CN109245604A - A kind of sandwich piezo mechanical arm and its driving method - Google Patents

A kind of sandwich piezo mechanical arm and its driving method Download PDF

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Publication number
CN109245604A
CN109245604A CN201810894894.1A CN201810894894A CN109245604A CN 109245604 A CN109245604 A CN 109245604A CN 201810894894 A CN201810894894 A CN 201810894894A CN 109245604 A CN109245604 A CN 109245604A
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vibration joint
joint
longitudinal vibration
bending vibration
piezoelectric ceramic
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CN201810894894.1A
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CN109245604B (en
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陈迪
金家楣
李昕键
阮重远
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/145Large signal circuits, e.g. final stages

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  • Manipulator (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The invention discloses a kind of sandwich piezo mechanical arm and its driving method, sandwich piezo mechanical the first longitudinal vibration of arm joint, bending vibration joint and the second longitudinal vibration joints;First longitudinal vibration joint, bending vibration joint, the second longitudinal vibration joint include the first to the second straight pin, two bearings, preceding metallic matrix, the first to the second piezoelectric ceramic piece, electrode slice, grip block, rear metallic matrix and pretension bolt.First longitudinal vibration joint, bending vibration joint, the second longitudinal vibration joint pass sequentially through rubber ring and pre-tighten fixed pre-tighten.By the driving signal with pi/2 phase difference for applying certain frequency to the piezoelectric ceramic piece on longitudinal vibration joint and bending vibration joint, longitudinal vibration joint is set to be in single order longitudinal vibration, bending vibration joint is in single order bending vibration, to make contact interface particle generate relative elliptical movement, the connected joint produces relative rotation under rubbing action.The present invention uses sandwich type structural, and power density is high, simple and compact for structure, be easy to be miniaturized.

Description

A kind of sandwich piezo mechanical arm and its driving method
Technical field
The present invention relates to Piezoelectric Driving and robot field more particularly to a kind of sandwich piezo mechanical arm and its driving sides Method.
Background technique
For existing machinery arm frequently with fluid pressure type structure, huge structure load, power requirement are high, it is difficult to be miniaturized, either Using the driving structure of electromagnetic machine, joint built-in drive frame places the drive into intra articular, when facing micromation Equally face the problems such as structure is complicated, power density is low.Piezoelectric actuator be using piezoelectrics back wash effect formed Mechanical Driven or A kind of device of control has many advantages, such as that reaction is fast, precision is high and anti-interference, thus the driving constructed by it and control device Structure is simple, reaction is quick, the extensive concern by domestic and international scientist.And it is currently used for the multiple degrees of freedom electricity of driving mechanical arm Machine, which stablizes adjusting prepressing power and reliable fan-out capability in application, there is also some problems.
Summary of the invention
The technical problem to be solved by the present invention is to provide a kind of sandwich for defect involved in background technique Piezo mechanical arm and its driving method.
