CN202964648U - Displacement sensor based two-dimension micropositioner - Google Patents
Displacement sensor based two-dimension micropositioner Download PDFInfo
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- CN202964648U CN202964648U CN 201220721478 CN201220721478U CN202964648U CN 202964648 U CN202964648 U CN 202964648U CN 201220721478 CN201220721478 CN 201220721478 CN 201220721478 U CN201220721478 U CN 201220721478U CN 202964648 U CN202964648 U CN 202964648U
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Abstract
The utility model discloses a displacement sensor based two-dimension micropositioner which comprises a two-dimensional driving working platform, a two-dimensional displacement sensor and a connecting plate. The two-dimensional driving working platform comprises a micropositioner base body, a sensor connecting platform, piezoelectric ceramic holding areas and a lever magnifying mechanism are arranged in the micropositioner base body, the two-dimensional displacement sensor is a two-dimensional comb teeth displacement sensor and comprises a sensor base body, a connecting block and sensor comb teeth detection areas, the connecting block is positioned in the middle of the sensor base body and connected with the sensor connecting platform, and the sensor comb teeth detection areas are connected with the sensor base body and the connecting block. The two-dimension micropositioner is large in stroke and capable of achieving full-closed loop control, and has the advantages of compact structure, small size, high integration degree and high precision, decoupling is achieved effectively in the two-dimensional detection aspect, and accordingly application of the micropositioner in the structure becomes wider and wider.
Description
Technical field
The utility model relates to the prototype with displacement resolution technical field, particularly relates to a kind of prototype with displacement resolution based on displacement transducer.
Background technology
Little actuation techniques is the important content of MEMS research, be applied to the fields such as accurate automatic control and fine operation, the direct key link of impact precision, Ultra-precision machining level, accurate measurement level and the super large-scale integration level of production plays an important role in the development of the research of MEMS and microminiaturized product.
Little driven machine people has a wide range of applications in fields such as little Assembly of the parts, MEMS (MEMS), medical science, precision optics.And little driving platform directly determines the working effect of robot as the core operating part of little assembly robot.The micropositioner that research has a micrometric displacement feedback measuring ability is a Focal point and difficult point in little driven machine people's research.
Therefore, for above-mentioned technical problem, be necessary to provide a kind of prototype with displacement resolution based on displacement transducer.
The utility model content
In view of this, the utility model provide that a kind of integrated level is high, compact conformation and have the prototype with displacement resolution based on displacement transducer of precise displacement feedback function.
To achieve these goals, the technical scheme that provides of the utility model embodiment is as follows:
a kind of prototype with displacement resolution based on displacement transducer, described prototype with displacement resolution comprises that two dimension drives workbench and is positioned at the two-dimentional two-dimension displacement sensor that drives on workbench, described two dimension drives workbench and comprises the micropositioner matrix, the piezoelectric ceramics rest area and the lever amplifying mechanism that are provided with the sensor connected unit in the micropositioner matrix and are positioned at the sensor connected unit outside, described piezoelectric ceramics rest area and lever amplifying mechanism, lever amplifying mechanism and micropositioner matrix, lever amplifying mechanism is fixedly connected with by the supporting flexible beam with the sensor connected unit, described two-dimension displacement sensor is two-dimentional broach displacement transducer, comprise sensor base, be positioned in the middle of sensor base and the contiguous block that is connected with described sensor connected unit and the sensor broach detection zone that is connected with contiguous block with sensor base.
As further improvement of the utility model, described sensor broach detection zone is provided with some broach groups, and the broach group comprises the quiet tooth group that is connected with sensor base and the moving tooth group that is connected with contiguous block.
As further improvement of the utility model, be fixedly connected with by some flexible beams between described moving tooth group and contiguous block.
As further improvement of the utility model, described broach group comprises some relatively vertically disposed X-direction broach groups and Y-direction broach group.
As further improvement of the utility model, described two-dimension displacement sensor is silica-based MEMS capacitive displacement transducer.
As further improvement of the utility model, described piezoelectric ceramics rest area comprises relatively vertically disposed X-direction piezoelectric ceramics rest area and Y-direction piezoelectric ceramics rest area, described lever amplifying mechanism comprises relatively vertically disposed X-direction lever amplifying mechanism and Y-direction lever amplifying mechanism, and described X-direction piezoelectric ceramics rest area is fixedly connected with by the supporting flexible beam respectively with the Y-direction lever amplifying mechanism with X-direction lever amplifying mechanism, Y-direction piezoelectric ceramics rest area.
As further improvement of the utility model, described sensor connected unit surrounding is connected with the decoupling zero flexible beam that is used for realizing mobile decoupling that is connected with the supporting flexible beam.
