CN213637443U - Galfenol alloy driven double-inertia impact type precise stepping micro linear motor - Google Patents

Abstract

The utility model belongs to the technical field of Galfenol alloy application equipment, concretely relates to Galfenol alloy driven two inertia impulse type precision stepping miniature linear electric motor, which comprises a housin, the casing both ends are output and input respectively, Galfenol alloy stick is installed to the casing input, Galfenol alloy stick winding has first coil, Galfenol alloy stick fixedly connected with connecting plate, the connecting plate is equipped with the guide bar, the guide bar is equipped with the drive block, the drive block is equipped with the arc recess, both sides are equipped with the actuating lever about the drive block, two actuating levers all run through the casing output and with casing sliding connection, the drive block upside is equipped with cantilever metal shrapnel, cantilever metal shrapnel face is equipped with Galfenol driving plate, cantilever metal shrapnel winding has looks second coil, the second coil is established ties with first coil mutually, cantilever metal shrapnel fixedly connected with the weighting piece, the casing outside is equipped with first power input end, first power input end forms the circular telegram circuit with second coil and first coil electric series connection.

Description

Galfenol alloy driven double-inertia impact type precise stepping micro linear motor

Technical Field

The utility model belongs to the technical field of the Galfenol alloy application apparatus, concretely relates to Galfenol alloy driven two inertia impulse type precision stepping micro linear motor.

Background

The principle of obtaining the motion form by using the inertia impact quantity (force or moment) is called as the inertia impact principle, and the mechanism for realizing the motion form becomes an inertia driving mechanism.

In the early 90 s of the last century, japanese scholars t.higuchi et al proposed the design of realizing a precision motor by an inertial impact principle, opened the introduction to the research of inertial impact motors, and since the 21 st century, inertial impact motors have become a research focus at home and abroad, have the advantages of high precision, high efficiency, simple structure, high displacement resolution, and the like, and have wide applications in the fields of electronic products (digital cameras, mobile phones, and the like), micro precision positioning (microscope consoles), micro robots, and the like.

The existing inertia impact type motor is generally driven by PZT (piezoelectric ceramics), that is, the inverse piezoelectric effect of piezoelectric ceramic crystals is utilized to convert electric energy into mechanical energy. Although the piezoelectric actuator has the advantages of large stroke, high displacement resolution and the like, the piezoelectric actuator is very difficult to process because the piezoelectric actuator is a brittle material, and secondly, the piezoelectric actuator is generally in a thin sheet type to improve the performance, and the structure cannot bear the action of stretching and bending force. PZT also has the problems of high voltage drive, easy breakdown of electrodes and the like, so that the existing piezoelectric type inertia impact motor has the problems of weak load capacity, poor reliability and the like.

Because the application of the motor is greatly limited due to the reasons, a new driving mode is needed to be found to replace piezoelectric driving so as to improve the overall performance of the micro motor, when the size of a magnetic field of the magnetostrictive material is changed, the magnetostrictive material is correspondingly changed in length, and the Galfenol material is a novel magnetostrictive functional material, has large strain, high precision, large output force, quick response, excellent mechanical performance and difficult brittle fracture, and is an ideal material for constructing a precision driver.

SUMMERY OF THE UTILITY MODEL

The utility model aims at: the double inertia impact type precise stepping micro linear motor driven by the Galfenol alloy is provided, and the defects of the existing inertia impact type motor pointed out in the background art in the practical application are overcome.

In order to realize the technical purpose, the utility model discloses a technical scheme as follows:

a Galfenol alloy driven double-inertia impact type precise stepping micro linear motor comprises a shell, wherein an output end and an input end are respectively arranged at two ends of the shell, Galfenol alloy rods are symmetrically installed at the input end of the shell, a first coil connected in series is wound on the two Galfenol alloy rods, the two Galfenol alloy rods are fixedly connected with a connecting plate together, guide rods are symmetrically arranged at the left side and the right side of the connecting plate, a driving block is arranged between the two guide rods, arc-shaped grooves matched with the circumferential side surfaces of the guide rods are respectively arranged at the left side and the right side of the middle part of the driving block, driving rods extending towards the output end of the shell are arranged at the upper side and the lower side of the driving block, the two driving rods penetrate through the output end of the shell and are connected with the shell in a sliding manner, cantilever metal elastic pieces are respectively arranged at the left end and the right end of the upper, two the winding of cantilever metal shrapnel has the second coil of establishing ties mutually, the second coil establishes ties mutually with first coil, two the equal fixedly connected with weight of cantilever metal shrapnel, the casing outside is equipped with first power input end, first power input end forms the circular telegram return circuit with second coil and first coil electrical property series connection.

