CN111525833B - Sawtooth wave driven piezoelectric motor - Google Patents
Sawtooth wave driven piezoelectric motor Download PDFInfo
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- CN111525833B CN111525833B CN202010410573.7A CN202010410573A CN111525833B CN 111525833 B CN111525833 B CN 111525833B CN 202010410573 A CN202010410573 A CN 202010410573A CN 111525833 B CN111525833 B CN 111525833B
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- 239000000463 material Substances 0.000 claims description 12
- 230000003068 static effect Effects 0.000 claims description 6
- 230000008602 contraction Effects 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 abstract description 3
- 239000000523 sample Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention relates to a sawtooth wave driven piezoelectric motor, and belongs to the technical field of precision driving and positioning. Comprises a driving mechanism and a pre-tightening mechanism; the driving mechanism comprises a body, a piezoelectric stack and a mass block; the pre-tightening mechanism comprises a clamping block, a pre-tightening bolt and a spring. The invention has low cost and simple manufacture, and can realize continuous unidirectional linear movement of the piezoelectric motor only by one path of sawtooth wave driving signal and one piezoelectric stack. The micro-scanning probe micro-positioning device has the working frequency of 1.25KHz, the working voltage of 60V, the horizontal axial movement stroke of 30mm, the horizontal axial no-load speed of 5mm/s and the working step pitch of 4 mu m, can realize micro-scale positioning and centimeter-scale stroke, and is very suitable for being used as a micro-positioning device of precision machinery such as a micro-scanning probe microscope, an optical fiber scanning system and the like.
Description
Technical Field
The invention belongs to the technical field of precision driving and positioning, and particularly relates to a linear piezoelectric motor.
Background
The piezoelectric motor is a device for performing electromechanical energy conversion by utilizing the piezoelectric inverse effect of a piezoelectric body, has the advantages of high response speed, simplicity in operation, electromagnetic interference resistance and the like, and is widely researched and applied at home and abroad. At present, a piezoelectric motor is often used as a precision positioning device in the fields of precision positioning systems, optical fiber scanning technologies and the like. The conventional piezoelectric motor generally has the problems of complex structure, difficulty in miniaturization, low moving speed, high cost and the like, and has various inconveniences when being used as a precision positioning device.
An inertia nanometer stepping motor based on piezoelectric stacks fixes a sliding rod on the inner side of an insulation guide rail in an extrusion mode through 4 silicon nitride spheres and beryllium copper spring pieces, and controls the insulation guide rail to drive the sliding rod to move linearly by applying a sawtooth wave voltage signal to two groups of piezoelectric stacks and utilizing the inertia effect of the sliding rod. The motor slide bar fixing structure is complex, and the motor can be driven by two piezoelectric stacks and one path of sawtooth wave signal, so that the motor has the problem of high cost. Because the motor realizes linear motion by adopting a mode that the piezoelectric stack drives the insulating guide rail to drive the sliding rod to move, the output speed of the motor is very low. The maximum speed of the motor can only reach 0.7 mu m/s under the driving voltage of 100V.
Disclosure of Invention
The invention provides a sawtooth wave driven linear piezoelectric motor, aiming at solving the problems of complex structure, difficulty in miniaturization, low moving speed and high cost of the traditional piezoelectric motor used as a positioning device.
A piezoelectric motor driven by sawtooth waves comprises a driving mechanism and a pre-tightening mechanism;
the driving mechanism comprises a body 1, a piezoelectric stack 8 and a mass block 7; the body 1 is tubular, one end of the body is fixedly provided with an end cover 2, and the other end of the body is open; the piezoelectric stack 8 and the mass block 7 are both columnar, and one ends of the piezoelectric stack and the mass block are connected with each other; the other end of the piezoelectric stack 8 is fixedly connected with the end cover 2, and the piezoelectric stack 8 and the mass block 7 are positioned in the body 1 in a cantilever manner;
the pre-tightening mechanism comprises a clamping block 6, a pre-tightening bolt 3 and a spring 5; the clamping block 6 is a U-shaped clamping block; the clamping block 6 is sleeved on the body 1; the pre-tightening bolt 3 is connected with the opening end of the clamping block 6, so that the clamping block 6 and the pre-tightening bolt 3 form a closed ring; the spring 5 is sleeved on the pre-tightening bolt 3 between the nut of the pre-tightening bolt 3 and one side end of the clamping block 6;
when the piezoelectric stack 8 works, the working frequency of sawtooth waves is input into the piezoelectric stack 8, when the working voltage of the piezoelectric stack 8 slowly increases, the piezoelectric stack 8 slowly extends, the piezoelectric stack 8 can generate thrust to the end cover 2 and the mass block 7, and because the end cover 2 and the body 1 are integrated, when the piezoelectric stack 8 actually extends, the piezoelectric stack 8 applies thrust to the body 1 in the direction of the end cover 2, but the thrust generated by the piezoelectric stack 8 to the body 1 is smaller than the maximum static friction force between the clamping block 6 and the body 1, so that the body 1 is in a static state, and the mass block 7 moves forwards by a step distance; when the working voltage of the piezoelectric stack 8 is suddenly changed to 0, the contraction pulling force generated by the instant contraction of the piezoelectric stack 8 is larger than the friction force between the clamping block 6 and the body 1, the piezoelectric motor integrally moves forwards by a working step distance to complete a working period, and continuous unidirectional linear movement is realized according to the working period in a circulating reciprocating mode.
