CN107171591A - A kind of planar three freedom inching gear based on herringbone structure - Google Patents

A kind of planar three freedom inching gear based on herringbone structure Download PDF

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Publication number
CN107171591A
CN107171591A CN201710418531.6A CN201710418531A CN107171591A CN 107171591 A CN107171591 A CN 107171591A CN 201710418531 A CN201710418531 A CN 201710418531A CN 107171591 A CN107171591 A CN 107171591A
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China
Prior art keywords
piezoelectric ceramics
electromagnet
3rd
locking
flexible hinge
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CN201710418531.6A
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Chinese (zh)
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CN107171591B (en
Inventor
雷俊琪
徐明龙
宋思扬
邵恕宝
张丰
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西安交通大学
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details

Abstract

A kind of planar three freedom inching gear based on herringbone structure, three mechanisms are separately constituted by flexible hinge, three identical piezoelectric ceramics, three identical electromagnet, in each of which mechanism, piezoelectric ceramics one end and electromagnet are fastenedly connected, and the other end is fixed on flexible hinge;Three mechanisms are distributed in trisection angle of circumference, are an axially symmetric structures;When the device is positioned on metal bottom surface, electromagnet plays a part of locking, and piezoelectric ceramics provides input displacement, and flexible hinge produces deformation, by the control to electromagnet and piezoelectric ceramics both end voltage, the small translation and rotation of Three Degree Of Freedom of the device on metal flat can be realized;The present invention is simple in construction, and with latch functions, start precisely, can realize free translation planar and rotation.

Description

A kind of planar three freedom inching gear based on herringbone structure

Technical field

The invention belongs to inching gear, and in particular to a kind of planar three freedom inching gear based on herringbone structure.

Background technology

The inverse electrical effect of piezoelectric ceramics, refers to when piezoelectric ceramics adds the electric field of equidirectional, piezoelectricity pottery in polarised direction Porcelain can extend along polarised direction, and it is accurate mobile that old friends replace traditional slide rail gear etc. to realize with piezoelectric ceramics, using so Type of drive not only increase mobile accuracy, also widely extend the working environment of precision fine motion device.But at present Some plane inching gears, either translation or rotation, can all be limited by structure, be difficult to realize the fine motion of Three Degree Of Freedom, Otherwise, in order to realize the fine motion of Three Degree Of Freedom, its structure and control all can be extremely complex.

The content of the invention

In order to solve the problem of above-mentioned prior art is present, it is an object of the invention to provide a kind of based on herringbone structure Planar three freedom inching gear, the micro- of Three Degree Of Freedom in plane is realized using the mutual cooperation of three pairs of piezoelectric ceramics and electromagnet Dynamic, the present invention is simple in construction, and with latch functions, start precisely, can realize free translation planar and rotation.

In order to achieve the above object, the present invention is adopted the following technical scheme that:

A kind of planar three freedom inching gear based on herringbone structure, including flexible hinge 3, the first piezoelectric ceramics 1-1, Second piezoelectric ceramics 1-2, the 3rd piezoelectric ceramics 1-3, the first electromagnet 2-1, the second electromagnet 2-2 and the 3rd electromagnet 2-3, its In, first piezoelectric ceramics 1-1 one end and the first electromagnet 2-1 are fastenedly connected, and the other end, which is fixed on flexible hinge 3, forms One mechanism, second piezoelectric ceramics 1-2 one end and the second electromagnet 2-2 are fastenedly connected, and the other end is fixed on flexible hinge 3 Second mechanism is formed, the 3rd piezoelectric ceramics 1-3 one end and the 3rd electromagnet 2-3 are fastenedly connected, and the other end is fixed in flexibility The 3rd mechanism is formed on hinge 3;Three mechanisms are in 120 ° of distributions of axis angle two-by-two, during central point is flexible hinge 3 Heart point.

The first piezoelectric ceramics 1-1, the second piezoelectric ceramics 1-2, the 3rd piezoelectric ceramics 1-3 provide input displacement, and right The applying power of flexible hinge 3;First electromagnet 2-1, the second electromagnet 2-2, the 3rd electromagnet 2-3 produce magnetic after powered up, Metal bottom surface is fixed in the presence of magnetic force, plays a part of locking.

