CN108809144B - One kind being based on micro- beam vibration electrostatic drive micro motor device - Google Patents
One kind being based on micro- beam vibration electrostatic drive micro motor device Download PDFInfo
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- CN108809144B CN108809144B CN201810749187.3A CN201810749187A CN108809144B CN 108809144 B CN108809144 B CN 108809144B CN 201810749187 A CN201810749187 A CN 201810749187A CN 108809144 B CN108809144 B CN 108809144B
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- 239000003990 capacitor Substances 0.000 claims description 31
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 8
- 238000013461 design Methods 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 240000002853 Nelumbo nucifera Species 0.000 claims description 3
- 235000006508 Nelumbo nucifera Nutrition 0.000 claims description 3
- 235000006510 Nelumbo pentapetala Nutrition 0.000 claims description 3
- 230000009471 action Effects 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000013016 damping Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 3
- 230000005294 ferromagnetic effect Effects 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 238000011160 research Methods 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 230000009427 motor defect Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
- H02N2/046—Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
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Abstract
The present invention proposes a kind of electrostatic drive micro motor device based on micro- beam vibration, You Weiliang electrostatic drive system, power output system and motor starting halt system three parts composition.Electrostatic drive is made of fixing end, power switch, DC power supply, top crown, top crown contact spring, top electrode, Wei Liang, lower electrode, bottom crown contact spring and bottom crown；Power output system is made of mass block, mass block hinge, flying wheel hinge, connecting rod, connecting rod link and flying wheel；By electromagnet, mass block and micro- Liang Zucheng, electromagnet is located at immediately below mass block motor starting system；Electrostatic motor is repeated cyclically movement, and driving flying wheel rotation, using micro- Liang Sicheng enlarge-effect is vibrated, beam right end mass block generates vibration displacement, can convert micro- beam vibration to the rotation of driving flying wheel.
Description
Technical field
It proposes a kind of electrostatic drive micro motor device, is based particularly on the electrostatic drive micro motor device of micro- beam vibration, belong to
In micromechanics field of motors.
Background technique
With the rapid development of the new and high technologies such as MEMS, it is desired to which microcomputer electric drive motor has small in size, weight
Gently, the performances such as low speed, high-precision.Traditional electromagnetic machine is extremely difficult to its demand for development in some aspects, promotes people's exploitation new
The micro motor of principle, new construction.The rise of MEMS causes the upsurge of people's exploitation micro motor, the micro- horse of electrostatic drive
The gravitation and repulsion that Dary is generated with distribution of charges between two pole plates, convert electrical current into mechanical energy.China is micro- to electrostatic drive
Motor has done a large amount of research work, but the research in the field is still in the primary stage, and to electrostatic drive micro-motor structure, adds
The research of work technique need further deeply.Foreign scholar has done a large amount of research work in terms of electrostatic drive micro motor,
Electrostatic drive micro motor is mostly based on rotary-type motor and linear motor, and structure is complicated, affects its job stability, in addition,
The problems such as it is small that there is also output torques, and driving voltage is big, poor work stability and short service life.
Summary of the invention
For electrostatic drive micro motor defect of the existing technology, the present invention proposes a kind of electrostatic drive micro motor dress
It sets, You Weiliang electrostatic drive system, power output system and motor starting halt system composition.
Micro- beam electrostatic drive system by fixing end, power switch, DC power supply, top crown, top crown contact spring, power on
Pole, Wei Liang, lower electrode, bottom crown contact spring and bottom crown composition；Fixing end is connect with pedestal, and the left end Wei Liang and fixing end are solid
Fixed connection, right end are fixedly connected with mass block, and one layer of copper conductive film is electroplated in micro- beam upper and lower surfaces respectively, composition
Top electrode and lower electrode, film thickness are 50 microns, and width is wide with beam, and length is equal with top crown and bottom crown, top electrode
Conducting is connected by plain conductor with lower electrode；Top electrode and top crown form a plane-parallel capacitor, lower electrode and lower pole
Plate forms a plane-parallel capacitor, and two plane-parallel capacitor sizes are identical with distance between plates, is pair with micro- beam axis
Claim axial symmetry distribution, top crown and bottom crown are fixed with pedestal respectively；Top crown contact spring is fixed on top crown center, lower pole
Plate contact spring is fixed on bottom crown center, and top crown contact spring and bottom crown contact spring are made by wire；Power supply
It switchs left end and connects bottom crown, right end connects DC power supply, and DC power supply right end connects top crown.