Further inject, the guide bar is the electromagnetism guide bar, the casing outside still is equipped with second power input end, second power input end respectively with two guide bar electric connection, the drive block adopts light non-magnetic material to make, two arc groove department parcels of drive block have the iron sheet. The structure can enable the two guide rods to have magnetism and lose magnetism by controlling the on-off of the current of the second power input end, when the driving block is driven to a required position, the second power input end inputs the current, the two guide rods have magnetism, and the iron sheet of the driving block is magnetically adsorbed, so that the driving block can be stably fixed at any position of the guide rods, when the position needs to be adjusted again, the second power input end cuts off the current, the two guide rods lose magnetism, and the driving block can move relative to the two guide rods.

Further limiting, the iron sheet and the two arc-shaped grooves of the driving block are bonded and fixed by hot melt adhesive. By the structure, the iron sheet and the driving block are stably connected, and the processing is convenient.

Further limiting, the Galfenol driving sheet and the cantilever metal elastic sheet are fixedly bonded by hot melt adhesive. By adopting the structure, the connection between the Galfenol driving piece and the cantilever metal elastic piece is stable, and the machining is convenient.

Further limiting, the end part of the guide rod is bonded with a plastic limit stop. With such a structure, the movement of the driving block can be limited, and the driving block can be prevented from slipping off the guide rod.

Further inject, the inside still symmetry of casing is equipped with the direction slide rail, the connecting plate symmetry is equipped with and leads the slider of direction slide rail assorted. By means of the structure, when the connection plate is driven to move by the magnetic elongation of the Galfenol alloy rod after the first coil is electrified, the connection plate can move more stably.

By adopting the technical scheme of the utility model, the first coil and the second coil are connected in series, when the first power input end is connected with the power supply, the currents in the first coil and the second coil are the same, which is convenient for controlling the current; when the first power input end is connected with a power supply, the first coil is electrified to generate a magnetic field along the axial direction of the first coil, so that the Galfenol alloy rod of the shell extends along the direction of the magnetic field under the action of the magnetic field, the second coil is electrified to generate a magnetic field along the axial direction of the second coil, the Galfenol driving sheet facing one side of the input end of the shell extends along the direction of the magnetic field under the action of the magnetic field, and the cantilever metal elastic sheet is bent towards the output end;

when the drive block drives the drive rod to extend out of the shell, the specific working principle is as follows:

referring to fig. 6, when the first power input terminal is powered off, the initial state of each original inside the casing is shown as state a, the driving block leans against one side of the connecting plate, and the cantilever metal elastic sheet is in a flat state;

when the first power input end is connected with a power supply and current shown in fig. 5 is introduced, in a time interval of 0-1, the current is slowly increased from 0, the Galfenol alloy rod can slowly extend towards the output end of the shell under the action of magnetostriction, the guide rod is driven to synchronously extend, and meanwhile, the Galfenol driving piece extends along the direction of a magnetic field under the action of magnetostriction, so that the cantilever metal elastic piece drives the weighting block to slowly bend towards the output end; in the whole process, the input current of the first power input end is slowly increased, so that the inertia impact force of the driving block is small and is smaller than the friction force between the guide rod and the arc-shaped groove, and the driving block is relatively static with the guide rod in the process, namely the driving block and the guide rod integrally move towards the output end of the shell, and the driving rod extends out of the shell as shown in a state B; in the time interval 1-2, the current is rapidly reduced to 0, at the moment, the Galfenol alloy rod drives the connecting plate and the guide rod to rapidly retract, and meanwhile, the Galfenol driving piece can rapidly retract to enable the cantilever metal elastic piece to rapidly rebound from a bending state, so that the weighting block rapidly swings towards the input end, the driving block is subjected to the inertial impact force of the cantilever metal elastic piece towards the output end direction of the shell, and the current is rapidly reduced, so that the inertial impact force borne by the driving block is extremely larger than the friction force between the guide rod and the arc-shaped groove, the driving block is further moved towards the output end direction of the shell, and the driving rod is further extended out of the shell as shown in a state C; at the end of a stepping period, the driving rod extends out of the shell under the driving of the driving block, and the current shown in fig. 5 is applied in a reciprocating manner, so that the driving rod can continuously extend out of the shell to reach the required extending length;