The present invention uses following technical scheme to solve above-mentioned technical problem:
A kind of sandwich piezo mechanical arm includes the first longitudinal vibration joint, bending vibration joint and the second longitudinal vibration joint;
First longitudinal vibration joint, bending vibration joint, the second longitudinal vibration joint include the first to the second straight pin, two bearings, preceding Metallic matrix, the first to the second piezoelectric ceramic piece, electrode slice, grip block, rear metallic matrix and pretension bolt;
The preceding metallic matrix includes driving head, interconnecting piece and engaging portion, and the driving head is cylindrical body, and the engaging portion is length The outer wall of cube, the driving head is connected by the end face of the interconnecting piece and engaging portion one end, engaging portion other end end The threaded hole that the center in face is equipped with and the early warning bolt matches;It is logical that the center of the driving head both sides of the face is equipped with ladder Hole;
Described two bearings respectively correspond in the ladder hole that two end faces of driving head are arranged in, outer ring and the driving head It is connected;
One end of first, second straight pin, which respectively corresponds, to be fixed in the inner ring of described two bearings, and the other end is stretched Its corresponding bearing out;
Metallic matrix is cuboid after described, and one end-face is equipped with trapezoidal groove, and the trapezoidal groove center is equipped with after running through Metallic matrix, the through-hole passed through for the early warning bolt;
First piezoelectric ceramic piece, the second piezoelectric ceramic piece, electrode slice, grip block center be equipped with for the early warning bolt The through-hole passed through;
The early warning bolt sequentially passes through rear metallic matrix, grip block, the first piezoelectricity pottery from rear metallic matrix trapezoidal groove side It is threadedly coupled after tile, electrode slice, the second piezoelectric ceramic piece with the threaded hole of the preceding metallic matrix, by applying pretightning force shape At sandwich type structural;
The grip block two sides are respectively equipped with the first fixed column, the second fixed column;
The the first to the second piezoelectric ceramic piece in first longitudinal vibration joint, the second longitudinal vibration joint is all made of longitudinal vibration piezoelectric ceramics Piece, the double subregion piezoelectric ceramic pieces of the first to the second piezoelectric ceramic piece in the bending vibration joint;
The driving head in second longitudinal vibration joint protrudes into the trapezoidal groove in bending vibration joint, and the side wall of the second longitudinal vibration joint drive head It offsets with three faces of bending vibration joint trapezoidal groove;First straight pin in the second longitudinal vibration joint and the first of bending vibration joint are fixed It is equipped with rubber ring between column, between second straight pin in the second longitudinal vibration joint and second fixed column in bending vibration joint, passes through rubber The second longitudinal vibration joint and bending vibration joint are fixed in the preload of cushion rubber flexible deformation;
The driving head in the bending vibration joint protrudes into the trapezoidal groove in the first longitudinal vibration joint, and the side wall of bending vibration joint drive head and Three faces of one longitudinal vibration joint trapezoidal groove offset;First fixation of first straight pin in bending vibration joint and the first longitudinal vibration joint It is equipped with rubber ring between column, between second straight pin in bending vibration joint and second fixed column in the first longitudinal vibration joint, passes through rubber Cushion rubber flexible deformation pre-tightens fixed bending vibration joint and the first longitudinal vibration joint.
As a kind of further prioritization scheme of sandwich piezo mechanical arm of the present invention, first longitudinal vibration joint, bending vibration Joint, the rear metallic matrix in the second longitudinal vibration joint, grip block, the first piezoelectric ceramic piece, electrode slice, the second piezoelectric ceramic piece, It is bonded together by epoxide-resin glue between preceding metallic matrix.
The invention also discloses a kind of driving methods of sandwich piezo mechanical arm comprising the steps of:
It is same by applying to double subregion piezoelectric ceramic pieces in the longitudinal vibration piezoelectric ceramic piece and bending vibration joint in the first longitudinal vibration joint The pumping signal of frequency, phase difference difference pi/2, motivates the single order longitudinal vibration mode in the first longitudinal vibration joint and the single order in bending vibration joint Bending vibration modes are made at this point, the relative movement orbit of the first longitudinal vibration joint and bending vibration joint contact interface particle is ellipse in friction It is produced relative rotation between lower first longitudinal vibration joint and bending vibration joint, bending vibration joint turns with respect to the first longitudinal vibration joint at this time for order Dynamic direction is forward direction;
Then by applying to double subregion piezoelectric ceramic pieces in the longitudinal vibration piezoelectric ceramic piece and bending vibration joint in the first longitudinal vibration joint Same frequency, phase difference difference-pi/2 pumping signal, bending vibration joint generate with respect to the first longitudinal vibration joint and rotate backward;
It is same by applying to the longitudinal vibration piezoelectric ceramic piece in the double subregion piezoelectric ceramic pieces and the second longitudinal vibration joint in bending vibration joint The pumping signal of frequency, phase difference difference pi/2, the second longitudinal vibration joint generates with respect to bending vibration joint and rotates forward;
It is same by applying to the longitudinal vibration piezoelectric ceramic piece in the double subregion piezoelectric ceramic pieces and the second longitudinal vibration joint in bending vibration joint Frequency, phase difference difference-pi/2 pumping signal, the second longitudinal vibration joint generate with respect to bending vibration joint and rotate backward.
