CN112865592B - Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof - Google Patents
Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof Download PDFInfo
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Abstract
The invention discloses a parallel three-degree-of-freedom precise micro-motion mechanism with a composite differential branched chain and a working method thereof. The method has the characteristics of strong bearing capacity and strong anti-interference capacity.
Description
Technical Field
The invention relates to the technical field of micro-positioning platforms, in particular to a parallel three-degree-of-freedom precision micro-motion mechanism with composite differential branched chains and a working method thereof.
Background
The flexible hinge mechanism is usually driven by piezoelectric ceramics, and the output end generates set motion by means of elastic deformation of materials. Therefore, the flexible hinge mechanism often has the advantages of friction-free transmission, zero-clearance transmission and the like, and can realize precise, efficient and high-frequency motion of an output end. Based on the advantages, the flexible hinge mechanism has more applications in the high-end fields of micro-nano manufacturing, electron microscopes, micro-nano clamping and the like.
The existing three-degree-of-freedom translational flexible hinge mechanism mainly comprises a parallel connection type, a series connection and parallel connection type and a series connection type according to the division of the motion principle of the hinge mechanism. Generally, the control difficulty of the device is gradually reduced from parallel connection to series connection, but the movement precision is also reduced. Functionally, the degree of symmetry of the mechanism structure determines the distribution of mechanical properties thereof, resulting in an increase in the operating accuracy of the mechanism as the symmetry of the structure increases. In addition, in order to improve the operation precision of the device, a displacement guide structure is often used, a closed-loop control function is adopted, the rigidity in a non-functional direction is improved, and the parasitic motion of the device is reduced. Displacement amplification mechanisms are often used to extend the range of motion of the device, and common displacement amplification mechanisms include lever, bridge and smith-rao mechanisms. In addition, the mass of the moving part of the mechanism has a great influence on the dynamic characteristics of the mechanism, and as the moving mass increases, the first-order natural frequency of the mechanism decreases. The common three-degree-of-freedom parallel mechanism is realized by adopting a ball hinge branched chain, but the application of the ball hinge structure seriously influences the bearing capacity, the anti-interference capacity, the dynamic performance and the like of the device.
Disclosure of Invention
The invention aims to provide a parallel three-degree-of-freedom precise micro-motion mechanism with a composite differential branched chain, aiming at the problems of the three-degree-of-freedom mechanism in motion range, motion precision and operation frequency.
The invention also aims to provide a working method of the parallel three-degree-of-freedom precision micro-motion mechanism.
The technical scheme adopted for realizing the purpose of the invention is as follows:
a parallel three-freedom-degree precise micro-motion mechanism with composite differential branched chains comprises three groups of flexible driving units and an output block, wherein the output block is positioned at the central position of the three groups of flexible driving units,
each group of flexible driving units comprises a piezoelectric ceramic driver and a driving block driven by the piezoelectric ceramic driver, two sides of the driving block are respectively positioned by a parallelogram flexible hinge structure, the edges of every two adjacent driving blocks are connected to a middle block through a Z-shaped hinge, and each middle block is connected to the output block through a semicircular hinge.
In the technical scheme, the piezoelectric ceramic drive device further comprises a frame, three mounting grooves are formed in the frame, a piezoelectric ceramic driver is mounted in each mounting groove, and two sides of the drive block are fixed on the frame through parallelogram flexible hinge structures respectively.
In the above technical solution, the output block is located right above the rack.