when the drive block drives the drive rod to withdraw the shell, the specific working principle is as follows:

referring to fig. 8, when the first power input terminal is powered off, the initial state of each original inside the casing is shown as state D, the driving block is far away from the connecting plate, and the cantilever metal elastic sheet is in a flat state;

when the first power input end is connected with a power supply and current shown in fig. 7 is introduced, the current is rapidly increased from 0 in a time interval 0 '-1', the Galfenol alloy rod can rapidly extend towards the output end of the shell under the action of magnetostriction, the guide rod is driven to synchronously extend, and meanwhile, the Galfenol driving piece extends along the direction of a magnetic field under the action of magnetostriction, so that the cantilever metal elastic piece drives the weighting block to rapidly bend towards the output end; in the whole process, the input current of the first power input end is rapidly increased, so that the inertial impact force of the driving block on one side of the input end is extremely large and is larger than the friction force between the guide rod and the arc-shaped groove, the driving block moves towards the input end of the shell relative to the guide rod, and the driving rod is retracted into the shell as shown in a state E; in the time interval 1 '-2', the current is slowly reduced to 0, at the moment, the Galfenol alloy rod drives the connecting plate and the guide rod to slowly retract, meanwhile, the Galfenol driving piece will retract slowly, so that the cantilever metal elastic piece will rebound slowly from the bending state, so that the weight block slowly swings towards the input end, the inertia impact force of the driving block towards one side of the input end is smaller than the friction force between the guide rod and the arc-shaped groove, and the driving block is relatively static with the guide rod in the process, i.e., the driving block and the guide rod move integrally toward the input end of the housing as shown in state F, so that the driving rod continues to retract into the housing, at which point a step cycle is completed, the driving rod retracts into the housing under the driving of the driving block, so that the current as shown in fig. 7 is applied reciprocally, the driving rod can be continuously retracted into the shell to reach the required retraction length or be completely retracted;

compared with the prior art, the utility model has the following advantages:

1. galfenol alloy is used as a driving source, and a novel precise stepping micro linear motor is constructed by utilizing a double-inertia impact principle. The Young modulus of the Galfenol alloy exceeds 60Gpa, the magnetic conductivity can reach 60-100, the Galfenol alloy can be subjected to mechanical processing such as hot rolling, welding and the like, and can bear external loads such as permanent tensile force, bending moment, torque, impact and the like;

2. the utility model discloses a still have following advantage when the driving source drives: the mechanical performance is good, and the driver can be processed into various shapes and can also be miniaturized; pre-pressure is not needed, the structure is simple, and the assembly is easy; low voltage drive, sometimes even only a few volts; the size is very small, and the dynamic eddy current loss is low; the low temperature effect is good, and the working temperature range is large.

Drawings

The present invention can be further illustrated by the non-limiting examples given in the accompanying drawings;

fig. 1 is a schematic structural diagram of an embodiment of a double-inertia impact type precision stepping micro linear motor driven by Galfenol alloy of the present invention;

fig. 2 is a schematic diagram of an internal structure of an embodiment of a double-inertia impact type precision stepping micro linear motor driven by Galfenol alloy according to the present invention;

fig. 3 is a schematic diagram of an internal structure of an embodiment of a double-inertia impact type precision stepping micro linear motor driven by Galfenol alloy according to the present invention;

fig. 4 is a schematic structural diagram of a driving block of an embodiment of a double-inertia impact type precision stepping micro linear motor driven by Galfenol alloy according to the present invention;

fig. 5 is a schematic view showing the output current of an embodiment of a double-inertia impact type precision stepping micro linear motor driven by Galfenol alloy according to the present invention;

fig. 6 is a schematic diagram showing the state of the driving rod extending out of the casing according to the embodiment of the double-inertia impact type precision stepping micro linear motor driven by Galfenol alloy of the present invention;

fig. 7 is a schematic diagram of an output current of an embodiment of a double-inertia impact type precision stepping micro linear motor driven by Galfenol alloy according to the present invention;

fig. 8 is a schematic view of the state of the driving rod retracting casing of the embodiment of the double inertia impact type precision stepping micro linear motor driven by Galfenol alloy of the present invention;

the main element symbols are as follows:

the device comprises a shell 1, a Galfenol alloy rod 11, a first coil 111, a connecting plate 12, a guide rod 121, a plastic limit stop 122, a guide sliding block 123, a driving block 13, an arc-shaped groove 131, a driving rod 132, an iron sheet 133, a cantilever metal elastic sheet 14, a Galfenol driving sheet 141, a second coil 142, a weight 143, a first power input end 15, a second power input end 16 and a guide sliding rail 17.