As further improvement of the utility model, described two dimension is fixedly connected with by connecting plate in the middle of driving workbench and two-dimension displacement sensor, and the connecting plate centre position is provided with via hole, and described contiguous block is connected with the sensor connected unit by via hole.
As further improvement of the utility model, described contiguous block four bights are provided with contiguous block support portion protruding upward, are used for supporting described two-dimension displacement sensor.
The beneficial effects of the utility model are: prototype with displacement resolution device stroke is large, can realize closed-loop control, it has compact conformation, volume is little, integrated level is high, precision is high characteristics, simultaneously realized effective decoupling zero aspect two-dimensional detection, so the application meeting of the micropositioner of this kind structure is more and more extensive.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or description of the Prior Art, apparently, the accompanying drawing that the following describes is only some embodiment that put down in writing in the utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is based on the perspective view of the prototype with displacement resolution of displacement transducer in the utility model one preferred embodiment;
Fig. 2 is the perspective view that in the utility model one preferred embodiment, two dimension drives workbench;
Fig. 3 is the perspective view of two-dimension displacement sensor in the utility model one preferred embodiment;
Fig. 4 connects the perspective view that two dimension drives the connecting plate of workbench and two-dimension displacement sensor in the utility model one preferred embodiment.
Wherein:
1 two dimension drives workbench 1-1 micropositioner matrix
1-2 lever amplifying mechanism 1-3 piezoelectric ceramics rest area
1-4 sensor connected unit 1-5 decoupling zero flexible beam
1-6 supporting flexible beam 2 dimension displacement transducers
2-1 sensor base 2-2 sensor broach detection zone
2-3 contiguous block 2-4 flexible beam
3 connecting plate 3-1 contiguous block support portions
The 3-2 via hole
The specific embodiment
the utility model discloses a kind of prototype with displacement resolution based on displacement transducer, prototype with displacement resolution comprises that two dimension drives workbench and is positioned at the two-dimentional two-dimension displacement sensor that drives on workbench, two dimension drives workbench and comprises the micropositioner matrix, the piezoelectric ceramics rest area and the lever amplifying mechanism that are provided with the sensor connected unit in the micropositioner matrix and are positioned at the sensor connected unit outside, piezoelectric ceramics rest area and lever amplifying mechanism, lever amplifying mechanism and micropositioner matrix, lever amplifying mechanism is fixedly connected with by the supporting flexible beam with the sensor connected unit, two-dimension displacement sensor is two-dimentional broach displacement transducer, comprise sensor base, be positioned in the middle of sensor base and the contiguous block that is connected with the sensor connected unit and the sensor broach detection zone that is connected with contiguous block with sensor base.
Preferably, the sensor broach detection zone is provided with some broach groups, and the broach group comprises the quiet tooth group that is connected with sensor base and the moving tooth group that is connected with contiguous block.
Preferably, be fixedly connected with by some flexible beams between above-mentioned moving tooth group and contiguous block.
Preferably, above-mentioned broach group comprises some relatively vertically disposed X-direction broach groups and Y-direction broach group.
Preferably, above-mentioned two-dimension displacement sensor is silica-based MEMS capacitive displacement transducer.
Preferably, above-mentioned piezoelectric ceramics rest area comprises relatively vertically disposed X-direction piezoelectric ceramics rest area and Y-direction piezoelectric ceramics rest area, lever amplifying mechanism comprises relatively vertically disposed X-direction lever amplifying mechanism and Y-direction lever amplifying mechanism, and X-direction piezoelectric ceramics rest area is fixedly connected with by the supporting flexible beam respectively with the Y-direction lever amplifying mechanism with X-direction lever amplifying mechanism, Y-direction piezoelectric ceramics rest area.
Preferably, the sensor connected unit surrounding is connected with the decoupling zero flexible beam that is used for realizing mobile decoupling that is connected with the supporting flexible beam.
Preferably, above-mentioned two dimension is fixedly connected with by connecting plate in the middle of driving workbench and two-dimension displacement sensor, and the connecting plate centre position is provided with via hole, and contiguous block is connected with the sensor connected unit by via hole.
Preferably, above-mentioned contiguous block four bights are provided with contiguous block support portion protruding upward, are used for supporting two-dimension displacement sensor.
The utility model prototype with displacement resolution device stroke is large, can realize that closed-loop controls, and it has compact conformation, volume is little, integrated level is high, precision is high characteristics, has realized effective decoupling zero simultaneously aspect two-dimensional detection.
In order to make those skilled in the art person understand better technical scheme in the utility model, below in conjunction with the accompanying drawing in the utility model embodiment, technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all should belong to the scope of the utility model protection.
