CN110865209A - Large-range searchable scanning probe microscope - Google Patents
Large-range searchable scanning probe microscope Download PDFInfo
- Publication number
- CN110865209A CN110865209A CN201911308202.1A CN201911308202A CN110865209A CN 110865209 A CN110865209 A CN 110865209A CN 201911308202 A CN201911308202 A CN 201911308202A CN 110865209 A CN110865209 A CN 110865209A
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- Prior art keywords
- scanning
- pole setting
- tube
- searchable
- probe microscope
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
Abstract
The invention provides a large-range searchable scanning probe microscope, which comprises upright posts, positioning blocks, linear motors, fastening nuts, fastening nails, cross rods, inertial motors, brackets and sample grooves, wherein the upright posts are assembled on the upper end surface of a bottom plate, the fastening nuts are assembled on the lower sides of the annular side surfaces of the upright posts, the linear motors are assembled on the annular side surfaces of the upright posts, the brackets are assembled on the right sides of the linear motors, the positioning blocks are assembled on the upper sides of the annular side surfaces of the upright posts, the cross rods are connected to the right end surfaces of the positioning blocks, the inertial motors are assembled on the lower end surfaces of the cross rods, the fastening nails are assembled on the upper end surfaces of the inertial motors, and the sample grooves are formed in the lower end surfaces of the inertial motors.
Description
Technical Field
The invention discloses a large-range searchable scanning probe microscope, and belongs to the technical field of scanning probe microscopes.
Background
The scanning probe microscope has wide application fields due to extremely high resolution, observation of real surface morphology and loose use environment. The core principle of the scanning probe microscope is to characterize a sample through tunneling current (scanning tunneling microscope) or atomic force action (atomic force microscope) or magnetic interaction (magnetic force microscope) between a probe and the sample. Therefore, the piezoelectric scanning tube is required to drive the probe to perform two-dimensional scanning, so that the scanning range of the scanning probe microscope is determined by the scanning head. If a large scan is desired, it is now common to increase the aspect ratio of the scan tube, or to increase the control voltage of the scan tube, or to move the sample using a two-dimensional motion stage. As published (bulletin) No.: CN102384986A and publication (bulletin) No.: CN106053886B relates to a large-scale scanning probe microscope, but its principle of large-scale implementation is realized by a manual stage.
The invention solves the problem that the scanning range of the existing scanning probe microscope is limited. The inertial motor is controlled to swing through the other piezoelectric tube, so that the sample (or the probe) is driven to move in any direction on a two-dimensional plane, and the full-sample range can be scanned. Will contribute to the wide-range searchable scanning of scanning probe microscopes, there is an urgent need for a wide-range searchable scanning probe microscope to solve the above-mentioned problems.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a scanning probe microscope capable of searching in a large range so as to solve the problems in the background technology.
In order to achieve the purpose, the invention is realized by the following technical scheme: the utility model provides a searchable scanning probe microscope on a large scale, includes big scanning tube, little scanning tube, accurate scanning mechanism, bottom plate and probe, little scanning tube is installed to big scanning tube downside, little scanning tube downside is equipped with the bottom plate, little scanning tube up end is equipped with the probe, big scanning tube left side is provided with accurate scanning mechanism, accurate scanning mechanism includes pole setting, locating piece, linear electric motor, fastening nut, fastening nail, horizontal pole, inertial motor, bracket and sample groove, the bottom plate up end is equipped with the pole setting, pole setting annular side downside is equipped with fastening nut, pole setting annular side is equipped with linear electric motor, the linear electric motor right side is equipped with the bracket, pole setting annular side upside is equipped with the locating piece, locating piece right-hand member face is connected with the horizontal pole, the terminal surface is equipped with inertial motor under the horizontal pole, the upper end face of the inertia motor is provided with a fastening nail, and the lower end face of the inertia motor is provided with a sample groove.
Further, linear electric motor is connected with external power through the wire, linear electric motor right-hand member face is equipped with the connecting rod, linear electric motor is connected with the bracket through the connecting rod.
Further, pole setting annular side downside is equipped with the external screw thread, fastening nut annular side inboard is equipped with the internal thread, and the internal thread meshes with the external screw thread mutually, horizontal spout has been seted up to the bottom plate inside, and horizontal spout and pole setting phase-match, the terminal surface is equipped with the spacing ring under the pole setting.
Furthermore, the left side of the positioning block is provided with a locking bolt, the left end face of the positioning block is provided with a bolt hole, and the locking bolt penetrates through the bolt hole and is in contact with the vertical rod.
Furthermore, a movable groove is formed in the cross rod, and the fastening nails penetrate through the movable groove and are connected with the inertial motor.
Furthermore, the inner diameter of the large scanning tube is slightly larger than the outer diameter of the small scanning tube, and the inertial motor, the large scanning tube, the small scanning tube and the probe are connected with an external host through leads.