Detailed Description

In order to make the present invention better understood by those skilled in the art, the technical solutions of the present invention are further described below with reference to the accompanying drawings and examples.

As shown in fig. 1-4, the utility model relates to a Galfenol alloy driven double inertia impact type precision stepping micro linear motor, which comprises a casing 1, wherein the casing 1 has an output end and an input end at two ends, Galfenol alloy rods 11 are symmetrically installed at the input end of the casing 1, a first coil 111 connected in series is wound on the two Galfenol alloy rods 11, the two Galfenol alloy rods 11 are jointly and fixedly connected with a connecting plate 12, guide rods 121 are symmetrically arranged at the left and right sides of the connecting plate 12, a driving block 13 is arranged between the two guide rods 121, arc grooves 131 matched with the circumferential side of the guide rods 121 are arranged at the left and right sides of the middle part of the driving block 13, driving rods 132 extending to the output end of the casing 1 are arranged at the upper and lower sides of the driving block 13, the two driving rods 132 both penetrate through the output end of the casing 1 and are slidably connected with the casing 1, cantilever metal shrapnels 14 are respectively arranged at the left and right ends of the upper side of the driving block 13, the two cantilever metal elastic pieces 14 are wound with the second coil 142 connected in series, the second coil 142 is connected in series with the first coil 111, the weight 143 is fixedly connected to each of the two cantilever metal elastic pieces 14, the first power input end 15 is arranged on the outer side of the shell 1, and the first power input end 15 is electrically connected in series with the second coil 142 and the first coil 111 to form a power-on loop.

Specifically, the guide rod 121 is an electromagnetic guide rod, the second power input end 16 is further arranged on the outer side of the shell 1, the second power input end 16 is electrically connected with the two guide rods 121 respectively, the driving block 13 is made of a light non-magnetic material, and iron sheets 133 are wrapped at two arc-shaped grooves 131 of the driving block 13. With such a configuration, the two guide rods 121 can have magnetism and lose magnetism by controlling the on/off of the current of the second power input terminal 16, when the driving block 13 is driven to a desired position, the second power input terminal 16 inputs the current, the two guide rods 121 have magnetism, and the iron sheet 133 of the driving block 13 is magnetically attracted, so that the driving block 13 can be stably fixed to any position of the guide rods 121, and when the position needs to be adjusted again, the second power input terminal 16 cuts off the current, the two guide rods 121 lose magnetism, so that the driving block 13 can move relative to the two guide rods 121. In fact, other configurations may be used as appropriate, and the driving block 13 can be stably fixed to any position of the guide rod 121.

Specifically, the iron sheet 133 and the two arc-shaped grooves 131 of the driving block 13 are fixed by hot melt adhesive. With the structure, the iron sheet 133 and the driving block 13 are firmly connected, and the processing is convenient. In fact, other structures can be considered according to the situation, so that the connection between the iron sheet 133 and the driving block 13 is stable, and the processing is convenient.

Specifically, the Galfenol driving plate 141 and the cantilever metal elastic sheet 14 are fixed by hot melt adhesive. With the structure, the connection between the Galfenol driving piece 141 and the cantilever metal elastic piece 14 is stable, and the processing is convenient. In fact, other structures can be considered according to the situation, so that the connection between the Galfenol driving piece 141 and the cantilever metal elastic piece 14 is stable, and the processing is convenient.

Specifically, a plastic limit stopper 122 is bonded to the end of the guide rod 121. With this configuration, the movement of the driving block 13 can be restricted, and the driving block 13 can be prevented from slipping off the guide bar 121. Actually, other configurations may be used as appropriate, and the movement of the driving block 13 may be restricted to prevent the driving block 13 from slipping off the guide bar 121.

