CN108809144A - One kind being based on micro- beam vibration electrostatic drive micro motor device - Google Patents
One kind being based on micro- beam vibration electrostatic drive micro motor device Download PDFInfo
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- CN108809144A CN108809144A CN201810749187.3A CN201810749187A CN108809144A CN 108809144 A CN108809144 A CN 108809144A CN 201810749187 A CN201810749187 A CN 201810749187A CN 108809144 A CN108809144 A CN 108809144A
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- 239000003990 capacitor Substances 0.000 claims description 29
- 230000000694 effects Effects 0.000 claims description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 9
- 238000013461 design Methods 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 240000002853 Nelumbo nucifera Species 0.000 claims description 3
- 235000006508 Nelumbo nucifera Nutrition 0.000 claims description 3
- 235000006510 Nelumbo pentapetala Nutrition 0.000 claims description 3
- 230000009471 action Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000013016 damping Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 3
- 230000005294 ferromagnetic effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 3
- 238000005452 bending Methods 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000009427 motor defect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
- H02N2/046—Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
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- Micromachines (AREA)
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Abstract
The present invention proposes a kind of electrostatic drive micro motor device based on micro- beam vibration, is made of micro- beam electrostatic drive system, power output system and motor starting halt system three parts.Electrostatic drive is made of fixing end, power switch, DC power supply, top crown, top crown contact spring, top electrode, Wei Liang, lower electrode, bottom crown contact spring and bottom crown；Power output system is made of mass block, mass block hinge, flying wheel hinge, connecting rod, connecting rod link and flying wheel；Motor starting system is made of electromagnet, mass block and micro- beam, and electromagnet is located at immediately below mass block；Electrostatic motor is repeated cyclically movement, and driving flying wheel rotation, using micro- Liang Sicheng enlarge-effect is vibrated, beam right end mass block generates vibration displacement, can convert micro- beam vibration to the rotation of driving flying wheel.
Description
Technical field
It proposes a kind of electrostatic drive micro motor device, is based particularly on the electrostatic drive micro motor device of micro- beam vibration, belong to
In micromechanics field of motors.
Background technology
With the rapid development of the new and high technologies such as MEMS, it is desired to which microcomputer electric drive motor has small, weight
Gently, the performances such as low speed, high-precision.Traditional electromagnetic machine is extremely difficult to its demand for development in some aspects, promotes people's exploitation new
The micro motor of principle, new construction.The rise of MEMS causes the upsurge of people's exploitation micro motor, electrostatic motor to utilize
The gravitation and repulsion that distribution of charges generates between two pole plates, convert electrical current into mechanical energy.Electrostatic motor is done largely in China
Research work, but the research in the field is scarcely out of swaddling-clothes, and need to the research of electrostatic motor structure, processing technology
Further deeply.Foreign scholar has done a large amount of research work in terms of electrostatic motor, electrostatic motor mostly with rotary-type motor and
It is complicated based on linear motor, its job stability is affected, in addition, that there is also output torques is small, driving voltage is big, work
The problems such as making stability difference and short service life.
Invention content
For electrostatic motor defect of the existing technology, the present invention proposes that a kind of electrostatic drive based on micro- beam vibration is micro-
Motor apparatus is made of micro- beam electrostatic drive system, power output system and motor starting halt system three parts.
Electrostatic drive by fixing end, power switch, DC power supply, top crown, top crown contact spring, top electrode,
Wei Liang, lower electrode, bottom crown contact spring and bottom crown composition；Fixing end is connect with pedestal, and micro- beam left end is fixed with fixing end
Connection, right end is fixedly connected with mass block, and micro- beam upper and lower surface is electroplated one layer of copper conductive film respectively, on composition
Electrode and lower electrode, film thickness be 50 microns, width is wide with beam, and length is equal with top crown and bottom crown, top electrode with
Lower electrode is connected by plain conductor and is connected；Top electrode forms a plane-parallel capacitor, lower electrode and bottom crown with top crown
A plane-parallel capacitor is formed, two plane-parallel capacitor sizes are identical with distance between plates, are symmetrical with micro- beam axis
Axial symmetry is distributed, and top crown and bottom crown are fixed with pedestal respectively；Top crown contact spring is fixed on top crown center, bottom crown
Contact spring is fixed on bottom crown center, and top crown contact spring and bottom crown contact spring are made by wire；Power supply is opened
It closes left end and connects bottom crown, right end connects DC power supply, and DC power supply right end connects top crown.
