CN201214503Y - Light shield box and support member thereof - Google Patents
Light shield box and support member thereof Download PDFInfo
- Publication number
- CN201214503Y CN201214503Y CNU2008201127832U CN200820112783U CN201214503Y CN 201214503 Y CN201214503 Y CN 201214503Y CN U2008201127832 U CNU2008201127832 U CN U2008201127832U CN 200820112783 U CN200820112783 U CN 200820112783U CN 201214503 Y CN201214503 Y CN 201214503Y
- Authority
- CN
- China
- Prior art keywords
- photomask
- box
- strut member
- cover body
- upper cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Preparing Plates And Mask In Photomechanical Process (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The utility model relates to a reticle pod, in particular to a reticle pod with a supporting part. The reticle pod is combined by an upper cover body and a lower cover body so as to form an inner space which can contain the photo mask; the corner of the upper cover body or the lower cover body of the reticle pod is provided with at least one supporting part so as to support the photo mask contained in the reticle pod; wherein, the positions of the supporting part arranged on the upper cover body and the supporting part arranged on the lower cover body can be corresponding approximately. The supporting part is of a block approximately and the structure thereof is characterized by comprising a seat body and a concaved supporting structure; the seat body is fixedly connected with the inside of the upper cover body and the lower cover body of the reticle pod by a supporting point, while the concaved supporting structure has a supporting surface and a limiting surface; when the reticle pod bears a photo mask and is closed, the supporting surface of the concaved supporting structure can bear the photo mask and the limiting surface can carry out positioning; and the concaved supporting structure of the supporting part of the upper cover body and the concaved supporting structure of the supporting part of the lower cover body have a containing space which is used for bearing and positioning the photo mask so as to avoid collision in the transporting process and further damaging the photo mask.
Description
Technical field
The utility model relates to a kind of box for photomask, particularly relevant for a kind of box for photomask with strut member.
Background technology
Modern age, the quartz conductor development in science and technology was rapid, and wherein photolithography techniques (Optical Lithography) is played the part of important role, so long as about figure (pattern) definition, all need be dependent on photolithography techniques.
Photolithography techniques is that the circuit that will design is made into the light shield (photo mask) with given shape light-permeable in semi-conductive application.Utilize the exposure principle, then light source is projected to silicon silicon chip (silicon wafer) the demonstration specific pattern that can expose by light shield.Because any dust granules (as particulate, dust or organic matter) that is attached on the light shield all can cause the quality deterioration of projection imaging, the light shield that is used to produce figure must keep absolute cleaning, therefore in general silicon chip preparation technology, the environment that dust free room (clean room) all is provided is to avoid airborne particle contamination.Yet present dust free room also can't reach absolute dustless state.Modern semiconductor preparing process all utilizes resistant to pollution box for photomask (reticlepod) to carry out the preservation and the transportation of light shield, so that light shield remaining clean.
The utility model content
The purpose of this utility model is to provide a kind of box for photomask and strut member thereof, wherein this strut member has the structure of simplification, can significantly reduce manufacturing cost, and preparation technology's complexity, and this box for photomask with strut member adopts High molecular material to constitute, and made in integrally formed mode, therefore has the advantage that moulding is easy, cheap and can form the transparent body, and because this strut member is formed by High molecular material, therefore can avoid, reduce source of pollution because of friction produces particulate.
For achieving the above object, the box for photomask that the utility model provides, it comprises:
One upper cover body;
One lower cover with this upper cover body combination, forms an inner space that holds light shield;
At least one strut member is located in this upper cover body or the lower cover, supports this light shield, wherein:
It is block that this strut member roughly is, and the structure of this strut member comprises:
One pedestal is fixed in at least one strong point in the upper cover body or lower cover of this box for photomask;
One depression holds structure, has at least one face and at least one restriction face of holding;
Wherein, when this box for photomask carried a light shield and covers, the face of holding that this depression holds structure can carry this light shield, and this restriction face then can be located.
Described box for photomask, wherein, this strut member is located at the position in each corner in this upper cover body or the lower cover and roughly corresponding mutually.
Described box for photomask, wherein, this strut member comprises at least one first strut member and at least one second strut member, and this first strut member is laid in this upper cover body or the lower cover with this second strut member with L shape branch and roughly mutually corresponding.