Specifically, the inside of the housing 1 is further symmetrically provided with guide slide rails 17, and the connecting plate 12 is symmetrically provided with guide slide blocks 123 matched with the guide slide rails 17. With the structure, when the connection plate 12 is driven to move by the magnetic elongation of the Galfenol alloy rod 11 after the first coil 111 is electrified, the connection plate 12 is enabled to move more stably. In fact, other configurations are also contemplated as appropriate to enable the web 12 to move more stably.

By adopting the technical scheme of the utility model, the first coil 111 and the second coil 142 are connected in series, when the first power input end 15 is connected with a power supply, the currents in the first coil 111 and the second coil 142 are the same, which is convenient for controlling the current; when the first power input end 15 is powered on, the first coil 111 is electrified to generate a magnetic field along the axial direction of the first coil 111, so that the Galfenol alloy rod 11 of the shell 1 is extended along the direction of the magnetic field under the action of the magnetic field, the second coil 142 is electrified to generate a magnetic field along the axial direction of the second coil 142, the Galfenol driving sheet 141 facing one side of the input end of the shell 1 is extended along the direction of the magnetic field under the action of the magnetic field, and the cantilever metal elastic sheet 14 is bent towards the output end;

when the driving block 13 drives the driving rod 132 to extend out of the housing 1, the specific working principle is as follows:

referring to fig. 6, when the first power input terminal 15 is powered off, the initial state of each original inside the casing 1 is shown as state a, the driving block 13 leans against one side of the connecting plate 12, and the cantilever metal elastic sheet 14 is in a flat state;

when the first power input end 15 is powered on and current shown in fig. 5 is supplied, in a time interval 0-1, the current is slowly increased from 0, the Galfenol alloy rod 11 is slowly extended towards the output end of the shell 1 under the action of magnetostriction, the guide rod 121 is driven to be synchronously extended, and meanwhile, the Galfenol driving sheet 141 is extended along the direction of a magnetic field under the action of magnetostriction, so that the cantilever metal elastic sheet 14 drives the weighting block 143 to be slowly bent towards the output end; since the input current of the first power input terminal 15 gradually increases in the whole process, the inertial impact force of the driving block 13 is smaller than the friction force between the guide rod 121 and the arc-shaped groove 131, so that the driving block 13 is relatively stationary with respect to the guide rod 121 in the process, i.e. the driving block 13 and the guide rod 121 integrally move toward the output end of the housing 1, as shown in state B, so that the driving rod 132 extends out of the housing 1; in the time interval 1-2, the current is rapidly reduced to 0, at this time, the Galfenol alloy rod 11 drives the connecting plate 12 and the guide rod 121 to rapidly retract, and at the same time, the Galfenol driving plate 141 is rapidly retracted, so that the cantilever metal elastic sheet 14 is rapidly rebounded from the bent state, and the weighting block 143 is rapidly swung towards the input end, so that the driving block 13 is subjected to the inertial impact force of the cantilever metal elastic sheet 14 towards the output end of the housing 1, and because the current is rapidly reduced, the inertial impact force applied to the driving block 13 is extremely large and is greater than the friction force between the guide rod 121 and the arc-shaped groove 131, so that the driving block 13 continuously moves towards the output end of the housing 1, and as shown in the state C, the driving rod 132 continuously extends out of the housing 1; at the end of a step cycle, the driving rod 132 is driven by the driving block 13 to extend out of the housing 1, and the current shown in fig. 5 is applied in a reciprocating manner, so that the driving rod 132 can be continuously extended out of the housing 1 to reach the required extension length;

when the driving block 13 drives the driving rod 132 to retract the housing 1, the specific working principle is as follows:

referring to fig. 8, when the first power input terminal 15 is powered off, the initial state of each original inside the casing 1 is shown as state D, the driving block 13 is far away from the connecting plate 12, and the cantilever metal elastic sheet 14 is in a flat state;