Join shown in Figure 1, in the utility model one preferred embodiment based on the prototype with displacement resolution of displacement transducer, comprise that two dimension drives workbench 1 and the two-dimension displacement sensor 2 that is positioned on two dimension driving workbench 1, two dimension drives workbench 1 and is fixedly connected with by connecting plate 3 with two-dimension displacement sensor 2 is middle.
in conjunction with shown in Figure 2, two dimension drives workbench 1 and comprises micropositioner matrix 1-1, the piezoelectric ceramics rest area 1-3 and the lever amplifying mechanism 1-2 that are provided with sensor connected unit 1-4 in micropositioner matrix 1-1 and are positioned at the sensor connected unit 1-4 outside, piezoelectric ceramics rest area 1-3 and lever amplifying mechanism 1-2, lever amplifying mechanism 1-2 and micropositioner matrix 1-1, lever amplifying mechanism 1-2 is fixedly connected with by supporting flexible beam 1-6 with sensor connected unit 1-4, sensor connected unit 1-4 surrounding is connected with the decoupling zero flexible beam 1-5 that is used for realizing mobile decoupling that is connected with supporting flexible beam 1-6.Preferably, in present embodiment, supporting flexible beam 1-6 is set to Gothic.
Wherein, piezoelectric ceramics rest area 1-3 comprises relatively vertically disposed X-direction piezoelectric ceramics rest area and Y-direction piezoelectric ceramics rest area, lever amplifying mechanism 1-2 comprises relatively vertically disposed X-direction lever amplifying mechanism and Y-direction lever amplifying mechanism, and X-direction piezoelectric ceramics rest area is fixedly connected with by supporting flexible beam 1-6 respectively with X-direction lever amplifying mechanism, Y-direction piezoelectric ceramics rest area and Y-direction lever amplifying mechanism.
In present embodiment, X-direction lever amplifying mechanism and Y-direction lever amplifying mechanism are designed to symmetrical structure (relative workbench diagonal is arranged symmetrically with), can the active balance X-direction and the asymmetric stiffness of Y-direction lever amplifying mechanism, and then effectively reduce sports coupling.
During work, two blocks of piezoelectric ceramics are separately fixed at piezoelectric ceramics rest area 1-3, the piezoelectric ceramics elongation transmits motion on sensor connected unit 1-4 by lever amplifying mechanism 1-2 and supporting flexible beam 1-6, sensor connected unit 1-4 is two dimensional motion planar, then realizes mobile decoupling by decoupling zero flexible beam 1-5.
Join shown in Figure 3, two-dimension displacement sensor 2 is two-dimentional broach displacement transducer, comprises sensor base 2-1, is positioned in the middle of sensor base 2-1 and the contiguous block 2-3 that is connected with sensor connected unit 1-4 and the sensor broach detection zone 2-2 that is connected with contiguous block 2-3 with sensor base 2-1.The size of contiguous block 2-3 and sensor connected unit 1-4's is big or small roughly the same.Sensor broach detection zone 2-2 is provided with 4 groups of broach groups, and the broach group comprises the quiet tooth group that is connected with sensor base 2-1 and the moving tooth group that is connected with contiguous block 2-3.4 groups of broach components are relatively vertically disposed 2 groups of X-direction broach groups and 2 groups of Y-direction broach groups, respectively X and Y-direction displacement in detection plane.Preferably, two-dimension displacement sensor 2 is the silica-based MEMS capacitive displacement transducer by the MEMS processes.
The moving tooth group of broach group is fixedly linked by flexible beam 2-4 and contiguous block 2-3, as sensor connected unit 1-4 planar during two dimensional motion, also planar carry out corresponding two dimensional motion with the contiguous block 2-3 that sensor connected unit 1-4 is fixedly linked, the decoupling zero when flexible beam 2-4 can realize contiguous block 2-3 motion.
Two dimension drives workbench 1 and is fixedly connected with by connecting plate 3 with two-dimension displacement sensor 2, in conjunction with shown in Figure 4, connecting plate 3 centre positions are provided with via hole 3-2, the big or small corresponding setting of the size of via hole 3-2 and contiguous block 2-3 and sensor connected unit 1-4, contiguous block 2-3 is connected with sensor connected unit 1-4 by via hole 3-2.Be provided with contiguous block support portion 3-1 protruding upward in contiguous block 3 four bights, be used for supporting two-dimension displacement sensor 2.
The utility model utilizes MEMS processes two-dimension displacement sensor, and two-dimension displacement sensor (except sensor broach detection zone) marginal dimension is done greatly, is convenient to drive workbench frame for movement with two dimension and partly is connected.Both keep the advantage that sensor accuracy is high, integrated level is high of MEMS processes, realized two-dimensional detection, solved simultaneously the problem with the frame for movement simple connection.
Can realize detection and the closed-loop control of stroke 20 micrometer ranges, displacement accuracy 2nm according to the prototype with displacement resolution of said method setting.