Described box for photomask, wherein, when this upper cover body and lower cover covered, the depression that the depression of this upper cover body strut member holds structure and this lower cover strut member held the accommodation space that structure has a carrying and locatees this light shield.
Described box for photomask, wherein, this depression holds structure and has plane in addition, and this goes up the plane and this diff-H that holds between the face is about 0.5mm to about 3.1mm.
Described box for photomask, wherein, this strut member and this upper cover body or lower cover are one-body molded.
Described box for photomask, wherein, the material of this box for photomask or strut member is roughly High molecular material and forms.
Described box for photomask, wherein, the material of this box for photomask or strut member is roughly the electrostatic dissipation material and forms, and this electrostatic dissipation material resistance value is about 10
4～about 10
12Ω.
The box for photomask that the utility model provides also comprises:
One upper cover body;
One lower cover with this upper cover body combination, forms an inner space that holds light shield;
At least one strut member is located in this upper cover body or the lower cover, supports this light shield, and wherein, the structure of this strut member comprises:
One pedestal is fixed in at least one strong point in the upper cover body or lower cover of this box for photomask, and wherein this pedestal has an at least one restriction face and an engaging gear, and this engaging gear has at least one first junction surface;
One holds structure, has at least one face and one second junction surface of holding, and wherein this holds structure and is sheathed on this second junction surface on first junction surface of this engaging gear, is fixedly arranged on this pedestal in order to this is held structure;
Wherein, when this box for photomask carried a light shield and covers, this face of holding that holds structure can carry this light shield, and this restriction face then can be located.
Described box for photomask, wherein, this face that holds that holds structure roughly is a circle or square.
Described box for photomask, wherein, this holds structure has a card in addition and establishes groove, and this card is established groove and can be arranged on this restriction face.
Described box for photomask, wherein, this first junction surface has a hole, when this second junction surface has a protuberance, this protuberance is sheathed in this hole, is fixedly arranged on this pedestal this is held structure.
Described box for photomask, wherein, this first junction surface has a protuberance, when this second junction surface has a hole, this protuberance is sheathed in this hole, is fixedly arranged on this pedestal this is held structure.
Described box for photomask, wherein, this pedestal and this hold structure and can be unlike material.
The strut member that the utility model provides is located in this upper cover body or the lower cover, and in order to support this light shield, wherein, it is block that this strut member roughly is, and the structure of this strut member comprises:
One pedestal is fixed in at least one strong point in the upper cover body or lower cover of this box for photomask;
One depression holds structure, has at least one face and at least one restriction face of holding;
Wherein, when this box for photomask carried a light shield and covers, the face of holding that this depression holds structure can carry this light shield, and this restriction face then can be located.
The utility model also provides a kind of strut member, be located in this upper cover body or the lower cover, in order to support this light shield, wherein, one pedestal, be fixed in at least one strong point in the upper cover body or lower cover of this box for photomask, wherein this pedestal has an at least one restriction face and an engaging gear, and this engaging gear has at least one first junction surface;
One holds structure, has at least one face and one second junction surface of holding, and wherein this holds structure and is sheathed on this second junction surface on first junction surface of this engaging gear, is fixedly arranged on this pedestal in order to this is held structure;
Wherein, when this box for photomask carried a light shield and covers, this face of holding that holds structure can carry this light shield, and this restriction face then can be located.
In brief, the box for photomask that the utility model provides with strut member, this box for photomask is to be combined by upper cover body and lower cover, form an inner space and can hold light shield, upper cover body or the corner in the lower cover in box for photomask are provided with at least one strut member, be contained in light shield in the box for photomask in order to support, the strut member of wherein being located at upper cover body roughly can be corresponding with the position of the strut member of being located at lower cover.It is block that aforementioned strut member roughly is, the feature of its structure comprises that a pedestal and a depression hold structure, this pedestal is fixed in the upper cover body and lower cover of box for photomask with the strong point, this depression holds structure then to be had one and holds a face and a restriction face, when box for photomask carries a light shield and covers, the face of holding that its depression holds structure can carry light shield, restriction face then can be located, and the depression that the depression of upper cover body strut member holds structure and lower cover strut member holds structure and has an accommodation space, in order to carrying and location light shield, in the process of transporting, produce collision and the infringement light shield to avoid light shield.
Effect of the present utility model is:
1) has the supporting piece structure of simplification, can reduce manufacturing cost.
