CN201352302Y - Photomask box - Google Patents
Photomask box Download PDFInfo
- Publication number
- CN201352302Y CN201352302Y CNU2008201896613U CN200820189661U CN201352302Y CN 201352302 Y CN201352302 Y CN 201352302Y CN U2008201896613 U CNU2008201896613 U CN U2008201896613U CN 200820189661 U CN200820189661 U CN 200820189661U CN 201352302 Y CN201352302 Y CN 201352302Y
- Authority
- CN
- China
- Prior art keywords
- box
- photomask
- cover body
- snap close
- lower cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model provides a photomask box, which consists of an upper cover body and a lower cover body. The upper cover body and the lower cover body form an internal space to hold a photomask. The photomask box is provided with at least one locking piece and one locking seat. The upper cover body and the lower cover body are provided with at least two corresponding sides. The locking piece is arranged on the side of the upper cover body or the lower cover body. The side of the other cover body is provided with at least one locking groove arranged at a position corresponding to the locking piece. The locking seat is fixedly arranged on the locking groove. The material of the locking seat is high in abrasion resistance, and can avoid the loose combination between the upper cover body and the lower cover body caused by the abrasion of the locking seat due to the friction produced when combining and locking the upper cover body and the lower cover body of the photomask box. The locking seat is arranged on the upper cover body and the lower cover body in a clamping way to facilitate the replacement of the locking seat when the locking seat is partially damaged or abraded.
Description
The application number 200820008494.8 of original application case,
The applying date of original application case: on March 24th, 2008,
The invention and created name of original application case: box for photomask and limited part thereof.
Technical field
The utility model relates to a kind of box for photomask, particularly relevant for a kind of box for photomask with limited part.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and wherein photolithography techniques (OpticalLithography) is played the part of important role, so long as about figure (pattern) definition, all need be dependent on photolithography techniques.Photolithography techniques is that the circuit that will design is made into the light shield (photo mask) with given shape light-permeable in semi-conductive application.Utilize the exposure principle, then light source is projected to Silicon Wafer (silicon wafer) the demonstration specific pattern that can expose by light shield.Because any dust granules (as particulate, dust or organism) that is attached on the light shield all can cause the quality deterioration of projection imaging, the light shield that is used to produce figure must keep absolute cleaning, and wherein the purpose of SMIF system is for the storage that reduces manufacture of semiconductor and to transport particulate suffered in the process excessive.
Shown in Figure 1A and Figure 1B, the general light shield that is a prior art transmits box 1, it is to be combined by lid 11 and 12 up and down, two relative holding units 121 wherein are set on the dual-side in lower cover 12, and this holding unit 121 comprises that also some banking stops 1211 and support member 1212 dispose on it.In addition, the wherein adjacent side at two relative holding units 121 then more disposes a restraint device 122, make lower cover 12 by two holding units 121 and adjacent restraint device 122 form one approximate " ㄇ " structure of font.Therefore when a slice light shield is put into lower cover 12, can be by this " ㄇ " structure of font forms the fixing support light shield that reaches.When the lid up and down 11 and 12 of light shield transmission box 1 covers a light shield, the banking stop 1211 and the support member 1212 that are configured on the holding unit are understood the edge that supports light shields, but because can gapped generation when up and down lid 11,12 covers, make light shield in the process of transporting, can not be provided with on a side of restraint device (that is " ㄇ " opening of the type structure) direction and produce displacement.So, not only making light shield touch holding unit 121 weares and teares with the place generation of restraint device 122, thereby the serviceable life of reducing light shield, and meeting forms grit because of friction and influences yield, this box for photomask also can be because of the damage or the wearing and tearing of part simultaneously, and must abandon whole box for photomask, can't continue to use, and produce waste and cause use cost to improve.
The utility model content
For solving prior art problems, the purpose of this utility model provides a kind of box for photomask with limited part.
A kind of box for photomask of the present utility model, it comprises:
One upper cover body; One lower cover in order to make up with this upper cover body, forms an inner space and can hold a light shield; At least one support is installed in this lower cover; And at least one limited part; This support has at least one first clamping part, and this limited part has at least one second clamping part, and this limited part is to hold mutually in order to first clamping part with this support.
First clamping part of this support includes at least one first and holds face, and this limited part comprises: at least one pedestal is to be installed in the support of this box for photomask with assembling mode, has this second clamping part, and this second clamping part comprises that at least one second holds face; And at least one banking stop, be arranged on this pedestal, in order to fixing this light shield, when wherein first clamping part of second clamping part of this limited part and this support held mutually, this first held face and this second face that holds resists mutually.
