CN201090993Y - Container and cover cap thereof - Google Patents
Container and cover cap thereof Download PDFInfo
- Publication number
- CN201090993Y CN201090993Y CNU2007201255709U CN200720125570U CN201090993Y CN 201090993 Y CN201090993 Y CN 201090993Y CN U2007201255709 U CNU2007201255709 U CN U2007201255709U CN 200720125570 U CN200720125570 U CN 200720125570U CN 201090993 Y CN201090993 Y CN 201090993Y
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- CN
- China
- Prior art keywords
- cover
- container
- cover cap
- cover body
- upper cover
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- Expired - Lifetime
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Abstract
The utility model discloses a container, which is composed of an upper cover body and a lower cover body. A cover cap is also included in the container and arranged on the lower cover body, together with which a room which can contain an object is formed. A plurality of positioning pieces are arranged around the cover cap, so when the upper cover body and the lower cover body are combined closely, the positioning pieces can be clamped between the lower cover body and the upper cover body to position the cover cap.
Description
Technical field
The utility model relates to a kind of container, the cover cap and its locator meams that are meant wherein especially to be comprised.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and wherein photoetching technique (Optical Lithography) is played the part of important role, so long as about figure (pattern) definition, all need rely on photoetching technique.
Photoetching technique is that the circuit that will design is made into the light shield (photo mask) with given shape light-permeable in semi-conductive application.Utilize the exposure principle, light source is projected to Silicon Wafer (silicon wafer) the demonstration specific pattern that can expose by light shield.Because any dust granules (as particulate, dust or organism) that is attached on the light shield all can cause the quality deterioration of projection imaging, the light shield that is used to produce figure must keep absolute cleaning, therefore in general silicon wafer process, the environment that dust free room (clean room) all is provided is to avoid airborne particle contamination.Yet present dust free room also can't reach absolute dustless state.Modern manufacture of semiconductor all utilizes resistant to pollution box for photomask (reticlepod) to carry out the preservation and the transportation of light shield, so that light shield remaining clean.
Existing box for photomask is many to be constituted with macromolecule material, and this kind macromolecule material has the advantage that moulding is easy, cheap and can form the transparent body.The high macromolecule material of this kind insulation resistance easily because friction or dial from and the operating environment that produces static, especially dust free room need keep than low humidity, make the box for photomask of macromolecule material be very easy to produce and stored charge.The static on light shield surface attracts airborne contaminate particulate easily, also can cause the metal wire on the light shield static discharge (electrostatic discharge, ESD) effect to occur what is more.The immediate current that static discharge produced can cause spark (spark) or electric arc (arc), and in spark and electric arc generation, powerful electric current is accompanied by high temperature, causes the oxidation and the dissolving of metal wire, thereby has changed the pattern of light shield.
Having at present manyly at the method that static discharge solved, at first is to improve operating environment, makes to keep suitable humidity, operating personnel in the air and wear the clothing of tool ground connection effect or use the ion fan to eliminate static in the environment.But change operating environment have many unpredictable changes because of, have no idea to solve fully the injury of static to light shield.
Another kind method is to change the material that box for photomask is formed assembly, U.S. Patent number US6, and 513,654 propose, and the light shield support member of tool grounding function is set, and when box for photomask contacted with the cooperation board, the light shield support member can be derived the electric charge on the light shield.U.S. Patent number US6 in addition, 247,599 propose, and set up current-carrying plate on chassis, cover cap or the carrying handle of box for photomask, reduce the accumulation of electric charge by this.Set up the method for current-carrying plate and widely used, the screw locking is relied in the location on right cover cap and chassis more, and the friction during locking can produce particulate, forms pollution source.
Because above disappearance, box for photomask provided by the utility model is improved at prior art.
The utility model content
Fundamental purpose of the present utility model provides a kind of container and cover cap thereof, and wherein the location of cover cap does not need can avoid particulate to produce with the screw locking, reduces pollution source.
Another purpose of the present utility model provides a kind of container and cover cap thereof, can reduce electric charge accumulation, and prevents that static is to injury that light shield caused.
Another purpose of the present utility model provides a kind of cover cap that is used for container, can change under the situation of original container structural design need not, and sets up a cover cap.
Based on above-mentioned purpose, the utility model at first provides a kind of container, and it is to be combined by a upper cover body and a lower cover; Also comprise a cover cap in the container, be arranged on the lower cover, form the space that can hold object with lower cover; And around cover cap a plurality of keepers are set, when lower cover and upper cover body driving fit, keeper can be folded between lower cover and the upper cover body, makes cover cap locate.