The invention adopts the above technical scheme compared with prior art, has following technical effect that
Built-in drive is not needed by frictional force drives, so Miniaturization Design can be realized, anthropomorphic degree is high, and has pressure Electrically driven (operated) quick response, the advantages that cutting off self-lock.The present invention uses sandwich type structural, since the preload of bolt acts on, makes to press The tensile strength of electroceramics piece is improved, to improve the power density ratio of PZT (piezoelectric transducer).In addition, the present invention also has The quick response of Piezoelectric Driving, the advantages that cutting off self-lock, and it is simple and compact for structure, be easy to be miniaturized, using flexible, can increase Or longitudinal vibration, bending vibration joint and corresponding preload component are reduced to meet actual demand.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention;
Fig. 2 is the structural schematic diagram in the first, second longitudinal vibration joint in the present invention;
Fig. 3 is the structural schematic diagram in bending vibration joint in the present invention;
Fig. 4 is the schematic illustration that the present invention applies pumping signal to the first longitudinal vibration joint and bending vibration joint;
Fig. 5 is the schematic diagram of the first longitudinal vibration joint longitudinal vibration mode in the present invention;
Fig. 6 is the schematic diagram of bending vibration joint single order bending vibration in the present invention;
Fig. 7 is the driving principle schematic diagram of sandwich piezo mechanical arm of the present invention.
Wherein, the first longitudinal vibration of 1- joint, 2- bending vibration joint, the second longitudinal vibration of 3- joint, 4- rubber ring, 5- straight pin, 6- are vertical Shake piezoelectric ceramic piece, the bis- subregion piezoelectric ceramic pieces of 7-, 8- bearing, metallic matrix before 9-, 10- pretension bolt, 11- electrode slice, 12- Grip block, metallic matrix after 13-.
Specific embodiment
Technical solution of the present invention is described in further detail with reference to the accompanying drawing:
The present invention can be embodied in many different forms, and should not be assumed that be limited to the embodiments described herein.On the contrary, providing These embodiments are thoroughly and complete to make the disclosure, and will give full expression to the scope of the present invention to those skilled in the art. In the accompanying drawings, for the sake of clarity it is exaggerated component.
As shown in Figure 1, including the first longitudinal vibration joint, bending vibration joint the invention discloses a kind of sandwich piezo mechanical arm With the second longitudinal vibration joint.
As shown in Fig. 2, first longitudinal vibration joint, bending vibration joint, the second longitudinal vibration joint include the first to the second cylinder Pin, two bearings, preceding metallic matrix, the first to the second piezoelectric ceramic piece, electrode slice, grip block, rear metallic matrix and preload spiral shell Bolt;
The preceding metallic matrix includes driving head, interconnecting piece and engaging portion, and the driving head is cylindrical body, and the engaging portion is length The outer wall of cube, the driving head is connected by the end face of the interconnecting piece and engaging portion one end, engaging portion other end end The threaded hole that the center in face is equipped with and the early warning bolt matches;It is logical that the center of the driving head both sides of the face is equipped with ladder Hole;
Described two bearings respectively correspond in the ladder hole that two end faces of driving head are arranged in, outer ring and the driving head It is connected;
One end of first, second straight pin, which respectively corresponds, to be fixed in the inner ring of described two bearings, and the other end is stretched Its corresponding bearing out;
Metallic matrix is cuboid after described, and one end-face is equipped with trapezoidal groove, and the trapezoidal groove center is equipped with after running through Metallic matrix, the through-hole passed through for the early warning bolt;
First piezoelectric ceramic piece, the second piezoelectric ceramic piece, electrode slice, grip block center be equipped with for the early warning bolt The through-hole passed through;