The technical scheme for further limiting is as follows:
one side of the open end of the clamping block 6 is provided with a through hole 61, the other side of the open end of the clamping block is provided with a threaded hole 62, and the pre-tightening bolt 3 penetrates through the through hole 61 to be connected with the threaded hole 62; the spring 5 is sleeved on the pre-tightening bolt 3 outside one side of the through hole 61.
The material of the body 1 is titanium alloy, the material of the piezoelectric stack 8 is lead zirconate titanate piezoelectric ceramic, and the material of the end cover 2 and the material of the mass block 7 are 45 steel.
The length of the body 1 is 35mm, the inner diameter is 3.9mm, and the wall thickness is 0.1 mm; the length of the piezoelectric stack 8 is 5mm, and the thickness is 1.65 mm; the mass 7 has a length of 15mm, a width and a thickness of 2mm and a mass of 0.47 g.
The working frequency of the piezoelectric motor is 1.25KHz, the working voltage is 60V, the horizontal axial movement stroke is 30mm, the horizontal axial no-load speed is 5mm/s, and the working step X is 4 mu m.
And an elastic sheet 4 is sleeved on the pre-tightening bolt 3 between the nut of the pre-tightening bolt 3 and the spring 5.
The beneficial technical effects of the invention are embodied in the following aspects:
1. the driving mechanism of the piezoelectric motor inhibits the back-off of the body when the piezoelectric stack contracts instantly due to the existence of the mass block, so that the working step of the motor is large, the working step can reach 4 mu m under the driving voltage of 60V, the speed can reach 5mm/s, and the driving mechanism of the piezoelectric motor is greatly improved compared with the traditional piezoelectric motor.
2. The piezoelectric motor of the invention has only 8 parts because of compact integral structure, the length of the piezoelectric motor is only 35.5mm, the width of the piezoelectric motor is only 4mm, and because the working step pitch of the motor can reach 4 mu m, the micro-scale positioning can be realized, thus the piezoelectric motor is very suitable for being used as a fine adjustment positioning device of precision machinery such as a micro scanning probe microscope, an optical fiber scanning system and the like.
3. The piezoelectric motor can drive the piezoelectric motor to walk step by step only by one piezoelectric stack and one sawtooth wave driving signal, and the cost of the piezoelectric motor is low compared with that of the traditional piezoelectric motor with multiple piezoelectric stacks because the piezoelectric stack is expensive.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
Fig. 2 is a cross-sectional view of fig. 1.
Fig. 3 is a schematic structural diagram of the driving mechanism.
Fig. 4 is a schematic view of the structure of the clamping block.
Fig. 5 is a cross-sectional view at the clamping block.
Fig. 6 is a driving signal diagram.
FIG. 7 is a schematic view illustrating a first state of the driving mechanism.
FIG. 8 is a diagram illustrating a second state of the driving mechanism.
FIG. 9 is a diagram illustrating a third state of the driving mechanism.
Sequence numbers in the upper figure: the piezoelectric stacking device comprises a body 1, an end cover 2, a pre-tightening bolt 3, an elastic sheet 4, a spring 5, a clamping block 6, a through hole 61, a threaded hole 62, a mass block 7 and a piezoelectric stack 8.
Detailed Description
The invention will be further described by way of example with reference to the accompanying drawings.
Examples
Referring to fig. 1 and 2, a sawtooth wave driven piezoelectric motor includes a driving mechanism and a preloading mechanism.
Referring to fig. 3, the driving mechanism includes a body 1, a piezoelectric stack 8, and a mass 7. The body 1 is tubular, one end is fixedly provided with the end cover 2, and the other end is open. The piezoelectric stack 8 and the mass block 7 are columnar, and one ends of the piezoelectric stack and the mass block are connected with each other; the other end of the piezoelectric stack 8 is fixedly connected with the end cover 2, and the piezoelectric stack 8 and the mass block 7 are positioned in the body 1 in a cantilever manner.