In the above technical solution, the rack is provided with three mounting grooves, which are respectively a first mounting groove, a second mounting groove and a third mounting groove, for mounting a first piezoelectric ceramic driver, a second piezoelectric ceramic driver and a third piezoelectric ceramic driver;
the end part of the first mounting groove is provided with a first driving block, the first driving block is driven by a first piezoelectric ceramic driver, and two sides of the first driving block are fixed on the rack through a parallelogram flexible hinge structure respectively;
a second driving block is arranged at the end part of the second mounting groove and driven by a second piezoelectric ceramic driver, and two sides of the second driving block are fixed on the rack through a parallelogram flexible hinge structure respectively;
a third driving block is arranged at the end part of the third mounting groove and driven by a third piezoelectric ceramic driver, and two sides of the third driving block are fixed on the rack through a parallelogram flexible hinge structure respectively;
the six Z-shaped hinges are respectively a first Z-shaped hinge, a second Z-shaped hinge, a third Z-shaped hinge, a fourth Z-shaped hinge, a fifth Z-shaped hinge and a sixth Z-shaped hinge, the first Z-shaped hinge and the second Z-shaped hinge are respectively fixed on two sides of the first driving block, the third Z-shaped hinge and the fourth Z-shaped hinge are respectively fixed on two sides of the second driving block, the fifth Z-shaped hinge and the sixth Z-shaped hinge are respectively fixed on two sides of the third driving block, the other ends of the first Z-shaped hinge and the sixth Z-shaped hinge are respectively fixed on two ends of the first middle block, the other ends of the fifth Z-shaped hinge and the fourth Z-shaped hinge are respectively fixed on two ends of the second middle block, and the other ends of the third Z-shaped hinge and the second Z-shaped hinge are respectively fixed on two ends of the third middle block;
the number of the semicircular hinges is three, the semicircular hinges are respectively a first semicircular hinge, a second semicircular hinge and a third semicircular hinge, the first middle block is fixed on the edge of the output block through the first semicircular hinge, the second middle block is fixed on the edge of the output block through the second semicircular hinge, and the third middle block is fixed on the edge of the output block through the third semicircular hinge.
In the above technical scheme, the output block is a hexagonal block, and one ends of the three middle blocks are fixed on three edges of a hexagon at intervals.
In the above technical scheme, the side surface of each mounting groove is provided with a piezoelectric wire arranging groove communicated with the mounting groove.
In the technical scheme, the tail part of each mounting groove is provided with a piezoelectric pre-tightening hole, and a compression bolt penetrates through the piezoelectric pre-tightening holes to push the piezoelectric ceramic driver to be tightly connected with the driving block to realize pre-tightening.
In the technical scheme, the Z-shaped hinge is composed of two Z-shaped connecting plates, the semicircular hinge is composed of two approximately quarter arc plates, and the parallelogram flexible hinge is composed of two linear connecting plates.
In the technical scheme, every two Z-shaped hinges, the middle block positioned in the middle of the Z-shaped hinges and the semicircular hinges connected to the middle block form a composite differential branched chain, so that the force decomposition in three directions of XYZ can be realized,
on the other hand, the working mode of the parallel three-degree-of-freedom precision micromotion mechanism with the composite differential branched chain is characterized in that when the first piezoelectric ceramic driver is stretched and the second piezoelectric ceramic driver and the third piezoelectric ceramic driver are contracted according to a certain motion rule, the output block moves along the x direction; when the first piezoelectric ceramic driver and the third piezoelectric ceramic driver stretch according to a certain motion rule and the second piezoelectric ceramic driver contracts, the output block moves along the y direction; when the first piezoelectric ceramic driver, the second piezoelectric ceramic driver and the third piezoelectric ceramic driver simultaneously extend or contract, the output block moves along the z direction.
Compared with the prior art, the invention has the beneficial effects that:
1. the parallel type three-dimensional vibration device adopts a parallel type symmetrical structure, realizes the adjustment of the operation range through the Z-shaped hinge, and has higher motion precision compared with the traditional three-dimensional vibration device.
2. The composite differential branched chain is adopted to replace the traditional parallel three-dimensional translation mechanism branched chain (the branched chain contains a micro-column), and the straight beam is adopted to replace the micro-column, so that the parallel three-dimensional translation mechanism has the characteristics of strong bearing capacity and strong anti-interference capacity.
3. The piezoelectric ceramic driver of the mechanism is completely arranged outside the mechanism and does not move along with the device, so that the mechanism has better dynamic performance and higher first-order natural frequency.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic diagram of the distribution structure of the piezoelectric ceramic actuator.
FIG. 3 is a schematic diagram of a composite differential branch.
Fig. 4 is an enlarged view of the core location in fig. 1.