Power output system is made of mass block, mass block hinge, flying wheel hinge, connecting rod, connecting rod link and flying wheel,
Connecting rod lower end is connect by mass block hinge with mass block, and upper end is connect by connecting rod link with flying wheel, and flying wheel core wheel is logical
Flying wheel hinge is crossed to connect with pedestal.
Motor starting system is made of electromagnet, mass block and micro- beam, and electromagnet is located at immediately below mass block.
Micromechanics motor operations process is expressed as follows：Power-on servicing is carried out to electromagnet, electromagnet is powered, and electromagnet generates
Electromagnetic force attracts ferromagnetic property gauge block to move downward, and mass block drives micro- beam to generate flexural deformation, and it is corresponding to design micro- beam deformation
Small end reaches lower dead center so that lower electrode is connected by bottom crown contact spring with bottom crown, and power switch, direct current are closed
The capacitor charging that power supply is formed to top crown and top electrode, top crown are positively charged, the negatively charged lotus of top electrode；To electromagnet into
Row power operation, electromagnet power-off, electromagnet electromagnetic force disappear, and disappear to the electromagnetic attraction that mass block generates, micro- beam is in elasticity
It is moved upwards under electrostatic attraction effect between power and plane-parallel capacitor, mass block pushes connecting rod to do plane motion, and connecting rod pushes
Flying wheel does fixed-axis rotation.
Micro- beam moves upwards, and crosses equilbrium position, and the top crown contact spring of top crown contacts conducting, upper pole with top electrode
With electrode capacitor is powered on charge neutrality occurs for plate, and after charge neutrality, DC power supply is then filled to bottom crown and lower electrode capacitor
Electricity, small end continue up, and speed is zero when reaching top dead centre, and connecting rod is in micro- beam elastic force, bottom crown and lower electrode
Between do plane motion downwards under electrostatic attraction effect, push flying wheel to do fixed-axis rotation.
Micro- beam is crossed equilbrium position and is moved downward, the bottom crown contact spring of bottom crown and lower electrode conduction, bottom crown and
Charge neutrality occurs for lower electrode capacitor, and after charge neutrality, DC power supply then to top crown and powers on electrode capacitor charging, this
When, small end reaches lower dead center, and connecting rod does plane upwards under the effect of micro- beam elastic force, top crown and top electrode electrostatic attraction
Movement pushes flying wheel to do fixed-axis rotation.
Electrostatic motor is repeated cyclically movement, driving flying wheel rotation.Disconnect DC power supply switch, plane-parallel capacitor
Charging terminates, and electrostatic motor motion amplitude under itself damping action gradually reduces, and until static, micromechanics motor stops.
The present invention has the following advantages that compared with prior art：
1. using micro- Liang Sicheng enlarge-effect is vibrated, beam right end mass block generates vibration displacement, can turn micro- vibration of beam
Turn to the rotational motion of driving flying wheel.
2. offer is a kind of to move in parallel the conversion of motion device for being converted into fixed-axis rotation, it converts electrostatic energy in the machine of micro- beam
Tool energy, then change the mechanical energy for turning to flying wheel.
3. the design of pole plate contact spring can reduce driving mechanism to motion structure vibration effect, micromechanics motor movement is improved
Stability, Elastic Contact, which designs, can effectively carry out the charge and discharge of plane-parallel capacitor.
Description of the drawings
Electrostatic drive micro motor installation drawings of the Fig. 1 based on micro- beam vibration；
In figure, 1. fixing end, 2. power switch, 3. DC power supply, 4. top crown, 5. top crown contact spring 6. powers on
7. micro- beams of pole, 8. times electrodes, 9. bottom crown contact spring, 10. bottom crown, 11. electromagnet, 12. mass block, 13. mass block is cut with scissors
16. connecting rod link of chain 14. flying wheel hinge, 15. connecting rod, 17. flying wheel.
Specific embodiment
1 the present invention is further described below in conjunction with the accompanying drawings.
The agent structure of the present embodiment includes micro- beam electrostatic drive system, power output system and motor starting halt system
Three parts.
