CN103616532A - Independent low-return-difference and high-rescanning probe microscope scanner - Google Patents
Independent low-return-difference and high-rescanning probe microscope scanner Download PDFInfo
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- CN103616532A CN103616532A CN201310552279.XA CN201310552279A CN103616532A CN 103616532 A CN103616532 A CN 103616532A CN 201310552279 A CN201310552279 A CN 201310552279A CN 103616532 A CN103616532 A CN 103616532A
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Abstract
The invention discloses an independent low-return-difference and high-rescanning probe microscope scanner, and relates to a scanning structure of a scanning probe microscope. The independent low-return-difference and high-rescanning probe microscope scanner comprises an XYZ piezoelectric scanning tube, a guide rail rack, a sliding rod and a spring piece, wherein the XYZ piezoelectric scanning tube and the sliding rod are coaxial and mutually fixed at one end, the outer wall of the sliding rod is pressed on a guide rail of the guide rail rack in parallel by the spring piece, and both the two ends of the sliding rod stretch beyond the length of the guide rail of the guide rail rack. The independent low-return-difference and high-rescanning probe microscope scanner has the advantages of being simple in structure, stable in working height and extremely small in return difference. With the independent low-return-difference and high-rescanning probe microscope scanner, the scanning probe microscope which can perform scanning imaging at a low voltage by only using the small-size XYZ piezoelectric scanning tube is manufactured for the first time, and the problem that in the prior art, the two favorable conditions can not be taken into consideration is solved. Besides, by using the independent low-return-difference and high-rescanning probe microscope scanner, the scanning probe microscope which can display the same high quality atomic resolution images as well in the absence of sound insulation and vibration reduction can be manufactured.
Description
Technical field
The present invention relates to a kind of Scan Architecture of scanning probe microscopy, particularly the high multiple scanning probe microscope of a kind of low return difference independence scanner, belongs to scanning probe microscopy technical field.
Background technology
From First scanning probe microscopy (scanning probe microscope, be called for short SPM) coming out has had the history of nearly 30 years till now, because of its excellent Atomic Resolution ability with measure widely purposes, be applied to actively the forefront of scientific research always.But all designs now all do not solve the stability problem of SPM well, still need to just can obtain atom definition image by outside utility appliance (as equipment such as sound insulation and noise reduction, damping shock absorptions).
The core component of scanning probe microscopy is slightly to approach motor and scanner, slightly approach motor and conventionally use piezo-electric motor, be responsible for driven sweep device or coupled probe or sample, probe-sample interval is approached in probe-sample local effect (local interaction) district and (be generally several Ethylmercurichlorendimides to number nanometer, for example, when scanning tunnel microscope middle probe and sample room produce tunnel current signal, probe-sample interval is generally the distance of several atoms); Then, scanner drives probe or sample to carry out scanning survey.In prior art, require slightly to approach motor and can not only make probe approach sample, also requirement can make probe leave sample with protection probe, so what slightly approach that motor and scanner adopt is rigidly connected mode.A significant deficiency of this mode is that the instability (being caused by thermal drift, electronic noise, internal stress, mechanical vibration etc.) of slightly approaching motor can be directly passed to scanner, makes the bad stability of microscope imaging.
We are previously presented slightly approaches the scanning probe microscopy mirror body (application for a patent for invention number: 201110187402.3 that motor can depart from scanner, publication number: CN102866265A) can fundamentally address the above problem, improve scanning probe microscopy stability.But, if want, realizing this design, the return difference problem of scanner must be considered.Because scanner self structure has certain elasticity, when slightly approaching motor with scanner separation, scanner will be followed back deformation because of the release of elastic force, thereby probe-sample interval is increased.If this return difference is larger, so, only with the flexible scope of XYZ piezoelectric scanning pipe self in scanner, thereby or can not make probe come back in probe-sample local active region cannot to realize the scanning survey to sample, or need to increase by large scale XYZ piezoelectric scanning pipe or high voltage drive the flexible scope of scanner, to probe-sample being approached again, in active region, carry out scanning survey.But, the thermo mechanical stability of large scale XYZ piezoelectric scanning pipe is poor, the electronics noise of high driving voltage is larger, wherein any one factor of introducing all will reduce stability and the image quality of scanning probe microscopy, offset and slightly approach the beneficial effect that motor brings with scanner separation, even lose more than gain.