The early warning bolt sequentially passes through rear metallic matrix, grip block, the first piezoelectricity pottery from rear metallic matrix trapezoidal groove side It is threadedly coupled after tile, electrode slice, the second piezoelectric ceramic piece with the threaded hole of the preceding metallic matrix, by applying pretightning force shape At sandwich type structural;
The grip block two sides are respectively equipped with the first fixed column, the second fixed column;
As shown in Figure 2 and Figure 3, first longitudinal vibration joint, the first to the second piezoelectric ceramic piece in the second longitudinal vibration joint are all made of Longitudinal vibration piezoelectric ceramic piece, the double subregion piezoelectric ceramic pieces of the first to the second piezoelectric ceramic piece in the bending vibration joint;
The driving head in second longitudinal vibration joint protrudes into the trapezoidal groove in bending vibration joint, and the side wall of the second longitudinal vibration joint drive head It offsets with three faces of bending vibration joint trapezoidal groove;First straight pin in the second longitudinal vibration joint and the first of bending vibration joint are fixed It is equipped with rubber ring between column, between second straight pin in the second longitudinal vibration joint and second fixed column in bending vibration joint, passes through rubber The second longitudinal vibration joint and bending vibration joint are fixed in the preload of cushion rubber flexible deformation;
The driving head in the bending vibration joint protrudes into the trapezoidal groove in the first longitudinal vibration joint, and the side wall of bending vibration joint drive head and Three faces of one longitudinal vibration joint trapezoidal groove offset;First fixation of first straight pin in bending vibration joint and the first longitudinal vibration joint It is equipped with rubber ring between column, between second straight pin in bending vibration joint and second fixed column in the first longitudinal vibration joint, passes through rubber Cushion rubber flexible deformation pre-tightens fixed bending vibration joint and the first longitudinal vibration joint.
Fig. 4 is a kind of example for applying pumping signal of the present invention, by simultaneously to the longitudinal vibration in first longitudinal vibration joint Piezoelectric ceramic piece applies sin (ω t), applies cos (ω t) pumping signal to double subregion piezoelectric ceramic pieces in bending vibration joint, will The single order longitudinal vibration mode in first longitudinal vibration joint and the single order bending vibration modes in bending vibration joint are motivated, as shown in Figure 5 and Figure 6.
The invention also discloses a kind of driving methods of sandwich piezo mechanical arm comprising the steps of:
It is same by applying to double subregion piezoelectric ceramic pieces in the longitudinal vibration piezoelectric ceramic piece and bending vibration joint in the first longitudinal vibration joint The pumping signal of frequency, phase difference difference pi/2, motivates the single order longitudinal vibration mode in the first longitudinal vibration joint and the single order in bending vibration joint Bending vibration modes are made at this point, the relative movement orbit of the first longitudinal vibration joint and bending vibration joint contact interface particle is ellipse in friction It is produced relative rotation between lower first longitudinal vibration joint and bending vibration joint, bending vibration joint turns with respect to the first longitudinal vibration joint at this time for order Dynamic direction is forward direction;
Then by applying to double subregion piezoelectric ceramic pieces in the longitudinal vibration piezoelectric ceramic piece and bending vibration joint in the first longitudinal vibration joint Same frequency, phase difference difference-pi/2 pumping signal, bending vibration joint generate with respect to the first longitudinal vibration joint and rotate backward;
It is same by applying to the longitudinal vibration piezoelectric ceramic piece in the double subregion piezoelectric ceramic pieces and the second longitudinal vibration joint in bending vibration joint The pumping signal of frequency, phase difference difference pi/2, the second longitudinal vibration joint generates with respect to bending vibration joint and rotates forward;
It is same by applying to the longitudinal vibration piezoelectric ceramic piece in the double subregion piezoelectric ceramic pieces and the second longitudinal vibration joint in bending vibration joint Frequency, phase difference difference-pi/2 pumping signal, the second longitudinal vibration joint generate with respect to bending vibration joint and rotate backward.
