CN108540008A - The reciprocating multilayered structure super large deformation actuator of flexible material based on inverse flexure electricity principle and method - Google Patents

The reciprocating multilayered structure super large deformation actuator of flexible material based on inverse flexure electricity principle and method Download PDF

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Publication number
CN108540008A
CN108540008A CN201810442758.9A CN201810442758A CN108540008A CN 108540008 A CN108540008 A CN 108540008A CN 201810442758 A CN201810442758 A CN 201810442758A CN 108540008 A CN108540008 A CN 108540008A
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effort formation
electrode
deformation
semi
annular shape
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CN108540008B (en
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武彤晖
徐明龙
张舒文
刘开园
申胜平
邵恕宝
宋思扬
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Xian Jiaotong University
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Xian Jiaotong University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/0015Driving devices, e.g. vibrators using only bending modes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section orthogonal to the stacking direction, e.g. polygonal, circular
    • H10N30/505Annular cross-section
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The reciprocating multilayered structure super large deformation actuator of flexible material based on inverse flexure electricity principle and method, the actuator includes controller, the high voltage power supply being electrically connected with the controller, the half semi-annular shape effort formation of flexure electricity type formed is back and forth overlapped by multi-layer flexible film shape material, buried respectively close to the material internal of monolayer material film upper and lower surface position in effort formation with can a wide range of bending and stretching electrode, electrode is electrically connected with high voltage power supply, due to inverse flexure electro ultrafiltration after actuator energization, will produce along the radially inward flexural deformation of effort formation annulus;The deformation causes semicircular ring curvature to increase, so that former electric-force gradient further increases in the case that voltage effect is constant, the bending stress that electric-force gradient causes also further increases, so that the further deformation of effort formation balances each other or contact held object up to the power with material resistance to deformation, the shape and grip are then kept;The super large deforms actuator for the manipulator of existing rigid structure, has the Latent destruction for treating interactive construction and damages the advantages such as small, has very extensive application value.