Power output system is made of mass block, mass block hinge, flying wheel hinge, connecting rod, connecting rod link and flying wheel,
Connecting rod lower end is connect by mass block hinge with mass block, and upper end is connect by connecting rod link with flying wheel, and flying wheel core wheel is logical
Flying wheel hinge is crossed to connect with pedestal.
By electromagnet, mass block and micro- Liang Zucheng, electromagnet is located at immediately below mass block motor starting halt system.
The statement of the electrostatic drive micro motor course of work is as follows: carrying out power-on servicing to electromagnet, electromagnet is powered, electromagnet
Electromagnetic force is generated, ferromagnetic property gauge block is attracted to move downward, mass block drives micro- beam to generate bending deformation, designs micro- beam deformation pair
The small end answered reaches lower dead center, so that lower electrode is connected by bottom crown contact spring with bottom crown, is closed power switch,
The capacitor charging that DC power supply is formed to top crown and top electrode, top crown are positively charged, the negatively charged lotus of top electrode；To electromagnetism
Iron carries out power operation, electromagnet power-off, and electromagnet electromagnetic force disappears, and disappears to the electromagnetic attraction that mass block generates, micro- beam exists
It is moved upwards under electrostatic attraction effect between elastic force and plane-parallel capacitor, mass block pushes connecting rod to do plane motion, connecting rod
Flying wheel is pushed to do fixed-axis rotation.
Micro- beam moves upwards, and crosses equilbrium position, and the top crown contact spring of top crown contacts conducting, upper pole with top electrode
With electrode capacitor is powered on charge neutrality occurs for plate, and after charge neutrality, DC power supply is then filled to bottom crown and lower electrode capacitor
Electricity, small end continue up, and speed is zero when reaching top dead centre, and connecting rod is in micro- beam elastic force, bottom crown and lower electrode
Between do plane motion downwards under electrostatic attraction effect, push flying wheel to do fixed-axis rotation.
Micro- beam is crossed equilbrium position and is moved downward, the bottom crown contact spring of bottom crown and lower electrode conduction, bottom crown and
Charge neutrality occurs for lower electrode capacitor, and after charge neutrality, DC power supply then to top crown and powers on electrode capacitor charging, this
When, small end reaches lower dead center, and connecting rod does plane under the effect of micro- beam elastic force, top crown and top electrode electrostatic attraction upwards
Movement pushes flying wheel to do fixed-axis rotation.
Electrostatic drive micro motor is repeated cyclically movement, driving flying wheel rotation.Disconnect DC power supply switch, parallel-plate
Capacitor charging terminates, and electrostatic drive micro motor motion amplitude under itself damping action gradually reduces, and until static, electrostatic is driven
Dynamic micro motor stops.
The invention has the following advantages over the prior art:
1. beam right end mass block generates vibration displacement using micro- Liang Sicheng enlarge-effect is vibrated, micro- vibration of beam can be turned
Turn to the rotational motion of driving flying wheel.
2. providing a kind of conversion of motion device for moving in parallel and being converted into fixed-axis rotation, it converts electrostatic energy in the machine of micro- beam
Tool energy, then change the mechanical energy for turning to flying wheel.
3. the design of pole plate contact spring, which can reduce driving mechanism, which vibrates motion structure, influences, electrostatic drive micro motor is improved
The stability of movement, Elastic Contact design the charge and discharge that can effectively carry out plane-parallel capacitor.
