7 probes, 8 sample stages, 9 samples, 10 tubular type piezo-electric motor stepping sides
To 11 windows.
Below by way of specific implementation mode and Structure Figure, the invention will be further described.
Specific implementation mode
Embodiment 1：Referring to attached drawing 1, a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body of the present invention is special
Sign be include tubular type Insulating frame 1, tubular type piezo-electric motor 2, tubular type scanning element 3, probe 7 and sample stage 8, it is described
Tubular type piezo-electric motor 2 is coaxial to be set to inside tubular type Insulating frame 1, internal diameter and the tubular type pressure of tubular type Insulating frame 1
2 outer diameter difference of electric notor is less than 3 millimeters, and 1 one end of tubular type Insulating frame is fixed with 2 fixing end of tubular type piezo-electric motor, tubular type
2 free end step direction 10 of piezo-electric motor and tubular type Insulating frame 1 are axial consistent, the setting of 1 other end of tubular type Insulating frame
Sample stage 8；
The tubular type scanning element 3 include sliding block 4, sliding block spring piece 5, tubular type four-quadrant XYZ piezoelectric scannings pipe 6 with
And slide bar 4 is elastically pressed against on tubular type Insulating frame 1 by probe 7, the sliding block spring piece 5, the axial direction and tubular type of sliding block 4
Insulating frame 1 is axial consistent, and the free end of tubular type piezo-electric motor 2, the coaxial setting tubular type of the other end are directed toward in one end of sliding block 4
Four-quadrant XYZ piezoelectric scannings pipe 6, tubular type four-quadrant XYZ piezoelectric scannings pipe 6 are equipped with probe 7, the other end close to 8 end of sample stage
It is fixed with sliding block 4.
Embodiment 2：A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body in the above-described embodiments, it is special
Sign is that the tubular piezo-electric motor 2 is piezo-electric motor of the cross section without galvanic circle, can be " the utilization phase of both ends rubbing type
To rubbing reduce frictional force both-end be clamped piezo-electric motor ", " seamless tubular firm double piezoelectrics and the three frictional force steppings pushed away
Device ", tubular type four-quadrant XYZ piezoelectric scannings pipe 6 are also piezoelectric scanning pipe of the cross section without galvanic circle.
Embodiment 3：A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body in above-described embodiment 1,
It is characterized in being provided with cabling channel outside the tubular type Insulating frame 1.
Embodiment 4：A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body in above-described embodiment 1,
It is characterized in that described 1 one end of tubular type Insulating frame is fixed with 2 fixing end of tubular piezo-electric motor, fixed interval (FI) is less than 0.2 millimeter.
Embodiment 5：A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body in above-described embodiment 1,
It is characterized in that the tubular type Insulating frame 1 can be made of sapphire or zirconia ceramics.
Embodiment 6：Referring to attached drawing 2, a kind of tubular type external insulation narrow dimension scanning probe in above-described embodiment 1 is micro-
Mirror mirror body, it is characterized in that the insulation tube frame 1 adds perforation window 11 close to 2 fixing end of cast piezo-electric motor.
Embodiment 7：Referring to attached drawing 3, a kind of tubular type external insulation narrow dimension scanning probe in above-described embodiment 1 is micro-
Mirror mirror body, it is characterized in that the sliding block 4, sliding block spring piece 5 are removed, in the coaxial setting in 2 free end of tubular piezo-electric motor
Tubular type four-quadrant XYZ piezoelectric scannings pipe 6, the tubular type four-quadrant XYZ piezoelectric scannings pipe 6 are equipped with close to 8 end of sample stage and visit
Needle 7, the other end are fixed with 2 free end of tubular piezo-electric motor, tubular type four-quadrant XYZ piezoelectric scannings pipe 6 and tubular
2 integrated design of piezo-electric motor.
Embodiment 8：A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body in the above-described embodiments, it is special
Sign is that the tubular piezo-electric motor 2 can be " the inertia piezoelectric motor device of basic model multi-region driving ".