The invention has the beneficial effects that: according to the large-range searchable scanning probe microscope, the vertical rod, the positioning block, the linear motor, the fastening nut, the fastening nail, the cross rod, the inertial motor, the bracket and the sample groove are added, so that the scanning effect of the existing scanning probe microscope can be effectively improved, the problem that the scanning range of the existing scanning probe microscope is limited is solved, and the accurate scanning effect of the scanning probe microscope is improved.
Because the linear motor is connected with an external power supply through a wire, the right end face of the linear motor is provided with a connecting rod, the linear motor is connected with a bracket through the connecting rod, the design ensures that the linear motor pushes the small scanning tube to approach a sample groove upwards, because the lower side of the annular side face of the vertical rod is provided with an external thread, the inner side of the annular side face of the fastening nut is provided with an internal thread which is meshed with the external thread, the bottom plate is internally provided with a transverse sliding groove which is matched with the vertical rod, the lower end face of the vertical rod is provided with a limiting ring, the design is convenient for adjusting the horizontal position of the vertical rod, because the left side of the positioning block is provided with a locking bolt, the left end face of the positioning block is provided with a bolt hole, and the locking bolt penetrates through the bolt hole.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic diagram of a large-area searchable scanning probe microscope of the present invention;
FIG. 2 is a schematic diagram of a precise scanning mechanism in a large-area searchable scanning probe microscope according to the present invention;
FIG. 3 is a front sectional view of a precision scanning mechanism in a large-area searchable scanning probe microscope in accordance with the present invention;
in the figure: 1-large scanning tube, 2-small scanning tube, 3-accurate scanning mechanism, 4-bottom plate, 5-probe, 31-vertical rod, 32-positioning block, 33-linear motor, 34-fastening nut, 35-fastening nail, 36-cross bar, 37-inertial motor, 38-bracket and 371-sample groove.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a searchable scanning probe microscope on a large scale, includes big scanning tube 1, little scanning tube 2, accurate scanning mechanism 3, bottom plate 4 and probe 5, and little scanning tube 2 is installed to 1 downside of big scanning tube, and 2 downside of little scanning tube are equipped with bottom plate 4, and 2 up ends of little scanning tube are equipped with probe 5, and 1 left sides of big scanning tube are provided with accurate scanning mechanism 3.
Locating piece 32 left side is equipped with locking bolt, the bolt hole has been seted up to locating piece 32 left end face, locking bolt runs through the bolt hole and contacts with pole setting 31, this design is convenient for adjust the vertical position of big scanning tube 1, be convenient for the dismouting of big scanning tube 1, the movable groove has been seted up to horizontal pole 36 inside, binding nail 35 runs through the movable groove and is connected with inertial motor 37, this design is convenient for the removal and the dismouting of big scanning tube 1, big scanning tube 1 internal diameter slightly is greater than 2 external diameters of little scanning tube, inertial motor 37, big scanning tube 1, little scanning tube 2, probe 5 all is connected with external host computer through the wire, this design makes inertial motor 37, big scanning tube 1, little scanning tube 2, probe 5 circular telegram work.
As an embodiment of the present invention: firstly, place bottom plate 4 at the assigned position, big scanning tube 1, little scanning tube 2, probe 5 all is connected with external host computer through the wire, linear electric motor 33 is connected with external power through the wire, the sample that needs to detect is placed in sample groove 371, linear electric motor 33 promotes little scanning tube 2 and probe 5 and approaches or keep away from the sample lower surface, little scanning tube 2 control probe 5 carries out horizontal direction two-dimensional scanning, big scanning tube 1 and little scanning tube 2 belong to nested relation, external host computer exerts spike signal to big scanning tube 1 and can control inertial motor 37 and whip in horizontal two-dimensional direction, the sample embedding is at inertial motor 37 downside, inertial motor 37 drives the sample and can carry out horizontal two-dimensional direction and remove, consequently, can realize carrying out the accurate scanning of specific search to the sample region of interest.
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (6)
1. The utility model provides a searchable scanning probe microscope on a large scale, includes big scanning tube, little scanning tube, accurate scanning mechanism, bottom plate and probe, its characterized in that: a small scanning tube is arranged on the lower side of the large scanning tube, a bottom plate is assembled on the lower side of the small scanning tube, a probe is assembled on the upper end face of the small scanning tube, and a precise scanning mechanism is arranged on the left side of the large scanning tube;
accurate scanning mechanism includes pole setting, locating piece, linear electric motor, fastening nut, binding nail, horizontal pole, inertial motor, bracket and sample groove, the bottom plate up end is equipped with the pole setting, pole setting annular side downside is equipped with fastening nut, pole setting annular side is equipped with linear electric motor, the linear electric motor right side is equipped with the bracket, pole setting annular side upside is equipped with the locating piece, locating piece right-hand member face is connected with the horizontal pole, the terminal surface is equipped with inertial motor under the horizontal pole, inertial motor up end is equipped with the binding nail, the sample groove has been seted up to the terminal surface under the inertial motor.