Fig. 5 is a cloud of unidirectional force displacement.
FIG. 6 is a cloud of two-way force displacement.
Fig. 7 is a cloud of three-way forcing displacements.
FIG. 8 is a finite element simulation of a kinetic model of first order natural frequencies.
FIG. 9 is a finite element simulation of a dynamic model of second order natural frequencies.
FIG. 10 is a finite element simulation of a kinetic model of third order natural frequencies.
FIG. 11 is a finite element simulation of a kinetic model of the fourth order natural frequency.
In the figure: 1-a frame, 2-a first mounting groove, 3-a second mounting groove, 4-a third mounting groove, 5-a first piezoceramic driver, 6-a second piezoceramic driver, 7-a third piezoceramic driver, 8-a first drive block, 9-a parallelogram flexible hinge, 10-a second drive block, 11-a third drive block, 12-a first zigzag hinge, 13-a second zigzag hinge, 14-a third zigzag hinge, 15-a fourth zigzag hinge, 16-a fifth zigzag hinge, 17-a sixth zigzag hinge, 18-a first intermediate block, 19-a piezoelectric bussing groove, 20-a third intermediate block, 21-a first semicircular hinge, 22-a second semicircular hinge, 23-a third semicircular hinge, 24-output block
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example 1
A parallel three-freedom-degree precise micro-motion mechanism with composite differential branched chains comprises three groups of flexible driving units and an output block 24, wherein the output block 24 is positioned at the central position of the three groups of flexible driving units,
each group of flexible driving units comprises a piezoelectric ceramic driver and a driving block driven by the piezoelectric ceramic driver, two sides of the driving block are respectively positioned by a parallelogram flexible hinge 9 structure, the edges of every two adjacent driving blocks are connected to a middle block through a Z-shaped hinge, and each middle block is connected to the output block 24 through a semicircular hinge.
Preferably, the parallel three-degree-of-freedom precision micromotion mechanism further comprises a frame 1, three mounting grooves are formed in the frame 1, a piezoelectric ceramic driver is mounted in each mounting groove, and two sides of the driving block are fixed on the frame 1 through a parallelogram flexible hinge 9 structure respectively. The output block 24 is located directly above the gantry 1.
As shown in FIG. 3, every two zigzag hinges, the middle block located in the middle of the zigzag hinges and the semicircular hinges connected to the middle block form a composite differential branched chain, so that the force decomposition in the three directions of XYZ can be realized, and the force differential in the three directions can be realized.
The piezoelectric ceramic drivers respectively drive the blocks to move along the axial directions of the piezoelectric ceramic drivers, the parallelogram flexible hinge 9 structure plays a role in motion guiding, the Z-shaped hinges are connected to play a role in motion decomposition, and the Z-shaped hinges have a displacement adjusting function, so that the motion displacement of the output block 24 is amplified or reduced. The intermediate block is connected to the output block 24 by a semi-circular hinge which facilitates the output stiffness of the lift device relative to a zig-zag hinge.
The Z-shaped hinge is composed of two Z-shaped connecting plates, the semicircular hinge is composed of two approximately quarter arc plates, and the parallelogram flexible hinge is composed of two linear connecting plates.