First clamping part of this support includes at least two relative first and holds face, and this limited part comprises: at least one pedestal, be to be installed in the support of this box for photomask with assembling mode, at least one second clamping part of tool, and this second clamping part comprises that at least two relative second hold face; And at least one banking stop, be arranged on this pedestal, in order to fixing this light shield, when wherein first clamping part of second clamping part of this limited part and this support held mutually, this first held face and this second face that holds resists in twos mutually.
This box for photomask comprises at least one locking part in addition this limited part is fixedly arranged on the support of this box for photomask, and this locking part is a latch, rivet or screw.
This support has at least one side and at least one first locking hole is located at this side; And this limited part has at least one second locking hole corresponding to this first locking hole.
The principal ingredient of the material of this locking part is the metal that is selected from by stainless steel, aluminium alloy and group that magnesium alloy constitutes.
This support or limited part are formed by a macromolecular material, and this macromolecular material is polyetheretherketone compounds or polyimide compounds.
This support or limited part are formed by an electrostatic dissipation material, and the resistance value of this electrostatic dissipation material is about 10
4Ω～about 10
11Ω.
Described box for photomask, other comprises at least one support member and is located on this support or this pedestal.
A kind of limited part of the present utility model, the structure of this limited part comprises: at least one pedestal is the support that is installed in this box for photomask with assembling mode, has at least one second clamping part, and this second clamping part comprises that at least one second holds face; And at least one banking stop, be arranged on this pedestal, in order to fix and to support this light shield.
A kind of box for photomask of the present utility model, it comprises: a upper cover body; One lower cover in order to make up with this upper cover body, forms an inner space and can hold a light shield; At least one snap close piece; And at least one snap close seat; The side that this upper cover body and this lower cover have at least one correspondence, and this snap close piece is located at the side of this upper cover body or this lower cover, be located at position that should snap close piece and the side of another lid has at least one lock buckling groove, this snap close seat is fixedly arranged in this lock buckling groove.This snap close seat is to be fixedly arranged in described this upper cover body or this lower cover in the mode that wraps into ejection formation.This snap close seat is to be fixedly arranged in described this upper cover body or the lower cover in the mode that card is established.The fastness to rubbing of the material of this snap close seat is higher than the material of its described this upper cover body or lower cover.The macromolecular material of this snap close seat is polyetheretherketone compounds or polyimide compounds.
The beneficial effects of the utility model:
Box for photomask of the present utility model is to be combined by upper cover body and lower cover, form an inner space and can hold light shield, and have a support and a limited part, support is to be installed in lower cover and to have one first clamping part (engaging portion), this first clamping part includes at least one first and holds face, this limited part then includes a pedestal and a banking stop, wherein this pedestal is to be installed in the support of box for photomask with assembling mode, and has at least one second clamping part, this second clamping part comprises that at least one second holds face, banking stop then is arranged on the pedestal, in order to fix and to support light shield, when first clamping part of second clamping part of limited part and support holds mutually, first holds face and second face that holds resists mutually, loosening up and down to avoid limited part, and reduces the friction of light shield and box for photomask, and then reduce grit and form and influence yield, make the light shield life-span be improved.
In addition, box for photomask lid up and down has a corresponding mutually side, and at least one snap close piece is located on the side of upper cover body or lower cover, and the side of another lid then has the position that a lock buckling groove is located at corresponding snap close piece, and has a snap close seat to be fixedly arranged in the lock buckling groove.Wherein, the fastness to rubbing of the material of this snap close seat is higher than under it material of lid up and down, therefore covers and during snap close, can avoid because of friction causes the wearing and tearing of snap close seat when the lid up and down of box for photomask, and make and still have loosening phenomenon generation after lid covers up and down.
Because the limited part of the utility model box for photomask is to be installed in the box for photomask lower cover with assembling mode, the snap close seat then is to be fixed in lid up and down in the card mode of establishing, therefore when limited part produces partly or entirely damage or wearing and tearing, to be convenient to disassemble and directly change limited part or snap close seat, so that box for photomask is continued to use, avoid producing waste and cause use cost to improve, in addition because support member also can be arranged on the disassembled limited part, therefore when support member produces damage or wearing and tearing, also can change in the lump.
Therefore, fundamental purpose of the present utility model is to provide a kind of box for photomask, and the assembling mode of its limited part can avoid limited part loosening up and down.