Now by taking the first longitudinal vibration joint and bending vibration joint as an example, using the pumping signal applying mode of Fig. 4, illustrate specifically to drive Dynamic principle, as shown in Figure 7.As t=0, the first longitudinal vibration joint is in zero deformation state, and it is maximum that bending vibration joint is in single order bending vibration Deformation state, the circular arc driving head in bending vibration joint are contacted with the trapezoidal groove lower wall in the first longitudinal vibration joint;When t=pi/2, first Longitudinal vibration joint is gradually extended to longest state, and bending vibration joint is gradually become again by maximum distortion state to zero deformation state, trapezoidal recessed Slot lower wall drives circular arc driving head to rotate counterclockwise under the action of frictional force;As t=π, the first longitudinal vibration joint be gradually shortened to Zero deformation state, bending vibration joint are gradually become again by zero deformation state to maximum distortion state, on circular arc driving head and trapezoidal groove Wall starts to contact, and separates with trapezoidal lower wall, and trapezoidal groove upper wall drives circular arc driving head to turn counterclockwise under the action of frictional force It is dynamic;When t=3 pi/2, the first longitudinal vibration joint is gradually shortened to most short status, bending vibration joint by maximum distortion state gradually become again to Zero deformation state, trapezoidal groove upper wall, which rotates circular arc driving head, to be occurred inhibition and is gradually disengaged;As t=2 π, first is vertical Vibration joint is gradually extended to zero deformation state, and bending vibration joint is gradually deformed into maximum distortion state, trapezoidal groove lower wall start with Circular arc driving head comes into contact with, into next circulation.Similarly, if to the longitudinal vibration piezoelectric ceramic piece in first longitudinal vibration joint Apply cos (ω t), in bending vibration joint double subregion piezoelectric ceramic pieces application s (ω t) pumping signal, will make bending vibration joint around First longitudinal vibration joint rotates clockwise.Three and three driving principles with upper joint it is similar with above-mentioned principle, herein no longer into Row is tired to be stated.
Those skilled in the art can understand that unless otherwise defined, all terms used herein (including skill Art term and scientific term) there is meaning identical with the general understanding of those of ordinary skill in fields of the present invention.Also It should be understood that those terms such as defined in the general dictionary should be understood that have in the context of the prior art The consistent meaning of meaning will not be explained in an idealized or overly formal meaning and unless defined as here.
Above-described specific embodiment has carried out further the purpose of the present invention, technical scheme and beneficial effects It is described in detail, it should be understood that being not limited to this hair the foregoing is merely a specific embodiment of the invention Bright, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the present invention Protection scope within.

Claims (3)

1. a kind of sandwich piezo mechanical arm, which is characterized in that closed comprising the first longitudinal vibration joint, bending vibration joint and the second longitudinal vibration Section;
First longitudinal vibration joint, bending vibration joint, the second longitudinal vibration joint include the first to the second straight pin, two bearings, preceding Metallic matrix, the first to the second piezoelectric ceramic piece, electrode slice, grip block, rear metallic matrix and pretension bolt;
The preceding metallic matrix includes driving head, interconnecting piece and engaging portion, and the driving head is cylindrical body, and the engaging portion is length The outer wall of cube, the driving head is connected by the end face of the interconnecting piece and engaging portion one end, engaging portion other end end The threaded hole that the center in face is equipped with and the early warning bolt matches;It is logical that the center of the driving head both sides of the face is equipped with ladder Hole;
Described two bearings respectively correspond in the ladder hole that two end faces of driving head are arranged in, outer ring and the driving head It is connected;
One end of first, second straight pin, which respectively corresponds, to be fixed in the inner ring of described two bearings, and the other end is stretched Its corresponding bearing out;
Metallic matrix is cuboid after described, and one end-face is equipped with trapezoidal groove, and the trapezoidal groove center is equipped with after running through Metallic matrix, the through-hole passed through for the early warning bolt;