2) have the supporting piece structure of simplification, can reduce preparation technology's complexity.
3) therefore the support arrangement with L type can increase the symmetry of strut member on upper cover body or lower cover, reduces the difficulty of contraposition in the manufacturing process.
4) therefore the support arrangement with L type can increase the symmetry of strut member on upper cover body or lower cover, reduces the error of contraposition.
5) its strut member is a High molecular material, can avoid because of friction produces particulate, reduces source of pollution.
6) can damage light shield to avoid light shield in the process of transporting, to produce collision by strut member contact and fixing light shield.
7) its side has at least one fastener and latch fitting, can fasten the upper cover body and the lower cover of box for photomask.
Description of drawings
Fig. 1 is an embodiment scheme drawing of the utility model box for photomask.
Fig. 2 is an embodiment scheme drawing of the utility model strut member.
Fig. 3 A to Fig. 3 C is the embodiment scheme drawing that the depression of the utility model strut member holds each plane included angle of structure.
Fig. 4 is an embodiment scheme drawing of the utility model box for photomask.
Fig. 5 A and Fig. 5 B are embodiment scheme drawings of the utility model strut member.
Primary clustering nomenclature in the accompanying drawing:
10 box for photomask
11 upper cover body/lower cover
12 strut members
12a first strut member
12b second strut member
121 pedestals
122 depressions hold structure
1221 hold face
1222 restriction faces
13 latch fittings
14 fasteners
20 box for photomask
211 upper cover body
212 lower covers
22 strut members
22a first strut member
22b second strut member
221 pedestals
2211 restriction faces
2212 engaging gears
2,213 first junction surfaces
222 hold structure
The last plane of 222a
2221 hold face
2222 cards are established groove
2,223 second junction surfaces
23 latch fittings
231 catching grooves
232 slide fasteners
24 fasteners
25 rotating shafts
The specific embodiment
Because the utility model provides a kind of box for photomask structure with strut member, some light shields that wherein used or the detailed manufacturing or the treating process of box for photomask are to utilize prior art to reach, so in following explanation, do not do complete description.And the accompanying drawing in the literary composition in following, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the scheme drawing relevant with the utility model feature.
Fig. 1 is a preferred embodiment scheme drawing of the utility model box for photomask, box for photomask 10 is combined by upper cover body and lower cover 11, form the inner space that can hold light shield, and has at least one strut member 12, be located at the corner of upper cover body or lower cover 11, in order to support light shield, wherein the upper cover body of box for photomask 10 has identical structure with lower cover 11, and the strut member 12 of therefore being located at upper cover body 11 will the roughly corresponding position of being located at the strut member 12 of lower cover 11.Wherein, strut member 12 is made in integrated mode with upper cover body or lower cover 11, and the material of box for photomask 10 and strut member 12 is roughly High molecular material and forms, in addition, the material of box for photomask 10 and strut member 12 also can be roughly the electrostatic dissipation material and form, and wherein electrostatic dissipation material resistance value is about 10
4～about 10
12Therefore Ω can avoid because of friction produces particulate, reduces source of pollution.
According to above-mentioned, the strut member 12 of being located at upper cover body or lower cover 11 includes at least one first strut member 12a and at least one second strut member 12b, the first strut member 12a and the second strut member 12b distribute with establishing on upper cover body or the lower cover 11 with the L shape, therefore can increase the symmetry of strut member 12, reduce the difficulty of contraposition in the manufacturing process, or the error of reduction contraposition, and, therefore be located at the first support 12a spare of upper cover body 11 and incite somebody to action roughly corresponding first strut member 12a of lower cover 11 and the position of the second strut member 12b be located at the second strut member 12b because the upper cover body of box for photomask 10 has identical structure with lower cover 11.
In addition, above-mentioned box for photomask 10 comprises an at least one fastener 14 and a latch fitting 13 in addition, be located on the side of box for photomask 10, when upper cover body and lower cover 11 cover, fastener 14 can be stuck on the latch fitting 13, in order to fasten upper cover body and lower cover 11, wherein, fastener 14 can be with being located on the side of box for photomask 10 with latch fitting 13, also can fastener 14 be located on the side of box for photomask 10 as shown in Figure 1, latch fitting 13 then is located on box for photomask 10 another sides of phase contacting piece 14, fastener 14 is to use in pairs with latch fitting 13 thus, and the upper cover body of box for photomask 10 can have identical structure with lower cover 11.
