CN201194222Y - Container having idiot-proof device - Google Patents
Container having idiot-proof device Download PDFInfo
- Publication number
- CN201194222Y CN201194222Y CNU2008200071971U CN200820007197U CN201194222Y CN 201194222 Y CN201194222 Y CN 201194222Y CN U2008200071971 U CNU2008200071971 U CN U2008200071971U CN 200820007197 U CN200820007197 U CN 200820007197U CN 201194222 Y CN201194222 Y CN 201194222Y
- Authority
- CN
- China
- Prior art keywords
- container
- misoperation device
- lid
- chassis
- cover cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a container with a dull-protecting device, composed of a first cover body and a second cover body; a base plate is also included in the container, arranged on the second cover body, forming a space for holding objects with the second body, which at least includes a first dull-protecting device; the base plate at least includes a second dull-protecting device. When the second dull-protecting device is clamped with the first dull-protecting device, relative position of the base plate and the second cover body is fixed. Design of the dull-protecting device in the utility model combined with original structure of the container, thereby ensuring correct position of each part in the container, avoiding harming the objects in the container when in use.
Description
Technical field
The utility model relates to a kind of container, and what be meant wherein especially to be comprised prevents the wrong anti-misoperation device of placing.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and wherein photolithography techniques (Optical Lithography) is played the part of important role, so long as about figure (pattern) definition, all need be dependent on photolithography techniques.Photolithography techniques is that the circuit that will design is made into the light shield (photo mask) with given shape light-permeable in semi-conductive application.Utilize the exposure principle, then light source is projected to Silicon Wafer (siliconwafer) the demonstration specific pattern that can expose by light shield.Because any dust granules (as particulate, dust or organic substance) that is attached on the light shield all can cause the quality deterioration of projection imaging, the light shield that is used to produce figure must keep absolute cleaning, therefore in general silicon wafer process, the environment that dust free room (clean room) all is provided is to avoid airborne particle contamination.Yet present dust free room also can't reach absolute dustless state.Modern manufacture of semiconductor all utilizes resistant to pollution box for photomask (reticle pod) to carry out the preservation and the transportation of light shield, so that light shield remaining clean.
Existing box for photomask is many to be constituted with macromolecule material, and this kind macromolecule material has the advantage that moulding is easy, cheap and can form the transparent body.The high macromolecule material of this kind insulation resistance easily because friction or dial from and the operating environment that produces static, especially dust free room need keep than low humidity, make the box for photomask of macromolecule material be very easy to produce and stored charge.The static on light shield surface attracts airborne contaminate particulate easily, also can cause the metal wire on the light shield static discharge (electrostaticdischarge, ESD) effect to occur what is more.The immediate current that static discharge produced can cause spark (spark) or electric arc (arc), and in spark and electric arc generation, powerful electric current is accompanied by high temperature, causes the oxidation and the dissolving of metal wire, thereby has changed the pattern of light shield.
Having at present manyly at the method that static discharge solved, at first is to improve operating environment, makes to keep suitable humidity, operating personnel in the air and wear the clothing of tool ground connection effect or use the ion fan to eliminate static in the environment.But change operating environment have many unpredictable changes because of, have no idea to solve fully the injury of static to light shield.
Another kind method is the material that changes the box for photomask element, U.S. Patent number US6, and 513,654 propose, and the light shield strutting piece of tool grounding function is set, and when box for photomask contacted with the cooperation board, the light shield strutting piece can be derived the electric charge on the light shield.U.S. Patent number US6 in addition, 247,599 propose, and set up conductive plate on chassis, cover cap or the carrying handle of box for photomask, reduce the accumulation of electric charge by this.Set up the method for conductive plate and widely used, the screw locking is relied in the location on right cover cap and chassis more, and the friction during locking can produce particulate, forms pollutant sources.
Because above disappearance, box for photomask provided by the utility model is improved at prior art.
The utility model content
Main purpose of the present utility model provides a kind of container with anti-misoperation device, and wherein the design of anti-misoperation device is to combine with the container original structure, can guarantee the correct placement at each position in the container, avoids in use the object in the container being damaged.
Another purpose of the present utility model provides a kind of container with anti-misoperation device, and wherein the design of anti-misoperation device does not need can avoid particulate to produce with the screw locking, reduces pollutant sources.
Another purpose of the present utility model provides a kind of container with anti-misoperation device, can reduce electric charge accumulation, and prevents that static is to injury that light shield caused.
A purpose more of the present utility model provides a kind of container with anti-misoperation device, can change under the situation of original container structural design need not, and sets up an electron screening device.
Based on above-mentioned purpose, the utility model at first provides a kind of container, and it is to be combined by one first lid and one second lid.Still comprise a chassis in the container, be arranged on second lid, form the space that can hold object with second lid; Second lid comprises at least one first anti-misoperation device; The chassis comprises at least one second anti-misoperation device; When second anti-misoperation device engages mutually with first anti-misoperation device, the relative position of the chassis and second lid
Fixing.