Detailed description of the invention
Electrostatic drive micro motor device figure of the Fig. 1 based on micro- beam vibration；
In figure, 1. fixing end, 2. power switch, 3. DC power supply, 4. top crown, 5. top crown contact spring 6. is powered on
Lower 9. bottom crown contact spring of electrode, 10. bottom crown, 11. electromagnet, 12. mass block, the 13. mass block hinge of the micro- beam 8. in pole 7.
16. connecting rod link of chain 14. flying wheel hinge, 15. connecting rod, 17. flying wheel.
Specific embodiment
1 the present invention is further described with reference to the accompanying drawing.
The main structure of the present embodiment includes that micro- beam electrostatic drive system, power output system and motor starting stop system
System.
Micro- beam electrostatic drive system is by fixing end 1, power switch 2, DC power supply 3, top crown 4, top crown contact spring
5, top electrode 6, micro- beam 7, lower electrode 8, bottom crown contact spring 9 and bottom crown 10 form；Fixing end 1 is connect with pedestal, micro- beam 7
Left end is fixedly connected with fixing end 1, and right end is fixedly connected with mass block 12, and micro- 7 upper and lower surfaces of beam are electroplated one layer respectively
Copper conductive film forms top electrode 6 and lower electrode 8, and film thickness is 50 microns, and width is wide with beam, length and upper pole
Plate 4 and bottom crown 10 are equal, and top electrode 6 connects conducting by plain conductor with lower electrode 8；Top electrode 6 and top crown 4 form one
A plane-parallel capacitor, lower electrode 8 form a plane-parallel capacitor, two plane-parallel capacitor sizes and plate with bottom crown 10
Between distance it is identical, symmetrical as symmetry axis using micro- 7 axis of beam, top crown 4 and bottom crown 10 are fixed with pedestal respectively；On
Pole plate contact spring 5 is fixed on 4 center of top crown, and bottom crown contact spring 9 is fixed on 10 center of bottom crown, and top crown contacts bullet
Spring 5 and bottom crown contact spring 9 are made by wire；2 left end of power switch connects bottom crown 10, and right end connects DC power supply
3,3 right end of DC power supply connects top crown 4.
Power output system mass block 12, mass block hinge 13, flying wheel hinge 14, connecting rod 15, connecting rod link 16 and used
Property wheel 17 form, 15 lower end of connecting rod is connect by mass block hinge 13 with mass block 12, and upper end passes through connecting rod link 16 and inertia
17 connection of wheel, 17 core wheel of flying wheel are connect by flying wheel hinge 14 with pedestal.
Motor starting halt system is made of electromagnet 11, mass block 12 and micro- beam 7, and electromagnet 11 is being located at mass block 12 just
Lower section.
Power-on servicing is carried out to electromagnet 11, electromagnet 11 is powered, and electromagnet 11 generates electromagnetic force, attracts ferromagnetism quality
Block 12 moves downward, and mass block 12 drives micro- beam 7 to generate bending deformation, designs micro- beam 7 and deforms corresponding 15 upper end of connecting rod arrival
Lower dead center is closed power switch 2 so that lower electrode 8 is connected by bottom crown contact spring 9 and bottom crown 10, DC power supply 3 to
The capacitor charging that top crown 4 and top electrode 6 form, top crown 4 are positively charged, the negatively charged lotus of top electrode 6；To electromagnet 11 into
Row power operation, electromagnet 11 power off, and 11 electromagnetic force of electromagnet disappears, and disappear to the electromagnetic attraction that mass block 12 generates, micro- beam 7
It is moved upwards under electrostatic attraction effect between elastic force and plane-parallel capacitor, mass block 12 pushes connecting rod 15 to do plane fortune
Dynamic, connecting rod 15 pushes flying wheel 17 to do fixed-axis rotation.
Micro- beam 7 moves upwards, and crosses equilbrium position, and the top crown contact spring 5 of top crown 4 contacts conducting with top electrode 6,
Charge neutrality occurs for top crown 4 and 6 capacitor of top electrode, and after charge neutrality, DC power supply 3 then gives bottom crown 10 and lower electrode
The charging of 8 capacitors, 15 upper end of connecting rod continues up, and speed is zero when reaching top dead centre, connecting rod 15 micro- 7 elastic force of beam,
Plane motion is done downwards under electrostatic attraction effect between bottom crown 10 and lower electrode 8, and flying wheel 17 is pushed to do fixed-axis rotation.