Fig. 2 is a preferred embodiment scheme drawing of the utility model strut member, and it is block that strut member 12 roughly is, and its architectural feature includes a pedestal 121 and a depression holds structure 122.Pedestal 121 is to be fixed in the upper cover body of box for photomask 10 and the position in lower cover 11 interior each corner with at least one strong point, depression holds 122 on structure to be had one and holds a face 1221 and a restriction face 1222, when box for photomask 10 carries light shields and covers, the face that holds 1221 that its depression holds structure 122 can carry light shield, 1222 in restriction face can be located, and the depression that the depression of upper cover body 11 strut members 12 holds structure 122 and lower cover 11 strut members 12 holds structure 122 and has an accommodation space, in order to carrying and location light shield, in the process of transporting, produce collision and the infringement light shield to avoid light shield.
Wherein, Fig. 3 A is the preferred embodiment that the depression of the utility model strut member holds each plane included angle of structure, and its depression holds the face that holds 1221 of structure 122 and the angle angle of restriction face 1222 equals 90 degree.Fig. 3 B is another preferred embodiment that the depression of the utility model strut member holds each plane included angle of structure, and its depression holds the face that holds 1221 of structure 122 and spends less than 90 with the angle angle of restriction face 1222.Fig. 3 C is another preferred embodiment that the depression of the utility model strut member holds each plane included angle of structure, its depression holds the face that holds 1221 of structure 122 and spends greater than 90 with the angle angle of restriction face 1222, and less than 180 degree, so each plane included angle that the utility model strut member 12 depression holds structure 122 is about 0 degree to about 180 degree.In addition, this depression holds structure 122 and has plane 222a in addition, and this goes up plane 222a and this diff-H that holds between the face 1221 is about 0.5mm to about 3.1mm; The area that holds face 1221 can equate with the area of restriction face 1222, perhaps greater than the area of restriction face 1222.
Fig. 4 is another preferred embodiment scheme drawing of the utility model box for photomask, box for photomask 20 is combined by upper cover body 211 and lower cover 212, form the inner space that can hold light shield, and has a position that at least one strut member 22 is located at each corner in upper cover body 211 or the lower cover 212, in order to supporting light shield, and be located at the strut member 22 of upper cover body 211 will the roughly corresponding position of being located at the strut member 22 of lower cover 212.Wherein, strut member 22 is made in integrated mode with upper cover body 211 or lower cover 212, and the material of box for photomask 20 and strut member 22 is roughly High molecular material and forms, in addition, the material of box for photomask 20 and strut member 22 also can be roughly the electrostatic dissipation material and form, and wherein electrostatic dissipation material resistance value is about 10
4～about 10
12Therefore Ω can avoid because of friction produces particulate, reduces source of pollution.
According to above-mentioned, the strut member 22 of being located at upper cover body 211 or lower cover 212 includes at least one first strut member 22a and at least one second strut member 22b, the first strut member 22a and second strut member 22b system distribute with establishing on upper cover body 211 or the lower cover 212 with the L shape, therefore can increase the symmetry of strut member 22, reduce the difficulty of contraposition in the manufacturing process, or the error of reduction contraposition, and, therefore be located at the first support 22a spare of upper cover body 211 and incite somebody to action roughly corresponding first strut member 22a of lower cover 212 and the position of the second strut member 22b be located at the second strut member 22b because the upper cover body 211 of box for photomask 20 has identical structure with lower cover 212.
In addition, above-mentioned box for photomask 20 comprises at least one latch fitting 23 in addition, one fastener 24 and a rotating shaft 25, be located on the side of box for photomask 20, wherein this latch fitting 23 has an at least one slide fastener 232 and a catching groove 231, as shown in Figure 4, fastener 24 is located on the side of box for photomask 20, latch fitting 23 then is located on box for photomask 20 another sides of phase contacting piece 24, when upper cover body 211 and lower cover 212 cover, fastener 24 can insert in the catching groove 231, and slide fastener 232 is pushed into the relative position that fastener 24 inserts, in order to fasten upper cover body 211 and lower cover 212, make fastener 24 and latch fitting 23 by this for using in pairs.In addition, the fastener 24 of box for photomask 20 also can be with being located on the side of box for photomask 20 with latch fitting 23.The rotating shaft 25 of box for photomask 20 then is located on upper cover body 211 and the lower cover 212 asymmetric relative positions, and upper cover body 211 combines with rotating shaft 25 with lower cover 212.