It is a kind of that the utility model then provides
The tool anti-misoperation deviceContainer, it is to be combined by one first lid and one second lid, still comprises a cover cap and a chassis in the container.The chassis comprises at least one the 3rd anti-misoperation device, and cover cap comprises one the 4th anti-misoperation device, when the 3rd anti-misoperation device engages mutually with the 4th anti-misoperation device, and the relative position of chassis and cover cap
Fixing do not move, chassis and cover cap are combined into a space that can bear object.
The utility model further provides a kind of container of tool anti-misoperation device, and it is to be combined to form an interior zone by one first lid and one second lid, still comprises in the container being arranged at a cover cap on second lid.The second lid cover cap comprises at least one the 5th anti-misoperation device, and cover cap comprises at least one the 6th anti-misoperation device, and when the 6th anti-misoperation device and the 5th anti-misoperation device in correspondence with each other the time, cover cap and this two lid are combined into a space that can bear object.
The beneficial effects of the utility model are, except the each several part that can make container is placed on the tram, and need not use screw to fix, and avoid particulate to produce, and reduce pollutant sources.When cover cap is conductive material, can prevent that more static from damaging content.The design also can set up and be used in present box for photomask, the change that need not design.
Description of drawings
The container profile of Figure 1A the utility model one preferred embodiment;
The container profile of Figure 1B the utility model one preferred embodiment;
The container profile of Fig. 1 C the utility model one preferred embodiment;
The container profile of Fig. 2 the utility model one preferred embodiment;
The container stereogram of Fig. 3 the utility model one preferred embodiment;
The container profile of Fig. 4 the utility model one preferred embodiment;
The container profile of Fig. 5 A the utility model one preferred embodiment;
The container stereogram of Fig. 5 B the utility model one preferred embodiment.
[main element symbol description]
100 box for photomask
102 first lids
104 second lids
1041 frameworks
1042 bodies
106 interior zones
110 chassis
112a first anti-misoperation device
112b first anti-misoperation device
112c first anti-misoperation device
115 cover caps
202a second anti-misoperation device
202b second anti-misoperation device
202c second anti-misoperation device
300 containers
302 first lids
304 second lids
306 interior zones
310 chassis
312a the 3rd anti-misoperation device
312b the 3rd anti-misoperation device
312c the 3rd anti-misoperation device
315 cover caps
317a the 4th anti-misoperation device
317b the 4th anti-misoperation device
400 box for photomask
402 first lids
404 second lids
4041 frameworks
4042 bodies
406 interior zones
412 the 5th anti-misoperation devices
415 cover caps
417 the 6th anti-misoperation devices
Embodiment
This novel execution mode is to use container to describe as example with institute in the manufacture of semiconductor, but any application that must keep cleaning or sealing, and for example therapeutic treatment articles for use, biochemical articles for use or optical instrument all belong to range of application of the present utility model.Some primary elements that the utility model used and structural principle to each other, belonging to the personage that this field has common knowledge can understand easily, repeats no more.And graphic with what hereinafter contrasted, be to express the structural representation relevant with the utility model feature, also do not need according to the complete drafting of actual size.
According to the utility model one preferred embodiment, provide a tool Fang Dai Installed
Container can be in order to preserve or transmission object, shown in Figure 1A and Figure 1B, this container 100 is box for photomask, has comprised one first lid 102 and one second lid 104, it is in order to isolated interior zone 106 and external environment that first lid 102 has an interior zone 106, the second lids 104.Second lid 104 can be one-body molded, can also be made up of framework 1041 and door body 1042.The surface in second lid, 104 face inside zones 106 can be provided with a chassis 110.
As shown in Figure 2, second lid 104 comprises three first anti-misoperation device 112a, 112b, 112c.Chassis 110 comprises that three second anti-misoperation device 202a, 202b, 202c are with respect to the first anti-misoperation device 112a, 112b, 112c.When the second anti-misoperation device 202a, 202b, 202c with the first anti-misoperation device 112a, when 112b, 112c engage mutually, the relative position almost fixed of this chassis 110 and this second lid 104 can not relatively move.If the second anti-misoperation device 202a, 202b, 202c are with the first anti-misoperation device 112a, when 112b, 112c can not engage mutually, 110 on chassis is not set correctly in second lid, 104 surfaces, chassis 110 and second lid, 104 meeting slide relative cause dropping or being shifted of chassis.