By controlling the first electromagnet 2-1, the second electromagnet 2-2 and the 3rd electromagnet 2-3 break-make electricity condition, it can control Make the lockup state of each mechanism end;By controlling the first piezoelectric ceramics 1-1, the second piezoelectric ceramics 1-2 and the 3rd piezoelectricity to make pottery The voltage at porcelain 1-3 two ends, can control the elongation displacement of each mechanism, and the power exported in any case can act on flexible hinge Chain, brings it about deformation;Thus, by the control to voltage, each mechanism and flexible hinge cooperate, and whole device can be Desired translation micro-displacement is produced on metal bottom surface and micro-angular displacement is rotated.

A kind of planar three freedom fine motion method of described planar three freedom inching gear based on herringbone structure, when Using the center of flexible hinge 3 as the center of circle, and the reference point exported for fine motion is put with this, with the first piezoelectric ceramics 1-1 central shaft For y-axis, in this plane coordinate system, described device can complete the fine motion of three degree of freedom, can not only realize reference point Translation in x, y direction, additionally it is possible to realize reference point on some fixed position point i.e. axis on the axis of any one mechanism The rotation of the interface point of electromagnet and piezoelectric ceramics;

The most basic start principle of the device is as follows:In initial position, if a mechanism of the locking present apparatus, with to first Exemplified by electromagnet 2-1 energization lockings, after locking, being powered to the first piezoelectric ceramics 1-1 extends it, then to the second electromagnet 2- 2 and the 3rd electromagnet 2-3 be powered and make its locking, then give the first electromagnet 2-1 power-off to release locking, to the first piezoelectric ceramics 1-1 Power-off makes it recover former long, and now whole mechanism is translated to y-axis negative direction;

If the Liang Ge mechanisms of the locking present apparatus, exemplified by the second electromagnet 2-2 and the 3rd electromagnet 2-3 energization lockings, After locking, being powered to the second piezoelectric ceramics 1-2 and the 3rd piezoelectric ceramics 1-3 makes it extend a displacement, two displacements respectively Amount is identical or different, and then the second piezoelectric ceramics 1-2 and the 3rd piezoelectric ceramics 1-3 give flexible hinge 3 two power respectively, flexible Hinge 3 is deformed upon in the presence of two power, and center reference point produces the translation to some angle;Hereafter, there are two kinds of controls Mode:

First, to make reference point stop in this place and keeping output, being powered to the first electromagnet 2-1 makes its locking, gives Second electromagnet 2-2 and the 3rd electromagnet 2-3 power-off makes it release locking, and at this moment flexible hinge 3 recovers reset condition, to second Piezoelectric ceramics 1-2 and the 3rd piezoelectric ceramics 1-3 power-off, makes whole device recover original-shape, and now reference point outputs above-mentioned Translation in some angle;When the second piezoelectric ceramics 1-2 and the 3rd piezoelectric ceramics 1-3 elongation is identical, now refer to Point is translated to y-axis positive direction;

Second, an angle is rotated clockwise to make reference point around the 3rd piezoelectric ceramics 1-3 distal point, to the second electricity Magnet 2-2 power-off releases locking, and the 3rd electromagnet 2-3 recovers reset condition still in lockup state, at this moment flexible hinge 3, right Second piezoelectric ceramics 1-2 and the 3rd piezoelectric ceramics 1-3 power-off, makes whole device recover original-shape, now reference point is around the 3rd Piezoelectric ceramics 1-3 distal point has rotated clockwise an angle;

According to above-mentioned principle, adjust lockup state, start order and the elongation of three mechanisms, can realize reference point around The rotation of first piezoelectric ceramics 1-1, the second piezoelectric ceramics 1-2 or the 3rd piezoelectric ceramics 1-3 distal point, and planar not With the translation of angle, if to realize the translation of x-axis positive direction, locking the first electromagnet 2-1 first and the second electromagnet 2- 2, then the first piezoelectric ceramics 1-1 and the second piezoelectric ceramics 1-2, which is powered, makes it extend respectively, when both elongations are met During certain numerical value relation, it can make to realize translation of the reference point in x-axis positive direction;Similarly, change locking again and start is suitable Sequence, can realize translation of the reference point in x-axis negative direction.