Claims (8)
1. a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body, it is characterized in that including tubular type Insulating frame, circle
Cast piezo-electric motor, tubular type scanning element, probe and sample stage, the tubular type piezo-electric motor is coaxial to be set to tubular type
Inside Insulating frame, internal diameter and the tubular type piezo-electric motor outer diameter difference of tubular type Insulating frame are less than 3 millimeters, tubular type insulation frame
Frame one end is fixed with tubular type piezo-electric motor fixing end, tubular type piezo-electric motor free end step direction and tubular type Insulating frame
Axial consistent, sample stage is arranged in the tubular type Insulating frame other end；
The tubular type scanning element includes sliding block, sliding block spring piece, tubular type four-quadrant XYZ piezoelectric scannings pipe and probe,
Slide bar is elastically pressed against on tubular type Insulating frame by the sliding block spring piece, and the axial direction and tubular type Insulating frame of sliding block are axial
Unanimously, the free end of tubular type piezo-electric motor is directed toward in one end of sliding block, and the coaxial setting tubular type four-quadrant XYZ piezoelectricity of the other end is swept
Pipe is retouched, tubular type four-quadrant XYZ piezoelectric scannings pipe is equipped with probe close to sample end, and the other end is fixed with sliding block.
2. a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body according to claim 1, it is characterized in that institute
It is piezo-electric motor of the cross section without galvanic circle to state tubular type piezo-electric motor, can be " the opposite rubbing of utilization of both ends rubbing type
The both-end clamping piezo-electric motor of reduction frictional force ", " seamless tubular firm double piezoelectrics and the three frictional force steppers pushed away ", institute
It is piezoelectric scanning pipe of the cross section without galvanic circle to state tubular type four-quadrant XYZ piezoelectric scanning pipes.
3. a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body according to claim 1, it is characterized in that institute
It states and is provided with cabling channel outside tubular type Insulating frame.
4. a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body according to claim 1, it is characterized in that institute
It states tubular type Insulating frame one end to fix with tubular type piezo-electric motor fixing end, fixed interval (FI) is less than 0.2 millimeter.
5. a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body according to claim 1, it is characterized in that institute
It can be made of sapphire or zirconia ceramics to state tubular type Insulating frame.
6. the narrow space cast symmetrical scanning probe microscope of a kind of frame insulation according to claim 1, it is characterized in that
The insulation tube frame adds perforation window close to cast piezo-electric motor fixing end.
7. a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body according to claim 1, it is characterized in that moving
Except the sliding block, sliding block spring piece, in the coaxial setting tubular type four-quadrant XYZ piezoelectric scannings in tubular type piezo-electric motor free end
Pipe, the tubular type four-quadrant XYZ piezoelectric scannings pipe are equipped with probe, the other end and the tubular type piezoelectricity horse close to sample end
It is fixed up to free end, tubular type four-quadrant XYZ piezoelectric scannings pipe and tubular type piezo-electric motor integrated design.
8. a kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body according to claim 1 or claim 7, tubular type
Piezo-electric motor can be " the inertia piezoelectric motor device of basic model multi-region driving ".
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810526715.9A CN108593969A (en) | 2018-05-16 | 2018-05-16 | A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810526715.9A CN108593969A (en) | 2018-05-16 | 2018-05-16 | A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body |
Publications (1)
| Publication Number | Publication Date |
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| CN108593969A true CN108593969A (en) | 2018-09-28 |
Family
ID=63629868
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810526715.9A Pending CN108593969A (en) | 2018-05-16 | 2018-05-16 | A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109406830A (en) * | 2018-12-07 | 2019-03-01 | 南京邮电大学 | A kind of detachable scanning probe microscopy mirror body |
| CN111856079A (en) * | 2019-04-25 | 2020-10-30 | 株式会社岛津制作所 | Scanning probe microscope |
| CN112540194A (en) * | 2020-12-04 | 2021-03-23 | 南京信息工程大学 | Modular quick-release combined scanning probe microscope |
| CN113406360A (en) * | 2021-06-30 | 2021-09-17 | 南京信息工程大学 | Nested scanning probe microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109406830A (en) * | 2018-12-07 | 2019-03-01 | 南京邮电大学 | A kind of detachable scanning probe microscopy mirror body |
| CN109406830B (en) * | 2018-12-07 | 2023-12-22 | 南京邮电大学 | Separable scanning probe microscope body |
| CN111856079A (en) * | 2019-04-25 | 2020-10-30 | 株式会社岛津制作所 | Scanning probe microscope |
| CN111856079B (en) * | 2019-04-25 | 2023-09-19 | 株式会社岛津制作所 | scanning probe microscope |
| CN112540194A (en) * | 2020-12-04 | 2021-03-23 | 南京信息工程大学 | Modular quick-release combined scanning probe microscope |
| CN113406360A (en) * | 2021-06-30 | 2021-09-17 | 南京信息工程大学 | Nested scanning probe microscope |
| CN113406360B (en) * | 2021-06-30 | 2022-03-08 | 南京信息工程大学 | Nested scanning probe microscope |
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Application publication date: 20180928 |