CN203910685U - Micro mechanical RF switch - Google Patents
Micro mechanical RF switch Download PDFInfo
- Publication number
- CN203910685U CN203910685U CN201420150122.4U CN201420150122U CN203910685U CN 203910685 U CN203910685 U CN 203910685U CN 201420150122 U CN201420150122 U CN 201420150122U CN 203910685 U CN203910685 U CN 203910685U
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- CN
- China
- Prior art keywords
- contact
- switch
- spring
- polar plate
- holding wire
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
A micro mechanical RF switch is characterized by comprising a capacitor, a spring, an insulation piece, a contact, and a RF signal line; the capacitor comprises a movable electrode plate and a fixed electrode plate; one end of the spring is connected with a fixed point, and the other end is connected with the movable electrode plate; the contact is positioned below the movable electrode plate; the contact and the movable electrode plate are isolated through the insulation piece; the fixed electrode plate is positioned between the movable electrode plate and the contact; the RF signal line is arranged below the contact. The micro mechanical RF switch employs static driving, and uses electrostatic attraction of the capacitor and elastic force of the metal spring to realize on/off of the switch; the micro mechanical RF switch is fast and low in power consumption, thus further improving switch rate.
Description
Technical field
The design relates to a kind of micromechanics RF switch, belongs to radio frequency electric technical field.
Background technology
The common driving method of micromechanics RF switch has static driving, Piezoelectric Driving, Electromagnetic Drive and heat driving etc.Static drives the electrostatic force utilizing between electrified body to realize, and is the simplest and the most normal in mems switch
With type of drive, there is extremely low power consumption.Quiet electrically driven (operated) contact mems switch mainly comprises two kinds of structures of vertical and horizontal.Longitudinally contact refers to that switch motion direction is perpendicular to substrate plane, and lateral contact refers to that switch motion direction is parallel to substrate plane.Transversary is that capacitor plate area is little, although deattenuation is difficult for obtaining large actuating force, switching speed is not high, need to carry out design optimization.
Summary of the invention
For the deficiencies in the prior art, the design's object is to provide a kind of micromechanics RF switch, adopts quiet electrically driven (operated) horizontal construction of switch herein, utilizes the elastic force of electrostatic attraction and the metal spring of capacity plate antenna, realizes the break-make of switch.
For achieving the above object, the design realizes by following technological means:
A micromechanics RF switch, is characterized in that: comprise electric capacity, spring, collets, contact, RF holding wire, wherein electric capacity consists of movable polar plate and fixed polar plate; Described spring one end is connected with fixing point, one end is connected with movable polar plate, and described contact is positioned at movable polar plate below, between contact and movable polar plate, by collets, isolates, described fixed polar plate is between movable polar plate and contact, and described contact below is provided with RF holding wire.
Preferably, described a kind of micromechanics RF switch, is characterized in that: opening under the electrostatic force of described spring at described electric capacity, can produce elongation, make described contact generation translation, contact contacts with RF holding wire, realizes the connection of RF holding wire.
Preferably, described a kind of micromechanics RF switch, is characterized in that: described spring can produce contraction under the effect of spring restoring force, makes contact separated with RF holding wire.
Preferably, described a kind of micromechanics RF switch, is characterized in that: described electric capacity, spring, contact, RF holding wire metal are partly Au, described collets SU8 photoresist.
The invention has the beneficial effects as follows: the design adopts quiet electrically driven (operated) construction of switch, utilize the elastic force of electrostatic attraction and the metal spring of electric capacity, realize the break-make of switch.There is quick, low-power consumption, further improve switching rate.
Accompanying drawing explanation
Fig. 1 is that the design forms structural representation.
The implication of drawing reference numeral is as follows: 1 fixing point, 2 springs, 3 collets, 4 contacts, 5RF holding wire, 6-1 fixed polar plate, 6-2 movable polar plate.
Embodiment
Below in conjunction with Figure of description, design is further described.