Description

The reciprocating multilayered structure super large of flexible material based on inverse flexure electricity principle deforms start Device and method
Technical field
The present invention relates to deformation manipulators, and in particular to the reciprocating multilayered structure of flexible material based on inverse flexure electricity principle Super large deforms actuator and method.
Background technology
The start technology of atomic thin tail sheep is accurately directed in material engineering, spacecraft, scientific instrument, high-precision machining etc. Field is widely used.It is general to be exported as accurate displacement using the piezoelectric material for having excellent micro-displacement output characteristics Driving part, however due to piezoelectric material have Curie temperature, so that it is failed under high temperature environment so that it cannot normal work Make, in addition to this, since piezoelectric material has such as power-poor, the output accuracy limit of linear degree in sub-nanometer magnitude, polarization effect Should decay at any time, heavy metal etc. has the deficiencies of potential threat to environment, so that it is further developed and be restricted.Another party Face, rigid driving element may cause to damage to driven member itself, it is also difficult to adapt to curved surface or other are increasingly complex more The operating mode of change.
Invention content
In order to solve the above-mentioned problems of the prior art, the purpose of the present invention is to provide based on inverse flexure electricity principle The reciprocating multilayered structure super large deformation actuator of flexible material and method, to solve the atomic thin tail sheep output under wide environmental field And the large deformation start technology based on very high degree of precision provides effective solution scheme.
To achieve the above objectives, the present invention adopts the following technical scheme that:
The reciprocating multilayered structure super large of flexible material based on inverse flexure electricity principle deforms actuator, including controller 1, with The high voltage power supply 2 that controller 1 is electrically connected, semi-annular shape effort formation 3, inside the monolayer material for constituting effort formation along film Following table EDS maps have can a wide range of bending and stretching, specially designed electrode 4, electrode 4 connect with high voltage power supply 2;
The material of the semi-annular shape effort formation 3 is the flexure electricity material that multi-layer flexible film shape material is back and forth overlapped composition On the one hand material is laid with electrode by the internal-and external diameter of semicircular ring, due to inverse flexure electro ultrafiltration after electrode energization, realize inverse flexure electricity Electric-force gradient needed for effect is generated along the radially inward flexural deformation of effort formation annulus.On the other hand by back and forth folding Output displacement increase power output can be amplified can integrate compression volume again;It is described can a wide range of bending and stretching, through spy The electrode 4 very designed is made of metallic film, but not in flexible film-like material outer surface, but is embedded in fexible film Position of the shape material internal at the near surface, cross sectional shape are undaform or fold-type, soft when semi-annular shape effort formation 3 Property film-like material when super large deformation occurs, corresponding deformation can occur therewith for electrode 4, due to having on 4 body structures of electrode Ductility, therefore be not in the lead rupture phenomenon caused by large deformation, but the shape of undaform changes or pleat Wrinkle type structure is opened to a certain degree, this ensure that reliability when material power-electro ultrafiltration and good electric conductivity.
The material that the semi-annular shape effort formation 3 uses is the material of uniform property or functional flexible material, function Property flexible material refer to so that material through-thickness is generated physics and dielectric by doping-gradient control mode in preparation process The gradient of property.
By doping-gradient control mode it is to flexible material to be doped into magnetic susceptibility or dielectric constant in the preparation process Magnetic field or GRAVITY CONTROL are carried out after larger micro powder, so that its through-thickness is generated powder density distribution gradient, to make Mass density and dielectric constant generate gradient along thickness direction, and then the distribution of electric-force gradient is enhanced from material, increase Big power-electricity transfer capability.
The flexible film-like material power electrical characteristics of the semi-annular shape effort formation 3 match with used load is waited for, semicircle The number of plies of 3 flexible film-like material of cyclic annular effort formation matches with used load is waited for, the week of electrode in flexible film-like material Phase property shape scale is less than the thickness of monolayer material.
The start side of the reciprocating multilayered structure super large deformation actuator of the flexible material based on inverse flexure electricity principle Method, the electrode 4 on semi-annular shape effort formation 3 be powered after due to inverse flexure electro ultrafiltration, will produce along semi-annular shape effort formation 3 The radially inward flexural deformation of annulus, the deformation can cause annulus curvature to become smaller, thus make in the case where voltage effect is constant It obtains electric-force gradient further to increase, the bending stress that electric-force gradient causes also further increases, so that semi-annular shape start knot Structure 3 further deforms, and finally generates huge deformation, until the power of driving force and resistance to deformation balances each other or semi-annular shape start Structure 3 just will not be deformed further with after effect object contacts, and keep the shape and grip.
Compared to the prior art the present invention, has the following advantages that:
1) relative to traditional piezoelectric material Actuator technique, the present invention is imitated using the inverse flexure electricity of the electric flexible material of flexure Start method is answered, can realize the High-precision Stepping larger displacement output of at least an order of magnitude higher than the prior art, and is had Good load/displacement range designability, wider operating temperature range, scale effect is apparent, adapts to a greater variety of work Surface does not have damaging to driven member.
2) present invention employs special electrode method for arranging, and it is different that electrode is laid in the mode of component surface from tradition, Electrode is embedded in position of the material internal near surface by the present invention, and cross sectional shape is in undaform or fold-type, as When super large deformation occurs for the flexible material of dynamic structure, electrode can occur to deform accordingly therewith, and electrode is made to have ductility, because Phenomena such as this is not in the lead rupture caused by large deformation, but this ensure that reliability when material power-electro ultrafiltration With good electric conductivity.
3) present invention employs reciprocating multilayered structure, whole part integrated molding had both been exaggerated the defeated of power and displacement Go out in turn avoid the error that mechanical clearance is brought so that total is more compact, minimizes.
Description of the drawings
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the illustrative view of the present invention.
Specific implementation mode
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in Figure 1, the reciprocating multilayered structure super large of flexible material based on inverse flexure electricity principle deforms actuator, including Controller 1, the high voltage power supply 2 being electrically connected with the controller back and forth are overlapped the flexure electricity type formed by multi-layer flexible film shape material Partial Semi-circle ring-type effort formation 3, can be big along having for film upper and lower surface distribution inside the monolayer material for constituting effort formation Range bending and stretching, specially designed electrode 4, electrode 4 are connect with high voltage power supply 2.
As shown in Fig. 2, electrode 4 on semi-annular shape effort formation 3 be powered after due to inverse flexure electro ultrafiltration, will produce along half The radially inward flexural deformation of 3 annulus of circular effort formation.The deformation makes annular radii smaller, thus is acted on not in voltage So that electric-force gradient further increases in the case of change, the bending stress that electric-force gradient causes also further increases, so that half Circular effort formation 3 further deforms.Since the material that semi-annular shape effort formation 3 uses is functional flexible material, tool Have prodigious regime of elastic deformation and preferable power-electricity transfer capability so that its under the action of voltage, not yet with wait acting on Structure when being in contact can continuous deformation, it is final to generate very huge deformation, until semi-annular shape effort formation 3 and waiting for agent It just will not further be deformed after body contact, to keep the shape and grip.It is described can a wide range of bending and stretching, through special The electrode 4 of design is as shown in Figure 1, it is made of metallic film, but not in flexible film-like material outer surface, but it is embedded In position of the flexible film-like material internal near surface, cross sectional shape is undaform or fold-type is undaform electrode 4a or fold-type electrode 4b, when super large deformation occurs for the flexible film-like material of semi-annular shape effort formation 3, electrode 4 can be with Generation deform accordingly, be not in electric caused by large deformation due to having ductility on 4 body structures of electrode Phenomena such as pole is broken, but the shape of undaform electrode 4a changes or fold-type electrode 4b is opened to a certain degree, in this way Reliability when ensure that material power-electro ultrafiltration and good electric conductivity.The flexible film-like material of semi-annular shape effort formation 3 With higher flexoelectric coefficient, either the material annular shape effort formation 3a of uniform property, it can also be in preparation process In so that material through-thickness is generated the gradient annular shape start knot of physics/dielectric property by modes such as doping-gradient controls Structure 3b carries out magnetic field or GRAVITY CONTROL after being such as doped into magnetic susceptibility or the larger micro powder of dielectric constant to flexible material, makes Its through-thickness generates powder density distribution gradient, to make mass density and dielectric constant generate ladder along thickness direction It spends, and then enhances the distribution of electric-force gradient from material, increase power-electricity transfer capability.
As the preferred embodiment of the present invention, the flexible film-like material power electricity of the semi-annular shape effort formation 3 is special Property matches with used load is waited for, the number of plies of 3 flexible film-like material of circular effort formation matches with used load is waited for, soft Property film-like material in electrode 4 periodic shapes scale be much smaller than monolayer material thickness.
The reciprocating multilayered structure super large deformation actuator of flexible material of the electric principle of inverse flexure can be used in a variety of works Under condition, especially facing the driven object body of surface imperfection can also keep good contact surface to ensure good grasping Property.