Electrostatic drive by fixing end 1, power switch 2, DC power supply 3, top crown 4, top crown contact spring 5, on
Electrode 6, micro- beam 7, lower electrode 8, bottom crown contact spring 9 and bottom crown 10 form；Fixing end 1 is connect with pedestal, and micro- beam 7 is left
End is fixedly connected with fixing end 1, and right end is fixedly connected with mass block 12, and one layer of copper is electroplated in 7 upper and lower surface of micro- beam respectively
Element conductive film forms top electrode 6 and lower electrode 8, and film thickness is 50 microns, and width is wide with beam, length and top crown 4
Equal with bottom crown 10, top electrode 6 connects conducting with lower electrode 8 by plain conductor；Top electrode 6 forms one with top crown 4
Plane-parallel capacitor, lower electrode 8 forms a plane-parallel capacitor with bottom crown 10, between two plane-parallel capacitor sizes and plate
Apart from identical, symmetrical as symmetry axis using 7 axis of micro- beam, top crown 4 and bottom crown 10 are fixed with pedestal respectively；Upper pole
Plate contact spring 5 is fixed on 4 center of top crown, and bottom crown contact spring 9 is fixed on 10 center of bottom crown, top crown contact spring
5 and bottom crown contact spring 9 made by wire；2 left end of power switch connects bottom crown 10, and right end connects DC power supply 3,
3 right end of DC power supply connects top crown 4.
Power output system mass block 12, mass block hinge 13, flying wheel hinge 14, connecting rod 15, connecting rod link 16 and used
Property wheel 17 form, 15 lower end of connecting rod connect by mass block hinge 13 with mass block 12, and upper end passes through connecting rod link 16 and inertia
17 connection of wheel, 17 core wheel of flying wheel are connect by flying wheel hinge 14 with pedestal.
Motor starting system is made of electromagnet 11, mass block 12 and micro- beam 7, under electromagnet 11 is located at mass block 12 just
Side.
Power-on servicing is carried out to electromagnet 11, electromagnet 11 is powered, and electromagnet 11 generates electromagnetic force, attracts ferromagnetism quality
Block 12 moves downward, and mass block 12 drives micro- beam 7 to generate flexural deformation, designs micro- beam 7 and deforms the arrival of 15 upper end of corresponding connecting rod
Lower dead center so that lower electrode 8 is connected by bottom crown contact spring 9 and bottom crown 10, is closed power switch 2, DC power supply 3 to
The capacitor charging that top crown 4 and top electrode 6 form, top crown 4 are positively charged, 6 negatively charged lotus of top electrode；To electromagnet 11 into
Row power operation, electromagnet 11 power off, and 11 electromagnetic force of electromagnet disappears, and disappear to the electromagnetic attraction that mass block 12 generates, micro- beam 7
It is moved upwards under electrostatic attraction effect between elastic force and plane-parallel capacitor, mass block 12 pushes connecting rod 15 to do plane fortune
Dynamic, connecting rod 15 pushes flying wheel 17 to do fixed-axis rotation.
Micro- beam 7 moves upwards, and crosses equilbrium position, and the top crown contact spring 5 of top crown 4 contacts conducting with top electrode 6,
Charge neutrality occurs for top crown 4 and 6 capacitor of top electrode, and after charge neutrality, DC power supply 3 then gives bottom crown 10 and lower electrode
8 capacitors charge, and 15 upper end of connecting rod continues up, and speed is zero when reaching top dead centre, connecting rod 15 7 elastic force of micro- beam,
Plane motion is done downwards under electrostatic attraction effect between bottom crown 10 and lower electrode 8, and flying wheel 17 is pushed to do fixed-axis rotation.
Micro- beam 7 is crossed equilbrium position and is moved downward, and the bottom crown contact spring 9 of bottom crown is connected with lower electrode 8, bottom crown
Charge neutrality occurs with lower 8 capacitor of electrode, after charge neutrality, DC power supply 3 then gives 6 capacitor of top crown 4 and top electrode
Charging, at this moment, 15 upper end of connecting rod reach lower dead center, and connecting rod 15 is made in 7 elastic force of micro- beam, top crown 4 and 6 electrostatic attraction of top electrode
Plane motion is done upwards with lower, and flying wheel 17 is pushed to do fixed-axis rotation.
Electrostatic motor is repeated cyclically movement, and driving flying wheel 17 rotates.Disconnect DC power supply switch 2, parallel-plate electricity
Condenser charge terminates, and electrostatic motor motion amplitude under itself damping action gradually reduces, and until static, micromechanics motor stops
Only.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the scope of the present invention.It is all
Within the spirit and principles in the present invention, made by any modification, equivalent replacement and improvement, should be included in of the present invention
Within protection domain.