2. A wide area searchable scanning probe microscope according to claim 1, wherein: the linear electric motor is connected with an external power supply through a wire, a connecting rod is assembled on the right end face of the linear electric motor, and the linear electric motor is connected with the bracket through the connecting rod.
3. A wide area searchable scanning probe microscope according to claim 1, wherein: the utility model discloses a quick-witted pole setting, including bottom plate, fastening nut, bottom plate, pole setting annular side downside is equipped with the external screw thread, fastening nut annular side inboard is equipped with the internal thread, and the internal thread meshes with the external screw thread mutually, horizontal spout has been seted up to the bottom plate inside, and horizontal spout and pole setting phase-match, the terminal surface is equipped with the spacing ring under the pole setting.
4. A wide area searchable scanning probe microscope according to claim 1, wherein: the locating piece left side is equipped with locking bolt, the bolt hole has been seted up to the locating piece left end face, locking bolt runs through the bolt hole and contacts with the pole setting.
5. A wide area searchable scanning probe microscope according to claim 1, wherein: a movable groove is formed in the cross rod, and the fastening nails penetrate through the movable groove and are connected with the inertial motor.
6. A wide area searchable scanning probe microscope according to claim 1, wherein: the inner diameter of the large scanning tube is slightly larger than the outer diameter of the small scanning tube, and the inertial motor, the large scanning tube, the small scanning tube and the probe are connected with an external host through leads.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911308202.1A CN110865209A (en) | 2019-12-18 | 2019-12-18 | Large-range searchable scanning probe microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911308202.1A CN110865209A (en) | 2019-12-18 | 2019-12-18 | Large-range searchable scanning probe microscope |
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| CN110865209A true CN110865209A (en) | 2020-03-06 |
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| CN201911308202.1A Pending CN110865209A (en) | 2019-12-18 | 2019-12-18 | Large-range searchable scanning probe microscope |
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| JP2004309348A (en) * | 2003-04-08 | 2004-11-04 | Sii Nanotechnology Inc | Scanning probe microscope |
| CN101556236A (en) * | 2008-04-09 | 2009-10-14 | 中国科学技术大学 | Cross transpose fully low pressure low temperature drift cold scanning probe microscope body |
| US20110061139A1 (en) * | 2009-09-04 | 2011-03-10 | Ahmet Oral | Method to measure 3 component of the magnetic field vector at nanometer resolution using scanning hall probe microscopy |
| CN102866265A (en) * | 2011-07-05 | 2013-01-09 | 中国科学技术大学 | Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure |
| CN103986365A (en) * | 2014-05-16 | 2014-08-13 | 中国科学技术大学 | Multi-region drive inertia piezoelectric motor device, scanning probe microscope and control method |
| CN104181335A (en) * | 2013-05-24 | 2014-12-03 | 中国科学院物理研究所 | Scanning tunneling microscope scanning probe head |
| CN104767421A (en) * | 2015-04-15 | 2015-07-08 | 中国科学院合肥物质科学研究院 | Opposite friction resistance-reducing inertial piezoelectric motor, control method and scanning probe microscope |
| CN105092896A (en) * | 2015-08-03 | 2015-11-25 | 中国科学院合肥物质科学研究院 | Single-scanning-tube-driven multidimensional piezoelectric motor and searchable scanning probe microscope |
| CN105699697A (en) * | 2016-03-18 | 2016-06-22 | 河南师范大学 | Scanning probe microscope body made by piezoelectric bimorph motor |
| CN106645802A (en) * | 2015-10-30 | 2017-05-10 | 中国科学院合肥物质科学研究院 | High precision piezoelectric scanner by lever scanning and scanning probe microscope thereof |
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2019
- 2019-12-18 CN CN201911308202.1A patent/CN110865209A/en active Pending
Patent Citations (10)
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| JP2004309348A (en) * | 2003-04-08 | 2004-11-04 | Sii Nanotechnology Inc | Scanning probe microscope |
| CN101556236A (en) * | 2008-04-09 | 2009-10-14 | 中国科学技术大学 | Cross transpose fully low pressure low temperature drift cold scanning probe microscope body |
| US20110061139A1 (en) * | 2009-09-04 | 2011-03-10 | Ahmet Oral | Method to measure 3 component of the magnetic field vector at nanometer resolution using scanning hall probe microscopy |
| CN102866265A (en) * | 2011-07-05 | 2013-01-09 | 中国科学技术大学 | Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure |
| CN104181335A (en) * | 2013-05-24 | 2014-12-03 | 中国科学院物理研究所 | Scanning tunneling microscope scanning probe head |
| CN103986365A (en) * | 2014-05-16 | 2014-08-13 | 中国科学技术大学 | Multi-region drive inertia piezoelectric motor device, scanning probe microscope and control method |
| CN104767421A (en) * | 2015-04-15 | 2015-07-08 | 中国科学院合肥物质科学研究院 | Opposite friction resistance-reducing inertial piezoelectric motor, control method and scanning probe microscope |
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Application publication date: 20200306 |
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