First piezoelectric ceramic piece, the second piezoelectric ceramic piece, electrode slice, grip block center be equipped with for the early warning bolt The through-hole passed through;
The early warning bolt sequentially passes through rear metallic matrix, grip block, the first piezoelectricity pottery from rear metallic matrix trapezoidal groove side It is threadedly coupled after tile, electrode slice, the second piezoelectric ceramic piece with the threaded hole of the preceding metallic matrix, by applying pretightning force shape At sandwich type structural;
The grip block two sides are respectively equipped with the first fixed column, the second fixed column;
The the first to the second piezoelectric ceramic piece in first longitudinal vibration joint, the second longitudinal vibration joint is all made of longitudinal vibration piezoelectric ceramics Piece, the double subregion piezoelectric ceramic pieces of the first to the second piezoelectric ceramic piece in the bending vibration joint;
The driving head in second longitudinal vibration joint protrudes into the trapezoidal groove in bending vibration joint, and the side wall of the second longitudinal vibration joint drive head It offsets with three faces of bending vibration joint trapezoidal groove;First straight pin in the second longitudinal vibration joint and the first of bending vibration joint are fixed It is equipped with rubber ring between column, between second straight pin in the second longitudinal vibration joint and second fixed column in bending vibration joint, passes through rubber The second longitudinal vibration joint and bending vibration joint are fixed in the preload of cushion rubber flexible deformation;
The driving head in the bending vibration joint protrudes into the trapezoidal groove in the first longitudinal vibration joint, and the side wall of bending vibration joint drive head and Three faces of one longitudinal vibration joint trapezoidal groove offset;First fixation of first straight pin in bending vibration joint and the first longitudinal vibration joint It is equipped with rubber ring between column, between second straight pin in bending vibration joint and second fixed column in the first longitudinal vibration joint, passes through rubber Cushion rubber flexible deformation pre-tightens fixed bending vibration joint and the first longitudinal vibration joint.
2. sandwich piezo mechanical arm according to claim 1, which is characterized in that first longitudinal vibration joint, bending vibration are closed It is section, the rear metallic matrix in the second longitudinal vibration joint, grip block, the first piezoelectric ceramic piece, electrode slice, the second piezoelectric ceramic piece, preceding It is bonded together by epoxide-resin glue between metallic matrix.
3. the driving method based on sandwich piezo mechanical arm described in claim 1, which is characterized in that comprise the steps of:
It is same by applying to double subregion piezoelectric ceramic pieces in the longitudinal vibration piezoelectric ceramic piece and bending vibration joint in the first longitudinal vibration joint The pumping signal of frequency, phase difference difference pi/2, motivates the single order longitudinal vibration mode in the first longitudinal vibration joint and the single order in bending vibration joint Bending vibration modes are made at this point, the relative movement orbit of the first longitudinal vibration joint and bending vibration joint contact interface particle is ellipse in friction It is produced relative rotation between lower first longitudinal vibration joint and bending vibration joint, bending vibration joint turns with respect to the first longitudinal vibration joint at this time for order Dynamic direction is forward direction;
Then by applying to double subregion piezoelectric ceramic pieces in the longitudinal vibration piezoelectric ceramic piece and bending vibration joint in the first longitudinal vibration joint Same frequency, phase difference difference-pi/2 pumping signal, bending vibration joint generate with respect to the first longitudinal vibration joint and rotate backward;
It is same by applying to the longitudinal vibration piezoelectric ceramic piece in the double subregion piezoelectric ceramic pieces and the second longitudinal vibration joint in bending vibration joint The pumping signal of frequency, phase difference difference pi/2, the second longitudinal vibration joint generates with respect to bending vibration joint and rotates forward;
It is same by applying to the longitudinal vibration piezoelectric ceramic piece in the double subregion piezoelectric ceramic pieces and the second longitudinal vibration joint in bending vibration joint Frequency, phase difference difference-pi/2 pumping signal, the second longitudinal vibration joint generate with respect to bending vibration joint and rotate backward.