Another purpose of the present utility model is to provide a kind of box for photomask, and the assembling mode of its limited part can reduce the friction of light shield and box for photomask, and then reduces grit and form and influence yield, makes the light shield life-span be improved.
Another purpose of the present utility model is to provide a kind of box for photomask, and the assembling mode that its limited part is will be convenient to disassemble and change the limited part of damage.
A purpose more of the present utility model is to provide a kind of box for photomask, and the assembling mode of its limited part can be avoided damaging or wearing and tearing because of part, and produces waste and cause use cost to improve.
A purpose more of the present utility model is to provide a kind of box for photomask, and its support member also can be arranged on the disassembled limited part, so that part is damaged or change during wearing and tearing.
A purpose more of the present utility model is to provide a kind of box for photomask, the fastness to rubbing of its snap close seat material is higher, can avoid the lid up and down of box for photomask to cover and during snap close,, make to still have loosening phenomenon to produce after lid covers up and down because of friction causes the wearing and tearing of snap close seat.
A purpose more of the present utility model is to provide a kind of box for photomask, and its snap close seat is to be fixedly arranged on lid up and down in the mode that card is established, and changes when part is damaged or wear and tear.
Description of drawings
Figure 1A and Figure 1B are the synoptic diagram (prior art) that light shield transmits box.
Fig. 2 is an embodiment synoptic diagram of the utility model box for photomask.
Fig. 3 A to Fig. 3 C is an embodiment synoptic diagram of the utility model box for photomask lower cover and limited part.
Fig. 4 A to Fig. 4 C is an embodiment synoptic diagram of the utility model box for photomask lower cover and limited part assembling.
Fig. 5 A and Fig. 5 B are embodiment synoptic diagram of the utility model box for photomask lower cover and snap close seat.
The main element symbol description
1 light shield transmits box
11 upper cover body
12 lower covers
121 holding units
1211 banking stops
122 restraint devices
1212 supporting pieces
2 box for photomask
21 upper cover body
The 21a snap close piece
22 lower covers
The 22a support
221 first clamping parts
2,211 first hold face
2212 the 3rd hold face
222 first locking holes
223 lock buckling grooves
23 limited parts
231 pedestals
232 banking stops
233 second clamping parts
2,331 second hold face
2332 the 4th hold face
234 second locking holes
24 support members
25 locking parts
26 snap close seats
The utility model specifies representative graph to be: Fig. 2.
Embodiment
Because the utility model is to disclose a kind of box for photomask with limited part, some light shields that wherein used or the detailed manufacturing or the processing procedure of box for photomask are to utilize prior art to reach, so in following explanation, do not do complete description.And graphic in the literary composition in following, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the synoptic diagram relevant with the utility model feature.
Fig. 2 is a preferred embodiment synoptic diagram of the utility model box for photomask, box for photomask 2 is to be combined by upper cover body 21 and lower cover 22, form an inner space and can hold a light shield, and having at least one support 22a and at least one limited part 23 is installed on the lower cover 22 of box for photomask 2, wherein this support 22a or limited part 23 can be roughly macromolecular material or the electrostatic dissipation material forms, this kind macromolecular material is polyetheretherketone compounds or polyimide compounds, and the resistance value of electrostatic dissipation material then is about 10
4～about 10
11Ω.In addition, box for photomask 2 can comprise at least one locking part (not being shown among the figure) in addition, this locking part can be latch, rivet or screw, the principal ingredient of its material be selected from by metal, macromolecular material or the electrostatic dissipation material etc. of group that stainless steel, aluminium alloy and magnesium alloy constitute made, this kind macromolecular material is polyetheretherketone compounds or polyimide compounds, and the resistance value of electrostatic dissipation material then is about 10
4Ω～about 10
11Ω.
Fig. 3 A is a preferred embodiment synoptic diagram of the utility model box for photomask limited part, the lower cover 22 of box for photomask 2 has at least one support 22a and at least one limited part 23, first clamping part (engaging portion) 221 promptly is located on the support 22a with at least one support member 24, and first clamping part 221 includes one first and holds face 2211,23 of this limited parts include a pedestal 231 and a banking stop 232, wherein this support 22a therewith pedestal 231 all be to be installed in the support 22a of box for photomask 2 (please refer to Fig. 4 A and Fig. 4 B) with assembling mode, and this pedestal 231 has one second clamping part 233, this second clamping part 233 has one second and holds face 2331, and banking stop 232 is to be arranged on the pedestal 231, in order to fixing light shield.In the time of in pedestal 231 is assembled in support 22a, second clamping part 233 of limited part 23 holds mutually with first clamping part 221 of support 22a, first holds face 2211 and second holds face 2331 and can resist mutually, to avoid limited part 23 loosening up and down, and the friction of minimizing light shield and box for photomask 2, and then reduce grit and form and influence yield, make the light shield life-span be improved.
