CN214311285U - High-performance photomask box - Google Patents

Abstract

The utility model discloses a high-performance mask box, which comprises a mask box and a supporting table, wherein the supporting table is fixedly connected at the bottom end inside the mask box by the middle position, a connecting shaft is fixedly connected at one side of the top part of the mask box, the surface of the connecting shaft is fixedly connected with an upper cover body, a first stopper is fixedly arranged on the inner wall of the mask box near the connecting shaft, a slider is slidably connected at one side inside the mask box, and the damage, collision and friction of the mask box to the mask are reduced by the arrangement of the first stopper, the fixture block and the lug, when the mask is placed in the mask box, two adjacent first stoppers and second stoppers on the inner wall of the mask box are respectively attached to two adjacent surfaces of the mask so as to position the mask, the utility model discloses the displacement of the mask in the front and back and left and right directions is limited, thereby effectively improving the moving condition of the mask in the transportation process, the protection effect is increased.

Description

High-performance photomask box

Technical Field

The utility model belongs to the technical field of the photomask box is relevant, concretely relates to high performance photomask box.

Background

Photomask, in the process of making IC, using photolithography technique to form a pattern on a semiconductor, the principle of the photomask must be used to copy the pattern on a wafer, similar to developing a photo, using a negative to copy the image on the photo, which is also known as a photomask, a mask, and the material: quartz glass, metal chromium and photosensitive resist, the product is by the quartz glass as the substrate, plate a layer of metal chromium and photosensitive resist on it, become a kind of photosensitive material, expose the circuit figure that has already been designed on the photosensitive resist through the electronic laser equipment, the area exposed will be developed out, form the circuit figure on the metal chromium, become the photo-mask plate similar to negative after exposing, then apply to carry on the projection positioning to the integrated circuit, carry on the photo-etching to the projected circuit through the integrated circuit photoetching machine, its production and processing process is: the exposure, development, photoresist removal, and final application to photolithography, because any dust particles (such as particles, dust, or organic matter) attached to the mask will cause the quality degradation of the projection image, and the mask used to generate the pattern must be kept absolutely clean, in the general silicon wafer process, a clean room environment is provided to avoid particle contamination in the air, however, the current clean room can not reach an absolutely clean state, and the modern semiconductor process utilizes a contamination-resistant mask box to store and transport the mask to keep the mask clean.

The prior art has the following problems: when the existing photomask box is used for fixing the photomask, a gap exists between the clamping block and the photomask, so that the photomask moves in the conveying process, the photomask and the photomask box are collided and rubbed, the photomask is damaged, the protection effect is poor, and the photomask box is not beneficial to use.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a high performance light cover box to solve the current light cover box that proposes in the above-mentioned background art and when fixing the light cover, there is the clearance between fixture block and the light cover, make the light cover take place to remove transporting the in-process, lead to light cover and light cover box to receive collision and friction, thereby form the damage to the light cover, the protection effect is not good, is unfavorable for the problem of use.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a high performance light hood box, includes light hood box and brace table, the inside bottom of light hood box leans on intermediate position department fixedly connected with brace table, top one side fixedly connected with connecting axle of light hood box, the fixed surface of connecting axle is connected with the upper cover body, go up the surface of cover and seted up flutedly, the surface of recess leans on intermediate position department fixedly connected with lug, the inner wall of light hood box is close to connecting axle fixed mounting and has first stopper, inside one side sliding connection of light hood box has the slider, one side of slider leans on bottom fixedly connected with backup pad, the one end fixedly connected with second stopper of slider is kept away from to the inside of light hood box.

Preferably, the upper surface of backup pad fixed mounting has the locating piece, the spout has been seted up to one side of locating piece, the one end fixed mounting of locating piece has the baffle, the inner wall sliding connection of spout has the fixed block, one side fixed mounting of fixed block has the fixture block, the opposite side of fixed block leans on intermediate position department fixed mounting to have the fixed column.

Preferably, the surface of the fixed column is provided with threads, a limit groove is formed in one end of the fixed column, and one end of the fixed column penetrates through the photomask box.

Preferably, the light shield box and the upper cover body are fixedly connected through a connecting shaft, and the fixing block and the positioning block are connected in a sliding mode through a sliding groove.

Preferably, a positioning groove is formed in one side of the inside of the mask box, the sliding block is connected with the positioning groove in a sliding mode, a through hole is formed in one side of the outside of the mask box, and one end of the fixing column penetrates through the mask box through the through hole.

Compared with the prior art, the utility model provides a high performance light shield box possesses following beneficial effect:

the utility model discloses a first stopper, the setting of fixture block and lug, reduced the damage that the photomask box produced the photomask, collision and friction, place in the photomask box when the photomask, two adjacent first stoppers of photomask box inner wall and second stopper laminate with two adjacent faces of photomask respectively, thereby fix a position the photomask, two other adjacent inner walls of photomask box are through wrench movement spacing groove, make the fixed block slide at spout inner wall, when the surperficial laminating photomask of fixture block, stop wrench movement spacing groove, realize pressing from both sides tight photomask, the upper surface laminating of lug and photomask, the utility model discloses make the photomask displacement about in the front and back all restricted, effectively improved the light shield and in the produced removal condition of transportation, reduced collision and friction between light shield and the photomask box, increased the protection effect, improved the practicality of device.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description, do not constitute a limitation of the invention, in which:

fig. 1 is a schematic structural view of a high performance mask box according to the present invention;

fig. 2 is a top view of a high performance mask box according to the present invention;