The utility model then provides a kind of container, and it is to be combined by a upper cover body and a lower cover, and lower cover is provided with an abutment wall in the face of the surface of upper cover body; Also comprise a cover cap in the container, be arranged on the lower cover, form the space that can hold object with lower cover; And a plurality of keepers are set around cover cap, and keeper is in order to against abutment wall, makes the cover cap location.
The utility model further provides a kind of container, and it is to be combined to form an interior zone by a upper cover body and a lower cover; Also comprise a chassis in the container, the chassis is arranged at the surface in lower cover face inside zone, and the surface in face inside zone, chassis is provided with at least one abutment wall; Comprise a cover cap in the container in addition, be arranged on the chassis, form the space that can hold object with the chassis; A plurality of keepers are set around cover cap, and keeper is in order to against abutment wall, makes the cover cap location.
The utility model further provides a kind of cover cap, is to be arranged in the container, and container is to be combined by a upper cover body and a lower cover, and lower cover is provided with at least one abutment wall in the face of the surface of upper cover body; Cover cap comprises a plurality of keepers, is arranged at around the cover cap, in order to the abutment wall against lower cover, makes the cover cap location.
The utility model further provides a kind of cover cap again, is arranged in the container, and container is combined by a upper cover body and a lower cover, and lower cover is provided with a chassis in the face of the surface of upper cover body, and the chassis is provided with an abutment wall in the face of the surface of upper cover body; Cover cap comprises a plurality of keepers, is arranged at around the cover cap, in order to the abutment wall on the chassis, makes the cover cap location.
The beneficial effects of the utility model are, via design provided by the utility model, effectively locate except making cover cap, and need not use screw to fix, and avoid particulate to produce, and reduce pollution source.When cover cap is conductive material, can prevent that more static from damaging content.The design also can set up and be used in present box for photomask, need not change design.
Description of drawings
The container sectional view of Figure 1A the utility model one preferred embodiment;
The container sectional view of Figure 1B the utility model one preferred embodiment;
The keeper structural perspective of Fig. 2 the utility model one preferred embodiment;
The container sectional view of Fig. 3 A the utility model one preferred embodiment;
The container sectional view of Fig. 3 B the utility model one preferred embodiment;
The keeper structural perspective of Fig. 4 A the utility model one preferred embodiment;
The keeper structural perspective of Fig. 4 B the utility model one preferred embodiment.
[primary clustering symbol description]
10 light shields
100 box for photomask
102 upper cover body
104 lower covers
106 interior zones
110 cover caps
112 chassis
114 abutment walls
120 keepers
122 keepers
300 box for photomask
302 upper cover body
304 lower covers
306 interior zones
308 frameworks
310 cover caps
312 chassis
314 abutment walls
320 keepers
322 keepers
Embodiment
This novel embodiment is to be that example describes with the semiconductor container, but any application that must keep cleaning or sealing, and for example therapeutic treatment articles for use, biochemical articles for use or optical instrument all belong to range of application of the present utility model.Some basic modules that the utility model used and structural principle to each other, belong to this field have common knowledge the personage can understand easily, repeat no more.And graphic with what hereinafter contrasted, be to express the structural representation relevant with the utility model feature, also do not need according to the complete drafting of physical size.
According to the utility model one preferred embodiment, provide the container can be in order to preserve or transmission object, box for photomask or the light shield used as semiconductor transmit box, shown in Figure 1A and Figure 1B, this container is a box for photomask 100, has comprised a upper cover body 102 and a lower cover 104, upper cover body 102 is combined into an interior zone 106 with lower cover 104, also comprise a cover cap 110 in the container 100, cover cap 110 is arranged on the lower cover 104, and cover cap 110 forms the space that can hold light shield 10 with lower cover 104.
Around the cover cap 110 a plurality of keepers 120 are set, but the connected mode riveted joint of keeper 120 and cover cap 110, welding or screw locking; Keeper 120 is the L type, is arranged at four corners of cover cap 110 usually; When upper cover body 102 and lower cover 104 driving fits, an end of L type keeper 120 is folded between lower cover 104 and the upper cover body 102, makes this cover cap 110 location, and the situation that does not have the cover cap displacement transporting of container in the process takes place.
The surface in lower cover 104 face inside zones 106 can be set up a chassis 112 in addition; When one of them is conductive material such as metal at least cover cap 110 and chassis 112, can produce shielding action, reach the effect of electrostatic defending.