In the present invention, we propose the high multiple scanning probe microscope of a kind of low return difference independence scanner structure, this design greatly reduces the return difference of scanner and (under room temperature environment, applies, the actual return difference recording is less than 10 nanometers), slightly approaching of making the thus scanning probe microscopy that motor can depart from scanner is when being used small size XYZ piezoelectric scanning pipe (full-size is less than 7 millimeters), and use low-voltage (absolute value is lower than 10 volts) completely, just can realize scanning imagery, and Iimaging Stability and quality are all increased dramatically, under atmosphere at room temperature condition, the horizontal drift speed that scanning probe microscopy is surveyed is 22.6 micromicron per minutes, vertical drift speed is lower than 35.3 micromicron per minutes (referring to accompanying drawing 5), all lower than the existing open same eka-ytterbium body of reporting, even in the situation that the atom definition image that still can not provide equal quality by traditional noise and vibration dampening equipment (referring to accompanying drawing 6, highly oriented pyrolytic graphite atom scanning tunnel microscope image, 100 millivolts of sample bias).
Summary of the invention
Object of the present invention: in order to solve the large problem of existing scanning probe microscopy independence scanner return difference, thereby make scanning probe microscopy independence scanner still can be controlled to picture with low-voltage when using small size XYZ piezoelectric scanning pipe, propose the high multiple scanning probe microscope of a kind of low return difference independence scanner structure.
The technical scheme that the present invention realizes above-mentioned purpose is:
The high multiple scanning probe microscope of a kind of low return difference independence scanner, comprise XYZ piezoelectric scanning pipe, it is characterized in that also comprising guide rail bracket, slide bar, spring leaf, described XYZ piezoelectric scanning pipe and slide bar is coaxial and at one end interfix, described spring leaf is pressed on slide bar outer wall on the guide rail of guide rail bracket abreast, the two ends of slide bar all stretch out in beyond the rail length of guide rail bracket, the structure of this formation friction force is not only the simplest, and local friction condition and friction factor are easy to be consistent, the normal pressure that simultaneously forms friction force all can not change in stroke, thereby produce constant, unanimously, friction force repeatably, reduced the return difference of scanner, in addition, the total length of guide rail, within slide bar length, has been avoided the interaction between guide rail end surface and slide bar end face, makes the rubbing surface between guide rail and slide bar not easily damaged, has improved the repeatability of friction, has also reduced return difference.
The described high multiple scanning probe microscope of low return difference independence scanner, described in it, the stage casing of the guide rail of guide rail bracket sinks, separated with described slide bar outer wall.
The described high multiple scanning probe microscope of low return difference independence scanner, described in it, the guide rail of guide rail bracket is parallel double guide rail.
The described high multiple scanning probe microscope of low return difference independence scanner, described in it guide rail bracket by tungsten or tantalum or chromium or comprise they one of alloy make.
The described high multiple scanning probe microscope of low return difference independence scanner, described in it, slide bar is round bar or square bar or hexagonal rod by alundum (Al2O3) or silicon dioxide or pottery is made and surface finish.
The scanning probe microscopy mirror body that the described high multiple scanning probe microscope of low return difference independence scanner is made, it sets up and promotes the piezo-electric motor that slide bar moves along guide rail direction on described guide rail bracket.
The scanning probe microscopy mirror body that the described high multiple scanning probe microscope of low return difference independence scanner is made, its piezo-electric motor of setting up is gecko motor or panda motor or tuna motor or looper motor or Pan Shi motor or inertial motor.
Principle of work of the present invention is: described XYZ piezoelectric scanning pipe and slide bar is coaxial and at one end interfix, and described spring leaf is pressed on slide bar outer wall on the guide rail of guide rail bracket abreast, and the two ends of slide bar all stretch out in beyond the rail length of guide rail bracket.The structure of this formation friction force is not only the simplest, and local friction condition and friction factor are easy to be consistent, the normal pressure that simultaneously forms friction force all can not change in strokes, thus produce constant, unanimously, friction force repeatably, reduced the return difference of scanner; In addition, the total length of guide rail, within slide bar length, has been avoided the interaction between guide rail end surface and slide bar end face, makes the rubbing surface between guide rail and slide bar not easily damaged, has improved the repeatability of friction, has also reduced return difference.Realized object of the present invention.
Above-mentioned slide bar can coaxially head and the tail be fixing with XYZ piezoelectric scanning pipe, and now, slide bar can be hollow, can be also solid; Also can slide bar be hollow, and XYZ piezoelectric scanning pipe be coaxially placed in slide bar and its one end and slide bar are fixed.