Micro- beam 7 is crossed equilbrium position and is moved downward, and the bottom crown contact spring 9 of bottom crown and lower electrode 8 are connected, bottom crown
Charge neutrality occurs with lower 8 capacitor of electrode, after charge neutrality, DC power supply 3 then gives 6 capacitor of top crown 4 and top electrode
Charging, at this moment, 15 upper end of connecting rod reach lower dead center, and connecting rod 15 is made in micro- 7 elastic force of beam, top crown 4 and 6 electrostatic attraction of top electrode
Plane motion is done upwards with lower, and flying wheel 17 is pushed to do fixed-axis rotation.
Electrostatic drive micro motor is repeated cyclically movement, and driving flying wheel 17 rotates.DC power supply switch 2 is disconnected, is put down
Parallel plate capacitor charging terminates, and electrostatic drive micro motor motion amplitude under itself damping action gradually reduces, quiet until static
Electric drive micro motor stops.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the scope of the present invention.It is all
Within the spirit and principles in the present invention, made any modification, equivalent replacement and improvement be should be included in of the present invention
Within protection scope.
Claims (1)
1. a kind of electrostatic drive micro motor device includes that micro- beam electrostatic drive system, power output system and motor starting stop system
System；Micro- beam electrostatic drive system contacts bullet by fixing end (1), power switch (2), DC power supply (3), top crown (4), top crown
Spring (5), top electrode (6), micro- beam (7), lower electrode (8), bottom crown contact spring (9) and bottom crown (10) composition；Fixing end (1)
It is connect with pedestal, micro- beam (7) left end is fixedly connected with fixing end (1), and right end is fixedly connected with mass block (12), on micro- beam (7)
One layer of copper conductive film is electroplated in surface and lower surface respectively, forms top electrode (6) and lower electrode (8), film thickness 50
Micron, width is wide with beam, and length is equal with top crown (4) and bottom crown (10), and top electrode (6) and lower electrode (8) pass through gold
Belong to conducting wire connection conducting；Top electrode (6) and top crown (4) form a plane-parallel capacitor, lower electrode (8) and bottom crown (10)
A plane-parallel capacitor is formed, two plane-parallel capacitor sizes are identical with distance between plates, are pair with micro- beam (7) axis
Claim axial symmetry distribution, top crown (4) and bottom crown (10) are fixed with pedestal respectively；Top crown contact spring (5) is fixed on pole
Plate (4) center, bottom crown contact spring (9) are fixed on bottom crown (10) center, top crown contact spring (5) and bottom crown contact
Spring (9) is made by wire；Power switch (2) left end connects bottom crown (10), and right end connects DC power supply (3), direct current
Power supply (3) right end connects top crown (4)；Power output system is by mass block (12), mass block hinge (13), flying wheel hinge
(14), connecting rod (15), connecting rod link (16) and flying wheel (17) composition, connecting rod (15) lower end pass through mass block hinge (13) and matter
Gauge block (12) connection, upper end are connect by connecting rod link (16) with flying wheel (17), and flying wheel (17) core wheel is cut with scissors by flying wheel
Chain (14) is connect with pedestal；Motor starting halt system is made of electromagnet (11), mass block (12) He Weiliang (7), electromagnet
(11) it is located at immediately below mass block (12)；
The statement of the electrostatic drive micro motor course of work is as follows: carrying out power-on servicing to electromagnet (11), electromagnet (11) is powered, electricity
Magnet (11) generates electromagnetic force, and ferromagnetic property gauge block (12) is attracted to move downward, and mass block (12) drives micro- beam (7) to generate bending
Deformation designs micro- beam (7) and deforms corresponding connecting rod (15) upper end arrival lower dead center, so that lower electrode (8) passes through bottom crown and contacts