According to another preferred embodiment of the utility model, as shown in Figure 2, the surface in lower cover 104 face inside zones 106 is provided with wall 114 at least on one side.Cover cap 110 edges are provided with keeper 122, and keeper 122 is the L type, but has a kink in the corner of L type, and this kink is in order to make cover cap 110 location against abutment wall 114.When a plurality of keepers 122 during all correctly against abutment wall 114, then the scope of moving horizontally of cover cap 110 is limited, and does not have cover cap in the process transporting of container and topples over the situation of displacement and take place.
Also abutment wall can be arranged on the surface in face inside zone, chassis in addition.The kink of the corner of L type keeper is in order to make the cover cap location against abutment wall.
According to another preferred embodiment of the utility model, provide the container can be in order to preserve or transmission object, shown in Fig. 3 A and Fig. 3 B, this container is a box for photomask 300, has comprised a upper cover body 302, this upper cover body has one first opening; One framework 308 is arranged at the edge of first opening; And a lower cover 304, lower cover 304 engages with framework 308.Upper cover body 302, be combined into an interior zone 306 with framework 308 and lower cover 304, also comprise a cover cap 310 in the container 300, cover cap 310 is provided with interior zone 306, and cover cap 310 forms the space that can hold light shield 10 with lower cover 304.
Around the cover cap 310 a plurality of keepers 320 are set, but the connected mode riveted joint of keeper 320 and cover cap 310, welding or screw locking; Keeper 320 is the L type, is arranged at four corners of cover cap 310 usually; When upper cover body 302 engaged with framework 308, an end of L type keeper 120 was folded between framework 308 and the upper cover body 302, made this cover cap 310 location, and the situation that does not have the cover cap displacement transporting of container in the process takes place.
The surface in lower cover 304 face inside zones 306 can be set up a chassis 312 in addition; When one of them is conductive material such as metal at least cover cap 310 and chassis 312, can produce shielding action, reach the effect of electrostatic defending.
According to another preferred embodiment of the utility model, shown in Fig. 4 A and Fig. 4 B, the surface in framework 308 face inside zones 306 is provided with wall 314 at least on one side.Cover cap 310 edges are provided with keeper 322, and keeper 322 is the L type, but has a kink in the corner of L type, and this kink is in order to make cover cap 310 location against abutment wall 314.When a plurality of keepers 322 during all correctly against abutment wall 314, then the scope of moving horizontally of cover cap 310 is limited, and does not have cover cap in the process transporting of container and topples over the situation of displacement and take place.
Also abutment wall can be arranged on the surface in lower cover face inside zone in addition.The kink of L type keeper corner is in order to make the cover cap location against abutment wall.
The above is preferred embodiment of the present utility model only, is not in order to limit the right of applying for a patent of the present utility model; Simultaneously above description should be understood and be implemented for the special personage who knows the present technique field, so other does not break away from the equivalence of being finished under the spirit that the utility model discloses and change or modification, all should be included in the following claim.
Claims (18)
1. container in order to preserve or transmission object, is characterized in that this container comprises:
One upper cover body;
One lower cover is combined into an interior zone with this upper cover body;
One cover cap is positioned at this interior zone, and this lower cover is set, and forms a space that holds this object with this lower cover; And
A plurality of keepers, be arranged at this cover cap around, when this lower cover and this upper cover body driving fit, this keeper is folded between this lower cover and this upper cover body, makes this cover cap location.
2. container as claimed in claim 1 is characterized in that: also comprising a chassis in addition, is to be located at the surface of this lower cover in the face of this interior zone.
3. container as claimed in claim 2 is characterized in that: this chassis is a conductive material.
4. container as claimed in claim 1 is characterized in that: this keeper is the L type.
5. container as claimed in claim 4 is characterized in that: one side of this L type keeper links to each other with this cover cap, and another side is folded between this upper cover body and this lower cover.
6. container as claimed in claim 1 is characterized in that: this cover cap is a conductive material.
7. container as claimed in claim 1 is characterized in that: this container is that box for photomask or light shield transmit box.
8. container in order to preserve or transmission object, is characterized in that this container comprises:
One upper cover body;
One lower cover is combined into an interior zone with this upper cover body, and this lower cover is provided with wall at least on one side in the face of the surface of this interior zone;
One cover cap is arranged on this lower cover, and forms a space that holds this object with this lower cover; And
A plurality of keepers, be arranged at this cover cap around, in order to against this abutment wall, make the cover cap location.