Fig. 5 A is another preferred embodiment scheme drawing of the utility model strut member, and strut member 22 its architectural features include a pedestal 221 and and hold structure 222, and pedestal 221 to can be unlike material made with holding structure 222.Pedestal 221 is to be fixed in the upper cover body 211 of box for photomask 20 and the position in lower cover 212 interior each corner with at least one strong point, wherein pedestal 221 has an at least one restriction face 2211 and an engaging gear 2212, and engaging gear 2212 has at least one first junction surface 2213, hold structure 222 and then have at least one face 2221 and one second junction surface 2223 of holding, and this holds face 2221 and roughly is a circle.
Fig. 5 B is the another preferred embodiment scheme drawing of the utility model strut member, and the feature of strut member 22 its structures includes a pedestal 221 and and holds structure 222, and pedestal 221 to can be unlike material made with holding structure 222.Pedestal 221 is to be fixed in the upper cover body 211 of box for photomask 20 and the position in lower cover 212 interior each corner with at least one strong point, wherein pedestal 221 has an at least one restriction face 2211 and an engaging gear 2212, and engaging gear 2212 has at least one first junction surface 2213, hold structure 222 and then have at least one face 2221 and one second junction surface 2223 of holding, and this holds face 2221 and roughly is one square, wherein hold structure 222 and have a card in addition and establish groove 2222, and card is established groove 2222 and can be arranged on the restriction face 2211.
Embodiment according to Fig. 5 A and Fig. 5 B, it holds structure 222 is to be sheathed on first junction surface 2213 of engaging gear 2212 with second junction surface 2223, be fixedly arranged on the pedestal 221 in order to will hold structure 222, wherein has a hole when first junction surface 2213, when second junction surface 2213 has a protuberance, protuberance can be sheathed in the hole, or have a protuberance when first junction surface 2213, when second junction surface 2213 has a hole, protuberance can be sheathed in the hole.When box for photomask 20 carries light shields and covers, its face that holds 2221 that holds structure 222 can carry light shield, 2211 in restriction face is orientable, and the structure 222 that holds that holds structure 222 and lower cover 212 strut members 22 of upper cover body 211 strut members 22 has an accommodation space, in order to carrying and location light shield, in the process of transporting, produce collision and the infringement light shield to avoid light shield.
The above is preferred embodiment of the present utility model only, is not in order to limit the utility model; Simultaneously above description should be understood and be implemented for those skilled in the art, so other does not break away from the equivalence of being finished under the spirit that the utility model discloses and change or modification, all should be included in the claim scope of application.
Claims (16)
1, a kind of box for photomask, it comprises:
One upper cover body;
One lower cover with this upper cover body combination, forms an inner space that holds light shield;
At least one strut member is located in this upper cover body or the lower cover, supports this light shield, it is characterized in that:
It is block that this strut member roughly is, and the structure of this strut member comprises:
One pedestal is fixed in at least one strong point in the upper cover body or lower cover of this box for photomask;
One depression holds structure, has at least one face and at least one restriction face of holding;
Wherein, this box for photomask carries a light shield and when covering, the face of holding that this depression holds structure carries this light shield, and this restriction face then can be located.
2, box for photomask as claimed in claim 1 is characterized in that, this strut member is located at the position in each corner in this upper cover body or the lower cover and corresponding mutually.
3, box for photomask as claimed in claim 1 is characterized in that, this strut member comprises at least one first strut member and at least one second strut member, and this first strut member and this second strut member are laid in this upper cover body or the lower cover with L shape branch and corresponding mutually.
4, box for photomask as claimed in claim 1 is characterized in that, when this upper cover body and lower cover covered, the depression that the depression of this upper cover body strut member holds structure and this lower cover strut member held the accommodation space that structure has a carrying and locatees this light shield.
5, box for photomask as claimed in claim 1 is characterized in that, this depression holds structure and has plane in addition, and this goes up the plane and this diff-H that holds between the face is 0.5mm to 3.1mm.
6, box for photomask as claimed in claim 1 is characterized in that, this strut member and this upper cover body or lower cover are one-body molded.