CN201810894894.1A 2018-08-08 2018-08-08 Sandwich type piezoelectric mechanical arm and driving method thereof Active CN109245604B (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110238873A (en) * 2019-04-25 2019-09-17 浙江师范大学 A kind of orthogonal formula piezoelectricity articulation mechanism and its control method
CN111146971A (en) * 2020-02-24 2020-05-12 南京航空航天大学 Sandwich type multi-mode composite rotary piezoelectric actuator and working method thereof
CN111181439A (en) * 2020-02-24 2020-05-19 南京航空航天大学 Surface mount type rotary dual-drive piezoelectric actuator and working method thereof
CN111251285A (en) * 2020-03-25 2020-06-09 南京航空航天大学 Piezoelectric-driven two-degree-of-freedom deep sea mechanical arm and driving method thereof
CN111283669A (en) * 2020-03-27 2020-06-16 南京航空航天大学 Sandwich type piezoelectric two-degree-of-freedom mechanical arm and driving method thereof

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CN101651431A (en) * 2009-09-08 2010-02-17 哈尔滨工业大学 Cantilever longitudinal-bending composite transducer type cylindrical traveling-wave ultrasonic motor vibrator
CN105406754A (en) * 2016-01-08 2016-03-16 哈尔滨工业大学 Longitudinal-flexural-combined single-foot two-degree-of-freedom ultrasonic motor vibrator
CN208723808U (en) * 2018-08-08 2019-04-09 南京航空航天大学 A kind of sandwich piezo mechanical arm

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Publication number Priority date Publication date Assignee Title
CN101651431A (en) * 2009-09-08 2010-02-17 哈尔滨工业大学 Cantilever longitudinal-bending composite transducer type cylindrical traveling-wave ultrasonic motor vibrator
CN105406754A (en) * 2016-01-08 2016-03-16 哈尔滨工业大学 Longitudinal-flexural-combined single-foot two-degree-of-freedom ultrasonic motor vibrator
CN208723808U (en) * 2018-08-08 2019-04-09 南京航空航天大学 A kind of sandwich piezo mechanical arm

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110238873A (en) * 2019-04-25 2019-09-17 浙江师范大学 A kind of orthogonal formula piezoelectricity articulation mechanism and its control method
CN110238873B (en) * 2019-04-25 2023-12-08 浙江师范大学 Orthogonal piezoelectric joint mechanism and control method thereof
CN111146971A (en) * 2020-02-24 2020-05-12 南京航空航天大学 Sandwich type multi-mode composite rotary piezoelectric actuator and working method thereof
CN111181439A (en) * 2020-02-24 2020-05-19 南京航空航天大学 Surface mount type rotary dual-drive piezoelectric actuator and working method thereof
CN111146971B (en) * 2020-02-24 2024-05-28 南京航空航天大学 Sandwich type multi-mode composite rotary piezoelectric actuator and working method thereof
CN111181439B (en) * 2020-02-24 2024-05-28 南京航空航天大学 Patch type rotary dual-drive piezoelectric actuator and working method thereof
CN111251285A (en) * 2020-03-25 2020-06-09 南京航空航天大学 Piezoelectric-driven two-degree-of-freedom deep sea mechanical arm and driving method thereof
CN111251285B (en) * 2020-03-25 2023-10-27 南京航空航天大学 Piezoelectric-driven two-degree-of-freedom deep sea mechanical arm and driving method thereof
CN111283669A (en) * 2020-03-27 2020-06-16 南京航空航天大学 Sandwich type piezoelectric two-degree-of-freedom mechanical arm and driving method thereof
CN111283669B (en) * 2020-03-27 2022-04-22 南京航空航天大学 Sandwich type piezoelectric two-degree-of-freedom mechanical arm and driving method thereof

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