9. container as claimed in claim 8 is characterized in that: this keeper is the L type, and the L type corner of this keeper has a kink, and this kink is against this abutment wall.
10. container as claimed in claim 8 is characterized in that: this keeper has a kink, and this kink is against this abutment wall.
11. a container in order to preserve or transmission object, is characterized in that this container comprises:
One upper cover body;
One lower cover is combined into an interior zone with this upper cover body;
One chassis is arranged at the surface of this lower cover in the face of this interior zone, and this chassis is provided with at least one abutment wall in the face of the surface of this interior zone,
One cover cap is arranged on this chassis, and forms a space that holds this object with this chassis; And
A plurality of keepers, be arranged at this cover cap around, in order to against this abutment wall, make the cover cap location.
12. a cover cap, in order to be arranged in the container, this container comprises a upper cover body, a lower cover, this upper cover body and this lower cover be combined into an inner space; It is characterized in that this cover cap comprises: a plurality of keepers are to be arranged at around this cover cap, and when this lower cover and this upper cover body driving fit, this keeper is folded between this lower cover and this upper cover body, make this cover cap location.
13. a cover cap, in order to be arranged in the container, this container comprises a upper cover body, a lower cover, and this lower cover is provided with at least one abutment wall in the face of the surface of this upper cover body; It is characterized in that this cover cap comprises:
A plurality of keepers are arranged at around this cover cap, in order to against this abutment wall, make the cover cap location.
14. a cover cap, in order to be arranged in the container, this container comprises a upper cover body; One lower cover; And a chassis, this chassis is arranged at the surface of this lower cover in the face of this upper cover body, and this chassis is provided with wall at least on one side in the face of the surface of this upper cover body; It is characterized in that this cover cap comprises: a plurality of keepers are to be arranged at around this cover cap, in order to against this abutment wall, make the cover cap location.
15. a container in order to preserve or transmission object, is characterized in that this container comprises:
One upper cover body has one first opening;
One framework is arranged at the edge of this first opening;
One lower cover is to be sticked in this framework, and wherein this lower cover, this framework and this upper cover body are combined into an interior zone;
One cover cap is arranged at this interior zone, forms a space that holds this object with this lower cover; And
A plurality of keepers, be arranged at this cover cap around, when this upper cover body engaged with this cover frame body, this keeper was folded between this upper cover body and this framework, with so that this cover cap location.
16. a container in order to preserve or transmission object, is characterized in that this container comprises:
One upper cover body has one first opening;
One framework is arranged at the edge of this first opening, and this framework is provided with at least one abutment wall in the face of the surface of this upper cover body;
One lower cover is sticked in this framework, and wherein this lower cover, this framework and this upper cover body are combined into an interior zone;
One cover cap is arranged at this interior zone, forms a space that holds this object with this lower cover; And
A plurality of keepers, be arranged at this cover cap around, in order to against this abutment wall, make the cover cap location.
17. a cover cap, in order to be arranged in the container, this container is by a upper cover body; One framework, and a lower cover is formed; It is characterized in that this cover cap comprises:
A plurality of keepers are arranged at around this cover cap, and when this upper cover body engaged with this framework, this keeper was folded between this upper cover body and this framework, use so that this cover cap location.
18. a cover cap, in order to be arranged in the container, this container comprises a upper cover body; One framework; With a lower cover, this framework is provided with at least one abutment wall in the face of the surface of this upper cover body; It is characterized in that this cover cap comprises:
A plurality of keepers are to be arranged at around this cover cap, in order to against this abutment wall, make the cover cap location.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201255709U CN201090993Y (en) | 2007-09-26 | 2007-09-26 | Container and cover cap thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201255709U CN201090993Y (en) | 2007-09-26 | 2007-09-26 | Container and cover cap thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201090993Y true CN201090993Y (en) | 2008-07-23 |
Family
ID=39862751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201255709U Expired - Lifetime CN201090993Y (en) | 2007-09-26 | 2007-09-26 | Container and cover cap thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201090993Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108288597A (en) * | 2017-01-10 | 2018-07-17 | 台湾积体电路制造股份有限公司 | Case and particle detection technique |
-
2007
- 2007-09-26 CN CNU2007201255709U patent/CN201090993Y/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108288597A (en) * | 2017-01-10 | 2018-07-17 | 台湾积体电路制造股份有限公司 | Case and particle detection technique |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20080723 |
|
| CX01 | Expiry of patent term |