Claims (5)

1. the reciprocating multilayered structure super large of flexible material based on inverse flexure electricity principle deforms actuator, it is characterised in that:Including Controller (1), the high voltage power supply (2) being electrically connected with controller (1), semi-annular shape effort formation (3) are constituting effort formation Inside monolayer material along the distribution of film upper and lower surface have can a wide range of bending and stretching, specially designed electrode (4), electricity Pole (4) is connect with high voltage power supply (2);
The material of the semi-annular shape effort formation (3) is the flexure electricity material that multi-layer flexible film shape material is back and forth overlapped composition On the one hand material is laid with electrode by the internal-and external diameter of semicircular ring, due to inverse flexure electro ultrafiltration after electrode energization, realize inverse flexure electricity Electric-force gradient needed for effect is generated along the radially inward flexural deformation of effort formation annulus.On the other hand by back and forth folding Output displacement increase power output can be amplified can integrate compression volume again;It is described can a wide range of bending and stretching, through spy The electrode (4) very designed is made of metallic film, but not in flexible film-like material outer surface, but is embedded in flexible thin Position inside film material near surface, cross sectional shape is undaform or fold-type, when semi-annular shape effort formation (3) Flexible film-like material when super large deformation occurs, corresponding deformation can occur therewith for electrode (4), due to electrode (4) knot itself There is ductility on structure, therefore be not in the lead rupture phenomenon caused by large deformation, but the shape of undaform occurs Variation or fold-type structure are opened to a certain degree, this ensure that reliability when material power-electro ultrafiltration and good conduction Property.
2. the reciprocating multilayered structure super large of the flexible material according to claim 1 based on inverse flexure electricity principle deforms start Device, it is characterised in that:The material that the semi-annular shape effort formation 3 uses is the material of uniform property or functional flexible material Material, functional flexible material refers to making material through-thickness generation by doping-gradient control mode in preparation process The gradient of reason and dielectric property.
3. the reciprocating multilayered structure super large of the flexible material according to claim 2 based on inverse flexure electricity principle deforms start Device, it is characterised in that:By doping-gradient control mode it is to flexible material to be doped into magnetic susceptibility or Jie in the preparation process Magnetic field or GRAVITY CONTROL are carried out after the larger micro powder of electric constant, its through-thickness is made to generate powder density distribution gradient, To make mass density and dielectric constant generate gradient along thickness direction, and then dividing for electric-force gradient is enhanced from material Cloth increases power-electricity transfer capability.
4. the reciprocating multilayered structure super large of the flexible material according to claim 1 based on inverse flexure electricity principle deforms start Device, it is characterised in that:The flexible film-like material power electrical characteristics of the semi-annular shape effort formation (3) with wait for used load phase Match, the number of plies of semi-annular shape effort formation (3) flexible film-like material matches with used load is waited for, in flexible film-like material The periodic shapes scale of electrode is less than the thickness of monolayer material.
5. the reciprocating multilayered structure super large of flexible material of the Claims 1-4 any one of them based on inverse flexure electricity principle becomes The start method of shape actuator, it is characterised in that:Due to inverse flexure after electrode (4) energization on semi-annular shape effort formation (3) Electro ultrafiltration will produce along the radially inward flexural deformation of semi-annular shape effort formation (3) annulus, which can cause annulus curvature Become smaller, thus so that electric-force gradient further increases in the case where voltage effect is constant, the bending stress that electric-force gradient causes It further increases, so that semi-annular shape effort formation (3) further deforms, finally generates huge deformation, until driving Power balances each other with the power of resistance to deformation or semi-annular shape effort formation (3) just will not further become with after effect object contacts Shape, and keep the shape and grip.
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109507450A (en) * 2018-10-30 2019-03-22 西安交通大学 A kind of beam type bends electric acceleration transducer and acceleration measurement method
CN109771125A (en) * 2018-12-24 2019-05-21 武汉理工大学 A kind of wearable electrical heating element and preparation method thereof based on wireless sensor technology
CN110323963A (en) * 2019-06-29 2019-10-11 西安交通大学 Electret composite materials single electrode actuator and method with tension compression bidirectional output
CN112216786A (en) * 2019-07-09 2021-01-12 北京大学 Flexible piezoelectric polymer micro-mechanical energy collector and preparation method thereof
CN113672034A (en) * 2020-05-14 2021-11-19 苹果公司 Electronic device with adjustable hinge
CN113686466A (en) * 2021-05-20 2021-11-23 南京工业大学 Wide-range flexible capacitive pressure sensor and preparation method thereof