Claims (1)
1. a kind of electrostatic drive micro motor device, which includes micro- beam electrostatic drive system, power output system and motor starting, stops system
System three parts；Electrostatic drive is contacted by fixing end (1), power switch (2), DC power supply (3), top crown (4), top crown
Spring (5), top electrode (6), micro- beam (7), lower electrode (8), bottom crown contact spring (9) and bottom crown (10) composition；Fixing end
(1) it is connect with pedestal, micro- beam (7) left end is fixedly connected with fixing end (1), and right end is fixedly connected with mass block (12), micro- beam (7)
One layer of copper conductive film is electroplated in upper and lower surface respectively, and composition top electrode (6) and lower electrode (8), film thickness are
50 microns, width is wide with beam, and length is equal with top crown (4) and bottom crown (10), and top electrode (6) and lower electrode (8) pass through
Plain conductor connection conducting；Top electrode (6) forms a plane-parallel capacitor, lower electrode (8) and bottom crown with top crown (4)
(10) plane-parallel capacitor is formed, two plane-parallel capacitor sizes are identical with distance between plates, with micro- beam (7) axis
Symmetrical for symmetry axis, top crown (4) and bottom crown (10) are fixed with pedestal respectively；Top crown contact spring (5) is fixed on
Top crown (4) center, bottom crown contact spring (9) are fixed on bottom crown (10) center, top crown contact spring (5) and bottom crown
Contact spring (9) is made by wire；Power switch (2) left end connects bottom crown (10), and right end connects DC power supply (3),
DC power supply (3) right end connects top crown (4)；Power output system is cut with scissors by mass block (12), mass block hinge (13), flying wheel
Chain (14), connecting rod (15), connecting rod link (16) and flying wheel (17) composition, connecting rod (15) lower end by mass block hinge (13) with
Mass block (12) connects, and upper end is connect by connecting rod link (16) with flying wheel (17), and flying wheel (17) core wheel passes through flying wheel
Hinge (14) is connect with pedestal；Motor starting system is made of electromagnet (11), mass block (12) and micro- beam (7), electromagnet
(11) it is located at immediately below mass block (12)；
Micromechanics motor operations process is expressed as follows：Power-on servicing is carried out to electromagnet (11), electromagnet (11) is powered, electromagnet
(11) electromagnetic force is generated, ferromagnetic property gauge block (12) is attracted to move downward, mass block (12) drives micro- beam (7) generation bending to become
Shape designs micro- beam (7) and deforms corresponding connecting rod (15) upper end arrival lower dead center so that lower electrode (8) contacts bullet by bottom crown
Spring (9) is connected with bottom crown (10), is closed power switch (2), and DC power supply (3) is formed to top crown (4) and top electrode (6)
Capacitor charges, and top crown (4) is positively charged, top electrode (6) negatively charged lotus；Power operation, electromagnetism are carried out to electromagnet (11)
Iron (11) powers off, and electromagnet (11) electromagnetic force disappears, and disappears to the electromagnetic attraction that mass block (12) generates, micro- beam (7) is in elasticity
It being moved upwards under electrostatic attraction effect between power and plane-parallel capacitor, mass block (12) pushes connecting rod (15) to do plane motion,
Connecting rod (15) pushes flying wheel (17) to do fixed-axis rotation；
Micro- beam (7) moves upwards, and crosses equilbrium position, and the top crown contact spring (5) of top crown (4) is contacted with top electrode (6)
Charge neutrality occurs for conducting, top crown (4) and top electrode (6) capacitor, and after charge neutrality, DC power supply (3) then gives lower pole
Plate (10) and the charging of lower electrode (8) capacitor, connecting rod (15) upper end continue up, and speed is zero when reaching top dead centre, even
Bar (15) does downwards plane motion between Wei Liang (7) elastic force, bottom crown (10) and lower electrode (8) under electrostatic attraction effect, pushes away
Dynamic flying wheel (17) does fixed-axis rotation；
Micro- beam (7) is crossed equilbrium position and is moved downward, and the bottom crown contact spring (9) of bottom crown is connected with lower electrode (8), lower pole