As shown in Figure 1, a kind of micromechanics RF switch, is characterized in that: comprise electric capacity 6, spring 2, collets 3, contact 4, RF holding wire 5, wherein electric capacity consists of movable polar plate 6-2 and fixed polar plate 6-1; Described spring 2 one end are connected with fixing point 1, one end is connected with movable polar plate 6-2, described contact 4 is positioned at movable polar plate 6-2 below, between contact 4 and movable polar plate 6-2, by collets 3, isolate, described fixed polar plate 6-1 is between movable polar plate 6-2 and contact 4, and described contact 4 belows are provided with RF holding wire 5.
When switch is closed, under the electrostatic force of capacity plate antenna 6, movable structure occurs laterally flat
Moving, contact 4 contacts with RF holding wire 5, has realized the connection of RF holding wire 5; When switch disconnects, under the effect of spring 2 restoring forces, contact 4 is separated with RF holding wire 5, has realized the shutoff of electric current.
Preferably, described a kind of micromechanics RF switch, is characterized in that: opening described spring 2 under the electrostatic force of described electric capacity 6, can produce elongation, make described contact 4 that translation occur, contact 4 contacts with RF holding wire 5, realizes the connection of RF holding wire 5.
Preferably, described a kind of micromechanics RF switch, is characterized in that: described spring 2 can produce contraction under the effect of spring restoring force, makes contact 4 separated with RF holding wire 5.
Preferably, described a kind of micromechanics RF switch, is characterized in that: described electric capacity 6, spring 2, contact 4, RF holding wire 5 metals are partly Au, and described collets 3 are used SU8 photoresist.
SU8 photoresist has good mechanical strength and insulation characterisitic.
More than show and described the design's basic principle, principal character and advantage.The technical staff of the industry should understand; the design is not restricted to the described embodiments; the principle that the design is just described of describing in above-described embodiment and specification; do not departing under the prerequisite of the design's spirit and scope; the design also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the design.The claimed scope of the design is defined by appending claims and equivalent thereof.
Claims (4)
1. a micromechanics RF switch, is characterized in that: comprise electric capacity, spring, collets, contact, RF holding wire, wherein electric capacity consists of movable polar plate and fixed polar plate; Described spring one end is connected with fixing point, one end is connected with movable polar plate, and described contact is positioned at movable polar plate below, between contact and movable polar plate, by collets, isolates, described fixed polar plate is between movable polar plate and contact, and described contact below is provided with RF holding wire.
2. a kind of micromechanics RF switch as claimed in claim 1, is characterized in that: opening under the electrostatic force of described spring at described electric capacity, can produce elongation, make described contact generation translation, contact contacts with RF holding wire, realizes the connection of RF holding wire.
3. a kind of micromechanics RF switch as claimed in claim 1, is characterized in that: described spring can produce contraction under the effect of spring restoring force, makes contact separated with RF holding wire.
4. a kind of micromechanics RF switch as claimed in claim 1, is characterized in that: described electric capacity, spring, contact, RF holding wire metal are partly Au, described collets SU8 photoresist.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420150122.4U CN203910685U (en) | 2014-03-31 | 2014-03-31 | Micro mechanical RF switch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420150122.4U CN203910685U (en) | 2014-03-31 | 2014-03-31 | Micro mechanical RF switch |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203910685U true CN203910685U (en) | 2014-10-29 |
Family
ID=51784940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420150122.4U Expired - Fee Related CN203910685U (en) | 2014-03-31 | 2014-03-31 | Micro mechanical RF switch |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203910685U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103956299A (en) * | 2014-03-31 | 2014-07-30 | 苏州锟恩电子科技有限公司 | Micromechanical RF switch |
-
2014
- 2014-03-31 CN CN201420150122.4U patent/CN203910685U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103956299A (en) * | 2014-03-31 | 2014-07-30 | 苏州锟恩电子科技有限公司 | Micromechanical RF switch |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141029 Termination date: 20150331 |
|
| EXPY | Termination of patent right or utility model |