Compared to the prior art, the invention has the advantages that:

1) present invention can realize translation of the device in x, y-axis and the rotation around any one piezoelectric ceramics distal point, Therefore the working method of the present apparatus can be set to step-by-step movement, the translation or rotation of big stroke.

2) present invention can realize translation of the reference point on the low-angle for deviateing some mechanism axis, be turned by coordinate system Change and the elongation to each mechanism and lockup state locking, in theory by multiple start, reference point can be realized flat Moving freely in face.

3) present invention uses herringbone, the structure of 120 ° of distributions of axis angle two-by-two, and stability is high, and precision is high.

Brief description of the drawings

Fig. 1 is schematic perspective view of the present invention.

Fig. 2 is right view of the present invention.

Fig. 3 is the schematic diagram that apparatus of the present invention are translated in y-axis negative direction.

After Fig. 4 is the present invention wherein two piezoelectric ceramics elongations, the displacement state of the reference point of former center.

Fig. 5 is the schematic diagram that apparatus of the present invention are rotated around the 3rd piezoelectric ceramics distal point.

Embodiment

The present invention is described in further detail below in conjunction with the drawings and specific embodiments.

As shown in figures 1 and 3, it is logical to the first piezoelectric ceramics 1-1 to the first electromagnet 2-1 energization lockings in initial position Electricity extends it, and being then powered to the second electromagnet 2-2 and the 3rd electromagnet 2-3 makes its locking, then disconnected to the first electromagnet 2-1 Electricity, makes it recover former long, now whole mechanism is translated to y-axis negative direction to the first piezoelectric ceramics 1-1 power-off.

As shown in Figure 1 and Figure 4, in initial position, to the second electromagnet 2-2 and the 3rd electromagnet 2-3 energization lockings, to Two piezoelectric ceramics 1-2 and the 3rd piezoelectric ceramics 1-3, which are powered, makes it extend identical displacement, i.e. L1=L2, then the second piezoelectricity Ceramic 1-2 and the 3rd piezoelectric ceramics 1-3 give flexible hinge 3 two power respectively, and the two power sizes are identical, and flexible hinge 3 exists Deformed upon in the presence of two power, now reference point is translated to y-axis positive direction, being powered to the first electromagnet 2-1 makes its locking, Locking is released to the second electromagnet 2-2 and the 3rd electromagnet 2-3 power-off, to the second piezoelectric ceramics 1-2 and the 3rd piezoelectric ceramics 1-3 Power-off makes it recover former long, and now, whole device is translated to y-axis positive direction.

As shown in Figure 1 and Figure 4, in initial position, to the first electromagnet 2-1 and the second electromagnet 2-2 energization lockings, to One piezoelectric ceramics 1-1 and the second piezoelectric ceramics 1-2, which is powered, extends it, and such as Fig. 4 can list deflection angle β, the displacement of reference point A and L (length of the center to piezoelectric ceramics distal point), elongation L1 and L2 numerical relation, when the timings of L mono-, β, a and L1, L2 There is the numerical relation of determination:

When both elongations meet certain numerical value relation, it can make to realize translation of the reference point in x-axis positive direction; It is similar, in initial position, to the first electromagnet 2-1 and the 3rd electromagnet 2-3 energization lockings, to the first piezoelectric ceramics 1-1 and 3rd piezoelectric ceramics 1-3, which is powered, extends it, when both elongations meet certain numerical value relation, can make to realize reference point Translation in x-axis negative direction;The translation in x-axis positive direction is realized, only β=30 ° need to be made, the flat of x-axis negative direction is realized Move, only need to make β=- 30 °, it is known that target translational movement is a and original length L, substitutes into above-mentioned equation group, can solve two elongations L1 and L2.

As shown in Figure 1 and Figure 5, in initial position, to the second electromagnet 2-2 and the 3rd electromagnet 2-3 energization lockings, to Two piezoelectric ceramics 1-2 and the 3rd piezoelectric ceramics 1-3, which are powered, makes it extend a displacement respectively, two displacement differences, then Second piezoelectric ceramics 1-2 and the 3rd piezoelectric ceramics 1-3 give flexible hinge 3 two power respectively, work of the flexible hinge 3 in two power Deformed upon under, center reference point produces the translation in some angle;Locking is released to the second electromagnet 2-2 power-off, the Three electromagnet 2-3 recover reset condition still in lockup state, at this moment flexible hinge 3, and the second piezoelectric ceramics 1-2 and the 3rd is pressed Electroceramics 1-3 is powered off, and whole device is recovered original-shape, now distal point up time of the reference point around the 3rd piezoelectric ceramics 1-3 Pin have rotated an angle.