Preferably, the rack 1 is provided with three mounting grooves, namely a first mounting groove 2, a second mounting groove 3 and a third mounting groove 4, for mounting a first piezoelectric ceramic driver 5, a second piezoelectric ceramic driver 6 and a third piezoelectric ceramic driver 7;
a first driving block 8 is arranged at the end part of the first mounting groove 2, the first driving block 8 is driven by a first piezoelectric ceramic driver 5, and two sides of the first driving block 8 are respectively fixed on the rack 1 through a parallelogram flexible hinge 9 structure;
a second driving block 10 is arranged at the end part of the second mounting groove 3, the second driving block 10 is driven by a second piezoelectric ceramic driver 6, and two sides of the second driving block 10 are respectively fixed on the rack 1 through a parallelogram flexible hinge 9 structure;
a third driving block 11 is arranged at the end part of the third mounting groove 4, the third driving block 11 is driven by a third piezoelectric ceramic driver 7, and two sides of the third driving block 11 are respectively fixed on the rack 1 through a parallelogram flexible hinge 9 structure;
six zigzag hinges are arranged, namely a first zigzag hinge 12, a second zigzag hinge 13, a third zigzag hinge 14, a fourth zigzag hinge 15, a fifth zigzag hinge 16, a sixth zigzag hinge 17, a first zigzag hinge 12, second zigzag hinges 13 are respectively fixed on two sides of the first driving block 8, third zigzag hinges 14 and fourth zigzag hinges 15 are respectively fixed on two sides of the second driving block 10, fifth zigzag hinges 16 and sixth zigzag hinges 17 are respectively fixed on two sides of the third driving block 11, the other ends of the first zigzag hinges 12 and sixth zigzag hinges 17 are respectively fixed on two ends of a first intermediate block 18, the other ends of the fifth zigzag hinges 16 and fourth zigzag hinges 15 are respectively fixed on two ends of a second intermediate block 19, and the other ends of the third zigzag hinges 14 and second zigzag hinges 13 are respectively fixed on two ends of a third intermediate block 20;
the number of the semicircular hinges is three, the number of the semicircular hinges is a first semicircular hinge 21, a second semicircular hinge 22 and a third semicircular hinge 23, the first middle block 18 is fixed on the edge of the output block 24 through the first semicircular hinge 21, the second middle block is fixed on the edge of the output block 24 through the second semicircular hinge 22, and the third middle block 20 is fixed on the edge of the output block 24 through the third semicircular hinge 23.
More preferably, the output block 24 is a hexagonal block, and one end of each of the three middle blocks is fixed to three edges of the hexagon at intervals.
Preferably, the side surface of each mounting groove is provided with a piezoelectric wire arranging groove 19 communicated with the mounting groove for placing a connecting wire of the piezoelectric ceramic driver.
Preferably, the tail part of each mounting groove is provided with a piezoelectric pre-tightening hole, and a compression bolt penetrates through the piezoelectric pre-tightening holes to push the piezoelectric ceramic driver to be tightly connected with the driving block to realize pre-tightening.
Example 2
The working mode of the parallel three-degree-of-freedom precision micromotion mechanism of the composite differential branched chain as described in embodiment 1 is as follows:
when the first piezoelectric ceramic driver 5 stretches and the second piezoelectric ceramic driver 6 and the third piezoelectric ceramic driver 7 contract according to a certain motion rule, the output block 24 moves along the x direction; when the first piezoelectric ceramic driver 5 and the third piezoelectric ceramic driver 7 extend according to a certain motion rule and the second piezoelectric ceramic driver 6 contracts, the output block 24 moves along the y direction; when the first piezoceramic driver 5, the second piezoceramic driver 6 and the third piezoceramic driver 7 simultaneously expand or contract, the output block 24 moves in the z direction.
Example 3
3.1 statics Properties
For the convenience of simulation, a core structure is picked from the parallel three-degree-of-freedom precise micro-motion mechanism. The thickness b of the hinge of the three-dimensional vibration device is 1mm, and the piezoelectric driver is arranged perpendicular to the first driving block 8, the second driving block 10 and the third driving block 11.
A voltage is applied to the first driving mass 8, and the first driving mass 8 moves in the piezoelectric direction. To calculate the device input stiffness, a 100N force was applied to the first drive mass 8, and the resulting displacement cloud was shown in fig. 5. The first driving mass 8 displacement was 28.5 μm and the input stiffness was 3.509N/μm. The output mass 24 has moved 16.375 μm in the y-direction and 4.62 μm in the z-direction.
The displacement cloud obtained by applying 100N force to the first and second driving blocks 8, 10 is shown in fig. 6. The displacements of the first and second driving masses 8 and 10 are 24.436 μm. The output block 24 was moved 14.155 μm in the x-direction, 8.371 μm in the y-direction and 9.001 μm in the z-direction.
The 100N forces are applied to the first, second and third driver blocks 8, 10, 11, respectively, resulting in a displacement cloud as shown in fig. 7. The first, second and third drive blocks 8, 10, 11 move 20.602 μm in block and the output block 24 moves 12.203 μm in the z-direction.