The stage casing of the guide rail of above-mentioned guide rail bracket can sink, thereby guide rail is pressed mutually with its two ends and slide bar, has improved the stability of pressing mutually and the consistance of friction force, also can reduce return difference.Further realize object of the present invention.
The guide rail of above-mentioned guide rail bracket can be parallel double guide rail, and it is better than single track or many rails (more than three and three) with the stability that slide bar is pressed mutually.
Above-mentioned guide rail bracket can by tungsten or tantalum or chromium or comprise they one of alloy make, further to reduce temperature drift and the return difference (our measured result) of guide rail.
Above-mentioned slide bar can be for round bar or square bar or hexagonal rod and by alundum (Al2O3) or silicon dioxide or pottery is made and surface finish.The slide bar of these shapes can be stablized with guide rail, coordinate securely; And these materials are all the low drift material of high rigidity, can reduce deformation and return difference; And polishing is carried out on surface, also make slide bar more smooth with the friction between guide rail, improved the serviceable life (repeatability) of scanning probe microscopy independence scanner, reduced failure rate and return difference.
On above-mentioned guide rail bracket, can set up and promote the piezo-electric motor that slide bar moves along guide rail direction, form and slightly approach the scanning probe microscopy mirror body that motor can depart from scanner.Piezo-electric motor herein can be gecko motor (GeckoDrive, see U.S. < < scientific instrument comment > > magazine, Review of Scientific Instruments, Vol.84, 2013, P056106, or see patent ZL200910116492.X), or panda motor (PandaDrive, see U.S. < < scientific instrument comment > > magazine, Review of Scientific Instruments, Vol.84, 2013, P056106, or see patent ZL200610161477.3), or tuna motor (Tuna Drive, see U.S. < < scientific instrument comment > > magazine, Review of Scientific Instruments, Vol.83, 2012, P115111), or looper motor (U.S. Patent number 3902084 and 3902085), or Pan Shi motor (international patent WO93/19494) or inertial motor.
According to above-mentioned principle, can find out, beneficial effect of the present invention is embodied in:
That the high multiple scanning probe microscope of low return difference independence scanner has is simple in structure, working depth stable, the advantage of return difference minimum (our result of actual measurement is that return difference is less than 10 nanometers at ambient temperature, lower under low temperature).We have made first and have only used small size XYZ piezoelectric scanning pipe (3.2 millimeters of external diameters with it exactly, 7 millimeters of length) just can carry out with low-voltage (absolute value is lower than 10 volts) scanning probe microscopy of scanning imagery, having solved prior art can not take into account a difficult problem for these two advantages and (note: U.S. < < scientific instrument comment > > magazine, Review of Scientific Instruments, Vol.79, 2008, what described in P113707, scanning tunnel microscope realized that low pressure imaging uses is 10 millimeters of external diameters, the large scale XYZ piezoelectric scanning pipe that length is 30 millimeters, and U.S. < < scientific instrument comment > > magazine, Review of Scientific Instruments, Vol.82,2011, though what described in P103702, scanning tunnel microscope was used is small size XYZ piezoelectric scanning pipe, but need high voltage imaging).We have also made the scanning tunnel microscope (had no and reported in the past) that also can go out same high-quality atom definition image without sound insulation, vibration damping with it, and imaging data is shown in accompanying drawing 6, and sample is highly oriented pyrolytic graphite, and sample bias is 100 millivolts.This scanning tunnel microscope is under atmosphere at room temperature condition, and the horizontal drift speed of surveying is 22.6 micromicron per minutes, and vertical drift speed, lower than 35.3 micromicron per minutes (referring to accompanying drawing 5), is minimum drift record.
Accompanying drawing explanation
Fig. 1 is the solid assembling schematic diagram of the high multiple scanning probe microscope of the low return difference of basic model of the present invention independence scanner.
Fig. 2 is the structural representation of the high multiple scanning probe microscope of the low return difference of guide rail of the present invention stage casing sinking type independence scanner.
Fig. 3 is the coaxial high multiple scanning probe microscope of the low return difference independence scanner structure schematic diagram being fixed in slide bar of XYZ piezoelectric scanning pipe of the present invention.
Fig. 4 is that the present invention sets up the scanning probe microscopy mirror structure schematic diagram that piezo-electric motor is made on guide rail bracket.