Referring to fig. 1, the pretensioning mechanism comprises a clamping block 6, a pretensioning bolt 3 and a spring 5. Referring to fig. 4, the clamping block 6 is a U-shaped clamping block; one side of the open end of the clamping block 6 is provided with a through hole 61, the other side of the open end of the clamping block is provided with a threaded hole 62, and the pre-tightening bolt 3 penetrates through the through hole 61 to be connected with the threaded hole 62, so that the clamping block 6 and the pre-tightening bolt 3 form a closed ring. The spring 5 is sleeved on the pre-tightening bolt 3 between the nut of the pre-tightening bolt 3 outside one side of the through hole 61 and one side end of the clamping block 6, and the elastic sheet 4 is sleeved on the pre-tightening bolt 3 between the nut of the pre-tightening bolt 3 and the spring 5, as shown in fig. 5.
The material of the body 1 is titanium alloy, the material of the piezoelectric stack 8 is lead zirconate titanate piezoelectric ceramic, and the material of the end cover 2 and the material of the mass block 7 are 45 steel.
The length of the body 1 is 35mm, the inner diameter is 3.9mm, and the wall thickness is 0.1 mm; the length of the piezoelectric stack 8 is 5mm, and the thickness is 1.65 mm; the mass 7 has a length of 15mm, a width and a thickness of 2mm and a mass of 0.47 g.
The working frequency of the piezoelectric motor is 1.25KHz, the working voltage is 60V, the horizontal axial movement stroke is 30mm, the horizontal axial no-load speed is 5mm/s, and the working step X is 4 mu m.
The operating principle of the piezoelectric motor of the present invention is explained as follows:
referring to fig. 6, in operation, a sawtooth wave with a frequency of 1.25KHz is input to the piezoelectric stack 8. Referring to fig. 7, the initial position of the driving mechanism is as state one; as the voltage is slowly increased, the piezoelectric stack 8 slowly elongates. Due to the pre-tightening mechanism, friction exists between the clamping block 6 and the body 1. When the piezoelectric stack 8 extends, the piezoelectric stack 8 generates a thrust force on the end cap 2 and the mass block 7, and since the end cap 2 and the body 1 are integrated, in fact when the piezoelectric stack 8 extends, the piezoelectric stack 8 applies a thrust force to the body 1 in the direction of the end cap 2, but the thrust force generated by the piezoelectric stack 8 to the body 1 is smaller than the maximum static friction force between the clamping block 6 and the body 1, the body 1 is in a static state, and the mass block 7 moves forward by a step distance, as shown in fig. 8. When the voltage is suddenly changed to 0, the piezoelectric stack 8 instantaneously contracts to generate a huge pulling force towards the direction of the open end to the body 1, the pulling force of the piezoelectric stack 8 to the body 1 is greater than the friction force between the clamping block 6 and the body 1, and the body 1 moves forwards by a working step. Upon completion of one cycle, the piezoelectric motor is macroscopically moved forward by one working step, one working step X being 4 μm, see fig. 9. When the applied sawtooth signal completes a second cycle, the drive mechanism continues to move forward one working step. When a sawtooth wave signal is continuously input to the piezoelectric stack 8, the piezoelectric motor macroscopically realizes continuous unidirectional linear movement.
Claims (6)
1. A sawtooth wave driven piezoelectric motor is characterized in that: comprises a driving mechanism and a pre-tightening mechanism;
the driving mechanism comprises a body (1), a piezoelectric stack (8) and a mass block (7); the body (1) is tubular, one end of the body is fixedly provided with an end cover (2), and the other end of the body is open; the piezoelectric stack (8) and the mass block (7) are both columnar, and one ends of the piezoelectric stack and the mass block are connected with each other; the other end of the piezoelectric stack (8) is fixedly connected with the end cover (2), and the piezoelectric stack (8) and the mass block (7) are positioned in the body (1) in a cantilever manner;
the pre-tightening mechanism comprises a clamping block (6), a pre-tightening bolt (3) and a spring (5); the clamping block (6) is a U-shaped clamping block; the clamping block (6) is sleeved on the body (1); the pre-tightening bolt (3) is connected with the opening end of the clamping block (6), so that the clamping block (6) and the pre-tightening bolt (3) form a closed ring; the spring (5) is sleeved on the pre-tightening bolt (3) between the nut of the pre-tightening bolt (3) and one side end of the clamping block (6);
when the piezoelectric stack (8) works, sawtooth waves are input into the piezoelectric stack (8), when the working voltage of the piezoelectric stack (8) is slowly increased, the piezoelectric stack (8) slowly extends, the piezoelectric stack (8) can generate thrust on the end cover (2) and the mass block (7), and in fact, when the piezoelectric stack (8) extends, the piezoelectric stack (8) applies the thrust towards the end cover (2) to the body (1), but the thrust generated by the piezoelectric stack (8) to the body (1) is smaller than the maximum static friction force between the clamping block (6) and the body (1), so that the body (1) is in a static state, and the mass block (7) moves forwards by a step distance; when the working voltage of the piezoelectric stack (8) is suddenly changed to 0, the contraction pulling force generated by the instant contraction of the piezoelectric stack (8) is larger than the friction force between the clamping block (6) and the body (1), the piezoelectric motor integrally moves forwards by one working step distance to complete one working period, and continuous unidirectional linear movement is realized according to the working period in a circulating reciprocating mode.