The first anti-misoperation device 112a, 112b, 112c are thrust in the present embodiment, and the second anti-misoperation device 202a, 202b, 202c are the groove of this thrust relatively.Also can change first anti-misoperation device into groove, and second anti-misoperation device is the thrust of relative this groove.Because three 112a, 112b, 112c must engage mutually with three second anti-misoperation device 202a, 202b, 202c and just can make chassis 110 and 104 driving fits of second lid, so chassis 110 must be arranged on second lid 104 according to specific direction
Shown in Fig. 1 C, can set up a cover cap 115 in the interior zone of container 100, when one of them is conductive material at least cover cap 115 or chassis 110, can produces object 10 and rise shielding action, avoid unnecessary electric charge accumulation to produce, can reach the effect of electrostatic defending.
According to another preferred embodiment of the utility model, provide the container can be in order to preserve or transmission object, as Fig. 3 with shown in, this container 300 is box for photomask, one first lid 302 and one second lid 304 have been comprised, it is in order to isolated interior zone 306 and external environment that first lid 302 has an interior zone 306, the second lids 304.Second lid 304 can be one-body molded, can also be made up of framework and door body.The surface in second lid, 304 face inside zones 306 can be provided with a chassis 310 (not illustrating).
As shown in Figure 3 and Figure 4, chassis 310 comprises the 3rd anti-misoperation device 312a, 312b.The edge of cover cap 315 is the 4th anti-misoperation device 317a, 317b, when cover cap 315 is arranged on the chassis 310 with specific direction, then the 3rd anti-misoperation device 312a, 312b engage mutually with the 4th anti-misoperation device 317a, 317b, the relative position almost fixed of chassis 310 and cover cap 315 is not moved, and chassis 310 and cover cap 315 are combined into a space that can bear object.When the 3rd anti-misoperation device 312a, 312b with the 4th anti-misoperation device 317a, when 317b does not engage, this chassis 310 is fixing with the relative position of this cover cap 315.
In the present embodiment, the 3rd anti-misoperation device 312a, 312b are the abutment walls on chassis 310, protrude in the surface in 310 face inside zones 306, chassis.The 4th anti-misoperation device 317a, 317b are the edges of cover cap 315, and the edge of the abutment wall on chassis 310 and cover cap 315 makes the 4th anti-misoperation device be able to against the 3rd anti-misoperation device in correspondence with each other, are combined into a space that can bear object.If cover cap 315 is not arranged on the chassis 310 with specific direction, then the 3rd anti-misoperation device 312a, 312b are not corresponding with the 4th anti-misoperation device 317a, 317b, make cover cap 315 and chassis 310 driving fit mutually, can't reach the purpose of safe transport object.
According to the another preferred embodiment of the utility model, provide the container can be in order to preserve or transmission object, shown in Fig. 5 A, this container 400 is box for photomask, one first lid 402 and one second lid 404 have been comprised, it is in order to isolated interior zone 406 and external environment that first lid 402 has an interior zone 406, the second lids 404.Second lid 404 is made up of framework 4041 and door body 4042, and the part in framework 404 face inside zones 406 comprises at least one the 5th anti-misoperation device 412.Container 400 comprises a cover cap 415 in addition, cover cap 415 is arranged on second lid 404, cover cap 415 comprises at least one the 6th anti-misoperation device 417, and when the 6th anti-misoperation device 417 and the 5th anti-misoperation device 412 in correspondence with each other the time, the cover cap 415 and second lid 404 are combined into a space that can bear object.
In the present embodiment, shown in Fig. 5 B, one the 5th anti-misoperation device 412 being set on the framework 4042, is one to protrude from the thing of interior zone.The 6th anti-misoperation device 417 is bends of cover cap 415, and the breach that the 6th anti-misoperation device 417 forms can be provided with for the 5th anti-misoperation device 412.When the 5th anti-misoperation device 412 and the 6th anti-misoperation device 417 not in correspondence with each other the time, second lid 404 can't be combined into the space that can bear object with cover cap 415, then can not preserve safely or transmission object.
So, the container of tool anti-misoperation device provided by the utility model, the design of its anti-misoperation device is to combine with the container original structure, can guarantee the correct placement at each position in the container, avoids in use the object in the container being damaged; And need not lock by screw, can avoid particulate to produce; Also can reduce the electric charge accumulation, prevent the injury of static internal object.
The above is preferred embodiment of the present utility model only, is not in order to limit the right of applying for a patent of the present utility model; Simultaneously above description should be understood and be implemented for the special personage who knows the present technique field, so other does not break away from the equivalence of being finished under the spirit that the utility model discloses and change or modification, all should be included in the following claim.
Claims (20)
1. the container of a tool anti-misoperation device in order to preserve or transmission object, is characterized in that this container comprises:
One first lid has an interior zone;
One second lid, in order to isolated this interior zone and external environment, this second lid comprises at least one first anti-misoperation device; And
One chassis is arranged at the surface of this second lid in the face of this interior zone, and this chassis comprises at least one second anti-misoperation device;
When wherein this second anti-misoperation device engages mutually with specific direction with this first anti-misoperation device, the relative position almost fixed of this chassis and this second lid.