Fig. 5 is the horizontal and vertical drift speed data of the scanning probe microscopy made of the present invention under atmosphere at room temperature environment.
Fig. 6 is the highly oriented pyrolytic graphite atomic diagram picture that scanning tunnel microscope that the present invention makes records under the noise and vibration dampening appointed condition without traditional.
Number in the figure: 1XYZ piezoelectric scanning pipe, 2 guide rail brackets, 2a guide rail, 3 slide bars, 4 spring leafs, 5 piezo-electric motors.
By embodiment and structure accompanying drawing, the invention will be further described below.
Embodiment
Embodiment 1: the high multiple scanning probe microscope of the low return difference of basic model independence scanner
Referring to accompanying drawing 1 and accompanying drawing 3, the high multiple scanning probe microscope of the low return difference of the present embodiment basic model independence scanner, comprise XYZ piezoelectric scanning pipe 1, characterized by further comprising guide rail bracket 2, slide bar 3, spring leaf 4, described XYZ piezoelectric scanning pipe 1 is coaxial and at one end interfix with slide bar 3, the guide rail 2a that described spring leaf 4 is pressed on guide rail bracket 2 abreast by slide bar 3 outer walls is upper, and the two ends of slide bar 3 all stretch out in beyond the guide rail 2a length of guide rail bracket 2.
The principle of work of the present embodiment is: described XYZ piezoelectric scanning pipe 1 is coaxial and at one end interfix with slide bar 3, the guide rail 2a that described spring leaf 4 is pressed on guide rail bracket 2 abreast by slide bar 3 outer walls is upper, and the two ends of slide bar 3 all stretch out in beyond the guide rail 2a length of guide rail bracket 2.The structure of this formation friction force is not only the simplest, and local friction condition and friction factor are easy to be consistent, the normal pressure that simultaneously forms friction force all can not change in strokes, thus produce constant, unanimously, friction force repeatably, reduced the return difference of scanner; In addition, the total length of guide rail 2a, within slide bar 3 length, has been avoided the interaction between guide rail 2a end face and slide bar 3 end faces, makes the rubbing surface between guide rail 2a and slide bar 3 not easily damaged, has improved the repeatability of friction, has also reduced return difference.Realized object of the present invention.
Above-mentioned slide bar 3 can coaxially head and the tail be fixing with XYZ piezoelectric scanning pipe 1, and now, slide bar 3 can be hollow, can be also solid; Also can slide bar 3 be hollow, and XYZ piezoelectric scanning pipe 1 be coaxially placed in slide bar 3 and its one end is fixed with slide bar 3.
Embodiment 2: the high multiple scanning probe microscope of the low return difference of guide rail stage casing sinking type independence scanner
Referring to accompanying drawing 2, in above-described embodiment 1, the stage casing of the guide rail 2a of guide rail bracket 2 can sink, thereby guide rail 2a is pressed mutually with its two ends and slide bar 3, improved firm degree and the Exposure of pressing mutually, also can improve the stability of scanning probe microscopy independence scanner, and reduce its return difference.Further realize object of the present invention.
Embodiment 3: the high multiple scanning probe microscope of the low return difference of parallel double rail type independence scanner
In above-described embodiment, the guide rail 2a of guide rail bracket 2 can be parallel double guide rail, and it is better than single track or many rails (more than three and three) with the stability that slide bar 3 is pressed mutually.
Embodiment 4: the high multiple scanning probe microscope of the low return difference of Low Drift Temperature rail type independence scanner
Embodiment 5: the high multiple scanning probe microscope of the low return difference of high stable Low Drift Temperature slide bar-type independence scanner
Embodiment 6: the scanning probe microscopy mirror body that piezo-electric motor is made with the high multiple scanning probe microscope of low return difference independence scanner
Referring to accompanying drawing 4, the scanning probe microscopy mirror body that piezo-electric motor of the present invention is made with the high multiple scanning probe microscope of low return difference independence scanner, comprise XYZ piezoelectric scanning pipe 1, guide rail bracket 2, slide bar 3, spring leaf 4, is characterized in that on described guide rail bracket 2, setting up the piezo-electric motor 5 that promotion slide bar 3 moves along guide rail 2a direction, forms and slightly approaches the scanning probe microscopy mirror body that motor can depart from scanner.Piezo-electric motor herein can be gecko motor (GeckoDrive, see U.S. < < scientific instrument comment > > magazine, Review of Scientific Instruments, Vol.84, 2013, P056106, or see patent ZL200910116492.X), or panda motor (PandaDrive, see U.S. < < scientific instrument comment > > magazine, Review of Scientific Instruments, Vol.84, 2013, P056106, or see patent ZL200610161477.3), or tuna motor (Tuna Drive, see U.S. < < scientific instrument comment > > magazine, Review of Scientific Instruments, Vol.83, 2012, P115111), or looper motor (U.S. Patent number 3902084 and 3902085), or Pan Shi motor (international patent WO93/19494) or inertial motor.