2. A sawtooth wave driven piezoelectric motor according to claim 1, characterized in that: one side of the opening end of the clamping block (6) is provided with a through hole (61), the other side of the opening end of the clamping block is provided with a threaded hole (62), and the pre-tightening bolt (3) penetrates through the through hole (61) and is connected with the threaded hole (62); the spring (5) is sleeved on the pre-tightening bolt (3) outside one side of the through hole (61).
3. A sawtooth wave driven piezoelectric motor according to claim 1, characterized in that: the material of the body (1) is titanium alloy, the material of the piezoelectric stack (8) is lead zirconate titanate piezoelectric ceramic, and the material of the end cover (2) and the material of the mass block (7) are both No. 45 steel.
4. A sawtooth wave driven piezoelectric motor according to claim 1, characterized in that: the length of the body (1) is 35mm, the inner diameter is 3.9mm, and the wall thickness is 0.1 mm; the length of the piezoelectric stack (8) is 5mm, and the thickness of the piezoelectric stack is 1.65 mm; the mass block (7) has the length of 15mm, the width and the thickness of 2mm and the mass of 0.47 g.
5. A sawtooth wave driven piezoelectric motor according to claim 1, characterized in that: the working frequency of the piezoelectric motor is 1.25KHz, the working voltage is 60V, the horizontal axial movement stroke is 30mm, the horizontal axial no-load speed is 5mm/s, and the working step X is 4 mu m.
6. A sawtooth wave driven piezoelectric motor according to claim 1, characterized in that: and an elastic sheet (4) is sleeved on the pre-tightening bolt (3) between the nut of the pre-tightening bolt (3) and the spring (5).
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104393786A (en) * | 2014-12-09 | 2015-03-04 | 南京邮电大学 | Piezoelectric motor for utilizing sliding rod inertia to generate stepping |
| CN106712569A (en) * | 2017-01-11 | 2017-05-24 | 南京邮电大学 | Inertial nanometer stepping motor based on piezoelectric stacks |
| CN107863900A (en) * | 2017-12-04 | 2018-03-30 | 合肥工业大学 | A kind of coupling device of miniature impact type Piezoelectric Driving |
| CN108512457A (en) * | 2018-04-19 | 2018-09-07 | 西安交通大学 | Linear inertial piezoelectric actuator with displacement perceptional function and start method |
| CN110224632A (en) * | 2019-06-27 | 2019-09-10 | 华侨大学 | Frictional force controllable linear piezo actuator and its control method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9638493B2 (en) * | 2011-11-26 | 2017-05-02 | Orval E. Bowman | Pointing devices, apparatus, systems and methods for high shock environments |
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Patent Citations (5)
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|---|---|---|---|---|
| CN104393786A (en) * | 2014-12-09 | 2015-03-04 | 南京邮电大学 | Piezoelectric motor for utilizing sliding rod inertia to generate stepping |
| CN106712569A (en) * | 2017-01-11 | 2017-05-24 | 南京邮电大学 | Inertial nanometer stepping motor based on piezoelectric stacks |
| CN107863900A (en) * | 2017-12-04 | 2018-03-30 | 合肥工业大学 | A kind of coupling device of miniature impact type Piezoelectric Driving |
| CN108512457A (en) * | 2018-04-19 | 2018-09-07 | 西安交通大学 | Linear inertial piezoelectric actuator with displacement perceptional function and start method |
| CN110224632A (en) * | 2019-06-27 | 2019-09-10 | 华侨大学 | Frictional force controllable linear piezo actuator and its control method |
Non-Patent Citations (1)
| Title |
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| 谐振锯齿波驱动型冲击直线压电马达;贺良国等;《振动工程学报》;20150615;第28卷(第3期);第456-461页 * |
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