Fig. 3 B is another preferred embodiment synoptic diagram of the utility model box for photomask limited part, box for photomask 2 lower covers 22 have at least one support 22a and at least one limited part 23, first clamping part 221 promptly is located on the support 22a with at least one support member 24, and first clamping part 221 includes at least two relative first and holds face 2211 and the 3rd and hold face 2212,23 of this limited parts include a pedestal 231 and a banking stop 232, wherein this support 22a therewith pedestal 231 all be to be installed in the lower cover 22 of box for photomask 2 (please refer to Fig. 4 A and Fig. 4 B) with assembling mode, and this pedestal 231 has one second clamping part 233, it includes at least two relative second and holds face 2331 and the 4th and hold face 2332, banking stop 232 then is arranged on the pedestal 231, in order to fix and to support light shield.In the time of in pedestal 231 is assembled in support 22a, when second clamping part 233 of limited part 23 holds mutually with first clamping part 221 of support 22a, please refer to Fig. 4 C, first holds face 2211 and second holds face 2331 and resists mutually, the 3rd holds face 2212 and the 4th holds face 2332 and resists mutually, loosening up and down to avoid limited part 23.
Fig. 3 C is a preferred embodiment synoptic diagram of the utility model box for photomask support member, box for photomask 2 is to be combined by upper cover body 21 and lower cover 22, form an inner space and can hold a light shield, and has at least one support 22a and at least one limited part 23 is located on the lower cover 22 of box for photomask 2, this limited part 23 includes a pedestal 231 and a banking stop 232, and on the pedestal 231 of limited part 23, be provided with a support member 24 in addition, wherein this support member 24 can be roughly macromolecular material or the electrostatic dissipation material forms, this kind macromolecular material is polyetheretherketone compounds or polyimide compounds, and the resistance value of electrostatic dissipation material then is about 10
4Ω～about 10
11Ω.When pedestal 231 is installed in the support 22a of box for photomask 2 with assembling mode (please refer to Fig. 4 A and Fig. 4 B), this support member 24 can be placed in the lower cover 22 of box for photomask 2, therefore when box for photomask 2 carried light shields and covers, limited part 23 can contact light shield and fix it with support member 24.
Fig. 3 A is the preferred embodiment that the utility model limited part sets firmly mode, this box for photomask 2 comprises at least one locking part 25 in addition, and the side in box for photomask 2 support 22a has at least one first locking hole 222, the side of limited part 23 then has at least one second locking hole 234, wherein, first locking hole 222 and second locking hole 234 are located at corresponding position, therefore can utilize locking part 25 that limited part 23 is fixed and is arranged on the support 22a of box for photomask 2.
Fig. 3 B is another preferred embodiment that the utility model limited part sets firmly mode, this box for photomask 2 comprises at least one locking part 25 in addition, and has at least one first locking hole 222 in the bottom of box for photomask 2 support 22a, the bottom of limited part 23 then has at least one second locking hole 234, wherein, first locking hole 222 and second locking hole 234 are located at corresponding position, therefore can utilize locking part 25 that limited part 23 is fixed and is arranged on the support 22a of box for photomask 2.
Set firmly the another preferred embodiment (not being shown among the figure) of mode according to the utility model limited part, the limited part 23 of this box for photomask 2 is to be fixedly arranged on the support 22a of box for photomask 2 in the fixing mode of viscose.
In addition, please refer to Fig. 5 A and Fig. 5 B, box for photomask 2 upper cover body 21 or lower cover 22 have a corresponding mutually side, and at least one snap close piece 21a, snap close piece 21a is located on the side of upper cover body 21 or lower cover 22, the side of another lid then has a lock buckling groove 223 and is located at the position of corresponding snap close piece 21a, and has a snap close seat 26 to be fixedly arranged in the lock buckling groove 223.Wherein, this snap close seat 26 can wrap into ejection formation (Insert Molding) or block the mode of establishing and be fixedly arranged in the affiliated upper cover body 21 or lower cover 22, and the fastness to rubbing of the material of snap close seat 26 is higher than its affiliated upper cover body 21 or the material of lower cover 22, its material is polyetheretherketone compounds or the polyimide compounds in the macromolecular material, therefore when the upper cover body 21 of box for photomask 2 and lower cover 22 cover also snap close, can avoid causing 26 wearing and tearing of snap close seat because of friction, and still have loosening phenomenon to produce after making upper cover body 21 and lower cover 22 cover, also can not produce static because of excessive friction and damage light shield.