The not detailed disclosed part of the present invention belongs to the known technology of this area.
Although above the illustrative embodiment of the present invention is described; so that the technician of present technique neck understands the present invention; but should be clear; the invention is not restricted to the scope of embodiment; to those skilled in the art; as long as various variations appended claim limit and definite the spirit and scope of the present invention in, these variations are apparent, all utilize innovation and creation that the present invention conceives all at the row of protection.
Claims (7)
1. the high multiple scanning probe microscope of a low return difference independence scanner, comprise XYZ piezoelectric scanning pipe (1), it is characterized in that also comprising guide rail bracket (2), slide bar (3), spring leaf (4), described XYZ piezoelectric scanning pipe (1) and slide bar (3) are coaxial and at one end interfix, described spring leaf (4) is pressed on slide bar (3) outer wall on the guide rail (2a) of guide rail bracket (2) abreast, the two ends of slide bar (3) all stretch out in beyond guide rail (2a) length of guide rail bracket (2), the structure of this formation friction force is not only the simplest, and local friction condition and friction factor are easy to be consistent, the normal pressure that simultaneously forms friction force all can not change in stroke, thereby produce constant, unanimously, friction force repeatably, reduced the return difference of scanner, in addition, the total length of guide rail (2a), within slide bar (3) length, has been avoided the interaction between guide rail (2a) end face and slide bar (3) end face, makes the rubbing surface between guide rail (2a) and slide bar (3) not easily damaged, the repeatability that has improved friction, has also reduced return difference.
2. the high multiple scanning probe microscope of a kind of low return difference according to claim 1 independence scanner, is characterized in that the stage casing of the guide rail of described guide rail bracket sinks, separated with described slide bar outer wall.
3. the high multiple scanning probe microscope of a kind of low return difference according to claim 1 and 2 independence scanner, the guide rail that it is characterized in that described guide rail bracket is parallel double guide rail.
4. the high multiple scanning probe microscope of a kind of low return difference according to claim 1 and 2 independence scanner, it is characterized in that described guide rail bracket by tungsten or tantalum or chromium or comprise they one of alloy make.
5. the high multiple scanning probe microscope of a kind of low return difference according to claim 1 and 2 independence scanner, is characterized in that described slide bar is round bar or square bar or hexagonal rod by alundum (Al2O3) or silicon dioxide or pottery is made and surface finish.
6. the scanning probe microscopy mirror body that the high multiple scanning probe microscope of low return difference according to claim 1 and 2 independence scanner is made, is characterized in that setting up on described guide rail bracket the piezo-electric motor that promotion slide bar moves along guide rail direction.
7. a scanning probe microscopy mirror body according to claim 6, is characterized in that the piezo-electric motor of setting up is gecko motor or panda motor or tuna motor or looper motor or Pan Shi motor or inertial motor.
