CN102866265A - Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure - Google Patents
Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure Download PDFInfo
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- CN102866265A CN102866265A CN2011101874023A CN201110187402A CN102866265A CN 102866265 A CN102866265 A CN 102866265A CN 2011101874023 A CN2011101874023 A CN 2011101874023A CN 201110187402 A CN201110187402 A CN 201110187402A CN 102866265 A CN102866265 A CN 102866265A
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Abstract
The invention provides a scanning probe microscope body with a coarse approximation motor capable of being separated from a scanning structure, comprising a piezoelectric locator, a specimen holder, a probe seat and a coarse approximation motor. The scanning probe microscope body is characterized by further comprising a guide rail, on which the coarse approximation motor and the piezoelectric locator are arranged; one of the specimen holder and the probe seat is arranged on the piezoelectric locator and the other of the two is arranged on the guide rail; one of the specimen holder, the probe seat and the piezoelectric locator is used as a moving body and pushed by the coarse approximation motor to perform coarse approximation between the specimen holder and the probe seat along the guide rail; and the coarse approximation motor is separated from the moving body when drawing back and draws back alone. A slack rope can be connected between the moving body and the coarse approximation motor so that the moving body can be pulled by the rope to draw back after the coarse approximation motor draws back to straighten the rope instead of drawing back immediately when the coarse approximation motor is drawing back. The scanning probe microscope body with the coarse approximation motor capable of being separated from the scanning structure in the invention can be used to prevent instabilities of the coarse approximation motor such as thermal drift, mechanical vibration and the like from being transferred to the scanning structure, greatly improve the imaging quality and reduce distortion; and the scanning probe microscope body is especially applicable to situations with drastic environmental change such as temperature change, filed change and the like.
Description
Technical field
The present invention relates to a kind of scanning probe microscopy mirror body, particularly a kind ofly slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture, belong to the scanning probe microscopy technical field.
Background technology
Scanning probe microscopy (scanning probe microscope is called for short SPM) plays a significant role in numerous national science and technology strategy such as nanometer technology, Atomic Manipulation, quantum regulation and control, molecule life science, material and surface catalysis chemistry field with incontrovertible Atomic Resolution ability in its real space.But its development still has some significant problems not to be well solved so far, and wherein representative one is exactly stability problem.
The core texture of scanning probe microscopy (seeing accompanying drawing 1) be by slightly approach the probe that motor approaches microcosmic to the driving probe with respect to the probe in the Scan Architecture (hereinafter to be referred as Scan Architecture) of Sample Scan and sample-sample local effect (localinteraction) distance (normally nanometer or less distance, for example probe-the sample interval of this local effect of scanning tunnel microscope middle probe and sample room generation tunnel current is generally the distance of several atoms; Probe-sample interval that atomic force microscope middle probe and sample room produce this local effect of atomic force generally also is the distance of several atoms); Afterwards, Scan Architecture just can drive probe and scanned with respect to sample surfaces.In the prior art, slightly approaching motor not only requires to realize above-mentioned thick approximate procedure, also requirement can be separated into relatively far apart safe distance to probe and sample from approaching state, so, probe-sample interval slightly approaches motor and always is designed to be rigidly connected (seeing accompanying drawing 1) with Scan Architecture, so that can immediately be regulated back and forth with the advance and retreat of slightly approaching motor.This has just brought a significant problem: the instability of slightly approaching motor itself comprises that thermal drift, thermal fluctuation, mechanical vibration (being derived from extraneous vibration and/or sound interference) etc. can be delivered in the Scan Architecture, destroy the stability of probe-sample local effect, thereby cause degradation, the distortion of imaging to become large.And, the local operating distance that will be stepped to the spacing of probe and sample by initial macroscopic view distance microcosmic owing to slightly approach motor, need overcome friction resistance or promotion than heavy load, so the size of himself is usually larger, the instability such as the thermal drift that produces, thermal fluctuation, mechanical vibration are also just very large, it is very disruptive, this is so that the scanning probe microscopy development can not be followed the trail of same atom so far for a long time, and is particularly all the more so when alternating temperature, variable field (magnetic field).
In the present invention, we propose a kind of motor and departing structure of Scan Architecture of slightly approaching: when slightly approaching, approach slightly that motor is pushed the probe in the Scan Architecture to sample or sample is pushed probe to, but when slightly approaching motor and withdraw, slightly approach motor and Scan Architecture and break away from, thereby the instability of slightly approaching motor in imaging process after this can not be delivered in the Scan Architecture.