when the first power input end 15 is powered on and current shown in fig. 7 is supplied, in a time interval 0 '-1', the current is rapidly increased from 0, the Galfenol alloy rod 11 rapidly extends towards the output end of the shell 1 under the action of magnetostriction, the guide rod 121 is driven to synchronously extend, and meanwhile, the Galfenol driving plate 141 extends along the direction of a magnetic field under the action of magnetostriction, so that the cantilever metal elastic sheet 14 drives the weighting block 143 to rapidly bend towards the output end; since the input current of the first power input terminal 15 is rapidly increased in the whole process, the driving block 13 receives an inertial impact force toward the input terminal side which is extremely larger than the frictional force between the guide rod 121 and the arc-shaped groove 131, so that the driving block 13 is moved toward the input terminal of the housing 1 with respect to the guide rod 121, and the driving rod 132 is retracted into the housing 1 as shown in state E; in the period 1 '-2', the current is slowly reduced to 0, at this time, the Galfenol alloy rod 11 drives the connecting plate 12 and the guide rod 121 to slowly retract, and at the same time, the Galfenol driving plate 141 is slowly retracted, so that the cantilever metal elastic sheet 14 is slowly rebounded from the bending state, and the weight 143 is slowly swung towards the input end, so that the driving block 13 is subjected to a smaller inertial impact force towards the input end side and is smaller than the friction force between the guide rod 121 and the arc-shaped groove 131, so that the driving block 13 is stationary relative to the guide rod 121 in the process, that is, the driving block 13 and the guide rod 121 integrally move towards the input end of the housing 1, as shown in the state F, so that the driving rod 132 continues to retract the housing 1, at the end of a step cycle, the driving rod 132 retracts into the housing 1 under the driving of the driving block 13, and the current shown in fig. 7 is repeatedly applied, so that the driving rod 132 continuously retracts, the required retraction length is achieved or the retraction is completed;

the above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims (6)

1. The utility model provides a miniature linear electric motor of Galfenol alloy driven double inertia impact type precision stepping, includes casing (1), casing (1) both ends are output and input respectively, its characterized in that: galfenol alloy rods (11) are symmetrically installed at the input end of the shell (1), two Galfenol alloy rods (11) are wound with first coils (111) which are connected in series, the two Galfenol alloy rods (11) are fixedly connected with a connecting plate (12) together, guide rods (121) are symmetrically arranged on the left side and the right side of the connecting plate (12), a driving block (13) is arranged between the two guide rods (121), arc-shaped grooves (131) matched with the circumferential side surfaces of the guide rods (121) are formed in the left side and the right side of the middle of the driving block (13), driving rods (132) extending to the output end of the shell (1) are arranged on the upper side and the lower side of the driving block (13), the two driving rods (132) penetrate through the output end of the shell (1) and are connected with the shell (1) in a sliding manner, cantilever metal elastic pieces (14) are respectively arranged at the left end and the right end of the upper side of the driving block (13), and two cantilever metal elastic pieces (14) facing to, two cantilever metal shrapnel (14) twine has second coil (142) of establishing ties mutually, second coil (142) and first coil (111) are established ties mutually, two equal fixedly connected with weight (143) of cantilever metal shrapnel (14), the casing (1) outside is equipped with first power input end (15), first power input end (15) and second coil (142) and first coil (111) electric property series connection form circular telegram return circuit.

2. The Galfenol alloy driven double inertia impact type precision stepping micro linear motor according to claim 1, wherein: the utility model discloses a drive mechanism, including casing (1), guide bar (121), second power input end (16) and two guide bar (121), the guide bar (121) are the electromagnetism guide bar, the casing (1) outside still is equipped with second power input end (16), second power input end (16) respectively with two guide bar (121) electric connection, drive block (13) adopt light non-magnetic material to make, two arc recess (131) the parcel of drive block (13) have iron sheet (133).

3. The Galfenol alloy driven double inertia impact type precision stepping micro linear motor according to claim 2, wherein: the iron sheet (133) and the two arc-shaped grooves (131) of the driving block (13) are adhered and fixed by hot melt adhesive.

4. The Galfenol alloy driven double inertia impact type precision stepping micro linear motor according to claim 1, wherein: the Galfenol driving sheet (141) and the cantilever metal elastic sheet (14) are fixedly bonded by hot melt adhesive.

5. The Galfenol alloy driven double inertia impact type precision stepping micro linear motor according to claim 1, wherein: and a plastic limit stop (122) is bonded at the end part of the guide rod (121).

6. The Galfenol alloy driven double inertia impact type precision stepping micro linear motor according to claim 1, wherein: the shell (1) is further symmetrically provided with guide sliding rails (17), and the connecting plate (12) is symmetrically provided with guide sliding blocks (123) matched with the guide sliding rails (17).

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