Claims (4)

1. a kind of planar three freedom inching gear based on herringbone structure, it is characterised in that:Including flexible hinge (3), first Piezoelectric ceramics (1-1), the second piezoelectric ceramics (1-2), the 3rd piezoelectric ceramics (1-3), the first electromagnet (2-1), the second electromagnet (2-2) and the 3rd electromagnet (2-3), wherein, the first piezoelectric ceramics (1-1) one end and the first electromagnet (2-1) are fastenedly connected, separately One end is fixed in first mechanism of formation, the second piezoelectric ceramics (1-2) one end and the second electromagnet (2- on flexible hinge (3) 2) be fastenedly connected, the other end is fixed on flexible hinge (3) second mechanism of formation, the 3rd piezoelectric ceramics (1-3) one end and 3rd electromagnet (2-3) is fastenedly connected, and the other end is fixed in the 3rd mechanism of formation on flexible hinge (3);Three mechanisms are in 120 ° of distributions of axis angle two-by-two, central point is the central point of flexible hinge (3).
2. a kind of planar three freedom inching gear based on herringbone structure according to claim 1, it is characterised in that:Institute State the first piezoelectric ceramics (1-1), the second piezoelectric ceramics (1-2), the 3rd piezoelectric ceramics (1-3) and input displacement is provided, and to flexibility Hinge (3) applying power;First electromagnet (2-1), the second electromagnet (2-2), the 3rd electromagnet (2-3) produce magnetic after powered up Property, metal bottom surface is fixed in the presence of magnetic force, plays a part of locking.
3. a kind of planar three freedom inching gear based on herringbone structure according to claim 1, it is characterised in that:It is logical The break-make electricity condition of the first electromagnet of control (2-1), the second electromagnet (2-2) and the 3rd electromagnet (2-3) is crossed, can be controlled every The lockup state of individual mechanism end;By controlling the first piezoelectric ceramics (1-1), the second piezoelectric ceramics (1-2) and the 3rd piezoelectricity to make pottery The voltage at porcelain (1-3) two ends, can control the elongation displacement of each mechanism, and the power exported in any case can act on flexibility Hinge, brings it about deformation;Thus, by the control to voltage, each mechanism and flexible hinge cooperate, and whole device can Desired translation micro-displacement is produced on metal bottom surface and micro-angular displacement is rotated.
4. a kind of planar three freedom fine motion of planar three freedom inching gear based on herringbone structure described in claim 1 Method, it is characterised in that:The reference point exported for fine motion is put when using the center of flexible hinge (3) as the center of circle, and with this, with first The central shaft of piezoelectric ceramics (1-1) is y-axis, and in this plane coordinate system, described device can complete the micro- of three degree of freedom It is dynamic, translation of the reference point in x, y direction can not only be realized, additionally it is possible to realize reference point on the axis of any one mechanism certain Individual fixed position point is the rotation of the interface point of electromagnet and piezoelectric ceramics on axis;
The most basic start principle of the device is as follows:In initial position, if a mechanism of the locking present apparatus, with to the first electromagnetism Exemplified by iron (2-1) energization locking, after locking, being powered to the first piezoelectric ceramics (1-1) extends it, then to the second electromagnet (2-2) and the 3rd electromagnet (2-3), which are powered, makes its locking, then releases locking to the first electromagnet (2-1) power-off, to the first piezoelectricity Ceramic (1-1) power-off makes it recover former long, and now whole mechanism is translated to y-axis negative direction;
If the Liang Ge mechanisms of the locking present apparatus, exemplified by the second electromagnet (2-2) and the 3rd electromagnet (2-3) energization locking, After locking, being powered to the second piezoelectric ceramics (1-2) and the 3rd piezoelectric ceramics (1-3) makes it extend a displacement, two respectively Displacement is identical or different, and then the second piezoelectric ceramics (1-2) and the 3rd piezoelectric ceramics (1-3) give flexible hinge (3) respectively Two power, flexible hinge (3) is deformed upon in the presence of two power, and center reference point produces the translation to some angle;This Afterwards, there are two kinds of control modes:
First, to make reference point stop in this place and keeping output, being powered to the first electromagnet (2-1) makes its locking, to the Two electromagnet (2-2) and the power-off of the 3rd electromagnet (2-3) make it release locking, and at this moment flexible hinge (3) recovers reset condition, right Second piezoelectric ceramics (1-2) and the power-off of the 3rd piezoelectric ceramics (1-3), make whole device recover original-shape, now reference point is defeated The translation gone out in some above-mentioned angle;When the second piezoelectric ceramics (1-2) is identical with the elongation of the 3rd piezoelectric ceramics (1-3) When, now reference point is translated to y-axis positive direction;
Second, an angle is rotated clockwise to make reference point around the distal point of the 3rd piezoelectric ceramics (1-3), to the second electromagnetism Iron (2-2) power-off releases locking, and the 3rd electromagnet (2-3) recovers original shape still in lockup state, at this moment flexible hinge (3) State, powers off to the second piezoelectric ceramics (1-2) and the 3rd piezoelectric ceramics (1-3), whole device is recovered original-shape, now refer to O'clock an angle is rotated clockwise around the distal point of the 3rd piezoelectric ceramics (1-3);
According to above-mentioned principle, lockup state, start order and the elongation of three mechanisms are adjusted, reference point can be realized around first The rotation of the distal point of piezoelectric ceramics (1-1), the second piezoelectric ceramics (1-2) or the 3rd piezoelectric ceramics (1-3), and planar The translation of different angles, if to realize the translation of x-axis positive direction, the electromagnet of locking first (2-1) and the second electromagnetism first Iron (2-2), then the first piezoelectric ceramics (1-1) and the second piezoelectric ceramics (1-2), which are powered, makes it extend respectively, when both When elongation meets certain numerical value relation, it can make to realize translation of the reference point in x-axis positive direction;Similarly, lock is changed again Only with start order, translation of the reference point in x-axis negative direction can be realized.
CN201710418531.6A 2017-06-06 2017-06-06 A kind of fine motion method of the planar three freedom inching gear based on herringbone structure CN107171591B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109995267A (en) * 2019-04-24 2019-07-09 西安交通大学 Straight line-shearing piezoelectric ceramics cooperation driving stepping rotation apparatus and method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1988740A1 (en) * 2007-05-03 2008-11-05 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Sound generator
JP2008271331A (en) * 2007-04-23 2008-11-06 Nippon Dempa Kogyo Co Ltd Manufacturing method of piezoelectric vibrator, piezoelectric vibrating element, piezoelectric vibrator and oscillator
DE102007049023A1 (en) * 2007-10-11 2009-04-16 Technische Universität Darmstadt Device and method for emulation of an actuator
CN205490230U (en) * 2016-01-23 2016-08-17 山东理工大学 Grand little compound platform with accurate motion function
CN106695750A (en) * 2015-11-18 2017-05-24 哈尔滨工大天才智能科技有限公司 Micro-miniature robot model driven through piezoelectric ceramics

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008271331A (en) * 2007-04-23 2008-11-06 Nippon Dempa Kogyo Co Ltd Manufacturing method of piezoelectric vibrator, piezoelectric vibrating element, piezoelectric vibrator and oscillator
EP1988740A1 (en) * 2007-05-03 2008-11-05 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Sound generator
DE102007049023A1 (en) * 2007-10-11 2009-04-16 Technische Universität Darmstadt Device and method for emulation of an actuator
CN106695750A (en) * 2015-11-18 2017-05-24 哈尔滨工大天才智能科技有限公司 Micro-miniature robot model driven through piezoelectric ceramics
CN205490230U (en) * 2016-01-23 2016-08-17 山东理工大学 Grand little compound platform with accurate motion function

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109995267A (en) * 2019-04-24 2019-07-09 西安交通大学 Straight line-shearing piezoelectric ceramics cooperation driving stepping rotation apparatus and method

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