FIG. 3 is a partial enlarged view of the point A in the drawing of the present invention;

in the figure: 1. a slider; 2. a mask box; 3. positioning blocks; 4. a first stopper; 5. a support plate; 6. a support table; 7. a fixed block; 8. fixing a column; 9. a second limiting block; 10. a limiting groove; 11. a thread; 12. a clamping block; 13. a chute; 14. a baffle plate; 15. an upper cover body; 16. a bump; 17. a groove; 18. and (7) connecting the shafts.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: a high-performance mask box comprises a mask box 2 and a support table 6, wherein the support table 6 is fixedly connected to the bottom end inside the mask box 2 near the middle position, one side of the top of the mask box 2 is fixedly connected with a connecting shaft 18, the connecting shaft 18 is provided with two connecting shafts 18, the two connecting shafts 18 are symmetrically arranged about the mask box 2, the surface of the connecting shaft 18 is fixedly connected with an upper cover body 15, the mask box 2 and the upper cover body 15 are fixedly connected through the connecting shaft 18, the surface of the upper cover body 15 is provided with a groove 17, the surface of the groove 17 is fixedly connected with a lug 16 near the middle position, the inner wall of the mask box 2 near the connecting shaft 18 is fixedly provided with a first limit block 4, one side inside the mask box 2 is slidably connected with a slide block 1, one side of the slide block 1 near the bottom is fixedly connected with a support plate 5, one end, far away from the slide block 1, inside the mask box 2 is fixedly connected with a second limit block 9, one side inside the mask box 2 is provided with a positioning groove, the slide block 1 is connected with the positioning groove in a sliding way,

fixed surface installs locating piece 3 on backup pad 5, locating piece 3 is provided with four, per two locating pieces 3 are a set of, and every locating piece 3 of group sets up about backup pad 5 symmetry, spout 13 has been seted up to one side of locating piece 3, spout 13 is provided with two, and two spout 13 set up about locating piece 3 symmetry, the one end fixed mounting of locating piece 3 has baffle 14, spout 13's inner wall sliding connection has fixed block 7, fixed block 7 and locating piece 3 pass through spout 13 sliding connection, one side fixed mounting of fixed block 7 has fixture block 12, the opposite side of fixed block 7 leans on intermediate position department fixed mounting to have fixed column 8, the surface of fixed column 8 is provided with screw thread 11, spacing groove 10 has been seted up to fixed column 8's one end, the through-hole has been seted up to outside one side of photomask box 2, and the one end of fixed column 8 runs through in photomask box 2 through the through-hole.

The utility model discloses a theory of operation and use flow:

during the use, place the light shield at the upper surface of brace table 6, two adjacent first stopper 4 of 2 inner walls of light shield box and second stopper 9 are perpendicular to the surface of brace table 6 respectively, make two adjacent faces of light shield coincide in first stopper 4 and second stopper 9 respectively, thereby fix a position the light shield, two other adjacent inner walls of light shield box fixed mounting respectively have backup pad 5, fixture block 12 through backup pad 5 upper surface sliding connection fixes two adjacent faces of light shield position, through wrench movement spacing groove 10, make fixed column 8 move inside light shield box 2, thereby drive fixed block 7 and slide at spout 13 inner wall, when the surperficial laminating light shield of fixture block 12, stop wrench movement spacing groove 10, realize pressing from both sides tight light shield, close upper cover body 15, make the inside fixed mounting's of upper cover body 15 lug 16 laminate at the upper surface of light shield.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (5)

1. A high performance reticle box, includes reticle box (2) and brace table (6), its characterized in that: the inside bottom of light cover box (2) leans on intermediate position department fixedly connected with brace table (6), top one side fixedly connected with connecting axle (18) of light cover box (2), lid (15) on the fixed surface of connecting axle (18) is connected with, go up the surface of lid (15) and set up fluted (17), the surface of recess (17) leans on intermediate position department fixedly connected with lug (16), the inner wall of light cover box (2) is close to connecting axle (18) fixed mounting and has first stopper (4), inside one side sliding connection of light cover box (2) has slider (1), one side of slider (1) leans on bottom fixedly connected with backup pad (5), the inside of light cover box (2) is kept away from the one end fixedly connected with second stopper (9) of slider (1).

2. A high performance reticle pod according to claim 1, wherein: the utility model discloses a fixing device for fixing a car seat, including backup pad (5), upper surface fixed mounting has locating piece (3), spout (13) have been seted up to one side of locating piece (3), the one end fixed mounting of locating piece (3) has baffle (14), the inner wall sliding connection of spout (13) has fixed block (7), one side fixed mounting of fixed block (7) has fixture block (12), the opposite side of fixed block (7) leans on intermediate position department fixed mounting to have fixed column (8).

3. A high performance reticle pod according to claim 2, wherein: the surface of the fixed column (8) is provided with a thread (11), one end of the fixed column (8) is provided with a limit groove (10), and one end of the fixed column (8) penetrates through the photomask box (2).

4. A high performance reticle pod according to claim 2, wherein: the light shield box (2) is fixedly connected with the upper cover body (15) through a connecting shaft (18), and the fixing block (7) is connected with the positioning block (3) in a sliding mode through a sliding groove (13).

5. A high performance reticle pod according to claim 3, wherein: the locating groove is formed in one side of the inside of the light cover box (2), the sliding block (1) is connected with the locating groove in a sliding mode, the through hole is formed in one side of the outside of the light cover box (2), and one end of the fixing column (8) penetrates through the light cover box (2) through the through hole.

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