Through the statics performance, the output platform of the device can realize translational motion in different directions under the driving of the three piezoelectric ceramic drivers, and the input rigidity of the device is small, so that the piezoelectric ceramic can work safely and stably.
3.2 dynamic Properties
The main performance parameters of the three-degree-of-freedom precision micro-motion mechanism comprise the precision of an operation range, the working frequency and the like. Especially, the natural frequency often determines the working efficiency of the vibration device, for example, vibration-assisted machining, and the vibration frequency of the three-degree-of-freedom precision micro-motion mechanism can effectively improve the machining efficiency. The first four orders of natural frequencies are analyzed by a finite element method. Respectively applying full displacement constraint on the fixed arc of the device, selecting an aluminum alloy (65Mn) material, and setting the material density to 2700kg/m3. The first four natural frequencies of the device were simulated to be 2277.9Hz, 2281.7Hz, 2770Hz and 4154Hz, respectively. The first four orders of the kinetic model finite element simulations are shown in FIGS. 8-11. By virtue of the dynamic property, the first-order natural frequency of the device is higher, and the available operating frequency is higherThe bandwidth of the vibration sensor is large, and the vibration sensor is particularly suitable for high-frequency vibration occasions.
Spatially relative terms, such as "upper," "lower," "left," "right," and the like, may be used in the embodiments to describe one element or feature's relationship to another element or feature as illustrated in the figures for ease of description. It will be understood that the spatial terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "lower" can encompass both an upper and a lower orientation. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
Moreover, relational terms such as "first" and "second," and the like, may be used solely to distinguish one element from another element having the same name, without necessarily requiring or implying any actual such relationship or order between such elements.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (8)
1. A parallel three-degree-of-freedom precise micro-motion mechanism with composite differential branched chains is characterized by comprising a frame, three groups of flexible driving units and an output block, wherein the output block is positioned at the central position of the three groups of flexible driving units,
each group of flexible driving units comprises a piezoelectric ceramic driver and a driving block driven by the piezoelectric ceramic driver, two sides of the driving block are respectively positioned by a parallelogram flexible hinge structure, the edges of every two adjacent driving blocks are connected to a middle block through a Z-shaped hinge, and each middle block is connected to the output block through a semicircular hinge;
three mounting grooves are formed in the rack, a piezoelectric ceramic driver is mounted in each mounting groove, and two sides of the driving block are fixed on the rack through a parallelogram flexible hinge structure respectively;
the three mounting grooves are respectively a first mounting groove, a second mounting groove and a third mounting groove and are respectively used for mounting a first piezoelectric ceramic driver, a second piezoelectric ceramic driver and a third piezoelectric ceramic driver;
the end part of the first mounting groove is provided with a first driving block, the first driving block is driven by a first piezoelectric ceramic driver, and two sides of the first driving block are fixed on the rack through a parallelogram flexible hinge structure respectively;
a second driving block is arranged at the end part of the second mounting groove and driven by a second piezoelectric ceramic driver, and two sides of the second driving block are fixed on the rack through a parallelogram flexible hinge structure respectively;
a third driving block is arranged at the end part of the third mounting groove and driven by a third piezoelectric ceramic driver, and two sides of the third driving block are fixed on the rack through a parallelogram flexible hinge structure respectively;
the six Z-shaped hinges are respectively a first Z-shaped hinge, a second Z-shaped hinge, a third Z-shaped hinge, a fourth Z-shaped hinge, a fifth Z-shaped hinge and a sixth Z-shaped hinge, the first Z-shaped hinge and the second Z-shaped hinge are respectively fixed on two sides of the first driving block, the third Z-shaped hinge and the fourth Z-shaped hinge are respectively fixed on two sides of the second driving block, the fifth Z-shaped hinge and the sixth Z-shaped hinge are respectively fixed on two sides of the third driving block, the other ends of the first Z-shaped hinge and the sixth Z-shaped hinge are respectively fixed on two ends of the first middle block, the other ends of the fifth Z-shaped hinge and the fourth Z-shaped hinge are respectively fixed on two ends of the second middle block, and the other ends of the third Z-shaped hinge and the second Z-shaped hinge are respectively fixed on two ends of the third middle block;
the number of the semicircular hinges is three, the semicircular hinges are respectively a first semicircular hinge, a second semicircular hinge and a third semicircular hinge, the first middle block is fixed on the edge of the output block through the first semicircular hinge, the second middle block is fixed on the edge of the output block through the second semicircular hinge, and the third middle block is fixed on the edge of the output block through the third semicircular hinge.