As can be seen from the above technical solutions, the utility model prototype with displacement resolution device stroke is large, can realize closed-loop control, it has compact conformation, volume is little, integrated level is high, precision is high characteristics, simultaneously realized effective decoupling zero aspect two-dimensional detection, so the application meeting of the micropositioner of this kind structure is more and more extensive.
To those skilled in the art, obviously the utility model is not limited to the details of above-mentioned one exemplary embodiment, and in the situation that do not deviate from spirit of the present utility model or essential characteristic, can realize the utility model with other concrete form.Therefore, no matter from which point, all should regard embodiment as exemplary, and be nonrestrictive, scope of the present utility model is limited by claims rather than above-mentioned explanation, therefore is intended to include in the utility model dropping on the implication that is equal to important document of claim and all changes in scope.Any Reference numeral in claim should be considered as limit related claim.
In addition, be to be understood that, although this specification is described according to embodiment, but be not that each embodiment only comprises an independently technical scheme, this narrating mode of specification is only for clarity sake, those skilled in the art should make specification as a whole, and the technical scheme in each embodiment also can through appropriate combination, form other embodiments that it will be appreciated by those skilled in the art that.
Claims (9)
1. prototype with displacement resolution based on displacement transducer, it is characterized in that, described prototype with displacement resolution comprises that two dimension drives workbench and is positioned at the two-dimentional two-dimension displacement sensor that drives on workbench, described two dimension drives workbench and comprises the micropositioner matrix, the piezoelectric ceramics rest area and the lever amplifying mechanism that are provided with the sensor connected unit in the micropositioner matrix and are positioned at the sensor connected unit outside, described piezoelectric ceramics rest area and lever amplifying mechanism, lever amplifying mechanism and micropositioner matrix, lever amplifying mechanism is fixedly connected with by the supporting flexible beam with the sensor connected unit, described two-dimension displacement sensor is two-dimentional broach displacement transducer, comprise sensor base, be positioned in the middle of sensor base and the contiguous block that is connected with described sensor connected unit and the sensor broach detection zone that is connected with contiguous block with sensor base.
2. prototype with displacement resolution according to claim 1, is characterized in that, described sensor broach detection zone is provided with some broach groups, and the broach group comprises the quiet tooth group that is connected with sensor base and the moving tooth group that is connected with contiguous block.
3. prototype with displacement resolution according to claim 2, is characterized in that, is fixedly connected with by some flexible beams between described moving tooth group and contiguous block.
4. prototype with displacement resolution according to claim 2, is characterized in that, described broach group comprises some relatively vertically disposed X-direction broach groups and Y-direction broach group.
5. prototype with displacement resolution according to claim 1, is characterized in that, described two-dimension displacement sensor is silica-based MEMS capacitive displacement transducer.
6. prototype with displacement resolution according to claim 1, it is characterized in that, described piezoelectric ceramics rest area comprises relatively vertically disposed X-direction piezoelectric ceramics rest area and Y-direction piezoelectric ceramics rest area, described lever amplifying mechanism comprises relatively vertically disposed X-direction lever amplifying mechanism and Y-direction lever amplifying mechanism, and described X-direction piezoelectric ceramics rest area is fixedly connected with by the supporting flexible beam respectively with the Y-direction lever amplifying mechanism with X-direction lever amplifying mechanism, Y-direction piezoelectric ceramics rest area.
7. prototype with displacement resolution according to claim 1, is characterized in that, described sensor connected unit surrounding is connected with the decoupling zero flexible beam that is used for realizing mobile decoupling that is connected with the supporting flexible beam.
8. prototype with displacement resolution according to claim 1, it is characterized in that, described two dimension is fixedly connected with by connecting plate in the middle of driving workbench and two-dimension displacement sensor, and the connecting plate centre position is provided with via hole, and described contiguous block is connected with the sensor connected unit by via hole.
9. prototype with displacement resolution according to claim 8, is characterized in that, described contiguous block four bights are provided with contiguous block support portion protruding upward, is used for supporting described two-dimension displacement sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN 201220721478 CN202964648U (en) | 2012-12-24 | 2012-12-24 | Displacement sensor based two-dimension micropositioner |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220721478 CN202964648U (en) | 2012-12-24 | 2012-12-24 | Displacement sensor based two-dimension micropositioner |
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| CN202964648U true CN202964648U (en) | 2013-06-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103056868A (en) * | 2012-12-24 | 2013-04-24 | 苏州大学 | Two-dimensional micro positioner based on displacement sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103056868A (en) * | 2012-12-24 | 2013-04-24 | 苏州大学 | Two-dimensional micro positioner based on displacement sensor |
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Granted publication date: 20130605 Effective date of abandoning: 20150819 |
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| AV01 | Patent right actively abandoned |
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