Charge neutrality occurs for plate and lower electrode (8) capacitor, and after charge neutrality, DC power supply (3) then gives top crown (4) and top electrode
(6) capacitor charges, and at this moment, connecting rod (15) upper end reaches lower dead center, connecting rod (15) Wei Liang (7) elastic force, top crown (4) with
Plane motion is done upwards under the effect of top electrode (6) electrostatic attraction, and flying wheel (17) is pushed to do fixed-axis rotation；
Electrostatic motor is repeated cyclically movement, and driving flying wheel (17) rotates；Disconnect DC power supply switch (2), parallel-plate electricity
Condenser charge terminates, and electrostatic motor motion amplitude under itself damping action gradually reduces, and until static, micromechanics motor stops
Only.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810749187.3A CN108809144B (en) | 2018-07-09 | 2018-07-09 | One kind being based on micro- beam vibration electrostatic drive micro motor device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810749187.3A CN108809144B (en) | 2018-07-09 | 2018-07-09 | One kind being based on micro- beam vibration electrostatic drive micro motor device |
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| CN108809144A true CN108809144A (en) | 2018-11-13 |
| CN108809144B CN108809144B (en) | 2019-10-15 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109787506A (en) * | 2019-02-28 | 2019-05-21 | 长安大学 | A kind of Piezoelectric Driving micro motor device and its working method based on cantilever beam vibration |
| CN110429827A (en) * | 2019-08-14 | 2019-11-08 | 山东理工大学 | A kind of superharmonic resonances signal frequency multiplication amplification frequency tuner |
| CN112332697A (en) * | 2020-10-21 | 2021-02-05 | 长春工业大学 | Rotary cam piezoelectric power generation device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101677221A (en) * | 2008-09-16 | 2010-03-24 | 伊塔瑞士钟表制造股份有限公司 | Electrostatic motor including an actuator |
| US20110048133A1 (en) * | 2009-08-31 | 2011-03-03 | University Of Louisville Research Foundation, Inc. | Vibration element coupled with non-linear force to improve non-resonant frequency response |
| CN102217183A (en) * | 2008-11-19 | 2011-10-12 | 罗伯特·博世有限公司 | Method for operating an electrostatic drive and electrostatic drives |
| EP2680334A1 (en) * | 2012-06-28 | 2014-01-01 | Leica Geosystems AG | Piezo drive with piezo oscillator with a pivoting bearing |
| CN106972782A (en) * | 2017-04-22 | 2017-07-21 | 吉林大学 | A kind of piezoelectric beam with bistable characteristic and electric capacity combined bidirectional energy collector |
-
2018
- 2018-07-09 CN CN201810749187.3A patent/CN108809144B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101677221A (en) * | 2008-09-16 | 2010-03-24 | 伊塔瑞士钟表制造股份有限公司 | Electrostatic motor including an actuator |
| CN102217183A (en) * | 2008-11-19 | 2011-10-12 | 罗伯特·博世有限公司 | Method for operating an electrostatic drive and electrostatic drives |
| US20110048133A1 (en) * | 2009-08-31 | 2011-03-03 | University Of Louisville Research Foundation, Inc. | Vibration element coupled with non-linear force to improve non-resonant frequency response |
| EP2680334A1 (en) * | 2012-06-28 | 2014-01-01 | Leica Geosystems AG | Piezo drive with piezo oscillator with a pivoting bearing |
| CN106972782A (en) * | 2017-04-22 | 2017-07-21 | 吉林大学 | A kind of piezoelectric beam with bistable characteristic and electric capacity combined bidirectional energy collector |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109787506A (en) * | 2019-02-28 | 2019-05-21 | 长安大学 | A kind of Piezoelectric Driving micro motor device and its working method based on cantilever beam vibration |
| CN110429827A (en) * | 2019-08-14 | 2019-11-08 | 山东理工大学 | A kind of superharmonic resonances signal frequency multiplication amplification frequency tuner |
| CN110429827B (en) * | 2019-08-14 | 2021-05-25 | 山东理工大学 | Super harmonic resonance signal frequency doubling amplification frequency tuning device |
| CN112332697A (en) * | 2020-10-21 | 2021-02-05 | 长春工业大学 | Rotary cam piezoelectric power generation device |
| CN112332697B (en) * | 2020-10-21 | 2022-01-28 | 长春工业大学 | Rotary cam piezoelectric power generation device |
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| Publication number | Publication date |
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| CN108809144B (en) | 2019-10-15 |
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