2. A parallel three-degree-of-freedom precision micromotion mechanism with composite differential branched chains as claimed in claim 1, wherein the output block is located right above the frame.
3. The parallel three-degree-of-freedom precision micromotion mechanism with the composite differential branched chain as claimed in claim 1, wherein the output block is a hexagonal block, and one ends of three intermediate blocks are fixed on three edges of the hexagon at intervals.
4. A parallel three-degree-of-freedom precision micromotion mechanism with composite differential branched chains as claimed in claim 1, wherein the side of each mounting groove is provided with a piezoelectric cable groove communicated with the mounting groove.
5. The parallel three-degree-of-freedom precision micromotion mechanism with the composite differential branched chain as claimed in claim 1, wherein a piezoelectric pre-tightening hole is arranged at the tail of each mounting groove, and a compression bolt penetrates through the piezoelectric pre-tightening hole to push the piezoelectric ceramic driver to be tightly connected with the driving block to realize pre-tightening.
6. A parallel three-degree-of-freedom precision micromotion mechanism with composite differential branched chains as claimed in claim 1, wherein the zigzag hinge is composed of two zigzag connecting plates, the semicircular hinge is composed of two nearly quarter circular arc plates, and the parallelogram flexible hinge is composed of two straight connecting plates.
7. A parallel three-degree-of-freedom precision micromotion mechanism with composite differential branched chains as claimed in claim 1, wherein each two z-shaped hinges, the middle block located in the middle of the z-shaped hinges and the semicircular hinge connected to the middle block form a composite differential branched chain, which can realize force decomposition in XYZ three directions.
8. A working mode of a parallel three-degree-of-freedom precision micromotion mechanism with composite differential branched chains as in any one of claims 1 to 7, wherein when the first piezoelectric ceramic driver is stretched and the second piezoelectric ceramic driver and the third piezoelectric ceramic driver are contracted according to a certain motion rule, the output block moves along the x direction; when the first piezoelectric ceramic driver and the third piezoelectric ceramic driver stretch according to a certain motion rule and the second piezoelectric ceramic driver contracts, the output block moves along the y direction; when the first piezoelectric ceramic driver, the second piezoelectric ceramic driver and the third piezoelectric ceramic driver simultaneously extend or contract, the output block moves along the z direction.
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| TW431249U (en) * | 1999-04-23 | 2001-04-21 | Jang Suo Hung | A single layer three degrees-of-freedom micro-positioning stage |
| JP2005279798A (en) * | 2004-03-29 | 2005-10-13 | Taiheiyo Cement Corp | Link of parallel link apparatus, and parallel link apparatus |
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| CN103021472A (en) * | 2012-12-03 | 2013-04-03 | 天津大学 | Plane parallel type three-freedom-degree precise positioning work table |
| CN103727364A (en) * | 2014-01-03 | 2014-04-16 | 天津大学 | Three-freedom-degree precision locating platform |
| CN204087810U (en) * | 2014-09-19 | 2015-01-07 | 南京工程学院 | The parallel institution that Hydrauservo System and piezoelectric ceramic actuator drive jointly |
| CN205490230U (en) * | 2016-01-23 | 2016-08-17 | 山东理工大学 | Grand little compound platform with accurate motion function |
| CN106965133A (en) * | 2017-05-11 | 2017-07-21 | 天津大学 | A kind of Three Degree Of Freedom locating platform of stiffness variable |
| CN108615548A (en) * | 2018-03-16 | 2018-10-02 | 天津大学 | Novel three freedom meek parallel precise locating platform |
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