Above-described box for photomask 2 can be light shield and transmits box or light shield conserving case.
The above is preferred embodiment of the present utility model only, is not in order to limit the right of applying for a patent of the present utility model; Simultaneously above description should be understood and be implemented for the special personage who knows the present technique field, so other does not break away from the equivalence of being finished under the spirit that the utility model discloses and change or modification, all should be included in the following claim.
Claims (10)
1, a kind of box for photomask, it comprises:
One upper cover body;
One lower cover in order to make up with this upper cover body, forms an inner space and can hold a light shield;
At least one snap close piece; And
At least one snap close seat;
It is characterized in that, the side that this upper cover body and this lower cover have at least one correspondence, and this snap close piece is located at the side of this upper cover body, is located at position that should snap close piece and the side of another lid has at least one lock buckling groove, and this snap close seat is fixedly arranged in this lock buckling groove.
2, box for photomask as claimed in claim 1 is characterized in that, this snap close seat is to be fixedly arranged in this lower cover in the mode that wraps into ejection formation.
3, box for photomask as claimed in claim 1 is characterized in that, this snap close seat is to be fixedly arranged in this lower cover in the mode that card is established.
4, box for photomask as claimed in claim 1 is characterized in that, the fastness to rubbing of this snap close seat material is higher than the fastness to rubbing of this lower cover material.
5, box for photomask as claimed in claim 1 is characterized in that, this snap close seat is a macromolecular material, and this macromolecular material is polyetheretherketone compounds or polyimide compounds.
6, box for photomask as claimed in claim 1 is characterized in that, this box for photomask is that light shield transmits box or light shield conserving case.
7, a kind of box for photomask is characterized in that, comprises:
One upper cover body;
One lower cover in order to make up with this upper cover body, forms an inner space and can hold a light shield;
At least one snap close piece; And
At least one snap close seat;
It is characterized in that, the side that this upper cover body and this lower cover have at least one correspondence, and this snap close piece is located at the side of this lower cover, is located at position that should snap close piece and the side of another lid has at least one lock buckling groove, and this snap close seat is fixedly arranged in this lock buckling groove.
8, box for photomask as claimed in claim 7 is characterized in that, this snap close seat is to be fixedly arranged in this upper cover body in the mode that wraps into ejection formation.
9, box for photomask as claimed in claim 7 is characterized in that, this snap close seat is to be fixedly arranged in this upper cover body in the mode that card is established.
10, box for photomask as claimed in claim 7 is characterized in that, this snap close seat is a macromolecular material, and this macromolecular material is polyetheretherketone compounds or polyimide compounds.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201896613U CN201352302Y (en) | 2008-03-24 | 2008-03-24 | Photomask box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201896613U CN201352302Y (en) | 2008-03-24 | 2008-03-24 | Photomask box |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200084948U Division CN201236018Y (en) | 2008-03-24 | 2008-03-24 | Light shield box and limitation member thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201352302Y true CN201352302Y (en) | 2009-11-25 |
Family
ID=41375689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201896613U Expired - Lifetime CN201352302Y (en) | 2008-03-24 | 2008-03-24 | Photomask box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201352302Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108107672A (en) * | 2016-11-25 | 2018-06-01 | 上海微电子装备（集团）股份有限公司 | A kind of mask version box |
| CN111290215A (en) * | 2018-12-06 | 2020-06-16 | 家登精密工业股份有限公司 | Light shield container |
| TWI755795B (en) * | 2020-07-23 | 2022-02-21 | 家登精密工業股份有限公司 | Reticle Cassette with Guides |
-
2008
- 2008-03-24 CN CNU2008201896613U patent/CN201352302Y/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108107672A (en) * | 2016-11-25 | 2018-06-01 | 上海微电子装备（集团）股份有限公司 | A kind of mask version box |
| US10908497B2 (en) | 2016-11-25 | 2021-02-02 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Mask box |
| CN108107672B (en) * | 2016-11-25 | 2021-03-02 | 上海微电子装备（集团）股份有限公司 | Mask plate box |
| CN111290215A (en) * | 2018-12-06 | 2020-06-16 | 家登精密工业股份有限公司 | Light shield container |
| TWI755795B (en) * | 2020-07-23 | 2022-02-21 | 家登精密工業股份有限公司 | Reticle Cassette with Guides |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20091125 |