Summary of the invention
Purpose of the present invention: can be delivered to the problem that causes its bad stability in probe-sample local effect structure in order to solve the instability of slightly approaching motor in the existing scanning probe microscopy mirror body, propose a kind of scanning probe microscopy mirror body that motor can break away from Scan Architecture that slightly approaches.
The present invention realizes that the technical scheme of above-mentioned purpose is:
The present invention slightly approaches the scanning probe microscopy mirror body that motor can break away from Scan Architecture, comprise piezoelectric positioner, specimen holder, probe base, slightly approach motor, characterized by further comprising guide rail, describedly slightly approach motor and piezoelectric positioner is arranged on the guide rail, one of described specimen holder and probe base both sides are arranged on the piezoelectric positioner, the opposing party is arranged on the guide rail, specimen holder, probe base and piezoelectric positioner thrin are subjected to slightly to approach motor as kinetoplast and promote to carry out slightly approaching between specimen holder and probe base along the guide rail direction, slightly approach motor and separate with kinetoplast when withdrawing, withdraw alone, kinetoplast does not withdraw thereupon.
Be arranged in described specimen holder and the probe base between a side on the guide rail and the guide rail and set up another piezoelectric positioner.
Described piezoelectric positioner is the two-dimentional or three-dimensional piezoelectric positioner of one dimension.
The described motor that slightly approaches is piezo-electric motor.
Described piezo-electric motor is the three friction force ledexs that double piezoelectrics promotes side by side, and perhaps its pedestal is fixed on the described guide rail, and perhaps its slide bar and described guide rail are integrated.
The present invention slightly approaches the scanning probe microscopy mirror body that motor can break away from Scan Architecture, comprise piezoelectric positioner, specimen holder, probe base, slightly approach motor, characterized by further comprising guide rail, rope, describedly slightly approach motor and piezoelectric positioner is arranged on the guide rail, one of described specimen holder and probe base both sides are arranged on the piezoelectric positioner, the opposing party is arranged on the guide rail, specimen holder, probe base and piezoelectric positioner thrin are subjected to slightly to approach motor as kinetoplast and promote to carry out slightly approaching between specimen holder and probe base along the guide rail direction, kinetoplast and slightly approach and be connected with slack rope between the motor, and kinetoplast does not withdraw when slightly approaching motor and withdraw immediately thereupon, slightly approach motor and withdraw the stretching rear ability of rope is withdrawn in tow by rope but wait, to form delay and withdraw structure.
Be arranged in described specimen holder and the probe base between a side on the guide rail and the guide rail and set up another piezoelectric positioner.
Described piezoelectric positioner is the two-dimentional or three-dimensional piezoelectric positioner of one dimension.
The described motor that slightly approaches is piezo-electric motor.
Described piezo-electric motor is the three friction force ledexs that double piezoelectrics promotes side by side, and perhaps its pedestal is fixed on the described guide rail, and perhaps its slide bar and described guide rail are integrated.
Principle of work of the present invention is: the specimen holder among the present invention, probe base and piezoelectric positioner consist of Scan Architecture; Slightly to approach between motor and the kinetoplast be not rigidity or be fixedly connected with.Of the present invention first by one's own efforts in the technical scheme, slightly approach the unidirectional promotion kinetoplast of motor and approach slightly that (kinetoplast can be specimen holder, probe base or piezoelectric positioner, because slightly approach motor can directly promote specimen holder and probe base the two one of approach to the opposing party, also can promote piezoelectric positioner makes it to approach toward the opposing party with one of the specimen holder on it and probe base side), slightly approaching motor separates with kinetoplast when withdrawing, withdraw alone, kinetoplast does not withdraw thereupon, like this, before scanning imagery, can withdraw a segment distance with slightly approaching motor first, separate with Scan Architecture, in scanning imagery process subsequently, the instability of slightly approaching motor just can not pass in the Scan Architecture, thereby has realized purpose of the present invention; At second by one's own efforts in the technical scheme of the present invention, slightly approaching motor promotes kinetoplast and approaches slightly that (kinetoplast can be specimen holder, probe base or piezoelectric positioner, because slightly approach motor can directly promote specimen holder and probe base the two one of approach to the opposing party, also can promote piezoelectric positioner makes it to approach toward the opposing party with one of the specimen holder on it and probe base side), but kinetoplast and slightly approach and be connected with slack rope between the motor, kinetoplast does not withdraw when slightly approaching motor and withdraw immediately thereupon, slightly approach motor and withdraw the stretching rear ability of rope is withdrawn in tow by rope but wait, form and postpone to withdraw, like this, before scanning imagery, can withdraw a bit of distance with slightly approaching motor first, but it is stretching to be not enough to a slack rope, slightly approach between motor and the Scan Architecture this moment and only be connected by slack rope, in scanning imagery process subsequently, the instability of slightly approaching motor can not pass in the Scan Architecture by slack rope, thereby also realized purpose of the present invention, after, if need to be separated into relatively far apart safe distance to probe and sample from approaching state, can allow and slightly approach motor and further withdraw, by the time rope be straightened rear recycling rope in tow kinetoplast withdraw, just probe and sample are separated into relatively far apart safe distance from approaching state.