2. container as claimed in claim 1 is characterized in that, when this second anti-misoperation device did not engage with first anti-misoperation device, the relative position of this chassis and this cover cap was unfixing.
3. container as claimed in claim 1 is characterized in that, this first anti-misoperation device is at least one groove, and this second anti-misoperation device is at least one thrust of relative this groove.
4. container as claimed in claim 1 is characterized in that, this first anti-misoperation device is at least one thrust, and this second anti-misoperation device is at least one groove of relative this thrust.
5. container as claimed in claim 1 is characterized in that, this second lid comprises a framework and a body.
6. container as claimed in claim 1 is characterized in that, this container is that box for photomask or light shield transmit box.
7. container as claimed in claim 1 is characterized in that, also comprises a cover cap.
8. container as claimed in claim 1 is characterized in that, this chassis is a conductive material.
9. container as claimed in claim 8 is characterized in that, also comprises a cover cap, and this cover cap is conductive material and electrically communicates with this chassis.
10. a tool is prevented the container that slow-witted Installed puts, and in order to preserve or transmission object, it is characterized in that this container comprises:
One first lid has an interior zone;
One second lid is in order to isolated this interior zone and external environment;
One chassis is arranged at the surface of this second lid in the face of this interior zone, and this chassis comprises at least one the 3rd anti-misoperation device in the face of the surface of this interior zone; And
One cover cap is positioned on this chassis, and this cover cap comprises one the 4th anti-misoperation device,
When wherein the 3rd anti-misoperation device engaged mutually with the 4th anti-misoperation device with specific direction, the relative position of this chassis and this cover cap is fixing not to be moved, and this chassis and this cover cap are combined into a space that can bear object.
11. container as claimed in claim 10 is characterized in that, when the 3rd anti-misoperation device did not engage with the 4th anti-misoperation device, the relative position of this chassis and this cover cap was unfixing.
12. container as claimed in claim 10 is characterized in that, the 3rd anti-misoperation device is at least one abutment wall.
13. container as claimed in claim 12 is characterized in that, this abutment wall is to protrude in the surface of this chassis in the face of this interior zone.
14. container as claimed in claim 12 is characterized in that, this abutment wall is to be depressed in the surface of this chassis in the face of this interior zone.
15. container as claimed in claim 12 is characterized in that, the 4th anti-misoperation device is against this abutment wall.
16. the container of a tool anti-misoperation device in order to preserve or transmission object, is characterized in that this container comprises:
One first lid has an interior zone;
One second lid, in order to isolated this interior zone and external environment, this second lid comprises at least one the 5th anti-misoperation device in the face of the part of this interior zone; And,
One cover cap is arranged on this second lid, and this cover cap comprises at least one the 6th anti-misoperation device;
Wherein the 6th anti-misoperation device and the 5th anti-misoperation device be with specific direction in correspondence with each other the time, and this cover cap and this second lid are combined into a space that can bear object.
17. container as claimed in claim 16 is characterized in that, in correspondence with each other the time, this second lid and this cover cap can not be combined into the space that this can bear object for the 5th anti-misoperation device and the 6th anti-misoperation device.
18. container as claimed in claim 16 is characterized in that, in this second lid a locked instrument is set, in order to this first lid and this second lid of locking.
19. container as claimed in claim 18 is characterized in that, the 5th anti-misoperation device is the part of this locked instrument.
20. container as claimed in claim 16 is characterized in that, the 6th anti-misoperation device is the bend of this cover cap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200071971U CN201194222Y (en) | 2008-03-12 | 2008-03-12 | Container having idiot-proof device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200071971U CN201194222Y (en) | 2008-03-12 | 2008-03-12 | Container having idiot-proof device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201194222Y true CN201194222Y (en) | 2009-02-11 |
Family
ID=40393754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200071971U Expired - Lifetime CN201194222Y (en) | 2008-03-12 | 2008-03-12 | Container having idiot-proof device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201194222Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108288597A (en) * | 2017-01-10 | 2018-07-17 | 台湾积体电路制造股份有限公司 | Case and particle detection technique |
| CN112278497A (en) * | 2020-10-16 | 2021-01-29 | 皇裕精密冲件(昆山)有限公司 | Plastic uptake box for terminal continuous material missing cutting detection |
-
2008
- 2008-03-12 CN CNU2008200071971U patent/CN201194222Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108288597A (en) * | 2017-01-10 | 2018-07-17 | 台湾积体电路制造股份有限公司 | Case and particle detection technique |
| CN112278497A (en) * | 2020-10-16 | 2021-01-29 | 皇裕精密冲件(昆山)有限公司 | Plastic uptake box for terminal continuous material missing cutting detection |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090211 |
|
| CX01 | Expiry of patent term |