7, box for photomask as claimed in claim 1 is characterized in that, this box for photomask or strut member are High molecular material.
8, box for photomask as claimed in claim 1 is characterized in that, this box for photomask or strut member are the electrostatic dissipation material, and this electrostatic dissipation material resistance value is 10
4～10
12Ω.
9, a kind of box for photomask, it comprises:
One upper cover body;
One lower cover with this upper cover body combination, forms an inner space that holds light shield;
At least one strut member is located in this upper cover body or the lower cover, supports this light shield, it is characterized in that: the structure of this strut member comprises:
One pedestal is fixed in at least one strong point in the upper cover body or lower cover of this box for photomask, and wherein this pedestal has an at least one restriction face and an engaging gear, and this engaging gear has at least one first junction surface;
One holds structure, has at least one face and one second junction surface of holding, and wherein this holds structure and is sheathed on this second junction surface on first junction surface of this engaging gear, this is held structure be fixedly arranged on this pedestal;
Wherein, this box for photomask carries a light shield and when covering, this face of holding that holds structure carries this light shield, and this restriction face then can be located.
10, box for photomask as claimed in claim 9 is characterized in that, this face of holding that holds structure is a circle or square.
11, box for photomask as claimed in claim 10 is characterized in that, this holds structure has a card in addition and establish groove, and this card is established groove and is arranged on this restriction face.
12, box for photomask as claimed in claim 9 is characterized in that, this first junction surface has a hole, and when this second junction surface had a protuberance, this protuberance was sheathed in this hole, this is held structure be fixedly arranged on this pedestal.
13, box for photomask as claimed in claim 9 is characterized in that, this first junction surface has a protuberance, and when this second junction surface had a hole, this protuberance was sheathed in this hole, this is held structure be fixedly arranged on this pedestal.
14, box for photomask as claimed in claim 9 is characterized in that, it is unlike material that this pedestal and this hold structure.
15, a kind of strut member is located in this upper cover body or the lower cover, supports this light shield, it is characterized in that, it is block that this strut member is, and the structure of this strut member comprises:
One pedestal is fixed in at least one strong point in the upper cover body or lower cover of this box for photomask;
One depression holds structure, has at least one face and at least one restriction face of holding;
Wherein, this box for photomask carries a light shield and when covering, the face of holding that this depression holds structure carries this light shield, and this restriction face then can be located.
16, a kind of strut member is located in this upper cover body or the lower cover, supports this light shield, it is characterized in that:
One pedestal is fixed in at least one strong point in the upper cover body or lower cover of this box for photomask, and wherein this pedestal has an at least one restriction face and an engaging gear, and this engaging gear has at least one first junction surface;
One holds structure, has at least one face and one second junction surface of holding, and wherein this holds structure and is sheathed on this second junction surface on first junction surface of this engaging gear, this is held structure be fixedly arranged on this pedestal;
Wherein, this box for photomask carries a light shield and when covering, this face of holding that holds structure carries this light shield, and this restriction face then can be located.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201127832U CN201214503Y (en) | 2008-05-21 | 2008-05-21 | Light shield box and support member thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201127832U CN201214503Y (en) | 2008-05-21 | 2008-05-21 | Light shield box and support member thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201214503Y true CN201214503Y (en) | 2009-04-01 |
Family
ID=40519709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201127832U Expired - Lifetime CN201214503Y (en) | 2008-05-21 | 2008-05-21 | Light shield box and support member thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201214503Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102854739A (en) * | 2011-06-29 | 2013-01-02 | 株式会社荒川树脂 | Photomask clamp of photomask box |
| CN107600677A (en) * | 2017-09-22 | 2018-01-19 | 武汉华星光电技术有限公司 | A kind of mask plate case |
| CN111349888A (en) * | 2020-04-28 | 2020-06-30 | 京东方科技集团股份有限公司 | Metal mask plate |
-
2008
- 2008-05-21 CN CNU2008201127832U patent/CN201214503Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102854739A (en) * | 2011-06-29 | 2013-01-02 | 株式会社荒川树脂 | Photomask clamp of photomask box |
| CN107600677A (en) * | 2017-09-22 | 2018-01-19 | 武汉华星光电技术有限公司 | A kind of mask plate case |
| CN111349888A (en) * | 2020-04-28 | 2020-06-30 | 京东方科技集团股份有限公司 | Metal mask plate |
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