Can find out that according to above-mentioned principle beneficial effect of the present invention is embodied in:
Under the condition that does not increase complicacy, comprise that the transmission such as its thermal drift, thermal fluctuation, mechanical vibration (being derived from extraneous vibration and/or sound interference) are less than in the Scan Architecture so that slightly approach the instability of motor, this has just got rid of the instable main source of scanning probe microscopy, thereby greatly improve image quality, reduce distortion and drift, allow scanning probe microscopy can follow the trail of for a long time same atom, be particularly useful for the situation of the environment acute variation such as alternating temperature, variable field (magnetic field).
Description of drawings
Fig. 1 be traditional, slightly approach the scanning probe microscopy mirror structure synoptic diagram of motor and kinetoplast gun iron link.
Fig. 2 is that basic model of the present invention is slightly approached the scanning probe microscopy mirror structure synoptic diagram that motor can break away from Scan Architecture.
Fig. 3 is that rope connecting-type of the present invention slightly approaches the scanning probe microscopy mirror structure synoptic diagram that motor can break away from Scan Architecture.
Number in the figure: 1 guide rail, 2 Scan Architectures, 3 piezoelectric positioners, 4 specimen holders, 5 probe bases, 6 slightly approach motor, 7 ropes.
Below the invention will be further described by embodiment and structure accompanying drawing.
Embodiment
Embodiment 1: basic model is slightly approached the scanning probe microscopy mirror body that motor can break away from Scan Architecture
Referring to accompanying drawing 2, the present embodiment basic model is slightly approached the scanning probe microscopy mirror body that motor can break away from Scan Architecture, comprise piezoelectric positioner 3, specimen holder 4, probe base 5, slightly approach motor 6, characterized by further comprising guide rail 1, describedly slightly approach motor 6 and piezoelectric positioner 3 is arranged on the guide rail 1, one of described specimen holder 4 and probe base 5 both sides are arranged on the piezoelectric positioner 3, the opposing party is arranged on the guide rail 1, specimen holder 4, probe base 5 and piezoelectric positioner 3 thrins are subjected to slightly to approach motor 6 as kinetoplast and promote to carry out slightly approaching of 5 of specimen holder 4 and probe bases along guide rail 1 direction, slightly approach motor 6 and separate with kinetoplast when withdrawing, withdraw alone, kinetoplast does not withdraw thereupon.
The principle of work of present embodiment is: the specimen holder 4 among the present invention, probe base 5 and piezoelectric positioner 3 consist of Scan Architecture 2; Slightly to approach between motor 6 and the kinetoplast be not rigidity or be fixedly connected with.Slightly approach motor 6 unidirectional promotion kinetoplasts and carry out slightly approaching between specimen holder 4 and the probe base 5, kinetoplast can be specimen holder 4, probe base 5 or piezoelectric positioner 3, because slightly approach motor 6 can directly promote specimen holder 4 and probe base 5 the two one of approach to the opposing party, also can promote piezoelectric positioner 3 and allow specimen holder 4 and probe base 5 approach by piezoelectric positioner 3 with the specimen holder 4 on it or probe base 5.Slightly approaching motor 6 separates with kinetoplast when withdrawing, withdraw alone, kinetoplast does not withdraw thereupon, like this, before scanning imagery, can withdraw a segment distance with slightly approaching motor 6 first, separate with Scan Architecture 2, in scanning imagery process subsequently, the instability of slightly approaching motor 6 just can not pass in the Scan Architecture 2, thereby has realized purpose of the present invention.
Embodiment 2: two piezoelectric positioner types slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture
Be arranged in specimen holder 4 and the probe base 5 in above-described embodiment 1 between a side on the guide rail 1 and the guide rail 1 and set up another piezoelectric positioner 3.Used herein pair of piezoelectric positioner also can be regarded a split type piezoelectric positioner as, is a special case of the piezoelectric positioner 3 among the embodiment 1.
Embodiment 3: list or multidimensional piezoelectric positioner slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture
Embodiment 4: the piezo-electric motor type slightly approaches the scanning probe microscopy mirror body that motor can break away from Scan Architecture
The motor 6 that slightly approaches in above-described embodiment can be piezo-electric motor, to obtain higher thick approximation accuracy.