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| CN201310552279.XA CN103616532B (en) | 2013-11-06 | 2013-11-06 | Low return difference height multiple scanning probe microscope separate scanners |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103986365A (en) * | 2014-05-16 | 2014-08-13 | 中国科学技术大学 | Multi-region drive inertia piezoelectric motor device, scanning probe microscope and control method |
| CN106597025A (en) * | 2015-10-16 | 2017-04-26 | 中国科学院合肥物质科学研究院 | Nested piezoelectric tube driven multi-dimensional and detachable piezoelectric motor and scanning probe microscope |
| CN106645802A (en) * | 2015-10-30 | 2017-05-10 | 中国科学院合肥物质科学研究院 | High precision piezoelectric scanner by lever scanning and scanning probe microscope thereof |
| CN106932611A (en) * | 2017-04-19 | 2017-07-07 | 东南大学 | A kind of PSTM structure of use motor scan head isolation technics |
| CN108089030A (en) * | 2017-11-14 | 2018-05-29 | 合肥中科微力科技有限公司 | Double piezo tube nesting mechanical parallel high stable scanners and scanning probe microscopy |
| CN108593969A (en) * | 2018-05-16 | 2018-09-28 | 中国科学院合肥物质科学研究院 | A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body |
| CN109406386A (en) * | 2017-10-30 | 2019-03-01 | 西南交通大学 | The design of profiled cross-section micro-cantilever beam probe and processing method applied to the measurement of nanoscale single-contact ultralow friction coefficient |
| CN112540194A (en) * | 2020-12-04 | 2021-03-23 | 南京信息工程大学 | Modular quick-release combined scanning probe microscope |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06241779A (en) * | 1993-02-23 | 1994-09-02 | Toshiba Corp | Fine positioning device |
| US20040216518A1 (en) * | 2001-08-27 | 2004-11-04 | Aaron Lewis | Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| CN102243253A (en) * | 2011-04-25 | 2011-11-16 | 中国科学院合肥物质科学研究院 | Scanning probe microscope body with isolated imaging scanning and rough approximation |
| CN102426270A (en) * | 2011-09-02 | 2012-04-25 | 北京大学 | Optical system for low-temperature scanning near-field optical microscope |
| CN102856305A (en) * | 2012-07-25 | 2013-01-02 | 中国科学技术大学 | Strong three-friction stepper driven by two piezoelectrics side by side |
| CN102866265A (en) * | 2011-07-05 | 2013-01-09 | 中国科学技术大学 | Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure |
-
2013
- 2013-11-06 CN CN201310552279.XA patent/CN103616532B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06241779A (en) * | 1993-02-23 | 1994-09-02 | Toshiba Corp | Fine positioning device |
| US20040216518A1 (en) * | 2001-08-27 | 2004-11-04 | Aaron Lewis | Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| CN102243253A (en) * | 2011-04-25 | 2011-11-16 | 中国科学院合肥物质科学研究院 | Scanning probe microscope body with isolated imaging scanning and rough approximation |
| CN102866265A (en) * | 2011-07-05 | 2013-01-09 | 中国科学技术大学 | Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure |
| CN102426270A (en) * | 2011-09-02 | 2012-04-25 | 北京大学 | Optical system for low-temperature scanning near-field optical microscope |
| CN102856305A (en) * | 2012-07-25 | 2013-01-02 | 中国科学技术大学 | Strong three-friction stepper driven by two piezoelectrics side by side |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103986365A (en) * | 2014-05-16 | 2014-08-13 | 中国科学技术大学 | Multi-region drive inertia piezoelectric motor device, scanning probe microscope and control method |
| CN103986365B (en) * | 2014-05-16 | 2016-06-29 | 中国科学技术大学 | Inertia piezoelectric motor device that multi-region drives and scanning probe microscopy and control methods |
| CN106597025A (en) * | 2015-10-16 | 2017-04-26 | 中国科学院合肥物质科学研究院 | Nested piezoelectric tube driven multi-dimensional and detachable piezoelectric motor and scanning probe microscope |
| CN106645802A (en) * | 2015-10-30 | 2017-05-10 | 中国科学院合肥物质科学研究院 | High precision piezoelectric scanner by lever scanning and scanning probe microscope thereof |
| CN106932611A (en) * | 2017-04-19 | 2017-07-07 | 东南大学 | A kind of PSTM structure of use motor scan head isolation technics |
| CN106932611B (en) * | 2017-04-19 | 2019-06-14 | 东南大学 | It is a kind of using motor-probe isolation technics scanning tunneling microscope structure |
| CN109406386A (en) * | 2017-10-30 | 2019-03-01 | 西南交通大学 | The design of profiled cross-section micro-cantilever beam probe and processing method applied to the measurement of nanoscale single-contact ultralow friction coefficient |
| CN108089030A (en) * | 2017-11-14 | 2018-05-29 | 合肥中科微力科技有限公司 | Double piezo tube nesting mechanical parallel high stable scanners and scanning probe microscopy |
| CN108593969A (en) * | 2018-05-16 | 2018-09-28 | 中国科学院合肥物质科学研究院 | A kind of tubular type external insulation narrow dimension scanning probe microscopy mirror body |
| CN112540194A (en) * | 2020-12-04 | 2021-03-23 | 南京信息工程大学 | Modular quick-release combined scanning probe microscope |
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