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US5849125A (en) * 1997-02-07 1998-12-15 Clark; Stephen E. Method of manufacturing flextensional transducer using pre-curved piezoelectric ceramic layer
CN102099939A (en) * 2008-07-18 2011-06-15 国防科学研究所 Electromechanical transducer and method for manufacturing the same
CN105656345A (en) * 2015-12-29 2016-06-08 西安交通大学 Ultra-small displacement actuator based on flexoelectric principle
WO2017081015A1 (en) * 2015-11-13 2017-05-18 Epcos Ag Piezoelectric transformer

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Publication number Priority date Publication date Assignee Title
US5849125A (en) * 1997-02-07 1998-12-15 Clark; Stephen E. Method of manufacturing flextensional transducer using pre-curved piezoelectric ceramic layer
CN102099939A (en) * 2008-07-18 2011-06-15 国防科学研究所 Electromechanical transducer and method for manufacturing the same
WO2017081015A1 (en) * 2015-11-13 2017-05-18 Epcos Ag Piezoelectric transformer
CN105656345A (en) * 2015-12-29 2016-06-08 西安交通大学 Ultra-small displacement actuator based on flexoelectric principle

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109507450A (en) * 2018-10-30 2019-03-22 西安交通大学 A kind of beam type bends electric acceleration transducer and acceleration measurement method
CN109771125A (en) * 2018-12-24 2019-05-21 武汉理工大学 A kind of wearable electrical heating element and preparation method thereof based on wireless sensor technology
CN110323963A (en) * 2019-06-29 2019-10-11 西安交通大学 Electret composite materials single electrode actuator and method with tension compression bidirectional output
CN110323963B (en) * 2019-06-29 2020-07-10 西安交通大学 Electret composite material single-electrode actuator with tension and compression bidirectional output and method
CN112216786A (en) * 2019-07-09 2021-01-12 北京大学 Flexible piezoelectric polymer micro-mechanical energy collector and preparation method thereof
CN112216786B (en) * 2019-07-09 2022-05-17 北京大学 Flexible piezoelectric polymer micro-mechanical energy collector and preparation method thereof
CN113672034A (en) * 2020-05-14 2021-11-19 苹果公司 Electronic device with adjustable hinge
CN113686466A (en) * 2021-05-20 2021-11-23 南京工业大学 Wide-range flexible capacitive pressure sensor and preparation method thereof

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