Embodiment 5: special piezo-electric motor type slightly approaches the scanning probe microscopy mirror body that motor can break away from Scan Architecture
The piezo-electric motor of stating in above-described embodiment 4 is chosen as the three friction force ledexs that our the autonomous double piezoelectrics of inventing promotes side by side, and perhaps its pedestal is fixed on the described guide rail 1, and perhaps its slide bar and described guide rail 1 are integrated.
Embodiment 6: the rope connecting-type slightly approaches the scanning probe microscopy mirror body that motor can break away from Scan Architecture
Referring to accompanying drawing 3, rope connecting-type of the present invention slightly approaches the scanning probe microscopy mirror body that motor can break away from Scan Architecture, comprise piezoelectric positioner 3, specimen holder 4, probe base 5, slightly approach motor 6, characterized by further comprising guide rail 1, rope 7, describedly slightly approach motor 6 and piezoelectric positioner 3 is arranged on the guide rail 1, one of described specimen holder 4 and probe base 5 both sides are arranged on the piezoelectric positioner 3, the opposing party is arranged on the guide rail 1, specimen holder 4, probe base 5 and piezoelectric positioner 3 thrins are subjected to slightly to approach motor 6 as kinetoplast and promote to carry out slightly approaching of 5 of specimen holder 4 and probe bases along guide rail 1 direction, kinetoplast and slightly approach and be connected with slack rope 7 between the motor 6, kinetoplast does not withdraw when motor 6 withdraws immediately slightly approaching thereupon, slightly approaches motor 6 and withdraws rope 7 stretching rear ability are withdrawn in tow by rope 7 but wait, and forms delay and withdraws structure.
The principle of work of present embodiment is: slightly approach motor 6 and promote kinetoplasts and approach slightly that (kinetoplast can be specimen holder 4, probe base 5 or piezoelectric positioner 3, because slightly approach motor 6 can directly promote specimen holder 4 and probe base 5 the two one of approach to the opposing party, also can promote piezoelectric positioner 3 makes it to approach toward the opposing party with one of the specimen holder 4 on it and probe base 5 side), but kinetoplast and slightly approach and be connected with slack rope 7 between the motor 6, kinetoplast does not withdraw when motor 6 withdraws immediately slightly approaching thereupon, slightly approach motor 6 and withdraw rope 7 stretching rear ability are withdrawn in tow by rope 7 but wait, form and postpone to withdraw, like this, before scanning imagery, can withdraw a bit of distance with slightly approaching motor 6 first, but it is stretching to be not enough to a slack rope 7, slightly approach this moment between motor 6 and the Scan Architecture 2 and to be connected by slack rope 7, in scanning imagery process subsequently, the instability of slightly approaching motor 6 can not pass in the Scan Architecture 2 by slack rope 7, thereby also realized purpose of the present invention, after, if need to be separated into relatively far apart safe distance to probe and sample from approaching state, can allow and slightly approach motor 6 and further withdraw, by the time rope 7 be straightened rear recycling rope 7 in tow kinetoplast withdraw, just probe and sample are separated into relatively far apart safe distance from approaching state.
Embodiment 7: the rope connecting-type of other form slightly approaches the scanning probe microscopy mirror body that motor can break away from Scan Architecture
Have embodiment 2 to embodiment 5 these versions as embodiment 1, embodiment 6 also correspondingly has following several version:
Be arranged in described specimen holder 4 and the probe base 5 between a side on the guide rail 1 and the guide rail 1 and set up another piezoelectric positioner 3.
Described piezoelectric positioner 3 is the two-dimentional or three-dimensional piezoelectric positioner of one dimension.
The described motor 6 that slightly approaches is piezo-electric motor.
Described piezo-electric motor is the three friction force ledexs that double piezoelectrics promotes side by side, and perhaps its pedestal is fixed on the described guide rail 1, and perhaps its slide bar and described guide rail 1 are integrated.
Claims (10)
1. one kind is slightly approached the scanning probe microscopy mirror body that motor can break away from Scan Architecture, comprise piezoelectric positioner, specimen holder, probe base, slightly approach motor, characterized by further comprising guide rail, describedly slightly approach motor and piezoelectric positioner is arranged on the guide rail, one of described specimen holder and probe base both sides are arranged on the piezoelectric positioner, the opposing party is arranged on the guide rail, specimen holder, probe base and piezoelectric positioner thrin are subjected to slightly to approach motor as kinetoplast and promote to carry out slightly approaching between specimen holder and probe base along the guide rail direction, slightly approach motor and separate with kinetoplast when withdrawing, withdraw alone, kinetoplast does not withdraw thereupon.