Spring (9) and bottom crown (10) are connected, and are closed power switch (2), and DC power supply (3) is formed to top crown (4) and top electrode (6)
Capacitor charging, top crown (4) is positively charged, top electrode (6) negatively charged lotus；Power operation, electricity are carried out to electromagnet (11)
Magnet (11) power-off, electromagnet (11) electromagnetic force disappear, and disappear to the electromagnetic attraction that mass block (12) generate, micro- beam (7) is in bullet
Property power and plane-parallel capacitor between electrostatic attraction effect under move upwards, mass block (12) push connecting rod (15) do plane fortune
Dynamic, connecting rod (15) pushes flying wheel (17) to do fixed-axis rotation；
Micro- beam (7) moves upwards, and crosses equilbrium position, and the top crown contact spring (5) of top crown (4) is contacted with top electrode (6)
Charge neutrality occurs for conducting, top crown (4) and top electrode (6) capacitor, and after charge neutrality, DC power supply (3) then gives lower pole
Plate (10) and the charging of lower electrode (8) capacitor, connecting rod (15) upper end continue up, and speed is zero when reaching top dead centre, even
Bar (15) does downwards plane motion under electrostatic attraction effect between Wei Liang (7) elastic force, bottom crown (10) and lower electrode (8), pushes away
Dynamic flying wheel (17) do fixed-axis rotation；
Micro- beam (7) is crossed equilbrium position and is moved downward, and the bottom crown contact spring (9) of bottom crown and lower electrode (8) are connected, lower pole
Charge neutrality occurs for plate and lower electrode (8) capacitor, and after charge neutrality, DC power supply (3) then gives top crown (4) and top electrode
(6) capacitor charges, and at this moment, connecting rod (15) upper end reaches lower dead center, connecting rod (15) Wei Liang (7) elastic force, top crown (4) with
Plane motion is done upwards under the effect of top electrode (6) electrostatic attraction, and flying wheel (17) is pushed to do fixed-axis rotation；
Electrostatic drive micro motor is repeated cyclically movement, driving flying wheel (17) rotation；It disconnects DC power supply switch (2), puts down
Parallel plate capacitor charging terminates, and electrostatic drive micro motor motion amplitude under itself damping action gradually reduces, quiet until static
Electric drive micro motor stops.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810749187.3A CN108809144B (en) | 2018-07-09 | 2018-07-09 | One kind being based on micro- beam vibration electrostatic drive micro motor device |
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| CN201810749187.3A CN108809144B (en) | 2018-07-09 | 2018-07-09 | One kind being based on micro- beam vibration electrostatic drive micro motor device |
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| CN108809144B true CN108809144B (en) | 2019-10-15 |
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| CN109787506A (en) * | 2019-02-28 | 2019-05-21 | 长安大学 | A kind of Piezoelectric Driving micro motor device and its working method based on cantilever beam vibration |
| CN110429827B (en) * | 2019-08-14 | 2021-05-25 | 山东理工大学 | Super harmonic resonance signal frequency doubling amplification frequency tuning device |
| CN112332697B (en) * | 2020-10-21 | 2022-01-28 | 长春工业大学 | Rotary cam piezoelectric power generation device |
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| EP2164163B1 (en) * | 2008-09-16 | 2017-06-21 | ETA SA Manufacture Horlogère Suisse | Electrostatic motor including an actuator |
| DE102008043836A1 (en) * | 2008-11-19 | 2010-05-20 | Robert Bosch Gmbh | Method of operating an electrostatic drive and electrostatic drives |
| US20110048133A1 (en) * | 2009-08-31 | 2011-03-03 | University Of Louisville Research Foundation, Inc. | Vibration element coupled with non-linear force to improve non-resonant frequency response |
| EP2680334A1 (en) * | 2012-06-28 | 2014-01-01 | Leica Geosystems AG | Piezo drive with piezo oscillator with a pivoting bearing |
| CN106972782B (en) * | 2017-04-22 | 2023-04-25 | 吉林大学 | Piezoelectric beam and capacitance combined bidirectional energy collector with bistable characteristic |
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