2. according to claim 1ly slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture, it is characterized in that being arranged in specimen holder and the probe base between a side on the guide rail and the guide rail and set up another piezoelectric positioner.
3. according to claim 1 and 2ly slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture, it is characterized in that described piezoelectric positioner is the two-dimentional or three-dimensional piezoelectric positioner of one dimension.
4. according to claim 1 and 2ly slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture, it is characterized in that the described motor that slightly approaches is piezo-electric motor.
5. according to claim 4ly slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture, it is characterized in that described piezo-electric motor is the three friction force ledexs that double piezoelectrics promotes side by side, perhaps its pedestal is fixed on the described guide rail, and perhaps its slide bar and described guide rail are integrated.
6. one kind is slightly approached the scanning probe microscopy mirror body that motor can break away from Scan Architecture, comprise piezoelectric positioner, specimen holder, probe base, slightly approach motor, characterized by further comprising guide rail, rope, describedly slightly approach motor and piezoelectric positioner is arranged on the guide rail, one of described specimen holder and probe base both sides are arranged on the piezoelectric positioner, the opposing party is arranged on the guide rail, specimen holder, probe base and piezoelectric positioner thrin are subjected to slightly to approach motor as kinetoplast and promote to carry out slightly approaching between specimen holder and probe base along the guide rail direction, kinetoplast and slightly approach and be connected with slack rope between the motor, and kinetoplast does not withdraw when slightly approaching motor and withdraw immediately thereupon, slightly approach motor and withdraw the stretching rear ability of rope is withdrawn in tow by rope but wait, to form delay and withdraw structure.
7. according to claim 6ly slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture, it is characterized in that being arranged in specimen holder and the probe base between a side on the guide rail and the guide rail and set up another piezoelectric positioner.
8. according to claim 6 or 7 describedly slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture, it is characterized in that described piezoelectric positioner is the two-dimentional or three-dimensional piezoelectric positioner of one dimension.
9. according to claim 6 or 7 describedly slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture, it is characterized in that the described motor that slightly approaches is piezo-electric motor.
10. according to claim 9ly slightly approach the scanning probe microscopy mirror body that motor can break away from Scan Architecture, it is characterized in that described piezo-electric motor is the three friction force ledexs that double piezoelectrics promotes side by side, perhaps its pedestal is fixed on the described guide rail, and perhaps its slide bar and described guide rail are integrated.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110187402.3A CN102866265B (en) | 2011-07-05 | 2011-07-05 | Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure |
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| CN201110187402.3A CN102866265B (en) | 2011-07-05 | 2011-07-05 | Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103616532A (en) * | 2013-11-06 | 2014-03-05 | 中国科学技术大学 | Independent low-return-difference and high-rescanning probe microscope scanner |
| CN105092896A (en) * | 2015-08-03 | 2015-11-25 | 中国科学院合肥物质科学研究院 | Single-scanning-tube-driven multidimensional piezoelectric motor and searchable scanning probe microscope |
| CN106932611A (en) * | 2017-04-19 | 2017-07-07 | 东南大学 | A kind of PSTM structure of use motor scan head isolation technics |
| CN109406830A (en) * | 2018-12-07 | 2019-03-01 | 南京邮电大学 | A kind of detachable scanning probe microscopy mirror body |
| CN110865209A (en) * | 2019-12-18 | 2020-03-06 | 南京信息工程大学 | Large-range searchable scanning probe microscope |
| CN112540194A (en) * | 2020-12-04 | 2021-03-23 | 南京信息工程大学 | Modular quick-release combined scanning probe microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103616532A (en) * | 2013-11-06 | 2014-03-05 | 中国科学技术大学 | Independent low-return-difference and high-rescanning probe microscope scanner |
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| CN105092896A (en) * | 2015-08-03 | 2015-11-25 | 中国科学院合肥物质科学研究院 | Single-scanning-tube-driven multidimensional piezoelectric motor and searchable scanning probe microscope |
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| CN109406830A (en) * | 2018-12-07 | 2019-03-01 | 南京邮电大学 | A kind of detachable scanning probe microscopy mirror body |
| CN109406830B (en) * | 2018-12-07 | 2023-12-22 | 南京邮电大学 | Separable scanning probe microscope body |
| CN110865209A (en) * | 2019-12-18 | 2020-03-06 | 南京信息工程大学 | Large-range searchable scanning probe microscope |
| CN112540194A (en) * | 2020-12-04 | 2021-03-23 | 南京信息工程大学 | Modular quick-release combined scanning probe microscope |
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